A multi-element composite carbide coating

Abstract

A kind of multi-element composite carbide coating, the chemical component includes carbide-forming element, non-carbide-forming element and non-metallic element, the carbide-forming element is Cr, W and Mo element, the non-carbide-forming element is Cu element, the non-metallic element is Si and C;When preparing, bearing steel matrix is washed first, then carries out magnetron sputtering, to obtain multi-element composite carbide coating on the surface of bearing steel matrix;The target material of the magnetron sputtering is integrated co-sputtering target, integrated co-sputtering target is beneficial to the composition and organization in uniform coating, the integrated co-sputtering target includes Cr target, W target, Cu target, Si target and Mo target;The reaction gas of the magnetron sputtering is the mixed gas of protective gas and gaseous hydrocarbon, for carrying out gas deposition.The multi-element composite carbide coating prepared in the application has high hardness, high wear resistance, high toughness, low friction coefficient, low stress and high coating-substrate bonding force.

Description

Technical Field

[0001] This invention relates to the field of material surface coating technology, and in particular to a multi-component composite carbide coating. Background Technology

[0002] Metal carbides combine the properties of both metallic and ceramic materials, exhibiting metallic luster and electrical conductivity, as well as high melting points, high hardness, and wear resistance, thus finding wide applications in various fields. For example, chromium carbide, as the metal carbide with the strongest oxidation resistance, possesses high hardness at high temperatures; tungsten carbide films prepared by magnetron sputtering have a hardness as high as 38 GPa, showing broad application prospects in anti-wear coatings for bearings and cemented carbide cutting tools under high temperature and high load conditions.

[0003] However, metal carbides are brittle and lack toughness. During magnetron sputtering, impurity gases in the cavity can easily penetrate into the interior of the film grains or at the boundaries. Working gases can also enter the film layer due to collisions and other factors, forming Schönette defects or interstitial atoms, thereby increasing the grain boundary volume. In addition, the difference in thermal expansion coefficients between the carbide film and the substrate leads to residual stress at the GPa level in the carbide film. The residual stress will gradually accumulate with the increase of film deposition thickness, which will reduce the bonding performance between the carbide film and the substrate. Because metal carbides are inherently brittle, they cannot alleviate residual stress through dislocation formation or slip, resulting in low fracture toughness of the carbide film.

[0004] Patent CN104294230A discloses a high-hardness and low-stress multi-component composite diamond-like coating and its preparation method. This patent uses copper doping, which exists in a nanocrystalline state in an amorphous carbon film. By occupying certain lattice positions, it effectively controls residual stress and improves the tribological properties of the film. In addition, as a non-carbide-forming element, copper can also control the microstructure of the film, inhibit the growth of crystalline phases, and lead to the formation of nanocrystalline and / or amorphous structures, thereby improving the ductility and toughness of the carbide film. Patent CN112993299A discloses a silicon-doped niobium carbide coating for a fuel cell metal bipolar plate and its preparation method. This method inhibits the growth of columnar grains in the coating, making the coating more compact and reducing residual stress. The aforementioned two patents prepare coatings by single-component doping or alloying. Although they can improve one or two properties of the coating, they also cause a decrease in other properties. For example, due to the low strength of copper, copper can easily reduce the overall strength of the carbide film.

[0005] In summary, reducing residual stress during thin film deposition and improving the toughness of carbides to obtain carbide films with high hardness, high wear resistance, low friction coefficient, and high toughness remains a hot topic and challenge for those skilled in the art. Summary of the Invention

[0006] The technical problem solved by the present invention is to provide a multi-component composite carbide coating to solve the problems in the background art mentioned above.

