Method for improving bonding accuracy of a stick bonding machine

Abstract

This invention provides a method for improving the bonding accuracy of a rod bonding machine, comprising: calibrating the center point of a phototube so that the rays emitted by the phototube pass through the center of a standard crystal rod; mounting the standard crystal rod onto a crystal axis and repeating the measurement multiple times to verify the stability of the phototube; sequentially calibrating the horizontal error of the bottom axis, the gap error of the bottom axis, the zero-position error of the bottom and back axes, the zero-position error of the crystal axis and the back axis, and the center position of the suction cup, and adjusting the positional relationship of the corresponding components based on the calibration results. With this configuration, by calibrating the matching accuracy of each hardware component of the rod bonding machine, the deviation of the zero position of each hardware component can be quickly located, and then corresponding adjustments can be made so that the crystal orientation is closer to the target value and the fluctuation is smaller during crystal rod bonding. With the assistance of appropriate operational details, the crystal orientation of the bonded crystal rod meets the requirement of ±0.05°.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing, and in particular to a method for improving the bonding accuracy of a stick bonding machine. Background Technology

[0002] With the continuous development of the semiconductor industry, silicon wafer manufacturing is gradually shifting from low-end wafer fabrication to high-end wafer fabrication. Among these changes, the requirements for controlling the crystal orientation deviation of wafers are becoming increasingly stringent. Mainstream 8-inch and 12-inch high-end silicon wafers require the crystal orientation deviation after dicing to be controlled within ±0.1°. However, the existing bonding technology can only meet the bonding requirement of ±0.15°, and the diced wafers, due to the influence of wire cutting, exhibit greater fluctuations, thus failing to meet the crystal orientation deviation requirements after dicing. Summary of the Invention

[0003] The purpose of this invention is to provide a method for improving the bonding accuracy of a rod bonding machine, so as to solve the problem that current rod bonding technology cannot meet the requirements of crystal orientation deviation.

[0004] To achieve the above objectives, the present invention provides a method for improving the bonding accuracy of a stick bonding machine, comprising:

[0005] The center point of the optical tube is calibrated so that the rays emitted by the optical tube pass through the center of the standard crystal rod;

[0006] The standard crystal rod was mounted on the crystal axis and the measurement was repeated multiple times to verify the stability of the optical tube;

[0007] The horizontal error of the bottom axis, the gap error of the bottom axis, the zero position error of the bottom axis and the back axis, the zero position error of the crystal axis and the back axis, and the center position of the chuck are calibrated in sequence, and the positional relationship of the corresponding components is adjusted based on the calibration results.

[0008] Optionally, the calibration light tube center point includes:

[0009] The fluorescent plate is attached to the center of the standard crystal rod so that the center of the fluorescent plate is coaxial with the center of the standard crystal rod.

[0010] Turn on the light tube and observe whether the rays emitted by the light tube pass through the center of the standard crystal rod;

[0011] Rotate the light tube to a first preset position and observe whether the rays emitted by the light tube pass through the center of the standard crystal rod;

[0012] If both measurements pass through the center of the standard crystal rod, the position of the optical tube is confirmed to be normal; if either measurement does not pass through the center of the standard crystal rod, the angle of the optical tube is adjusted until both measurements pass through the center of the standard crystal rod.

[0013] Optionally, verifying the stability of the optical tube includes:

[0014] The standard crystal rod is mounted on the crystal axis, and the crystal orientation value of the standard crystal rod is measured repeatedly;

[0015] If the error of the crystal orientation value measured multiple times is within the first preset range, then the stability of the optical tube meets the requirements; if the error of the crystal orientation value measured multiple times is outside the first preset range, then the optical tube is replaced until the requirements are met.

[0016] Optionally, the horizontal error of the calibration bottom axis includes:

[0017] The flatness error of the bottom surface shaft in the horizontal direction was measured using testing equipment;

[0018] If the flatness error is within the second preset range, then the horizontal error of the bottom shaft meets the requirements; if the flatness error is outside the second preset range, then adjust the adjusting component of the bottom shaft or clean the bottom shaft until the horizontal error of the bottom shaft meets the requirements.

[0019] Optionally, the clearance error of the calibration bottom shaft includes:

[0020] The standard crystal rod is placed on the bottom surface axis, and the bottom surface axis is adjusted to the initial position. The horizontal crystal orientation value of the standard crystal rod is measured and used as the initial value.

[0021] The bottom axis is rotated sequentially to a plurality of second preset positions and then returned to the initial position. The horizontal crystal orientation value of the standard crystal rod is measured sequentially as the measured value.

[0022] Calculate the error between the measured value and the initial value;

[0023] If the error is within the third preset range, the bottom shaft meets the requirements; if the error is within the fourth preset range, it is used based on the condition of the bottom shaft; if the error is outside the fourth preset range, the bottom shaft and its related components are replaced.

[0024] The fourth preset range includes the third preset range.

[0025] Optionally, the calibration of the zero-position error of the bottom and back shafts includes:

[0026] The standard crystal rod is placed on the bottom surface of the shaft with the notch facing upwards, and the measurement steps are performed.

[0027] The measurement steps include:

[0028] The standard crystal rod is positioned using a positioning tool;

[0029] The back axis is rotated sequentially to multiple third preset positions, and multiple first crystal orientation values ​​to be calibrated are measured at each of the third preset positions.

