Method and device for ultrafast laser breakpoint welding of glass

Abstract

The present invention provides a method and device for ultrafast laser breakpoint welding of glass, which belongs to the field of laser precision manufacturing. The method specifically comprises: filling the area of ​​the glass to be welded with a straight line or curve, and performing point truncation on the filling line to form a scanning path consisting of a preset number of breakpoints and preset spatial interval points. Finally, an ultrafast laser is used to irradiate each breakpoint in sequence along the path for a predetermined time, thereby forming a welding modification zone with controllable spatial intervals and controllable axial and longitudinal sizes, thereby achieving uniform welding of the glass. The present invention can effectively avoid the phenomenon of changing any process parameters, which causes the welding modification zone and the interval to change at the same time, and at the same time suppresses the phenomenon of the welding modification zone shifting in the laser scanning direction or the sample movement direction, avoiding the problem of uneven stress distribution in the weld caused by overlapping weld structures, thereby improving welding efficiency and welding quality, and greatly increasing the welding focus tolerance to achieve high-strength, low-leakage glass welding.

Description

Technical Field

[0001] The present invention belongs to the field of laser precision manufacturing, and more specifically, relates to a method and device for ultrafast laser breakpoint welding of glass. Background Art

[0002] Glass-welded enclosures can be used in a variety of structures, including microfluidics, MEMS chips, and atomic cavities. Currently, the commonly used methods for glass material packaging include chemical bonding, anodic bonding, optical bonding, and glass welding. Chemical bonding is not only prone to deformation and aging, but also releases gas in a vacuum, and can only be used for the preparation of temporary devices. Anodic bonding is an electrochemical technology. Optical bonding forms a bonding effect through the molecular attraction on the surface of the material. Although it can achieve higher manufacturing precision, it has a high leakage rate and poor strength. It is easy to fall off due to temperature differences and vibrations, and cannot be used in the manufacture of permanent devices. The accuracy of glass welding technology is extremely poor, and the residual stress caused by local high temperature will destroy the surface accuracy of the glass, and the use of the rear end face after welding cannot be guaranteed.

[0003] Ultrafast lasers, with their narrow pulses, high peak power, and minimal thermal impact from material interactions, have become a promising tool for precision glass processing. Over the past few decades, the availability and reliability of ultrashort-pulse laser systems have steadily improved. The extremely short pulse durations of laser sources allow for nonlinear absorption processes that fundamentally differ from conventional absorption processes. Because the absorption process of the laser pulse is confined to the focal volume, the energy deposition is highly localized and directional. This makes ultrashort-pulse laser systems ideal for localized, in-situ modification welding of glass.

[0004] In the prior art, CN115647589A discloses a method for laser welding glass. This method involves dripping pure water between two pieces of glass, using a clamp to vertically clamp the two pieces of glass so that the gap between the two pieces of glass is less than 200nm, and then removing the clamp to weld the two pieces of glass. This patented technology can achieve high-quality welds on ordinary commercial float glass sheets with higher efficiency, lower cost, and fewer restrictions. CN113292233A discloses an apparatus and method for femtosecond laser welding of glass. This method drips a small amount of liquid between two pieces of glass, then fills the gap between the two pieces of glass to be welded with the liquid. Atmospheric pressure reduces the gap, and a femtosecond laser beam with a high single pulse energy is focused on the contact surface of the two pieces of glass to be welded. A scanning galvanometer is used to scan the laser focus at high speed along a closed path, forming a translucent weld at the contact point between the two pieces of glass. Finally, a femtosecond laser beam with a lower single pulse energy is slowly scanned along the translucent weld to achieve a final, more secure weld. This patent uses a femtosecond laser to achieve sealed welding of glass with large gaps, featuring fast welding speed, high welding strength, stable and reliable process, and a wide range of applications. CN108609841B proposes a welding method suitable for glass. This method uses an ultrafast laser to rapidly scan and oscillate between two pieces of glass. The ultrafast pulsed laser beam repeatedly scans at a predetermined scanning interval and scanning trajectory to achieve welding of two samples. This technology does not require clamping and can achieve successful welding of 10μm gaps. Compared to other ultrafast laser glass welding technologies, this patented technology is simple, does not require clamping, and does not require the addition of an intermediate layer, making it meaningful for engineering applications.

