A clamping device for quantitatively and fully measuring the surface morphology of a hemispherical resonator and its use method

Abstract

The present invention provides a clamping device and a method for using the surface morphology of a hemispherical resonator for quantitative and full-range measurement, and belongs to the field of ultra-precision manufacturing technology. In order to solve the problem that the existing hemispherical resonator clamping device is not suitable for surface quality detection, cannot be turned over and expose the entire outer surface in conjunction with the detection, and affects the quality evaluation. It includes a workpiece fixing module for fixing the hemispherical resonator, a circumferential rotation module for adjusting the circumferential angle of the hemispherical resonator, a plane adjustment module for rotating the hemispherical resonator in the horizontal direction, and a radial rotation module for adjusting the radial angle of the hemispherical resonator. It can achieve quantitative and full-range surface morphology measurement of the outer sphere of the hemispherical resonator, can make the hemispherical resonator rotate or turn at a specific angle, so that the outer sphere is fully exposed in the measurement field of view, and can perform precise angle adjustment under the premise of convenient operation and easy use, which can perfectly cooperate with the surface quality measurement of the hemispherical resonator.

Description

Technical Field

[0001] The present invention relates to the field of ultra-precision manufacturing technology, and in particular to a clamping device for quantitatively and fully measuring the surface morphology of a hemispherical resonator and a method for using the device. Background Art

[0002] As a high-precision gyroscope, the hemispherical resonator gyroscope (HRG) boasts numerous advantages, including shock and radiation resistance, compact size, light weight, low energy consumption, high reliability, and a long operating life. It has been successfully applied in defense and military applications, communications satellites, manned spaceflight, astronomical observation, and marine engineering. To achieve high-performance HRGs, the HRG, the core component, requires a shift in manufacturing philosophy from prioritizing geometrical requirements to one focused on performance.

[0003] Research by domestic and foreign scholars has shown that the surface quality of a hemispherical resonator has a significant impact on its energy loss. Since the hemispherical resonator is made of fused quartz and has support rods inside and outside its spherical shell, it is a typical hard and brittle material special-shaped structural part. Measuring its surface morphology requires the design of a special clamping device. Existing clamping devices are generally used to test the shape and position errors, service performance, and surface morphology of a certain angle of the hemispherical resonator. The shape and position errors usually include: coaxiality error between variable-section support rods, coaxiality error between inner and outer shells and support rods, radial concentricity error and axial concentricity error of inner and outer shells. Service performance usually includes: quality factor and frequency splitting. The common feature of such clamping devices is that they can only meet the parameters of a specific angle of the test resonator, and cannot meet the quantitative and full-range measurement of its geometric parameters for high-performance manufacturing of hemispherical resonators. This will cause detection errors, affect the evaluation of its quality, and lead to serious energy loss. Summary of the Invention

[0004] The technical problems to be solved by the present invention are:

[0005] In order to solve the problem that the existing hemispherical resonator clamping device is not suitable for surface quality inspection, cannot be turned over and expose the entire outer surface during inspection, and affects quality evaluation.

[0006] The present invention is to solve the above technical problems using the following technical solutions:

[0007] The present invention provides a clamping device for quantitatively and fully measuring the surface topography of a hemispherical resonator, comprising a workpiece fixing module, a circumferential rotation module, a plane adjustment module, and a radial rotation module.

[0008] The workpiece fixing module is used to fix the hemispherical resonator;

[0009] The circumferential rotation module is used to rotate the fixed hemispherical resonator circumferentially around the central axis;

[0010] The workpiece fixing module and the circumferential rotation module are both arranged on the plane adjustment module, and the plane adjustment module is used to rotate the hemispherical resonator capable of circumferential rotation within a plane;

[0011] The plane adjustment module is arranged on the radial rotation module, and the radial rotation module is used to radially rotate the hemispherical resonator that can rotate circumferentially and in plane.

