Liquid ammonia filling device, method and semiconductor process system

Abstract

The application relates to a liquid ammonia filling device, a method and a semiconductor process system, wherein the liquid ammonia filling device comprises a liquid supply unit, a liquid storage unit, an analysis unit, a filling unit, a reflux unit, a pressure relief unit and a purge unit. The device has the advantages that the analysis unit is arranged in communication with the liquid storage unit, the analysis unit can analyze the ammonia gas in the liquid storage unit and obtain an analysis result, the device can transport the ammonia gas and liquid ammonia in the liquid storage unit to the filling unit and the reflux unit according to the analysis result, and the pressure relief unit is arranged in communication with the liquid storage unit and the filling unit respectively, the liquid storage unit and the filling unit are relieved of pressure, and the working safety of the device is ensured.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of component analysis in NH3 purification process, and in particular to a liquid ammonia filling device, method and semiconductor process system. BACKGROUND

[0002] High-purity ammonia provides nitrogen source for silicon nitride film in the large solar energy industry, and provides clean process gas ammonia for integrated circuit manufacturing, compound semiconductor, liquid crystal display and better cleaning of silicon wafers; as a raw material for the electronic industry, the quality of the product is crucial, directly related to the yield of the final product, and closely related to the quality and cost of the raw material and the development of the industry.

[0003] In the prior art, a low-temperature liquid filling and recycling system is disclosed in Chinese utility model patent (CN218295315U), which comprises a first nitrogen gas pipeline, a second nitrogen gas pipeline, a recycling pipeline and a filling pipeline; wherein the first nitrogen gas pipeline and the second nitrogen gas pipeline realize the blowing of the tank body and the pipeline; the recycling pipeline realizes the recycling of the raw material to the downstream; and the filling pipeline fills the tank car.

[0004] However, the composition of the raw material is not analyzed before the raw material is filled in the filling pipeline, which cannot guarantee the product quality; in addition, in the case of unqualified product quality, the product cannot be recycled and processed according to the actual situation; moreover, in the prior art, only one tank body is provided, and in the case of tank body maintenance, blowing or tank body damage, the system will not work normally, affecting the work efficiency.

[0005] At present, there is no effective solution to the problems of inability to analyze the composition of the raw material, which leads to inability to guarantee the product quality, and the system cannot work normally in the case of tank body maintenance, blowing or tank body damage in the related technology. SUMMARY

[0006] The purpose of the present application is to solve the problems of inability to analyze the composition of the raw material, which leads to inability to guarantee the product quality, and the system cannot work normally in the case of tank body maintenance, blowing or tank body damage in the related technology by providing a liquid ammonia filling device, method and semiconductor process system.

[0007] To achieve the above-mentioned purpose, the technical scheme adopted by the present application is:

[0008] In a first aspect, the present application provides a liquid ammonia filling device, comprising:

[0009] a liquid supply unit for inputting liquid ammonia;

[0010] a liquid storage unit, in communication with the liquid supply unit, for storing liquid ammonia, vaporizing the liquid ammonia to obtain ammonia gas;

[0011] an analysis unit, in communication with the liquid storage unit, for analyzing whether the composition of the ammonia gas meets a standard;

[0012] a filling unit, in communication with the liquid storage unit and the analysis unit respectively, for filling the liquid ammonia into a tank car and / or a cylinder, in the case that the composition of the ammonia gas meets the standard;

[0013] a reflux unit, in communication with the liquid storage unit and the filling unit respectively, for recovering the ammonia gas and the liquid ammonia, in the case that the composition of the ammonia gas does not meet the standard;

[0014] a pressure relief unit, in communication with the liquid storage unit and the filling unit, for relieving pressure of the liquid storage unit, the filling unit and pipelines;

[0015] a purging unit, in communication with the liquid storage unit and the filling unit, for purging impurities in the liquid storage unit, the filling unit and pipelines.

[0016] In some embodiments thereof, the liquid supply unit comprises:

[0017] a liquid supply element, in communication with the liquid storage unit, for inputting the liquid ammonia into the liquid storage unit.

[0018] In some embodiments thereof, the liquid storage unit comprises:

[0019] at least one liquid storage element, in communication with the liquid supply unit, the analysis unit, the filling unit, the reflux unit, the pressure relief unit and the purging unit respectively, for storing the liquid ammonia, analyzing the ammonia gas, delivering the liquid ammonia to the filling unit in the case that the composition of the ammonia gas meets the standard, and delivering the ammonia gas and the liquid ammonia to the reflux unit in the case that the composition of the ammonia gas does not meet the standard;

[0020] at least one heating element, in communication with the corresponding liquid storage element, for obtaining the liquid ammonia, vaporizing the liquid ammonia to obtain the ammonia gas.

[0021] In some embodiments thereof, the liquid storage unit further comprises:

[0022] a first pressure monitoring element, in communication with the liquid storage element, for monitoring the pressure in the liquid storage element.

[0023] In some embodiments thereof, the liquid storage unit further comprises:

[0024] a liquid level monitoring element, disposed inside the liquid storage element, for monitoring the liquid level of the liquid storage element.

[0025] In some embodiments thereof, the liquid storage unit further comprises:

[0026] a temperature monitoring element, disposed inside the liquid storage element, for monitoring the temperature of the liquid storage element.

[0027] In some embodiments thereof, the analysis unit comprises:

[0028] an analysis element, in communication with the liquid storage unit, the filling unit, respectively, for analyzing the composition of the ammonia gas.

[0029] In some embodiments thereof, the filling unit comprises:

[0030] at least one filling element, in communication with the liquid storage unit, the analysis unit, the reflux unit, respectively, for filling liquid ammonia into tank cars and / or cylinders when the composition of the ammonia gas meets the standard, and for transporting the ammonia gas and liquid ammonia into the reflux unit when the composition of the ammonia gas does not meet the standard.

[0031] In some embodiments thereof, the filling unit further comprises:

[0032] a second pressure monitoring element, disposed on a pipeline in communication with the filling element, for monitoring the pressure in the pipeline.

[0033] In some embodiments thereof, the filling unit further comprises:

[0034] a buffer element, disposed on a pipeline in communication with the liquid storage unit, the filling element, for buffering the liquid ammonia transmitted by the liquid storage unit.

[0035] In some embodiments thereof, the filling unit further comprises:

[0036] at least one pressure increasing element, disposed on a pipeline in communication with the liquid storage unit, the filling element, for increasing the filling pressure.

[0037] In some embodiments thereof, the filling unit further comprises:

[0038] a filter element, disposed on a pipeline in communication with the liquid storage unit, the filling element, for filtering the liquid ammonia transmitted by the liquid storage unit.

[0039] In some embodiments, the reflux unit comprises:

[0040] a first reflux element in communication with the liquid storage unit for refluxing ammonia gas to the primary condensing system when the composition of the ammonia gas does not meet the standard;

[0041] a second reflux element in communication with the liquid storage unit for refluxing ammonia gas to the tertiary condensing system when the composition of the ammonia gas does not meet the standard;

[0042] a third reflux element in communication with the filling unit for refluxing liquid ammonia to the recovery tank, the primary condensing system, and the tertiary condensing system.

[0043] In some embodiments, the pressure relief unit comprises:

[0044] a first pressure relief element in communication with the liquid storage unit for automatically relieving pressure of the liquid storage unit and the pipeline;

[0045] a second pressure relief element in communication with the filling unit for automatically relieving pressure of the filling unit and the pipeline.

[0046] In some embodiments, the pressure relief unit further comprises:

[0047] a third pressure relief element in communication with the filling unit for manually relieving pressure of the pipeline.

[0048] In some embodiments, the pressure relief unit further comprises:

[0049] a third pressure monitoring element disposed on the pipeline in communication between the first pressure relief element and the liquid storage unit for detecting pressure in the pipeline;

[0050] a fourth pressure monitoring element disposed on the pipeline in communication between the second pressure relief element and the filling unit for detecting pressure in the pipeline.

[0051] In some embodiments, the purging unit comprises:

[0052] a first purging element in communication with the liquid storage unit for purging the liquid storage unit and the pipeline;

[0053] a second purging element in communication with the filling unit for purging the filling unit and the pipeline.

[0054] In a second aspect, the present application further provides a product analysis method applied to the liquid ammonia filling device according to the first aspect.

[0055] In a third aspect, the present application provides a semiconductor process system, comprising:

[0056] The liquid ammonia filling device according to the first aspect.

[0057] Compared with the prior art, the present application has the following technical effects:

[0058] The liquid ammonia filling device, method and semiconductor process system of the present application have the following technical effects: the analysis unit is arranged in communication with the liquid storage unit, the analysis unit can analyze the ammonia gas in the liquid storage unit and obtain an analysis result, and the device can transport the ammonia gas and liquid ammonia in the liquid storage unit to the filling unit and the reflux unit according to the analysis result; the pressure relief unit is arranged in communication with the liquid storage unit and the filling unit, respectively, to relieve the pressure of the liquid storage unit and the filling unit, thereby ensuring the working safety of the device. BRIEF DESCRIPTION OF DRAWINGS

[0059] Figure 1 is a frame schematic diagram of the liquid ammonia filling device according to an embodiment of the present application;

[0060] Figure 2 is a schematic diagram of the liquid supply unit according to an embodiment of the present application;

[0061] Figure 3 is a schematic diagram of the liquid storage unit according to an embodiment of the present application (I);

[0062] Figure 4 is a schematic diagram of the analysis unit according to an embodiment of the present application;

[0063] Figure 5 is a schematic diagram of the filling unit according to an embodiment of the present application (I);

[0064] Figure 6 is a schematic diagram of the reflux unit according to an embodiment of the present application;

[0065] Figure 7 is a schematic diagram of the pressure relief unit according to an embodiment of the present application (I);

[0066] Figure 8 is a schematic diagram of the purging unit according to an embodiment of the present application;

[0067] Figure 9 is a schematic diagram of the liquid storage unit according to an embodiment of the present application (II);

[0068] Figure 10 is a schematic diagram of the filling unit according to an embodiment of the present application (II);

[0069] Figure 11 is a schematic view of a pressure relief unit according to an embodiment of the present application (II);

[0070] Figure 12 is a specific embodiment of a liquid ammonia filling device according to an embodiment of the present application.

