Micro-drill force rheology batch passivation and polishing equipment and polishing method

Abstract

This invention discloses a micro-drill force rheology batch passivation and polishing equipment, including a base; a polishing tank and a micro-drill clamping drive device are correspondingly provided on the base; an A motor is provided inside the base, which can drive the polishing tank to rotate; the micro-drill clamping drive device includes a gantry frame located above the polishing tank, a mounting platform on the gantry frame, and a vertical annular guide rail mounted on the mounting platform; a set of circulating stations are provided on the vertical annular guide rail; a micro-drill clamping device is provided on the circulating station for clamping the micro-drill to be polished; a clamping device is provided below the crossbeam of the gantry frame for fixing the circulating station during polishing; a workpiece rotation drive device is provided below the clamping device for driving the micro-drill to rotate during polishing. The micro-drill force rheology batch passivation and polishing equipment of this invention, by adopting a specific structure, can achieve batch passivation and polishing of micro-drills and can meet the self-rotation requirements of micro-drills. Furthermore, this invention also provides a micro-drill force rheology batch passivation and polishing method.

Description

Technical Field

[0001] This invention relates to the field of drill bit passivation and polishing technology, specifically to micro-drill force rheology batch passivation and polishing equipment and polishing method. Background Technology

[0002] Tools used for machining micro-holes are called micro-drills, and the diameter of the cutting part is less than 1 mm. Due to their tiny size, micro-drills require extremely high rotational speeds for machining. Under high-speed cutting conditions, defects such as micro-notches, burrs, and grinding marks on the flank face of the micro-drill can easily lead to problems such as poor chip removal and deterioration of mechanical and thermal load distribution during the cutting process, which seriously affects the surface quality and dimensional accuracy of the micro-holes. In this case, it is necessary to perform passivation and polishing treatment on the micro-drill to remove edge defects and grinding marks on the flank face to ensure its performance.

[0003] In actual production, commonly used passivation and polishing methods include abrasive brushing, dragging, vibratory abrasive, and abrasive jetting. However, when using these methods to process micro-drills, the mechanical force is large, and problems such as chipping and breakage are prone to occur during the passivation and polishing process. Moreover, the surface quality after passivation and polishing is still not ideal, making it difficult to meet the passivation and polishing requirements of micro-drills.

[0004] Mechanodynamic polishing, a novel flexible polishing technology, utilizes the nonlinear rheological properties of non-Newtonian fluid polishing slurries under shear stress to achieve material removal. It is widely used for precision polishing of various complex parts and shows promising application prospects in tool passivation polishing. During mechanodynamic passivation polishing, the polishing slurry only exhibits a mechanodynamic effect at the location where relative shear occurs with the tool, without force accumulation. Therefore, it effectively avoids tool breakage due to excessive mechanical force when machining micro-drills and other micro-tools. However, currently, there is still a lack of processing equipment capable of performing batch mechanodynamic passivation polishing of micro-drills and other micro-tools.

[0005] Chinese invention patent CN202310568895.8 discloses a flow channel device that can be adapted to the cutting edge of a thread comb cutter to constrain the circulation channel of the polishing liquid, which can realize batch passivation polishing of thread comb cutters with complex cutting edge shapes. However, this method cannot make the cutter rotate during the passivation polishing process, and is not suitable for passivation polishing of complex cutting edges of rotary cutters. Summary of the Invention

[0006] To address the shortcomings of existing technologies, this application provides a micro-drill force rheology batch passivation and polishing apparatus. This apparatus, through a specific structural design, enables batch passivation and polishing of micro-drills. Furthermore, this application also provides a corresponding method for micro-drill force rheology batch passivation and polishing.

[0007] The technical solution for polishing equipment in this application is as follows:

[0008] A micro-drill force rheology batch passivation and polishing equipment includes a base; the base is provided with a polishing tank and a micro-drill clamping drive device; the polishing tank is used to hold force rheology polishing fluid, and the base is equipped with an A motor that can drive the polishing tank to rotate; the micro-drill clamping drive device includes a gantry frame above the polishing tank, the gantry frame is provided with a mounting platform, and a vertical annular guide rail is mounted on the mounting platform; a set of circulating stations is provided on the vertical annular guide rail; the circulating stations are provided with micro-drill clamping devices for clamping the micro-drills to be polished; a clamping device is provided below the crossbeam of the gantry frame for fixing the circulating stations during polishing; a workpiece rotation drive device is provided below the clamping device for driving the micro-drills to rotate during polishing.

