A composite electrochemical machining device and machining method

Abstract

The application relates to the field of mask micro electrochemical machining, and discloses a composite electrochemical machining device and a machining method. The composite electrochemical machining device comprises a mask unit, a synchronous hydrophilization unit and an electrochemical unit, and the mask unit is attached to the surface of a workpiece. The synchronous plasma hydrophilization device performs real-time hydrophilization treatment on the mask and the workpiece area exposed by the mask pattern to be machined, so that the composite electrochemical machining process and the hydrophilization effect are synchronized, and thus the machining area has excellent working liquid mass transfer and updating capacity. The real-time hydrophilization treatment effect ensures that the working liquid in the electrochemical machining process always has excellent updating and mass transfer capacity in the machining area. The stability and continuity of the electrochemical machining process are ensured, the manufacturing bottleneck of the existing mask electrochemical machining in the micro machining scale is broken through, the preparation of high depth-diameter ratio microstructures is realized, and the performance of the mask electrochemical machining is improved.

Description

Technical Field

[0001] This invention relates to the field of micro-electrochemical machining, and more particularly to the fields of electrolysis and electroforming machining, and discloses a composite electrochemical machining device and a new machining method. Background Technology

[0002] Mask electrochemical machining (electrochemical machining or electroforming machining) has a wide range of applications in fields such as microelectromechanical systems (MEMS). However, with the rapid development of technology, MEMS has also put forward higher requirements in terms of micro-machining dimensions. The limit of the machining size directly affects the functions that MEMS can achieve. At present, the new machining scale requirements are from tens of micrometers to several micrometers or even nanometers.

[0003] Mask electrochemical machining mainly uses the constraints of the mask structure to perform micro-electrolytic removal or micro-electrochemical deposition on the workpiece in the gap area formed by the mask pattern. However, when the processing scale is a few micrometers or smaller, the corresponding mask structure also needs to be smaller, which can easily lead to hydrophobicity problems in the mask. Working media such as electrolyte / electroforming solution are difficult to enter the processing area, and may even cause the processing to be unable to continue, ultimately affecting the performance of micromachining.

[0004] To address the aforementioned issues, researchers have conducted extensive studies on mask electrochemical machining processes. Some researchers have employed external field assistance methods such as ultrasonic vibration and magnetic fields to promote mass transfer of the working fluid within the tiny mask structure during machining, thereby improving the working fluid's renewal capacity and machining performance. However, external field assistance is difficult to control and can easily cause turbulence and disturbance to the working fluid, which in turn affects the stability of the machining process.

[0005] In addition, some researchers have used mask jet electrochemical processing to promote mass transfer and flow of the electrochemical solution. However, under high jet pressure, the mask structure is easily damaged, which places higher demands on the mask's performance.

[0006] Existing methods have not shown significant improvement in the microfabrication performance of microstructures at the micrometer level or smaller. This has, to some extent, limited the further application and development of mask electrochemical machining processes in engineering fields. Summary of the Invention

[0007] To overcome the shortcomings and deficiencies of existing technologies, the present invention aims to provide a composite electrochemical machining apparatus and method. By simultaneously hydrophilizing the mask unit and the machining area of ​​the workpiece surface, the invention solves the problem of mass transfer and renewal difficulties of the electrochemical solution in the micro-gap during machining, thus overcoming the limitations of existing mask electrochemical machining processes at the micro-machining scale. The simultaneous hydrophilization of the mask unit and the machining area of ​​the workpiece enables excellent electrolyte / electroforming working fluid mass transfer capabilities within the machining area, facilitating the breakthrough of the manufacturing bottleneck of existing mask electrochemical machining at the micro-machining scale, enabling the fabrication of microstructures with high aspect ratios, and improving their micro-machining performance.

