A film tearing machine suitable for ultra-thin sheets

Abstract

The present invention discloses a film tearing machine suitable for ultra-thin plates, comprising a frame, a conveyor roller arranged on the frame for conveying the plates, a film tearing device arranged near the front of the conveyor roller, and a blanking device arranged in front of the film tearing device at intervals, the conveyor roller is provided with a bubbling device, the film tearing device comprises a film sticking mechanism for first sticking part of the film at the head of the plate from the plate, and a film tearing clamp for clamping the stuck part of the film and completely tearing off the remaining film, a clamping and translation device for clamping the plate at the film tearing device and translating it to the blanking device, the clamping and translation device comprises a transverse drive assembly arranged on the frame, a support seat driven by the transverse drive assembly, and clamps respectively arranged on the support seat for clamping the plate. In the present invention, the clamping and translation device can clamp the front, left, and right sides of the plate to tighten the plate, thereby preventing the plate from collapsing and deforming during the film tearing process or translation process.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor technology, and in particular to a film tearing machine suitable for ultra-thin plates. Background Art

[0002] The semiconductor development and etching process involves a film tearing step, which involves removing the thin film from the substrate surface after etching. This process places high demands on the industry for the protection of the functional areas of the substrate. Before film tearing, the film protects the functional areas and can be transported using conventional conveying methods (belts, rollers, etc.). After the film is removed, the functional areas of the substrate are exposed and must be protected from direct contact with the outside world.

[0003] Chinese patent 202210103866.X discloses a membrane plate separation device, in which the front edge of the plate is clamped downward to fix the plate to achieve film tearing. After the film tearing is completed, it is transported using a staggered roller flow channel. However, for ultra-thin packaging substrates (generally with a thickness of 0.08mm-0.1mm), the substrate itself is relatively soft and lacks rigidity. It is easy to deform or collapse during the film tearing process by simply clamping the front edge of the substrate. Moreover, after the film tearing is completed, a staggered roller flow channel is used for transmission. During the transmission process, the roller will inevitably come into contact with the functional area of ​​the plate, thereby causing damage and contamination to the surface of the plate. Summary of the Invention

[0004] The object of the present invention is to provide a film tearing machine suitable for ultra-thin plates, in which the clamping and translation device can clamp the front, left and right sides of the plate to tighten the plate, thereby preventing the plate from collapsing and deforming during the film tearing process or the translation process, and will not contact the functional area of ​​the plate.

[0005] The purpose of the present invention can be achieved through the following technical solutions:

[0006] A film tearing machine suitable for ultra-thin plates, comprising a frame, a conveyor roller arranged on the frame for conveying plates, a film tearing device arranged near the front of the conveyor roller, and a blanking device arranged at intervals in front of the film tearing device, the conveyor roller is provided with a bubbling device, the film tearing device comprises a film sticking mechanism for first sticking part of the film on the head of the plate from the plate and a film tearing clamp for clamping the stuck part of the film and completely tearing off the remaining film, and also comprises a clamping and translation device for clamping the plate at the film tearing device and translationally moving it to the blanking device, the clamping and translation device comprises a transverse drive assembly arranged on the frame, a support seat driven by the transverse drive assembly, and clamps respectively arranged on the support seat for clamping the front, left and right edges of the plate to thereby tighten the plate.

[0007] Because the sheet substrate is an ultra-thin 0.08mm-0.1mm thick, it lacks flexibility and rigidity, and is prone to deformation and collapse. With the aforementioned structure, the front, left, and right clamping mechanisms in the clamping and translating device can clamp and tighten the edges of the sheet. The bottom surface of the sheet does not require roller support during the film tearing process or forward movement, thus preventing contact with the functional areas of the sheet and contaminating or damaging the sheet surface. Furthermore, the clamping and translating device prevents the sheet from collapsing or deforming during the film tearing process or translation.

[0008] As a further embodiment of the present invention, the array device includes push plates located on the left and right sides of the rear of the conveyor roller conveyor, each driven by opposing push plate motors; an auxiliary wheel motor located below the rear of the conveyor roller conveyor; and multiple auxiliary wheels driven by the auxiliary wheel motors, each capable of traveling up and down between the two rollers. The auxiliary wheels roll perpendicularly to the direction of travel of the sheet material. With this structure, when the auxiliary wheel motors drive the multiple auxiliary wheels to carry the sheet material upward, the push plate motors, supported by the multiple auxiliary wheels, drive the push plates to precisely position the sheet material. Furthermore, because the rolling direction of the auxiliary wheels aligns with the sheet material's movement when the sheet material is pushed left or right, the friction generated by the push plate motor pushing the sheet material is reduced, preventing deformation or damage to the sheet material.

