A filling and sealing device for phosphorous carrier for injection synthesis

Abstract

The application provides a filling and sealing device for a phosphorus carrier for implantation synthesis, and relates to the technical field of semiconductor preparation. The filling and sealing device for the phosphorus carrier for implantation synthesis comprises a supporting cylinder, a rotating motor is arranged at the lower end of the supporting cylinder, a clutch is arranged between the supporting cylinder and the rotating motor, a vacuum valve is arranged on the side wall of the supporting cylinder, an upper cover is arranged at the upper end of the supporting cylinder, an upper protective cover is arranged at the upper end of the upper cover, a sealing groove is formed in each of the two side edges of the upper cover, a sealing ring is arranged in the sealing groove, and a sealing groove is formed in the lower end of the upper protective cover and the upper end of the supporting cylinder. In the application, the device is filled under the protection of inert gas and sealed at high temperature in a vacuum environment, the sealing degree of the sealing process can be monitored in real time, the burning of phosphorus can be effectively avoided, and the device is safer and more reliable. The process is safe and reliable, has a high degree of automation, and is environmentally friendly and safe.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor preparation, in particular to a filling and sealing device for a phosphorus carrier for implantation synthesis. BACKGROUND

[0002] Indium phosphide and gallium phosphide are important compound semiconductor materials, which are widely used in millimeter wave detection, optical communication, terahertz and other fields. The phosphorus element in these compounds is synthesized by diffusion or implantation. Implantation synthesis can realize rapid and efficient synthesis, but phosphorus is flammable, so the filling and sealing of phosphorus is very difficult, and slight carelessness will cause the burning of phosphorus, which is extremely dangerous.

[0003] Therefore, the person skilled in the art provides a filling and sealing device for a phosphorus carrier for implantation synthesis to solve the problems raised in the background art. SUMMARY

[0004] (I) Technical problems to be solved

[0005] In view of the deficiencies of the prior art, the present application provides a filling and sealing device for a phosphorus carrier for implantation synthesis, which is filled under the protection of inert gas and sealed at high temperature in a vacuum environment, and the sealing degree of the sealing process can be monitored in real time. The process is safe and reliable, has high automation degree, is environmentally friendly and safe, and solves the problem that implantation synthesis can realize rapid and efficient synthesis, but phosphorus is flammable, so the filling and sealing of phosphorus is very difficult, and slight carelessness will cause the burning of phosphorus, which is extremely dangerous.

[0006] (II) Technical solutions

[0007] To achieve the above purposes, the present application is realized by the following technical solutions:

[0008] A filling and sealing device for a phosphorus carrier for implantation synthesis, comprising a support cylinder, a rotating motor is arranged at the lower end of the support cylinder, a clutch is arranged between the support cylinder and the rotating motor, and a vacuum valve is arranged on one side wall of the support cylinder;

[0009] An upper cover is arranged at the upper end of the support cylinder, an upper protective cover is arranged at the upper end of the upper cover, sealing grooves are formed in the two side edges of the upper cover, sealing rings are arranged in the sealing grooves, sealing grooves are formed in the lower end of the upper protective cover and the upper end of the support cylinder, the size and position of the upper protective cover and the upper sealing groove of the support cylinder are consistent with those of the two sealing grooves on the side edges of the upper cover, and a loading hole is formed in the top center of the upper protective cover;

[0010] The upper end of the upper cover is provided with a phosphorus carrier, the lower end of the phosphorus carrier is provided with an injection pipe, the upper end of the phosphorus carrier is provided with a feeding hole, the inside of the loading hole is provided with a hopper, and the lower end of the hopper extends into the inside of the feeding hole.

[0011] Through the technical scheme, the support cylinder, the upper cover and the upper protective cover can be effectively sealed, the filling can be carried out under the protection of inert gas, the high-temperature sealing can be carried out in a vacuum environment, the phosphorus carrier can be conveniently installed, the sealing degree of the sealing process can be monitored in real time, the burning of phosphorus can be effectively avoided, and the system is safer and more reliable.

