Automatic access integrated cabinet for wafer storage box storage

Abstract

The application discloses a kind of wafer storage box warehouse storage uses automatic access integrated cabinet, including cabinet, feeding mechanism, handling mechanism and nitrogen supply mechanism, the feeding mechanism is set to the front of cabinet, the feeding mechanism includes feed tank, the feed tank one end is fixedly connected with cabinet, a cavity and second cavity are set in the feed tank inside, the first cavity is set to the upper side of second cavity, the first cavity one side is connected with the inside of cabinet, a first conveyor is installed in the first cavity, the second conveyor is installed in the inside of cabinet, and the second conveyor one end extends to the inside of first cavity.The application is cooperated by feeding mechanism and handling mechanism, and it is convenient to automatically access wafer material box in the closed cabinet, the feeding mechanism is provided with sealing plate and vacuum pump, it is convenient to close the cavity and separate air, air can be avoided to enter the inside of cabinet, and it is favorable to improve the protection of wafer.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of wafer storage, in particular to a wafer storage box storage automatic access integrated cabinet. BACKGROUND

[0002] Wafer refers to a silicon wafer used to make silicon semiconductor circuits, and its raw material is silicon. High-purity polysilicon is dissolved and added to a silicon crystal seed, and then slowly pulled out to form a cylindrical single crystal silicon. After the silicon rod is ground, polished and sliced, a silicon wafer, i.e. a wafer, is formed. As a core component of semiconductor industry production, the air quality, temperature and humidity conditions, and operating environment of the manufacturing process of the wafer will have an important influence on the quality and performance of the wafer. Among them, oxygen, moisture, dust and other impurities in the air will affect the precision, electrical performance and sensitivity of the wafer. In order to solve these problems, the semiconductor industry has adopted a series of measures, one of which is to use a nitrogen cabinet. The nitrogen cabinet is a device specially used for storing wafers, which fills high-purity nitrogen into the storage cabinet to reduce the oxygen content, humidity and dust concentration of air pollutants, so as to protect the quality and performance of the wafer.

[0003] Some existing wafer storage cabinets have an open main support structure when in use, which cannot isolate the wafer box from the outside air, and moisture and impurities in the air can easily contaminate the wafer.

[0004] For example, the storage cabinet suitable for automatic access of wafer storage box disclosed in the announcement No. CN216784490U can simultaneously store multiple wafer storage boxes, is fixed and stable, and is convenient to take and place. Through the setting of the information acquisition area and the information display screen, the conditions of each layer of the storage cabinet can be directly observed, and the automation degree is high.

[0005] However, the storage cabinet suitable for automatic access of wafer storage box provided by the patent is an open cabinet body, which cannot isolate the wafer box from the outside air, and moisture and impurities in the air can easily contaminate the wafer.

[0006] Therefore, it is necessary to invent a wafer storage box storage automatic access integrated cabinet to solve the above problems. SUMMARY

[0007] The purpose of the present application is to provide a wafer storage box storage automatic access integrated cabinet to solve the problem that some existing wafer storage cabinets have an open main support structure when in use, which cannot isolate the wafer box from the outside air, and moisture and impurities in the air can easily contaminate the wafer.

[0008] In order to achieve the above object, the present application provides the following technical scheme: a wafer storage box warehouse automatic access integrated cabinet, including cabinet, feeding mechanism, carrying mechanism and nitrogen supply mechanism, the feeding mechanism is arranged on the front of the cabinet, the feeding mechanism includes a feeding box, one end of the feeding box is fixedly connected with the cabinet, a first cavity and a second cavity are formed in the feeding box, the first cavity is arranged above the second cavity, one side of the first cavity is communicated with the inside of the cabinet, a first conveyor is installed in the first cavity, a second conveyor is installed in the cabinet, one end of the second conveyor extends into the first cavity, one end of the first conveyor is matched with one end of the second conveyor, a gap is arranged between the first conveyor and the second conveyor, a lifting groove is formed between the first cavity and the second cavity, a blocking plate is slidably connected in the lifting groove, and the blocking plate is arranged between the first conveyor and the second conveyor.

[0009] The carrying mechanism includes an X-axis linear module, a Y-axis linear module and a telescopic fork, the X-axis linear module is fixedly installed on the inner bottom surface of the cabinet, a first slide plate is drivingly connected to the surface of the X-axis linear module, the Y-axis linear module is fixedly installed on the top of the first slide plate, a second slide plate is drivingly connected to the surface of the Y-axis linear module, a lifting frame is fixedly installed on one side of the second slide plate, the telescopic fork is fixedly installed on the top of the lifting frame, an electric push rod is fixedly installed in the middle of the bottom plate of the telescopic fork, a third conveyor is fixedly installed on the top of the electric push rod, one end of the third conveyor is matched with the other end of the second conveyor, and a gap is arranged between the third conveyor and the second conveyor.

