Multi-flexible magnetic suspension structure active and passive vibration measurement and control device and method

Abstract

The application discloses a kind of multi-flexible magnetic levitation structure active and passive vibration measurement and control device, comprising: flexible hinge magnetic levitation part, vibration control part, vibration detection part and drive control part, flexible hinge magnetic levitation part includes multi-flexible hinge structure and magnetic levitation structure;Multi-flexible hinge structure includes long flexible beam, short flexible beam and flexible composite board, long flexible beam, short flexible beam and flexible composite board are hinged to each other, and the magnetic levitation structure includes magnetic levitation unit, and the magnetic levitation unit is arranged around the upper platform, and the vibration control part is connected with the upper platform by air turntable, and the vibration of flexible beam and flexible composite board is excited by air turntable rotation, and the inclination of the control device is controlled by vibration control part of vibration damping structure, and vibration damping structure can greatly absorb and dissipate vibration energy;Piezoelectric sensor, laser displacement sensor and other multi-sensor detect the vibration condition of flexible structure, use magnetic force to carry out feedback control, and carry out non-contact vibration detection and control of multi-flexible magnetic levitation structure.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of flexible structure vibration control, in particular, especially relates to a kind of multi-flexible magnetic levitation structure active and passive vibration measurement and control device and method for non-contact measurement. BACKGROUND

[0002] In the field of aerospace, lightweight flexible materials are widely used, but due to their small stiffness and other characteristics, it is easy to cause difficult to attenuate vibration, thereby greatly reducing the working accuracy. Considering the complexity of space environment, energy utilization is very important, and pure active control needs to consume a lot of energy, so the method of active and passive vibration suppression is extremely important.

[0003] The composite sandwich structure can greatly dissipate the energy of excited vibration, and the honeycomb sandwich plate is used to hinge the flexible beam to simulate the antenna structure or solar panel structure of the space vehicle. The honeycomb structure has multiple hexagonal cell structures, which has excellent vibration reduction capacity. At the same time, when the flexible structure is partially damaged due to the complex environment in outer space, the remaining honeycomb structure can still play a certain vibration reduction function. The honeycomb structure reduces the amount of flexible beam material, lightens the main structure, and brings better mechanical properties.

[0004] The magnetic levitation structure has the characteristics of no friction, high suspension precision and strong anti-interference ability, especially in the harsh environment of outer space. The commonly used displacement driving structure is easy to fail due to wind and sand, and the magnetic levitation structure solves this problem well.

[0005] The air bearing precision direct drive turntable provides excellent angle positioning, speed stability and error-free motion performance, and has a very low profile, which can realize non-mechanical contact rotary motion, has significant error-free and jitter-free motion characteristics, and is very suitable for positioning and rotation of high-precision instruments.

[0006] The multi-layer vibration damping structure can provide passive vibration suppression effect in axial and radial directions, and combined with the magnetic active control device, high-precision and fast-speed vibration displacement bias correction can be realized. SUMMARY

[0007] The present application aims to overcome the shortcomings and deficiencies of the prior art, and provides a multi-flexible magnetic levitation structure active and passive vibration measurement and control device and method, which fully considers the combination of active and passive vibration suppression and the problems of non-contact control and measurement.

[0008] In order to achieve the above purpose, the technical scheme adopted by the present application is as follows:

[0009] A kind of multi-flexible magnetic suspension structure active and passive vibration measurement and control device, including: flexible hinge magnetic suspension part, vibration control part, vibration detection part and drive control part, flexible hinge magnetic suspension part includes multi-flexible hinge structure and magnetic suspension structure;

[0010] Multi-flexible hinge structure includes long flexible beam, short flexible beam and flexible composite board, one end of long flexible beam and one end of short flexible beam are respectively hinged with one end of flexible composite board, the other end of long flexible beam is free end, and the other end of short flexible beam is hinged with middle part of long flexible beam;

[0011] Magnetic suspension structure includes magnetic suspension unit, magnetic suspension unit is arranged around upper layer platform, and magnetic suspension unit includes magnetic suspension platform, work platform, coil upper base, coil lower base and suspension base, magnetic suspension platform is surrounded outside suspension base, the other end of flexible composite board is fixedly connected with work platform by first connecting plate, coil upper base and coil lower base are arranged on both sides of suspension base, and suspension base is located between coil upper base and coil lower base, and coil upper base and coil lower base are provided with three-phase planar coil;