[0071] wherein the reference signs are: 100, liquid supply unit; 110, liquid supply element; 120, first valve element;

[0072] 200, liquid storage unit; 210, liquid storage element; 220, heating element; 230, second valve element; 240, third valve element; 250, first pressure monitoring element; 260, liquid level monitoring element; 270, temperature monitoring element; 280, fourteenth valve element;

[0073] 300, analysis unit; 310, analysis element; 320, fourth valve element; 330, fifth valve element;

[0074] 400, filling unit; 410, filling element; 420, sixth valve element; 430, second pressure monitoring element; 440, buffer element; 450, pressure boosting element; 460, filter element; 470, fifteenth valve element;

[0075] 500, reflux unit; 510, first reflux element; 520, second reflux element; 530, third reflux element; 540, seventh valve element; 550, eighth valve element; 560, ninth valve element;

[0076] 600, pressure relief unit; 610, first pressure relief element; 620, second pressure relief element; 630, tenth valve element; 640, eleventh valve element; 650, third pressure monitoring element; 660, fourth pressure monitoring element; 670, third pressure relief element; 680, sixteenth valve element;

[0077] 700, purge unit; 710, first purge element; 720, second purge element; 730, twelfth valve element; 740, thirteenth valve element. DETAILED DESCRIPTION

[0078] In order to make the objects, technical solutions and advantages of the present application clearer, the present application is described and explained below in connection with the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and do not limit the present application. Based on the embodiments provided in the present application, all other embodiments obtained by those of ordinary skill in the art without creative labor fall within the scope of protection of the present application.

[0079] It is apparent that the accompanying drawings described below in the description are only some examples or embodiments of the present application, and for those skilled in the art, the present application can be applied to other similar situations according to these drawings without creative labor. In addition, it can be understood that although the efforts made in this development process can be complex and lengthy, some design, manufacture or production changes made on the basis of the technology disclosed in the present application are only routine technical means for those skilled in the art related to the disclosure of the present application, and should not be understood as insufficient disclosure of the present application.

[0080] In the present application, the phrase "embodiment" means that the specific features, structures or characteristics described in conjunction with the embodiment can be included in at least one embodiment of the present application. The appearance of this phrase in various places in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment to other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described in the present application can be combined with other embodiments without conflict.

[0081] Unless otherwise defined, the technical terms or scientific terms involved in the present application should be understood as the usual meaning understood by those skilled in the art in the technical field to which the present application belongs. The terms "one", "a", "an", "the", and similar words involved in the present application do not represent quantity limitation, but can represent singular or plural. The terms "include", "contain", "have", and any variations thereof involved in the present application are intended to cover non-exclusive inclusion; for example, a process, method, system, product or device including a series of steps or modules (units) is not limited to the listed steps or units, but can also include steps or units not listed, or can also include other steps or units inherent to the process, method, product or device. The terms "connected", "connected", "coupled" and similar words involved in the present application are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. The term "multiple" in the present application means two or more. The association between the associated objects is described by the term "and / or", which means that there can be three relationships, for example, "A and / or B" can mean that A exists alone, A and B exist together, and B exists alone. The character " / " generally represents an "or" relationship between the associated objects. The terms "first", "second", "third" and the like involved in the present application are only to distinguish similar objects, and do not represent a specific order for the objects.

[0082] Embodiment 1

[0083] This embodiment relates to the liquid ammonia filling device in the present application.

[0084] An exemplary embodiment of the present application is shown in Figure 1 As shown in , the liquid supply unit 100 comprises a liquid supply element 110. Wherein, the liquid supply element 110 is in communication with the liquid storage unit 200, for inputting liquid ammonia to the liquid storage unit 200.

[0085] Figure 2 As shown in , the liquid supply element 110 comprises a liquid supply source and a liquid outlet. Wherein, the liquid outlet is disposed on the liquid supply source, and is in communication with the liquid storage unit 200.

[0086] In some embodiments, the liquid supply element 110 is a liquid ammonia storage tank.

[0087] Further, the liquid supply unit 100 further comprises at least one first valve element 120. Wherein, the first valve element 120 is disposed on the pipeline in communication between the liquid supply element 110 and the liquid storage unit 200, for controlling whether the liquid supply element 110 supplies liquid ammonia to the liquid storage unit 200.

[0088] In the case that the first valve element 120 is several, the several first valve elements 120 are disposed in parallel.

[0089] In some embodiments, the first valve element 120 includes but is not limited to a bellows valve, a one-way valve.

[0090]

[0091] Specifically, the first valve element 120 comprises a first pneumatic bellows valve and a first one-way valve. The first pneumatic bellows valve is arranged in a pipeline through which the liquid supply element 110 communicates with the liquid storage unit 200; the first one-way valve is arranged in the pipeline through which the liquid supply element 110 communicates with the liquid storage unit 200, and is located downstream of the first pneumatic bellows valve.

[0092] As shown in Figure 3 The liquid storage unit 200 comprises at least one liquid storage element 210 and at least one heating element 220. The liquid storage element 210 respectively communicates with the liquid supply unit 100, the analysis unit 300, the filling unit 400, the reflux unit 500, the pressure relief unit 600, and the purge unit 700, and is used for storing liquid ammonia, analyzing ammonia gas, transporting ammonia gas to the filling unit 400 when the composition of the ammonia gas meets the standard, and transporting ammonia gas and liquid ammonia to the reflux unit 500 when the composition of the ammonia gas does not meet the standard. The heating element 220 communicates with the corresponding liquid storage element 210, and is used for obtaining liquid ammonia and vaporizing the liquid ammonia to obtain ammonia gas.

[0093] Specifically, the liquid storage element 210 communicates with the liquid supply element 110.

[0094] The number of the liquid storage elements 210 matches the number of the first valve elements 120. Generally, the number of the liquid storage elements 210 is equal to the number of the first valve elements 120, i.e., the liquid storage elements 210 correspond to the first valve elements 120 one by one.

[0095] It should be noted that in the embodiment, the number of the liquid storage elements 210 is 2, and the two liquid storage elements 210 can be used alternately, which can avoid the production stop caused by the unexpected situation such as maintenance and pipeline blockage of one liquid storage element 210, and can improve the production efficiency. In addition, the number of the liquid storage elements 210 can also be 3, 4, etc.

[0096] In some embodiments, the liquid storage element 210 comprises but is not limited to a liquid storage tank.

[0097] Specifically, the liquid storage element 210 includes a tank body, a first interface, a second interface, a third interface, a fourth interface, a fifth interface, a sixth interface, and a seventh interface. The first interface is arranged on the side wall of the tank body and communicates with the liquid supply unit 100; the second interface is arranged on the top of the tank body and communicates with the analysis unit 300; the third interface is arranged on the bottom of the tank body and communicates with the charging unit 400; the fourth interface is arranged on the top of the tank body and communicates with the reflux unit 500, and is used to guide the gas in the tank body to the primary condensing system; the fifth interface is arranged on the top of the tank body and communicates with the reflux unit 500, and is used to guide the gas in the tank body to the tertiary condensing system; the sixth interface is arranged on the top of the tank body and communicates with the pressure relief unit 600; and the seventh interface is arranged on the side wall of the tank body and communicates with the purge unit 700.

[0098] The first interface includes a first pipeline and a first pair of connectors. Any one end of the first pipeline communicates with the liquid supply element 110; and the first pair of connectors is arranged at the other end of the first pipeline and communicates with the tank body.

[0099] In some embodiments, the first pipeline includes, but is not limited to, a pipeline heated by INS.

[0100] The second interface includes a second pipeline and a second pair of connectors. Any one end of the second pipeline communicates with the analysis unit 300 and the reflux unit 500; and the second pair of connectors is arranged at the other end of the second pipeline and communicates with the tank body.

[0101] In some embodiments, the second pipeline includes, but is not limited to, a pipeline heated by INS.

[0102] The third interface includes a third pipeline and a third pair of connectors. Any one end of the third pipeline communicates with the charging unit 400; and the third pair of connectors is arranged at the other end of the third pipeline and communicates with the tank body.

[0103] In some embodiments, the third pipeline includes, but is not limited to, a pipeline heated by INS.

[0104] In addition, the third interface further includes a first backup pipeline and a second backup pipeline. Both the first backup pipeline and the second backup pipeline communicate with the tank body. That is, in the case of blockage or damage of the third pipeline, the liquid ammonia can be transported through the first backup pipeline and the second backup pipeline.

[0105] In some embodiments, the first backup pipeline and the second backup pipeline include, but are not limited to, a pipeline heated by INS.

[0106] The fourth interface includes a fourth pipeline and a fourth pair of connectors. Any one end of the fourth pipeline communicates with the reflux unit 500; and the fourth pair of connectors is arranged at the other end of the fourth pipeline and communicates with the tank body.

[0107] In some embodiments, the fourth pipeline includes, but is not limited to, a pipeline heated by INS.

[0108] The fifth interface includes a fifth pipeline and a fifth connector. Any one end of the fifth pipeline is in communication with the return unit 500; the fifth connector is arranged at the other end of the fifth pipeline and is in communication with the tank body.

[0109] In some embodiments, the fifth pipeline includes, but is not limited to, a pipeline heated by INS.

[0110] The sixth interface includes a sixth pipeline and a sixth connector. Any one end of the sixth pipeline is in communication with the pressure relief unit 600; the sixth connector is arranged at the other end of the sixth pipeline and is in communication with the tank body.

[0111] In some embodiments, the sixth pipeline includes, but is not limited to, a pipeline heated by INS.

[0112] The seventh interface includes a seventh pipeline and a seventh connector. Any one end of the seventh pipeline is in communication with the purge unit 700; the seventh connector is arranged at the other end of the seventh pipeline and is in communication with the tank body.

[0113] In some embodiments, the seventh pipeline includes, but is not limited to, a pipeline heated by INS.

[0114] The number of heating elements 220 matches the number of liquid storage elements 210. Generally, the number of heating elements 220 is equal to the number of liquid storage elements 210, that is, the heating element 220 corresponds to the liquid storage element 210 one by one.

[0115] It should be noted that in the present embodiment, the number of heating elements 220 is 2. In addition, the number of heating elements 220 can also be 3, 4, etc.

[0116] Specifically, the heating element 220 includes a heating piece, an input pipeline and an output pipeline. The heating piece is used to obtain liquid ammonia and vaporize the liquid ammonia to obtain ammonia gas; the first end of the input pipeline is in communication with the liquid storage element 210, the second end of the input pipeline is in communication with the heating piece, and the input pipeline is used to input liquid ammonia; the first end of the output pipeline is in communication with the heating piece, and the second end of the output pipeline is in communication with the liquid storage element 210, and the output pipeline is used to output ammonia gas.