[0010] Through the cooperation of the feeding mechanism and the carrying mechanism, the wafer box can be automatically stored and taken in the closed cabinet.

[0011] Preferably, an opening slot is formed in the top of the feeding box, the opening slot is communicated with the inside of the first cavity, and the opening slot is arranged above the first conveyor.

[0012] The wafer box is placed on the first conveyor in the first cavity through the opening slot, and the wafer box can be conveyed to the second conveyor through the first conveyor.

[0013] Preferably, a magnetic cover plate is installed on the top of the feeding box, and the magnetic cover plate is fixed on the top of the opening slot by magnetic attraction.

[0014] The opening slot can be conveniently opened and closed by the magnetic cover plate.

[0015] Preferably, a driving motor and a vacuum pump are installed in the second cavity, a ball screw is drivingly connected to the top end of the output shaft of the driving motor, and the ball screw penetrates through the blocking plate and is drivingly connected with the blocking plate.

[0016] The driving motor drives the ball screw to rotate, so as to drive the sealing plate to lift, and the sealing plate can be used for opening and closing control of the first chamber.

[0017] Preferably, the vacuum pump input end is fixedly connected with a suction pipe, one end of the suction pipe extends to the inside of the first chamber, the vacuum pump output end is fixedly connected with an exhaust pipe, and one end of the exhaust pipe extends to the outside of the feed tank.

[0018] The vacuum pump, the suction pipe and the exhaust pipe facilitate the air in the first chamber to be extracted.

[0019] Preferably, the cabinet inner wall is fixedly connected with a group of storage shelves on both sides, the conveying mechanism is arranged between the two groups of storage shelves, the number of each group of storage shelves is multiple, the multiple storage shelves are arranged in a straight line, and a strip-shaped groove is formed in the surface of the storage shelf and matched with the telescopic fork.

[0020] The storage shelf is used for placing a wafer box, and the telescopic fork can move up and down in the strip-shaped groove.

[0021] Preferably, the nitrogen supply mechanism comprises a nitrogen generator, the nitrogen generator is fixedly installed at one end of the cabinet, and a three-way pipe is fixedly installed at the output end of the nitrogen generator.

[0022] The nitrogen generator and the three-way pipe facilitate the injection of nitrogen into the cabinet and the first chamber.

[0023] Preferably, the two output ends of the three-way pipe are provided with electromagnetic valves, one output end of the three-way pipe extends to the inside of the cabinet, and the other output end of the three-way pipe extends to the inside of the first chamber.

[0024] The electromagnetic valves facilitate the opening and closing control of the two output ends of the three-way pipe.

[0025] Preferably, the cabinet front face is provided with a control cabinet, and the first conveyor, the second conveyor, the third conveyor, the X-axis linear module, the Y-axis linear module, the telescopic fork, the electric push rod, the driving motor, the vacuum pump, the nitrogen generator and the electromagnetic valve are electrically connected with the control cabinet.

[0026] Preferably, a nitrogen concentration detector is fixedly installed on the bottom surface of the cabinet, and the nitrogen concentration detector is electrically connected with the control cabinet.

[0027] The nitrogen concentration detector is used for real-time monitoring of the nitrogen concentration in the cabinet, when the nitrogen concentration is lower than the set value, the nitrogen generator is controlled to work by the control cabinet, and the electromagnetic valve of one end of the three-way pipe leading to the cabinet is opened, so as to supplement the nitrogen in the cabinet.

[0028] In the above technical solutions, the present application provides technical effects and advantages:

[0029] 1. Through the cooperation of the feeding mechanism and the carrying mechanism, the wafer box can be automatically stored and taken in the closed cabinet body, the feeding mechanism is provided with a blocking plate and a vacuum pump, the chamber can be closed and the air can be extracted, the outside air can be prevented from entering the cabinet body, and the protection of the wafer can be improved;

[0030] 2. By arranging the nitrogen supply mechanism, on the one hand, nitrogen can be introduced into the chamber when the wafer box is stored, so that the nitrogen concentration in the feeding tank and the cabinet body is consistent, and the nitrogen in the cabinet body is prevented from being diluted, on the other hand, nitrogen can be supplied to the cabinet body when the nitrogen in the cabinet body is diffused, so that the nitrogen concentration in the cabinet body is maintained within a certain range, so as to provide a stable storage environment for the wafer. BRIEF DESCRIPTION OF DRAWINGS