[0030] Then, with the notch facing down, the measurement steps are repeated to obtain multiple second crystal orientation values ​​to be calibrated;

[0031] The first and second crystal orientation values ​​to be calibrated are compared with the standard crystal orientation values ​​to obtain the zero-position error of the bottom axis and the back axis.

[0032] Optionally, the zero-position error of the bottom axis and the back axis includes horizontal error and vertical error, the third preset position includes a first position and a second position located on the same horizontal plane, and a third position that is perpendicular to the first position and the second position respectively, and the standard crystal orientation value includes a first standard crystal orientation value and a second standard crystal orientation value.

[0033] The step of comparing the first crystal orientation value to be calibrated and the second crystal orientation value to the first standard crystal orientation value and the second standard crystal orientation value includes:

[0034] The average value of multiple first crystal direction values ​​to be calibrated at the first position and the average value of multiple first crystal direction values ​​to be calibrated at the second position, or the average value of multiple second crystal direction values ​​to be calibrated at the first position and the average value of multiple second crystal direction values ​​to be calibrated at the second position, are compared with the second standard crystal direction value to obtain the vertical crystal direction value error.

[0035] If the vertical crystal orientation error is within the fifth preset range, then the vertical error meets the requirements; if the vertical crystal orientation error is outside the fifth preset range, then adjust the zero position of the back axis and / or adjust the pitch angle of the back axis until the vertical error meets the requirements.

[0036] Optionally, comparing the first crystal orientation value to be calibrated and the second crystal orientation value to be calibrated with the first standard crystal orientation value and the second standard crystal orientation value further includes:

[0037] The average value of the multiple first crystal orientation values ​​to be calibrated at the third position and the average value of the multiple second crystal orientation values ​​to be calibrated at the third position are compared with the first standard crystal orientation value to obtain the horizontal crystal orientation value error.

[0038] If the horizontal crystal orientation error is within the sixth preset range, then the horizontal error meets the requirements; if the horizontal crystal orientation error is outside the sixth preset range, adjust the zero angle of the bottom axis until the horizontal error meets the requirements.

[0039] Optionally, the zero-position error of the calibration crystal axis and back axis includes:

[0040] The standard crystal rod is placed on the crystal axis with the notch facing upwards, and the measurement steps are performed.

[0041] The measurement steps include:

[0042] The standard crystal rod is positioned using a positioning tool;

[0043] The back axis is rotated sequentially to multiple fourth preset positions, and multiple third crystal orientation values ​​to be calibrated are measured at each of the fourth preset positions.

[0044] Then, with the notch facing down, the measurement steps are repeated to obtain multiple fourth crystal orientation values ​​to be calibrated;

[0045] If the average value of the plurality of third crystal orientation values ​​to be calibrated and the average value of the plurality of fourth crystal orientation values ​​to be calibrated at each of the fourth preset positions are both within the seventh preset range, then the calibration is completed; otherwise, adjust the adjusting member of the crystal axis until the requirements are met.

[0046] Optionally, the center position of the calibration suction cup includes:

[0047] The suction cup is attached to the center of the standard crystal rod, and the position of the suction cup is adjusted so that the measurement error of the suction cup at each position is within an eighth preset range.

[0048] Optionally, the method for improving the bonding accuracy of the adhesive stick machine further includes:

[0049] The flatness of the tooling is measured, and the tooling is repaired based on the measurement results so that the measurement results are within the ninth preset range.

[0050] In summary, the method for improving the bonding accuracy of a stick bonding machine proposed in this invention includes: calibrating the center point of the optical tube so that the rays emitted by the optical tube pass through the center of the standard crystal rod; mounting the standard crystal rod onto the crystal axis and repeating the measurement multiple times to verify the stability of the optical tube; sequentially calibrating the horizontal error of the bottom axis, the gap error of the bottom axis, the zero-position error of the bottom axis and the back axis, the zero-position error of the crystal axis and the back axis, and the center position of the suction cup, and adjusting the positional relationship of the corresponding components based on the calibration results.

[0051] With this configuration, by calibrating the coordination accuracy of each hardware component of the bonding machine, the deviation of the zero position of each hardware component can be quickly located, and then corresponding adjustments can be made so that the crystal orientation is closer to the target value and the fluctuation is smaller when bonding the crystal rod. With the help of corresponding operational details, the crystal orientation of the bonded crystal rod meets the requirement of ±0.05°. Attached Figure Description

[0052] Figure 1 A flowchart of a method for improving the bonding accuracy of a stick-on machine provided in an embodiment of the present invention;

[0053] Figure 2 This is a schematic diagram of the center point of the calibration optical tube provided in an embodiment of the present invention;

[0054] Figure 3 A schematic diagram illustrating the clearance error of the bottom shaft as provided in an embodiment of the present invention;

[0055] Figure 4 A schematic diagram illustrating the zero-position error of the calibration crystal axis and back axis provided in an embodiment of the present invention;

[0056] The explanations of the reference numerals in the accompanying drawings are as follows:

[0057] 1-Standard crystal rod; 2-Bottom shaft; 3-Fluorescent plate; 4-V-groove; 5-Emitting light tube; 6-Receiving light tube; 7-Roller; 8-Adjusting screw. Detailed Implementation

[0058] To make the objectives, advantages, and features of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be noted that the drawings are all in a very simplified form and are not drawn to scale, and are only used to facilitate and clarify the explanation of the embodiments of this invention. Furthermore, the structures shown in the drawings are often part of the actual structures. In particular, different figures may emphasize different aspects and may sometimes use different scales.