[0117] In some embodiments, the heating piece includes, but is not limited to, a gas generator.

[0118] Furthermore, the liquid storage unit 200 also includes a second valve element 230. The second valve element 230 is disposed in the pipeline connecting the liquid storage unit 210 to the liquid supply unit 100, the analysis unit 300, the filling unit 400, the reflux unit 500, the pressure relief unit 600, and the purging unit 700.

[0119] The number of second valve elements matches the number of liquid storage elements 210. Generally, the number of second valve elements is equal to the number of liquid storage elements, that is, there is a one-to-one correspondence between the second valve elements and the liquid storage elements.

[0120] In some of these embodiments, the second valve element 230 includes, but is not limited to, a bellows valve, a shut-off valve, or a diaphragm valve.

[0121] Specifically, the second valve element 230 includes a first manual bellows valve, a first manual shut-off valve, a second manual bellows valve, a third manual bellows valve, a fourth manual bellows valve, a first manual diaphragm valve, a second manual diaphragm valve, and a second manual shut-off valve. The first manual bellows valve is located in the first pipeline and downstream of the first valve element 120; the first manual shut-off valve is located in the second pipeline; the second manual bellows valve is located in the third pipeline; the third manual bellows valve is located in the first spare pipeline; the fourth manual bellows valve and the first manual diaphragm valve are located in the second spare pipeline; the first manual diaphragm valve is located in the fourth pipeline; the second manual diaphragm valve is located in the fifth pipeline; and the second manual shut-off valve is located in the sixth pipeline.

[0122] Furthermore, the liquid storage unit 200 also includes a third valve element 240. The third valve element 240 is disposed in the pipeline connecting the heating element 220 and the liquid storage element 210, and is used to control the connection between the heating element and the liquid storage element 210.

[0123] The number of third valve elements matches the number of heating elements. Generally, the number of third valve elements is equal to the number of heating elements, meaning there is a one-to-one correspondence between the third valve elements and the heating elements.

[0124] In some embodiments, the third valve element 240 includes, but is not limited to, a ball valve.

[0125] Specifically, the third valve element 240 includes a first ball valve and a second ball valve. The first ball valve is located on the input pipeline, and the second ball valve is located on the output pipeline.

[0126] like Figure 4 As shown, the analysis unit 300 includes an analysis element 310. The analysis element 310 is connected to the liquid storage unit 200 and the filling unit 400, respectively, and is used to perform component analysis on ammonia gas.

[0127] Specifically, the analytical element 310 is connected to the liquid storage element 210.

[0128] Specifically, the analysis unit 300 comprises an analysis element 310, a first analysis pipeline and a second analysis pipeline. The first end of the first analysis pipeline is in communication with the analysis element 310, and the second end of the first analysis pipeline is in communication with the second pipeline of the liquid storage element 210. The first end of the second analysis pipeline is in communication with the analysis element 310, and the second end of the second analysis pipeline is in communication with the charging unit 400.

[0129] In some embodiments, the analysis element 310 comprises, but is not limited to, a gas composition analyzer.

[0130] The number of the first analysis pipelines matches the number of the liquid storage elements 210. Generally, the number of the first analysis pipelines is the same as the number of the liquid storage elements 210.

[0131] It should be noted that the number of the first analysis pipelines is 2 in this embodiment. In addition, the number of the first analysis pipelines can also be 3 or 4.

[0132] In some embodiments, the first analysis pipeline and the second analysis pipeline comprise, but are not limited to, pipelines heated by INS.

[0133] Further, the analysis unit 300 further comprises a fourth valve element 320 and a fifth valve element 330. The fourth valve element 320 is arranged on the first analysis pipeline and is used to control whether the ammonia gas of the liquid storage element 210 flows into the analysis element 310. The fifth valve element 330 is arranged on the second analysis pipeline and is used to control whether the ammonia gas of the charging unit 400 flows into the analysis element 310.

[0134] The number of the fourth valve elements 320 matches the number of the first analysis pipelines. Generally, the number of the fourth valve elements 320 is the same as the number of the first analysis pipelines.

[0135] It should be noted that the number of the fourth valve elements 320 is 2. In addition, the number of the fourth valve elements 320 can also be 3 or 4.

[0136] In some embodiments, the fourth valve element 320 comprises, but is not limited to, a diaphragm valve and a one-way valve.

[0137] Specifically, the fourth valve element 320 comprises a third pneumatic diaphragm valve and a second one-way valve. The third pneumatic diaphragm valve is arranged on the first analysis pipeline. The second one-way valve is arranged on the first analysis pipeline and is located downstream of the third pneumatic diaphragm valve.

[0138] In some embodiments, the fifth valve element 330 comprises, but is not limited to, a diaphragm valve and a one-way valve.

[0139] Specifically, the fifth valve element 330 includes a fourth pneumatic diaphragm valve and a third check valve. The fourth pneumatic diaphragm valve is arranged on the second analysis pipeline; the third check valve is arranged on the second analysis pipeline and located downstream of the fourth pneumatic diaphragm valve.

[0140] As shown in Figure 5 The filling unit 400 includes at least one filling element 410. The filling element 410 is in communication with the liquid storage unit 200, the analysis unit 300, and the reflux unit 500, respectively, for filling liquid ammonia into the tank car and / or the steel cylinder when the composition of the ammonia gas meets the standard, and for transporting the ammonia gas and the liquid ammonia to the reflux unit 500 when the composition of the ammonia gas does not meet the standard.

[0141] Specifically, the filling element 410 is in communication with the liquid storage element 210 and the analysis element 310, respectively.

[0142] Specifically, the filling element 410 includes a first filling pipeline, a second filling pipeline, a third filling pipeline, a first filling connector, and a second filling connector. Any one end of the first filling pipeline is in communication with the liquid storage element 210 and the analysis element 310, respectively; any one end of the second filling pipeline is in communication with the first filling pipeline; the first filling connector is arranged at the other end of the second filling pipeline and is in communication with the steel cylinder; any one end of the third filling pipeline is in communication with the first filling pipeline; the second filling connector is arranged at the other end of the third filling pipeline and is in communication with the tank car.

[0143] In some embodiments, the first filling pipeline, the second filling pipeline, and the third filling pipeline include, but are not limited to, pipelines heated by INS.

[0144] Further, the filling unit 400 further includes a sixth valve element 420. The sixth valve element 420 is arranged on the filling pipeline and located downstream of the first manual bellows valve on the liquid storage element 210, for controlling whether the liquid ammonia of the liquid storage element 210 flows to the filling pipeline, the tank car, or the steel cylinder.

[0145] In some embodiments, the sixth valve element 420 includes, but is not limited to, a bellows valve and a check valve.

[0146] Specifically, the sixth valve element 420 includes a second pneumatic bellows valve, a fourth check valve, a fifth manual bellows valve, and a sixth manual bellows valve. The second pneumatic bellows valve is arranged on the first filling pipeline and located downstream of the first manual bellows valve, for opening or closing the communication between the liquid storage element 210 and the first filling pipeline;

[0147] The fourth check valve is located in the first filling pipeline and downstream of the second pneumatic bellows valve to prevent backflow of liquid ammonia entering the first filling pipeline; the fifth manual bellows valve is located in the second filling pipeline to open or close the connection between the second filling pipeline and the cylinder; the sixth manual bellows valve is located in the third filling pipeline to open or close the connection between the third filling pipeline and the tank truck.

[0148] Furthermore, the filling unit 400 also includes a second pressure monitoring element 430. The second pressure monitoring element 430 is disposed in a pipeline connected to the filling element 410 and is used to monitor the pressure in the pipeline.

[0149] In some of these embodiments, the second pressure monitoring element 430 includes, but is not limited to, a pressure gauge.

[0150] Specifically, the second pressure monitoring element 430 includes a third pressure monitoring element, a fourth pressure monitoring element, and a fifth pressure monitoring element. The third pressure monitoring element is disposed in the first filling line and is used to monitor the pressure within the first filling line; the fourth pressure monitoring element is disposed in the second filling line and is used to monitor the pressure within the second filling line; and the fifth pressure monitoring element is disposed in the third filling line and is used to monitor the pressure within the third filling line.

[0151] It should be noted that by setting the second pressure monitoring element 430, the pressure in the filling pipeline can be monitored in real time, so that the staff can determine whether the pressure in the filling pipeline meets the standard, so that the staff can make timely adjustments.

[0152] like Figure 6 As shown, the reflux unit 500 includes a first reflux element 510, a second reflux element 520, and a third reflux element 530. The first reflux element 510 is connected to the liquid storage unit 200 and is used to reflux ammonia to the primary condensation system when the ammonia composition does not meet the standard. The second reflux element 520 is connected to the liquid storage unit 200 and is used to reflux ammonia to the tertiary condensation system when the ammonia composition does not meet the standard. The third reflux element 530 is connected to the filling unit 400 and is used to deliver liquid ammonia to the recovery tank, the primary condensation system, and the tertiary condensation system.

[0153] Specifically, the first reflux element 510 is connected to the liquid storage element 210; the second reflux element 520 is connected to the liquid storage element 210; and the third reflux element 530 is connected to the filling element 410.

[0154] The number of first reflux elements 510 matches the number of liquid storage elements 210. Generally, the number of first reflux elements 510 is the same as the number of liquid storage elements 210.

[0155] It should be noted that the number of the first reflux elements 510 is 2. In addition, the number of the first reflux elements 510 can also be 3, 4, etc.

[0156] In some embodiments, the first reflux element 510 includes, but is not limited to, a pipe heated by INS.

[0157] Specifically, the first reflux element 510 includes a first reflux pipe. The first end of the first reflux pipe is in communication with the fourth pipe of the liquid storage element 210, and the second end of the first reflux pipe is in communication with the first-stage condensing system.

[0158] The number of the second reflux elements 520 matches the number of the liquid storage elements 210. Generally, the number of the second reflux elements 520 is the same as the number of the liquid storage elements 210.

[0159] It should be noted that the number of the second reflux elements 520 is 2. In addition, the number of the first reflux elements 510 can also be 3, 4, etc.

[0160] In some embodiments, the second reflux element 520 includes, but is not limited to, a pipe heated by INS.

[0161] Specifically, the second reflux element 520 includes a second reflux pipe. The first end of the second reflux pipe is in communication with the fourth pipe of the liquid storage element 210, and the second end of the second reflux pipe is in communication with the third-stage condensing system.