[0031] Figure 1 It is a schematic diagram of the overall structure of the present application;

[0032] Figure 2 It is a schematic diagram of the structure of the cabinet body after being cut at one end;

[0033] Figure 3 It is a schematic diagram of the structure of the cabinet body after being cut at one end;

[0034] Figure 4 It is a schematic diagram of the local structure of the present application;

[0035] Figure 5 It is an enlarged view of the A part structure in the present application; Figure 4

[0036] Figure 6 It is a schematic diagram of the structure of the feeding mechanism and the carrying mechanism of the present application;

[0037] Figure 7 It is an enlarged view of the B part structure in the present application; Figure 6

[0038] Figure 8 It is a schematic diagram of the structure of the carrying mechanism when the wafer storage box is carried to the storage rack;

[0039] Figure 9 It is an enlarged view of the C part structure in the present application; Figure 8

[0040] Figure 10 It is a schematic diagram of the structure of the telescopic fork, the third conveyor and the electric push rod.

[0041] Explanation of reference signs:

[0042] ​​​1, cabinet; 2, feed box; 3, No. 1 conveyor; 4, No. 2 conveyor; 5, sealing plate; 6, X-axis linear module; 7, Y-axis linear module; 8, telescopic fork; 9, lifting frame; 10, electric push rod; 11, No. 3 conveyor; 12, magnetic cover plate; 13, drive motor; 14, vacuum pump; 15, ball screw; 16, suction pipe; 17, exhaust pipe; 18, storage rack; 19, nitrogen generator; 20, three-way pipe; 21, control cabinet; 22, nitrogen concentration detector. DETAILED DESCRIPTION

[0043] In order for those skilled in the art to better understand the technical solutions of the present application, the present application will be further described in detail below with reference to the drawings.

[0044] The present application provides an automatic storage and retrieval integrated cabinet for wafer storage box warehouse, as shown in Figures 1-10 The present application provides an automatic storage and retrieval integrated cabinet for wafer storage box warehouse, as shown in The feeding mechanism is provided on the front of the cabinet 1, and the feeding mechanism includes a feed box 2, one end of which is fixedly connected with the cabinet 1, and a No. 1 cavity and a No. 2 cavity are formed in the feed box 2, the No. 1 cavity is arranged directly above the No. 2 cavity, one side of the No. 1 cavity is communicated with the inside of the cabinet 1, a No. 1 conveyor 3 is installed in the No. 1 cavity, a No. 2 conveyor 4 is installed in the inside of the cabinet 1, one end of the No. 2 conveyor 4 extends into the No. 1 cavity, one end of the No. 1 conveyor 3 is matched with one end of the No. 2 conveyor 4, a gap is arranged between the No. 1 conveyor 3 and the No. 2 conveyor 4, a lifting groove is formed between the No. 1 cavity and the No. 2 cavity, and a sealing plate 5 is slidably connected in the lifting groove and arranged between the No. 1 conveyor 3 and the No. 2 conveyor 4.

[0045] The conveying mechanism includes an X-axis linear module 6, a Y-axis linear module 7 and a telescopic fork 8, the X-axis linear module 6 is fixedly installed on the inner bottom surface of the cabinet 1, a No. 1 sliding plate is drivingly connected to the surface of the X-axis linear module 6, the Y-axis linear module 7 is fixedly installed on the top of the No. 1 sliding plate, a No. 2 sliding plate is drivingly connected to the surface of the Y-axis linear module 7, a lifting frame 9 is fixedly installed on one side of the No. 2 sliding plate, the telescopic fork 8 is fixedly installed on the top of the lifting frame 9, an electric push rod 10 is fixedly installed in the middle of the bottom plate of the telescopic fork 8, a No. 3 conveyor 11 is fixedly installed on the top of the electric push rod 10, one end of the No. 3 conveyor 11 is matched with the other end of the No. 2 conveyor 4, and a gap is arranged between the No. 3 conveyor 11 and the No. 2 conveyor 4.