[0009] Compared with the prior art, the micro-drill force rheology batch passivation polishing equipment of this application has a specific structure and has achieved the following significant progress: the polishing tank and the micro-drill clamping drive device are used in conjunction. During polishing, the polishing tank rotates, the micro-drill clamping drive device clamps the micro-drill and drives the micro-drill to rotate. There is a specific relative motion between the micro-drill and the force rheology polishing fluid in the polishing tank, which realizes rapid removal of surface material of the micro-drill, high polishing efficiency, and good polishing quality. The micro-drill clamping drive device is cleverly equipped with a vertical ring guide rail with a circulation station, and a micro-drill fixture is set on the circulation station. During processing, the circulation station is fixed by the matching clamping device and the micro-drill is driven to rotate by the workpiece rotation drive device for polishing. After polishing is completed, the next circulation station is switched to start polishing again, realizing batch force rheology passivation polishing of micro-drills.

[0010] As an optimization, in the aforementioned micro-drill force rheology batch passivation and polishing equipment, the clamping device includes a vertical cantilever located below the crossbeam of the gantry frame, a cylinder located on the side of the vertical cantilever, a linear guide mechanism located below the cylinder, and a limiting rod located on the linear guide mechanism. A corresponding slot is provided on the circulating station; during polishing, the limiting rod can be inserted into the slot under the drive of the cylinder to limit the circulating station. This specific clamping device has a simple structure and is easy to manufacture and install; the clamping of the circulating station via the limiting rod and slot is ingeniously designed and has a fast response.

[0011] As an optimization, in the aforementioned micro-drill force rheology batch passivation and polishing equipment, the workpiece rotation drive device includes a C-motor and an active friction wheel; the micro-drill clamping device includes a clamp for holding the micro-drill and a rotation support, with a driven friction wheel at one end of the clamp; during polishing, the active friction wheel can contact the driven friction wheel to form a transmission connection, enabling the C-motor to drive the clamp to rotate. Thus, the self-rotation requirement of the micro-drill during polishing can be achieved through the driven friction wheel in the micro-drill clamping device and the active friction wheel in the workpiece rotation drive device, resulting in high reliability and ease of implementation. Furthermore, the C-motor is a self-locking motor. Using this motor, the user only needs to redesign the clamp according to the tool type to polish tools that do not require self-rotation, increasing the equipment's applicability.

[0012] As an optimization, in the aforementioned micro-drill force rheology batch passivation and polishing equipment, a force measuring device is provided on one side of the gantry. The force measuring device includes a cantilever beam, a torque sensor, an extension rod, and a measuring fixture arranged sequentially. One end of the cantilever beam is fixed to the gantry, and the other end is connected to the torque sensor. The measuring fixture is used to hold the measuring tool. Thus, the polishing force can be monitored by the force measuring device, and adjustments can be made in a timely manner if the polishing force is too large or too small.

[0013] Furthermore, a water replenishment device, which is a cooling sprayer, is provided on the other side of the gantry frame. This device replenishes water to the mechanorheological polishing slurry based on the real-time detection data from the force measuring device. During the polishing process, the water in the mechanorheological polishing slurry gradually evaporates, reducing its fluidity and increasing the polishing force detected by the force measuring device. Therefore, the water replenishment device allows for timely replenishment of water to the mechanorheological polishing slurry based on the real-time detection data, maintaining the polishing force within a certain range and ensuring consistent polishing results and batch consistency.

[0014] As an optimization, in the aforementioned micro-drill force rheology batch passivation and polishing equipment, the mounting platform is provided with an A-shaped groove, which is connected to the gantry frame via bolts passing through the A-shaped groove. The vertical cantilever is also bolted to the mounting platform, allowing adjustment of the angle θ between the micro-drill axis and the tangent of the polishing groove. This structure allows adjustment of the angle between the mounting platform and the gantry beam, changing the angle between the micro-drill axis and the tangent of the polishing groove, thus enabling the polishing of different cutting edge shapes. Furthermore, the cantilever beam is provided with a B-shaped groove, and the torque sensor is connected to the cantilever beam via bolts passing through the B-shaped groove, allowing adjustment of the angle between the measuring tool and the tangent of the polishing groove. The B-shaped groove on the cantilever beam is used to adjust the angle between the measuring tool and the tangent of the polishing groove, ensuring that the measuring tool installed in the measuring fixture experiences equivalent force to the micro-drill being processed.

