Self-limiting wafer carrier AGV

Abstract

The application provides a self-limiting wafer carrier box AGV material transport vehicle, and relates to the technical field of transport equipment. When the AGV material transport vehicle is not parked in the fixed base for receiving the material, the sliding plate receives the wafer carrier box; when the AGV material transport vehicle is parked on the fixed base for receiving the material, the vehicle body pushes the sliding plate into the fixed base, the sliding plate moves to the rear side, and the push plate pushes the wafer carrier box on the sliding plate to the vehicle body, so that the sliding plate can replace the AGV material transport vehicle to receive the material when the AGV material transport vehicle does not receive the material, the time for the AGV material transport vehicle to park for receiving the material is reduced, the material transport efficiency of the AGV material transport vehicle is improved, and the problem that the wafer carrier box delivery device stops working when the AGV material transport vehicle transports the wafer carrier box, and the wafer carrier box delivery device can only work when the AGV material transport vehicle is parked at the bottom of the delivery device is solved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of transportation equipment, in particular to a self-limiting wafer carrier box AGV material transport vehicle. BACKGROUND

[0002] The wafer is a material with very high precision, and after the wafer production is completed, it needs to be placed into a carrier box and then transported to the next production workshop by a transportation tool. The AGV vehicle refers to a material transport vehicle equipped with an electromagnetic or optical automatic guiding device, which can travel along a specified guiding path, including running and parking devices, safety protection devices and various transfer functions. With the continuous development of science and technology, the AGV material transport vehicle has become a common transport tool for transporting wafer carrier boxes. The AGV vehicle can automatically transport the wafer carrier box from the starting point to the destination without manual navigation.

[0003] For example, the application number: CN201911232195.1 relates to an AGV chassis and AGV trolley, relating to the technical field of AGV chassis. The AGV chassis comprises a bottom plate, a first walking mechanism and an adjusting mechanism. The first walking mechanism comprises a first driving wheel, a first connecting rod and a first universal wheel. The first driving wheel and the first universal wheel are respectively connected to the two ends of the first connecting rod. The middle part of the first connecting rod is rotatably connected to the bottom plate, so that the first driving wheel and the first universal wheel can be lifted relative to the bottom plate. The adjusting mechanism is installed on the bottom plate and connected with the first connecting rod, and can exert a preset force on the first connecting rod, so that the first connecting rod has a tendency to rotate relative to the bottom plate. The AGV chassis and AGV trolley have the characteristics of being able to adjust the running efficiency by adjusting the ratio of driving force and motion resistance.

[0004] However, as for the existing AGV material transport vehicle, when transporting the wafer carrier box, the wafer carrier box feeding device stops working. Only when the AGV material transport vehicle is parked at the bottom of the feeding device, the feeding device can perform feeding work. This material receiving mode causes the AGV material transport vehicle to take longer to load goods, thereby causing the transportation efficiency of the AGV material transport vehicle to be low. Moreover, the existing AGV material transport vehicle lacks a structure for automatically limiting the wafer carrier box. Since the wafer is a precision component, any shaking during transportation will cause damage to the wafer. SUMMARY

[0005] Therefore, the present application provides a self-limiting wafer carrier box AGV material transport vehicle, which has a mounting mechanism and a top assembly. When the AGV material transport vehicle drives out of the fixed base, the limiting clamping plate is automatically flipped up and the wafer carrier box is limited, thereby avoiding shaking of the wafer carrier box during transportation.