[0012] Further, the lower end and the upper end of the vacuum valve are respectively provided with a gas charging and discharging valve and a vacuum gauge, and the end of the vacuum gauge extends into the inside of the support cylinder.

[0013] Through the technical scheme, the inside of the support cylinder and the phosphorus carrier can be conveniently charged and discharged through the gas charging and discharging valve, and the air pressure value in the inside of the support cylinder can be monitored in real time through the vacuum gauge.

[0014] Further, the middle part of the upper cover is provided with a transition hole, and the lower end of the injection pipe penetrates the inside of the transition hole.

[0015] Through the technical scheme, the injection pipe penetrates the inside of the transition hole, so that the discharging operation is facilitated.

[0016] Further, the first sealing gasket is arranged between the upper cover and the phosphorus carrier.

[0017] Through the technical scheme, the upper cover and the phosphorus carrier are effectively sealed through the first sealing gasket.

[0018] Further, the second sealing gasket is arranged between the hopper and the upper protective cover.

[0019] Through the technical scheme, the hopper and the upper protective cover are effectively sealed through the second sealing gasket.

[0020] Further, the upper end of the phosphorus carrier can be connected with a sealing cap through a welding gun, and the sealing cap is sealed with the feeding hole on the phosphorus carrier.

[0021] Through the technical scheme, the sealing cap is welded on the phosphorus carrier by using the welding gun. During the welding process, the motor is started, so that the welding seam rotates with the welding process. When a problem occurs during the welding process, the system is stopped by stepping on the clutch, so that effective welding sealing can be achieved.

[0022] Further, the inside of the phosphorus carrier is loaded with red phosphorus.

[0023] Further, the filling and sealing method of the phosphorus carrier for injection synthesis comprises the following processes:

[0024] Step S1. First, the upper cover is assembled to the supporting cylinder, then the phosphorus carrier is placed on the upper cover, and the injection pipe is passed through the transition hole to place the first sealing pad at the lower end of the main body of the phosphorus carrier;

[0025] Step S2. Then, the upper protective cover is assembled with the upper cover, and the second sealing pad is placed in alignment with the loading hole;

[0026] Step S3. The second sealing pad is covered with a cover plate, the system is vacuumized through the vacuum valve, the internal air pressure is less than 100 Pa, the charging and discharging valve is connected with nitrogen or argon, then nitrogen or argon is filled into the supporting cylinder through the charging and discharging valve, the pressure reaches one atmosphere, until the cover plate relaxes, then the cover plate is removed, the funnel is placed on the second sealing pad, and it is passed through the loading hole until it is inserted into the feeding hole;

[0027] Step S4. Then, the rotating motor is started to rotate the whole system, the red phosphorus is fed into the funnel, and the gas discharge flow in the vacuum valve is adjusted according to the falling condition of the red phosphorus, so that the red phosphorus slowly falls into the feeding hole under the reverse air flow;

[0028] Step S5. After the red phosphorus is stuck during the feeding process, the system is stopped by stepping on the clutch, the gas charging is stopped, the funnel is cleaned, and then the above steps are repeated to continue loading the red phosphorus;

[0029] Step S6. When the red phosphorus reaches the required amount, the loading is stopped, and the rotating motor is stopped;

[0030] Step S7. Then, the nitrogen or argon filling into the system is stopped until the system is balanced with the external air pressure through the funnel, the funnel, the second sealing pad and the upper protective cover are removed;

[0031] Step S8. Then, the cap is covered on the feeding hole, the vacuum valve is opened to vacuumize the system, and then the cap is welded on the phosphorus carrier by using a welding gun. During the welding process, the motor is started to rotate the welding seam, and the system is stopped by stepping on the clutch when problems occur during the welding process, the process is paused, after the welding is completed, until the value of the vacuum gauge reaches < 50 Pa;

[0032] Step S9. The vacuum system is closed, after the phosphorus carrier is cooled to room temperature, the charging and discharging valve is opened, the internal pressure reaches one atmosphere, and the phosphorus carrier is taken out.