[0012] Furthermore, the workpiece fixing module includes a first fixed support and a second fixed support, and the relative positions of the first fixed support and the second fixed support are provided with support rod fixing holes, the support rod fixing hole of the first fixed support is provided with an inner support rod support ring, the inner support rod of the hemispherical resonator is used to be inserted into the inner support rod support ring to play the role of keeping the inner support rod and the outer support rod at the same height, a retaining ring is provided on the outer side of the inner support rod support ring, a needle bearing is provided in the support rod fixing hole of the second fixed support, an outer support rod support ring is provided in the needle bearing, the outer support rod of the hemispherical resonator is used to be inserted into the outer support rod support ring, and also includes a fixed shaft sleeve, one end of the fixed shaft sleeve is connected to the outer support rod support ring, and the other end of the fixed shaft sleeve is provided with a fixed shaft sleeve connector for connecting to the circumferential rotation module.

[0013] Furthermore, the circumferential rotation module includes a stepper motor, a stepper motor connector and a coupling, the output end of the stepper motor is connected to the stepper motor connector, the stepper motor connector is connected to the coupling, and the coupling is used to connect to the fixed shaft sleeve connector; when the hemispherical resonator is rotating circumferentially, the stepper motor connector, the coupling, the fixed shaft sleeve connector, the fixed shaft sleeve, and the outer support rod support ring are driven to rotate in sequence by the stepper motor, thereby driving the hemispherical resonator to rotate.

[0014] Furthermore, the plane adjustment module includes a circumferential rotating plate, a sliding groove is provided on the circumferential rotating plate, the first fixed support can be fixed to the circumferential rotating plate through a first fixed base, the second fixed support can be fixed to the circumferential rotating plate through a second fixed base, the stepping motor can be fixed to the circumferential rotating plate through a stepping motor fixed base plate, a first fixed base slider with a shape matching the shape of the sliding groove is provided under the first fixed base, and a second fixed base slider with a shape matching the shape of the sliding groove is provided under the second fixed base, which is used for installing or removing the hemispherical resonator by moving the first fixed base slider left and right along the sliding groove, thereby installing or removing the hemispherical resonator;

[0015] A cylindrical mounting groove is provided at the bottom of the circumferential rotating plate, which is used to connect with the cylindrical mounting block on the upper surface of the radial rotating semi-disc in the radial rotating module. At least one mounting limit hole is provided on the side of the circumferential rotating plate, and the mounting limit hole connects the outside of the circumferential rotating plate and the inside of the mounting groove, and is used to pass a fastener through the mounting limit hole and then fasten it to the mounting block.

[0016] Furthermore, the radial rotation module includes a radially rotating semi-circular disc, a semi-circular transmission worm gear, a transmission worm, a transmission worm bracket, a radial angle adjustment knob and a radial rotating base, and the radial rotating base is used to be set on a test platform, and the outer wall of the radially rotating semi-circular disc is provided with a semi-circular transmission worm gear arranged along the circumference of its curved surface, the semi-circular transmission worm gear is meshed with the transmission worm, the transmission worm is limited by the transmission worm bracket, and the transmission worm bracket is fixed on the radial rotating base, one end of the transmission worm is connected to the radial angle adjustment knob, and the radial angle adjustment knob passes through the radial rotating base and the transmission worm bracket and is exposed outside the radial rotating base, a sliding groove is provided on the curved surface of the radially rotating semi-circular disc, and a sliding rail is provided on the radial rotating base at a position relative to the sliding groove, which is used to drive the transmission worm by rotating the radial angle adjustment knob, and then drive the radially rotating semi-circular disc with the semi-circular transmission worm gear meshed with the transmission worm to rotate radially.

[0017] Furthermore, the shape of the end of the outer support rod matches the shape of the outer support rod support ring. When the hemispherical resonator rotates, the inner support rod and the outer support rod and the outer support rod support ring all rotate simultaneously.

[0018] Furthermore, the outer support rod support ring is an elastic outer support rod support ring, which is convenient for fixing the outer support rod of the hemispherical resonator.