[0007] The technical problem solved by this invention is achieved by the following technical solution:

[0008] A multi-component composite carbide coating, the chemical composition of which includes carbide-forming elements, non-carbide-forming elements and non-metallic elements, wherein the carbide-forming elements are Cr, W and Mo, the non-carbide-forming elements are Cu, and the non-metallic elements are Si and C;

[0009] Furthermore, the sum of the molar numbers of Cr, W, Mo, Cu and Si elements to the molar ratio of C element is 1:1 to 2;

[0010] The molar ratio of Cr to W is 0.8–1.2:0.8–1.2;

[0011] The molar ratio of Cr to Mo is 0.8–1.2:0.8–1.2;

[0012] The molar ratio of Cr to Cu is 0.8–1.2:0.8–1.2;

[0013] The molar ratio of Cr to Si is 0.8–1.2:0.8–1.2.

[0014] In this invention, the thickness of the multi-component composite carbide coating is 0.5 to 10 μm, and the structure is amorphous.

[0015] In this invention, the multi-component composite carbide coating is applied to the surface of bearing steel.

[0016] A method for preparing a multi-component composite carbide coating is disclosed, which employs a vacuum magnetron sputtering system. The vacuum magnetron sputtering system includes a vacuum chamber, a magnetron sputtering source equipped with an integrated co-sputtering target, an ion source, and a workpiece support for supporting a bearing steel substrate. The workpiece support is installed at the center inside the vacuum chamber. The specific steps are as follows:

[0017] (1) First, polish, clean, and dry the bearing steel substrate. Then, install the dried bearing steel substrate on the workpiece support and use a molecular pump to evacuate the vacuum chamber to 2.0 × 10⁻⁶. -3 Below Pa, high-purity argon gas is introduced to maintain the pressure in the vacuum chamber; the voltage and bias of the ion beam in the ion source are set to perform plasma cleaning on the bearing steel substrate;

[0018] (2) The integrated co-sputtering targets in the magnetron sputtering source include Cr target, W target, Cu target, Si target and Mo target. The magnetron sputtering source is turned on, a protective gas is introduced into the magnetron sputtering source, and a reaction gas with a certain partial pressure ratio is introduced into the ion source. The bearing steel substrate with the bias setting is subjected to magnetron sputtering and vapor deposition.

[0019] (3) After step (2) is completed, turn off the power and wait for the temperature of the vacuum chamber to drop to room temperature. Open the vacuum chamber and take out the bearing steel substrate. The coating formed on the surface of the bearing steel substrate is the multi-component composite carbide coating.

[0020] In this invention, in step (1), the bearing steel matrix includes carbon steel, stainless steel, high-strength steel, bearing steel, titanium alloy, aluminum alloy, magnesium alloy or hard alloy.

[0021] In this invention, in step (2), the purity of the Cr target, W target, Cu target, Si target and Mo target is greater than 99.99%.

[0022] In this invention, in step (2), the sputtering power of the Cr target is 200-300W, the sputtering power of the W target is 180-280W, the sputtering power of the Cu target is 180-240W, the sputtering power of the Si target is 280-320W, and the sputtering power of the Mo target is 200-250W; the bias voltage of the bearing steel substrate is -80 to -600V.

[0023] In this invention, in step (2), the protective gas is argon, the purity of the argon is 99.99%, and the flow rate of the argon gas entering the vacuum chamber is 20-60 sccm.

[0024] In this invention, in step (2), the reaction gas is a mixture of protective gas and gaseous hydrocarbon, and the partial pressure ratio of gaseous hydrocarbon to protective gas is 2-4:6-8; the protective gas is argon, and the gaseous hydrocarbon is methane; the gas flow rate of the reaction gas is 5-60 sccm.

[0025] In this invention, in step (2), the magnetron sputtering temperature is 250-350°C and the magnetron sputtering time is 100-200 min.

[0026] In this invention, Cu, as a non-carbide-forming element, can improve the ductility, toughness, and adhesion to the substrate of the multi-component composite carbide coating; Cr, as a carbide-forming element, forms chromium carbide with strong oxidation resistance; W, as a carbide-forming element, forms tungsten carbide with high hardness and strong thermal stability; Mo, as a carbide-forming element, forms molybdenum carbide, which can reduce the friction coefficient of the multi-component composite carbide coating; elemental Si can make the multi-component composite carbide coating more compact and reduce residual stress. By adding multiple components, while reducing residual stress and enhancing coating toughness, it can also enhance coating adhesion, improve coating anti-friction and wear performance and thermal stability, making the multi-component composite carbide coating suitable for harsh application environments and expanding its application in mechanical engineering and other fields.

