A cleaning maintenance device for deposition apparatus parts

Abstract

The application is suitable for the field of part cleaning and maintenance, and provides a cleaning and maintenance device for deposition equipment parts, which comprises a cleaning box and a supporting frame, the supporting frame is installed on the cleaning box through a first telescopic cylinder, a cavity is arranged in the cleaning box, and a water inlet and a drain pipe are further arranged on the cleaning box; a cleaning bin is installed in the cleaning box, a plurality of groups of water spraying blocks are further fixedly installed in the cleaning bin, a placement area for placing parts is formed between two adjacent groups of water spraying blocks, a clamping assembly and a rotating assembly are further arranged on the cleaning bin; and a cleaning brush head for cleaning the parts is rotatably installed on the supporting frame through a driving assembly, and the driving assembly is further connected with the rotating assembly through a linkage piece. The cleaning bin, the clamping assembly, the rotating assembly, the cleaning brush head and the driving assembly are cooperatively arranged, so that comprehensive cleaning of the parts can be realized.

Description

Technical Field

[0001] This invention relates to the field of parts cleaning and maintenance, specifically a cleaning and maintenance device for parts of a deposition equipment. Background Technology

[0002] Deposition equipment is a scientific instrument used in fields such as physics, chemistry, and materials science. Deposition equipment includes atomic layer deposition equipment, thin film deposition equipment, chemical vapor deposition equipment, and amorphous silicon deposition equipment. During the maintenance of deposition equipment, it is usually necessary to clean some parts.

[0003] Existing cleaning and maintenance devices for deposition equipment parts typically involve placing the parts inside the cleaning chamber and rinsing them with a water gun. This method is insufficient for thorough cleaning of the parts, and collisions between parts and between parts and the sidewalls of the cleaning chamber can easily cause damage during the rinsing process. Therefore, there is an urgent need to provide a cleaning and maintenance device for deposition equipment parts to overcome the shortcomings in current practical applications. Summary of the Invention

[0004] The purpose of this invention is to provide a cleaning and maintenance device for parts of a deposition equipment, which aims to solve the problems mentioned in the background art.

[0005] This invention is implemented as follows: a cleaning and maintenance device for parts of a deposition equipment, comprising:

[0006] A cleaning tank and a support frame, wherein the support frame is mounted on the cleaning tank via a first telescopic cylinder, the cleaning tank has a cavity inside, and the cleaning tank is also provided with a water inlet and a drain pipe;

[0007] The cleaning chamber is installed inside the cleaning box, and multiple sets of water spray blocks are fixedly installed inside the cleaning chamber. A placement area for placing parts is formed between two adjacent sets of water spray blocks. The cleaning chamber is also equipped with a clamping component and a rotating component. The clamping component fixes the parts by pushing them to one side of the rotating component, and works with the rotating component to drive the parts to rotate.

[0008] The cleaning brush head is mounted on the support frame via a drive assembly, and the drive assembly is also connected to the rotating assembly via a linkage. The first telescopic cylinder moves the support frame toward the cleaning tank to press the cleaning brush head onto the part, and the drive assembly cleans the part by rotating the cleaning brush head.

[0009] As a further aspect of the present invention: the rotating assembly includes:

[0010] The first clamping block, and multiple sets of the first clamping blocks are rotatably mounted on the cleaning chamber via a support shaft, and the first clamping block is located in the placement area;

[0011] The third gear is fixedly mounted on the support shaft;

[0012] And a third gear ring rotatably mounted on the cleaning chamber, and the third gear ring meshes with a third gear, the third gear ring being connected to a linkage component.

[0013] As a further aspect of the present invention: the clamping assembly includes:

[0014] A drive box is fixedly installed inside the cleaning chamber, and the drive box is provided with an oil guiding channel.

[0015] The second clamping block is slidably installed in the oil guide channel via a push rod, and multiple sets of the second clamping blocks are provided. The second clamping block is rotatably connected to the push rod.

[0016] A spring, which is sleeved on the push rod;

[0017] And a conduit for connecting the oil channel to the oil supply assembly.

[0018] As a further aspect of the present invention: the driving component includes:

[0019] A rotating box, which is rotatably mounted on a support frame via a bracket;

[0020] The motor is fixedly mounted on the support frame, and a first gear is fixedly mounted on the output shaft of the motor;

[0021] The first gear ring is fixedly mounted on the rotating box and meshes with the first gear.