[0015] As an optimization, in the aforementioned micro-drill force rheology batch passivation and polishing equipment, the fixture is equipped with a detachable clamping block for holding the micro-drill. With this structure, the clamping block can be replaced according to the specifications and processing requirements of the micro-drill, making it suitable for micro-drills of different sizes; and the distance between the micro-drill cutting edge and the inner wall of the polishing tank can be controlled to 1-3mm, ensuring that the force rheology polishing fluid completely covers the micro-drill cutting edge during polishing, resulting in a better polishing effect.

[0016] As an optimization, in the aforementioned micro-drill force rheology batch passivation and polishing equipment, the fixture includes a detachably connected fixture body and a clamping block; the clamping block is located between the fixture body and the clamping block; a clamping spring is provided on the clamping block; the clamping spring is used to clamp the clamping block. With this structure, the installation and replacement of the clamping block and the micro-drill are relatively convenient.

[0017] As an optimization, in the aforementioned micro-drilling mechanodynamic batch passivation and polishing equipment, the machine base is equipped with a water-cooling device. The water-cooling device includes a cold water pan, a cover plate, and a nozzle. The cold water pan is located around the polishing tank, with an opening at its bottom edge. This opening connects to a return pipe of the water chiller located inside the machine base for recycling cooling water. The cover plate is positioned above the cold water pan, covering the area between the cold water pan and the polishing tank, with its upper surface lower than the upper edge of the polishing tank. The nozzle is located below the cover plate, connected to the cold water pipe of the water chiller, with its nozzle facing the polishing tank. The water-cooling device on the machine base absorbs the heat generated during the polishing process, ensuring the mechanodynamic polishing fluid maintains stable performance over a long period. Furthermore, the presence of a recycling mechanism allows the cooling water to be recycled.

[0018] Furthermore, the bottom of the cold water pan slopes from the center to the edge. This structure, with the bottom of the cold water pan sloping from the center to the edge, facilitates the recovery of cooling water and is easy to implement.

[0019] As an optimization, in the aforementioned micro-drill force rheology batch passivation and polishing equipment, a support spring is provided between the lower part of the limiting rod and the vertical cantilever. With this structure, the support spring can act as a damping element when the limiting rod moves; and it can also support the limiting rod in the event of cylinder failure.

[0020] Regarding the polishing method, the technical solution of this application is as follows:

[0021] A micro-drill force rheology batch passivation and polishing method, which uses the aforementioned micro-drill force rheology batch passivation and polishing equipment of this application to polish the micro-drill, includes the following steps:

[0022] ①: Install the micro-drill on the micro-drill holder and inject the mechanical rheology polishing fluid into the polishing tank;

[0023] ②: Start motor A to rotate the polishing tank, causing the force rheological polishing liquid to be thrown towards the disc wall;

[0024] ③: Start the vertical circular guide rail on the mounting platform. When the circulating station reaches the bottom of the vertical circular guide rail, it will automatically stop, the clamping device will lock the circulating station, and the workpiece rotation drive device will be started to make the micro drill rotate.

[0025] ④: After processing for the set time, the clamping device is released from the cycle station, and step ③ is repeated to achieve batch processing.

[0026] Compared with the prior art, the micro-drill force rheology batch passivation and polishing method of this application uses the micro-drill force rheology batch passivation and polishing equipment of this application and realizes the batch passivation and polishing process of micro-drills according to specific steps, with high polishing efficiency and good quality. Attached Figure Description

[0027] Figure 1 This is a schematic diagram of the polishing equipment used in this application. Figure 1 ;

[0028] Figure 2 This is a schematic diagram of the polishing equipment used in this application. Figure 2 ;

[0029] Figure 3 yes Figure 2 A schematic diagram of the middle section structure;

[0030] Figure 4 yes Figure 3 Enlarged view of the middle section structure;

[0031] Figure 5 yes Figure 3 A schematic diagram of the middle section structure;

[0032] Figure 6 yes Figure 2 A sectional view of the middle section of the structure;

[0033] Figure 7 yes Figure 1 A partial structural diagram of the micro-drill clamping device;

[0034] Figure 8 yes Figure 7 Exploded view;

[0035] Figure 9 yes Figure 1 Schematic diagram of the force measuring device;

[0036] Figure 10 This is a schematic diagram showing the angle between the micro-drill and the tangent of the inner wall of the polishing groove;

[0037] Figure 11This is a logic criterion diagram for determining the failure of water replenishment and mechanical rheological polishing slurry;

[0038] Figure 12 This is a microscopic image of the micro-drill before polishing in this embodiment;

[0039] Figure 13 This is a micrograph of the micro-drill after polishing in this embodiment.

