Assembly tooling and chuck system for auxiliary sealing ring installation

Abstract

This invention provides an assembly fixture and chuck system for assisting in the installation of sealing rings, relating to the field of semiconductor equipment technology. It includes a main body portion matched with a chuck, N mounting portions (N being a positive integer) on the main body portion, and support portions. The support portions are located on the mounting portions, and the number of support portions is M (M being a positive integer). When the sealing ring is fitted over the support portion, the support portion supports the sealing ring from the inside, ensuring that the axial direction of the sealing ring between two adjacent support portions is perpendicular to the radial direction of the groove on the chuck. This allows the upper and lower edges of the sealing ring between two adjacent support portions to simultaneously enter the groove during press-fit installation. By adjusting the relative position of the sealing ring and the groove, this invention ensures that the upper and lower edges of the sealing ring can simultaneously enter the groove during press-fit installation, thus achieving successful installation of the sealing ring.

Description

Technical Field

[0001] This invention relates to the field of semiconductor equipment technology, and in particular to an assembly tooling and chuck system for auxiliary sealing ring installation. Background Technology

[0002] An electrostatic chuck, also known as an E-Chuck, generally consists of a ceramic plate that contacts the wafer at the top. The ceramic plate is connected to a base plate via epoxy resin, forming a groove between them. The base plate has several holes for helium gas to pass through, and the bottom of the base plate receives the power supply. In actual use, the wafer is placed on the upper surface of the E-Chuck, and then plasma gas is introduced to clean the wafer surface. During this process, the plasma gas moves to the sides of the E-Chuck, slowly etching the epoxy resin within the groove. To prevent the epoxy resin from being etched by the plasma gas, a sealing ring is placed inside the groove to isolate the epoxy resin from the plasma gas, thus preventing etching.

[0003] Existing sealing rings are installed into the slot by pressing. Because the sealing rings are made of elastic material, they are prone to twisting and deflection during operation. During installation, the position of the sealing ring relative to the slot is not fixed, and the lower or upper edge of the sealing ring may contact the slot first, forming a fulcrum. This causes the sealing ring to deflect, preventing the uncontacted edge from being properly installed into the slot. Therefore, there is an urgent need for an auxiliary tooling that allows both the upper and lower edges of the sealing ring to enter the slot simultaneously. Summary of the Invention

[0004] The purpose of this invention is to provide an assembly tooling and chuck system for assisting in the installation of sealing rings. By adjusting the relative position of the sealing ring and the groove, it is ensured that the upper and lower edges of the sealing ring can enter the groove simultaneously during pressing installation, thus achieving smooth installation of the sealing ring.

[0005] To achieve the above objectives, the present invention provides an assembly fixture for assisting in the installation of a sealing ring, comprising a main body portion matched with a chuck, N mounting portions disposed on the main body portion, where N is a positive integer, and a support portion;

[0006] The support part is provided on the mounting part, and the number of the support parts is set to M, where M is a positive integer;

[0007] When the sealing ring is fitted outside the support part, the support part supports the sealing ring from the inside, so that the axial direction of the sealing ring between two adjacent support parts is perpendicular to the radial direction of the groove on the chuck, so that when pressed and installed, the upper edge and lower edge of the sealing ring between two adjacent support parts simultaneously enter the groove.

[0008] It also includes a positioning part provided on the support part;

[0009] It also includes a sliding part and an adjusting part, wherein:

[0010] The sliding part is disposed on the supporting part, and the positioning part is slidably disposed on the sliding part;

[0011] The adjustment part is located on the support part and connected to the positioning part. The adjustment part is used to adjust the movement of the positioning part within the sliding part.

[0012] The beneficial effects of this invention are as follows: The supporting portion provides support to the sealing ring from the inside, ensuring that the axial direction of the sealing ring between two adjacent supporting portions is perpendicular to the radial direction of the groove on the chuck. By adjusting the relative position of the sealing ring and the groove, it is ensured that the upper and lower edges of the sealing ring can simultaneously enter the groove during pressing installation, thus achieving smooth installation of the sealing ring. Furthermore, the aforementioned auxiliary tooling ensures that the sealing ring installed in the groove is perpendicular to the groove, allowing the upper and lower ends of the sealing ring to fit tightly against the top and bottom walls of the groove, respectively, achieving a sealing effect.

