Coating box and processing equipment

Abstract

The application belongs to the technical field of vacuum coating equipment, and discloses a coating box and a processing equipment. The coating box comprises a box body, a cavity door and a transmission mechanism. The upper end of the box body is provided with an opening, the cavity door covers the opening, the transmission mechanism comprises a fixed component and a movable component, the fixed component is arranged on the inner wall of the box body, the first end of the movable component is connected to the cavity door, and the second end of the movable component is slidably connected to the fixed component. The movable component can drive the cavity door to move linearly away from the box body and make the cavity door turn outward to open the box body. The coating box is beneficial to improving the sealing performance of the inside of the box body and can solve the problem of interference between the coating box and the internal structure when the coating box is opened and closed.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of vacuum coating equipment, in particular to a coating box and processing equipment. BACKGROUND

[0002] Chemical vapor deposition technology is widely used in many aspects such as protective film layer, microelectronic technology, solar energy utilization, optical fiber communication, superconducting technology and preparation of new materials.

[0003] The above process needs to be carried out by using a vacuum coating equipment. The vacuum coating equipment needs to use a vacuum chamber, such as a square vacuum chamber. The chamber door of the existing square vacuum chamber is basically directly opened and closed at 90°, which causes the chamber door and the hinge rotating the chamber door to be outside the chamber. If the chamber door sinks into the chamber, the existing hinge structure will cause the chamber door to interfere with the edge of the chamber. Since the chamber door does not sink into the chamber, the sealing performance is difficult to improve.

[0004] Therefore, there is an urgent need for a coating box and processing equipment to solve the above problems. SUMMARY

[0005] According to one aspect of the present application, the purpose is to provide a coating box.

[0006] Additional aspects and advantages of the present application will be in part apparent and in part pointed out hereinafter.

[0007] The coating box comprises a box body, a chamber door and a transmission mechanism. The upper end of the box body has an opening. The chamber door covers the opening. The transmission mechanism comprises a fixed component and a movable component. The fixed component is arranged on the inner wall of the box body. The first end of the movable component is connected to the chamber door. The second end of the movable component is slidingly connected to the fixed component. The movable component can drive the chamber door to move linearly away from the box body and make the chamber door turn outward to open the box. Through the above arrangement, the sealing performance of the coating box is improved, and the problem of interference between the coating box and the internal structure when opening and closing is solved.

[0008] As an optional solution of the coating box provided by the application, the fixing assembly is provided with a guide rail, the guide rail comprises a linear guide rail and an arc-shaped guide rail, the linear guide rail is arranged to extend towards the opening, the first end of the arc-shaped guide rail is communicated with the linear guide rail, and the second end of the arc-shaped guide rail is arranged to extend towards the opening; the movable assembly comprises a driven rod, a support frame and a first sliding block, one end of the support frame is fixedly connected to the cavity door, the other end of the support frame is rotatably connected to the end of the driven rod through the first sliding block, and the first sliding block is slidingly arranged in the guide rail; wherein the driven rod is used to drive the first sliding block to slide from the linear guide rail to the arc-shaped guide rail, so that the cavity door is turned outwards after moving away from the opening, and the driven rod is used to drive the first sliding block to slide from the arc-shaped guide rail to the linear guide rail, so that the cavity door is turned inwards after moving close to the opening. Through the above arrangement, the cavity door can be smoothly opened towards the direction away from the opening.

[0009] As an optional solution of the coating box provided by the application, the linear guide rail comprises a first linear part away from the opening and a second linear part close to the opening, and the first linear part and the second linear part are connected at the first end of the arc-shaped guide rail; the movable assembly further comprises a second sliding block, the second sliding block is arranged at intervals with the first sliding block, and the second sliding block is slidingly arranged in the second linear part; the first sliding block is slidingly arranged in the first linear part and the arc-shaped guide rail; wherein the driven rod is used to drive the first sliding block to make linear reciprocating motion along the first linear part, and drive the second sliding block to make linear reciprocating motion in the same direction along the second linear part, so that the cavity door moves away from or close to the opening; the driven rod is used to drive the first sliding block to reciprocate between the first end of the arc-shaped guide rail and the second end of the arc-shaped guide rail, so that the cavity door is turned outwards or inwards. Through the above arrangement, the cavity door can be smoothly opened and closed.