[0012] Vibration control part is connected with upper layer platform by air turntable, and vibration control part includes middle layer platform, lower layer platform, vibration control structure, rectangular ring belt and magnetic head, vibration control structure is fixedly connected with middle layer platform and lower layer platform respectively, and vibration control structure is arranged between middle layer platform and lower layer platform, rectangular ring belt is surrounded around vibration control structure, and rectangular ring belt is fixed below middle layer platform by second connecting plate, and magnetic head is arranged on the side surface of rectangular ring belt;

[0013] Vibration detection part includes piezoelectric sensor, laser vision sensing unit and laser displacement sensor, piezoelectric sensor is arranged on flexible beam and flexible composite board, laser displacement sensor is fixed on magnetic suspension platform, and laser vision sensing unit is projected on the free end of long flexible beam;

[0014] Drive control part includes piezoelectric driver, piezoelectric amplifier, charge amplifier, terminal plate, motion control card and computer, piezoelectric driver is installed on flexible beam and flexible composite board, piezoelectric amplifier is connected with piezoelectric driver, charge amplifier is connected with piezoelectric sensor, terminal plate is connected with piezoelectric amplifier, laser displacement sensor, charge amplifier and motion control card are connected with terminal plate respectively, and computer is connected with motion control card;

[0015] Piezoelectric sensor collects vibration signal of flexible beam and flexible composite board, laser displacement sensor collects vibration signal of magnetic suspension structure, vibration signal is transmitted to computer by terminal plate and motion control card, computer generates corresponding control signal, control signal is output to piezoelectric amplifier by motion control card and terminal plate, vibration of flexible beam and composite board is controlled by piezoelectric driver, and vibration of magnetic suspension structure is controlled by three-phase planar coil and magnetic head.

[0016] Preferably, the long flexible beam, the short flexible beam and the flexible composite plate beam are hinged by hinges.

[0017] Preferably, the piezoelectric driver is pasted on the flexible beam and the flexible composite plate at a position 30mm away from the hinged end of the flexible composite plate, and is pasted symmetrically on both sides, with 2 pieces on each side.

[0018] Preferably, the piezoelectric sensor is pasted on the flexible beam and the flexible composite plate at a position 60mm away from the hinged end of the flexible composite plate, and is pasted on one side.

[0019] Preferably, the suspension base is embedded with a neodymium magnet on the upper surface opposite to the upper coil base and on the lower surface opposite to the lower coil base.

[0020] Preferably, the magnetic suspension unit further comprises a base fixed to the upper platform, and the magnetic suspension platform is fixed to the base.

[0021] Preferably, the vibration damping structure is composed of four longitudinal and three horizontal flexible bodies, the flexible bodies are provided with concave structures and convex structures, and the flexible bodies are vertically inserted and embedded by the convex structures and the concave structures.

[0022] Preferably, the middle platform and the lower platform are respectively provided with clamping grooves corresponding to the convex structures of the flexible bodies, and the flexible bodies are clamped in the clamping grooves through the convex structures.

[0023] Preferably, the laser vision sensing unit comprises a line laser emitter, a point laser emitter and two monocular cameras, the line laser emitter and one monocular camera are used to detect the vibration signal of one long flexible beam, and the point laser emitter and one monocular camera are used to detect the vibration signal of another long flexible beam.

[0024] A kind of multi-flexible magnetic suspension structure active and passive vibration measurement and control method, applied to the multi-flexible magnetic suspension structure active and passive vibration measurement and control device of any one of the above, it include the following steps:

[0025] S1: by air turntable rotating upper platform or by force hammer excitation rectangular ring, make flexible beam, flexible composite plate and magnetic suspension structure fully excited vibration;

[0026] S2: piezoelectric sensor collects the vibration signal of flexible beam and flexible composite plate, laser displacement sensor collects the vibration signal of magnetic suspension structure, and vibration signal is transmitted to computer by terminal board and motion control card;

[0027] S3: computer generates corresponding control signal according to vibration signal, control signal is output to piezoelectric amplifier by motion control card and terminal board, and vibration of flexible beam and flexible composite plate is controlled by piezoelectric driver, and vibration of magnetic suspension structure is controlled by three-phase plane coil and magnetic head.

[0028] Compared with the prior art, the present application has the following advantages and beneficial effects:

[0029] 1. The present application assembles long flexible beams, short flexible beams and flexible composite plates into a multi-flexible articulated structure, and fixes the flexible composite plates on a magnetic suspension structure, facilitating the study of the coupling characteristics and vibration characteristics of the multi-flexible articulated structure.