[0027] Beneficial effects: This invention uses elemental elements Cr, W, Cu, Si, and Mo as composite components and a mixture of protective gas and gaseous hydrocarbons as reactant gases to prepare a multi-element composite carbide coating via physical vapor deposition. Furthermore, the use of an integrated co-sputtering target during the preparation process avoids inhomogeneities in the composition and structure of the multi-element composite carbide coating caused by different sputtering thresholds and yields of different elements in the alloy target material. This prevents premature failure of the multi-element composite carbide coating during service. The multi-element composite carbide coating is suitable for surface or internal hole protection of metal mechanical parts, precision molds, precision transmission machinery, bearings, electronic products, or decorative products. Simultaneously, the preparation steps are simple and convenient, demonstrating good industrialization prospects. Detailed Implementation

[0028] To make the technical means, creative features, objectives and effects of this invention easier to understand, the invention will be further described below with reference to specific embodiments.

[0029] A multi-component composite carbide coating comprises carbide-forming elements Cr, W, and Mo, a non-carbide-forming element Cu, and non-metallic elements Si and C. The molar ratio of the sum of the molar numbers of Cr, W, Mo, Cu, and Si to C is 1:1 to 2, preferably 1:1.2 to 1.8, and more preferably 1:1.4 to 1.6. The molar ratio of Cr to W is 0.8 to 1.2:0.8 to 1.2, preferably 0.8 to 1.2:0.9 to 1.1, and more preferably 1:1. The molar ratio of Cr to Mo is 0.8–1.2:0.8–1.2, preferably 0.8–1.2:0.9–1.1, and more preferably 1:1; the molar ratio of Cr to Cu is 0.8–1.2:0.8–1.2, preferably 0.8–1.2:0.9–1.1, and more preferably 1:1; the molar ratio of Cr to Si is 0.8–1.2:0.8–1.2, preferably 0.9–1.1:0.9–1.1, and more preferably 1:1.

[0030] Example 1

[0031] A multi-component composite carbide coating is applied to the surface of bearing steel. The coating's chemical composition includes carbide-forming elements Cr, W, and Mo, non-carbide-forming element Cu, and non-metallic elements Si and C. It is prepared using a vacuum magnetron sputtering system. The vacuum magnetron sputtering system includes a vacuum chamber, a magnetron sputtering source (a co-sputtering target composed of five 1.5-inch targets), an ion source, and a workpiece holder, with the workpiece holder mounted at the center inside the vacuum chamber. The specific preparation steps are as follows:

[0032] (1) First, polish, clean, and dry the bearing steel substrate. Then, install the dried bearing steel substrate on the workpiece support and use a molecular pump to evacuate the vacuum chamber to 2.0 × 10⁻⁶. -3 Below Pa, high-purity argon gas (99.99% purity) is introduced at a flow rate of 30 sccm to maintain the vacuum chamber pressure at 5 × 10⁻⁶ Pa. -1 Pa, set the ion beam voltage to 1000V and the bias voltage to -600V, and perform plasma cleaning on the bearing steel substrate for 20 minutes;

[0033] (2) The magnetron sputtering source is loaded with five integrated 1.5-inch co-sputtering targets, namely Cr, W, Cu, Si and Mo targets. The purity of all targets is greater than 99.99%, and the corresponding sputtering powers are 250W (Cr), 200W (W), 220W (Cu), 300W (Si) and 200W (Mo). The magnetron sputtering source is turned on and argon gas is introduced into the magnetron sputtering source at a flow rate of 60 sccm. A mixture of argon and methane is introduced into the ion source at a flow rate of 20 sccm. The partial pressure ratio of methane to argon is 2:8. Magnetron sputtering and vapor deposition are performed. The bias voltage of the bearing steel substrate is set to -100V, the vapor deposition temperature is 300℃, and the vapor deposition time is 120min.