[0006] The application provides a self-limiting wafer carrier AGV material transfer vehicle, which specifically comprises a mounting mechanism; the mounting mechanism comprises a vehicle body and a slot, and a rectangular groove is arranged at the upper end of the vehicle body; the slot is arranged in the interior of the vehicle body and penetrates through the rear side of the vehicle body; a receiving component is arranged on the mounting mechanism, a fixed base of the receiving component is arranged at the outer rear end of the vehicle body, a plug rod in the fixed base is plugged into the slot in the vehicle body, and the front side of a sliding plate in the fixed base abuts against the rear end of the vehicle body; a top assembly is arranged on the mounting mechanism, a placing plate of the top assembly is slidingly installed in the rectangular groove at the upper end of the vehicle body, an elastic element is arranged between the placing plate and the vehicle body, a limiting clamping groove at the outer side of the placing plate is clamped with a limiting plate in the vehicle body, a bottom plate at the outer side of the placing plate is slidingly installed in the slot in the vehicle body, the bottom of the bottom plate is attached to the plug rod at the outer end of the fixed base, and a rack on a transmission plate at the outer side of the placing plate is in transmission connection with a fixed gear on a limiting clamping plate at the outer end of the vehicle body.

[0007] Further, the mounting mechanism comprises a limiting plate and a side slot; the limiting plate is provided with two groups, and the limiting plates are symmetrically arranged at the inner sides of the upper end of the vehicle body; the side slot is provided with two groups, and the side slots are symmetrically arranged at the two ends of the vehicle body.

[0008] Further, the mounting mechanism further comprises a limiting clamping plate and a fixed gear; the limiting clamping plate is rotationally installed in the side slot; and the fixed gear is fixedly installed at the two ends of the limiting clamping plate.

[0009] Further, the receiving component comprises a fixed base and a transmission gear; a rectangular through groove is arranged in the interior of the fixed base, and rectangular plate structures are arranged at the two ends of the front side of the fixed base; the transmission gear is provided with two groups, and the transmission gears are rotationally installed at the rear ends of the two sides in the interior of the fixed base.

[0010] Further, the receiving component comprises a plug rod and a guide slot; the plug rod is arranged at the middle position of the front side of the fixed base; the guide slot is provided with two groups, and the guide slots are arranged at the inner ends of the two sides of the fixed base.

[0011] Further, the receiving component comprises a sliding plate, a receiving plate and a transmission tooth plate A; the sliding plate is slidingly installed in the interior of the fixed base, the two sides of the sliding plate are slidingly connected with the guide slots through springs, and a rectangular groove is arranged in the interior of the sliding plate; the receiving plate is arranged in the rectangular groove in the sliding plate, a circular rod at the bottom of the receiving plate penetrates through the sliding plate, and an elastic element is arranged between the receiving plate and the sliding plate; the transmission tooth plate A is fixedly installed at the outer rear end of the sliding plate, and the transmission tooth plate A is in transmission connection with the transmission gear.

[0012] Further, the containing component further comprises: a push plate and a transmission gear plate B; the push plate is slidingly installed in the inner side of the upper end of the fixed base, and the rectangular plate at the front end of the push plate is outside the fixed base; the transmission gear plate B is fixedly installed at the rear end of the push plate, and an elastic member is arranged between the transmission gear plate B and the fixed base, and the transmission gear plate B is in transmission connection with the transmission gear.

[0013] Further, the top assembly comprises: a placement plate and a limiting clamping groove; the placement plate is internally provided with a rectangular groove; the limiting clamping groove is provided with two groups, and the limiting clamping grooves are symmetrically arranged on the two outer sides of the placement plate.

[0014] Further, the top assembly comprises: an end groove and a transmission plate; the end groove is provided with two groups, and the end grooves are symmetrically arranged on the two sides of the placement plate; the transmission plate is arranged in the interior of the end groove, and the two sides of the transmission plate are provided with a rack.

[0015] Further, the top assembly comprises: a buffer plate and a bottom plate; the buffer plate is hingedly connected in the rectangular groove at the upper end of the placement plate, and an elastic member is arranged between the buffer plate and the placement plate; the bottom plate is fixedly installed at the bottom of the placement plate.