[0022] And a transmission assembly for driving the cleaning brush head to rotate.

[0023] As a further aspect of the present invention: the transmission assembly includes:

[0024] The second gear ring is fixedly installed inside the rotating box;

[0025] The elastic telescopic shaft is rotatably mounted on the bracket, with one end of the elastic telescopic shaft fixedly connected to the cleaning brush head, and the other end of the elastic telescopic shaft fixedly mounted with a second gear, which meshes with a second gear ring.

[0026] As a further aspect of the present invention: the linkage component includes:

[0027] At least one set of linkage rods, which are fixedly installed on the rotating assembly;

[0028] And receiving slots, which are provided in multiple sets on the rotating box.

[0029] As a further aspect of the present invention: the water spray block is hollow inside, and multiple sets of water passage holes are provided on the water spray block; the bracket is also provided with a suction component connected to the water spray block.

[0030] As a further aspect of the present invention: the suction assembly includes:

[0031] A suction box, which is fixedly installed on a bracket, and a piston is slidably installed inside the suction box;

[0032] An elastic telescopic tube is used to connect the water spray block and the suction box. One end of the elastic telescopic tube is slidably installed inside the water spray block, and the other end of the elastic telescopic tube is fixedly connected to the suction box.

[0033] And an elastic telescopic push-pull rod, one end of which is fixedly installed on the clamping assembly, and the other end of which is fixedly connected to the piston.

[0034] As a further aspect of the present invention: a tray is provided at the bottom of the cleaning chamber, and multiple sets of through holes are provided on the tray; a second telescopic cylinder for moving the tray is also provided inside the cleaning chamber.

[0035] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0036] The first telescopic cylinder moves the support frame away from the cleaning tank, facilitating the placement of parts into the cleaning chamber. The clamping assembly secures the parts by pushing them towards the rotating assembly. The first telescopic cylinder, by moving the support frame towards the cleaning tank, presses the cleaning brush head onto the parts. The drive assembly rotates the cleaning brush head to clean the parts. The rotating assembly rotates the parts, causing them to flip over within the cleaning chamber, allowing the cleaning brush head to clean the other side, thus achieving comprehensive cleaning. This coordinated arrangement of the cleaning chamber, clamping assembly, rotating assembly, cleaning brush head, and drive assembly avoids the problems of existing sedimentation equipment where parts are typically placed in the cleaning chamber and rinsed with a water gun, making comprehensive rinsing difficult and causing damage due to collisions between parts and between parts and the sidewalls of the cleaning chamber. Attached Figure Description

[0037] Figure 1 This is a schematic diagram of the main structure of an embodiment of the present invention.

[0038] Figure 2 This is a schematic diagram of the front cross-sectional structure according to an embodiment of the present invention.

[0039] Figure 3 This is a partial cross-sectional view of the cleaning chamber in an embodiment of the present invention.

[0040] Figure 4 This is a schematic diagram of the cleaning chamber in an embodiment of the present invention.

[0041] Figure 5 for Figure 4 A top-view sectional structural diagram.

[0042] In the attached diagram: 1-Cleaning tank, 2-First telescopic cylinder, 3-Water inlet, 4-Elastic telescopic tube, 5-Cleaning brush head, 6-Elastic telescopic rotating shaft, 7-Support frame, 8-Motor, 9-Rotating box, 10-Elastic telescopic push-pull rod, 11-Second telescopic cylinder, 12-Cleaning chamber, 13-Linkage rod, 14-Receiving slot, 15-First gear, 16-First gear ring, 17-Second gear ring, 18-Suction box, 19-Bracket, 20-Piston, 21-Second gear, 22-Panel, 23-Conduit, 24-Drain pipe, 25-Third gear ring, 26-First clamping block, 27-Third gear, 28-Support shaft, 29-Water spray block, 30-Drive box, 31-Push rod, 32-Spring, 33-Second clamping block. Detailed Implementation

[0043] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention. The specific implementation of the present invention will be described in detail below with reference to specific embodiments.

[0044] Please see Figures 1-5 This invention provides a cleaning and maintenance device for deposition equipment parts, the device comprising:

[0045] The cleaning box 1 and the support frame 7 are provided. The support frame 7 is installed on the cleaning box 1 by the first telescopic cylinder 2. The cleaning box 1 is provided with a cavity, and the cleaning box 1 is also provided with a water inlet 3 and a drain pipe 24.