[0034] (3) After step (2) is completed, turn off the power and wait for the temperature of the vacuum chamber to drop to room temperature. Open the vacuum chamber and take out the bearing steel substrate. The coating formed on the surface of the bearing steel substrate is the multi-component composite carbide coating.

[0035] In this embodiment, the contents of Cr, W, Cu, Si, and Mo in the obtained multi-element composite carbide coating are close to equimolar ratios. The molar ratio of Cr, W, Cu, Si, and Mo is 10.1:10.4:9.6:9.2:10.1, and the molar ratio of C to the sum of the molar numbers of Cr, W, Cu, Si, and Mo is 1.1:1. The microstructure is amorphous, the coating thickness is 2.35 μm, the hardness is 25.3 GPa (measured using an FM-700 micro Vickers hardness tester, 0.1 N load, Knoop indenter, holding time 10 s), and the residual stress is 0.43 GPa (measured using a ZeGage micro hardness tester). The 3D surface profilometer (calculated according to the Stoney formula) showed that the coating-substrate adhesion was 72N (using a TeerST2200 scratch tester with a load ranging from 20N to 120N and a sliding speed of 10mm / min), and the coefficient of friction was 0.13 (using a ball-and-disc friction and wear tester with a friction pair of alumina ceramic balls with a diameter of 6mm, a track diameter of 12mm, a sliding speed of 0.2m / s, a load of 3N, and a sliding distance of 400m).

[0036] Example 2

[0037] A multi-component composite carbide coating is applied to the surface of bearing steel. The coating's chemical composition includes carbide-forming elements Cr, W, and Mo, non-carbide-forming element Cu, and non-metallic elements Si and C. It is prepared using a vacuum magnetron sputtering system. The vacuum magnetron sputtering system includes a vacuum chamber, a magnetron sputtering source (a co-sputtering target composed of five 1.5-inch targets), an ion source, and a workpiece holder, with the workpiece holder mounted at the center inside the vacuum chamber. The specific preparation steps are as follows:

[0038] (1) First, polish, clean, and dry the bearing steel substrate. Then, install the dried bearing steel substrate on the workpiece support and use a molecular pump to evacuate the vacuum chamber to 2.0 × 10⁻⁶. -3 Below Pa, high-purity argon gas (99.99% purity) is introduced at a flow rate of 30 sccm to maintain the vacuum chamber pressure at 5 × 10⁻⁶ Pa. -1 Pa, set the voltage of the ion beam to 1000V and the bias voltage to -600V, and perform plasma cleaning on the bearing steel for 20 minutes;

[0039] (2) The magnetron sputtering source is loaded with five integrated 1.5-inch co-sputtering targets, namely Cr, W, Cu, Si and Mo targets. The purity of all targets is greater than 99.99%, and the corresponding sputtering powers are 280W (Cr), 220W (W), 240W (Cu), 310W (Si) and 220W (Mo), respectively. The magnetron sputtering source is turned on and argon gas is introduced into the magnetron sputtering source at a flow rate of 60 sccm. A mixture of argon and methane is introduced into the ion source at a flow rate of 30 sccm. The partial pressure ratio of methane to argon is 2:8. Magnetron sputtering and vapor deposition are performed. The bias voltage of the bearing steel substrate is set to -120V, the vapor deposition temperature is 300℃, and the vapor deposition time is 120min.

[0040] (3) After step (2) is completed, turn off the power and wait for the temperature of the vacuum chamber to drop to room temperature. Open the vacuum chamber and take out the bearing steel substrate. The coating formed on the surface of the bearing steel substrate is the multi-component composite carbide coating.