[0016] In the application, the installation mechanism and the top assembly are arranged, the placement plate is movably installed at the top of the vehicle body, the bottom plate at the lower end of the placement plate is slidingly installed into the insertion slot in the vehicle body, the wedge-shaped bottom plate is fitted with the wedge-shaped insertion rod inserted into the insertion slot, the tooth plate on the transmission plate on the two sides of the placement plate is in transmission connection with the fixed gear on the limiting clamping plate on the two sides of the vehicle body, and in use, the wafer carrier is contained on the placement plate. Since the rectangular plates at the two ends of the front side of the fixed base limit the limiting clamping plate, the placement plate cannot move downward in the vehicle body, after the wafer carrier is placed, the vehicle body drives out of the fixed base, and the insertion rod slowly moves out of the insertion slot, at this time, the placement plate moves downward under the action of gravity, and the limiting clamping plate is automatically flipped up through the transmission effect of the transmission plate, and the wafer carrier at the upper end of the placement plate is clamped and limited, and through such arrangement, the limiting clamping plate can automatically limit the wafer carrier when the AGV material vehicle drives.

[0017] In the present application, the receiving component is arranged, a sliding plate with a transmission gear plate A is arranged in the fixed base, and a push plate with a transmission gear plate B is arranged in the fixed base, the push plate is in transmission connection with the transmission gear in the fixed base through the transmission gear plate B, when the AGV transport vehicle is not parked in the fixed base to receive the material, the sliding plate is extended from the inside of the fixed base, and can receive the wafer carrier when the wafer carrier is put by the putting device, when the AGV transport vehicle is parked on the fixed base to receive the material, the vehicle body pushes the sliding plate to the inside of the fixed base, the push plate can push the wafer carrier on the sliding plate to the placing plate on the top of the vehicle body by moving the sliding plate to the rear side, in this way, the sliding plate can replace the AGV transport vehicle to receive the material when the AGV transport vehicle does not receive the material, thereby reducing the time of the AGV transport vehicle to receive the material, and improving the material transport efficiency of the AGV transport vehicle. BRIEF DESCRIPTION OF DRAWINGS

[0018] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings of the embodiments will be briefly introduced below. The drawings described below only relate to some embodiments of the present application, and are not limited to the present application.

[0019] In the drawings:

[0020] Figure 1 A perspective structural schematic view according to an embodiment of the present application is shown.

[0021] Figure 2 A rear side bottom view structural schematic view according to an embodiment of the present application is shown.

[0022] Figure 3 A perspective structural schematic view according to an embodiment of the present application is shown. Figure 2 An enlarged structural schematic view of A part is shown.

[0023] Figure 4 An exploded structural schematic view according to an embodiment of the present application is shown.

[0024] Figure 5 A perspective structural schematic view of the receiving component and the top assembly according to an embodiment of the present application is shown.

[0025] Figure 6 A front side internal section view structural schematic view according to an embodiment of the present application is shown.

[0026] Figure 7 An exploded structural schematic view of the receiving component according to an embodiment of the present application is shown.

[0027] Figure 8 An internal structure schematic view of the receiving component according to an embodiment of the present application is shown.

[0028] Figure 9 A top assembly exploded structural schematic diagram according to an embodiment of the present application is shown.

[0029] List of reference signs

[0030] 1, mounting mechanism;

[0031] 101, vehicle body; 1011, slot;

[0032] 102, limiting plate; 103, side slot;

[0033] 104, limiting clamping plate; 1041, fixed gear;

[0034] 2, receiving component;

[0035] 201, fixed base; 2011, transmission gear;

[0036] 202, insertion rod; 203, guide slot;

[0037] 204, sliding plate; 2041, receiving plate; 2042, transmission tooth plate A;

[0038] 205, push plate; 2051, transmission tooth plate B;

[0039] 3, top assembly;

[0040] 301, placement plate; 3011, limiting clamping groove;

[0041] 302, end slot; 3021, transmission plate;

[0042] 303, buffer plate; 304, bottom plate. DETAILED DESCRIPTION

[0043] In order to make the purpose, scheme and advantages of the technical solutions of the present application more clear, the technical solutions of the embodiments of the present application will be described clearly and completely in the following with reference to the drawings of the specific embodiments of the present application.