[0013] Optionally, the N mounting portions are arranged in a ring around the center of the main body.

[0014] Optionally, a single support portion is provided within a single mounting portion.

[0015] Optionally, a plurality of the support portions are provided within a single mounting portion.

[0016] Optionally, the support portion has a rectangular, U-shaped, or harpoon-shaped cross-section along the axial direction of the chuck.

[0017] Optionally, it also includes a positioning part disposed on the support part, the positioning part being matched with the slot;

[0018] When the sealing ring is placed inside the positioning part, the positioning part makes the sealing ring and the slot at the same height.

[0019] Optionally, the positioning part is a positioning groove formed by recessing from the surface of the support part inward.

[0020] Optionally, the positioning part is a U-shaped plate provided on the support part.

[0021] To achieve the above objectives, the present invention also provides a chuck system, including a sealing ring, a base plate, a ceramic plate bonded to the base plate, a groove between the base plate and the ceramic plate, and an assembly fixture for installing the auxiliary sealing ring, wherein the assembly fixture for installing the auxiliary sealing ring is used to assist the sealing ring in being installed into the groove. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the chuck system in this invention;

[0023] Figure 2 This is a schematic diagram of a structure in which at least two support parts are installed within a single mounting part in this invention;

[0024] Figure 3 This is a schematic diagram of the second embodiment of the support portion in this invention;

[0025] Figure 4 This is a schematic diagram of a second embodiment of the installation of the U-shaped support and mounting parts in this invention.

[0026] Figure 5 This is a schematic diagram of the support structure with a harpoon-shaped structure in this invention;

[0027] Figure 6 This is a schematic diagram of a second embodiment of the installation of the support and mounting parts with a harpoon-shaped structure in this invention.

[0028] Figure 7 This is a schematic diagram of the structure of the positioning part in the first embodiment of the present invention;

[0029] Figure 8 This is a schematic diagram of the second embodiment of the positioning part in the present invention;

[0030] Figure 9 This is a schematic diagram of the structure of the combination of the adjusting part, the sliding part, and the positioning part in this invention;

[0031] Figure 10 In this invention Figure 9 Enlarged schematic diagram of structure A in the middle;

[0032] Figure 11 This is a schematic diagram of the structure in this invention where the guide part is located between the support part and the U-shaped plate;

[0033] Figure 12 For the present invention Figure 11 Enlarged schematic diagram of the B-structure;

[0034] Figure 13 This is a schematic diagram of the structure of the first and second limiting parts in the present invention.

[0035] Figure 14 This is a schematic diagram of a second embodiment of the first limiting part and the second limiting part in the present invention;

[0036] Figure 15 This is a schematic diagram of the structure of the first positioning plate in this invention.

[0037] Figure Labels

[0038] 1. Main body;

[0039] 2. Installation Department;

[0040] 3. Support; 31. Handle; 32. Harpoon head;

[0041] 4. Positioning part; 41. First positioning plate; 411. First connecting section; 412. Second connecting section; 413. Pushing member; 414. First snap-fit ​​member; 415. Second snap-fit ​​member; 42. Hinge; 43. Second positioning plate; 44. Positioning spring;

[0042] 5. Sliding part;

[0043] 6. Adjustment part; 61. Fixing plate; 62. Threaded hole; 63. Adjusting bolt; 64. Nut; 65. L-shaped connecting rod; 66. Guide part; 661. Telescopic rod; 662. Telescopic cylinder; 663. Telescopic spring; 664. Guide groove; 665. Guide block;

[0044] 7. First limiting part;

[0045] 8. Second limiting part;

[0046] 9. Sealing ring;

[0047] 10. Base plate;

[0048] 11. Card slot. Detailed Implementation

[0049] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions in the embodiments of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without inventive effort are within the scope of protection of this invention. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by those skilled in the art. The terms "comprising" and similar expressions used herein mean that the element or object preceding the word covers the element or object listed following the word and its equivalents, but do not exclude other elements or objects.