[0010] As an optional solution of the coating box provided by the application, the movable assembly further comprises a driving rod; one end of the driving rod is located on the side of the arc-shaped guide rail away from the opening and is used to rotate under the driving action of an external driving assembly; the other end of the driving rod is rotatably connected to the end of the driven rod not connected with the support frame; wherein the driving rod is used to rotate under the driving action, so that the first sliding block and the second sliding block slide along the linear guide rail, and the first sliding block slides along the arc-shaped guide rail. Through the above arrangement, the convenience of cavity door control can be improved.

[0011] As an optional solution of the coating box provided by the application, the support frame comprises a support rod, a connecting rod and a sliding rod which are sequentially connected at angles, the end of the support rod is connected to the cavity door, the second sliding block is arranged at the joint of the connecting rod and the sliding rod, the first sliding block is arranged at the end of the sliding rod away from the connecting rod, and the included angle between the support rod and the connecting rod is used to avoid the edge of the opening. Through the above arrangement, the problem that the support frame interferes with the edge of the opening of the box body when the cavity door is vertically opened relative to the opening of the box body can be avoided.

[0012] As an optional scheme of the coating box provided by the application, the top end of the arc-shaped guide rail is flush with the top end of the linear guide rail; the support rod, the connecting rod and the sliding rod are connected in sequence at right angles; when the second sliding block is located at the top end of the linear guide rail and the first sliding block is located at the position where the linear guide rail and the arc-shaped guide rail communicate, the sliding rod is parallel to the extension direction of the linear guide rail, the cavity door is perpendicular to the vertical direction and is located above the opening of the box body; when the second sliding block is located at the top end of the linear guide rail and the first sliding block is located at the top end of the arc-shaped guide rail, the sliding rod is perpendicular to the extension direction of the linear guide rail, and the cavity door is parallel to the vertical direction. Through the above arrangement, the cavity door can be vertically opened relative to the opening of the box body, thereby improving the passing area of the opening of the box body in the opened state, and facilitating the taking and placing of the processing materials in the box body.

[0013] As an optional scheme of the coating box provided by the application, the transmission mechanism is two, the coating box further comprises a transmission connecting rod, and the fixed components of the two transmission mechanisms are arranged on the opposite two side walls of the box body, and the transmission connecting rod is connected to the movable components of the two transmission mechanisms. Through the above arrangement, the simultaneous operation of the transmission mechanisms on both sides can be realized, and the stability of the cavity door when opened can be effectively improved.

[0014] As an optional scheme of the coating box provided by the application, the inner side wall of the opening is provided with a boss structure in the circumferential direction, the distance between the boss structure and the edge of the opening is greater than or equal to the thickness of the cavity door, and the cavity door abuts against the boss structure when the cavity door covers the opening of the box body. Through the above arrangement, the contact reliability between the cavity door and the opening of the box body can be further improved, and the occupied space of the entire coating box can be reduced.

[0015] As an optional scheme of the coating box provided by the application, one of the boss structure and the cavity door is provided with a first sealing element, the first sealing element is clamped between the boss structure and the cavity door when the cavity door covers the opening of the box body; and / or the inner side wall of the opening is recessed with a ring groove, the ring groove is located on the side of the boss structure facing the cavity door, and a second sealing element is arranged in the ring groove, the second sealing element can be clamped between the inner side wall of the opening and the peripheral side surface of the cavity door when the cavity door covers the opening of the box body. Through the above arrangement, the sealing performance between the cavity door and the box body is further improved.

[0016] According to another aspect of the application, the purpose is to provide a processing equipment, the processing equipment comprises a gas source cabinet and a coating box according to any one of the above schemes, the gas source cabinet communicates with the coating box, and the gas source cabinet is used for introducing gas into the coating box. Through the above arrangement, the internal accommodable space of the coating box can be increased, thereby improving the number of materials processed at a time and improving the processing efficiency.