[0059] As used herein, the singular forms “a,” “an,” and “the” include plural objects; the term “or” is generally used to mean “and / or”; the term “a number” is generally used to mean “at least one”; and the term “at least two” is generally used to mean “two or more”. Furthermore, the terms “first,” “second,” and “third” are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as “first,” “second,” or “third” may explicitly or implicitly include one or at least two of that feature. “One end” and “the other end,” as well as “proximal end” and “distal end,” generally refer to two corresponding parts, including not only endpoints. The terms “installed,” “connected,” and “joined” should be interpreted broadly; for example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two elements or the interaction between two elements. Furthermore, as used in this specification, the phrase "one element is disposed on another element" generally only indicates that there is a connection, coupling, cooperation, or transmission relationship between the two elements, and the connection, coupling, cooperation, or transmission between the two elements can be direct or indirect through intermediate elements. It should not be construed as indicating or implying a spatial positional relationship between the two elements, i.e., one element can be located arbitrarily inside, outside, above, below, or to the side of another element, unless otherwise explicitly stated. The terms "above," "below," "top," and "bottom" generally refer to relative positional relationships arranged according to the direction of gravity; the terms "vertical" or "perpendicular direction" generally refer to the direction of gravity, which is generally perpendicular to the ground; "horizontal" or "horizontal plane direction" generally refers to a direction parallel to the ground. Those skilled in the art can understand the specific meaning of the above terms in this specification according to the specific circumstances.

[0060] The purpose of this invention is to provide a method for improving the bonding accuracy of a rod bonding machine, so as to solve the problem that current rod bonding technology cannot meet the requirements of crystal orientation deviation.

[0061] As will be understood by those skilled in the art, in an optional embodiment, the bottom shaft is a structural component for clamping and placing the workpiece plate during crystal rod bonding. It can move along the vertical and horizontal directions via a track, and can also rotate around an axis parallel to the track. It is used to convey the crystal rod to the crystal shaft. The crystal shaft is a related structural component for supporting and adjusting the rollers. It is perpendicular to the bottom shaft and is used to support the crystal rod. The back shaft is a structural component for controlling the X-ray emitting tube and receiving tube. It can change the angle of the emitting tube and receiving tube by adjusting its own vertical tilt angle. The back shaft is located on the back of the bottom shaft and the crystal shaft. During the bonding of crystal rods using a bonding machine, the fitting accuracy of the various hardware structures of the bonding machine has certain errors due to factors such as component aging. For example, there are horizontal errors of the bottom shaft, gap errors of the bottom shaft, zero-position errors between the bottom shaft and the back shaft, and zero-position errors between the crystal shaft and the back shaft. These errors will affect the bonding accuracy of the crystal rod. It should be noted that the zero positions of the bottom axis, back axis, and crystal axis represent the error between the crystal orientation value obtained from measuring the standard crystal rod and the given standard value when the bottom axis, back axis, and crystal axis are at their respective zero positions, within a preset range. Based on this, the present invention provides a method for improving the bonding accuracy of a bonding machine, used to calibrate the fitting accuracy of various hardware structures of the bonding machine, quickly locate the deviation of the zero positions of each hardware structure, and make corresponding adjustments, thereby improving the bonding accuracy of the bonding machine and ensuring that the crystal orientation value of the bonded crystal rod meets the requirements.

[0062] Please refer to Figures 1 to 4 This invention provides a method for improving the bonding accuracy of a stick-on machine, comprising:

[0063] Step S1: Calibrate the center point of the optical tube so that the rays emitted by the optical tube pass through the center of the standard crystal rod 1;

[0064] Step S2: Install the standard crystal rod 1 onto the crystal axis and repeat the measurement multiple times to verify the stability of the optical tube;

[0065] Step S3: Sequentially calibrate the horizontal error of the bottom shaft 2, the gap error of the bottom shaft 2, the zero position error of the bottom shaft 2 and the back shaft, the zero position error of the crystal shaft and the back shaft, and the center position of the chuck, and adjust the positional relationship of the corresponding components based on the calibration results.

[0066] As will be understood by those skilled in the art, the standard crystal rod 1 includes a first surface and a second surface. The first surface has a first standard crystal orientation value along a first direction and a second standard crystal orientation value along a second direction. The second surface has a first axis line along the first direction and a second axis line along the second direction, with the first direction perpendicular to the second direction. In this embodiment, the first direction is horizontal and the second direction is vertical. The first standard crystal orientation value is the horizontal standard crystal orientation value, and the second standard crystal orientation value is the vertical standard crystal orientation value. The first and second standard crystal orientation values ​​can be obtained by a third-party organization. The first axis line is horizontal and passes through the center point of the standard crystal rod 1, and the second axis line is vertical and connects the notch position and the center point of the standard crystal rod 1. When calibrating the zero-position error of the bottom axis 2 and the back axis (not shown in the figure) and the zero-position error of the crystal axis (not shown in the figure) and the back axis, it is necessary to consider both the horizontal and vertical directions. Of course, in some other embodiments, the first direction can be a direction at a certain angle to the horizontal direction, and the second direction can also be a direction at a certain angle to the vertical direction. Those skilled in the art can configure the first and second directions according to the actual situation.

[0067] With this configuration, by calibrating the coordination accuracy of each hardware component of the bonding machine, the deviation of the zero position of each hardware component can be quickly located, and then corresponding adjustments can be made so that the crystal orientation is closer to the target value and the fluctuation is smaller when bonding the crystal rod. With the help of corresponding operational details, the crystal orientation of the bonded crystal rod meets the requirement of ±0.05°.