[0050] To address the problems existing in the prior art, embodiments of the present invention provide an assembly fixture for assisting in the installation of a sealing ring. This assembly fixture adjusts the relative position of the sealing ring 9 and the groove 11, ensuring that the axial direction (vertical direction) of the sealing ring 9 is perpendicular to the radial direction (horizontal direction) of the groove 11. This ensures that during pressing installation, both the upper and lower edges of the sealing ring 9 can simultaneously enter the groove 11, achieving smooth installation of the sealing ring 9. Simultaneously, this assembly fixture allows the sealing ring 9 to be installed vertically into the groove 11, ensuring that the sealing ring 9 is in a vertical state and preventing twisting or deflection. This ensures that the upper and lower ends of the sealing ring 9 are tightly fitted to the top and bottom walls of the groove 11, respectively, ensuring the sealing performance of the sealing ring 9. It should be understood that this assembly fixture is not limited to the installation of the sealing ring 9.

[0051] In one embodiment, such as Figure 1 As shown, the assembly fixture for installing the auxiliary sealing ring includes a main body 1 that matches the chuck, N mounting parts 2 on the main body 1 (N being a positive integer), and a support part 3. The support part 3 is located on the mounting part 2, and the number of support parts 3 is M (M being a positive integer). When the sealing ring 9 is fitted outside the support part 3, the support part 3 supports the sealing ring 9 from the inside, so that the axial direction of the sealing ring 9 between two adjacent support parts 3 is perpendicular to the radial direction of the groove 11 on the chuck (the groove 11 has an annular structure). This ensures that during pressing installation, the upper and lower edges of the sealing ring 9 between two adjacent support parts 3 simultaneously enter the groove 11, preventing the upper edge of the sealing ring 9 from entering the groove 11 first and forming a fulcrum, which would prevent the lower edge of the sealing ring 9 from entering the groove 11. This ensures the smooth installation of the sealing ring 9. In this embodiment, the support portion 3 is made of an elastic material, such as rubber, but not limited to rubber.

[0052] In one embodiment, the main body 1 can be a disc-shaped structure adapted to the chuck, and the diameter of the main body 1 is larger than the diameter of the chuck. However, it is not limited to the disc-shaped structure. For example, the main body 1 can also be a rectangular structure, provided that the area of ​​the lower end surface of the rectangular structure that fits against the chuck is larger than the area of ​​the upper surface of the chuck.

[0053] In one embodiment, N mounting portions 2 are arranged in a ring around the center of the main body 1, and the number of mounting portions 2 is at least two, such as... Figure 1As shown; in one example, the chuck is placed horizontally on the worktable, and the main body 1 is placed horizontally on the upper surface of the chuck. In this example, the mounting part 2 can be a through hole that penetrates the main body 1 in the vertical direction, and the cavity of the through hole can be a circular structure, an elliptical structure, or a fan-shaped structure along the radial section of the chuck. Of course, the mounting part 2 is not limited to the through hole, and can also be a groove-shaped structure.

[0054] In one embodiment, the number of support portions 3 is at least two.

[0055] In use, the M support parts 3 are vertically inserted into the mounting part 2. Then, the sealing ring 9 is fitted over the M support parts 3. At this time, the M support parts 3 support the sealing ring 9 from the inside, so that the axial direction of the sealing ring 9 between two adjacent support parts 3 is perpendicular to the radial direction of the slot 11. Then, the sealing ring 9 is pressed from the outside along the horizontal direction, so that the sealing ring 9 is pressed into the slot 11. During this installation process, because the sealing ring 9 is supported by the two adjacent support parts 3, the sealing ring 9 is always in a stretched state. Therefore, it can be ensured that the axial direction of the sealing ring 9 is always perpendicular to the radial direction of the slot 11. In this way, during the pressing installation, it is ensured that the upper and lower edges of the sealing ring 9 can enter the slot 11 at the same time, so that the slot 11 can be installed smoothly. It should be noted that when pressing the sealing ring 9, the middle part of the sealing ring 9 needs to be pressed, so that the upper and lower edges of the sealing ring 9 are subjected to the same force, and the movement direction of the upper and lower edges always remains horizontal.