[0162] In some embodiments, the third reflux element 530 includes, but is not limited to, a pipe heated by INS.

[0163] Specifically, the third reflux element 530 includes a third reflux pipe, a fourth reflux pipe, and a fifth reflux pipe. The first end of the third reflux pipe is in communication with the first charging pipe, and the second end of the third reflux pipe is in communication with the first-stage condensing system. The first end of the fourth reflux pipe is in communication with the first charging pipe, and the second end of the fourth reflux pipe is in communication with the third-stage condensing system. The first end of the fifth reflux pipe is in communication with the first charging pipe, and the second end of the fifth reflux pipe is in communication with the recovery tank.

[0164] Further, the reflux unit 500 also includes a seventh valve element 540, an eighth valve element 550, and a ninth valve element 560. The seventh valve element 540 is arranged on the first reflux pipe and is used to control whether the ammonia gas refluxes to the first-stage condensing system. The eighth valve element 550 is arranged on the second reflux pipe and is used to control whether the ammonia gas refluxes to the third-stage condensing system. The ninth valve element 560 is arranged on the third reflux pipe and is used to control whether the liquid ammonia refluxes to the recovery tank.

[0165] In some embodiments, the seventh valve element 540 includes, but is not limited to, a stop valve, a one-way valve.

[0166] Specifically, the seventh valve element 540 comprises a first pneumatic stop valve and a fifth one-way valve. The first pneumatic stop valve is arranged in the first return pipe; the fifth one-way valve is arranged in the first return pipe and located downstream of the first pneumatic stop valve.

[0167] In some embodiments, the eighth valve element 550 comprises but is not limited to a diaphragm valve, a one-way valve.

[0168] Specifically, the eighth valve element 550 comprises a fifth pneumatic diaphragm valve and a sixth one-way valve. The fifth pneumatic diaphragm valve is arranged in the second return pipe; the sixth one-way valve is arranged in the second return pipe and located downstream of the fifth pneumatic diaphragm valve.

[0169] In some embodiments, the ninth valve element 560 comprises but is not limited to a diaphragm valve, a one-way valve, a bellows valve.

[0170] Specifically, the ninth valve element 560 comprises a sixth pneumatic diaphragm valve, a seventh one-way valve, a seventh pneumatic diaphragm valve, an eighth one-way valve, a seventh manual bellows valve and a ninth one-way valve. The sixth pneumatic diaphragm valve is arranged in the third return pipe; the seventh one-way valve is arranged in the third return pipe and located downstream of the sixth pneumatic diaphragm valve; the seventh pneumatic diaphragm valve is arranged in the fourth return pipe; the eighth one-way valve is arranged in the fourth return pipe and located downstream of the seventh pneumatic diaphragm valve; the seventh manual bellows valve is arranged in the fifth return pipe; the ninth one-way valve is arranged in the fifth return pipe and located downstream of the seventh manual bellows valve.

[0171] As shown in FIG. 6, the pressure relief unit 600 comprises a first pressure relief element 610 and a second pressure relief element 620. The first pressure relief element 610 is in communication with the liquid storage unit 200 and is used for automatically relieving pressure of the liquid storage unit 200 and the pipeline; the second pressure relief element 620 is in communication with the filling unit 400 and is used for automatically relieving pressure of the filling unit 400 and the pipeline. Figure 7 Specifically, the first pressure relief element 610 is in communication with the liquid storage element 210; the second pressure relief element 620 is in communication with the filling element 410.

[0172] The number of the first pressure relief element 610 matches the number of the liquid storage element 210. Generally, the number of the first pressure relief element 610 is the same as the number of the liquid storage element 210.

[0173] It should be noted that the number of the first pressure relief element 610 is 2. In addition, the number of the first pressure relief element 610 can also be 3 or 4.

[0174] It should be noted that the number of the first pressure relief element 610 is 2. In addition, the number of the first pressure relief element 610 can also be 3 or 4.

[0175] It should be noted that the number of the first pressure relief element 610 is 2. In addition, the number of the first pressure relief element 610 can also be 3 or 4.Specifically, the first pressure relief element 610 includes a first pressure relief pipeline, a first pressure sensing element, a first pressure relief element and a second pressure relief element. The first end of the first pressure relief pipeline is in communication with the fifth pipeline of the liquid storage element 210, and the second end of the first pressure relief pipeline is in communication with the tail gas treatment tank; the first pressure sensing element is arranged on the first pressure relief pipeline and is located downstream of the second manual diaphragm valve; the first pressure relief element is arranged on the first pressure relief pipeline and is located downstream of the first pressure sensing element; and the second pressure relief element is arranged on the first pressure relief pipeline and is located downstream of the first pressure sensing element.

[0176] It should be noted that in the case of excessive pressure of the liquid storage element 210 and the first pressure relief pipeline, the first pressure sensing element is broken, and then the first pressure relief element and the second pressure relief element relieve pressure and deliver gas to the tail gas treatment tank.

[0177] In some embodiments, the first pressure sensing element includes but is not limited to a rupture disc.

[0178] In some embodiments, the first pressure relief element and the second pressure relief element include but are not limited to pressure relief valves.

[0179] Further, the pressure relief unit 600 further includes a tenth valve element 630. The tenth valve element 630 is arranged on the first pressure relief pipeline and is used to control the communication between the first pressure relief element and the second pressure relief element and the tail gas treatment tank.

[0180] In some embodiments, the tenth valve element 630 includes but is not limited to a one-way valve.

[0181] Specifically, the tenth valve element 630 includes a tenth one-way valve. The tenth one-way valve is arranged on the first pressure relief pipeline and is located downstream of the first pressure relief element and the second pressure relief element.

[0182] Specifically, the second pressure relief element 620 includes a second pressure relief pipeline, a second pressure sensing element and a third pressure relief element. The first end of the second pressure relief pipeline is in communication with the filling pipeline, and the second end of the second pressure relief pipeline is in communication with the tail gas treatment tank; the second pressure sensing element is arranged on the second pressure relief pipeline; and the third pressure relief element is arranged on the second pressure relief pipeline and is located downstream of the second pressure sensing element.

[0183] It should be noted that in the case of excessive pressure in the filling pipeline, the second pressure sensing element is broken, and then the third pressure relief element relieves pressure and delivers gas to the tail gas treatment tank.

[0184] In some embodiments, the second pressure sensing element includes but is not limited to a rupture disc.

[0185] In some embodiments, the third pressure relief element includes but is not limited to a pressure relief valve.

[0186] Furthermore, the pressure relief unit 600 also includes an eleventh valve element 640. The eleventh valve element 640 is disposed in the second pressure relief pipeline and is used to control the connection between the third pressure relief component and the exhaust gas treatment tank.

[0187] In some of these embodiments, the eleventh valve element 640 includes, but is not limited to, a diaphragm valve and a check valve.

[0188] Specifically, the eleventh valve element 640 includes a third manual diaphragm valve and an eleventh check valve. The third manual diaphragm valve is located in the second pressure relief line and upstream of the third pressure relief element; the eleventh check valve is located in the second pressure relief line and downstream of the third pressure relief element.

[0189] Furthermore, the pressure relief unit 600 also includes a third pressure monitoring element 650 and a fourth pressure monitoring element 660. The third pressure monitoring element 650 is disposed in the pipeline connecting the first pressure relief element 610 and the liquid storage unit 200, and is used to detect the pressure within that pipeline; the fourth pressure monitoring element 660 is disposed in the pipeline connecting the second pressure relief element 620 and the filling unit 400, and is used to detect the pressure within that pipeline.

[0190] Specifically, the third pressure monitoring element 650 is disposed in the first pressure relief pipeline and is located between the first pressure sensing element and the first and second pressure relief elements.

[0191] In some of these embodiments, the third pressure monitoring element 650 includes, but is not limited to, a pressure gauge.

[0192] Specifically, the fourth pressure monitoring element 660 is disposed in the second pressure relief line and located between the second pressure sensing element and the third pressure relief element.

[0193] In some of these embodiments, the fourth pressure monitoring element 660 includes, but is not limited to, a pressure gauge.

[0194] like Figure 8 As shown, the purging unit 700 includes a first purging element 710 and a second purging element 720. The first purging element 710 is connected to the liquid storage unit 200 and is used to purge the liquid storage unit 200 and its pipelines; the second purging element 720 is connected to the filling unit 400 and is used to purge the filling unit 400 and its pipelines.

[0195] It should be noted that the purging gas is nitrogen.

[0196] Specifically, the first purging element 710 is connected to the liquid storage element 210; the second purging element 720 is connected to the filling element 410.

[0197] The number of the first purge elements 710 matches the number of the liquid storage elements 210. Generally, the number of the first purge elements 710 is the same as the number of the liquid storage elements 210.

[0198] It should be noted that the number of the first purge elements 710 is 2. In addition, the number of the first purge elements 710 can also be 3 or 4.

[0199] Specifically, the first purge element 710 includes a first gas supply element and a first purge pipeline. The first end of the first purge pipeline is in communication with the input pipeline of the heating element 220, and the second end of the first purge pipeline is in communication with the first gas supply element; the first gas supply element is used to supply purge gas into the liquid storage element 210 and the pipeline through the first purge pipeline.

[0200] Specifically, the second purge element 720 includes a second gas supply element and a second purge pipeline. The first end of the second purge pipeline is in communication with the first filling pipeline, and the second end of the second purge pipeline is in communication with the second gas supply element; the second gas supply element is used to supply purge gas into the first filling pipeline through the second purge pipeline.

[0201] Further, the purge unit 700 further includes a twelfth valve element 730. The twelfth valve element 730 is arranged on the first purge pipeline and is used to control whether the purge gas flows to the liquid storage element 210 and the pipeline.

[0202] In some embodiments, the twelfth valve element 730 includes but is not limited to a diaphragm valve and a one-way valve.

[0203] Specifically, the twelfth valve element 730 includes an eighth pneumatic diaphragm valve and a twelfth one-way valve. The eighth pneumatic diaphragm valve is arranged on the first purge pipeline; the twelfth one-way valve is arranged on the first purge pipeline and is located upstream of the eighth pneumatic diaphragm valve.

[0204] Further, the purge unit 700 further includes a thirteenth valve element 740. The thirteenth valve element 740 is arranged on the second purge pipeline and is used to control whether the purge gas flows to the first filling pipeline.

[0205] In some embodiments, the thirteenth valve element 740 includes but is not limited to a diaphragm valve and a one-way valve.