[0019] Furthermore, the circumferentially rotating plate is provided with semicircular bosses on both sides of the middle along the length direction, and the semicircular bosses are provided with angle scales. The scale in the middle of the semicircular boss is 0° and increases uniformly along the outside. The upper surface of the radially rotating semicircular disk is provided with two aiming lines and both are located on the outside of the semicircular boss. In the initial state, the aiming lines on both sides are aligned with the 0° scale.

[0020] Furthermore, an angle scale is also provided on the outer surface of the radial rotation base outside the radial angle adjustment knob for reading the radial rotation scale.

[0021] A method for using a clamping device for quantitatively and fully measuring the surface morphology of a hemispherical resonator comprises the following steps:

[0022] Step 1: Install the hemispherical resonator. Remove the bolts that secure the first fixed base to the circumferential rotating plate. Move the first fixed support away from the second fixed support. Insert the inner support rod of the hemispherical resonator into the inner support rod support ring. Move the first fixed support back to the outer support rod and insert it into the outer support rod support ring. Install the bolts that secure the first fixed base to the circumferential rotating plate.

[0023] Step 2: Adjust the angle of the hemispherical resonator. By setting the rotation angle of the stepper motor, the hemispherical resonator rotates about its central axis, thereby adjusting the circumferential angle of the hemispherical resonator. Loosen the fastening bolts, adjust the circumferential rotation plate, and select the circumferential rotation angle according to the angle scale. Adjust the radial angle of the hemispherical resonator by rotating the radial angle adjustment knob.

[0024] Compared with the prior art, the present invention has the following beneficial effects:

[0025] The present invention discloses a clamping device for quantitatively and fully measuring the surface topography of a hemispherical resonator and a method for using the clamping device. The clamping device comprises a workpiece fixing module for fixing the hemispherical resonator, a circumferential rotation module for adjusting the circumferential angle of the hemispherical resonator, a plane adjustment module for rotating the hemispherical resonator horizontally, and a radial rotation module for adjusting the radial angle of the hemispherical resonator.

[0026] The present invention provides a clamping device for quantitatively and fully measuring the surface topography of a hemispherical resonator and a method for using the device. According to experimental measurement requirements, the circumferential angle of the measured resonator can be set by a plane adjustment module, and the radial angle of the measured resonator can be set by a radial rotation module, thereby achieving quantitative and full-range surface topography measurement of the outer spherical surface of the hemispherical resonator. After further data processing and analysis, optical images, three-dimensional images, surface roughness (Ra value), and surface shape accuracy (PV value) information of the outer spherical surface of the resonator can be obtained.

[0027] The present invention provides a clamping device and a method for using the surface topography of a hemispherical resonator for quantitative and full-range measurement. The device realizes the rotation or flipping of the hemispherical resonator at a specific angle, so that the entire outer spherical surface is exposed within the measurement field of view. Precise angle adjustment is performed while being convenient and easy to use, and the device can perfectly cooperate with the surface quality measurement of the hemispherical resonator. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 A three-dimensional clamping device for quantitatively and fully measuring the surface morphology of a hemispherical resonator according to an embodiment of the present invention Figure 1 ;

[0029] Figure 2 A three-dimensional clamping device for quantitatively and fully measuring the surface morphology of a hemispherical resonator according to an embodiment of the present invention Figure 2 ;

[0030] Figure 3A three-dimensional diagram of a workpiece fixing module and a circumferential rotation module in an embodiment of the present invention;

[0031] Figure 4 A perspective view of a plane adjustment module and a radial rotation module in an embodiment of the present invention;

[0032] Figure 5 A structural diagram of a hemispherical resonator according to an embodiment of the present invention;

[0033] Figure 6 A three-dimensional diagram of a workpiece fixing module according to an embodiment of the present invention;

[0034] Figure 7 is a three-dimensional diagram of a circumferential rotation module according to an embodiment of the present invention;

[0035] Figure 8 is a three-dimensional diagram of a plane adjustment module according to an embodiment of the present invention;

[0036] Figure 9 The three-dimensional structure of the radial rotation module in the embodiment of the present invention is shown in FIG. Figure 1 ;

[0037] Figure 10 The structure of the radial rotation module in the embodiment of the present invention Figure 2 .