[0056] In one embodiment, a single mounting portion 2 is provided with a single support portion 3, such as... Figure 1 As shown. During installation, only a single support part 3 is installed within a single mounting part 2, which reduces the difficulty of installing the equipment.

[0057] In one embodiment, a plurality of support portions 3 are provided within a single mounting portion 2, such as... Figure 2 As shown, specifically, a single mounting part 2 can install two or three or more support parts 3; this embodiment provides greater support force, allowing the axial direction of the sealing ring 9 to be better perpendicular to the radial direction of the slot 11.

[0058] In one embodiment, the support portion 3 has a circular, elliptical, or fan-shaped structure along its radial cross-section that matches the mounting portion 2, and the size of the support portion 3 is slightly smaller than the size of the mounting portion 2. This adaptation between the support portion 3 and the mounting portion 2 allows the support portion 3 to be smoothly installed into the mounting portion 2, while also reducing the amount of wobbling of the support portion 3 relative to the mounting portion 2 after installation, thus improving the installation accuracy of the sealing ring 9.

[0059] In one embodiment, a first implementation of the support portion 3 is provided, in which the support portion 3 has a rectangular cross-section along the axial direction of the chuck, such as... Figure 1 As shown; in this embodiment, the support portion 3 and the sealing ring 9 share a support point, which allows for more convenient adjustment of the positional relationship between the sealing ring 9 and the support portion 3. Furthermore, the first embodiment of the support portion 3 is easier to manufacture, and the manufacturing process can effectively reduce production costs.

[0060] In one embodiment, a second implementation of the support portion 3 is provided, specifically, the support portion 3 has a U-shaped cross-section along the axial direction of the chuck, such as... Figure 3 As shown. In this embodiment, the two legs of the U-shaped structure and the sealing ring 9 have two support points; compared with the first embodiment of the support part 3, the second embodiment of the support part 3 increases the number of support points, which increases the supporting force on the sealing ring 9, so that the axial direction of the sealing ring 9 can always maintain a positional relationship perpendicular to the radial direction of the slot 11; it also increases the pressing position of pressing the sealing ring 9, that is, the sealing ring 9 can be pressed between the two legs in the same support part 3, and the sealing ring 9 can be pressed between two adjacent support parts 3. Based on this, it can be seen that the second embodiment of the support part 3 has a wider range of applications than the first embodiment.

[0061] In one embodiment, the support portion 3 has a U-shaped structure along the axial section of the chuck and has two installation examples with the mounting portion 2: the first installation example is, as shown in... Figure 3 As shown, in this embodiment, the two legs of the U-shaped structure are located within the same mounting portion 2; a second embodiment of the mounting is shown below. Figure 4 As shown in this embodiment, the two legs of the U-shaped structure are located in two different mounting portions 2. The specific embodiment to be used depends on the actual situation and will not be elaborated here.

[0062] In one embodiment, a third implementation of the support portion 3 is provided. Specifically, the support portion 3 has a harpoon-shaped cross-section along the axial direction of the chuck. The harpoon-shaped structure includes a handle 31 and a harpoon head 32 connected together, such as... Figure 5 As shown in one example, the harpoon head 32 has a U-shaped structure. It can be seen that the third embodiment of the support part 3 has higher operability than the second embodiment of the support part 3 due to the presence of the handle 31, making the installation and disassembly process of the support part 3 more convenient.

[0063] In one embodiment, the harpoon-shaped structure and the mounting part 2 have two installation examples. The first installation example is as follows: Figure 5 As shown, in the second embodiment, the two legs of the U-shaped harpoon head 32 are located within the same mounting portion 2; in the third embodiment, the two legs of the U-shaped harpoon head 32 are located within two different mounting portions 2, as shown in the example. Figure 6 As shown, the harpoon head 32 with a U-shaped structure has the same installation method and function as the support part 3 in the second embodiment, which will not be described again here.