[0046] In one aspect of the embodiment, the feeding box 2 is provided with an opening groove on the top, which is connected with the inside of the first chamber, and the opening groove is arranged directly above the first conveyor 3, and the feeding box 2 is provided with a magnetic cover plate 12 on the top, which is fixed on the top of the opening groove through magnetic adsorption, and the inside of the second chamber is provided with a driving motor 13 and a vacuum pump 14, the output shaft of the driving motor 13 is provided with a ball screw 15 at the top end, the ball screw 15 penetrates through the blocking plate 5 and is in transmission connection with the blocking plate 5, the input end of the vacuum pump 14 is fixedly connected with a suction pipe 16, one end of the suction pipe 16 extends into the first chamber, the output end of the vacuum pump 14 is fixedly connected with an exhaust pipe 17, one end of the exhaust pipe 17 extends to the outside of the feeding box 2, a group of storage shelves 18 are fixedly connected on the inner wall of the cabinet 1 on both sides, respectively, and the carrying mechanism is arranged between the two groups of storage shelves 18, the number of each group of storage shelves 18 is multiple, and a plurality of storage shelves 18 are arranged in a straight line array, a strip-shaped groove is formed on the surface of the storage shelf 18, and the strip-shaped groove is matched with the telescopic fork 8, the nitrogen supply mechanism comprises a nitrogen generator 19, the nitrogen generator 19 is fixedly installed on one end of the cabinet 1, a three-way pipe 20 is fixedly installed at the output end of the nitrogen generator 19, and the two output ends of the three-way pipe 20 are provided with electromagnetic valves, respectively, one output end of the three-way pipe 20 extends to the inside of the cabinet 1, and the other output end of the three-way pipe 20 extends to the inside of the first chamber, the front of the cabinet 1 is provided with a control cabinet 21, and the first conveyor 3, the second conveyor 4, the third conveyor 11, the X-axis linear module 6, the Y-axis linear module 7, the telescopic fork 8, the electric push rod 10, the driving motor 13, the vacuum pump 14, the nitrogen generator 19 and the electromagnetic valve are in electric connection with the control cabinet 21, and the nitrogen concentration detector 22 is fixedly installed on the inner bottom surface of the cabinet 1, and the nitrogen concentration detector 22 is in electric connection with the control cabinet 21.

[0047] The working principle of the application is as follows:

[0048] The drawings referred to in the specification are as follows: Figures 1-10In use of the application, firstly, the ball screw 15 is driven to rotate by the driving motor 13, the ball screw 15 drives the sealing plate 5 to move upwards along the lifting groove until the sealing plate 5 seals the first chamber, then the magnetic cover plate 12 is opened, the opening groove is opened, the wafer box is placed on the first conveyor 3 in the first chamber, in this process, external air is easy to enter the inside of the first chamber, then the magnetic cover plate 12 is closed, the vacuum pump 14 is started, the air in the first chamber is separated by the vacuum pump 14, the suction pipe 16 and the exhaust pipe 17, then the nitrogen generator 19 is started and the electromagnetic valve at one end of the three-way pipe 20 is opened, nitrogen is injected into the first chamber by the nitrogen generator 19 and the three-way pipe 20, then the ball screw 15 is driven to reverse rotation by the driving motor 13, the ball screw 15 drives the sealing plate 5 to move downwards along the lifting groove until the first chamber is reconnected with the inside of the cabinet 1, the wafer box is conveyed to the second conveyor 4 by the first conveyor 3, and the wafer box is sent into the cabinet 1 by the second conveyor 4, then the third conveyor 11 is lifted by the electric push rod 10, so that the third conveyor 11 is flush with the second conveyor 4, the wafer box is conveyed to the third conveyor 11 by the third conveyor 11, then the wafer box is transported to the center position by the third conveyor 11, then the third conveyor 11 is homed by the electric push rod 10, so that the telescopic fork 8 lifts the wafer box, the first slide plate drives the Y-axis linear module 7 to move horizontally by the X-axis linear module 6, the second slide plate drives the lifting frame 9 and the telescopic fork 8 to vertically lift by the Y-axis linear module 7, so as to drive the wafer box to move in multiple directions in the cabinet 1, the wafer box is sent to the side of the designated storage rack 18 by the carrying mechanism, at this time, the height of the telescopic fork 8 is slightly higher than that of the storage rack 18, the wafer box is driven to approach the storage rack 18 by the extension of the telescopic fork 8, then the telescopic fork 8 is controlled to move downwards by the Y-axis linear module 7, the telescopic fork 8 can pass through the strip-shaped groove on the surface of the storage rack 18 without being hindered, but the wafer box is retained on the storage rack 18, and the automatic storage of the wafer box is completed.

[0049] When the wafer box is extracted, the wafer box is carried to the third conveyor 11 by the carrying mechanism, then the wafer box is conveyed to the second conveyor 4 by the third conveyor 11, then the wafer box is conveyed to the first conveyor 3 by the second conveyor 4, then the first chamber is sealed by the sealing plate 5, finally the wafer box is taken out from the first chamber by opening the magnetic cover plate 12, and the automatic extraction of the wafer box is realized.

[0050] The above detailed description of the application is only a preferred embodiment of the application, and cannot be considered as limiting the scope of the application. Any equivalent changes and improvements made according to the scope of the application should still belong to the patent coverage of the application.