[0033] (Three) beneficial effects

[0034] The present application provides a filling and sealing device for a phosphorus carrier for injection synthesis. It has the following beneficial effects:

[0035] 1. This invention provides a filling and sealing device for a phosphorus carrier for injection synthesis. The device is filled under inert gas protection and sealed at high temperature in a vacuum environment. The sealing degree can be monitored in real time, which can effectively avoid phosphorus combustion and is safer and more reliable.

[0036] 2. This invention provides a filling and sealing device for a phosphorus carrier for injection synthesis. The process is safe, reliable, highly automated, and environmentally friendly. Attached Figure Description

[0037] Fig. 1 This is a schematic diagram of the high-temperature sealing structure of the phosphorus carrier of the present invention;

[0038] Fig. 2 This is a schematic diagram of phosphorus loading in the phosphorus carrier of the present invention.

[0039] The components include: 1. Support cylinder; 2. Top cover; 3. First sealing gasket; 4. Phosphorus carrier; 5. Red phosphorus; 6. Injection pipe; 7. Sealing cap; 8. Welding torch; 9. Vacuum valve; 10. Inflation / expansion valve; 11. Clutch; 12. Rotary motor; 13. Upper protective cover; 14. Funnel; 15. Second sealing gasket; 16. Sealing ring; 17. Transition hole; 18. Loading hole; 19. Feeding hole; 20. Vacuum gauge. Detailed Implementation

[0040] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0041] Example:

[0042] like Figs. 1-2 As shown, this embodiment of the invention provides a filling and sealing device for a phosphorus carrier for injection synthesis, including a support cylinder 1, a rotating motor 12 is provided at the lower end of the support cylinder 1, a clutch 11 is provided between the support cylinder 1 and the rotating motor 12, and a vacuum valve 9 is provided on one side wall of the support cylinder 1.

[0043] The upper end of the support cylinder 1 is provided with an upper cover 2, and the upper end of the upper cover 2 is provided with an upper protective cover 13. Both sides of the upper cover 2 are provided with sealing grooves, and sealing rings 16 are provided inside the sealing grooves. The lower end of the upper protective cover 13 and the upper end of the support cylinder 1 are provided with sealing grooves. The size and position of the sealing grooves on the upper protective cover 13 and the support cylinder 1 are the same as the sealing grooves on both sides of the upper cover 2. A loading hole 18 is provided at the top center of the upper protective cover 13.

[0044] The upper end of the upper cover 2 is provided with a phosphorus carrier 4, the lower end of the phosphorus carrier 4 is provided with an injection pipe 6, the upper end of the phosphorus carrier 4 is provided with a feeding hole 19, the inside of the loading hole 18 is provided with a funnel 14, and the lower end of the funnel 14 extends into the inside of the feeding hole 19.

[0045] Through the above technical scheme, the support cylinder 1, the upper cover 2 and the upper protective cover 13 can be effectively sealed, so that they can be filled under the protection of inert gas, sealed at high temperature in a vacuum environment, the phosphorus carrier 4 can be conveniently installed, the sealing degree of the sealing process can be monitored in real time, and the burning of phosphorus can be effectively avoided, which is safer and more reliable.

[0046] The lower end and the upper end of the vacuum valve 9 are respectively provided with a gas charging and discharging valve 10 and a vacuum gauge 20, the end of the vacuum gauge 20 extends into the inside of the support cylinder 1, the inside of the support cylinder 1 and the inside of the phosphorus carrier 4 can be conveniently charged and discharged through the gas charging and discharging valve 10, and the air pressure value in the inside of the support cylinder 1 can be monitored in real time through the vacuum gauge 20.

[0047] The middle part of the upper cover 2 is provided with a transition hole 17, and the lower end of the injection pipe 6 penetrates the inside of the transition hole 17, so that the injection pipe 6 penetrates the inside of the transition hole 17, and the discharging operation is facilitated.

[0048] The first sealing gasket 3 is arranged between the upper cover 2 and the phosphorus carrier 4, and the upper cover 2 and the phosphorus carrier 4 are effectively sealed through the first sealing gasket 3.

[0049] The second sealing gasket 15 is arranged between the funnel 14 and the upper protective cover 13, and the funnel 14 and the upper protective cover 13 are effectively sealed through the second sealing gasket 15.