[0005] The aforementioned methods address the gap-filling problem of ultrafast laser welding by employing fixtures, adding intermediate layers, or rapidly scanning oscillations to fill the gap. However, the spacing and morphology of the modified zones in ultrafast laser welding of transparent materials are determined by both the laser parameters and the scanning parameters. Changing any one of these parameters simultaneously alters the spacing and morphology of the modified zones, significantly complicating the optimization of the welding process. Furthermore, the welding process is accompanied by irregular formation of the molten volume, leading to varying overlaps and the formation of a disordered stripe structure at both the height and starting position. Plasmon shielding also causes the weld zone to shift in the direction of beam movement or sample movement, resulting in an irregular weld structure with uneven stress distribution. In contrast, welds with more regular and controllable modified zones exhibit effective characteristics in terms of stress distribution, thereby improving the fracture strength of the welded specimen. Summary of the Invention

[0006] In view of the defects of the prior art, the purpose of the present invention is to provide a method and device for ultrafast laser breakpoint welding of glass, aiming to solve the problem of irregular weld structure in the existing ultrafast laser welding of glass.

[0007] To achieve the above objectives, according to one aspect of the present invention, a method for ultrafast laser breakpoint welding of glass is provided. Specifically, the method comprises: filling the area of ​​the glass to be welded with a straight line or curve, then truncating the filling line to form a scanning path consisting of a preset number of breakpoints, and finally using an ultrafast laser to irradiate each breakpoint in sequence along the scanning path to form spaced welding modification zones, thereby achieving uniform welding of the glass.

[0008] As a further preference, the contact mode of the glass is optical contact, fixture clamping contact, material filling contact or natural overlap.

[0009] As a further preferred embodiment, the laser focus position is dynamically adjusted during the irradiation of a single breakpoint to achieve real-time adjustment of the nonlinear focus and the welding modified zone.

[0010] As a further preference, the wavelength of the ultrafast laser is 200 nm to 1200 nm, and the pulse width of the ultrafast laser is in the order of picoseconds or femtoseconds.

[0011] As a further preferred embodiment, the time Δt2 used for jumping between adjacent breakpoints and the welding speed v are calculated using the following formulas:

[0012]

[0013]

[0014] Where Δs is the interval between adjacent breakpoints, v jump is the jump speed between adjacent breakpoints, Δt1 is the light emission time of a single breakpoint, and Δt2 is the time it takes for the laser to jump between adjacent breakpoints.

[0015] As a further preferred embodiment, at each breakpoint, the time interval τ between adjacent pulses and the number of light pulses N are calculated using the following formulas:

[0016]

[0017] N=f×Δt1

[0018] Where f is the repetition frequency of ultrafast laser light, N is the number of ultrafast laser light pulses, and Δt1 is the light output time of a single breakpoint.

[0019] According to another aspect of the present invention, a device for implementing the above method is provided, which includes a sample stage, a laser processing unit and a control unit, wherein: the sample stage is used to place the glass to be processed and drive it to move along the X-axis, Y-axis or Z-axis to adjust the irradiation position of the laser focus, thereby realizing the switching of irradiation breakpoints and real-time adjustment of the deposition energy of the welding modification zone; the laser processing unit is used to provide ultrafast laser to irradiate each breakpoint and form spaced welding modification zones, thereby realizing uniform welding of the glass; the control unit is used to form a scanning path consisting of a preset number of breakpoints and control the sample stage and the laser processing unit.