Claims

1. An automatic access integrated cabinet for wafer storage box storage, comprising a cabinet body (1), a feeding mechanism, a carrying mechanism and a nitrogen supply mechanism, characterized in that: The feeding mechanism is arranged on the front of the cabinet body (1), and the feeding mechanism comprises a feeding box (2), one end of the feeding box (2) is fixedly connected with the cabinet body (1), a first chamber and a second chamber are formed in the feeding box (2), the first chamber is arranged above the second chamber, one side of the first chamber is communicated with the inside of the cabinet body (1), a first conveyor (3) is arranged in the first chamber, a second conveyor (4) is arranged in the cabinet body (1), one end of the second conveyor (4) extends into the first chamber, one end of the first conveyor (3) is matched with one end of the second conveyor (4), a gap is arranged between the first conveyor (3) and the second conveyor (4), a lifting groove is formed between the first chamber and the second chamber, and a blocking plate (5) is slidably connected in the lifting groove and arranged between the first conveyor (3) and the second conveyor (4); The conveying mechanism comprises an X-axis linear module (6), a Y-axis linear module (7) and a telescopic fork (8), the X-axis linear module (6) is fixedly arranged on the inner bottom surface of the cabinet body (1), a first sliding plate is drivingly connected to the surface of the X-axis linear module (6), the Y-axis linear module (7) is fixedly arranged on the top of the first sliding plate, a second sliding plate is drivingly connected to the surface of the Y-axis linear module (7), a lifting frame (9) is fixedly arranged on one side of the second sliding plate, the telescopic fork (8) is fixedly arranged on the top of the lifting frame (9), an electric push rod (10) is fixedly arranged in the middle of the bottom plate of the telescopic fork (8), a third conveyor (11) is fixedly arranged on the top of the electric push rod (10), one end of the third conveyor (11) is matched with the other end of the second conveyor (4), and a gap is arranged between the third conveyor (11) and the second conveyor (4); An opening groove is formed in the top of the feeding box (2) and communicated with the inside of the first chamber, and the opening groove is arranged above the first conveyor (3); A magnetic cover plate (12) is arranged on the top of the feeding box (2) and fixedly arranged on the top of the opening groove by magnetic attraction; A driving motor (13) and a vacuum pump (14) are arranged in the second chamber, a ball screw (15) is drivingly connected to the top end of the output shaft of the driving motor (13), and the ball screw (15) penetrates through the blocking plate (5) and is drivingly connected with the blocking plate (5); The nitrogen supply mechanism comprises a nitrogen generator (19), the nitrogen generator (19) is fixedly arranged on one end of the cabinet body (1), and a three-way pipe (20) is fixedly arranged on the output end of the nitrogen generator (19); Electromagnetic valves are arranged on the two output ends of the three-way pipe (20), one output end of the three-way pipe (20) extends into the cabinet body (1), and the other output end of the three-way pipe (20) extends into the first chamber.

2. The automatic storage and access integrated cabinet for wafer storage box warehouse according to claim 1, characterized in that: The vacuum pump (14) input end is fixedly connected with a suction pipe (16), one end of the suction pipe (16) extends to the inside of the first chamber, the vacuum pump (14) output end is fixedly connected with an exhaust pipe (17), one end of the exhaust pipe (17) extends to the outside of the feed tank (2).

3. The automatic storage and access integrated cabinet for wafer storage box warehouse according to claim 1, characterized in that: The cabinet (1) is provided with a group of storage shelves (18) on the inner wall of both sides, the carrying mechanism is arranged between the two groups of storage shelves (18), the number of each group of storage shelves (18) is multiple, multiple storage shelves (18) are arranged in a straight line array, a strip-shaped groove is formed in the surface of the storage shelf (18), and the strip-shaped groove is matched with the telescopic fork (8).

4. The automatic storage and access integrated cabinet for wafer storage box warehouse according to claim 1, characterized in that: The front of the cabinet (1) is provided with a control cabinet (21), the first conveyor (3), the second conveyor (4), the third conveyor (11), the X-axis linear module (6), the Y-axis linear module (7), the telescopic fork (8), the electric push rod (10), the driving motor (13), the vacuum pump (14), the nitrogen generator (19) and the electromagnetic valve are electrically connected with the control cabinet (21).

5. The automatic storage and access integrated cabinet for wafer storage box warehouse according to claim 4, characterized in that: The inner bottom surface of the cabinet (1) is fixedly installed with a nitrogen concentration detector (22), and the nitrogen concentration detector (22) is electrically connected with the control cabinet (21).

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