[0009] As a further embodiment of the present invention, the unloading device includes a platform base, a platform drive mechanism mounted on the platform base, a suction platform driven by the platform drive mechanism, and a scanning mechanism mounted on the frame adjacent to the suction platform. The platform drive mechanism is configured to drive the suction platform to rise and fall, rotate vertically, and move forward and backward in the transverse and longitudinal directions. With this structure, the position of the sheet material can be corrected without direct contact with the sheet material, thereby preventing deformation of the sheet material.

[0010] As a further embodiment of the present invention, the suction platform includes a base plate, and four edge vacuum blocks, one transverse vacuum block, and two longitudinal vacuum blocks fixed to the base plate. The surfaces of the four edge vacuum blocks, one transverse vacuum block, and two longitudinal vacuum blocks are flush, forming a "T-shaped" suction surface that can hold and secure the sheet material. This structure prevents the sheet material from collapsing. Furthermore, the contact area between the "T-shaped" suction surface and the sheet material avoids functional areas within the sheet material, preventing contamination or damage.

[0011] As a further aspect of the present invention, a pair of pneumatic slides are fixed to the surface of the base plate, and the two longitudinal vacuum blocks are mounted on corresponding pneumatic slides, each providing driving force for the blocks. With this structure, since the functional areas on the board vary in size and the gaps between them vary in position, the two longitudinal vacuum blocks can be adjusted to contact the gaps between the functional areas of the board, thus avoiding contact with the functional areas. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] The present invention will be further described below with reference to the accompanying drawings.

[0013] Figure 1 This is a structural schematic diagram of a film tearing machine suitable for ultra-thin plates according to the present invention;

[0014] Figure 2 This is a structural schematic diagram of the film tearing machine suitable for ultra-thin plates according to the present invention from another perspective;

[0015] Figure 3 This is a schematic structural diagram of the array device before jacking up;

[0016] Figure 4 This is a schematic diagram of the structure of the array device after jacking up;

[0017] Figure 5 yes Figure 2 A partial enlarged view of shown A;

[0018] Figure 6 It is a structural schematic diagram of the clamp of the present invention;

[0019] Figure 7 It is a schematic structural diagram of the present invention as a briquette;

[0020] Figure 8 This is a schematic structural diagram of the film-tearing clamp of the present invention;

[0021] Figure 9 It is a structural schematic diagram of the clamping jaws of the present invention;

[0022] Figure 10 It is a schematic structural diagram of the mucosal mechanism of the present invention;

[0023] Figure 11 It is a structural schematic diagram of the blanking device of the present invention;

[0024] Figure 12 It is a structural schematic diagram of the blanking device of the present invention from another perspective. DETAILED DESCRIPTION

[0025] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making any creative efforts shall fall within the scope of protection of the present invention.

[0026] See also Figure 1 and Figure 2 As shown, the present invention is a film tearing machine suitable for ultra-thin plates, including a frame 10, a conveyor roller 20 provided on the frame 10 for conveying the plate 9, a film tearing device 30 provided near the end of the conveyor roller 20, and a feeding device 31 spaced apart in front of the film tearing device 30.

[0027] The conveyor roller conveyor 20 includes multiple rollers 21 spaced apart along the forward direction of the sheet 9. Each roller 21 is spaced apart with multiple rollers 24 that align their rolling direction with the forward direction of the sheet 9. This structure reduces the contact surface of the sheet 9, lowering the risk of contamination. It also reduces friction between the sheet and the rollers 24, thus preventing wear on the product.

[0028] An array device 40 is provided on the conveyor roller 20. The array device 40 is used to array the plates conveyed to the starting end of the conveyor roller 20 in the left and right positions.