[0038] Description of reference numerals:

[0039] 1. Hemispherical resonator; 2. Workpiece fixing module; 3. Circumferential rotation module; 4. Plane adjustment module; 5. Radial rotation module; 6. Inner support rod; 7. Hemisphere; 8. Outer support rod; 9. First fixed support; 10. Retaining ring; 11. Inner support rod support ring; 12. Key; 13. Second fixed support; 14. Needle roller bearing; 15. Outer support rod support ring; 16. Fixed shaft sleeve; 17. Fixed shaft sleeve connector; 18. Coupling; 19. Stepper motor connector; 20. Stepper motor; 21. Stepper motor fixed base plate; 22. Circumferential rotation plate; 23. First fixed base slider; 24. Second fixed base slider; 25. Radial rotating semicircular disk; 26. Rotating guide rail; 27. Semicircular transmission worm gear; 28. Transmission worm; 29. ​​Transmission worm bracket; 30. Radial angle adjustment knob; 31. Radial angle fixing screw; 32. Radial rotating base. DETAILED DESCRIPTION

[0040] In the description of the present invention, it should be noted that the terminology in each embodiment, such as "up", "down", "front", "back", "left", "right", etc., which indicate directions, are only for simplifying the description of the positional relationship based on the drawings in the specification, and do not mean that the referred elements and devices must be operated in accordance with the specific directions and defined operations and methods and structures in the specification. Such directional nouns do not constitute a limitation to the present invention.

[0041] In describing the present invention, it should be noted that the terms "first" and "second" in the embodiments of the present invention are used for descriptive purposes only and are not to be understood as indicating or implying relative importance or implicitly specifying the number of the technical features indicated. Therefore, features specified as "first" or "second" may explicitly or implicitly include one or more of such features.

[0042] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, specific embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0043] Specific implementation plan 1: Combined Figures 1 to 10 As shown, the present invention provides a clamping device for quantitatively and fully measuring the surface morphology of a hemispherical resonator, comprising a workpiece fixing module 2, a circumferential rotation module 3, a plane adjustment module 4 and a radial rotation module 5.

[0044] The workpiece fixing module 2 is used to fix the hemispherical resonator 1;

[0045] The circumferential rotation module 3 is used to rotate the hemispherical body 7 of the fixed hemispherical resonator 1 circumferentially around the central axis;

[0046] The workpiece fixing module 2 and the circumferential rotation module 3 are both arranged on a plane adjustment module 4, and the plane adjustment module 4 is used to rotate the hemispherical resonator 1 that can rotate circumferentially in a plane;

[0047] The plane adjustment module 4 is arranged on the radial rotation module 5 , and the radial rotation module 5 is used to radially rotate the hemispherical resonator 1 that can rotate circumferentially and in plane.

[0048] Specific implementation plan 2: Combined Figures 1 to 3 and Figure 6As shown, the workpiece fixing module 2 includes a first fixed support 9 and a second fixed support 13, and the relative positions of the first fixed support 9 and the second fixed support 13 are both provided with support rod fixing holes, and the support rod fixing hole of the first fixed support 9 is provided with an inner support rod support ring 11, and the inner support rod 6 of the hemispherical resonator 1 is used to be inserted into the inner support rod support ring 11 and plays the role of placing the inner support rod 6 and the outer support rod 8 at the same height, and the outer side of the inner support rod support ring 11 is provided with a retaining ring 10, and the support rod fixing hole of the second fixed support 13 is provided with a needle bearing 14, and the needle bearing 14 is provided with an outer support rod support ring 15, and the outer support rod 8 of the hemispherical resonator 1 is used to be inserted into the outer support rod support ring 15, and also includes a fixed sleeve 16, one end of the fixed sleeve 16 is connected to the outer support rod support ring 15, and the other end of the fixed sleeve 16 is provided with a fixed sleeve connector 17 for connecting to the circumferential rotation module 3. The other combinations and connection relationships of this embodiment are the same as those of the specific embodiment one.