[0017] The beneficial effects of the application are as follows:

[0018] The coating chamber provided by this invention includes a chamber body, a cavity door, and a transmission mechanism. The transmission mechanism includes a fixed component and a movable component. The fixed component is connected to the inner wall of the chamber body, and the movable component is connected to the cavity door. The fixed component provides a guide for the movement of the movable component. That is, the fixed component can define the movement trajectory of the movable component relative to the fixed component, thereby determining the movement trajectory of the cavity door relative to the chamber body. The movement of the movable component relative to the fixed component can cause the cavity door to move to an opening plane parallel to the chamber body, and cause the cavity door to rotate in a direction away from the chamber body. The cavity door can move to a position parallel to the vertical direction of the chamber body to open the chamber body; or, the movable component can cause the cavity door to rotate to an opening plane parallel to the chamber body, and move vertically towards the chamber body, sealing the opening of the chamber body. In other words, under the action of the transmission mechanism, the cavity door has two modes of movement relative to the chamber body: vertical lifting and lowering of the cavity door relative to the chamber body, and rotation of the cavity door relative to the chamber body. The above-described design prevents the door from sinking into the box and interfering with the opening edge or other internal components when the door is rotated to open the box. This ensures that when the door is closed, it is either below or flush with the top surface of the box. When the door is covering the opening, it is either below or flush with the top surface of the box. This design guarantees a tight connection between the box opening and the door, improving the internal sealing performance of the box. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the coating box provided in an embodiment of the present invention;

[0020] Figure 2 yes Figure 1 A magnified view of a section marked A in the middle;

[0021] Figure 3 This is a partial structural diagram of the coating box provided in an embodiment of the present invention. Figure 1 (Cavity opening);

[0022] Figure 4 This is a partial structural diagram of the coating box provided in an embodiment of the present invention. Figure 2 (Cavity opening flipped state);

[0023] Figure 5 This is a partial structural diagram of the coating box provided in an embodiment of the present invention. Figure 3 (Cavity opening lifted state);

[0024] Figure 6 This is a partial structural diagram of the coating box provided in an embodiment of the present invention. Figure 4 (Cavity closed).

[0025] In the picture:

[0026] 100, box; 110, boss structure;

[0027] 200, cavity door;

[0028] 300, transmission mechanism; 310, fixed assembly; 311, linear guide rail; 312, arc-shaped guide rail; 320, movable assembly; 321, driving rod; 322, driven rod; 323, support frame; 3231, support rod; 3232, connecting rod; 3233, sliding rod; 324, first sliding block; 325, second sliding block;

[0029] 400, transmission connecting rod. DETAILED DESCRIPTION

[0030] The application will be further described below in conjunction with the drawings and embodiments. It should be understood that the specific embodiments described herein are intended to be merely illustrative of the application and not in limitation thereof. It should also be noted that, for the purpose of brevity of description, only the parts of the drawings that are relevant to the present application are shown.

[0031] In the description of the present application, unless otherwise explicitly specified and limited, the terms "connected", "connected", "fixed" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship between two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0032] In the present application, unless otherwise explicitly specified and limited, the "upper" or "lower" of the first feature to the second feature can include the direct contact of the first and second features, or can include the contact of the first and second features through another feature between them. Moreover, the "upper", "upper" and "upper" of the first feature to the second feature include the vertical direction of the first feature above and obliquely above the second feature, or only indicate that the horizontal height of the first feature is higher than that of the second feature. The "lower", "lower" and "lower" of the first feature to the second feature include the vertical direction of the first feature below and obliquely below the second feature, or only indicate that the horizontal height of the first feature is less than that of the second feature.

[0033] In the description of the present embodiment, the terms "upper", "lower", "right", "left" and other orientation or position relationship are based on the orientation or position relationship shown in the drawings, which is only for the convenience of description and simplification of operation, and does not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.

[0034] The embodiment provides a coating box and a processing device. The processing device comprises a gas source cabinet and the coating box provided by the embodiment. The gas source cabinet is in communication with the coating box through a pipeline, and the gas source cabinet is used for introducing gas into the coating box.

[0035] Figure 1 A structure diagram of the coating box provided by the embodiment of the application is shown, and the coating box comprises a box body 100, a cavity door 200 and a transmission mechanism 300. Figure 1 The upper end of the box body has an opening, and the cavity door 200 can be capped at the top opening of the box body 100. The transmission mechanism 300 is arranged in the box body 100, and through the transmission mechanism 300, the opening or capping of the cavity door 200 relative to the opening of the box body 100 can be realized.