[0206] Specifically, the thirteenth valve element 740 includes a ninth pneumatic diaphragm valve, a thirteenth one-way valve, and a tenth pneumatic diaphragm valve. The ninth pneumatic diaphragm valve is arranged on the second purge pipeline; the thirteenth one-way valve is arranged on the second purge pipeline and is located downstream of the eighth pneumatic diaphragm valve; the tenth pneumatic diaphragm valve is arranged on the second purge pipeline and is located downstream of the thirteenth one-way valve.

[0207] The use method of the embodiment is as follows:

[0208] (1) Cleaning the pipeline before filling

[0209] The first purge element 710 and the second purge element 720 are opened, the second valve element 230, the tenth valve element 630, the eleventh valve element 640, the twelfth valve element, and the thirteenth valve element 740 are opened, and the pipeline and the gas in the liquid storage element 210 are purged, so that the waste gas in the pipeline and the liquid storage element 210 is discharged to the tail gas treatment tank.

[0210] (2) Supplying liquid ammonia

[0211] The first valve element 120 and the second valve element 230 are opened, and the liquid supply element 110 supplies liquid ammonia to the liquid storage element 210.

[0212] (3) Vaporizing the liquid ammonia

[0213] The heating element 220 is opened, and the third valve element 240 is opened, so that the liquid ammonia in the liquid storage element 210 is supplied to the heating element 220, so that the liquid ammonia is vaporized by heating and ammonia gas is obtained, and then the ammonia gas is re-supplied to the liquid storage element 210.

[0214] (4) Analyzing the composition of the ammonia gas and performing reflux or filling treatment on the ammonia gas and the liquid ammonia in the liquid storage element 210 according to the analysis result

[0215] The analysis element 310 is opened, and the second valve element 230, the fourth valve element 320, and the fifth valve element 330 are opened, so that the ammonia gas in the liquid storage element 210 and the filling element 410 is supplied to the analysis element 310, so that the analysis element 310 analyzes the composition of the ammonia gas and obtains an analysis result;

[0216] If the analysis result meets the standard, the filling element 410 is started, and the second valve element 230 and the sixth valve element 420 are opened, so that the liquid ammonia can be discharged to the tank car and the cylinder, thereby filling the liquid ammonia;

[0217] If the analysis result does not meet the standard and the analysis result is in the first preset result, the first reflux element 510 is started, and the second valve element 230 and the seventh valve element 540 are opened, so that the ammonia gas in the liquid storage element 210 can be discharged to the first condensing system;

[0218] If the analysis result does not meet the standard and the analysis result is in the second preset result, the second reflux element 520 is started, and the second valve element 230 and the eighth valve element 550 are opened, so that the ammonia gas in the liquid storage element 210 can be discharged to the third condensing system;

[0219] In the case that the analysis result does not meet the standard and the analysis result also does not meet the first preset result and the second preset result, the third reflux element 530 is started, the second valve element 230 and the ninth valve element 560 are opened, so that the liquid ammonia in the liquid storage element 210 is refluxed to the recovery tank for reprocessing.

[0220] The embodiment has the advantages that the analysis unit is arranged in communication with the liquid storage unit, the analysis unit can analyze the ammonia gas in the liquid storage unit and obtain an analysis result, and the device delivers the ammonia gas and the liquid ammonia in the liquid storage unit to the filling unit and the reflux unit according to the analysis result; and the pressure relief unit is arranged in communication with the liquid storage unit and the filling unit respectively, and the liquid storage unit and the filling unit are relieved of pressure, so that the working safety of the device is ensured.

[0221] Embodiment 2

[0222] The embodiment is a variant of the embodiment 1, and the difference between the embodiment and the embodiment 1 is that the structure of the liquid storage unit 200 is different.

[0223] As shown in Figure 9 The liquid storage unit 200 further includes at least one of a first pressure monitoring element 250, a liquid level monitoring element 260 and a temperature monitoring element 270. The first pressure monitoring element 250 is in communication with the liquid storage element 210 and is used to monitor the pressure in the liquid storage element 210; the liquid level monitoring element 260 is arranged in the interior of the liquid storage element 210 and is used to monitor the liquid level height of the liquid storage element 210; and the temperature monitoring element 270 is arranged in the interior of the liquid storage element 210 and is used to monitor the temperature of the liquid storage element 210.

[0224] The number of the first pressure monitoring elements 250 matches the number of the liquid storage elements 210. Generally, the number of the first pressure monitoring elements 250 is the same as the number of the liquid storage elements 210.

[0225] In some embodiments, the first pressure monitoring element 250 includes but is not limited to a pressure gauge and a pressure sensor.

[0226] Specifically, the first pressure monitoring element 250 includes a first pressure monitoring element and a second pressure monitoring element. The first pressure monitoring element is in communication with the liquid storage element 210 and is located at the middle position of the sidewall of the liquid storage element 210; and the second pressure monitoring element is in communication with the liquid storage element 210 and is located at the top position of the liquid storage element 210.

[0227] Specifically, the liquid level monitoring element 260 can monitor the liquid level value in the liquid storage element 210, and in the case that the liquid level monitoring element detects that the liquid level in the liquid storage element 210 reaches the system set liquid level value, the system can control the liquid supply unit 100 to be closed.

[0228] In some embodiments, the liquid level monitoring element 260 includes, but is not limited to, a liquid level gauge.

[0229] Specifically, the temperature monitoring element 270 is arranged in the pipeline through which the second pressure monitoring element communicates with the liquid storage element 210, and the temperature monitoring element 270 is located downstream of the fourth manual diaphragm valve.

[0230] In some embodiments, the temperature monitoring element 270 includes, but is not limited to, a temperature sensor.

[0231] Further, the liquid storage unit 200 further comprises a fourteenth valve element 280. In this embodiment, the fourteenth valve element 280 is arranged in the pipeline through which the first pressure monitoring element 250 communicates with the liquid storage element 210.

[0232] In some embodiments, the fourteenth valve element 280 includes, but is not limited to, a stop valve and a diaphragm valve.

[0233] Specifically, the fourteenth valve element 280 includes a third manual stop valve, a fourth manual stop valve, and a fourth manual diaphragm valve. In this embodiment, the third manual stop valve is arranged in the pipeline through which the first pressure monitoring element communicates with the liquid storage element 210; the fourth manual stop valve is arranged in the pipeline through which the second pressure monitoring element communicates with the liquid storage element 210; and the fourth manual diaphragm valve is arranged in the pipeline through which the second pressure monitoring element communicates with the liquid storage element 210 and is located downstream of the fourth manual stop valve.

[0234] The use method of the present embodiment is as follows:

[0235] The first valve element 120 and the second valve element 230 are opened, and the liquid supply element 110 delivers liquid ammonia to the liquid storage element 210.

[0236] Subsequently, the worker can observe the liquid level of the liquid ammonia in the liquid storage element 210 in real time through the liquid level monitoring element 260, and in the case that the liquid level of the liquid storage element 210 reaches a preset height threshold, the first valve element 120 and the second valve element 230 are closed.

[0237] In addition, the worker can determine whether the gas pressure and temperature in the liquid storage element 210 meet the standard through the first pressure monitoring element 250 and the temperature monitoring element 270, so as to make timely adjustments.

[0238] The embodiment has the advantages that: by arranging the first pressure monitoring element, the worker can determine whether the gas pressure in the liquid storage element meets the standard, so that the worker can make timely adjustment; by arranging the liquid level monitoring element, the worker can observe the liquid level of the liquid ammonia in the liquid storage element in real time, so that the worker can conveniently deliver a certain amount of liquid ammonia to the liquid storage element; and by arranging the temperature monitoring element, the worker can monitor the temperature of the liquid storage element in real time, so that the worker can make timely adjustment.

[0239] Embodiment 3

[0240] The embodiment is a variant of the embodiments 1-2, and differs from the embodiments 1-2 in that the structure of the filling unit 400 is different.

[0241] As shown in Figure 10 the filling unit 400 further comprises at least one of a buffer element 440, at least one pressure boosting element 450 and a filter element 460. The buffer element 440 is arranged in the pipeline in communication with the liquid storage unit 200 and the filling element 410, and is used to buffer the ammonia gas transmitted by the liquid storage unit 200; the pressure boosting element 450 is arranged in the pipeline in communication with the liquid storage unit 200 and the filling element 410, and is used to increase the filling pressure; and the filter element 460 is arranged in the pipeline in communication with the liquid storage unit 200 and the filling element 410, and is used to filter the ammonia gas transmitted by the liquid storage unit 200.

[0242] Specifically, the buffer element 440 is arranged in the first filling pipeline and located between the third pressure monitoring element and the fourth pressure monitoring element and the fifth pressure monitoring element.

[0243] It should be noted that the buffer element 440 can buffer a large amount of liquid ammonia delivered by the liquid storage element 210, so that the process of delivering liquid ammonia by the pipeline is more secure.

[0244] In some embodiments, the buffer element 440 includes but is not limited to a BUFFER TUBE buffer pipeline.

[0245] In the case where the pressure boosting element 450 is a plurality of pressure boosting elements, the plurality of pressure boosting elements 450 are arranged in parallel. The plurality of pressure boosting elements 450 can be used alternately, that is, in the case where one of the pressure boosting elements 450 is damaged, other pressure boosting elements 450 can be used to ensure normal use of pressure boosting filling.

[0246] Specifically, the pressure boosting element 450 is arranged in the first filling pipeline and located between the buffer element 440 and the tank car and the steel cylinder. The pressure boosting element 450 can pressurize the liquid ammonia, so as to meet the demand for filling pressure.

[0247] In some embodiments, the pressure boosting element 450 includes but is not limited to a pressure boosting pump.

[0248] It should be noted that the number of pressurizing elements 450 is 2.

[0249] In addition, the number of pressurizing elements 450 can also be 3, 4, etc.

[0250] Specifically, the filtering element 460 is arranged on the first filling pipeline, and the filtering element 460 is located downstream of the pressurizing element 450. The filtering element 460 can perform final filtering on the pressurized liquid ammonia to remove impurities in the liquid ammonia, thereby improving the purity of the liquid ammonia.

[0251] In some embodiments, the filtering element 460 includes, but is not limited to, a FILTER filter.

[0252] Further, the filling unit 400 further comprises a fifteenth valve element 470. The fifteenth valve element 470 is arranged on the filling pipeline to control whether the liquid ammonia flows to the pressurizing element 450.