[0029] Combine Figure 3 and Figure 4 As shown, the array device 40 includes push plate motors 41 disposed on opposite left and right sides of the rear portion of the conveyor roller 20, push plates 42 driven by the push plate motors 41, an auxiliary wheel motor 43 located below the rear portion of the conveyor roller 20, an auxiliary wheel bracket 44 driven up and down by the auxiliary wheel motor 43, and a plurality of auxiliary wheels 45 mounted on the surface of the auxiliary wheel bracket 44 and capable of moving up and down between the two rollers 21. The plurality of auxiliary wheels 45 are arranged in an array. The rolling direction of the auxiliary wheels 45 is perpendicular to the forward direction of the plate 9.

[0030] When the auxiliary wheel motor 43 drives the multiple auxiliary wheels 45 to carry the plate 9 upward, under the support of the multiple auxiliary wheels 45, the push plate motor 41 drives the push plate 42 to push the plate 9, thereby achieving the precise positioning of the plate 9. At the same time, because the rolling direction of the auxiliary wheels 45 when the plate is pushed left and right is consistent with the moving direction of the plate, the friction generated when the push plate motor 41 pushes the plate 9 is reduced. And because the strokes of the two push plate motors 43 are the same, this will push the plate 9 to move toward the middle, achieving the left and right center positioning of the plate 9. In addition, the use of a motor-driven array device allows the position of the plate 9 to be quickly adjusted when the plate 9 is in the array. After the array of the plate 9 is completed, the auxiliary wheel motor 43 drives the multiple auxiliary wheels 45 to bring the plate 9 back, and the plate 9 falls back onto the conveyor roller 20, and the conveyor roller 20 continues to transport the plate 9 forward.

[0031] Combine Figure 5 As shown, a bubbling device 50 is provided on the conveying roller 20 and in front of the array device 40. The bubbling device includes a baffle assembly 51, a bubbling wheel assembly 52 and a pressing wheel assembly 53.

[0032] The foaming wheel assembly 52, mounted on the conveyor roller 20, consists of a foaming longitudinal drive assembly 521 mounted on the frame 10, a pair of coarsening wheels 522 mounted on the foaming longitudinal drive assembly 521, each capable of being closed vertically, and coarsening wheel cylinders 523 that respectively drive the coarsening wheels 522. During operation, the foaming longitudinal drive assembly 521 at the bottom drives the coarsening wheels 522 to move longitudinally, while the coarsening wheel cylinders 523 drive the coarsening wheels 522 to close. This creates friction foaming through the longitudinal reciprocating motion of the coarsening wheels 522. In this embodiment, the foaming longitudinal drive assembly 521 utilizes a linear module driven by a servo motor.

[0033] The baffle assembly 51 is positioned in front of the blister wheel assembly 52. ​​The baffle assembly 51 comprises a pair of baffles 511 that can be opened and closed vertically above the conveyor roller 20, and baffle cylinders 512 that respectively drive the baffles 511. The baffle assembly 51 clamps the front edge of the sheet 9 to secure it, allowing the blister wheel assembly 52 to rub and blister the sheet 9.

[0034] The pressing wheel assembly 53 is arranged behind the foaming wheel assembly 52. ​​The pressing wheel assembly 53 includes a wheel shaft 531, a plurality of pressing wheels 532 arranged on the wheel shaft 531, and a downward pressure cylinder 533 respectively arranged at both ends of the wheel shaft. The pressing wheel assembly 53 presses down the plate 9, which can reduce the speed of the plate 9 and move forward.

[0035] When a sheet of plate 9 is conveyed to the bottom of the film tearing device 30 , the film of the sheet of plate 9 has been bubbled, and the clamping translation device 11 starts to clamp the front, left and right edges of the sheet of plate 9 and tighten the sheet of plate to move it to the unloading device 31 .