[0064] In one embodiment, such as Figure 7 As shown, the assembly fixture for installing the auxiliary sealing ring also includes a positioning part 4 disposed on the support part 3. The positioning part 4 is matched with the slot 11. When the sealing ring 9 is disposed in the positioning part 4, the positioning part 4 makes the sealing ring 9 and the slot 11 at the same height. This embodiment can both position the sealing ring 9 so that the sealing ring 9 and the slot 11 are at the same height, thus eliminating the need for multiple adjustments to the height of the sealing ring 9. After the sealing ring 9 enters the positioning part 4, it can be accurately installed into the slot 11 by pressing, improving installation efficiency. It can also limit the movement of the sealing ring 9 relative to the support part 3 in the vertical direction during installation.

[0065] exist Figure 7 In the example, a first embodiment of the positioning part 4 is provided, in which the positioning part 4 is a positioning groove formed by recessing from the surface of the support part 3 inward. The positioning groove is prepared by stamping on the surface of the support part 3 after the support part 3 is formed, or it can be integrally formed with the support part 3 by a mold.

[0066] In one embodiment, the positioning groove has an upper top wall and a left side wall, but no lower bottom wall and a right side wall. The cavity of the positioning groove is a right-angled triangular structure. This arrangement allows the support part 3 to be easily separated from the sealing ring 9 when the sealing ring 9 is installed into the slot 11 and when the support part 3 is disassembled. At the same time, during separation, the sealing ring 9 can be ensured to move only in the radial direction (which can be understood as the horizontal direction) and not in the axial direction (which can be understood as the vertical direction).

[0067] This application also provides a second embodiment of the positioning part 4, such as... Figure 8 As shown, in this embodiment, the positioning part 4 is a U-shaped plate provided on the support part 3; during manufacturing, the U-shaped plate can be directly embedded on the support part 3; or a mounting groove can be first provided on the support part 3, and then the U-shaped plate can be installed in the mounting groove.

[0068] In practical use, to broaden the applicability of the assembly tooling for installing the auxiliary sealing ring, in one embodiment, the U-shaped plate is adjustable relative to the support part 3. By adjusting the U-shaped plate, the height of the U-shaped plate is always consistent with the height of the slot 11 (which can be understood as the center of the height of the sealing ring 9 and the center of the height of the slot 11 being on the same horizontal line in the radial direction). This allows the assembly tooling for installing the auxiliary sealing ring to be applicable to slots 11 of different heights, as well as to other equipment containing slots 11 or groove-shaped structures similar to slots 11. Through adjustment, the assembly tooling for installing the auxiliary sealing ring of the same size can be applied to slots 11 or equipment of different sizes, eliminating the need to purchase multiple sizes of the assembly tooling for installing the auxiliary sealing ring, thereby effectively reducing the equipment procurement cost.

[0069] In one embodiment, the assembly fixture for installing the auxiliary sealing ring further includes a sliding part 5 and an adjusting part 6, wherein: the sliding part 5 (which can be understood as a sliding groove arranged along the vertical direction of the support part 3, but is not limited to a sliding groove) is provided on the support part 3, and the U-shaped plate is slidably disposed on the sliding part 5, such as... Figure 9 As shown; the adjustment part 6 is located on the support part 3 and connected to the U-shaped plate. The adjustment part 6 is used to adjust the movement of the U-shaped plate within the sliding part 5, such as... Figure 9 As shown. In use, by operating the adjustment part 6, the U-shaped plate moves up and down within the sliding part 5, thereby changing the height of the U-shaped plate relative to the support part 3, so that the height of the U-shaped plate is on the same horizontal line as the height of the slot 11, thus making the assembly fixture for installing the auxiliary sealing ring suitable for slots 11 of different heights and for different equipment.