[0049] Preferably, a key 12 is also included, which is used to limit the inner support rod support ring 11 in the support rod fixing hole to prevent the inner support rod support ring 11 from rotating in the support rod fixing hole when the inner support rod 6 rotates in the inner support rod support ring 11.

[0050] Preferably, the inner ring cross-section of the inner support rod support ring 11 is an inverted triangle at the bottom and a semicircle at the top, and the diameter of the semicircle is larger than the diameter of the inner support rod 6, which is used to adapt to hemispherical resonators 1 of different sizes. The inner support rod 6 is only clamped in the hemisphere or the inverted triangle below the hemisphere, and does not rotate with the inner support rod 6. The shape of the end of the outer support rod 8 matches the shape of the outer support rod support ring 15. When the hemispherical resonator 1 rotates, the inner support rod 6, the outer support rod 8 and the outer support rod support ring 15 all rotate at the same time.

[0051] Specific implementation plan three: combined Figures 1 to 3 and Figure 7 As shown, the circumferential rotation module 3 includes a stepper motor 20, a stepper motor connector 19 and a coupling 18. The output end of the stepper motor 20 is connected to the stepper motor connector 19, and the stepper motor connector 19 is connected to the coupling 18. The coupling 18 is used to connect to the fixed sleeve connector 17. When the hemispherical resonator 1 is circumferentially rotated, the stepper motor connector 19, the coupling 18, the fixed sleeve connector 17, the fixed sleeve 16, and the outer support rod support ring 15 are driven to rotate in sequence by the stepper motor 20, thereby driving the hemispherical resonator 1 to rotate. The circumferential angle of the measured resonator can be set by the stepper motor in the plane adjustment module 4. The other combinations and connection relationships of this embodiment are the same as those of the specific embodiment 2.

[0052] Preferably, the outer support rod support ring 15 is an elastic outer support rod support ring, which is convenient for fixing the outer support rod 8 of the hemispherical resonator 1 .

[0053] Preferably, the outer end of the fixed sleeve connector 17 is provided with a socket matching the end connection portion of the coupling 18 , which is used to drive the fixed sleeve connector 17 through the coupling 18 and then drive the fixed sleeve 16 to rotate.

[0054] Specific implementation plan four: combined Figure 1 、 Figure 2 、 Figure 4 and Figure 7 As shown, the plane adjustment module 4 includes a circumferential rotating plate 22, and a slide groove is provided on the circumferential rotating plate 22. The first fixed support 9 can be fixed to the circumferential rotating plate 22 through a first fixed base, and the second fixed support 13 can be fixed to the circumferential rotating plate 22 through a second fixed base. The stepping motor 20 can be fixed to the circumferential rotating plate 22 through a stepping motor fixed base plate 21. A first fixed base slider 23 with a shape matching the shape of the slide groove is provided under the first fixed base, and a second fixed base slider 24 with a shape matching the shape of the slide groove is provided under the second fixed base, which is used for installing or removing the hemispherical resonator 1 by moving the first fixed base slider 23 left and right along the slide groove, thereby installing or removing the hemispherical resonator 1;

[0055] A cylindrical mounting groove is defined below the circumferentially rotating plate 22 for connection to the cylindrical mounting block on the upper surface of the radially rotating semi-disc 25 within the radially rotating module 5. At least one mounting stopper hole is defined on the side of the circumferentially rotating plate 22, connecting the exterior of the circumferentially rotating plate 22 with the interior of the mounting groove. A fastener is passed through the mounting stopper hole and secured to the mounting block to prevent rotation of the circumferentially rotating plate 22. When rotation of the circumferentially rotating plate 22 is desired, the fastener is released to allow the circumferentially rotating plate 22 to rotate. Other combinations and connection relationships of this embodiment are the same as those of the third embodiment.

[0056] Preferably, the circumferentially rotating plate 22 is provided with semicircular bosses on both sides of the middle portion along its length. Angle scales are provided on the semicircular bosses. The scale at the middle of the semicircular bosses is 0° and increases uniformly along the outer sides. The upper surface of the radially rotating semicircular disc 25 is provided with two aiming lines, both located outside the semicircular bosses. In the initial state, the aiming lines on both sides are aligned with the 0° scale, making it easier to read the angle of circumferential rotation.