[0040] The markings in the attached diagram are as follows: 1-Base; 2-Polishing tank; 3-Gantry frame; 4-Mounting platform; 401-A arc-shaped slot; 5-Vertical circular guide rail; 501-Circulating station; 5011-Slot; 502-Motor B; 6-Motor A; 7-Water cooling device; 701-Cold water pan; 702-Cover plate; 703-Nozzle; 8-Micro drill clamping device; 801-Clamping fixture; 8011-Clamping block; 8012-Clamping fixture body; 8013-Pressure block; 8014-Pressure spring; 802-Rotating support; 803-From... 9-Moving friction wheel; 9-Clamping device; 901-Vertical cantilever; 902-Cylinder; 903-Linear guide mechanism; 904-Limit rod; 905-Support spring; 10-Micro drill; 11-Workpiece rotation drive device; 1101-C Motor; 1102-Moving friction wheel; 12-Force measuring device; 1201-Cantilever beam; 1202-Torque sensor; 1203-Extension rod; 1204-Measuring fixture; 1205-Measuring tool; 1206-B Arc-shaped groove; 13-Water supply device; 14-Water chiller. Detailed Implementation

[0041] The present application will be further described below with reference to the accompanying drawings and embodiments, but this should not be construed as limiting the present application.

[0042] Example (see) Figures 1 to 13 ):

[0043] A micro-drill force rheology batch passivation and polishing equipment includes a base 1; the base 1 is provided with a polishing tank 2 and a micro-drill clamping drive device; the polishing tank 2 is used to hold force rheology polishing fluid, and the base 1 is equipped with an A motor 6, which can drive the polishing tank 2 to rotate; the micro-drill clamping drive device includes a gantry frame 3 above the polishing tank 2, the gantry frame 3 is provided with a mounting platform 4, and the mounting platform 4 is equipped with a vertical annular guide rail 5; the vertical annular guide rail 5 is provided with a set of circulating stations 501 (driven by a B motor 502); the circulating stations 501 are provided with a micro-drill clamping device 8 for clamping the micro-drill 10 to be polished; a clamping device 9 is provided below the crossbeam of the gantry frame 3 for fixing the circulating stations 501 during polishing; a workpiece rotation drive device 11 is provided below the clamping device 9 for driving the micro-drill 10 to rotate during polishing; the clamping device 9 includes... The system includes a vertical cantilever 901 located below the crossbeam of the gantry frame 3, a cylinder 902 located on the side of the vertical cantilever 901, a linear guide mechanism 903 located below the cylinder 902, and a limiting rod 904 located on the linear guide mechanism 903. A corresponding slot 5011 is provided on the circulating station 501. During polishing, the limiting rod 904 can be inserted into the slot 5011 under the drive of the cylinder 902 to limit the circulating station 501. The workpiece rotation drive device 11 includes a C motor 1101 and an active friction wheel 1102. The micro-drill clamping device 8 includes a clamp 801 for clamping the micro-drill 10 and a rotating support 802. One end of the clamp 801 is provided with a driven friction wheel 803. During polishing, the active friction wheel 1102 can contact the driven friction wheel 803 to form a transmission connection, enabling the C motor 1101 to drive the clamp 801 to rotate.

[0044] In this embodiment, the mounting platform 4 spans the crossbeam of the gantry frame 3, and each end of the mounting platform 4 is provided with a vertical annular guide rail 5. The presence of a vertical annular guide rail 5 at each end of the mounting platform 4 allows for simultaneous polishing of two micro-drills 10, further improving polishing efficiency.