[0008] To achieve the above objectives, the composite electrochemical machining apparatus of the present invention includes a mask unit, a synchronous hydrophilization unit, and an electrochemical unit. The mask unit is attached to the workpiece and has a mask pattern that exposes the workpiece machining area. The electrochemical unit is used to deliver an electrochemical solution to the workpiece machining area exposed by the mask pattern for machining. The synchronous hydrophilization unit performs real-time hydrophilization treatment on the mask unit and the workpiece machining area, enabling stable mass transfer and flow of the electrochemical solution in the workpiece machining area during the electrochemical machining process. Furthermore, by switching the connection between the electrolytic power supply (or electroforming power supply) and the workpiece, and by changing the electrolytic working solution (or electroforming working solution) during machining, electrolytic machining or electroforming machining can be performed on the machining area exposed by the mask pattern.

[0009] The synchronous hydrophilization unit includes a plasma processor, a first electrode, a second electrode, a spray gun, and a gas source. The first and second electrodes are both located inside the spray gun. The negative and positive electrodes of the plasma processor are connected to the first and second electrodes, respectively. The gas source is connected to the spray gun and supplies a gas medium to the spray gun. The plasma processor acts on the two electrodes, causing them to ionize the gas inside the spray gun to form plasma. The plasma ejected from the spray gun acts on the mask unit and the workpiece processing area, enabling the mask unit and the workpiece processing area to achieve synchronous hydrophilization treatment during the electrochemical machining process.

[0010] The mask unit is a movable mask that is detachably connected to the workpiece and can be reused. The plasma ejected by the synchronous hydrophilization unit acts on the movable mask and the processing area, enabling real-time hydrophilization of the movable mask and the workpiece processing area during the electrochemical machining process.

[0011] The mask unit can also be manufactured by photolithography. The mask unit is fixedly attached to the surface of the workpiece. The plasma ejected by the synchronous hydrophilization unit acts on the mask unit and the processing area, so that the mask unit and the workpiece processing area are hydrophilized in real time during the electrochemical processing.

[0012] The mask unit can also be manufactured by printing. The mask unit is fixedly attached to the surface of the workpiece. The plasma ejected by the synchronous hydrophilization unit acts on the mask unit and the workpiece processing area, so that the mask unit and the workpiece processing area can achieve real-time hydrophilization during the electrochemical processing.

[0013] The electrochemical unit includes an electrochemical processing container, a fixture, a liquid storage container, a pump body, a filter, and a nozzle. The electrochemical processing container holds the fixture and the electrochemical solution. The fixture is used for workpiece positioning. The nozzle is fitted on the outside of the spray gun and has multiple liquid outlet holes. The electrochemical processing container is connected to the liquid storage container, and the pump body is connected to the liquid storage container. The electrochemical solution in the liquid storage container is drawn in by the pump body and filtered by the filter before being transported between the nozzle and the spray gun. The electrochemical solution, along with the plasma ejected from the spray gun, is synchronously delivered to the workpiece processing area through the liquid outlet holes to achieve stable and continuous electrochemical processing at the microscale.

[0014] To achieve the above objectives, the composite electrochemical processing method of the present invention includes the following steps:

[0015] A mask unit is set on the workpiece, and the mask unit has a corresponding mask pattern. The mask pattern is used to reveal the microstructure to be processed in the workpiece processing area.

[0016] Electrochemical solution is sprayed through a spray gun onto the mask unit and the workpiece processing area exposed by the mask pattern. During processing, by switching the positive and negative polarities of the pulse power supply connected to the workpiece, electrochemical processing can be performed on the processing area exposed by the mask pattern.

[0017] The plasma ejected by the plasma processor of the synchronous hydrophilization unit acts on the mask unit and the workpiece processing area, so that the mask unit and the workpiece processing area are hydrophilized in real time during the electrochemical processing.

[0018] This also includes the following steps:

[0019] Connect the negative and positive electrodes of the plasma treatment machine to the first and second electrodes located inside the spray gun, respectively.

[0020] A gas source introduces a gaseous medium into the spray gun.

[0021] Under the action of gas glow discharge, the first and second electrodes ionize the gas between the two electrodes in the spray gun into plasma.