[0070] In one embodiment, such as Figure 9 and Figure 10 As shown, the adjusting part 6 includes a fixing plate 61 connected to the supporting part 3. After the supporting part 3 is installed on the mounting part 2, the lower end of the fixing plate 61 abuts against the upper end face of the main body part 1. The fixing plate 61 has a threaded hole 62 in the vertical direction, and an adjusting bolt 63 is rotatably mounted in the threaded hole 62. The threaded hole 62 allows the adjusting bolt 63 to connect with the fixing plate 61, while also allowing the adjusting bolt 63 to rotate axially and not move in the vertical direction. After the adjusting bolt 63 is adjusted, it achieves self-locking through the thread; the adjusting bolt 63 is threaded with a nut 64, and one end of an L-shaped connecting rod 65 is fixedly provided on the outer side wall of the nut 64. The other end of the L-shaped connecting rod 65 is connected to the upper end surface of the U-shaped plate; the adjusting part 6 also includes a guide part 66 provided on the upper end surface of the fixing plate 61 at one end and on the lower end surface of the nut 64 at the other end. The guide part 66 is provided to restrict the movement of the nut 64, so that the nut 64 can only move in the vertical direction.

[0071] In use, the adjusting bolt 63 is screwed on. Since the adjusting bolt 63 is threadedly connected to the nut 64, and the nut 64 can only move vertically due to the restriction of the guide part 66, the rotation of the adjusting bolt 63 will cause the nut 64 to move up and down in the vertical direction. This will cause the U-shaped plate to move up and down in the vertical direction through the L-shaped connecting rod 65, thereby adjusting the height of the U-shaped plate relative to the slot 11.

[0072] In one embodiment, the guide portion 66 can be a guide spring or a telescopic member, but is limited to the guide spring and the telescopic member; in one example, the telescopic member includes a telescopic rod 661 and a telescopic cylinder 662, and a telescopic spring 663. The telescopic rod 661 is movably inserted into the telescopic cylinder 662, and the telescopic spring 663 is wound around the outside of the telescopic rod 661, with both ends of the telescopic spring 663 respectively fixedly connected to the side wall of the telescopic rod 661 and the outer side wall of the telescopic cylinder 662, as shown below. Figure 10 As shown.

[0073] Of course, the guide portion 66 is not limited to being disposed between the fixing plate 61 and the nut 64. For example, in one embodiment, such as Figure 11As shown, the guide portion 66 includes a guide groove 664 and a guide block 665. The guide block 665 is slidably disposed within the guide groove 664. The guide groove 664 is vertically disposed on the support portion 3. In one example, the guide groove 664 is disposed on the side wall of the sliding portion 5. The guide block 665 is fixedly disposed on the U-shaped plate. In this embodiment, the guide portion 66 is disposed between the U-shaped plate and the support portion 3, which reduces the space occupied by the equipment and does not affect the operation process. It is worth noting that the cooperation of the guide groove 664 and the guide block 665 allows the U-shaped plate to move up and down only in the vertical direction.

[0074] When the sealing ring 9 is removed from the mounting and positioning part 4, the existing method is to pull the sealing ring 9 to deform it, causing the sealing ring 9 to disengage from the positioning part 4, thereby removing the sealing ring 9 from the positioning part 4. This method is prone to causing the sealing ring 9 to deflect, and it is also prone to causing the sealing ring 9, which has been installed in the slot 11, to be pulled out of the slot 11. In order to solve the above problems, in one embodiment, such as Figure 12 As shown, the positioning part 4 includes a first positioning plate 41 slidably disposed within the sliding part 5. The lower end of the first positioning plate 41 is connected to one end of a hinge 42, and the other end of the hinge 42 is hinged to a second positioning plate 43. The second positioning plate 43 and the first positioning plate 41 form a U-shaped plate structure. The positioning part also includes a positioning spring 44, the two ends of which are fixedly connected to the lower end surface of the first positioning plate 41 and the side wall of the second positioning plate 43, respectively. In use, when it is necessary to remove the sealing ring 9 from the positioning part 4, pull the positioning part 4 vertically upward. The lower end of the sealing ring 9 will abut against the second positioning plate 43 and rotate downward. The second positioning plate 43 will rotate clockwise. When the second positioning plate 43 moves to the same vertical direction as the first positioning plate 41, the second positioning plate 43 stops rotating. Continue to pull the positioning part 4 upward, so that the positioning part 4 will disengage from the sealing ring 9. During this process, the sealing ring 9 will not move relative to the slot 11 in the horizontal direction. Thus, at the moment when the positioning part 4 disengages from the sealing ring 9, the sealing ring 9 will vertically enter the slot 11 under its own elasticity.