[0044] Embodiment: please refer to Figures 1 to 9 shown:

[0045] The application provides a self-limiting wafer carrier box AGV material conveying vehicle, which comprises a mounting mechanism 1; the mounting mechanism 1 comprises a vehicle body 101 and a slot 1011, and the upper end of the vehicle body 101 is provided with a rectangular groove; the slot 1011 is arranged in the inside of the vehicle body 101 and penetrates through the rear side of the vehicle body 101; a receiving component 2 is arranged on the mounting mechanism 1, a fixed base 201 of the receiving component 2 is arranged at the outer side of the rear end of the vehicle body 101, a plug rod 202 in the fixed base 201 is plugged into the slot 1011 in the vehicle body 101, and the front side of a sliding plate 204 in the fixed base 201 abuts against the rear end of the vehicle body 101; a top assembly 3 is arranged on the mounting mechanism 1, a placing plate 301 of the top assembly 3 is slidingly installed in the rectangular groove at the upper end of the vehicle body 101, elastic members are arranged between the placing plate 301 and the vehicle body 101, a limiting clamping groove 3011 at the outer side of the placing plate 301 is clamped with a limiting plate 102 in the vehicle body 101, a bottom plate 304 outside the placing plate 301 is slidingly installed in the slot 1011 in the vehicle body 101, the bottom of the bottom plate 304 is attached to the plug rod 202 at the outer end of the fixed base 201, and a rack on a transmission plate 3021 at the outer side of the placing plate 301 is in transmission connection with a fixed gear 1041 on a limiting clamping plate 104 at the outer end of the vehicle body 101.

[0046] As the first embodiment of the application, as shown in Figures 4-6 The mounting mechanism 1 comprises a limiting plate 102 and a side groove 103; the limiting plate 102 is provided with two groups, and the limiting plates 102 are symmetrically arranged at the inside of both sides of the upper end of the vehicle body 101; the side groove 103 is provided with two groups, and the side grooves 103 are symmetrically arranged at both ends of the vehicle body 101; a limiting clamping plate 104 and a fixed gear 1041; the limiting clamping plate 104 is rotatably installed in the side groove 103; and the fixed gear 1041 is fixedly installed at both ends of the limiting clamping plate 104.

[0047] The rectangular limiting plate 102 is arranged, the limiting plate 102 is clamped into the limiting clamping grooves 3011 at both ends of the placing plate 301, so that the limiting plate 102 limits the placing plate 301 in the vehicle body 101, the rectangular side groove 103 is arranged, the limiting clamping plate 104 is movably installed at both ends of the vehicle body 101 through the side groove 103, the rectangular limiting clamping plate 104 is arranged, when the vehicle body 101 moves into the inside of the fixed base 201, the limiting clamping plate 104 is automatically flipped up and clamps and limits the wafer carrier box at the top of the vehicle body 101, and the fixed gear 1041 is arranged, the limiting clamping plate 104 is in transmission connection with the transmission plate 3021 through the fixed gear 1041.