[0030] 2. The present application provides a solution for non-contact control by providing a magnetic suspension driving and displacement detection structure.

[0031] 3. The present application realizes the rotation of the upper platform through an air turntable, realizes non-mechanical contact rotation, has significant error-free and jitter-free motion characteristics, is very suitable for the positioning and rotation of high-precision instruments, and provides a guarantee for precision control.

[0032] 4. The vibration damping structure of the present application adopts a special geometric shape, is embedded in multiple directions, better absorbs and damps vibration, and can control displacement bias in multiple directions.

[0033] 5. The vibration control of the rectangular ring belt and the magnetic head of the present application controls and corrects the X and Y direction bias of the overall device through a non-contact method.

[0034] 6. The present application has good adjustability, can replace the flexible composite plate with other vibration reduction sandwich structures or ordinary flexible plate structures for comparison of vibration reduction effect and distinction, can adjust the embedding mode and number of layers of the vibration damping structure, and obtains the best passive vibration suppression effect.

[0035] 7. The present application uses two types of laser emitters, can cope with structures to be measured of various angles and shapes, and the laser vision sensing unit composed of the laser emitters and the monocular camera has high stability and precision, is less affected by environmental light, and is an excellent solution for non-contact sensors. BRIEF DESCRIPTION OF DRAWINGS

[0036] Figure 1 It is a structural schematic diagram of a multi-flexible magnetic suspension structure active and passive vibration measurement and control device.

[0037] Figure 2 It is a structural schematic diagram of a magnetic suspension platform.

[0038] Figure 3 It is a structural schematic diagram of a three-phase planar coil and a base on the coil.

[0039] Figure 4 It is a structural schematic diagram of a three-phase planar coil and a base under the coil.

[0040] Figure 5 It is a structural schematic diagram of a suspension base.

[0041] Figure 6 It is a side view of the suspension base.

[0042] Figure 7 Structure diagram of air turntable and suspension table flange.

[0043] Figure 8 Structure assembly diagram of flexible body.

[0044] Figure 9 Structure diagram of support and magnetic head.

[0045] BRIEF DESCRIPTION OF DRAWINGS

[0046] 1-experimental table; 2-support; 3-rectangular ring belt; 4-middle platform; 5-long flexible beam; 6-short flexible beam; 7-flexible composite plate; 8-hinge; 9-first connecting plate; 10-upper platform; 11-magnetic suspension unit; 12-air turntable; 13-magnetic head; 14-vibration damping structure; 15-lower platform; 16-second connecting plate; 17-piezoelectric driver; 18-magnetic suspension platform; 19-piezoelectric sensor; 20-linear laser emitter; 21-camera holder; 22-point laser emitter; 23-slideway; 24-visual experimental table; 25-monocular camera;

[0047] 26-working platform; 27-laser displacement sensor; 28-three-phase planar coil; 29-coil lower base; 30-suspension base; 31-clamping groove; 32-coil upper base; 33-base; 34-neodymium magnet; 35-suspension table flange; 36-concave structure; 37-convex structure; 38-magnet; 39-copper coil; 40-flexible hinge; 41-piezoelectric amplifier; 42-motion control card; 43-computer; 44-terminal board; 45-charge amplifier. DETAILED DESCRIPTION

[0048] The multi-flexible magnetic suspension structure active and passive vibration measurement and control device and method will be further described below in combination with the drawings and specific embodiments.

[0049] Referring to Figure 1 The present application discloses a multi-flexible magnetic suspension structure active and passive vibration measurement and control device, which comprises a flexible hinge magnetic suspension part, a vibration damping control part, a vibration detection part and a driving control part, wherein the flexible hinge magnetic suspension part comprises a multi-flexible hinge structure and a magnetic suspension structure. Figure 1 The dashed lines in the figure indicate the connection relationship between the devices, and the direction arrows show the transmission direction of the detection and control signal flow.

[0050] Referring to Figure 1The multi-flexible hinge structure comprises four long flexible beams 5, four short flexible beams 6 and four flexible composite plates 7. The four long flexible beams 5 are of the same material and size, the four short flexible beams 6 are of the same material and size, and the four flexible composite plates 7 are of the same material and size. One end of the long flexible beam 5 and one end of the short flexible beam 6 are respectively hinged to one end of the flexible composite plate 7, the other end of the long flexible beam 5 is a free end, and the other end of the short flexible beam 6 is hinged to the middle of the long flexible beam 5. The long flexible beam 5, the short flexible beam 6 and the flexible composite plate 7 are hinged by a hinge 8.