[0075] In one embodiment, the assembly fixture for installing the auxiliary sealing ring further includes a first limiting part 7 (which can be understood as being disposed on the side wall of the mounting part 2) provided on the main body 1 and a second limiting part 8 provided on the support part 3, such as... Figure 13As shown, during the installation of the support part 3 into the mounting part 2, the first limiting part 7 and the second limiting part 8 can be used to lock the main body part 1 and the support part 3 relative to each other. This prevents a decrease in installation accuracy caused by movement of the support part 3 relative to the main body part 1 when installing the sealing ring 9. Simultaneously, the locking of the support part 3 and the main body part 1 by the first limiting part 7 and the second limiting part 8 also prevents the support part 3 from shaking relative to the main body part 1 after installation.

[0076] like Figure 13 As shown, a first embodiment of the first limiting part 7 and the second limiting part 8 is proposed. In this embodiment, the first limiting part 7 is a groove and the second limiting part 8 is a protrusion, but it is not limited to just a groove and a protrusion. Of course, in other embodiments, the first limiting part 7 can also be a protrusion and the second limiting part 8 can also be a groove. In use, when the support part 3 is installed into the mounting part 2, the protrusion will enter the groove, thereby locking the support part 3 and the mounting part 2 together. In this embodiment, the protrusion can be made of an elastic material.

[0077] In one embodiment, such as Figure 14 As shown, a second embodiment of the first limiting part 7 and the second limiting part 8 is proposed. In this embodiment, the first limiting part 7 is disposed on the lower end surface of the fixing plate 61, and the second limiting part 8 is disposed on the upper end surface of the main body part 1. Specifically, the first limiting part 7 is a magnetic block, and the second limiting part 8 is an iron block or a magnetic block. In this way, the first limiting part 7 and the second limiting part 8 can be attracted together by magnetic attraction, thereby locking the support part 3 and the main body part 1 together. Alternatively, the first limiting part 7 is an iron block, and the second limiting part 8 is a magnetic block. The locking principle is the same as the above process, which will not be repeated here.

[0078] The existing support part 3 cannot effectively screen the sealing ring 9. Therefore, during selection, due to the different models of the sealing ring 9, they cannot be matched with the slot 11. That is, when the height of the sealing ring 9 is less than the height of the slot 11, effective sealing cannot be achieved after installation; when the height of the sealing ring 9 is greater than the height of the slot 11, the installation process cannot be completed. To solve the above problems, in one embodiment, such as... Figure 15As shown, the first positioning plate 41 includes a first connecting section 411 and a second connecting section 412. The first connecting section 411 and the second connecting section 412 are connected by a pushing member 413, which can be understood as a spring or an elastic telescopic member. The side walls of the first connecting section 411 and the second connecting section 412 are respectively fixedly provided with a first snap-fit ​​member 414 and a second snap-fit ​​member 415. The first snap-fit ​​member 414 and the second snap-fit ​​member 415 pass through the guide groove 664 and extend into the slot 11. The first snap-fit ​​member 414 and the second snap-fit ​​member 415 abut against the top and bottom walls of the slot 11, respectively. During operation, the pushing member 413 pushes the first connecting section 411. The first connecting segment 411 and the second connecting segment 412 move away from each other, specifically in the vertical direction. When the first positioning plate 41 mates with the slot 11, the pushing member 413 abuts against the top and bottom walls of the slot 11, respectively. This abuts the positioning part 4 to limit the height at which the sealing ring 9 can be installed. When the sealing ring 9 is installed precisely into the positioning part 4, it ensures that the sealing ring 9 is installed precisely into the slot 11. This allows for the selection of the sealing ring 9, ensuring that its model accurately matches the slot 11. Preferably, both the first and second connecting members 414 and 415 are made of elastic material.