[0253] The number of fifteenth valve elements 470 matches the number of pressurizing elements 450. Generally, the number of fifteenth valve elements 470 is the same as the number of pressurizing elements 450.

[0254] It should be noted that the number of fifteenth valve elements 470 is 2. In addition, the number of fifteenth valve elements 470 can also be 3, 4, etc.

[0255] In some embodiments, the fifteenth valve element 470 includes, but is not limited to, a bellows valve and a one-way valve.

[0256] Specifically, the fifteenth valve element 470 includes an eighth manual bellows valve and a fourteenth one-way valve. The eighth manual bellows valve is arranged on the filling pipeline and located upstream of the pressurizing element 450; the fourteenth one-way valve is arranged on the filling pipeline and located downstream of the pressurizing element.

[0257] The use method of the present embodiment is as follows:

[0258] During the filling of the liquid ammonia, the filling element 410 is started, and the second valve element 230 and the sixth valve element 420 are opened, so that the liquid ammonia flows to the buffer element 440.

[0259] Subsequently, the fifteenth valve element 470 is opened, so that the liquid ammonia is subjected to pressurization treatment through the pressurizing element 450.

[0260] Then, the filtering element 460 is started, so that the liquid ammonia subjected to the pressurization treatment is filtered of internal impurities through the filtering element 460.

[0261] Finally, the filtered liquid ammonia is filled into the tank car or the steel cylinder.

[0262] The embodiment has the advantages that the buffer element is arranged to buffer the large-flow liquid ammonia, and safety is ensured; the pressurizing element is arranged to pressurize the liquid ammonia, so that the demand for filling pressure can be met; and the filter element is arranged to finally filter the pressurized liquid ammonia, so that impurities in the liquid ammonia can be removed, and the purity of the liquid ammonia can be improved.

[0263] Embodiment 4

[0264] The embodiment is a variant of the embodiments 1-3, and the difference between the embodiment and the embodiments 1-3 is that the structure of the pressure relief unit 600 is different.

[0265] As shown in Figure 11 The pressure relief unit 600 further includes a third pressure relief element 670. The third pressure relief element 670 is in communication with the filling unit 400, and is used for manually relieving pressure of the pipeline.

[0266] Specifically, the third pressure relief element 670 is in communication with the filling element 410.

[0267] Specifically, the third pressure relief element 670 includes a third pressure relief pipeline. The first end of the third pressure relief pipeline is in communication with the first filling pipeline, and the second end of the third pressure relief pipeline is in communication with the tail gas treatment tank.

[0268] It should be noted that when it is detected that the pressure in the tank and the pipeline is too high, but the automatic pressure relief has not been triggered, the pressure relief discharge can be artificially controlled to ensure production safety.

[0269] Further, the pressure relief unit 600 further includes a sixteenth valve element 680. The sixteenth valve element 680 is arranged in the third pressure relief pipeline, and is used for controlling the communication between the third pressure relief pipeline and the first filling pipeline.

[0270] In some embodiments, the sixteenth valve element 680 includes but is not limited to a diaphragm valve and a one-way valve.

[0271] Specifically, the sixteenth valve element 680 includes an eleventh pneumatic diaphragm valve and a fifteenth one-way valve. The eleventh pneumatic diaphragm valve is arranged in the third pressure relief pipeline; and the fifteenth one-way valve is arranged in the third pressure relief pipeline and is located upstream of the eleventh pneumatic diaphragm valve.

[0272] The use method of the embodiment is as follows:

[0273] When it is detected that the pressure in the tank and the pipeline is too high, but the automatic pressure relief has not been triggered, the sixteenth valve element 680 is opened, so that the third pressure relief pipeline is in communication with the filling pipeline, and the pressure relief discharge is actively performed by artificial control of the worker.

[0274] The embodiment has the advantages that the third pressure relief element and the sixteenth valve element are arranged, so that when it is detected that the pressure in the tank and the pipeline is too high but automatic pressure relief is not triggered, the pressure relief discharge is artificially controlled to be actively performed, and the production safety is ensured.

[0275] Embodiment 5

[0276] The embodiment relates to a liquid ammonia filling method of the application, and is applied to the liquid ammonia filling device as described in Embodiments 1 to 4.

[0277] In an illustrative embodiment of the application, a liquid ammonia filling method comprises the following steps.

[0278] (I) pipeline cleaning before filling

[0279] The system opens the first blowing element 710, the second blowing element 720, and the second valve element 230 to open the communication between the first blowing element 710 and the liquid storage element 210 and the communication between the second blowing element 720 and the filling pipeline, blow the gas in the liquid storage element 210 and the filling pipeline, and make the exhaust gas in the filling pipeline and the liquid storage element 210 be discharged to the exhaust gas treatment pool through the third pressure relief element 670.

[0280] The blowing gas fills the liquid storage element 210 and the filling pipeline, and the pressure in the liquid storage element 210 and the filling pipeline is kept at 1 Mpa for 24 hours.

[0281] After blowing for a period of time, the pressure is stabilized at 1 Mpa, the second valve element and the sixth valve element are closed, the pressure in the liquid storage element 210 and the filling pipeline is controlled at 1 Mpa, and the pressure is kept for 24 hours. After the pressure keeping is completed, the sixth valve element is opened, and N2 is discharged. The sixth valve element is closed, the first valve element is opened, and appropriate liquid ammonia is filled. The heating element is turned on, the third valve element is opened, so that the liquid ammonia is heated in the equipment and then transported back to the liquid storage element, the second pneumatic bellows valve is opened, and the residual N2 is discharged and replaced. After repeated replacement for several times, the valves are closed.

[0282] (II) supplying liquid ammonia

[0283] The system opens the first valve element 120 and the second valve element 230 to open the communication between the liquid supply element 110 and the liquid storage element 210, and make the liquid ammonia enter the liquid storage element 210.

[0284] (III) analyzing the ammonia gas composition

[0285] The system opens the analysis element 310, opens the second valve element 230 and the fourth valve element 320 to open the communication between the liquid storage element 210 and the analysis element 310, so that the ammonia gas in the liquid storage element 210 is transported into the analysis element 310, so that the analysis element 310 analyzes the composition of the ammonia gas and obtains an analysis result.

[0286] (IV) Liquid ammonia filling

[0287] When the analysis result meets the standard, the system starts the filling element 410, opens the second valve element 230 and the sixth valve element 420 to open the communication between the liquid storage element 210 and the buffer element 440, so that the liquid ammonia in the liquid storage element 210 can pass through the buffer element 440 to buffer a large amount of liquid ammonia;

[0288] The fifteenth valve element 470 is opened, so that the liquid ammonia can pass through the pressurizing element 450, and the pressurized liquid ammonia can flow to the filtering element 460 through the thirteenth one-way valve, so that the filtered liquid ammonia passing through the filtering element 460 can be filled into the tank car or the steel cylinder.

[0289] (V) Ammonia gas backflow to the primary condensing system

[0290] When the analysis result does not meet the standard and the analysis result is in the first preset result, the system starts the first backflow element 510, opens the second valve element 230, the sixth valve element 420, the seventh valve element 540 and the ninth valve element 560 to open the communication between the liquid storage element 210, the filling element 410 and the primary condensing system, so that the ammonia gas in the liquid storage element 210 and the filling pipeline can pass to the primary condensing system.

[0291] (VI) Ammonia gas backflow to the tertiary condensing system

[0292] When the analysis result does not meet the standard and the analysis result is in the second preset result, the system starts the second backflow element 520, opens the second valve element 230, the sixth valve element 420, the eighth valve element 550 and the ninth valve element 560 to open the communication between the liquid storage element 210, the filling element 410 and the tertiary condensing system, so that the ammonia gas in the liquid storage element 210 and the filling pipeline can pass to the tertiary condensing system.

[0293] (VII) Liquid ammonia backflow to the recovery tank

[0294] When the analysis result does not meet the standard and the analysis result does not meet the first preset result and the second preset result, the third backflow element 530 is started, and the second valve element 230, the sixth valve element 420 and the ninth valve element 560 are opened, so that the liquid ammonia in the liquid storage element 210 flows back to the recovery tank for reprocessing.

[0295] (VIII) Automatic pressure relief of the liquid storage unit 200

[0296] In case of overpressure in the liquid storage element 210, the first pressure sensing element is broken, and then the system opens the first pressure relief element and the second pressure relief element to open the communication between the liquid storage element 210 and the tail gas treatment tank, so that the ammonia gas in the liquid storage element 210 flows to the tail gas treatment tank through the tenth valve element 630.

[0297] (IX) Automatic pressure relief for the filling unit 400

[0298] In case of overpressure in the filling pipeline, the second pressure sensing element is broken, and then the system opens the third pressure relief element to open the eleventh valve element 640 to open the communication between the filling pipeline and the tail gas treatment tank, so that the ammonia gas in the filling pipeline flows to the tail gas treatment tank.

[0299] (X) Manual pressure relief for the device

[0300] In case of overpressure in the tank and the pipeline is detected, but the automatic pressure relief has not been triggered, the staff opens the twelfth valve element 730 to communicate the pipeline with the tail gas treatment tank, so that the ammonia gas in the pipeline can flow to the tail gas treatment tank.

[0301] More specifically, the liquid ammonia filling method of the present embodiment is as follows:

[0302] (I) Cleaning the pipeline before filling

[0303] The system opens the first purging element 710 to open the eighth pneumatic diaphragm valve and the first manual stop valve to open the communication between the first purging element 710 and the liquid storage element 210, to purge the gas in the liquid storage element 210 and make the exhaust gas in the liquid storage element 210 pass through the third pressure relief element 670 to the tail gas treatment tank;

[0304] The system opens the second purging element 720 to open the third manual diaphragm valve, the ninth pneumatic diaphragm valve, the tenth pneumatic diaphragm valve, and the eleventh pneumatic diaphragm valve to open the communication between the second purging element 720 and the filling pipeline, to purge the gas in the filling pipeline and make the exhaust gas in the filling pipeline pass through the third pressure relief element 670 to the tail gas treatment tank;

[0305] After waiting for a period of time, the pressure is stabilized at 1Mpa, the eighth pneumatic diaphragm valve, the first manual stop valve, the third manual diaphragm valve, the ninth pneumatic diaphragm valve, the tenth pneumatic diaphragm valve and the eleventh pneumatic diaphragm valve are closed, the pressure in the liquid storage element 210 and the filling pipeline is controlled at 1Mpa, and the pressure is maintained for 24 hours. After the pressure maintaining is completed, the eleventh pneumatic diaphragm valve is opened, and N2 is exhausted. The second pneumatic bellows valve is closed, the first pneumatic bellows valve and the first manual bellows valve are opened, and an appropriate amount of liquid ammonia is filled. The heating element is turned on, the first ball valve and the second ball valve are opened, so that the liquid ammonia is heated after passing through the equipment and then transported back to the liquid storage element. The second pneumatic bellows valve is opened, and the residual N2 is replaced. After repeated replacement for several times, the valves are closed.