[0051] Please refer to Figure 1 and Figure 2 The magnetic suspension structure is arranged on the upper platform 10, and the magnetic suspension structure comprises four magnetic suspension units 11 arranged around the upper platform 10. The magnetic suspension unit 11 comprises a magnetic suspension platform 18, a working platform 26, two coil lower bases 29, a suspension base 30, two coil upper bases 32, a base 33 and a neodymium magnet 34. The four magnetic suspension platforms 18 are fixed to the upper platform 10 in a central symmetry by being staggered with each other.

[0052] Please refer to Figure 2 , Figure 3 and Figure 4 The working platform 26 is fixed above the suspension base 30 by a flexible hinge 40. The magnetic suspension platform 18 is arranged outside the suspension base 30, the other end of the flexible composite plate 7 is fixedly connected to the working platform 26 through the first connecting plate 9, the coil upper base 32 and the coil lower base 29 are arranged on both sides of the suspension base 30, and the suspension base 30 is located between the coil upper base 32 and the coil lower base 29, and the coil upper base 32 and the coil lower base 29 are provided with three-phase planar coils 28. The base 33 is fixed to the upper platform 10, the magnetic suspension platform 18 is fixed to the base 33, and two magnetic suspension platforms 18 in the X-axis and Y-axis directions are respectively fixed with laser displacement sensors 27.

[0053] Please refer to Figure 2 , Figure 5 and Figure 6 The magnetic suspension platform 18 uses a sandwiched suspension structure to make the suspension base 30 suspended by force. The suspension force is provided by the three-phase planar coils 28 arranged in the coil lower base 29 and the coil upper base 32. The three-phase planar coils 28 can provide vertical magnetic force and magnetic force in the X-axis and Y-axis directions through specific current. The displacement of the magnetic suspension structure in the X-axis and Y-axis directions is measured by the laser displacement sensor 27. The suspension base 30 is embedded with the neodymium magnet 34 on the lower surface opposite to the coil lower base 29, and is subjected to the repulsive force of the lower planar coil. The suspension base 30 is embedded with the neodymium magnet 34 on the upper surface opposite to the coil upper base 32, and is subjected to the repulsive force of the upper planar coil.

[0054] Please refer to Figure 1The vibration control part comprises a rectangular ring belt 3, a middle layer platform 4, four magnetic heads 13, a vibration reduction structure 14 and a lower layer platform 15. The lower layer platform 15 is fixed to the experimental table 1 by bolts, the vibration reduction structure 14 is fixedly connected with the middle layer platform 4 and the lower layer platform 15 respectively, and the vibration reduction structure 14 is arranged between the middle layer platform 4 and the lower layer platform 15.

[0055] Please refer to Figure 1 and Figure 7 The vibration control part is connected with the upper layer platform 10 through the air turntable 12, the air turntable 12 is arranged at the center of the middle layer platform 4, the flange 35 of the air suspension table on the air turntable 12 is fixed to the upper layer platform 10 by bolts, and the air turntable 12 is used to drive the upper layer platform 10 to rotate.

[0056] Please refer to Figure 1 and Figure 8 The vibration reduction structure 14 is composed of four longitudinal and three transverse flexible bodies, and the flexible bodies are provided with concave structures 36 and convex structures 37. The vibration reduction structure 14 comprises 24 concave structures 26 and 48 convex structures 37, and the flexible bodies are vertically inserted and embedded by the convex structures 37 and the concave structures 36. The middle layer platform 4 and the lower layer platform 15 are respectively provided with clamping grooves 31 corresponding to the convex structures 37 of the flexible bodies, so as to play a role of structural stability. The flexible bodies are clamped in the clamping grooves 31 through the convex structures 37, and the assembly mode is as shown in Figure 8 .

[0057] Please refer to Figure 1 and Figure 9 The rectangular ring belt 3 is arranged around the vibration reduction structure 14, and the rectangular ring belt 3 is fixed to the middle layer platform 4 at the middle position of each side through four second connecting plates 16 and is located below the middle layer platform 4. The four magnetic heads 13 are arranged on the four sides of the rectangular ring belt 3, and the magnetic heads 38 are fixed on the support 2 by bolts, and the support 2 is fixed on the experimental table 1. The magnetic head 13 comprises a magnet 38 and a copper coil 39, and when the coil passes through a specific current, a corresponding magnetic flux will be generated. Due to the position setting of the magnet 38 and the copper coil 39, a specific bias flux will be generated, and a bias force towards the rectangular ring belt 3 will be generated.