[0045] In this embodiment, a force measuring device 12 is provided on one side of the gantry frame 3. The force measuring device 12 includes a cantilever beam 1201, a torque sensor 1202, an extension rod 1203, and a measuring fixture 1204 arranged sequentially. One end of the cantilever beam 1201 is fixed to the gantry frame 3, and the other end is connected to the torque sensor 1202. The measuring fixture 1204 is used to hold the measuring tool 1205. By setting the force measuring device 12 on the gantry frame, the magnitude of the polishing force can be monitored, and adjustments can be made in a timely manner if the polishing force is too large or too small.

[0046] In this embodiment, a water replenishment device 13 is provided on the other side of the gantry frame. The water replenishment device 13 is a cooling sprayer that can replenish water to the force rheological polishing fluid according to the real-time detection data of the force measuring device 12. By setting up the water replenishment device 13, water can be replenished to the force rheological polishing fluid in a timely manner according to the real-time detection data of the force measuring device 12, so that the polishing force is maintained within a certain range, the polishing force is relatively stable, and the polishing effect and batch consistency are guaranteed.

[0047] In this embodiment, the mounting platform 4 is provided with an arc-shaped slot 401, which is connected to the gantry frame 3 by bolts passing through the arc-shaped slot 401. The vertical cantilever 901 is also bolted to the mounting platform 4, thereby allowing adjustment of the angle θ between the axis of the micro-drill 10 and the tangent of the polishing groove 2, with an adjustment range of 35°-90°. Using this structure, the angle between the mounting platform 4 and the crossbeam of the gantry frame 3 can be adjusted, changing the size of the angle θ between the axis of the micro-drill 10 and the tangent of the polishing groove 2, thus enabling the polishing of different cutting edge shapes.

[0048] In this embodiment, the clamp 801 is provided with a detachable clamping block 8011, which is used to clamp the micro-drill 10. The clamping block 8011 can be replaced according to the specifications and processing requirements of the micro-drill 10, so that the distance between the cutting edge of the micro-drill 10 and the inner wall of the polishing groove 2 is 2mm. The clamping block 8011 can be replaced according to the specifications and processing requirements of the micro-drill 10, and can be used for micro-drills of different specifications. When the distance between the cutting edge of the micro-drill 10 and the inner wall of the polishing groove 2 is 1-3mm (2mm in this embodiment), the polishing effect is better.

[0049] In this embodiment, the clamp 801 includes a detachably connected clamp body 8012 and a clamping block 8013; the clamping block 8011 is disposed between the clamp body 8012 and the clamping block 8013; a clamping spring 8014 is provided on the clamping block 8013; the clamping spring 8014 is used to fix the clamping block 8011. With this structure, the installation and replacement of the clamping block 8011 and the micro drill 10 are relatively convenient.

[0050] In this embodiment, the base 1 is equipped with a water cooling device 7. The water cooling device 7 includes a cold water tray 701, a cover plate 702, and a nozzle 703. The cold water tray 701 is located around the polishing tank 2, and has an opening at its bottom edge. The opening is connected to the return pipe of the water chiller 14 located inside the base 1 for recycling cooling water. The cover plate 702 is located above the cold water tray 701, covering the gap between the cold water tray 701 and the polishing tank 2. The upper surface of the cover plate 702 is lower than the upper edge of the polishing tank 2. The nozzle 703 is located below the cover plate 702 and is connected to the cold water pipe of the water chiller 14, with its nozzle facing the polishing tank 2. The water cooling device 7 on the base can absorb the heat generated during the polishing process, keeping the performance of the mechanorheological polishing fluid stable for a long time. It also has a recycling mechanism, allowing the cooling water to be recycled. The cover plate 702 can prevent cooling water from splashing into the polishing tank 2 and diluting the mechanorheological polishing fluid.

[0051] In this embodiment, the bottom of the cold water pan 701 slopes from the center to the edge. This slope facilitates the recovery of cooling water.

[0052] In this embodiment, a support spring 905 is provided between the lower part of the limiting rod 904 and the vertical cantilever 901. The support spring 905 can play a role in damping shock when the limiting rod 904 moves; and can also play a role in supporting the limiting rod 904 when the cylinder 902 fails.