[0036] Combine Figure 6and Figure 7 As shown, the clamping and translational device 11 includes a transverse drive assembly 12 mounted on the frame 10, a support base 131 driven by the transverse drive assembly 12, and clamps 14 mounted on the support base 131 for clamping the front, left, and right edges of the sheet material to maintain tension. The clamps 14 include a clamping block telescopic cylinder 141, a clamping block lifting cylinder 15 mounted at the output end of the clamping block telescopic cylinder 141, and a pair of clamping blocks 16 driven by the clamping block lifting cylinder 15 that can be opened and closed to clamp the edges of the sheet material. Two sets of clamping blocks 16 are used on each side, and the clamping blocks 16 are relatively long, ensuring that the sheet material is maintained in tension and preventing collapse. A row of guide rollers 17 are also located outside the clamping blocks 16 to guide the sheet material 9. Also located outside the clamping blocks 16 are a guide roller telescopic cylinder 171, and the guide rollers 17 driven by the guide roller telescopic cylinder 171 to guide the sheet material. The guide wheel telescopic cylinder 171 drives the guide wheel 17 using sheet material information provided by the preceding machine (not shown), thereby ensuring that the clamping and translating device 11 has a certain degree of compatibility with sheet material sizes. In this embodiment, the transverse drive assembly 12 utilizes a linear module driven by a servo motor. The use of a servo motor-driven linear module to drive the clamp ensures smooth and accurate transport of the sheet material 9 during the film tearing process, and also enables adjustable translation speed to accommodate different speed requirements during and after film tearing, thereby improving operational efficiency.

[0037] A pair of guide rails 18 are installed on the frame 10. The left and right sides of the bottom surface of the support base 131 are respectively installed on the two guide rails 18, so that the support base 131 can move forward or backward along the guide rails 18 when the horizontal drive assembly 12 drives it.

[0038] The film tearing device 30 includes a film sticking mechanism 60 for first sticking part of the film at the head of the plate 9 from the plate 9 and a film tearing clamp 70 for clamping the stuck part of the film and completely tearing off the remaining film.

[0039] Combined with Figure 10 As shown, in this embodiment, the membrane mechanism 60 is arranged in an upper and lower position relative to each other. Taking the membrane mechanism 60 located at the upper portion as an example, the membrane mechanism 60 includes a support plate 61, a tape unwinder 62 located on the support plate 61, a tape rewinder 63, a first membrane cylinder 64, a pressing frame 65 connected to the first membrane cylinder 64, a second membrane cylinder 66 located on the pressing frame 65, a tape pressing block 67 hingedly connected to the second membrane cylinder 66, a third membrane cylinder 68 located on one side of the pressing frame 65 and connected to the tape pressing block 67 to control the rotation of the tape pressing block 67, a fourth membrane cylinder 69 located on the other side of the pressing frame 65, and a tensioning wheel 91 connected to the fourth membrane cylinder 69 for tensioning the tape 98. Furthermore, the membrane mechanism 60 is provided with a plurality of steering wheels 92-97. The tape 98 passes through the steering wheels from the tape unwinder 62 and then winds back to the tape rewinder 63.

[0040] During operation, taking the upper mucosal mechanism 60 as an example, when mucosating, the first mucosal cylinder 64 extends to drive the lower body to extend (rough positioning), the second mucosal cylinder 66 extends to drive the tape pressure block 67 to extend to the vicinity of the plate 9 (precise positioning), the third mucosal cylinder 68 extends to relax the tape, and the fourth mucosal cylinder 69 extends to drive the tape pressure block 67 to swing down and press the tape tightly on the film on the corresponding surface of the plate 9; after mucosating, the second mucosal cylinder 66 contracts to drive the tape pressure block 67 to retract, the third mucosal cylinder 68 contracts to tighten the tape, and the fourth mucosal cylinder 69 contracts to make the tape pressure block 67 swing up and reset, while the first mucosal cylinder 64 contracts to drive the lower body to retract and pull up the film through the tape.

[0041] Combine Figure 8 and Figure 9 As shown, the film tearing jaw 70 includes a jaw lateral movement assembly 71, a jaw base 72 mounted on the output end of the jaw lateral movement assembly 71, and jaw units 73 symmetrically arranged above and below the jaw base 72. Here, the upper jaw unit 73 is taken as an example. The jaw unit 73 includes a jaw mounting frame 74 mounted on the jaw base 72, a jaw lifting assembly 76 mounted on the jaw mounting frame 74, a jaw support base 77 driven by the jaw lifting assembly 76, and a jaw 79 mounted on the jaw support base 77 and driven to open and close by a jaw cylinder 78. In this way, the jaws 79 are driven by the horizontal movement assembly 71 and the jaw lifting assembly 76 to move to the film position at the front end of the sheet. The jaw cylinder 78 drives the jaws 79 to clamp or release the film. The upper jaw 79 is used to clamp the film on the upper surface of the sheet, while the lower jaw is used to clamp the film on the lower surface of the sheet. The horizontal movement assembly 71 drives the clamping jaws 79 to move backward (opposite to the direction of sheet movement) to remove the film. In this embodiment, the horizontal movement assembly 71 and the jaw lifting assembly 76 both use linear modules driven by servo motors.