[0068] Please refer to Figure 2 As an optional embodiment, calibrating the center point of the optical tube includes:

[0069] Step S1-1: Place the fluorescent plate 3 at the center of the standard crystal rod 1 so that the center of the fluorescent plate 3 is coaxial with the center of the standard crystal rod 1;

[0070] Step S1-2: Turn on the light tube and observe whether the rays emitted by the light tube pass through the center of the standard crystal rod 1;

[0071] Step S1-3: Rotate the light tube to the first preset position and observe whether the rays emitted by the light tube pass through the center of the standard crystal rod 1;

[0072] Step S1-4: If both measurements pass through the center of the standard crystal rod 1, then the position of the optical tube is confirmed to be normal; if either measurement does not pass through the center of the standard crystal rod 1, then adjust the angle of the optical tube until both measurements pass through the center of the standard crystal rod 1.

[0073] It should be noted that when calibrating the center point of the optical tube, the standard crystal rod 1 is usually placed on the crystal axis. The optical tube includes an emitting tube and a receiving tube. X-rays are emitted from the emitting tube, pass through the center point of the standard crystal rod 1, are refracted, and are received by the receiving optical tube 6, forming an optical path. In this embodiment, the optical tube is first turned on, and it is observed whether the optical path passes through the center point of the standard crystal rod 1. Then, the optical tube is rotated 90° (first preset position), and it is observed whether the optical path passes through the center point of the standard crystal rod 1. The setting of the fluorescent plate 3 makes the optical path more clearly visible, reduces the difficulty of observation, and improves the calibration rate of calibrating the center point of the optical tube. In some other embodiments, the first preset position can also be other reasonable positions.

[0074] In an optional embodiment, verifying the stability of the light pipe includes:

[0075] Step S2-1: Install the standard crystal rod 1 onto the crystal axis and repeatedly measure the crystal orientation value of the standard crystal rod 1;

[0076] Step S2-2: If the error of the crystal orientation value measured multiple times is within the first preset range, then the stability of the optical tube meets the requirements; if the error of the crystal orientation value measured multiple times is outside the first preset range, then replace the optical tube until the requirements are met.

[0077] It should be noted that, in this embodiment, a roller 7 is provided on the crystal axis (e.g., ...). Figure 4 As shown, place the standard crystal rod 1 on the roller 7 without making any movement, neither adjusting the crystal axis nor the back axis, and repeat the measurement ten times. If the error of the ten measurement results is within ±30″ (the first preset range), the stability of the optical tube is considered qualified; otherwise, it is unqualified, and the optical tube needs to be replaced and the center point of the optical tube recalibrated. In some other embodiments, the first preset range can also be adjusted according to actual requirements, and this embodiment is not limited to this.

[0078] In some embodiments, calibrating the horizontal error of the bottom shaft 2 includes:

[0079] Step S3-1: Measure the flatness error of the bottom shaft 2 in the horizontal direction using a testing device;

[0080] Step S3-2: If the flatness error is within the second preset range, then the horizontal error of the bottom shaft 2 meets the requirements; if the flatness error is outside the second preset range, then adjust the adjusting parts of the bottom shaft 2, or clean the bottom shaft 2, until the horizontal error of the bottom shaft 2 meets the requirements.

[0081] It should be noted that in this embodiment, the detection device is a spirit level. However, in other embodiments, the detection device can be any other device capable of detecting horizontal flatness. The spirit level is used to measure the horizontal flatness of the bottom shaft 2. If necessary, the lifting screws of the bottom shaft 2 are adjusted. The removable plate on the bottom shaft 2 is checked, cleaned, or replaced to ensure that the flatness of the bottom shaft 2 meets the requirement of ≤0.05mm (the second preset range). When replacing, ensure thorough cleaning and apply a small amount of grease for rust prevention. This configuration, by calibrating the horizontal error of the bottom shaft 2, allows for the determination of the wear condition of the bottom shaft 2, while also reducing the error in the crystal orientation measurement results in the vertical direction. In other embodiments, the second preset range can also be other reasonable values, which can be adjusted according to different accuracy requirements.

[0082] Please refer to Figure 3 The clearance error of the bottom shaft 2 is calibrated, including:

[0083] Step S3-3: Place the standard crystal rod 1 on the bottom axis 2 and adjust the bottom axis 2 to the initial position. Measure the horizontal crystal orientation value of the standard crystal rod 1 as the initial value.

[0084] Step S3-4: Rotate the bottom shaft 2 to multiple second preset positions in sequence, then return to the initial position, and measure the horizontal crystal orientation value of the standard crystal rod 1 in sequence as the measured value;

[0085] Step S3-5: Calculate the error between the measured value and the initial value;

[0086] Step S3-6: If the error is within the third preset range, the bottom shaft 2 meets the requirements; if the error is within the fourth preset range, it is used based on the condition of the bottom shaft 2; if the error is outside the fourth preset range, the bottom shaft 2 and its related components are replaced.

[0087] The fourth preset range includes the third preset range.