[0053] In this embodiment, when polishing micro-drills using a micro-drill force rheology batch passivation and polishing equipment, the following steps are adopted:

[0054] ①: Adjust the position of the mounting table 4 (angle with the crossbeam of the gantry 3) according to the processing requirements of the micro drill 10, install the micro drill 10, adjust the position of the force measuring device 12 so that the measuring tool 1205 installed in the measuring fixture 1204 is subjected to equivalent force to the micro drill 10; inject the force rheological polishing fluid into the polishing tank 2, adjust the temperature of the water chiller 14 to 10°C and open the nozzle to continuously spray cooling water onto the outer wall of the polishing tank 2;

[0055] ②: Start motor A 6 to drive polishing tank 2 to rotate, causing the force rheological polishing liquid to be thrown towards the tank wall. Start force measuring device 12 and set polishing force range A (11-17.5N in this embodiment). Start water replenishment device 13 and replenish water according to the data detected in real time by force measuring device 12.

[0056] ③: Start the vertical circular guide rails 5 on both sides of the mounting table 4. When the circulation station 501 reaches the bottom of the vertical circular guide rail 5, it will automatically stop. At the same time, the cylinder 902 will push the limit rod 904 downward and lock the circulation station 501. Start the workpiece rotation drive device 11 to make the micro drill 10 rotate. According to the polishing force F detected in real time by the force measuring device 12, it is determined whether F belongs to the range A. If F belongs to A, the processing continues. If F does not belong to A, it is determined whether F is greater than the upper limit of A. If F is greater than the upper limit of A, the water replenishment device 13 is started to replenish water. If F is less than the lower limit of A, the processing stops.

[0057] ④: After processing for the set time, the cylinder 902 retracts, causing the limit rod 904 to move upward, and repeats step ③ to achieve batch processing.

[0058] In this embodiment, the mechanical rheology polishing slurry is composed of abrasive grains, a dispersed phase, a dispersion liquid, and a preservative. The abrasive grains are diamond abrasive grains with a particle size of 1.6-5 μm, and account for 3-9 wt% of the mechanical rheology polishing slurry. The dispersed phase is a polyhydroxy polymer, accounting for 50-56 wt% of the mechanical rheology polishing slurry. The dispersion liquid is a mixture of pure water and ethylene glycol, accounting for 40-45 wt% of the mechanical rheology polishing slurry, with ethylene glycol accounting for 0.5%-25% of the dispersion liquid. The preservative is sodium benzoate, sodium dehydroacetate, or phenoxyethanol, accounting for 0.05-0.1 wt% of the mechanical rheology polishing slurry.

[0059] In this embodiment, the above-mentioned processing equipment and processing method were used to conduct processing experiments on φ0.8mm carbide twist drills (USF0.8-8.5). A force rheological polishing slurry with 4.6μm diamond abrasive grains was used. Two drills were processed at a time, with a single processing time of 1.5min. A total of 400 drills were processed 200 times. The specific processing parameters are shown in Table 1 below.

[0060] Table 1

[0061]

[0062]

[0063] Experiments show that the performance of the rheological polishing fluid remained almost stable during the machining process. After the micro-drill was passivated and polished, defects such as burrs on the spiral groove were completely removed. The average radius of the main cutting edge increased from 2.5±0.8μm to 4.0±0.5μm. The grinding marks on the back face were basically removed, and the roughness Sa decreased from the original 230nm±40nm to below 35nm.

[0064] The foregoing general description of the invention and its specific embodiments should not be construed as a limitation on the technical solution of the invention. Those skilled in the art, based on the disclosure of this application, can add, reduce, or combine the disclosed technical features in the foregoing general description and / or specific embodiments (including examples) without departing from the constituent elements of the invention, to form other technical solutions within the scope of protection of this application.

Claims

1. A micro-drill force rheology batch passivation and polishing equipment, comprising a base (1); characterized in that: The base (1) is provided with a polishing groove (2) and a micro-drill clamping drive device; The polishing tank (2) is used to hold the rheological polishing liquid. The machine base (1) is equipped with an A motor (6), which can drive the polishing tank (2) to rotate. The micro-drill clamping drive device includes a gantry frame (3) located above the polishing tank (2), a mounting platform (4) on the gantry frame (3), and a vertical annular guide rail (5) mounted on the mounting platform (4); a set of circulating stations (501) is provided on the vertical annular guide rail (5); a micro-drill clamping device (8) is provided on the circulating station (501) for clamping the micro-drill (10) to be polished; a clamping device (9) is provided below the crossbeam of the gantry frame (3) for fixing the circulating station (501) during polishing; a workpiece rotation drive device (11) is provided below the clamping device (9) for driving the micro-drill (10) to rotate during polishing; A force measuring device (12) is provided on one side of the gantry (3). The force measuring device (12) includes a cantilever beam (1201), a torque sensor (1202), an extension rod (1203), and a measuring fixture (1204) arranged in sequence. One end of the cantilever beam (1201) is fixed on the gantry (3), and the other end is connected to the torque sensor (1202). The measuring fixture (1204) is used to hold the measuring tool (1205).