[0050] The upper end of the phosphorus carrier 4 can also be welded and connected to the cap 7 through the welding gun 8, the cap 7 is sealed between the feeding hole 19 of the phosphorus carrier 4, the cap 7 is welded on the phosphorus carrier 4 by using the welding gun 8, in the welding process, the motor 12 is started, so that the welding seam rotates with the welding process, and when a problem occurs in the welding process, the system rotation is stopped by stepping on the clutch 11, so that effective welding sealing can be achieved.

[0051] The red phosphorus 5 is arranged in the inside of the phosphorus carrier 4.

[0052] The filling and sealing method of the injection synthesis phosphorus carrier comprises the following processes:

[0053] In step S1, the upper cover 2 is first assembled to the support cylinder 1, then the phosphorus carrier 4 is placed on the upper cover 2, the injection pipe 6 penetrates the transition hole 17, and the first sealing gasket 3 is placed at the lower end of the main body of the phosphorus carrier 4.

[0054] Step S2. Then the upper protection cover 13 is assembled with the upper cover 2, and the second sealing gasket 15 is placed in alignment with the loading hole 18;

[0055] Step S3. The second sealing gasket 15 is covered with a cover plate, the system is vacuumized through the vacuum valve 9, the internal pressure is < 100 Pa, the gas charging valve 10 is connected with nitrogen or argon, and then nitrogen or argon is filled into the support cylinder 1 through the gas charging valve 10, the pressure reaches one atmosphere, until the cover plate relaxes, then the cover plate is removed, the funnel 14 is placed on the second sealing gasket 15, and it is passed through the loading hole 18 until it is inserted into the feeding hole 19;

[0056] Step S4. Then the rotating motor 12 is started to make the whole system rotate, the red phosphorus 5 is fed into the funnel 14, and the gas discharge flow in the vacuum valve 9 is adjusted according to the falling condition of the red phosphorus 5, so that the red phosphorus 5 slowly falls to the feeding hole 19 under the reverse gas flow;

[0057] Step S5. After the red phosphorus 5 is stuck during the feeding process, the system rotation is stopped by stepping on the clutch 11, the gas charging is stopped, the funnel 14 is cleaned, and then the above steps are repeated to continue loading the red phosphorus 5;

[0058] Step S6. When the loading of the red phosphorus 5 reaches the required amount, the loading is stopped, and the rotating motor 12 is stopped;

[0059] Step S7. Then the nitrogen or argon filling into the system is stopped until the system is balanced with the external pressure through the funnel 14, the funnel 14, the second sealing gasket 15 and the upper protection cover 13 are removed;

[0060] Step S8. Then the cap 7 is covered on the feeding hole 19, the system is vacuumized by opening the vacuum valve 9, and then the cap 7 is welded on the phosphorus carrier 4 by using the welding gun 8. During the welding process, the motor 12 is started to make the welding seam rotate with the welding process. If a problem occurs during the welding process, the system rotation is stopped by stepping on the clutch 11, the process is paused, and after the welding is completed, the value of the vacuum gauge 20 reaches < 50 Pa;

[0061] Step S9. The vacuum system is closed, the phosphorus carrier 4 is cooled to room temperature, the gas charging valve 10 is opened, the internal pressure reaches one atmosphere, and the phosphorus carrier 4 is taken out.

[0062] Although the embodiments of the present application have been shown and described, it is to be understood that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of the present application, and the scope of the present application is defined by the appended claims and their equivalents.