[0046] The cleaning chamber 12 is installed inside the cleaning box 1, and multiple sets of water spray blocks 29 are fixedly installed inside the cleaning chamber 12. A placement area for placing parts is formed between two adjacent sets of water spray blocks 29. The cleaning chamber 12 is also provided with a clamping assembly and a rotating assembly. The clamping assembly fixes the parts by pushing them to one side of the rotating assembly, and can drive the parts to rotate in conjunction with the rotating assembly.

[0047] The cleaning brush head 5 is used to clean the parts. The cleaning brush head 5 is rotatably mounted on the support frame 7 by a drive assembly, and the drive assembly is also connected to the rotating assembly by a linkage. The first telescopic cylinder 2 moves the support frame 7 to one side of the cleaning box 1 so that the cleaning brush head 5 is pressed onto the parts. The drive assembly cleans the parts by rotating the cleaning brush head 5.

[0048] In an embodiment of the present invention, water can be input into the cleaning tank 1 through the water inlet 3, and a sealing cap can be provided on the water inlet 3. Water in the cleaning tank 1 can be discharged through the drain pipe 24, which is also provided with a sealing cap. The first telescopic cylinder 2 moves the support frame 7 away from the cleaning tank 1, facilitating the placement of parts into the cleaning chamber 12. The clamping assembly fixes the parts by pushing them towards the rotating assembly. The first telescopic cylinder 2 moves the support frame 7 towards the cleaning tank 1, causing the cleaning brush head 5 to press against the parts. The driving assembly cleans the parts by rotating the cleaning brush head 5. The component rotates, causing it to flip over within the cleaning chamber 12. The cleaning brush head 5 then cleans the other side of the component, achieving a comprehensive cleaning. The placement area is a roughly circular groove. Compared to existing technologies, this invention, through the coordinated arrangement of the cleaning chamber 12, clamping assembly, rotating assembly, cleaning brush head 5, and driving assembly, avoids the problems of existing deposition equipment component cleaning and maintenance devices, which typically involve placing the component in the cleaning chamber and rinsing it with a water gun. This makes it difficult to achieve comprehensive rinsing of the component, and the collisions between components and between the component and the sidewall of the cleaning chamber during rinsing can easily cause damage to the component.

[0049] In one embodiment of the present invention, please refer to Figures 2-5 The rotating assembly includes:

[0050] The first clamping block 26, multiple sets of the first clamping block 26 are rotatably mounted on the cleaning chamber 12 via the support shaft 28, and the first clamping block 26 is located in the placement area;

[0051] The third gear 27 is fixedly mounted on the support shaft 28;

[0052] And a third gear ring 25 rotatably mounted on the cleaning chamber 12, and the third gear ring 25 meshes with the third gear 27, the third gear ring 25 being connected to the linkage component;

[0053] The clamping assembly includes:

[0054] The drive box 30 is fixedly installed inside the cleaning chamber 12, and the drive box 30 is provided with an oil guiding channel.

[0055] The second clamping block 33 is slidably installed in the oil guide channel via the push rod 31, and multiple sets of the second clamping block 33 are provided. The second clamping block 33 is rotatably connected to the push rod 31.

[0056] Spring 32, which is sleeved on push rod 31;

[0057] And conduit 23, which is used for connecting the oil channel and the oil supply assembly.

[0058] In this embodiment, the oil supply assembly includes a hydraulic pump and a hydraulic oil tank. The hydraulic pump is driven by an engine or electric motor, draws oil from the hydraulic oil tank, forms pressurized oil, and guides it into the guide channel through the conduit 23, thereby pushing the push rod 31 to move. The push rod 31 drives the second clamping block 33 to move towards the first clamping block 26. After the oil supply assembly draws out the hydraulic oil from the cleaning chamber 12, the spring 32 can drive the push rod 31 and the second clamping block 33 to reset. By moving the second clamping block 33 towards the first clamping block 26, the part can be fixed between the first clamping block 26 and the second clamping block 33. The third gear ring 25 drives the third gear 27 to rotate, enabling the first clamping block 26 to rotate with the support shaft 28, thereby causing the part to flip over. The surfaces of the first clamping block 26 and the second clamping block 33 are both provided with anti-slip pads.