[0048] As the second embodiment of the application, on the basis of the first embodiment, as shown in Figure 7 and 8As shown, the receiving component 2 comprises: a fixed base 201 and a transmission gear 2011; the fixed base 201 is internally provided with a rectangular through slot, and the front side of the fixed base 201 is provided with a rectangular plate structure; the transmission gear 2011 is provided with two groups, and the transmission gear 2011 is rotatably installed at the rear end of the two sides inside the fixed base 201; a plug rod 202 and a guide groove 203; the plug rod 202 is arranged at the front side of the fixed base 201; the guide groove 203 is provided with two groups, and the guide groove 203 is arranged at the inner end of the two sides of the fixed base 201; a sliding plate 204, a receiving plate 2041 and a transmission tooth plate A 2042; the sliding plate 204 is slidably installed inside the fixed base 201, and the two sides of the sliding plate 204 are slidably connected with the guide groove 203 through springs, and the sliding plate 204 is internally provided with a rectangular slot; the receiving plate 2041 is arranged in the rectangular slot in the sliding plate 204, and the circular rod at the bottom of the receiving plate 2041 penetrates through the sliding plate 204, and the receiving plate 2041 and the sliding plate 204 are provided with elastic elements; the transmission tooth plate A 2042 is fixedly installed at the rear side of the sliding plate 204, and the transmission tooth plate A 2042 is in transmission connection with the transmission gear 2011; a push plate 205 and a transmission tooth plate B 2051; the push plate 205 is slidably installed at the inner side of the upper end of the fixed base 201, and the rectangular plate at the front end of the push plate 205 is arranged at the outer side of the fixed base 201; the transmission tooth plate B 2051 is fixedly installed at the rear end of the push plate 205, and the transmission tooth plate B 2051 is provided with elastic elements between the fixed base 201, and the transmission tooth plate B 2051 is in transmission connection with the transmission gear 2011.

[0049] The rectangular fixed base 201 is arranged, the wafer carrier box is placed to the distribution area through the fixed base 201, the fixed base 201 can replace the vehicle body 101 to hold the wafer carrier box when the vehicle body 101 is transported, the transmission gear 2011 is arranged, the transmission tooth plate A 2042 and the transmission tooth plate B 2051 are drivenly connected, the wedge-shaped insertion rod 202 is arranged, when the vehicle body 101 is parked in the fixed base 201, the insertion rod 202 is inserted into the insertion slot 1011 in the vehicle body 101, and then the insertion rod 202 moves the placement plate 301 by the bottom plate 304, the rectangular guide slot 203 is arranged, the sliding plate 204 is slidably installed in the fixed base 201, the rectangular sliding plate 204 is arranged, the wafer carrier box is placed on the fixed base 201 by the sliding plate 204, the rectangular holding plate 2041 is arranged, and the wafer carrier box is placed to play a buffering role, the transmission tooth plate A 2042 is arranged, the sliding plate 204 is drivenly connected with the transmission gear 2011 through the transmission tooth plate A 2042, the push plate 205 is arranged, when the sliding plate 204 is pushed to the inner side of the fixed base 201 by the vehicle body 101, the push plate 205 moves to the front side, and the wafer carrier box placed on the sliding plate 204 is pushed to the placement plate 301 on the top of the vehicle body 101, the transmission tooth plate B 2051 is arranged, and the push plate 205 is drivenly connected with the transmission gear 2011 through the transmission tooth plate B 2051.

[0050] As the third embodiment of the present application, on the basis of embodiments 1 and 2, as shown in Figure 5 and 9 The top assembly 3 includes: a placement plate 301 and a limiting clamping groove 3011; the placement plate 301 is internally provided with a rectangular groove; the limiting clamping groove 3011 is provided with two groups, and the limiting clamping groove 3011 is symmetrically arranged on the two sides of the outside of the placement plate 301; an end groove 302 and a transmission plate 3021; the end groove 302 is provided with two groups, and the end groove 302 is symmetrically arranged on the two sides of the placement plate 301; the transmission plate 3021 is arranged in the inside of the end groove 302, and the two sides of the transmission plate 3021 are provided with a rack; a buffer plate 303 and a bottom plate 304; the buffer plate 303 is hingedly connected in the rectangular groove on the upper end of the placement plate 301, and the buffer plate 303 is provided with an elastic member between the buffer plate 303 and the placement plate 301; the bottom plate 304 is fixedly installed at the bottom of the placement plate 301.