[0036] Specifically, the transmission mechanism 300 comprises a fixed component 310 connected to the inner wall of the box body 100 and a movable component 320 connected to the cavity door 200. The first end of the movable component 320 is connected to the cavity door 200, and the second end of the movable component 320 is in sliding connection with the fixed component 310. The movable component 320 moves relative to the fixed component 310, can drive the cavity door 200 to move linearly away from the box body 100, and make the cavity door 200 overturn outward to open the box body 100; or can drive the cavity door 200 to rotate to be parallel to the opening plane of the box body 100, and close to the box body 100 in the vertical direction, and cap the opening of the box body 100.

[0037] Figure 3 A partial structure diagram of the coating box provided by the embodiment of the application is shown Figure 1 (the cavity door opening state); Figure 4 A partial structure diagram of the coating box provided by the embodiment of the application is shown Figure 2 (the cavity door overturning state); Figure 5 A partial structure diagram of the coating box provided by the embodiment of the application is shown Figure 3 (the cavity door jacking state); Figure 6 A partial structure diagram of the coating box provided by the embodiment of the application is shown Figure 4 (the cavity door closing state). Referring to Figures 3-6 The fixed component 310 is in the form of a rectangular block structure and is installed on the inner wall of the box body 100, and the side of the fixed component 310 away from the inner wall of the box body 100 is provided with a guide rail. The movable component 320 comprises a driven rod 322, a support frame 323 and a first sliding block 324. One end of the support frame 323 is fixedly connected to the cavity door 200, and the other end of the support frame 323 is rotatably connected to the end of the driven rod 322 through the first sliding block 324, and the first sliding block 324 is slidably arranged on the guide rail.

[0038] Specifically, the guide rail comprises a linear guide rail 311 and an arc-shaped guide rail 312 which are in communication with each other. The linear guide rail 311 is arranged to extend towards the opening, and the first end of the arc-shaped guide rail 312 is in communication with the middle position of the linear guide rail 311, and the second end of the arc-shaped guide rail 312 is arranged to extend towards the opening of the box body 100. The arc-shaped guide rail 312 is specifically an arc with a central angle of 45°. The driven rod 322 is used to drive the first sliding block 324 to slide from the linear guide rail 311 to the arc-shaped guide rail 312, so as to make the cavity door 200 turn outwards after moving away from the opening of the box body 100, and the driven rod 322 can also drive the first sliding block 324 to slide from the arc-shaped guide rail 312 to the linear guide rail 311, so as to make the cavity door 200 turn inwards after moving close to the opening. Through the above arrangement, the fixed component 310 provides movement guidance for the movable component 320, and the state control of the cavity door 200 is realized through the sliding of the movable component 320 in the linear guide rail 311 and the arc-shaped guide rail 312.

[0039] More specifically, the linear guide rail 311 comprises a first linear portion away from the opening and a second linear portion close to the opening. The connection position of the first linear portion and the second linear portion is the first end of the arc-shaped guide rail 312. The movable component 320 further comprises a second sliding block 325 which is arranged to be spaced apart from the first sliding block 324 and is arranged to slide in the second linear portion. The first sliding block 324 is arranged to slide in the first linear portion and the arc-shaped guide rail 312. The driven rod 322 is used to drive the first sliding block 324 to make linear reciprocating motion along the first linear portion, and drive the second sliding block 325 to make linear reciprocating motion in the same direction along the second linear portion, so as to make the cavity door 200 move close to or away from the opening. The driven rod 322 can also drive the first sliding block 324 to reciprocate between the first end of the arc-shaped guide rail 312 and the second end of the arc-shaped guide rail 312, so as to make the cavity door 200 turn outwards or turn inwards.

[0040] More specifically, the movable component 320 further comprises a driving rod 321, and the coated box further comprises an external driving component. The driving end of the external driving component is arranged on the outer side of the box body 100. One end of the driving rod 321 is located on the side of the arc-shaped guide rail 312 away from the opening and is connected to the driving end of the external driving component, and the driving rod 321 can rotate under the driving action of the external driving component. The other end of the driving rod 321 is rotatably connected to the end of the driven rod 322 which is not connected to the support frame 323. The driving rod 321 is used to rotate under the driving action of the external driving component, so that the first sliding block 324 and the second sliding block 325 slide along the linear guide rail 311, and the first sliding block 324 can also slide along the arc-shaped guide rail 312. In this embodiment, the external driving component can be a combination of a speed reducer and a driving motor, which is a prior art, and the structure and principle thereof will not be described here. Through the external driving component, automatic control of the cavity door 200 can be realized, and compared with manually rotating the driving rod 321, the labor intensity can be effectively reduced.