[0022] The plasma ejected from the spray gun and the electrochemical solution ejected from the spray gun work synchronously on the mask unit and the processing area to achieve real-time hydrophilic treatment.

[0023] This also includes the following steps:

[0024] A movable mask is manufactured using machining methods. The movable mask is a mask unit that can be detachably attached to the workpiece. A plasma treatment machine hydrophilizes the movable mask and the processing area exposed by the mask pattern in real time.

[0025] This also includes the following steps:

[0026] Mask units are fabricated using photolithography or printing methods and then fixedly attached to the surface of the workpiece.

[0027] The beneficial effects of this invention are as follows: By simultaneously hydrophilizing the mask unit and the processing area, the manufacturing bottleneck of the existing mask electrochemical machining process at the micro-machining scale of the workpiece is broken through. The simultaneous hydrophilization of the mask unit and the workpiece processing area enables the electrochemical solution in the workpiece processing area to still have excellent mass transfer ability during the electrochemical machining process, thereby improving the micro-machining performance and realizing the processing of microstructures with high efficiency and high quality. Attached Figure Description

[0028] Figure 1 This is a schematic diagram of the structure of the present invention;

[0029] Figure 2 This is a schematic diagram of the synchronous hydrophilization unit of the present invention;

[0030] Figure 3 This is a schematic diagram of the structure of the spray gun component of the present invention;

[0031] Figure 4 This is a schematic diagram of the spray gun component and the spray gun component of the present invention;

[0032] Figure 5 This is a schematic diagram of the structure of the electrochemical unit of the present invention;

[0033] Figure 6 This is a schematic diagram of the photolithography machine coating and hydrophilic coating process of the present invention.

[0034] Figure 7 A schematic diagram of the structure of the screen printing equipment of the present invention for printing ordinary ink layers and hydrophilic coating treatment;

[0035] Figure 8 This is a schematic diagram of the active mask unit and hydrophilic coating treatment of the present invention.

[0036] The reference numerals in the figures include:

[0037] 1—Synchronous hydrophilization unit; 2—Electrochemical unit; 3—Electrolysis power source

[0038] 4—Workpiece 5—Plasma treatment machine 6—First electrode

[0039] 7—Second electrode; 8—Spray gun component; 9—Gas source

[0040] 11—Main gun body; 12—Nozzle head; 13—Electrochemical processing container

[0041] 14—Liquid storage container; 15—Pump body; 16—Filter

[0042] 17—Electroforming power supply; 18—Spray nozzle; 100—Mask unit

[0043] 101—Hydrophilic coating; 104—Ordinary ink layer; 105—Screen printing plate

[0044] 106—Mask Part Detailed Implementation

[0045] To facilitate understanding by those skilled in the art, the present invention will be further described below with reference to embodiments and accompanying drawings. The content mentioned in the embodiments is not intended to limit the present invention.

[0046] Please see Figures 1 to 8 As shown, the composite electrochemical machining apparatus of the present invention includes a mask unit, a synchronous hydrophilization unit 1, and an electrochemical unit 2. The mask unit is pre-set on the workpiece 4 and has a mask pattern that exposes the workpiece machining area. Of course, the number of mask patterns can be multiple according to actual needs. The mask pattern is a hollow area set on the mask unit. The electrochemical unit 2 is used to transport the electrochemical solution to the workpiece machining area exposed by the mask pattern and to perform electrolytic or electroforming machining on the workpiece with the help of the electrolytic power supply 3 (or electroforming power supply 17).

[0047] By pre-setting mask units on workpiece 4 and simultaneously hydrophilizing the mask units and the workpiece processing area, the electrochemical solution maintains excellent mass transfer capability throughout the processing. Without additional external field assistance, it can stably carry out processes such as flow and mass transfer of the electrochemical solution, ensuring timely and sufficient supply of the electrochemical solution to the processing area, thereby improving the stability and continuity of the electrochemical processing. By simultaneously hydrophilizing the mask units and the workpiece processing area on workpiece 4, the manufacturing bottleneck of existing mask electrochemical processing technology in terms of workpiece processing scale is overcome. At the same time, the excellent electrochemical solution renewal capability of the hydrophilic mask enables the preparation of microstructures with high aspect ratio, improving the processing quality and efficiency of the microstructure of workpiece 4.