[0306] (2) Supplying liquid ammonia

[0307] The system opens the first pneumatic bellows valve, the first check valve and the first manual bellows valve to open the communication between the liquid supply element 110 and the liquid storage element 210, and to make the liquid ammonia enter the liquid storage element 210.

[0308] (3) Analyzing the composition of ammonia gas

[0309] The system opens the analysis element 310, and opens the first manual stop valve, the third pneumatic diaphragm valve and the second check valve to open the communication between the liquid storage element 210 and the analysis element 310, so that the ammonia gas in the liquid storage element 210 is transported into the analysis element 310, and the analysis element 310 analyzes the composition of the ammonia gas and obtains the analysis result.

[0310] (4) Liquid ammonia filling

[0311] When the analysis result meets the standard, the system starts the filling element 410, and opens the second manual bellows valve, the third manual bellows valve, the fourth manual bellows valve, the second pneumatic bellows valve and the fourth check valve to open the communication between the liquid storage element 210 and the buffer element 440, so that the liquid ammonia in the liquid storage element 210 can pass through the buffer element 440 to buffer a large amount of liquid ammonia.

[0312] The eighth manual bellows valve is opened, so that the liquid ammonia can pass through the pressure boosting element 450, and the pressurized liquid ammonia can flow to the filtering element 460 through the thirteenth check valve.

[0313] The fifth manual bellows valve is opened to open the communication between the filtering element 460 and the tank car, so that the liquid ammonia filtered by the filtering element 460 can be filled into the tank car.

[0314] The sixth manual bellows valve is opened to open the communication between the filtering element 460 and the steel cylinder, so that the liquid ammonia filtered by the filtering element 460 can be filled into the steel cylinder.

[0315] (5) Ammonia backflow to the first condensing system

[0316] When the analysis result does not meet the standard and the analysis result is in the first preset result, the system starts the first backflow element 510, opens the first manual stop valve, the first pneumatic stop valve, and the fifth one-way valve to open the communication between the liquid storage element 210 and the first condensing system, so that the ammonia gas in the liquid storage element 210 can flow to the first condensing system through the fifth one-way valve.

[0317] The second manual bellows valve, the third manual bellows valve, the fourth manual bellows valve, the second pneumatic bellows valve, the third one-way valve, the fourth pneumatic diaphragm valve, the third one-way valve, the sixth pneumatic diaphragm valve, and the seventh one-way valve are opened to open the communication between the filling element 410 and the first condensing system, so that the ammonia gas in the filling element 410 can flow to the first condensing system through the seventh one-way valve.

[0318] (6) Ammonia backflow to the third condensing system

[0319] When the analysis result does not meet the standard and the analysis result is in the second preset result, the system starts the second backflow element 520, opens the first manual diaphragm valve, the fifth pneumatic diaphragm valve, and the sixth one-way valve to open the communication between the liquid storage element 210 and the third condensing system, so that the ammonia gas in the liquid storage element 210 can flow to the third condensing system through the sixth one-way valve.

[0320] The second manual bellows valve, the third manual bellows valve, the fourth manual bellows valve, the second pneumatic bellows valve, the third one-way valve, the seventh pneumatic diaphragm valve, and the eighth one-way valve are opened to open the communication between the filling element 410 and the third condensing system, so that the ammonia gas in the filling element 410 can flow to the third condensing system through the eighth one-way valve.

[0321] (7) Liquid ammonia backflow to the recovery tank

[0322] When the analysis result does not meet the standard and the analysis result does not meet the first preset result and the second preset result, the third backflow element 530 is started, and the second manual bellows valve, the third manual bellows valve, the fourth manual bellows valve, the second pneumatic bellows valve, the fourth one-way valve, the seventh manual bellows valve, and the ninth one-way valve are opened, so that the liquid ammonia in the liquid storage element 210 flows back to the recovery tank for reprocessing.

[0323] (8) Automatic pressure relief of the liquid storage unit 200

[0324] When the pressure in the liquid storage element 210 is too high, the first pressure sensing element is broken, and then the system opens the first pressure relief element and the second pressure relief element to open the communication between the liquid storage element 210 and the tail gas treatment tank, so that the ammonia gas in the liquid storage element 210 flows to the tail gas treatment tank through the tenth one-way valve.

[0325] (9) Automatic pressure relief of the filling unit 400

[0326] In the case of excessive pressure in the filling line, the second pressure sensing element is broken, and then the third pressure relief element, the third manual diaphragm valve, is opened to open the communication between the filling line and the tail gas treatment tank, so that the ammonia gas in the filling line flows to the tail gas treatment tank through the eleventh one-way valve.

[0327] (10) Manual pressure relief of the device

[0328] In the case of detecting excessive pressure in the tank and the line, but not triggering automatic pressure relief, the staff opens the eleventh pneumatic diaphragm valve to communicate the line with the tail gas treatment tank, so that the ammonia gas in the line can flow to the tail gas treatment tank through the fifteenth one-way valve.

[0329] Embodiment 6

[0330] This embodiment relates to the semiconductor process system of the present application.

[0331] In one illustrative embodiment of the present application, a semiconductor process system comprises the liquid ammonia filling device according to any one of embodiments 1-4.

[0332] Further, the semiconductor process system further comprises a plurality of process chambers, and the plurality of process chambers are respectively in communication with the liquid ammonia filling device.

[0333] Specifically, the plurality of process chambers are respectively in communication with the reflux unit 500.

[0334] Further, the plurality of process chambers are respectively in communication with the purge unit 700.

[0335] Embodiment 7

[0336] This embodiment is a specific embodiment of the present application, corresponding to embodiments 1-4.

[0337] As shown in Figure 12 , a liquid ammonia filling system comprises a liquid supply module, a liquid storage module, an analysis module, a filling module, a reflux module, a pressure relief module and a purge module.

[0338] Among them, the liquid supply module comprises a PURIFICATION ZONE, a pneumatic bellows valve ABV1, and a one-way valve CV1.

[0339] The storage module includes NH3 PRODUCT TANK A, a manual bellows valve BEV1, a manual stop valve GV1, a manual stop valve GV2, a manual stop valve GV3, a manual stop valve GV7, a manual diaphragm valve DV1, a manual diaphragm valve DV2, a manual diaphragm valve DV11, a pressure gauge PG1, a pressure gauge PG2, a temperature sensor PT1, and a liquid level meter TGA.

[0340] The storage module also includes NH3 PRODUCT TANK B, a manual bellows valve BEV9, a manual stop valve GV4, a manual stop valve GV5, a manual stop valve GV6, a manual stop valve GV8, a manual diaphragm valve DV9, a manual diaphragm valve DV10, a manual diaphragm valve DV12, a pressure gauge PG13, a pressure gauge PG14, a temperature sensor PT6, and a liquid level meter TGB.

[0341] It should be noted that NH3 PRODUCT TANK A and NH3 PRODUCT TANK B are the same in structure, i.e., the number of valve bodies arranged thereon. They are also the same in type.

[0342] The analysis module includes an ANALYSIS ROOM, a pneumatic diaphragm valve ADV6, a check valve CV16, a pneumatic diaphragm valve ADV8, a check valve CV19, a pneumatic diaphragm valve ADV9, and a check valve CV20.

[0343] The filling module includes a pneumatic bellows valve ABV2, a check valve CV3, a pneumatic bellows valve ABV5, a check valve CV13, a buffer tube BUFFER TUBE, a manual bellows valve BEV5, a booster pump NH3 PUMP A, a check valve CV4, a manual bellows valve BEV13, a booster pump NH3 PUMP B, a check valve CV24, a filter FILTER, a manual bellows valve BEV7, a manual bellows valve BEV8, a manual diaphragm valve DV5, a manual diaphragm valve DV6, a pressure gauge PG7, a pressure gauge PG8, a temperature sensor PT4, and a temperature sensor PT5.

[0344] The reflux module includes a pneumatic diaphragm valve ADV5, a check valve CV14, a pneumatic stop valve AGV1, a check valve CV15, a pneumatic diaphragm valve ADV7, a check valve CV17, a pneumatic stop valve AGV2, a check valve CV18, a pneumatic diaphragm valve ADV11, a check valve CV22, a pneumatic diaphragm valve ADV10, and a check valve CV21.

[0345] The pressure relief module includes rupture disc PRD1, pressure gauge PG9, pressure relief valve SV1, pressure relief valve SV2, check valve CV7, rupture disc PRD4, pressure gauge PG12, pressure relief valve SV3, pressure relief valve SV4, check valve CV11, manual diaphragm valve DV8, rupture disc PRD3, pressure gauge PG11, pressure relief valve SV6, check valve CV9, pneumatic diaphragm valve ADV12, check valve CV23, manual diaphragm valve DV7, rupture disc PRD2, pressure gauge PG10, pressure relief valve SV5, check valve CV8.

[0346] The purge module includes 1ST REBOILER ZONE, pneumatic diaphragm valve ADV1, pressure gauge PG3, check valve CV2, pneumatic diaphragm valve ADV4, pressure gauge PG15, check valve CV12, PURIFICATION ZONE, pneumatic diaphragm valve ADV3, pressure gauge PG5, check valve CV5, pneumatic diaphragm valve ADV2.

[0347] The use method of the embodiment is as follows:

[0348] (1) Cleaning pipeline before filling

[0349] The system opens 1ST REBOILER ZONE, opens ADV1, ADV12, purges the gas in the liquid storage element 210 and makes the waste gas in the liquid storage element 210 pass through ABV2, CV3, BUFFER TUBE, ABV3, ADV12, CV23 to the tail gas treatment tank;

[0350] The system pneumatically purifies PURIFICATION ZONE, opens ADV3, ADV2, ADV12, purges the gas in the filling pipeline and makes the waste gas in the filling pipeline pass through ADV12, CV23 to the tail gas treatment tank.