[0042] During operation, when tearing the film, the adhesive tape is respectively adhered to the film of the plate 9 by the adhesive film mechanism 60 and the front end of the film is adhered; the film is respectively clamped by the clamping jaws 79 of the film tearing clamp 70 (the adhesive tape is adhered to the middle part of the film, and the clamping jaws 79 clamp the two sides of the film), and the support seat 131 is driven by the lateral drive component 12 to slowly move the plate 9 forward. At the same time, the clamping jaw 79 is driven by the lateral movement component 71 to tear off the film of the plate 9 in the reverse direction, and the tape reel 63 drives the tape to be wound around for a section.

[0043] like Figure 2 As shown, the torn film can be blown off from the conveying roller conveyor 20 by a blowing device 8 arranged on the conveying roller conveyor 20 .

[0044] Combine Figure 11and Figure 12 As shown, after the film is peeled off from the sheet 9, the lateral drive assembly 12 drives the support base 131 to carry the sheet 9 to the unloading device 31. The unloading device 31 includes a platform base 32, a platform drive mechanism 33 mounted on the platform base 32, a suction platform 34 driven by the platform drive mechanism 33, and a scanning mechanism 35 mounted on the frame 10 next to the suction platform 34.

[0045] The scanning mechanism 35 includes a plurality of positioning cameras (not shown in the figure) and a plurality of camera light sources 351 .

[0046] The platform drive mechanism 33 is used to drive the adsorption platform 34 to move vertically, up and down, and rotate, as well as forward and backward in the horizontal and vertical directions. The platform drive mechanism 33 includes a platform cylinder 331 fixed to the surface of the platform base 32; a lifting platform 332 driven by the platform cylinder 331; a first motor 333 fixed to the lifting platform 332; a longitudinal movable platform 334 driven by the first motor 333; a second motor 335 fixed to the longitudinal movable platform 334; a transverse movable platform 336 driven by the second motor 335; and a rotary motor 337 mounted on the transverse movable platform 336. The adsorption platform 34 is mounted on the output end of the rotary motor 337. A pair of slide rails 338 are fixed to the surfaces of both the lifting platform 332 and the longitudinal movable platform 334. The bottom surfaces of the longitudinal movable platform 334 and the transverse movable platform 336 are fixed to corresponding two slide rails 338.

[0047] The suction platform 34 includes a base plate 341 and four edge vacuum blocks 344, a transverse vacuum block 348, and two longitudinal vacuum blocks 347 fixed to the upper surface of the base plate 341. The surfaces of the four edge vacuum blocks 344, the transverse vacuum block 348, and the two longitudinal vacuum blocks 347 are flush, forming a "T-shaped" suction surface 345 capable of sucking and securing the sheet 9. With this structure, the "T-shaped" suction surface 345 not only sucks and secures the sheet 9, preventing collapse, but also avoids contact with the sheet 9 at any functional area within the sheet 9, preventing contamination or damage.

[0048] A pair of pneumatic slides 349 are fixed to the surface of the base plate 341. Two longitudinal vacuum blocks 347 are mounted on corresponding pneumatic slides 349, which provide driving force for the longitudinal vacuum blocks 347. With this structure, since the functional areas on the sheet 9 vary in size and thus the gaps between them vary in position, the two longitudinal vacuum blocks 347 can be adjusted to contact the gaps between the functional areas on the sheet 9, thus avoiding contact with the functional areas.

[0049] When unloading, the platform cylinder 331 drives the adsorption platform 34 to rise until it sucks and fixes the plate 9, then the clamp 14 releases the plate 9, the clamp block telescopic cylinder 141 drives the clamp block to retreat, and the platform cylinder 331 drives the adsorption platform 34 to descend. Then, the clamping translation device 11 returns empty, and then the scanning mechanism 35 scans the position of the downstream conveyor belt (not shown in the figure). The first motor 333, the second motor 335 and the rotary motor 337 cooperate with each other to drive the adsorption platform 34 to move to ensure the accuracy of the position of the plate 9 on the downstream conveyor belt. Finally, the plate 9 is transferred to the downstream conveyor belt and transported out. When using the unloading device structure to correct the position of the plate, the accuracy of the plate position is guaranteed to avoid deformation and collapse of the plate.