[0088] It should be noted that the clearance of the bottom shaft 2 refers to the offset angle measured each time the same crystal rod is rotated back to the zero position from different angles. The purpose of this calibration step is to rotate the bottom shaft 2 and the standard crystal rod 1 by a motor, and to control the rotation angle of the bottom shaft 2 by an encoder, measuring whether the standard crystal rod 1 follows the bottom shaft 2 at the same angle. In this embodiment, the standard crystal rod 1 is placed on the V-groove 4 of the bottom shaft 2 (the V-groove 4 is the component for placing the standard crystal rod 1 for machine adjustment), the bottom shaft 2 is returned to the zero position, and the crystal orientation α in the horizontal direction is measured as the initial value; then the bottom shaft 2 is rotated ±1°, ±2°, and ±3° (second preset position) in sequence and returned to the zero position, and the crystal orientation in the horizontal direction is measured again, and recorded as α respectively. i The error is α. i-α; if α i If -α ≤ ±30″ (third preset range), it indicates that the bottom shaft 2 is in good working condition; if ±30″ ≤ α i If -α ≤ ±60″ (fourth preset range), it can be used according to the actual situation; if ±60″ ≤ α i If -α is not achieved, then the relevant hardware of the bottom shaft 2 needs to be replaced. Of course, in other embodiments, the second preset position, the third preset range, and the fourth preset range can also be other reasonable values, which can be adjusted according to the actual situation.

[0089] In an optional embodiment, calibrating the zero-position error of the bottom shaft 2 and the back shaft includes:

[0090] Step S3-7: Place the standard crystal rod 1 on the bottom shaft 2 with the notch of the standard crystal rod 1 facing upwards, and perform the measurement steps;

[0091] The measurement steps include:

[0092] Step S3-8: Position the standard crystal rod 1 using a positioning tool;

[0093] Step S3-9: Rotate the back axis sequentially to multiple third preset positions, and at each third preset position, measure multiple first crystal orientation values ​​to be calibrated;

[0094] Step S3-10: Then set the standard crystal rod 1 with the notch facing down, repeat the measurement steps, and obtain multiple second crystal orientation values ​​to be calibrated;

[0095] Step S3-11: Compare the first crystal orientation value to be calibrated and the second crystal orientation value to the first standard crystal orientation value and the second standard crystal orientation value to obtain the zero position error of the bottom axis 2 and the back axis.

[0096] It should be noted that, as an optional embodiment, the V-groove 4 is first placed on the bottom shaft 2, and then the standard crystal rod 1 is placed on the V-groove 4 with the notch of the standard crystal rod 1 facing upwards. A standard right-angle ruler is used to position the second side of the standard crystal rod 1 so that its second axis (i.e., the vertical line) coincides with the standard right-angle ruler. The emission angle of the emitting light tube 5 on the back shaft is adjusted to 0°, 90°, and 180° (the third preset position). Three data points are measured for each angle to obtain three sets of nine first crystal orientation values ​​to be calibrated. Then, the notch of the standard crystal rod 1 is placed downwards, and the same method is used to measure three sets of nine second crystal orientation values ​​to be calibrated again. In this embodiment, the positioning of the standard crystal rod 1 is accomplished using a standard right-angle ruler. In other embodiments, the positioning tool and the third preset position can be other reasonable tools or values, and those skilled in the art can configure them according to the actual situation.

[0097] Furthermore, the zero-position error of the bottom shaft 2 and the back shaft includes horizontal error and vertical error, and the third preset position includes a first position and a second position located on the same horizontal plane, as well as a third position that is perpendicular to the first position and the second position respectively.

[0098] The first and second crystal orientation values ​​to be calibrated are compared with the first and second standard crystal orientation values, including:

[0099] Step S3-11-1: Compare the average value of multiple first crystal direction values ​​to be calibrated at the first position and the average value of multiple first crystal direction values ​​to be calibrated at the second position, or the average value of multiple second crystal direction values ​​to be calibrated at the first position and the average value of multiple second crystal direction values ​​to be calibrated at the second position, respectively, with the second standard crystal direction value to obtain the vertical crystal direction value error.

[0100] Step S3-11-2: If the vertical crystal orientation error is within the fifth preset range, the vertical error meets the requirements; if the vertical crystal orientation error is outside the fifth preset range, adjust the zero position of the back axis and / or adjust the pitch angle of the back axis until the vertical error meets the requirements.

[0101] It should be noted that, in an optional embodiment, the first position and the second position are the positions of 0° and 180° rotation of the back axis, respectively; the third position is the position of 90° rotation of the back axis; when the notch of the standard crystal rod 1 is set upward, the first position is denoted as A, and the corresponding first crystal orientation value to be calibrated is denoted as Ai; the second position is denoted as B, and the corresponding first crystal orientation value to be calibrated is denoted as Bi; the third position is denoted as C, and the corresponding first crystal orientation value to be calibrated is denoted as Ci; when the notch of the standard crystal rod 1 is set downward, the first position is denoted as D, and the corresponding second crystal orientation value to be calibrated is denoted as Di; the second position is denoted as E, and the corresponding second crystal orientation value to be calibrated is denoted as Ei; the third position is denoted as F, and the corresponding second crystal orientation value to be calibrated is denoted as Fi. During the calibration of the vertical error of the bottom axis 2 and the back axis, the average value of the first crystal direction to be calibrated at point A, Avg(Ai), and the average value of the first crystal direction to be calibrated at point B, Avg(Bi), are compared with the second standard crystal direction value. If the error is ≤ ±30″ (the fifth preset range), no adjustment is made; if the error is > ±30″, and one is > +30″ and the other is < -30″, the zero position of the back axis is adjusted so that Avg(Ai) and Avg(Bi) are opposites and their absolute values ​​are ≤ 30″; if the error is ≤ ±30″, the vertical zero position error calibration of the bottom axis 2 and the back axis is completed; otherwise, the pitch angle of the back axis (the pitch angle is the angle of vertical tilt of the back axis) is adjusted until the requirements are met. In some embodiments, the step of adjusting the pitch angle includes: preparing several feeler gauges of 0.01mm to 0.05mm, slightly loosening the fastening screws of the back axis base, placing the feeler gauges under the base, and moving the feeler gauges back and forth. As will be understood by those skilled in the art, when adjusting the pitch angle, the absolute values ​​of Avg(Ai) and Avg(Bi) generally increase or decrease simultaneously. In some other embodiments, points D and E can also be selected, and the corresponding average values ​​become Avg(Di) and Avg(Ei). The fifth preset range can also be other reasonable values.