[0051] A rectangular placement plate 301 is provided to hold the wafer carrier onto the vehicle body 101. A rectangular limiting slot 3011 is provided to engage with a limiting plate 102 inside the vehicle body 101, thereby limiting the movement of the placement plate 301 within the vehicle body 101. A rectangular end slot 302 is provided to install a transmission plate 3021 onto both sides of the placement plate 301. The transmission plate 3021 is also provided to connect the placement plate 301 to the fixed gear 1041 for transmission. A rectangular buffer plate 303 is provided to provide cushioning when the wafer carrier is placed onto the placement plate 301. A wedge-shaped base plate 304 is provided to contact the insertion rod 202, allowing the placement plate 301 to move within the vehicle body 101 when the insertion rod 202 moves within the slot 1011.

[0052] The specific usage and function of this embodiment are as follows:

[0053] In this invention, such as Figures 1-9 As shown, a fixed base 201 is installed at the bottom of the wafer carrier delivery device. A sliding plate 204 is installed inside the fixed base 201 so that the sliding plate 204 can hold the wafer carriers delivered by the delivery device. Limiting clamps 104 with fixed gears 1041 are rotatably installed on both sides of the vehicle body 101, and a placement plate 301 is movably installed at the upper end of the vehicle body 101. The racks on the transmission plates 3021 on both sides of the placement plate 301 are connected to the fixed gears 1041 on the limiting clamps 104. When the vehicle body 101 moves into the fixed base 201 to receive materials, the insert rod 202 is inserted into the slot 1011 inside the vehicle body 101, and the placement plate 301 is held in place by the base plate 304, so that the placement plate 301 cannot shake inside the vehicle body 101. As the vehicle body 101 stops inside the fixed base 201, the vehicle body 101 pushes the sliding plate 204 into the fixed base 201. As slide plate 204 moves backward, the transmission gear plate A2042 on the rear side of slide plate 204, through transmission gear 2011, causes transmission gear plate B2051 to drive push plate 205 forward, then pushes the wafer carrier placed on the upper end of slide plate 204 into placement plate 301 on the upper end of vehicle body 101. At this time, the delivery device can continue to deliver wafer carriers onto placement plate 301 until placement plate 301 is full. After it is full, vehicle body 101 moves forward. When the vehicle body 101 moves out of the fixed base 201, the fixed base 201 loses its restraint on the limiting clamp 104. At this time, the placement plate 301 can use its own weight to make the bottom plate 304 slide slowly down the inclined surface of the insertion rod 202. As the placement plate 301 descends, the limiting clamp 104 on both sides of the vehicle body 101 automatically flips up and restrains the wafer carrier carried by the vehicle body 101 during the driving process.

Claims

1. A self-limiting wafer carrier AGV, comprising: The mounting mechanism (1) includes a vehicle body (101) and a slot (1011). The upper end of the vehicle body (101) is provided with a rectangular groove. The slot (1011) is opened inside the vehicle body (101) and passes through the rear side of the vehicle body (101). The mounting mechanism (1) is characterized by having a receiving component (2). The fixing base (201) of the receiving component (2) is located at the rear end of the outer side of the vehicle body (101). The insert rod (202) inside the fixing base (201) is inserted into the slot (1011) inside the vehicle body (101). The front side of the sliding plate (204) inside the fixing base (201) abuts against the rear end of the vehicle body (101). The mounting mechanism (1) is provided with The top component (3) has a placement plate (301) that is slidably installed in a rectangular groove at the upper end of the vehicle body (101). An elastic element is provided between the placement plate (301) and the vehicle body (101). The limiting slot (3011) on the outside of the placement plate (301) engages with the limiting plate (102) inside the vehicle body (101). The bottom plate (304) on the outside of the placement plate (301) is slidably installed in a slot (1011) inside the vehicle body (101). The bottom of the bottom plate (304) is in contact with the insertion rod (202) at the outer end of the fixed base (201). The rack on the transmission plate (3021) on the outside of the placement plate (301) is connected to the fixed gear (1041) on the limiting clamp (104) at the outer end of the vehicle body (101).