[0058] The vibration detection part comprises a piezoelectric sensor 19, a line laser emitter 20, a camera holder 21, a point laser emitter 22, a slide rail 23, a visual experimental table 24, a monocular camera 25 and a laser displacement sensor 27. The piezoelectric sensor 17 is arranged on the long flexible beam 5, the short flexible beam 6 and the flexible composite plate 7, the laser displacement sensor 27 is fixed to the magnetic suspension platform 18, and the laser vision sensing unit is projected on the free ends of the two long flexible beams 7.

[0059] In the embodiment, the piezoelectric sensor 19 is attached to the long flexible beam 5, the short flexible beam 6 and the flexible composite plate 7 at a position 60 mm away from the hinged end of the flexible composite plate 7, and is attached on one side. The monocular camera 25 is connected with the camera holder 21, and the camera holder 21 is arranged on the slide rail 23. The line laser emitter 20, the point laser emitter 22 and the slide rail 23 are arranged on the visual experiment table 24, and the visual experiment table 24 is arranged on one side of the experiment table 1, and the angle is adjusted so that the laser can be projected on the long flexible beam 7 throughout the whole process.

[0060] The line laser emitter 20, the point laser emitter 22 and the two monocular cameras 25 form a laser vision sensing unit, and the laser vision sensing unit measures the target displacement by using the structured light vision principle. The line laser emitter 20 and the monocular camera 25 jointly detect the vibration displacement of the inner long flexible beam 7, and the point laser emitter 22 and the monocular camera 25 jointly detect the vibration displacement of the outer long flexible beam 7.

[0061] The driving control part includes the piezoelectric driver 17, the piezoelectric amplifier 41, the motion control card 42, the computer 43, the terminal board 44 and the charge amplifier 45. The piezoelectric driver 17 is arranged on the long flexible beam 5, the short flexible beam 6 and the flexible composite plate 7. The piezoelectric amplifier 41 is connected with the piezoelectric driver 17. The charge amplifier 45 is connected with the piezoelectric sensor 19. The terminal board 44 is connected with the piezoelectric amplifier 41. The laser displacement sensor 27, the charge amplifier 41 and the motion control card 42 are respectively connected with the terminal board 44. The computer 43 is connected with the motion control card 42.

[0062] In the embodiment, the piezoelectric driver 17 is attached to the long flexible beam 5, the short flexible beam 6 and the flexible composite plate 7 at a position 30 mm away from the hinged end of the flexible composite plate 7, and is attached on two sides in a symmetrical manner, and two pieces are attached on each side.

[0063] The piezoelectric sensor 19 collects the vibration signals of the long flexible beam 5, the short flexible beam 6 and the flexible composite plate 7. The laser displacement sensor 27 collects the vibration signals of the magnetic suspension structure. The vibration signals are transmitted to the computer 43 through the terminal board 44 and the motion control card 42. The computer 43 generates corresponding control signals. The control signals are output to the piezoelectric amplifier 41 through the motion control card 42 and the terminal board 44. The vibration of the long flexible beam 5, the short flexible beam 6 and the flexible composite plate 7 is controlled through the piezoelectric driver 17. The vibration of the magnetic suspension structure is controlled through the three-phase planar coil 28 and the magnetic head 13.

[0064] The active control of the multi-flexible magnetic suspension structure active and passive vibration measurement and control device includes the following four aspects:

[0065] The first is a rotating driving part, the air turntable 12 rotates at a certain speed and a set angle after receiving the control signal transmitted by the computer 43 through the motion control card 42 and the terminal board 44, so as to excite the vibration of the long flexible beam 5, the short flexible beam 6 and the flexible composite plate 7 on the upper platform 10.

[0066] The second is the magnetic force control generated by the three-phase planar coil 28 and the neodymium magnet 34 of the magnetic suspension structure. The laser displacement sensor 27 of the magnetic suspension platform 18 is connected with the motion control card 42 through the terminal board 44, and the motion control card 42 is connected with the computer 43. When the long flexible beam 5, the short flexible beam 6 and the flexible composite plate 7 generate vibration, the displacement data is transmitted to the computer 43, and the control amount is transmitted to the three-phase planar coil 28 through the motion control card 42, the terminal board 44 and the piezoelectric amplifier 41 according to the algorithm feedback, so as to generate the suspension force and the X-axis and Y-axis direction force.