[0041] Optionally, a sealing structure is arranged at the connection between the driving rod 321 and the external driving assembly, which can ensure the sealing performance at the position where the driving rod 321 penetrates the side of the cabinet 100 during the rotation of the driving rod 321. The sealing structure can be realized in the form of a lip oil seal, a magnetic fluid, a mechanical seal, etc.

[0042] With reference back to Figures 3-6 The support frame 323 has a Z-shaped structure, including support rods 3231, connecting rods 3232 and sliding rods 3233 connected in sequence at angles. The end of the support rod 3231 is connected to the cavity door 200, the second sliding block 325 is arranged at the joint of the connecting rod 3232 and the sliding rod 3233, and the first sliding block 324 is arranged at the end of the sliding rod 3233 away from the connecting rod 3232. The first sliding block 324 is specifically served by a rotating shaft for realizing the rotating connection between the sliding rod 3233 and the driven rod 322. The included angle between the support rod 3231 and the connecting rod 3232 is used to avoid the edge of the opening to prevent structural interference when the cavity door 200 is opened.

[0043] Specifically, the top end of the arc-shaped guide rail 312 is flush with the top end of the straight guide rail 311. Optionally, the support rod 3231, the connecting rod 3232 and the sliding rod 3233 are connected at right angles in sequence. When the second sliding block 325 is located at the top end of the straight guide rail 311 and the first sliding block 324 is located at the position where the straight guide rail 311 and the arc-shaped guide rail 312 communicate, the sliding rod 3233 is parallel to the extension direction of the straight guide rail 311, the cavity door 200 is perpendicular to the vertical direction, and is located above the opening of the cabinet 100. When the second sliding block 325 is located at the top end of the straight guide rail 311 and the first sliding block 324 is located at the top end of the arc-shaped guide rail 312, the sliding rod 3233 is perpendicular to the extension direction of the straight guide rail 311, and the cavity door 200 is parallel to the vertical direction. Through the above arrangement, the edge of the opening can be avoided, and at the same time, when the cavity door 200 is completely opened relative to the opening, the cavity door 200 can be erected in a vertical state on one side of the opening.

[0044] With reference back to Figure 1In the embodiment, the transmission mechanism 300 is two, and the coating box further comprises a transmission connecting rod 400. The two transmission mechanisms 300 are arranged on the opposite side walls of the box body 100, and the transmission connecting rod 400 is connected to the driven rods 322 of the two transmission mechanisms 300. When the external driving assembly drives one driving rod 321 to rotate, the driving rod 321 can drive the driven rod 322 connected thereto to rotate at the same time, and under the transmission action of the transmission connecting rod 400, the driven rod 322 of the other transmission mechanism 300 rotates at the same time. Through the transmission connecting rod 400, the synchronization of the actions of the two transmission mechanisms 300 can be ensured, and the stability of the rotating opening or rotating closing action of the cavity door 200 relative to the box body 100 is further improved.

[0045] Optionally, the inner side wall of the opening of the box body 100 is provided with a boss structure 110 in the circumferential direction. The distance between the boss structure 110 and the edge of the opening is greater than or equal to the thickness of the cavity door 200, and when the cavity door 200 covers the opening of the box body 100, the cavity door 200 abuts against the boss structure 110. That is, when the cavity door 200 covers the opening of the box body 100, a part of the cavity door 200 is embedded in the box body 100. Through the above arrangement, the height of the cavity door 200 protruding from the upper end surface of the box body 100 when the cavity door 200 covers the opening of the box body 100 can be effectively reduced, which is beneficial to reduce the occupied space of the entire coating box and improve the sealing reliability of the cavity door 200 to the opening. Optionally, in the embodiment, the distance between the boss structure 110 and the edge of the opening is equal to the thickness of the cavity door 200. That is, when the cavity door 200 covers the opening of the box body 100, the upper end surface of the cavity door 200 is flush with the upper end surface of the box body 100.