[0102] Furthermore, comparing the first and second crystal orientation values ​​to be calibrated with the first and second standard crystal orientation values ​​also includes:

[0103] Step S3-11-3: Compare the average value of multiple first crystal orientation values ​​to be calibrated at the third position and the average value of multiple second crystal orientation values ​​to be calibrated at the third position with the first standard crystal orientation value to obtain the horizontal crystal orientation value error.

[0104] Step S3-11-4: If the horizontal crystal orientation error is within the sixth preset range, the horizontal error meets the requirements; if the horizontal crystal orientation error is outside the sixth preset range, adjust the zero point angle of the bottom axis 2 until the horizontal error meets the requirements.

[0105] It should be noted that during the calibration of the horizontal error of the bottom axis 2 and the back axis, the average value Avg(Ci) of the first crystal direction to be calibrated at point C and the average value Avg(Fi) of the second crystal direction to be calibrated at point F are compared with the first standard crystal direction value. If the error is ≤ ±30″ (sixth preset range), no adjustment is made; if the error is > ±30″, the zero angle of the bottom axis 2 is adjusted until the horizontal error meets the requirements. In other embodiments, the sixth preset range can also be other reasonable values, and those skilled in the art can configure it reasonably according to the actual situation.

[0106] In another alternative embodiment, please refer to Figure 4 The zero-point error of the crystal axis and back axis is calibrated, including:

[0107] Step S3-12: Place the standard crystal rod 1 on the crystal axis with the notch of the standard crystal rod 1 facing upwards, and perform the measurement steps;

[0108] The measurement steps include:

[0109] Step S3-13: Position the standard crystal rod 1 using a positioning tool;

[0110] Step S3-14: Rotate the back axis sequentially to multiple fourth preset positions, and at each fourth preset position, measure multiple third crystal orientation values ​​to be calibrated;

[0111] Step S3-15: Set the standard crystal rod 1 with the notch facing down, repeat the measurement steps, and obtain multiple fourth crystal orientation values ​​to be calibrated;

[0112] Step S3-16: If the average value of multiple third crystal orientation values ​​to be calibrated and the average value of multiple fourth crystal orientation values ​​to be calibrated at each fourth preset position are both within the seventh preset range, then the calibration is completed; otherwise, adjust the crystal axis adjustment component until the requirements are met.

[0113] It should be noted that in this embodiment, the standard crystal rod 1 is placed on the roller 7 of the crystal shaft. First, the notch of the crystal rod is set upwards. The second side of the standard crystal rod 1 is positioned using a standard right-angle ruler so that its second axis (i.e., the vertical line) coincides with the standard right-angle ruler. The emission angle of the light-emitting tube 5 on the back axis is adjusted to 0°, 90° and 180° (fourth preset position). Three data points are measured for each angle to obtain three sets of nine third crystal orientation values ​​to be calibrated. Then, the notch of the standard crystal rod 1 is set downwards, and the same method is used to measure three sets of nine fourth crystal orientation values ​​to be calibrated again. Accordingly, in an optional embodiment, the fourth preset position also includes a fourth position and a fifth position located on the same horizontal plane, and a sixth position perpendicular to the fourth position and the fifth position respectively. The fourth position and the fifth position are the positions of 0° and 180° rotation of the back axis, respectively; the sixth position is the position of 90° rotation of the back axis. When the notch of the standard crystal rod 1 is set upward, the fourth position is denoted as G, and the corresponding third crystal orientation value to be calibrated is denoted as Gi; the fifth position is denoted as H, and the corresponding third crystal orientation value to be calibrated is denoted as Hi; the sixth position is denoted as I, and the corresponding third crystal orientation value to be calibrated is denoted as Ii; when the notch of the standard crystal rod 1 is set downward, the fourth position is denoted as J, and the corresponding fourth crystal orientation value to be calibrated is denoted as Ji; the fifth position is denoted as K, and the corresponding fourth crystal orientation value to be calibrated is denoted as Ki; the sixth position is denoted as L, and the corresponding fourth crystal orientation value to be calibrated is denoted as Li. When calibrating the horizontal error between the crystal axis and the bottom axis 2, the average value of the third crystal direction to be calibrated at point I, Avg(Ii), and the average value of the fourth crystal direction to be calibrated at point L, Avg(Li), are compared with the first standard crystal direction value to obtain the horizontal error. When calibrating the vertical error between the crystal axis and the bottom axis 2, the average value of the third crystal direction to be calibrated at point G, the average value of the third crystal direction to be calibrated at point H, the average value of the fourth crystal direction to be calibrated at point J, and the average value of the fourth crystal direction to be calibrated at point K are compared with the first standard crystal direction value. The average value Avg(Ki) of the fourth crystal direction to be calibrated is compared with the second standard crystal direction value to obtain the vertical error. If both the horizontal and vertical errors are ≤ ±30″ (seventh preset range), the calibration is completed. If either is > ±30″, the adjusting screw 8 of the roller 7 is adjusted so that the roller 7 moves in both the horizontal and vertical directions. The horizontal direction affects the values ​​of Ii and Li, and the vertical direction affects the values ​​of Gi, Hi, Ji, and Ki. After each adjustment of the roller 7, it is confirmed that the roller 7 moves without jamming, and the measurement is repeated until the requirements are met. In some other embodiments, the seventh preset range can also be other reasonable values, which can be reasonably configured by those skilled in the art according to the actual situation.