[0079] In one embodiment, a handle is provided on the upper surface of the main body 1.

[0080] The present invention also provides a chuck system, including a sealing ring 9, a base plate 10, a ceramic plate (not labeled) bonded to the base plate 10, a groove 11 existing between the base plate 10 and the ceramic plate, and an assembly fixture for installing the auxiliary sealing ring, wherein the assembly fixture for installing the auxiliary sealing ring is used to assist the sealing ring 9 in being installed into the groove 11, such as... Figure 1 As shown. The chuck system of this invention (which can be understood as an electrostatic chuck system) can adjust the position of the sealing ring 9 relative to the slot 11 through the assembly tooling for installing the auxiliary sealing ring inside it, so that the axial direction of the sealing ring 9 is perpendicular to the radial direction of the slot 11. Thus, through a pressing action, the upper and lower edges of the sealing ring 9 can simultaneously enter the slot 11, achieving smooth installation of the sealing ring 9. Furthermore, the assembly tooling for installing the auxiliary sealing ring ensures that the installed sealing ring 9 remains vertical in the slot 11, allowing the upper and lower ends of the sealing ring 9 to make tight contact with the top and bottom walls of the slot 11, achieving a sealing effect.

[0081] While embodiments of the present invention have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of the invention as set forth in the claims. Furthermore, the invention described herein may have other embodiments and can be implemented or carried out in various ways.

Claims

1. An assembly fixture for auxiliary sealing ring installation, characterized in that, It includes a main body that matches the chuck, N mounting parts (N being a positive integer) on the main body, and a support part; the N mounting parts are arranged in a ring around the center of the main body, where N ≥ 2. The support part is provided on the mounting part, and the number of the support parts is set to M, where M is a positive integer; When the sealing ring is fitted outside the support part, the support part supports the sealing ring from the inside, so that the axial direction of the sealing ring between two adjacent support parts is perpendicular to the radial direction of the groove on the chuck, so that when pressed and installed, the upper edge and lower edge of the sealing ring between two adjacent support parts simultaneously enter the groove. It also includes a positioning part provided on the support part; It also includes a sliding part and an adjusting part, wherein: The sliding part is disposed on the supporting part, and the positioning part is slidably disposed on the sliding part; The adjustment part is disposed on the support part and connected to the positioning part. The adjustment part is used to adjust the movement of the positioning part within the sliding part. The adjusting part includes a fixing plate connected to the supporting part. After the supporting part is installed on the mounting part, the lower end of the fixing plate abuts against the upper end face of the main body. The fixing plate has a threaded hole along the vertical direction, and an adjusting bolt is rotatably installed in the threaded hole. A nut is fitted on the external thread of the adjusting bolt. The outer side wall of the nut is fixedly installed on one end of an L-shaped connecting rod, and the other end of the L-shaped connecting rod is connected to the upper end face of the positioning part.

2. The assembly fixture according to claim 1, characterized in that, Each of the mounting sections contains a single support section.

3. The assembly fixture according to claim 1, characterized in that, Each mounting section contains a plurality of the support sections.

4. The assembly fixture according to claim 1, characterized in that, The support portion has a rectangular, U-shaped, or harpoon-shaped cross-section along the axial direction of the chuck.

5. The assembly fixture according to claim 1, characterized in that, The positioning part is configured to match the card slot; When the sealing ring is placed inside the positioning part, the positioning part makes the sealing ring and the slot at the same height.

6. The assembly fixture according to claim 5, characterized in that, The positioning part is a positioning groove formed by recessing from the surface of the support part inward.

7. The assembly tooling according to claim 5, characterized in that, The positioning part is a U-shaped plate located on the support part.

8. A chuck system, characterized in that, The device includes a sealing ring, a base plate, a ceramic plate bonded to the base plate, a groove between the base plate and the ceramic plate, and an assembly fixture for installing the sealing ring as described in any one of claims 1 to 7, wherein the assembly fixture for installing the sealing ring is used to assist the sealing ring in being installed into the groove.

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