[0351] After purging for a period of time, the pressure is stabilized at 1Mpa, ADV1, ADV2, ADV3, ADV12 are closed, the pressure in the liquid storage element 210 and the filling pipeline is controlled at 1Mpa, and the pressure is maintained for 24h. After the pressure maintaining is completed, ADV12 is opened, N2 is exhausted. ABV5 is closed, ABV1, BEV1 are opened, an appropriate amount of liquid ammonia is filled, H.W GENERATOR is started, BV2, BV1 are opened, so that the liquid ammonia is heated after passing through the equipment and then transported back to NH3 PRODUCT TANK A, ABV5 is opened, and the exhaust is performed to replace the residual N2. After repeated replacement for several times, the valves are closed.

[0352] (2) Supplying liquid ammonia

[0353] The system opens ABV1, BEV1, so that the liquid ammonia enters NH3 PRODUCT TANK A.

[0354] (3) Analysis of ammonia composition

[0355] The system opens ANALYSIS ROOM, opens GV7, ADV6, so that the ammonia in NH3 PRODUCT TANK A is transported to ANALYSIS ROOM, so that ANALYSIS ROOM analyzes the composition of the ammonia and obtains an analysis result.

[0356] (4) Ammonia backflow to the first-stage condensing system

[0357] When the analysis result does not meet the standard and the analysis result is in the first preset result, the system opens H.WGENERATOR, opens BV2, BV1, so that the liquid ammonia is transported back to NH3 PRODUCT TANK A after being heated by the equipment.

[0358] The system opens GV7, AGV1, so that the ammonia in NH3 PRODUCT TANK A can flow to the first-stage condensing system through CV15.

[0359] (5) Ammonia backflow to the third-stage condensing system

[0360] When the analysis result does not meet the standard and the analysis result is in the second preset result, the system opens H.WGENERATOR, opens BV2, BV1, so that the liquid ammonia is transported back to NH3 PRODUCT TANK A after being heated by the equipment.

[0361] The system opens DV11, ADV5, so that the ammonia in NH3 PRODUCT TANK A can flow to the third-stage condensing system through CV14.

[0362] (6) Liquid ammonia backflow to the recovery tank

[0363] When the analysis result does not meet the standard and the analysis result does not meet the first preset result or the second preset result, the system opens BEV2, BEV3, BEV4, DV2, ABV2, BEV5, BEV6, so that the liquid ammonia in NH3 PRODUCT TANK A backflows to the recovery tank for reprocessing.

[0364] (7) Liquid ammonia filling

[0365] When the analysis result meets the standard, the system opens BEV2, BEV3, BEV4, DV2, ABV2, so that the liquid ammonia can pass through the BUFFER TUBE and play a buffering role for a large amount of liquid ammonia.

[0366] (8) Analysis of ammonia composition

[0367] System opens ANALYSIS ROOM, opens ADV9, so that the ammonia gas in the filling pipeline is transported to the ANALYSIS ROOM, so that the ANALYSIS ROOM analyzes the composition of the ammonia gas and obtains the analysis result.

[0368] (9) Ammonia gas backflow to the first-stage condensing system

[0369] When the analysis result does not meet the standard and the analysis result is in the first preset result, ADV9 and ADV10 are opened, so that the ammonia gas in the filling pipeline can flow to the first-stage condensing system through CV22.

[0370] (10) Ammonia gas backflow to the third-stage condensing system

[0371] When the analysis result does not meet the standard and the analysis result is in the second preset result, ADV11 is opened, so that the ammonia gas in the filling pipeline can flow to the third-stage condensing system through CV21.

[0372] (11) Liquid ammonia backflow to the recovery tank

[0373] When the analysis result does not meet the standard and the analysis result does not meet the first preset result and the second preset result, BEV2, BEV3, BEV4, DV2, ABV2, BEV5, and BEV6 are opened, so that the liquid ammonia in the filling pipeline backflows to the recovery tank for reprocessing.

[0374] (12) Liquid ammonia filling

[0375] When the analysis result meets the standard, BEV5 is opened, so that the liquid ammonia can flow to the filter element 460 through NH3 PUMP A and the pressurized liquid ammonia can flow to the filter element 460 through CV4.

[0376] BEV7 is opened, so that the liquid ammonia filtered through the FILTER can be filled into the tank truck.

[0377] BEV8 is opened, so that the liquid ammonia filtered through the FILTER can be filled into the steel cylinder.

[0378] (13) Automatic pressure relief of the liquid storage unit 200

[0379] When the pressure in the liquid storage element 210 is too high, PRD1 is broken, SV1 and SV2 are opened, so that the ammonia gas in the NH3 PRODUCT TANK A flows to the tail gas treatment tank through CV7.

[0380] (14) Automatic pressure relief of the filling unit 400

[0381] In case of overpressure in the filling line, PRD3 is broken, and the system opens DV8, SV6 to open the communication between the filling line and the exhaust gas treatment tank, so that the ammonia gas in the filling line flows to the exhaust gas treatment tank through CV9.

[0382] (15) Manual pressure relief of the device

[0383] In case of overpressure in the tank and the line, but before the automatic pressure relief is triggered, the staff opens ADV12 to open the communication between the line and the exhaust gas treatment tank, so that the ammonia gas in the line flows to the exhaust gas treatment tank through CV23.

[0384] The technical features of the above embodiments can be combined in any manner. For brevity, not all possible combinations of the technical features in the above embodiments are described, but as long as the combinations of the technical features do not contradict each other, they should be considered within the scope of the present disclosure.

[0385] The above embodiments only express several implementation manners of the present application, and the description is relatively specific and detailed, but it should not be understood as a limitation on the scope of the patent. It should be pointed out that for those skilled in the art, without departing from the concept of the present application, a number of modifications and improvements can be made, which are all within the protection scope of the present application. Therefore, the protection scope of the patent of the present application should be subject to the appended claims.

Claims

1. A liquid ammonia filling device, characterized in that, include: The liquid supply unit is used to input liquid ammonia; The liquid storage unit is connected to the liquid supply unit and is used to store liquid ammonia and vaporize liquid ammonia to obtain ammonia gas. The analysis unit is connected to the liquid storage unit and the filling unit, and is used to analyze whether the composition of ammonia gas meets the standards. A filling unit includes at least one filling element, a buffer element, at least one pressurizing element, and a filter element. The filling element is connected to a storage unit, an analysis unit, and a reflux unit, respectively, and is used to fill liquid ammonia into tank trucks and / or cylinders when the ammonia composition meets the standards, and to transport ammonia and liquid ammonia to the reflux unit when the ammonia composition does not meet the standards. The buffer element is installed in the pipeline connected to the storage unit and the filling element to buffer the ammonia transmitted by the storage unit. The pressurizing element is installed in the pipeline connected to the storage unit and the filling element to increase the filling pressure. The filter element is installed in the pipeline connected to the storage unit and the filling element to filter the liquid ammonia transmitted by the storage unit. The reflux unit includes a first reflux element, a second reflux element, and a third reflux element; the first reflux element is connected to the liquid storage unit and is used to reflux ammonia to the primary condensation system when the composition of ammonia does not meet the standard. The second reflux element is connected to the liquid storage unit and is used to reflux ammonia to the tertiary condensation system when the composition of ammonia does not meet the standard; the third reflux element is connected to the filling unit and is used to send liquid ammonia to the recovery tank, the primary condensation system, and the tertiary condensation system. The pressure relief unit is connected to the liquid storage unit and the filling unit, and is used to relieve pressure on the liquid storage unit, the filling unit and the pipeline; The purging unit is connected to the liquid storage unit and the filling unit, and is used to purge impurities in the liquid storage unit, the filling unit and the pipeline.

2. The liquid ammonia filling device according to claim 1, characterized in that, The liquid supply unit includes: A liquid supply element, connected to a liquid storage unit, is used to supply liquid ammonia to the liquid storage unit; and / or The liquid storage unit includes: At least one liquid storage element is connected to a liquid supply unit, an analysis unit, a filling unit, a reflux unit, a pressure relief unit, and a purging unit, respectively, for storing liquid ammonia, analyzing ammonia, delivering liquid ammonia to the filling unit when the composition of ammonia meets the standard, and delivering liquid ammonia and ammonia to the reflux unit when the composition of ammonia does not meet the standard. At least one heating element, connected to a corresponding liquid storage element, is used to obtain liquid ammonia, vaporize liquid ammonia to obtain ammonia gas; and / or The analysis unit includes: The analytical element, connected to both the storage unit and the filling unit, is used for component analysis of ammonia gas; and / or The pressure relief unit includes: The first pressure relief element is connected to the liquid storage unit and is used to automatically relieve pressure on the liquid storage unit and pipeline. A second pressure relief element, connected to the filling unit, is used for automatic pressure relief of the filling unit and pipelines; and / or The purging unit includes: The first purging element is connected to the liquid storage unit and is used to purge the liquid storage unit and pipelines. The second purging element is connected to the filling unit and is used to purge the filling unit and pipelines.

3. The liquid ammonia filling device according to claim 2, characterized in that, The liquid storage unit also includes: The first pressure monitoring element is connected to the liquid storage element and is used to monitor the pressure of the liquid storage element.

4. The liquid ammonia filling device according to claim 2 or 3, characterized in that, The liquid storage unit also includes: A liquid level monitoring element, disposed inside a liquid storage element, is used to monitor the liquid level height within the liquid storage element; and / or A temperature monitoring element is installed inside the liquid storage element to monitor the temperature of the liquid storage element.

5. The liquid ammonia filling device according to claim 2, characterized in that, The filling unit also includes: The second pressure monitoring element is installed on the pipeline connected to the filling element and is used to monitor the pressure in the pipeline.

6. The liquid ammonia filling device according to claim 2, characterized in that, The pressure relief unit also includes: The third pressure monitoring element is installed on the pipeline connecting the first pressure relief element and the liquid storage unit, and is used to detect the pressure in the pipeline. The fourth pressure monitoring element is installed on the pipeline connecting the second pressure relief element and the filling unit, and is used to detect the pressure in the pipeline.

7. The liquid ammonia filling device according to claim 2 or 5, characterized in that, The pressure relief unit also includes: The third pressure relief element is connected to the filling unit and is used to manually relieve pressure in the pipeline.

8. A method for filling liquid ammonia, characterized in that, Applied to the liquid ammonia filling device as described in any one of claims 1 to 7.

9. A semiconductor process system, characterized in that, include: The liquid ammonia filling device as described in any one of claims 1 to 7.

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