[0046] Specifically, one of the boss structure 110 and the cavity door 200 is provided with a first sealing member, and when the cavity door 200 covers the opening of the box body 100, the first sealing member is clamped between the boss structure 110 and the cavity door 200. Through the above arrangement, the sealing performance of the inside of the box body 100 can be improved. In the embodiment, the first sealing member can be a rubber sealing ring.

[0047] Further specifically, the inner side wall of the opening is recessed with a longitudinally arranged annular groove, and the annular groove is located on the side of the boss structure 110 facing the cavity door 200, and a second sealing member is arranged in the annular groove. When the cavity door 200 covers the opening of the box body 100, the second sealing member can be clamped between the inner side wall of the opening and the circumferential surface of the cavity door 200. The second sealing member can also be a rubber sealing ring, and optionally, when the box body 100 needs to have a signal shielding function, a shielding sealing ring is used as the second sealing member.

[0048] The closing process of the coating box provided in the embodiment is as follows:

[0049] Referring toFigure 3 At this time, the cavity 200 is fully open, the drive rod 321 and the driven rod 322 rotate to be parallel to the vertical direction, the second slider 325 slides to the top of the arc guide rail 312, the first slider 324 slides to the top of the linear guide rail 311, the sliding rod 3233 is perpendicular to the vertical direction, and the cavity 200 is parallel to the vertical direction.

[0050] Reference Figure 4 At this time, the cavity gate 200 is in a flipped state. Figure 4 The diagram shows a position of the cavity door 200 during its flipping process, at which point the cavity door 200 forms a 45° angle with the plane containing the opening of the housing 100. At this time, the drive rod 321 rotates, causing the driven rod 322 to rotate, which in turn causes the second slider 325 to slide along the arc-shaped guide rail 312 towards the linear guide rail 311, until it reaches the connection point between the arc-shaped guide rail 312 and the linear guide rail 311, and then enters the linear guide rail 311.

[0051] Then, as Figure 5 As shown, the cavity door 200 is parallel to the plane of the opening of the housing 100, but is still outside the housing 100. During this process, the first slider 324 is always at the top of the linear guide rail 311. At this time, the cavity door 200 is in the lifted state.

[0052] Reference Figure 6 The drive rod 321 continues to rotate, causing the driven rod 322 to continue rotating. At this time, both the first slider 324 and the second slider 325 are located in the linear guide rail 311. Under the constraint of the linear guide rail 311, the first slider 324 and the second slider 325 move downward along the linear guide rail 311 under the drive of the driven rod 322 until the cavity door 200 sinks into the box body 100 and sits on the boss structure 110. At this time, the cavity door 200 is in a closed state.

[0053] The opening process of the coating box provided in this embodiment is the reverse of the closing process described above, and will not be described in detail here.

[0054] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the implementation of the present invention. Those skilled in the art will be able to make various obvious changes, readjustments, and substitutions without departing from the scope of protection of the present invention. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the scope of protection of the claims of the present invention.