[0067] The third is a piezoelectric driver control part, and the piezoelectric driving vibration control is mainly controlled by the piezoelectric driver 17. After the computer 43 receives the vibration signal of the piezoelectric sensor 19 or the monocular camera 25, corresponding vibration control algorithm processing is performed, the control amount is transmitted to the terminal board 44 through the motion control card 42, the piezoelectric amplifier 41 connected to the terminal board 44 outputs the control signal, and then the piezoelectric driver 17 is controlled to realize vibration control.

[0068] The fourth is a vibration damping vibration control part. After the computer 43 receives the vibration signal of the monocular camera 25, the structural bias contained in the vibration is calculated, the corresponding control amount is transmitted to the terminal board 44 through the motion control card 42, the piezoelectric amplifier 41 connected to the terminal board 44 outputs the control signal, and then the magnetic head 13 is controlled to realize the bias control of the vibration damping vibration part.

[0069] The application further discloses a kind of multi-flexible magnetic suspension structure active and passive vibration measurement and control method, applied to the multi-flexible magnetic suspension structure active and passive vibration measurement and control device described above, including the following steps:

[0070] S1: the long flexible beam 5, the short flexible beam 6, the flexible composite plate 7 and the magnetic suspension structure are fully excited to vibrate by rotating the upper platform 10 through the air turntable 12 or exciting the rectangular ring belt 3 through the force hammer.

[0071] S2: the piezoelectric sensor 19 collects the vibration signal of the long flexible beam 5, the short flexible beam 6 and the flexible composite plate 7, and the laser displacement sensor 27 collects the vibration signal of the magnetic suspension structure, and the vibration signal is transmitted to the computer 43 through the terminal board 44 and the motion control card 42.

[0072] S3: The computer 43 generates a corresponding control signal according to the vibration signal, and the control signal is output to the piezoelectric amplifier 41 through the motion control card 42 and the terminal board 44, so as to control the vibration of the long flexible beam 5, the short flexible beam 6 and the flexible composite plate 7 through the piezoelectric driver 17, and control the vibration of the magnetic levitation structure through the three-phase planar coil 28 and the magnetic head 13.

[0073] Finally, the algorithm parameters are adjusted, the optimal control effect is obtained by repeating the experiment, and the experimental results are analyzed to obtain the passive vibration control effect and vibration characteristics of the multi-flexible magnetic levitation structure.

[0074] In the embodiment, the size of the four long flexible beams 5 is 380mm*60mm*2mm, the size of the four short flexible beams 6 is 200mm*60mm*2mm, the size of the four flexible composite plates 7 is 115mm*60mm*3mm, the thickness of the interlayer structure of the flexible composite plate 7 is 1mm, and the structure of the flexible composite plate 7 can be realized by 3D printing technology. All the flexible beam material parameters are completely the same, which are all epoxy resin materials, the elastic modulus of the epoxy resin is Ep=34.64Gpa, and the density is p=1840kg / m 3 .

[0075] The piezoelectric driver 17 is made of piezoelectric ceramic material, and the size is 25mm*10mm*1mm. The piezoelectric ceramic material is pasted on the long flexible beam 5, the short flexible beam 6 and the flexible composite plate 7 in the form of a sheet, and the distance from the upper and lower edges of the long flexible beam 5, the short flexible beam 6 and the flexible composite plate 7 in the width direction is 10mm. The elastic modulus of the piezoelectric ceramic material is Ep=63Gpa, and d31=-166pm / V.

[0076] The piezoelectric sensor 19 is made of piezoelectric ceramic material, and the size is 12mm*5mm*1mm. The piezoelectric ceramic material is pasted on the middle line of the long flexible beam 5, the short flexible beam 6 and the flexible composite plate 7 in the width direction in the form of a sheet.

[0077] The laser displacement sensor 27 selects HG-C1100, and the repeatability and measurement range are 70pm and ±35mm respectively. The analog output is a voltage signal of 0V-5V.

[0078] The monocular camera 25 selects the acA1600-60gc industrial camera of Basler company, and is equipped with the M1214-MP2 fixed focus lens of computar company, the focal length is 12mm, and the field of view range is about 540mm*405mm.

[0079] The line laser emitter 20 and the point laser emitter 22 respectively adopt the line laser emitter FU650AD5-GC12 and the point laser emitter FU650AD5-GC12 of Fuli Science and Technology Company, and the power is 5mW.