[0048] The mask unit 100 is disposed on the workpiece. The synchronous hydrophilization unit 1 includes a plasma processor 5, a first electrode 6, a second electrode 7, a nozzle, and a gas source 9. The first electrode 6 and the second electrode 7 are both located inside the nozzle. The negative and positive electrodes of the plasma processor 5 are respectively connected to the first electrode 6 and the second electrode 7. The gas source 9 is connected to the nozzle and is used to deliver a gas medium to the nozzle.

[0049] In practical use, the plasma treatment unit 5 acts on two electrodes, causing the two electrodes to ionize the gas inside the nozzle to form plasma. Preferably, the plasma is cold plasma, which avoids ablation of the mask layer and damage to the mask structure compared to conventional hot plasma. The plasma ejected from the nozzle acts on the workpiece 4 exposed by the mask unit and the mask pattern (i.e., the mask gap) to perform simultaneous hydrophilication treatment, making the mask unit hydrophilic to form a hydrophilic coating 101, while realizing real-time hydrophilication of the workpiece processing area.

[0050] The nozzle assembly has a main gun body 11 and multiple nozzle heads 12 that are connected to the main gun body 11. The main gun body 11 is roughly a hollow cylinder, and the nozzle heads 12 are roughly hollow tubes. The central axes of the multiple nozzle heads 12 are arranged to intersect, such that the central axes of two adjacent nozzle heads 12 are arranged at an angle. For example, the angle between the central axes of two adjacent nozzle heads 12 is an acute angle. Depending on the actual needs, the angle between the central axes of two adjacent nozzle heads 12 can be 20-60°.

[0051] The first electrode 6 and the second electrode 7 are both located inside the main gun body 11. The first electrode 6 and the second electrode 7 are spaced apart from each other and are arranged in parallel. The plasma ejected from the nozzle head 12 acts on different mask patterns on the workpiece 4 to form a hydrophilic coating 101.

[0052] Depending on the actual needs, the mask unit can be manufactured by a machining system. This machining system can be a CNC micromachining machine, laser processing equipment, etc. The machining system processes the mask material into a mask component 106 through mechanical cutting, micro-drilling, and milling. The mask component 106 is detachably mounted and attached to the workpiece 4, for example, by mechanical bonding or adhesive bonding. The synchronous hydrophilization unit 1 then performs synchronous hydrophilization treatment on the mask component 106 and the workpiece processing area exposed by the mask cutout area of ​​the mask component 106.

[0053] With the detachable structure of the mask component 106, after one workpiece 4 is processed, the mask component 106 can be removed from the workpiece 4 and then installed on another workpiece 4. This achieves the recycling of the mask component 106 to improve efficiency and reduces the manufacturing cost of the mask, which is in line with the development trend of energy conservation and environmental protection.

[0054] According to actual needs, the mask unit can be manufactured by photolithography. For example, the mask unit can be manufactured by using a photolithography machine. The photolithography machine is an existing technology and will not be described in detail here. Then, based on the prepared photolithography mask, the photolithography mask is hydrophilized by the plasma processing machine 5 of the synchronous hydrophilization unit 1 to obtain the hydrophilic mask unit.

[0055] In addition, the mask unit can also be manufactured by printing. For example, the mask unit can be printed using screen printing equipment. Screen printing equipment is existing technology and will not be described in detail here. Using the screen plate 105 of the screen printing equipment, the ink layer 104 is screen printed on the workpiece 4 using existing technology. Then, the ink layer 104 is hydrophilized by the plasma treatment machine 5 of the synchronous hydrophilization unit 1, thereby obtaining the hydrophilic mask unit.