Claims

1. A filling and sealing device for a phosphorus carrier for injection synthesis, comprising a support cylinder (1), characterized in that: A rotating motor (12) is provided at the lower end of the support cylinder (1), a clutch (11) is provided between the support cylinder (1) and the rotating motor (12), and a vacuum valve (9) is provided on one side wall of the support cylinder (1). The upper end of the support cylinder (1) is provided with an upper cover (2), and the upper end of the upper cover (2) is provided with an upper protective cover (13). Both sides of the upper cover (2) are provided with sealing grooves, and sealing rings (16) are provided inside the sealing grooves. The lower end of the upper protective cover (13) and the upper end of the support cylinder (1) are provided with sealing grooves. The size and position of the sealing grooves on the upper protective cover (13) and the support cylinder (1) are the same as the sealing grooves on both sides of the upper cover (2). The upper protective cover (13) is provided with a loading hole (18) at the top center. A phosphorus carrier (4) is provided at the middle of the upper end of the cover (2), and an injection pipe (6) is provided at the middle of the lower end of the phosphorus carrier (4). A feeding hole (19) is opened at the upper end of the phosphorus carrier (4), and a funnel (14) is provided inside the loading hole (18). The lower end of the funnel (14) extends into the inside of the feeding hole (19). The lower end and upper end of the vacuum valve (9) are respectively provided with a filling and discharging valve (10) and a vacuum gauge (20), and the end of the vacuum gauge (20) extends into the interior of the support cylinder (1); The upper cover (2) has a transition hole (17) in the middle, and the lower end of the injection tube (6) passes through the interior of the transition hole (17); A first sealing gasket (3) is provided between the top cover (2) and the phosphorus carrier (4); A second sealing gasket (15) is provided between the funnel (14) and the upper protective cover (13).

2. The filling and sealing device for a phosphorus carrier for injection synthesis according to claim 1, characterized in that: The upper end of the phosphorus carrier (4) is welded to the cap (7) by a welding gun (8), and the cap (7) is sealed with the feeding hole (19) on the phosphorus carrier (4).

3. The filling and sealing device for a phosphorus carrier for injection synthesis according to claim 1, characterized in that: The phosphorus carrier (4) is filled with red phosphorus (5).

4. A method for filling and sealing a phosphorus carrier for injection synthesis according to any one of claims 1-3, characterized in that, Includes the following processes: Step S1. First, assemble the top cover (2) onto the support cylinder (1), then place the phosphorus carrier (4) onto the top cover (2) and make the injection pipe (6) pass through the transition hole (17), and place the first sealing gasket (3) at the lower end of the body of the phosphorus carrier (4). Step S2. Then assemble the upper protective cover (13) with the upper cover (2) and align the second sealing gasket (15) with the loading hole (18); Step S3. Cover the second sealing gasket (15) with a cover plate, evacuate the system through the vacuum valve (9) to make the internal gas pressure <100Pa, connect the charging and discharging valve (10) to the nitrogen or argon gas, and then charge the support cylinder (1) with nitrogen or argon gas through the charging and discharging valve (10) until the pressure reaches one atmosphere until the cover plate loosens, then remove the cover plate, place the funnel (14) on the second sealing gasket (15) and pass it through the loading hole (18) until it is inserted into the feeding hole (19); Step S4. Then start the rotating motor (12) to make the whole system rotate, and put the red phosphorus (5) into the funnel (14) through the funnel (14). Adjust the gas flow rate in the vacuum valve (9) according to the falling situation of the red phosphorus (5) so that the red phosphorus (5) slowly falls into the feeding hole (19) under the reverse airflow. Step S5. If red phosphorus (5) gets stuck during the feeding process, stop the system rotation by stepping on the clutch (11), stop the air supply, clean the funnel (14), and then continue to repeat the above steps to continue loading red phosphorus (5). Step S6. When the required amount of red phosphorus (5) has been loaded, stop loading and stop rotating the motor (12). Step S7. Then stop filling the system with nitrogen or argon until the system is balanced with the external pressure through the funnel (14), and remove the funnel (14), the second sealing gasket (15) and the upper protective cover (13). Step S8. Then, cover the cap (7) on the feeding hole (19), open the vacuum valve (9) to evacuate the system, and then use the welding gun (8) to weld the cap (7) onto the phosphorus carrier (4). During the welding process, start the motor (12) so that the weld rotates with the welding process. If a problem occurs during the welding process, stop the system rotation by stepping on the clutch (11) and pause the process. After the welding is completed, continue until the value of the vacuum gauge (20) reaches <50Pa. Step S9. Turn off the vacuum system. After the phosphorus carrier (4) cools down to room temperature, open the charging and discharging valve (10) to make the internal pressure reach one atmosphere and remove the phosphorus carrier (4).

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