2. The micro-drill force rheology batch passivation and polishing equipment according to claim 1, characterized in that: The clamping device (9) includes a vertical cantilever (901) located below the crossbeam of the gantry (3), a cylinder (902) located on the side of the vertical cantilever (901), a linear guide mechanism (903) located below the cylinder (902), and a limiting rod (904) located on the linear guide mechanism (903). The cyclic station (501) is provided with a corresponding slot (5011). During polishing, the limiting rod (904) can be inserted into the slot (5011) under the drive of the cylinder (902) to limit the cyclic station (501).

3. The micro-drill force rheology batch passivation and polishing equipment according to claim 2, characterized in that: The workpiece rotation drive device (11) includes a C motor (1101) and an active friction wheel (1102); the micro-drill clamping device (8) includes a clamp (801) for clamping the micro-drill (10) and a rotating support (802), and one end of the clamp (801) is provided with a driven friction wheel (803); during polishing, the active friction wheel (1102) can contact the driven friction wheel (803) to form a transmission connection, so that the C motor (1101) can drive the clamp (801) to rotate.

4. The micro-drill force rheology batch passivation and polishing equipment according to claim 3, characterized in that: The other side of the gantry is provided with a water replenishment device (13), which is a cooling sprayer that can replenish water to the force rheological polishing liquid according to the real-time detection data of the force measuring device (12).

5. The micro-drill force rheology batch passivation and polishing equipment according to claim 4, characterized in that: The mounting platform (4) is provided with an A-shaped slot (401), which is connected to the gantry (3) by bolts passing through the A-shaped slot (401), and the vertical cantilever (901) is installed on the mounting platform (4) by bolts, so that the angle θ between the axis of the micro drill (10) and the tangent of the polishing groove (2) can be adjusted.

6. The micro-drill force rheology batch passivation and polishing equipment according to claim 5, characterized in that: The clamp (801) is provided with a detachable clamping block (8011) for holding the micro drill (10).

7. The micro-drill force rheology batch passivation and polishing equipment according to claim 6, characterized in that: The clamp (801) includes a detachably connected clamp body (8012) and a clamping block (8013); the clamping block (8011) is disposed between the clamp body (8012) and the clamping block (8013); the clamping block (8013) is provided with a clamping spring (8014); the clamping spring (8014) is used to fix the clamping block (8011).

8. The micro-drill force rheology batch passivation and polishing equipment according to claim 7, characterized in that: The base (1) is provided with a water cooling device (7); the water cooling device (7) includes a cold water pan (701), a cover plate (702) and a nozzle (703); the cold water pan (701) is located on the periphery of the polishing tank (2), and has an opening at its bottom edge. The opening is connected to the return pipe of the water chiller (14) located inside the base (1) for recycling cooling water; the cover plate (702) is located above the cold water pan (701) and covers the gap area between the cold water pan (701) and the polishing tank (2). The upper surface of the cover plate (702) is lower than the upper edge of the polishing tank (2); the nozzle (703) is located below the cover plate (702) and is connected to the cold water pipe of the water chiller (14). Its nozzle faces the polishing tank (2).

9. A micro-drill force rheology batch passivation and polishing method, characterized in that: This method uses the micro-drill force rheology batch passivation and polishing equipment of claim 1 to polish the micro-drill, and includes the following steps: ①: Install the micro drill (10) on the micro drill clamping device (8) and inject the force rheological polishing fluid into the polishing tank (2); ②: Start motor A (101) to drive the polishing tank (2) to rotate, so that the force rheological polishing liquid is thrown towards the wall of the tank; ③: Start the vertical ring guide rails (5) on both sides of the mounting platform (4). When the circulating station (501) reaches the bottom of the vertical ring guide rail (5), it will automatically stop, the clamping device (9) will clamp the circulating station (501), and the workpiece rotation drive device (11) will be started to make the micro drill (10) rotate. ④: After processing for the set time, the clamping device (9) releases the cycle station (501) and repeats step ③ to achieve batch processing.

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