[0056] The electrochemical unit 2 includes an electrochemical processing container 13, a fixture, a liquid storage container 14, a filter 16, a pump body 15, and a spray gun 8. The electrochemical processing container 13 is used to house the fixture and the electrochemical solution. The fixture is used to position the workpiece 4 inside the electrochemical processing container 13 to prevent the workpiece 4 from moving relative to the electrochemical processing container 13 and causing poor processing. Preferably, the workpiece 4 is immersed in the electrochemical solution. The liquid storage container 14 is connected to the electrochemical processing container 13. The spray gun 8 is sleeved on the outside of the nozzle and has multiple liquid outlet holes.

[0057] The pump body 15 is connected to the liquid storage container 14. The pump body 15 draws the electrochemical solution from the liquid storage container 14, which is then filtered through the filter 16 before being introduced between the nozzle and the spray gun 8. The filter 16 is used to remove particulate impurities and processing products mixed in the electrochemical solution. The electrochemical solution, along with the plasma ejected from the nozzle, acts on the workpiece 4 through the liquid outlet, allowing the workpiece 4 to undergo both plasma surface hydrophilication treatment and electrochemical processing simultaneously. Furthermore, depending on actual needs, the nozzle and the spray gun 8 can be shared, i.e., combined into one unit, simplifying the overall structural design.

[0058] The electrochemical solution drawn from the reservoir 14 by the pump body 15 flows through the filter 16 into the channel between the nozzle and the spray gun 8. At the bottom of the channel, the solution mixes with the plasma to form an electrochemical solution-plasma mixture, which then flows out. This process simultaneously performs plasma-based hydrophilic surface treatment and electrochemical machining of the workpiece area. Through this combined process, the plasma surface hydrophilic treatment and the electrochemical machining of the workpiece 4 are carried out synchronously and stably. Alternatively, the hydrophilic treatment and machining can be performed alternately depending on the specific circumstances.

[0059] In this embodiment, the spray gun 8 has a blind hole, the nozzle is located inside the blind hole, and the liquid outlet is set on the bottom wall of the blind hole and communicates with the blind hole. The liquid outlet penetrates the bottom wall of the blind hole, and multiple liquid outlets are arranged in an array on the bottom wall of the blind hole. According to actual needs, the liquid outlets can be arranged in a rectangular array or a ring array on the bottom wall of the blind hole. The diameter of the blind hole is larger than the outer diameter of the nozzle. The annular gap formed between the outer surface of the nozzle and the inner surface of the blind hole communicates with the filter 16. The electrochemical solution is injected into the annular gap and sprayed onto the workpiece 4 through multiple liquid outlets.

[0060] To achieve the above objectives, the composite electrochemical processing method of the present invention includes the following steps:

[0061] A mask unit is pre-set on the surface of workpiece 4. The mask unit has a mask pattern, and the hollow area of ​​the mask pattern is used to expose the workpiece processing area.

[0062] The mask unit and the workpiece processing area exposed by the mask pattern are subjected to real-time hydrophilization treatment by the plasma processing machine of the synchronous hydrophilization unit 1.

[0063] The electrochemical solution is sprayed through the spray gun 8 onto the workpiece processing area exposed by the mask unit and the mask gap. With the help of the real-time hydrophilicity of the mask unit and the processing area, the electrochemical solution will flow fully into the processing area, so that the electrochemical solution and the processing area can be in full contact. Furthermore, due to the real-time hydrophilicity, the working fluid in the processing area always has excellent mass transfer and renewal capabilities during the electrochemical processing.

[0064] By simultaneously hydrophilizing the mask unit and the workpiece processing area on workpiece 4, the manufacturing bottleneck of existing mask electrochemical machining processes in terms of workpiece processing scale and processing quality is overcome. At the same time, by taking advantage of the excellent mass transfer capability of the hydrophilic mask electrochemical solution, it is possible to prepare microstructures with high aspect ratio and improve the micromachining performance of workpiece 4.

[0065] The composite electrochemical processing method also includes the following steps:

[0066] The negative and positive electrodes of the plasma processor 5 are connected to the first electrode 6 and the second electrode 7 located inside the nozzle, respectively.