[0114] In an optional embodiment, calibrating the center position of the suction cup includes:

[0115] Step S3-17: Attach the chuck to the center of the standard crystal rod 1 and adjust the position of the chuck so that the measurement error of the chuck at each position is within the eighth preset range.

[0116] As those skilled in the art will understand, the adjustment methods for different types of suction cups vary slightly, but the main purpose is to ensure that the suction cup is adsorbed at the center of the crystal rod. Otherwise, the inaccurate angle of the notch on the crystal rod will lead to a large bonding error. In this embodiment, the measurement error of the suction cup at each position needs to be controlled within ≤1mm (eighth preset range). In other embodiments, the eighth preset range can also be other reasonable values, and those skilled in the art can configure it reasonably according to the actual situation.

[0117] As an optional embodiment, the method for improving the bonding accuracy of the sticking machine further includes:

[0118] Step S4: Measure the flatness of the tooling and repair the tooling based on the measurement results so that the measurement results are within the ninth preset range.

[0119] It should be noted that, taking the material plate lug of the bottom shaft 2 as an example, when the material plate lug has a protrusion, the varying degrees of protrusion will greatly affect the fitting accuracy. After the material plate lug is repaired, its fit with the bottom shaft 2 reference is more precise, and the measurement fluctuation is smaller. In this embodiment, the measurement error of the workpiece plate needs to be controlled within ≤±0.3mm (the ninth preset range). In other embodiments, the ninth preset range can also be other reasonable values.

[0120] In summary, the method for improving the bonding accuracy of a sticking machine provided in the embodiments of the present invention includes:

[0121] The center point of the optical tube is calibrated so that the rays emitted by the optical tube pass through the center of the standard crystal rod; the standard crystal rod is installed on the crystal axis, and the measurement is repeated multiple times to verify the stability of the optical tube; the horizontal error of the bottom axis, the gap error of the bottom axis, the zero position error of the bottom axis and the back axis, the zero position error of the crystal axis and the back axis, and the center position of the chuck are calibrated in sequence, and the positional relationship of the corresponding components is adjusted based on the calibration results.

[0122] With this configuration, by calibrating the coordination accuracy of each hardware component of the bonding machine, the deviation of the zero position of each hardware component can be quickly located, and then corresponding adjustments can be made so that the crystal orientation is closer to the target value and the fluctuation is smaller when bonding the crystal rod. With the help of corresponding operational details, the crystal orientation of the bonded crystal rod meets the requirement of ±0.05°.

[0123] The above description is merely a description of preferred embodiments of the present invention and is not intended to limit the scope of the present invention in any way. Any changes or modifications made by those skilled in the art based on the above disclosure shall fall within the protection scope of the claims.