[0080] The vibration damping structure 14 formed by embedding the flexible body with the concave structure 36 and the convex structure 37 is realized by 3D printing technology, and the material is epoxy resin.

[0081] The air turntable 12 is selected from an Aerotech ABRS series air bearing precision direct drive turntable, the resolution is 0.036-0.18 arc-sec, and the positioning accuracy is ±2 arc-sec.

[0082] The motion control card 42 is selected from a DMC-2x00 digital motion controller produced by the GALIL company in the United States, and a standard PCI bus interface is provided. The CPU model of the selected computer 43 is corei5 12400, the memory is 8G, and the mainboard has a PCI-e slot, so that the motion control card 42 can be installed. The charge amplifier 45 is selected from a YE5850 type charge amplifier of Jiangsu Lianeng Electronics Co., Ltd.

[0083] In summary, the present application has the following advantages and beneficial effects:

[0084] 1. The long flexible beam 5, the short flexible beam 6 and the flexible composite plate 7 are assembled into a multi-flexible articulated structure, and the flexible composite plate 7 is fixed on the magnetic suspension structure, so that the coupling characteristics and vibration characteristics of the multi-flexible articulated structure are conveniently studied.

[0085] 2. The magnetic suspension driving and displacement detection structure is provided, so that a solution is provided for non-contact control.

[0086] 3. The air turntable 12 is used to realize the rotation of the upper platform 10, realize non-mechanical contact rotation, has significant error-free and jitter-free motion characteristics, is very suitable for positioning and rotation of high-precision instruments, and provides a guarantee for precision control.

[0087] 4. The vibration damping structure 14 has a special geometric shape and is embedded in multiple directions, better absorbing and damping vibration, and can control displacement bias in multiple directions.

[0088] 5. The vibration control of the rectangular ring belt 3 and the magnetic head 13 is controlled and corrected by a non-contact method to the X and Y direction bias of the overall device.

[0089] 6. The present application has good adjustability, and the flexible composite plate 7 can be replaced by other damping interlayer structures or ordinary flexible plate structures for comparison of damping effect and difference, the embedding mode and the number of layers of the vibration damping structure 14 can be adjusted, and the best passive vibration suppression effect is obtained.

[0090] 7. The present application uses two types of laser emitters, can cope with various angles and shapes of measured structures, and the laser vision sensing unit composed of the laser emitter and the monocular camera has high stability and precision, is less affected by environmental light, and is an excellent solution for non-contact sensors.

[0091] The above description is for the preferred embodiment of the present application, but the embodiment is not intended to limit the scope of the patent application of the present application. Any equivalent changes or modifications made under the technical spirit of the present application should be covered by the patent scope of the present application.

Claims

1. A device for active and passive vibration monitoring and control of a multi-flexible magnetic levitation structure, characterized in that, include: The system comprises a flexible hinged magnetic levitation section, a vibration damping and control section, a vibration detection section, and a drive control section. The flexible hinged magnetic levitation section includes multiple flexible hinge structures and a magnetic levitation structure. The multi-flexible hinge structure includes a long flexible beam, a short flexible beam, and a flexible composite plate. One end of the long flexible beam and one end of the short flexible beam are respectively hinged to one end of the flexible composite plate. The other end of the long flexible beam is a free end, and the other end of the short flexible beam is hinged to the middle of the long flexible beam. The magnetic levitation structure includes a magnetic levitation unit arranged around the upper platform. The magnetic levitation unit includes a magnetic levitation platform, a working platform, an upper coil base, a lower coil base, and a suspension base. The magnetic levitation platform surrounds the suspension base. The other end of the flexible composite plate is fixedly connected to the working platform through a first connecting plate. The upper coil base and the lower coil base are arranged on both sides of the suspension base, and the suspension base is located between the upper coil base and the lower coil base. The upper coil base and the lower coil base are equipped with three-phase planar coils. The vibration damping control section is connected to the upper platform via an air turntable. The vibration damping control section includes a middle platform, a lower platform, a damping structure, a rectangular ring belt, and a magnetic head. The damping structure is fixedly connected to the middle platform and the lower platform respectively, and the damping structure is located between the middle platform and the lower platform. The rectangular ring belt surrounds the damping structure and is fixed to the lower part of the middle platform via a second connecting plate. The magnetic head is located on the side of the rectangular ring belt. The vibration detection section includes a piezoelectric sensor, a laser vision sensing unit, and a laser displacement sensor. The piezoelectric sensor is set on the flexible beam and the flexible composite plate, the laser displacement sensor is fixed to the magnetic levitation platform, and the laser vision sensing unit projects onto the free end of the long flexible beam. The drive control section includes a piezoelectric actuator, a piezoelectric amplifier, a charge amplifier, a terminal block, a motion control card, and a computer. The piezoelectric actuator is mounted on the flexible beam and the flexible composite plate. The piezoelectric amplifier is connected to the piezoelectric actuator, the charge amplifier is connected to the piezoelectric sensor, and the terminal block is connected to the piezoelectric amplifier. The laser displacement sensor, the charge amplifier, and the motion control card are respectively connected to the terminal block, and the computer is connected to the motion control card. Piezoelectric sensors collect vibration signals from the flexible beam and flexible composite plate, while laser displacement sensors collect vibration signals from the magnetic levitation structure. The vibration signals are transmitted to the computer via a terminal block and motion control card. The computer generates corresponding control signals, which are then output to the piezoelectric amplifier via the motion control card and terminal block. The vibration of the flexible beam and composite plate is controlled by the piezoelectric actuator, and the vibration of the magnetic levitation structure is controlled by a three-phase planar coil and a magnetic head.