[0059] In one embodiment of the present invention, please refer to Figure 1 and Figure 2 The driving component includes:

[0060] Rotating box 9, which is rotatably mounted on support frame 7 via bracket 19;

[0061] Motor 8, which is fixedly mounted on support frame 7, and a first gear 15 is fixedly mounted on the output shaft of motor 8;

[0062] The first gear ring 16 is fixedly mounted on the rotating box 9 and meshes with the first gear 15.

[0063] And a transmission assembly for driving the cleaning brush head 5 to rotate;

[0064] The transmission assembly includes:

[0065] The second gear ring 17 is fixedly installed inside the rotating box 9;

[0066] The elastic telescopic shaft 6 is rotatably mounted on the bracket 19, and one end of the elastic telescopic shaft 6 is fixedly connected to the cleaning brush head 5. The other end of the elastic telescopic shaft 6 is fixedly mounted with a second gear 21, which meshes with the second gear ring 17.

[0067] The linkage component includes:

[0068] At least one set of linkage rods 13, wherein the linkage rods 13 are fixedly installed on the rotating assembly;

[0069] And receiving slots 14, which are provided in multiple sets on the rotating box 9.

[0070] In this embodiment, the linkage rod 13 is fixedly installed on the third gear ring 25. Through the cooperation of the motor 8, the first gear 15 and the first gear ring 16, the rotating box 9 can be driven to rotate on the bracket 19. Through the cooperation of the second gear ring 17 and the second gear 21, the elastic telescopic shaft 6 can be driven to rotate, thereby driving the cleaning brush head 5 to rotate. The first telescopic cylinder 2 drives the support frame 7 to move to one side of the cleaning box 1, so that the linkage rod 13 is inserted into the receiving groove 14. The rotating box 9 drives the third gear ring 25 to rotate on the cleaning chamber 12. Through the setting of the elastic telescopic shaft 6, the cleaning brush head 5 can be elastically pressed onto the part, so that the cleaning brush head 5 is in close contact with the part, while avoiding damage to the part, and also preventing the cleaning brush head 5 from affecting the rotation of the part.

[0071] In one embodiment of the present invention, please refer to Figures 2-4 The water spray block 29 is hollow inside, and multiple sets of water passage holes are also provided on the water spray block 29. The bracket 19 is also provided with a suction component connected to the water spray block 29.

[0072] The suction assembly includes:

[0073] The suction box 18 is fixedly installed on the bracket 19, and a piston 20 is slidably installed inside the suction box 18.

[0074] The elastic telescopic tube 4 is used to connect the water spray block 29 and the suction box 18. One end of the elastic telescopic tube 4 is slidably installed in the water spray block 29, and the other end of the elastic telescopic tube 4 is fixedly connected to the suction box 18.

[0075] And an elastic telescopic push-pull rod 10, one end of which is fixedly installed on the clamping assembly, and the other end of which is fixedly connected to the piston 20.

[0076] In this embodiment, the first telescopic cylinder 2 drives the support frame 7 to move back and forth in the vertical direction, and the elastic telescopic push-pull rod 10 drives the piston 20 to move back and forth in the suction box 18. In conjunction with the elastic telescopic tube 4 and the water spray block 29, the water in the cleaning tank 1 can be sucked into the suction box 18 and then sprayed back onto the parts through the water passage on the water spray block 29, thereby improving the cleaning effect.

[0077] In one embodiment of the present invention, please refer to Figure 2 and Figure 4 The bottom of the cleaning chamber 12 is also provided with a support plate 22, and the support plate 22 has multiple sets of through holes. The cleaning box 1 is also provided with a second telescopic cylinder 11 for moving the support plate 22.

[0078] In this embodiment, the support plate 22 is designed to lift the parts before they are fixed, making it easier to fix them. The second telescopic cylinder 11 drives the support plate 22 to move back and forth at the bottom of the cleaning chamber 12, which causes the water at the bottom of the cleaning chamber 12 to collide with the parts, thereby improving the cleaning effect.

[0079] In summary, the working principle of this invention is as follows: the first telescopic cylinder 2 moves the support frame 7 away from the cleaning tank 1, facilitating the placement of parts into the cleaning chamber 12; the clamping assembly fixes the parts by pushing them toward the rotating assembly; the first telescopic cylinder 2 moves the support frame 7 toward the cleaning tank 1, causing the cleaning brush head 5 to press onto the parts; the driving assembly cleans the parts by rotating the cleaning brush head 5; and the rotating assembly flips the parts inside the cleaning chamber 12 by rotating the parts, allowing the cleaning brush head 5 to clean the other side of the parts, thus achieving comprehensive cleaning of the parts.