Claims

1. A coating box, characterized in that, include: A housing (100) having an opening at its upper end; A cavity door (200) that covers the opening; The transmission mechanism (300) includes a fixed component (310) and a movable component (320). The fixed component (310) is disposed on the inner wall of the housing (100). The first end of the movable component (320) is connected to the cavity door (200), and the second end of the movable component (320) is slidably connected to the fixed component (310). The movable component (320) can drive the cavity door (200) to move linearly away from the box (100) and cause the cavity door (200) to flip outward to open the box (100); The fixing component (310) is provided with a guide rail, which includes a linear guide rail (311) and an arc-shaped guide rail (312). The linear guide rail (311) extends toward the opening, the first end of the arc-shaped guide rail (312) is connected to the linear guide rail (311), and the second end of the arc-shaped guide rail (312) extends toward the opening. The movable component (320) includes a driven rod (322), a support frame (323), and a first slider (324). One end of the support frame (323) is fixedly connected to the cavity door (200), and the other end of the support frame (323) is rotatably connected to the end of the driven rod (322) via the first slider (324). The first slider (324) is slidably disposed on the guide rail. The driven rod (322) is used to drive the first slider (324) to slide from the linear guide rail (311) to the arc-shaped guide rail (312) so that the cavity door (200) flips outward after moving away from the opening, and to drive the first slider (324) to slide from the arc-shaped guide rail (312) to the linear guide rail (311) so that the cavity door (200) flips inward and approaches the opening; The linear guide (311) includes a first linear portion away from the opening and a second linear portion close to the opening, and the connection between the first linear portion and the second linear portion is the first end of the arc-shaped guide (312). The active component (320) further includes a second slider (325), which is spaced apart from the first slider (324) and is slidably disposed on the second straight section; The first slider (324) is slidably disposed on the first straight section and the arc-shaped guide rail (312); The driven rod (322) is used to drive the first slider (324) to perform linear reciprocating motion along the first straight section, and to drive the second slider (325) to perform linear reciprocating motion in the same direction along the second straight section, so that the cavity (200) moves closer to or further away from the opening; the driven rod (322) is used to drive the first slider (324) to slide back and forth between the first end of the arc-shaped guide rail (312) and the second end of the arc-shaped guide rail (312), so that the cavity (200) flips outward or inward; The active component (320) also includes a drive rod (321); One end of the drive rod (321) is located on the side of the arc-shaped guide rail (312) away from the opening, and is used to rotate under the driving action of the external drive assembly; The other end of the drive rod (321) is rotatably connected to the end of the driven rod (322) that is not connected to the support frame (323); The drive rod (321) is used to rotate under the driving action, so that the first slider (324) and the second slider (325) slide along the linear guide rail (311), and the first slider (324) slides along the arc-shaped guide rail (312).

2. The coating box according to claim 1, characterized in that, The support frame (323) includes a support rod (3231), a connecting rod (3232), and a sliding rod (3233) connected in sequence at an angle. The end of the support rod (3231) is connected to the cavity (200). The second slider (325) is disposed at the junction of the connecting rod (3232) and the sliding rod (3233). The first slider (324) is disposed at the end of the sliding rod (3233) away from the connecting rod (3232). The included angle between the support rod (3231) and the connecting rod (3232) is used to avoid the edge of the opening.

3. The coating box according to claim 2, characterized in that, The top end of the arc-shaped guide rail (312) is flush with the top end of the linear guide rail (311); The support rod (3231), the connecting rod (3232), and the sliding rod (3233) are connected at right angles in sequence; When the second slider (325) is located at the top of the linear guide (311) and the first slider (324) is located at the connection position between the linear guide (311) and the arc guide (312), the sliding rod (3233) is parallel to the extension direction of the linear guide (311), the cavity door (200) is perpendicular to the vertical direction and located above the opening of the box (100); When the second slider (325) is located at the top of the linear guide (311) and the first slider (324) is located at the top of the arc guide (312), the sliding rod (3233) is perpendicular to the extension direction of the linear guide (311) and the cavity door (200) is parallel to the vertical direction.

4. The coating box according to claim 1, characterized in that, There are two transmission mechanisms (300), and the coating box also includes a transmission link (400). The fixed components (310) of the two transmission mechanisms (300) are respectively arranged on the opposite side walls of the box body (100), and the transmission link (400) is connected to the movable components (320) of the two transmission mechanisms (300).

5. The coating box according to any one of claims 1-4, characterized in that, The inner wall of the opening is provided with a boss structure (110) along the circumferential direction. The distance between the boss structure (110) and the edge of the opening is greater than or equal to the thickness of the cavity door (200). When the cavity door (200) covers the opening of the box body (100), the cavity door (200) abuts against the boss structure (110).

6. The coating box according to claim 5, characterized in that, One of the boss structure (110) and the cavity door (200) is provided with a first sealing element. When the cavity door (200) covers the opening of the box body (100), the first sealing element is sandwiched between the boss structure (110) and the cavity door (200). And / or, the inner wall of the opening is recessed with an annular groove, the annular groove being located on the side of the boss structure (110) facing the cavity door (200), and a second sealing element is provided in the annular groove. When the cavity door (200) covers the opening of the box body (100), the second sealing element can be clamped between the inner wall of the opening and the peripheral side of the cavity door (200).

7. Processing equipment, characterized in that, The processing equipment includes a gas source cabinet and a coating box as described in any one of claims 1-6, wherein the gas source cabinet is connected to the coating box and is used to introduce gas into the coating box.

Images