[0041] In this embodiment, the contents of Cr, W, Cu, Si, and Mo in the obtained multi-element composite carbide coating are close to equimolar ratios. The molar ratio of Cr, W, Cu, Si, and Mo is 10.2:10.5:9.7:9.5:10.3, and the molar ratio of C to the sum of the molar numbers of Cr, W, Cu, Si, and Mo is 1.2:1. The microstructure is amorphous, the coating thickness is 2.57 μm, the hardness is 26.8 GPa (measured using an FM-700 micro Vickers hardness tester, 0.1 N load, Knoop indenter, and a holding time of 10 s), the residual stress is 0.51 GPa (calculated using a ZeGage 3D surface profilometer according to the Stoney formula), and the coating-substrate adhesion is 67 N (measured using a TeerST...). The 2200 scratch tester has a load range of 20N to 120N, a sliding speed of 10mm / min, and a friction coefficient of 0.11 (using a ball-and-disc friction and wear tester, with a friction pair of alumina ceramic balls with a diameter of 6mm, a track diameter of 12mm, a sliding speed of 0.2m / s, a load of 3N, and a sliding distance of 400m).

[0042] Example 3

[0043] A multi-component composite carbide coating is applied to the surface of bearing steel. The coating's chemical composition includes carbide-forming elements Cr, W, and Mo, non-carbide-forming element Cu, and non-metallic elements Si and C. It is prepared using a vacuum magnetron sputtering system. The vacuum magnetron sputtering system includes a vacuum chamber, a magnetron sputtering source (a co-sputtering target composed of five 1.5-inch targets), an ion source, and a workpiece holder, with the workpiece holder mounted at the center inside the vacuum chamber. The specific steps include:

[0044] (1) First, polish, clean, and dry the bearing steel substrate. Then, install the dried bearing steel substrate on the workpiece support and use a molecular pump to evacuate the vacuum chamber to 2.0 × 10⁻⁶. -3 Below Pa, high-purity argon gas (99.99% purity) is introduced at a flow rate of 30 sccm to maintain the pressure in the vacuum chamber at 5 × 10⁻⁶ Pa. -1 Pa, set the voltage of the ion beam to 1000V and the bias voltage to -600V, and perform plasma cleaning on the bearing steel for 20 minutes;

[0045] (2) The magnetron sputtering source is loaded with five integrated 1.5-inch co-sputtering targets, namely Cr, W, Cu, Si and Mo targets. The purity of all targets is greater than 99.99%, and the corresponding sputtering powers are 220W (Cr), 180W (W), 240W (Cu), 280W (Si) and 240W (Mo), respectively. The magnetron sputtering source is turned on and argon gas is introduced into the magnetron sputtering source at a flow rate of 60 sccm. A mixture of argon and methane is introduced into the ion source at a flow rate of 30 sccm. The partial pressure ratio of methane to argon is 2:8. Magnetron sputtering and vapor deposition are performed. The bias voltage of the bearing steel substrate is set to -120V, the vapor deposition temperature is 300℃, and the vapor deposition time is 120min.

[0046] (3) After step (2) is completed, turn off the power and wait for the temperature of the vacuum chamber to drop to room temperature. Open the vacuum chamber and take out the bearing steel substrate. The coating formed on the surface of the bearing steel substrate is the multi-component composite carbide coating.

[0047] In this embodiment, the contents of Cr, W, Cu, Si, and Mo in the obtained multi-element composite carbide coating are close to equimolar ratios, with a molar ratio of 9.8:10.2:9.7:8.8:10.5. The molar ratio of C to the sum of the molar numbers of Cr, W, Cu, Si, and Mo is 1.2:1. The microstructure is amorphous, the coating thickness is 2.43 μm, the hardness is 24.1 GPa (measured using an FM-700 micro Vickers hardness tester, 0.1 N load, Knoop indenter, and a holding time of 10 s), the residual stress is 0.63 GPa (calculated using a ZeGage 3D surface profilometer according to the Stoney formula), and the coating-substrate adhesion is 75 N (measured using a TeerST...). The 2200 scratch tester has a load range of 20N to 120N, a sliding speed of 10mm / min, and a friction coefficient of 0.12 (using a ball-and-disc friction and wear tester, with a friction pair of alumina ceramic balls with a diameter of 6mm, a track diameter of 12mm, a sliding speed of 0.2m / s, a load of 3N, and a sliding distance of 400m).