2. The self-limiting wafer carrier AGV material transport vehicle according to claim 1, characterized in that: The installation mechanism (1) includes: a limiting plate (102) and a side groove (103); the limiting plate (102) is provided in two sets, and the limiting plate (102) is symmetrically provided on both sides of the upper end of the vehicle body (101); the side groove (103) is provided in two sets, and the side groove (103) is symmetrically opened at both ends of the vehicle body (101).

3. The self-limiting wafer carrier AGV material transport vehicle according to claim 2, characterized in that: The installation mechanism (1) further includes: a limiting clamp (104) and a fixed gear (1041); the limiting clamp (104) is rotatably installed inside the side groove (103); the fixed gear (1041) is fixedly installed at both ends of the limiting clamp (104).

4. The self-limiting wafer carrier AGV material transport vehicle according to claim 1, characterized in that: The receiving component (2) includes: a fixed base (201) and a transmission gear (2011); the fixed base (201) has a rectangular through groove inside, and the front two ends of the fixed base (201) have rectangular plate-like structures; the transmission gear (2011) has two sets, and the transmission gear (2011) is rotatably installed on the rear ends of both sides inside the fixed base (201).

5. The self-limiting wafer carrier AGV material transport vehicle according to claim 4, characterized in that: The receiving component (2) includes: a plug (202) and a guide groove (203); the plug (202) is located at the middle position of the front side of the fixed base (201); the guide groove (203) is provided in two sets, and the guide groove (203) is opened at the inner ends of both sides of the fixed base (201).

6. The self-limiting wafer carrier AGV material transport vehicle according to claim 5, characterized in that: The receiving component (2) includes: a sliding plate (204), a receiving plate (2041), and a transmission gear plate A (2042); the sliding plate (204) is slidably installed inside the fixed base (201), and the two sides of the sliding plate (204) are slidably connected to the guide groove (203) by springs, and a rectangular groove is provided inside the sliding plate (204); the receiving plate (2041) is provided in the rectangular groove inside the sliding plate (204), and a circular rod at the bottom of the receiving plate (2041) passes through the sliding plate (204), and an elastic element is provided between the receiving plate (2041) and the sliding plate (204); the transmission gear plate A (2042) is fixedly installed on the rear outer end of the sliding plate (204), and the transmission gear plate A (2042) is connected to the transmission gear (2011).

7. The self-limiting wafer carrier AGV material transport vehicle according to claim 4, characterized in that: The receiving component (2) further includes: a push plate (205) and a transmission gear plate B (2051); the push plate (205) is slidably installed on the inner side of the upper end of the fixed base (201), and the rectangular plate at the front end of the push plate (205) is located on the outer side of the fixed base (201); the transmission gear plate B (2051) is fixedly installed on the rear end of the push plate (205), and an elastic element is provided between the transmission gear plate B (2051) and the fixed base (201), and the transmission gear plate B (2051) is connected to the transmission gear (2011).

8. The self-limiting wafer carrier AGV material transport vehicle according to claim 1, characterized in that: The top component (3) includes: a placement plate (301) and a limiting slot (3011); the placement plate (301) has a rectangular slot inside; the limiting slot (3011) has two sets, and the limiting slot (3011) is symmetrically opened on both sides of the outside of the placement plate (301).

9. The self-limiting wafer carrier AGV material transport vehicle according to claim 8, characterized in that: The top component (3) includes: an end groove (302) and a transmission plate (3021); the end groove (302) is provided in two sets and is symmetrically arranged on both sides of the placement plate (301); the transmission plate (3021) is located inside the end groove (302) and has racks on both sides.

10. The self-limiting wafer carrier AGV material transport vehicle according to claim 8, characterized in that: The top component (3) includes a buffer plate (303) and a bottom plate (304); the buffer plate (303) is hinged to a rectangular groove at the upper end of the placement plate (301), and an elastic element is provided between the buffer plate (303) and the placement plate (301); the bottom plate (304) is fixedly installed at the bottom of the placement plate (301).

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