[0057] Preferably, the first fixed base and the first fixed base slider 23 and the circumferential rotating plate 22, the second fixed base and the second fixed base slider 24 and the circumferential rotating plate 22, the first stepper motor base and the circumferential rotating plate 22 can all be fixed by bolts.

[0058] Preferably, the fastener may be a fastening bolt.

[0059] Preferably, the slide groove may be a dovetail groove.

[0060] Specific implementation plan five: combined Figure 1 、 Figure 2 、 Figure 4 、 Figure 9 and Figure 10 As shown, the radial rotation module 5 includes a radial rotating semi-circular disc 25, a rotating guide rail 26, a semi-circular transmission worm gear 27, a transmission worm 28, a transmission worm bracket 29, a radial angle adjustment knob 30, a radial angle fixing screw 31 and a radial rotating base 32, wherein the radial rotating base 32 is used to be set on the test platform, the radial rotating semi-circular disc 25 is provided with a rotating guide rail 26, and a semi-circular slider arranged on the radial rotating base 32 is clamped in the rotating guide rail 26 for limiting the rotation trajectory of the radial rotating semi-circular disc 25, and a semi-circular transmission worm gear 27 arranged along the circumference of its curved surface is provided on the outer wall of the radial rotating semi-circular disc 25, the semi-circular transmission worm gear 27 is meshed with the transmission worm 28, the transmission worm 28 is limited by the transmission worm bracket 29, and the transmission worm bracket 29 is fixed on the radial rotating base 32, one end of the transmission worm 28 is fixed to the radial angle adjustment knob 30, and the radial angle fixing screw 31 is fixed to the radial rotating base 32. The radial angle adjustment knob 30 is connected to the radial rotating base 32 and the transmission worm bracket 29 and is exposed outside the radial rotating base 32. The curved surface of the radial rotating semi-circular disc 25 is provided with a slide groove, and the radial rotating base 32 is provided with a slide rail at a position opposite to the slide groove. The radial angle adjustment knob 30 is used to drive the transmission worm 28 by rotating the radial angle adjustment knob 30, thereby driving the radial rotating semi-circular disc 25 with the semi-circular transmission worm gear 27 engaged with the transmission worm 28 to rotate radially. The radial angle fixing screw 31 is used to lock the transmission worm 28 after passing through the side wall of the radial rotating base 32. When the radial rotating semi-circular disc 25 is adjusted to a specified angle by the radial angle adjustment knob 30, the radial angle fixing screw 31 is screwed in to lock the transmission worm 28 so that the corresponding angle remains unchanged. When further adjustment of the angle is required, the radial angle fixing screw 31 is unscrewed and the radial angle adjustment knob 30 is adjusted again. The other combinations and connection relationships of this embodiment are the same as those of the specific embodiment four.

[0061] Specific implementation plan six: combination Figures 1 to 10 As shown, the present invention provides a method for using a clamping device for quantitatively and fully measuring the surface morphology of a hemispherical resonator, comprising the following steps:

[0062] Step 1: Install the hemispherical resonator 1. Remove the bolts that secure the first fixed base to the circumferential rotating plate 22. Move the first fixed support 9 away from the second fixed support 13. Insert the inner support rod 6 of the hemispherical resonator 1 into the inner support rod support ring 11. Move the first fixed support 9 back to the outer support rod 8 and insert it into the outer support rod support ring 15. Install the bolts that secure the first fixed base to the circumferential rotating plate 22.

[0063] Step 2: Adjust the angle of the hemispherical resonator 1. By setting the rotation angle of the stepping motor 20, the hemispherical resonator 1 rotates about its central axis, thereby adjusting the circumferential angle of the hemispherical resonator 1. Loosen the fastening bolts, adjust the circumferential rotation plate 22, and select the circumferential rotation angle according to the angle scale. Adjust the radial angle of the hemispherical resonator 1 by rotating the radial angle adjustment knob 30. After adjustment, screw in the radial angle fixing screw 31 to fix the radial angle. The other combinations and connection relationships of this embodiment are the same as those of the first, second, third, fourth, or fifth embodiments.