[0067] Gas source 9 is used to input gas medium into the nozzle component;

[0068] Under the action of gas glow discharge, the first electrode 6 and the second electrode 7 ionize the gas medium between the two electrodes in the nozzle to form plasma.

[0069] The mask unit 100 is disposed on the workpiece 4, and the plasma ejected from the nozzle acts on the mask unit on the workpiece 4 to form a hydrophilic coating 101.

[0070] The composite electrochemical processing method also includes the following steps:

[0071] A mask component 106 is fabricated from the mask material using a machining system. The mask component 106 is then detachably mounted on the workpiece 4. A plasma treatment machine 5 performs real-time hydrophilic treatment on the mask component 106, the workpiece processing area, and the processing area, followed by electrochemical machining to obtain a microstructure. Due to the design of the mask component 106, after one workpiece 4 is processed, the mask component 106 can be removed from the workpiece 4 and then mounted on another workpiece 4. This allows for the recycling of the mask component 106 and reduces the manufacturing cost of the workpiece 4, aligning with the trend of energy conservation and environmental protection.

[0072] The composite electrochemical processing method also includes the following steps:

[0073] The spray gun part 8 is fitted onto the outside of the nozzle part, and multiple liquid outlet holes are machined on the spray gun part 8.

[0074] An annular gap is formed between the spray gun component 8 and the nozzle component, and the electrochemical solution is sprayed through the annular gap and from the liquid outlet onto the workpiece 4 coated with the mask unit. The plasma ejected from the nozzle component is sprayed from the liquid outlet onto the workpiece 4.

[0075] In electrolytic machining, an electrolytic power supply 3 is used, with the positive terminal of the power supply connected to the workpiece 4 and the negative terminal connected to the spray gun 8; the electrochemical solution is the electrolyte, and the electrolyte is sprayed out through the nozzle to the workpiece processing area to achieve electrochemical dissolution and removal of the workpiece material.

[0076] In electroforming, an electroforming power supply 17 is used, with the negative terminal of the power supply connected to the workpiece 4 and the positive terminal connected to the spray gun 8. The electrochemical solution is the electroforming liquid, which is sprayed out to the workpiece processing area through the nozzle. The metal cations in the electroforming liquid are electrochemically deposited on the workpiece surface to form a microstructure.

[0077] The composite electrochemical processing method also includes the following steps:

[0078] By using screen printing, ink 104 is quickly printed onto workpiece 4 to form a mask unit. Simultaneously, the plasma treatment machine of the hydrophilization unit 1 hydrophilizes the ink layer 104 and the processing area, thereby improving the manufacturing efficiency of the hydrophilic mask unit and reducing manufacturing costs.

[0079] The composite electrochemical processing method also includes the following steps:

[0080] The mask unit is fabricated using the photolithography method of a photolithography machine, and then fixedly attached to the surface of the workpiece.

[0081] The above description is only a preferred embodiment of the present invention. For those skilled in the art, there will be changes in the specific implementation and application scope based on the ideas of the present invention. The content of this specification should not be construed as a limitation of the present invention.