[0048] The residual stress of the multi-component composite carbide coatings prepared in Examples 1-3 was tested using a ZeGage 3D surface profilometer. The test method was as follows: the profilometer was used to scan the bearing steel substrate before and after coating preparation, and the residual stress was calculated by the change in surface curvature before and after coating preparation. The results are shown above. The specific calculation process of residual stress was carried out according to the Stoney formula.

[0049]

[0050] Among them, E s V is the elastic modulus of the substrate. s t is the Poisson's ratio of the substrate. s t represents the thickness of the substrate. f R is the thickness of the coating, and R is the radius of curvature of the substrate.

[0051] In embodiments 1-3 above, the bearing steel substrate includes carbon steel, stainless steel, high-strength steel, bearing steel, titanium alloy, aluminum alloy, magnesium alloy, or hard alloy; the dimensions of the bearing steel substrate are preferably determined according to the requirements of the plated parts; the voltage of the plasma beam used for plasma cleaning is 900-1200V, preferably 1000V; the gas pressure of the vacuum chamber is lower than 1.0×10⁻⁶. - 3 Pa ~ 5 × 10 -1 Pa, further preferably below 2.0 × 10 -3 Pa or 1.0 × 10 -3Pa; the protective gas introduced into the vacuum chamber is preferably argon; the purity of the argon is preferably 99.99%; the flow rate of the argon introduced into the vacuum chamber is 20-60 sccm, preferably 30 sccm; the reaction gas introduced into the ion source is a mixture of protective gas and gaseous hydrocarbons, the protective gas is preferably argon, the partial pressure ratio of the gaseous hydrocarbons and protective gas in the reaction gas is preferably 2-4:6-8, more preferably 2.5-3.5:6.5-7.5, and even more preferably 3:7; the gaseous hydrocarbons are preferably methane; the flow rate of the reaction gas is 5-60 sccm, preferably 15-40 sccm, and even more preferably 25-30 sccm; the magnetron sputtering temperature is 250-350℃, preferably 270-320℃; the magnetron sputtering time The sputtering time is 100–200 min, preferably 130–170 min; the purity of the Cr, W, Cu, Si, and Mo targets is all greater than 99.99%, preferably greater than 99.999%; the sputtering power of the Cr target is 200–300 W, more preferably 230–270 W; the sputtering power of the W target is 180–280 W, more preferably 200–250 W; the sputtering power of the Cu target is 180–240 W, preferably 200–220 W; the sputtering power of the Si target is 280–320 W, preferably 290–310 W; the sputtering power of the Mo target is 200–250 W, preferably 220–240 W; the bias voltage of the bearing steel substrate is -80 to -600 V, preferably -200 to -400 V.

[0052] In Examples 1-3 above, by adding non-carbide-forming elements (Cu), together with carbide-forming elements (Cr, W, and Mo) and non-metallic elements (Si and C), the microstructure and properties of the multi-component composite carbide coating are regulated. The residual stress of the carbide film is regulated by the high entropy effect (thermodynamics), the hysteresis diffusion effect (kinetics), the lattice distortion effect (structure), and the cocktail effect (performance). This prepares a multi-component composite carbide coating with high hardness, high wear resistance, high toughness, low coefficient of friction, low stress, and high coating-substrate adhesion, exhibiting excellent comprehensive performance. It is suitable for harsh application environments, especially for surface or internal hole protection of metal mechanical parts and bearings.

[0053] Although the above embodiments have provided a detailed description of the present invention, they are only some embodiments of the present invention, and not all embodiments. Other embodiments can be obtained based on these embodiments without creative effort, and these embodiments all fall within the protection scope of the present invention.