[0064] Although the present invention is disclosed as above, the scope of protection disclosed by the present invention is not limited thereto. Those skilled in the art of the present invention may make various changes and modifications without departing from the spirit and scope of the present invention, and these changes and modifications will fall within the scope of protection of the present invention.

Claims

1. A clamping device for quantitative and full-range measurement of the surface morphology of a hemispherical resonator, characterized by: It includes a workpiece fixing module (2), a circumferential rotation module (3), a plane adjustment module (4) and a radial rotation module (5), The workpiece fixing module (2) is used to fix the hemispherical resonator (1); The circumferential rotation module (3) is used to cause the fixed hemispherical resonator (1) to rotate circumferentially around the central axis; The workpiece fixing module (2) and the circumferential rotation module (3) are both arranged on a plane adjustment module (4), and the plane adjustment module (4) is used to rotate the circumferentially rotatable hemispherical resonator (1) within a plane; The plane adjustment module (4) is arranged on a radial rotation module (5), and the radial rotation module (5) is used to radially rotate the hemispherical resonator (1) that can rotate circumferentially and in plane; The workpiece fixing module (2) comprises a first fixing support (9) and a second fixing support (13), wherein the relative positions of the first fixing support (9) and the second fixing support (13) are both provided with support rod fixing holes, an inner support rod support ring (11) is provided in the support rod fixing hole of the first fixing support (9), and the inner support rod (6) of the hemispherical resonator (1) is used to be inserted into the inner support rod support ring (11) to play the role of placing the inner support rod (6) and the outer support rod (8) at the same height, and the outer support rod support ring (11) is provided with an inner support rod support ring (11). A retaining ring (10) is provided on the side, a needle bearing (14) is provided in the support rod fixing hole of the second fixed support (13), an outer support rod support ring (15) is provided in the needle bearing (14), the outer support rod (8) of the hemispherical resonator (1) is used to be inserted into the outer support rod support ring (15), and also includes a fixed sleeve (16), one end of the fixed sleeve (16) is connected to the outer support rod support ring (15), and the other end of the fixed sleeve (16) is provided with a fixed sleeve connector (17) for connecting to the circumferential rotation module (3); The circumferential rotation module (3) comprises a stepper motor (20), a stepper motor connector (19) and a coupling (18), wherein the output end of the stepper motor (20) is connected to the stepper motor connector (19), the stepper motor connector (19) is connected to the coupling (18), and the coupling (18) is used to be connected to the fixed shaft sleeve connector (17); when the hemispherical resonator (1) is circumferentially rotated, the stepper motor connector (19), the coupling (18), the fixed shaft sleeve connector (17), the fixed shaft sleeve (16), and the outer support rod support ring (15) are driven to rotate in sequence by the stepper motor (20), thereby driving the hemispherical resonator (1) to rotate; The plane adjustment module (4) includes a circumferential rotating plate (22), a sliding groove is provided on the circumferential rotating plate (22), the first fixed support (9) can be fixed on the circumferential rotating plate (22) through a first fixed base, the second fixed support (13) can be fixed on the circumferential rotating plate (22) through a second fixed base, the stepping motor (20) can be fixed on the circumferential rotating plate (22) through a stepping motor fixed base (21), a first fixed base slider (23) having a shape matching the shape of the sliding groove is provided under the first fixed base, and a second fixed base slider (24) having a shape matching the shape of the sliding groove is provided under the second fixed base, and is used for moving the first fixed base slider (23) left and right along the sliding groove when installing or removing the hemispherical resonator (1), thereby installing or removing the hemispherical resonator (1); A cylindrical mounting groove is provided below the circumferential rotating plate (22) for connecting to a cylindrical mounting block on the upper surface of the radial rotating semi-disc in the radial rotating module (5). At least one mounting limit hole is provided on the side of the circumferential rotating plate (22), and the mounting limit hole connects the outside of the circumferential rotating plate (22) and the inside of the mounting groove, and is used to fasten the circumferential rotating plate (22) to the mounting block after a fastener passes through the mounting limit hole.