2. The active and passive vibration monitoring and control device for a multi-flexible magnetic levitation structure according to claim 1, characterized in that, The long flexible beams, short flexible beams, and flexible composite plate beams are connected by hinges.

3. The active and passive vibration monitoring and control device for a multi-flexible magnetic levitation structure according to claim 2, characterized in that, The piezoelectric actuators are attached to the flexible beam and the flexible composite plate at a position 30mm away from the hinge end of the flexible composite plate, symmetrically attached on both sides, with 2 pieces attached to each side.

4. The active and passive vibration monitoring and control device for a multi-flexible magnetic levitation structure according to claim 2, characterized in that, The piezoelectric sensor is attached to the flexible beam and the flexible composite plate at a position 60mm away from the hinge end of the flexible composite plate, and is attached to one side only.

5. The active and passive vibration monitoring and control device for a multi-flexible magnetic levitation structure according to claim 1, characterized in that, Neodymium magnets are embedded in the upper surface of the levitation base, which is directly opposite the upper base of the coil, and the lower surface, which is directly opposite the lower base of the coil.

6. The active and passive vibration monitoring and control device for a multi-flexible magnetic levitation structure according to claim 1, characterized in that, The magnetic levitation unit also includes a base, which is fixed to the upper platform, and the magnetic levitation platform is fixed to the base.

7. The active and passive vibration monitoring and control device for a multi-flexible magnetic levitation structure according to claim 1, characterized in that, The vibration damping structure is composed of four vertical and three horizontal flexible bodies. The flexible bodies have concave and convex structures, which are interlocked vertically.

8. The active and passive vibration monitoring and control device for a multi-flexible magnetic levitation structure according to claim 7, characterized in that, The middle platform and the lower platform are respectively provided with slots for corresponding flexible body convex structures, and the flexible body is secured in the slots through the convex structures.

9. The active and passive vibration monitoring and control device for a multi-flexible magnetic levitation structure according to claim 1, characterized in that, The laser vision sensing unit includes a line laser emitter, a point laser emitter, and two monocular cameras. The line laser emitter and one monocular camera are used to detect the vibration signal of a long flexible beam, and the point laser emitter and one monocular camera are used to detect the vibration signal of another long flexible beam.

10. A method for active and passive vibration measurement and control of a multi-flexible magnetic levitation structure, applied to the active and passive vibration measurement and control device for the multi-flexible magnetic levitation structure as described in any one of claims 1 to 9, characterized in that, Includes the following steps: S1: The upper platform is rotated by an air turntable or the rectangular ring belt is excited by a force hammer, so that the flexible beam, flexible composite plate and magnetic levitation structure are fully excited to vibrate; S2: Piezoelectric sensors collect vibration signals from flexible beams and flexible composite plates, and laser displacement sensors collect vibration signals from magnetic levitation structures. The vibration signals are transmitted to the computer through terminal blocks and motion control cards. S3: The computer generates corresponding control signals based on the vibration signals. The control signals are output to the piezoelectric amplifier through the motion control card and terminal board. The piezoelectric actuator controls the vibration of the flexible beam and flexible composite plate, and the three-phase planar coil and magnetic head control the vibration of the magnetic levitation structure.

Images