[0050] In summary, when clamping a plate, the present invention can clamp the front, left and right edges of the plate to tighten the plate, thereby preventing the plate from collapsing and deforming during the film tearing process or the translation process.

[0051] The above is a detailed description of an embodiment of the present invention. However, the content described is only a preferred embodiment of the present invention and should not be considered to limit the scope of the present invention. All equivalent changes and improvements made within the scope of the present invention should still fall within the scope of the patent coverage of the present invention.

Claims

1. A film tearing machine suitable for ultra-thin sheets, comprising a frame, a conveyor roller arranged on the frame for conveying the sheets, a film tearing device arranged near the front of the conveyor roller, and a feeding device arranged in front of the film tearing device at intervals, the conveyor roller being provided with a bubbling device, the film tearing device comprising a film sticking mechanism for first sticking part of the film on the head of the sheet from the sheet and a film tearing clamping claw for clamping the stuck part of the film and completely tearing off the remaining film, and also comprising a clamping translation device for clamping the sheet at the film tearing device and moving it horizontally to the feeding device, the clamping translation device comprising a transverse driving assembly arranged on the frame, a film tearing mechanism driven by the transverse driving assembly A support base, and clamps respectively arranged on the support base for clamping the front, left and right edges of the plate to tighten the plate, the unloading device includes a platform base, a platform driving mechanism installed on the platform base, an adsorption platform driven by the platform driving mechanism, and a scanning mechanism installed on the frame near the adsorption platform, the platform driving mechanism is used to drive the adsorption platform to rise and fall and rotate in the vertical direction, as well as to move forward and backward in the horizontal and longitudinal directions, the adsorption platform includes a bottom plate, and four edge vacuum suction blocks fixed on the surface of the bottom plate, one horizontal vacuum suction block and two longitudinal vacuum suction blocks, wherein, The surfaces of the four edge vacuum suction blocks, the surface of one transverse vacuum suction block, and the surfaces of the two longitudinal vacuum suction blocks are flush to form a field-shaped adsorption surface, which can suck and fix the plate. It is characterized in that: a pair of pneumatic slides are fixed to the surface of the bottom plate, and the two longitudinal vacuum suction blocks are respectively installed on the corresponding pneumatic slides, and the pneumatic slides provide driving force for the longitudinal vacuum suction blocks.

2. The film tearing machine suitable for ultra-thin sheets according to claim 1 is characterized in that: The clamp comprises a clamping block telescopic cylinder, a clamping block lifting cylinder installed on the clamping block telescopic cylinder, and a pair of clamping blocks that can be opened and closed up and down and driven by the clamping block lifting cylinder.

3. The film tearing machine for ultra-thin sheets according to claim 2 is characterized in that: A guide wheel for guiding the plate is also provided on the outer side of the clamping block.

4. The film tearing machine for ultra-thin sheets according to claim 1 is characterized in that: The conveying roller comprises a plurality of rollers arranged at intervals along the advancing direction of the plate, and each of the rollers is provided with a plurality of rollers whose rolling direction is consistent with the advancing direction of the plate.

5. The film tearing machine for ultra-thin sheets according to claim 4 is characterized in that: An array device is provided on the conveyor roller, and the array device is used to array the plates conveyed to the starting end of the conveyor roller to the left and right positions.

6. The film tearing machine for ultra-thin sheets according to claim 5 is characterized in that: The array device includes push plates located on the left and right sides of the rear of the conveyor roller and driven by opposite push plate motors, an auxiliary wheel motor located below the rear of the conveyor roller, and multiple auxiliary wheels driven by the auxiliary wheel motor that can move up and down between the two rollers, wherein the rolling direction of the auxiliary wheels is perpendicular to the forward direction of the plate.

7. The film tearing machine for ultra-thin sheets according to claim 1 is characterized in that: The driving mechanism includes a platform cylinder fixed on the surface of the platform base, a material unloading lifting platform driven by the platform cylinder, a first motor fixed on the material unloading lifting platform, a longitudinal moving platform driven by the first motor, a second motor fixed on the longitudinal moving platform, a transverse moving platform driven by the second motor, and a rotating motor installed on the transverse moving platform, and the adsorption platform is installed on the output end of the rotating motor.

Images