Claims

1. A multi-component composite carbide coating, characterized in that, The coating's chemical composition includes carbide-forming elements, non-carbide-forming elements, and non-metallic elements. The carbide-forming elements are Cr, W, and Mo; the non-carbide-forming element is Cu; and the non-metallic elements are Si and C. The molar ratio of the sum of the moles of Cr, W, Mo, Cu, and Si to C is 1:1~2, and the molar ratio of Cr to Si is 0.8~1.2:0.8~1.

2. The above-mentioned multi-component composite carbide coating was prepared using a vacuum magnetron sputtering system. The vacuum magnetron sputtering system includes a vacuum chamber, a magnetron sputtering source equipped with an integrated co-sputtering target, an ion source, and a workpiece support for supporting the bearing steel substrate. The workpiece support is installed at the center inside the vacuum chamber. The specific steps are as follows: (1) First, polish, clean, and dry the bearing steel substrate. Then, install the dried bearing steel substrate on the workpiece support and use a molecular pump to evacuate the vacuum chamber to 2.0 × 10⁻⁶. -3 Below Pa, high-purity argon gas is introduced to maintain the pressure in the vacuum chamber; the voltage and bias of the ion beam in the ion source are set to perform plasma cleaning on the bearing steel substrate; (2) The integrated co-sputtering targets in the magnetron sputtering source include Cr target, W target, Cu target, Si target and Mo target. The magnetron sputtering source is turned on, a protective gas is introduced into the magnetron sputtering source, and a reaction gas with a certain partial pressure ratio is introduced into the ion source. The bearing steel substrate with the bias setting is subjected to magnetron sputtering and vapor deposition. The purity of the Cr, W, Cu, Si, and Mo targets is all greater than 99.99%, and the sputtering power of the Cr target is 200~300 W, the sputtering power of the W target is 180~280 W, the sputtering power of the Cu target is 180~240 W, the sputtering power of the Si target is 280~320 W, and the sputtering power of the Mo target is 200~250 W; the bias voltage of the bearing steel substrate is -80~-600 V; (3) After step (2) is completed, turn off the power and wait for the temperature of the vacuum chamber to drop to room temperature. Open the vacuum chamber and take out the bearing steel substrate. The coating formed on the surface of the bearing steel substrate is the multi-component composite carbide coating.

2. The multi-component composite carbide coating according to claim 1, characterized in that, The molar ratio of Cr to W is 0.8~1.2:0.8~1.

2.

3. The multi-component composite carbide coating according to claim 1, characterized in that, The molar ratio of Cr to Mo is 0.8~1.2:0.8~1.

2.

4. The multi-component composite carbide coating according to claim 1, characterized in that, The molar ratio of Cr to Cu is 0.8~1.2:0.8~1.

2.

5. The multi-component composite carbide coating according to claim 1, characterized in that, The thickness of the multi-component composite carbide coating is 0.5~10μm, and the microstructure is amorphous.

6. The multi-component composite carbide coating according to claim 1, characterized in that, In step (1), the bearing steel matrix includes carbon steel, stainless steel, high-strength steel, bearing steel, titanium alloy, aluminum alloy, magnesium alloy or hard alloy.

7. The multi-component composite carbide coating according to claim 1, characterized in that, In step (2), the protective gas is argon, the purity of the argon is 99.99%, and the flow rate of the argon gas entering the vacuum chamber is 20~60 sccm.

8. The multi-component composite carbide coating according to claim 1, characterized in that, In step (2), the reaction gas is a mixture of protective gas and gaseous hydrocarbon, and the partial pressure ratio of gaseous hydrocarbon to protective gas is 2~4:6~8; the protective gas is argon, and the gaseous hydrocarbon is methane; the gas flow rate of the reaction gas is 5~60 sccm.

9. A multi-component composite carbide coating according to claim 1, characterized in that, In step (2), the magnetron sputtering temperature is 250~350℃ and the magnetron sputtering time is 100~200 min.

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