Claims

1. A composite electrochemical processing device, characterized in that: It includes a mask unit, a synchronous hydrophilization unit, and an electrochemical unit. The mask is attached to the workpiece, and the mask unit has a mask pattern that exposes the workpiece processing area. The composite electrochemical unit is used to deliver the electrochemical solution to the workpiece processing area exposed by the mask pattern. The synchronous hydrophilization unit performs real-time hydrophilization treatment on the mask unit and the processing area to promote the renewal and mass transfer of the electrochemical solution in the processing area. The synchronous hydrophilization unit includes a plasma processor, a first electrode, a second electrode, a spray gun, and a gas source. The first and second electrodes are all located inside the spray gun. The negative and positive electrodes of the plasma processor are connected to the first and second electrodes, respectively, and the gas source is connected to the spray gun. The gas source is used to supply gas to the spray gun. The plasma processor acts on the two electrodes, causing the gas inside the spray gun to ionize and form plasma. The plasma ejected from the spray gun acts on the mask unit and the workpiece processing area exposed by the mask pattern, thereby achieving hydrophilization treatment on its surface. This allows the workpiece processing area exposed by the mask unit and the mask pattern to achieve real-time hydrophilization during the electrochemical machining process. The electrochemical unit includes an electrochemical processing container, a fixture, a liquid storage container, a pump body, a filter, and a nozzle. The electrochemical processing container is used to hold the fixture and store the electrochemical solution. The fixture is used for workpiece positioning. The nozzle is sleeved on the outside of the spray gun and has a liquid outlet. The electrochemical processing container is connected to the liquid storage container, and the pump body is connected to the liquid storage container. The electrochemical solution in the liquid storage container is drawn in by the pump body and filtered by the filter and then transported between the spray gun and the nozzle. The electrochemical solution is also synchronously delivered to the workpiece processing area through the liquid outlet along with the plasma ejected from the spray gun. The nozzle assembly has a main gun body and multiple nozzle heads that are respectively connected to the main gun body.

2. The composite electrochemical processing apparatus according to claim 1, characterized in that: In electrochemical machining, the electrochemical unit is equipped with an electrochemical power supply. The positive terminal of the electrochemical power supply is connected to the workpiece, and the negative terminal is connected to the spray gun. The electrochemical solution is an electrolyte, which is sprayed out through the spray gun to the workpiece processing area exposed by the mask pattern, thereby realizing the electrochemical dissolution and removal of the workpiece material.

3. The composite electrochemical processing apparatus according to claim 1, characterized in that: In electroforming, the electrochemical unit is equipped with an electroforming power supply. The negative terminal of the electroforming power supply is connected to the workpiece, and the positive terminal is connected to the spray gun. The electrochemical solution is the electroforming liquid, which is sprayed out to the workpiece processing area through the spray gun. The metal cations in the electroforming liquid are electrochemically deposited on the workpiece surface to form microstructures.

4. The composite electrochemical processing apparatus according to claim 1, characterized in that: The plasma is cold plasma, which avoids ablation of the mask layer and damage to the mask structure.

5. The composite electrochemical processing apparatus according to claim 1, characterized in that: The mask unit can be manufactured by printing. The mask unit is fixedly attached to the surface of the workpiece. The plasma ejected by the synchronous hydrophilization unit acts on the mask unit and the workpiece processing area, so that the mask unit and the processing area are hydrophilized in real time during the processing.

6. The processing method of the composite electrochemical processing device as described in claim 1, characterized in that, Includes the following steps: A mask unit is set on the workpiece, and the mask unit is provided with a mask pattern for revealing the workpiece processing area. The mask pattern reveals the microstructure of the workpiece that needs to be processed. Electrochemical solution is sprayed through a nozzle onto the workpiece processing area exposed by the mask unit and the mask pattern. During processing, the positive and negative polarities of the pulse power supply connected to the workpiece are switched to achieve electrochemical processing of the processing area. The plasma ejected by the plasma processor of the synchronous hydrophilization unit acts on the mask unit and the workpiece processing area, so that the mask unit and the workpiece processing area are hydrophilized in real time during the processing. The processing method further includes the following steps: Connect the negative and positive electrodes of the plasma processor to the first and second electrodes inside the spray gun, respectively; the gas source inputs gas into the spray gun. Under the action of gas glow discharge, the first and second electrodes ionize the gas between the electrodes inside the spray gun to form plasma; The plasma ejected from the spray gun and the electrochemical solution ejected from the nozzle work synchronously on the mask unit and the workpiece processing area to achieve real-time hydrophilization.

7. The processing method of the composite electrochemical processing device according to claim 6, characterized in that, It also includes the following steps: A movable mask is manufactured using machining methods. The movable mask is a mask unit that is installed on the workpiece and can be disassembled and reused. The plasma treatment machine performs real-time hydrophilic treatment on the movable mask and the processing area exposed by the mask pattern.

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