Claims

1. A method for improving the bonding accuracy of a stick-on machine, characterized in that, include: The center point of the light tube is calibrated so that the rays emitted by the light tube pass through the center of the standard crystal rod. The calibration of the light tube center point includes: attaching a fluorescent plate to the center of the standard crystal rod so that the center of the fluorescent plate is coaxial with the center of the standard crystal rod; turning on the light tube and observing whether the rays emitted by the light tube pass through the center of the standard crystal rod; rotating the light tube to a first preset position and observing whether the rays emitted by the light tube pass through the center of the standard crystal rod; if both measurements pass through the center of the standard crystal rod, then the position of the light tube is confirmed to be normal. The standard crystal rod is mounted on the crystal axis, and the measurement is repeated multiple times to verify the stability of the optical tube. The verification of the stability of the optical tube includes: mounting the standard crystal rod on the crystal axis and repeatedly measuring the crystal orientation value of the standard crystal rod; if the error of the crystal orientation value measured multiple times is within a first preset range, then the stability of the optical tube meets the requirements. The horizontal error of the bottom shaft, the clearance error of the bottom shaft, the zero-position error of the bottom and back shafts, the zero-position error of the crystal shaft and back shaft, and the center position of the suction cup are calibrated sequentially. Based on the calibration results, the positional relationship of the corresponding components is adjusted. The bottom shaft is a structural component for clamping and placing the workpiece plate during crystal rod bonding. It can move along the vertical and horizontal directions via the track, and can also rotate around an axis parallel to the track. It is used to transfer the crystal rod to the crystal shaft. The crystal shaft is a structural component for supporting and adjusting the rollers. It is perpendicular to the bottom shaft and is used to support the crystal rod. The back shaft is a structural component for controlling the X-ray emission tube and receiving tube. It can change the angle of the emission tube and receiving tube by adjusting its vertical tilt angle. The back shaft is set at... The back side of the bottom surface axis and the crystal axis; the calibration of the horizontal error of the bottom surface axis includes: measuring the flatness error of the bottom surface axis in the horizontal direction using a detection device; if the flatness error is within a second preset range, then the horizontal error of the bottom surface axis meets the requirements; the calibration of the gap error of the bottom surface axis includes: placing the standard crystal rod on the bottom surface axis and adjusting the bottom surface axis to the initial position, measuring the horizontal crystal orientation value of the standard crystal rod as the initial value; sequentially rotating the bottom surface axis to multiple second preset positions, then returning to the initial position, and sequentially measuring the horizontal crystal orientation value of the standard crystal rod as the measured value; calculating the error between the measured value and the initial value; if the error is within a third preset range, then the bottom surface axis meets the requirements; The face axis meets the requirements; the calibration of the zero-position error of the bottom face axis and the back face axis includes: placing the standard crystal rod on the bottom face axis with the notch of the standard crystal rod facing upward, and performing a first measurement step, the first measurement step including: positioning the standard crystal rod using a positioning tool; sequentially rotating the back face axis to multiple third preset positions, and measuring multiple first crystal orientation values ​​to be calibrated at each of the third preset positions; then setting the notch of the standard crystal rod downward, repeating the measurement step to obtain multiple second crystal orientation values ​​to be calibrated; comparing the first crystal orientation values ​​to be calibrated and the second crystal orientation values ​​to be calibrated with the standard crystal orientation values ​​to obtain the zero-position error of the bottom face axis and the back face axis; the calibration of the zero-position error of the crystal axis and the back face axis. The calibration process includes: placing the standard crystal rod on the crystal axis with the notch facing upwards, and performing a second measurement step, which includes: positioning the standard crystal rod using a positioning tool; sequentially rotating the back axis to multiple fourth preset positions, and measuring multiple third crystal orientation values ​​to be calibrated at each of the fourth preset positions; then setting the notch of the standard crystal rod downwards and repeating the measurement steps to obtain multiple fourth crystal orientation values ​​to be calibrated; if the average value of the multiple third crystal orientation values ​​to be calibrated and the average value of the multiple fourth crystal orientation values ​​to be calibrated at each of the fourth preset positions are both within a seventh preset range, then the calibration is completed; otherwise, the adjusting member of the crystal axis is adjusted until the requirements are met.The calibration of the chuck's center position includes: attaching the chuck to the center position of the standard crystal rod, and adjusting the position of the chuck so that the measurement error of the chuck at each position is within an eighth preset range.

2. The method for improving the bonding accuracy of a stick-on machine as described in claim 1, characterized in that, The center point of the calibration light tube also includes: If any measurement fails to pass through the center of the standard crystal rod, the angle of the optical tube is adjusted until both measurements pass through the center of the standard crystal rod.

3. The method for improving the bonding accuracy of a stick-on machine as described in claim 1, characterized in that, The verification of the stability of the optical tube also includes: If the error of the crystal orientation value measured multiple times is outside the first preset range, then the optical tube is replaced until the requirements are met.

4. The method for improving the bonding accuracy of a stick-on machine as described in claim 1, characterized in that, The horizontal error of the calibration bottom axis also includes: If the flatness error is outside the second preset range, adjust the adjusting component of the bottom shaft or clean the bottom shaft until the horizontal error of the bottom shaft meets the requirements.

5. The method for improving the bonding accuracy of a stick-on machine as described in claim 1, characterized in that, The clearance error of the calibration bottom shaft also includes: If the error is within the fourth preset range, the bottom shaft will be used based on its condition; if the error is outside the fourth preset range, the bottom shaft and its related components will be replaced. The fourth preset range includes the third preset range.

6. The method for improving the bonding accuracy of a stick-on machine as described in claim 1, characterized in that, The zero-position error of the bottom axis and the back axis includes horizontal error and vertical error. The third preset position includes a first position and a second position located on the same horizontal plane, and a third position that is perpendicular to the first position and the second position respectively. The standard crystal orientation value includes a first standard crystal orientation value and a second standard crystal orientation value. The first and second crystal orientation values ​​to be calibrated are compared with the first and second standard crystal orientation values, including: The average value of multiple first crystal direction values ​​to be calibrated at the first position and the average value of multiple first crystal direction values ​​to be calibrated at the second position, or the average value of multiple second crystal direction values ​​to be calibrated at the first position and the average value of multiple second crystal direction values ​​to be calibrated at the second position, are compared with the second standard crystal direction value to obtain the vertical crystal direction value error. If the vertical crystal orientation error is within the fifth preset range, then the vertical error meets the requirements; if the vertical crystal orientation error is outside the fifth preset range, then adjust the zero position of the back axis and / or adjust the pitch angle of the back axis until the vertical error meets the requirements.

7. The method for improving the bonding accuracy of a stick-on machine as described in claim 6, characterized in that, The step of comparing the first crystal orientation value to be calibrated and the second crystal orientation value to the first standard crystal orientation value and the second standard crystal orientation value also includes: The average value of the multiple first crystal orientation values ​​to be calibrated at the third position and the average value of the multiple second crystal orientation values ​​to be calibrated at the third position are compared with the first standard crystal orientation value to obtain the horizontal crystal orientation value error. If the horizontal crystal orientation error is within the sixth preset range, the horizontal error meets the requirements; if the horizontal crystal orientation error is outside the sixth preset range, adjust the zero point angle of the bottom axis until the horizontal error meets the requirements.

8. The method for improving the bonding accuracy of a stick-on machine as described in claim 1, characterized in that, The method for improving the bonding accuracy of the adhesive stick machine also includes: The flatness of the tooling is measured, and the tooling is repaired based on the measurement results so that the measurement results are within the ninth preset range.

Images