[0080] In this invention, unless otherwise explicitly specified and limited, the terms "sliding," "rotating," "fixed," and "equipped" should be interpreted broadly. For example, they can refer to welded connections, bolted connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this invention according to the specific circumstances.

[0081] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A cleaning and maintenance device for parts of a deposition equipment, comprising a cleaning tank and a support frame, wherein the support frame is mounted on the cleaning tank via a first telescopic cylinder, the cleaning tank having an internal cavity, and the cleaning tank also having a water inlet and a drain pipe, characterized in that, Also includes: The cleaning chamber is installed inside the cleaning box, and multiple sets of water spray blocks are fixedly installed inside the cleaning chamber. A placement area for placing parts is formed between two adjacent sets of water spray blocks. The cleaning chamber is also equipped with a clamping component and a rotating component. The clamping component fixes the parts by pushing them to one side of the rotating component, and works with the rotating component to drive the parts to rotate. The cleaning brush head is mounted on the support frame by a drive assembly, and the drive assembly is also connected to the rotating assembly by a linkage component. The first telescopic cylinder moves the support frame to one side of the cleaning tank so that the cleaning brush head presses onto the part. The drive assembly cleans the part by rotating the cleaning brush head. The rotating component includes: The first clamping block, and multiple sets of the first clamping blocks are rotatably mounted on the cleaning chamber via a support shaft, and the first clamping block is located in the placement area; The third gear is fixedly mounted on the support shaft; And a third gear ring rotatably mounted on the cleaning chamber, and the third gear ring meshes with the third gear, the third gear ring being connected to the linkage component; The clamping assembly includes: A drive box is fixedly installed inside the cleaning chamber, and the drive box is provided with an oil guiding channel. The second clamping block is slidably installed in the oil guide channel via a push rod, and multiple sets of the second clamping blocks are provided. The second clamping block is rotatably connected to the push rod. A spring, which is sleeved on the push rod; And a conduit, which is used for connecting the oil channel and the oil supply assembly; The second clamping block can fix the part between the first clamping block and the second clamping block by moving to one side of the first clamping block. The third gear ring can make the first clamping block rotate with the support shaft and cause the part to flip over by driving the third gear to rotate.

2. The cleaning and maintenance device for deposition equipment parts according to claim 1, characterized in that, The driving component includes: A rotating box, which is rotatably mounted on a support frame via a bracket; The motor is fixedly mounted on the support frame, and a first gear is fixedly mounted on the output shaft of the motor; The first gear ring is fixedly mounted on the rotating box and meshes with the first gear. And a transmission assembly for driving the cleaning brush head to rotate.

3. The cleaning and maintenance device for deposition equipment parts according to claim 2, characterized in that, The transmission assembly includes: The second gear ring is fixedly installed inside the rotating box; The elastic telescopic shaft is rotatably mounted on the bracket, with one end of the elastic telescopic shaft fixedly connected to the cleaning brush head, and the other end of the elastic telescopic shaft fixedly mounted with a second gear, which meshes with a second gear ring.

4. The cleaning and maintenance device for deposition equipment parts according to claim 2, characterized in that, The linkage component includes: At least one set of linkage rods, which are fixedly installed on the rotating assembly; And receiving slots, which are provided in multiple sets on the rotating box.

5. The cleaning and maintenance device for deposition equipment parts according to claim 2, characterized in that, The water spray block is hollow inside and has multiple sets of water passage holes. The bracket is also equipped with a suction component connected to the water spray block.

6. The cleaning and maintenance device for deposition equipment parts according to claim 5, characterized in that, The suction assembly includes: A suction box, which is fixedly installed on a bracket, and a piston is slidably installed inside the suction box; An elastic telescopic tube is used to connect the water spray block and the suction box. One end of the elastic telescopic tube is slidably installed inside the water spray block, and the other end of the elastic telescopic tube is fixedly connected to the suction box. And an elastic telescopic push-pull rod, one end of which is fixedly installed on the clamping assembly, and the other end of which is fixedly connected to the piston.

7. The cleaning and maintenance device for deposition equipment parts according to claim 1, characterized in that, The bottom of the cleaning chamber is also equipped with a tray, and the tray has multiple sets of through holes. The cleaning chamber is also equipped with a second telescopic cylinder for moving the tray.

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