2. The device for quantitatively and fully measuring the surface topography of a hemispherical resonator according to claim 1, characterized in that: The radial rotation module (5) comprises a radial rotation semicircular disc (25), a semicircular transmission worm wheel (27), a transmission worm (28), a transmission worm support (29), a radial angle adjustment knob (30) and a radial rotation base (32). The radial rotation base (32) is used to be arranged on a test platform. A semicircular transmission worm wheel (27) arranged along the circumference of the curved surface of the radial rotation semicircular disc (25) is provided on the outer wall of the radial rotation semicircular disc (25). The semicircular transmission worm wheel (27) is meshedly connected with the transmission worm (28). The transmission worm (28) is limited by the transmission worm support (29), and the transmission worm support (29) is fixed on the radial rotation base. On the seat (32), one end of the transmission worm (28) is connected to the radial angle adjustment knob (30), and the radial angle adjustment knob (30) penetrates the radial rotating base (32) and the transmission worm bracket (29) and is exposed outside the radial rotating base (32). The curved surface of the radial rotating semi-circular disc (25) is provided with a slide groove, and the radial rotating base (32) is provided with a slide rail at a position relative to the slide groove, which is used to drive the transmission worm (28) by rotating the radial angle adjustment knob (30), thereby driving the radial rotating semi-circular disc (25) with a semi-circular transmission worm wheel (27) meshed with the transmission worm (28) to rotate radially.

3. The device for quantitatively and fully measuring the surface topography of a hemispherical resonator according to claim 2, characterized in that: The shape of the end of the outer support rod (8) matches the shape of the outer support rod support ring (15), and when the hemispherical resonator (1) rotates, the inner support rod (6), the outer support rod (8) and the outer support rod support ring (15) all rotate simultaneously.

4. The device for quantitatively and fully measuring the surface topography of a hemispherical resonator according to claim 3, characterized in that: The outer support rod support ring (15) is an elastic outer support rod support ring, which is convenient for fixing the outer support rod (8) of the hemispherical resonator (1).

5. The device for quantitatively and fully measuring the surface topography of a hemispherical resonator according to claim 4, characterized in that: The circumferential rotating plate (22) is provided with semicircular bosses on both sides of the middle portion along the length direction, and the semicircular bosses are provided with angle scales, the scale at the middle portion of the semicircular bosses is 0° and increases uniformly along the outer side, and the upper surface of the radially rotating semicircular disk (25) is provided with two aiming lines and both are located outside the semicircular bosses, and in the initial state, the aiming lines on both sides are aligned with the 0° scale.

6. The device for quantitatively and fully measuring the surface topography of a hemispherical resonator according to claim 5, characterized in that: An angle scale is also provided on the outer surface of the radial rotation base (32) located outside the radial angle adjustment knob (30) for reading the radial rotation scale.

7. A method for using the fixture for quantitatively and fully measuring the surface topography of a hemispherical resonator according to any one of claims 1 to 6, characterized in that: The following steps are involved: Step 1: Install the hemispherical resonator (1), remove the bolts fixing the first fixed base and the circumferential rotating plate (22), move the first fixed support (9) in a direction away from the second fixed support (13), insert the inner support rod (6) of the hemispherical resonator (1) into the inner support rod support ring (11), move the first fixed support (9) back to the outer support rod (8) and insert it into the outer support rod support ring (15), and install the bolts fixing the first fixed base and the circumferential rotating plate (22); Step 2: Adjust the angle of the hemispherical resonator (1). By setting the rotation angle of the stepping motor (20), the hemispherical resonator (1) is rotated about its central axis, thereby adjusting the circumferential angle of the hemispherical resonator (1); loosen the fastening bolts, adjust the circumferential rotation plate (22), and select the circumferential rotation angle according to the angle scale; and adjust the radial angle of the hemispherical resonator (1) by rotating the radial angle adjustment knob (30).

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