[0020] As a further preferred embodiment, the laser processing unit includes an ultrafast laser, a beam shaping module, a reflector group and a beam scanning and focusing module arranged in sequence along the propagation direction of the light, which is used to focus the ultrafast laser scanning on the area of ​​the glass to be welded. At the same time, the laser processing unit also includes a Z-axis moving module connected to the beam scanning and focusing module, which is used to drive the beam scanning and focusing module to move along the Z-axis direction to adjust the position of the laser focus in real time, thereby realizing real-time adjustment of the deposited energy in the welding modified zone.

[0021] As a further preferred embodiment, the laser processing unit further includes a dynamic focusing module, which is arranged between the reflector group and the beam scanning focusing module, and is used to adjust the position of the laser focus in real time, thereby achieving real-time adjustment of the deposited energy in the welding modified zone.

[0022] As a further preference, the wavelength of the ultrafast laser is 200 nm to 1200 nm, and the pulse width of the ultrafast laser is in the order of picoseconds or femtoseconds.

[0023] In general, the above technical solutions conceived by the present invention have the following beneficial effects compared with the prior art:

[0024] 1. This invention proposes using ultrafast lasers to irradiate breakpoints to stimulate weld modification zones, generating gentle temperature and stress fields that reach the glass's welding temperature point, thereby welding the glass. Because the weld modification zones are spaced apart between adjacent breakpoints, overlapping weld structures, which can lead to uneven weld stress distribution, can be avoided. Furthermore, this method enables directional control of the weld modification zones in both the axial and lateral directions, transforming the parameters affecting the spacing of the weld modification zones from being influenced by multiple intertwined factors to being influenced by independent parameters. This significantly reduces the number of welding process optimization iterations, while improving welding efficiency and quality. Furthermore, it significantly increases the welding focus tolerance, achieving high-strength, low-leakage glass welding, and contributes to the engineering application of ultrafast laser glass welding technology.

[0025] 2. In particular, the present invention optimizes the calculation method of parameters during the welding process, accurately measuring the actual absorbed laser energy at each breakpoint. It also allows for rapid process comparison and adjustment based on topographical features, significantly shortening the process development cycle.

[0026] 3. In addition, the device for ultrafast laser breakpoint welding of glass provided by the present invention utilizes the dynamic focusing module, sample stage, and Z-axis movement module to work together or individually to adjust the position of the laser focus during the breakpoint irradiation time, thereby achieving real-time adjustment of the deposited energy in the welding modified zone, forming a real-time accompanying mechanism for the laser focus and the formation of the modified zone, achieving more precise control of the axial width and longitudinal length of the modified zone, improving the accuracy and welding efficiency of ultrafast laser breakpoint welding, and thus providing more welding interface tolerance for actual processing. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 1 is a schematic diagram of the structure of an apparatus for ultrafast laser breakpoint welding of glass provided by an embodiment of the present invention;

[0028] Figure 2 Schematic diagram of straight line or curved line filling in the area to be welded provided by an embodiment of the present invention, wherein (a) is straight line filling, and (b) and (c) are arbitrary curved line filling;

[0029] Figure 3 Schematic diagram of generating a scanning path by truncation of a fill line according to an embodiment of the present invention, wherein (a) is the fill line before truncation, and (b) is the scanning path formed after truncation;

[0030] Figure 4 Schematic diagrams of the welding process and the breakpoints provided by an embodiment of the present invention, wherein (a) is a schematic diagram of the welding process and (b) is a schematic diagram of the breakpoints.

[0031] Throughout the drawings, the same reference numerals are used to denote the same elements or structures, wherein:

[0032] 1-first glass, 2-second glass, 3-dynamic focusing module, 4-beam scanning focusing module, 5-sample stage, 6-Z-axis movement module, 7-control unit, 8-ultrafast laser, 9-beam shaping module, 10-reflection mirror assembly. DETAILED DESCRIPTION

[0033] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0034] like Figures 1 to 4As shown, the present invention provides a method for ultrafast laser breakpoint welding of glass. The method comprises: filling the area of ​​the glass to be welded with a straight line or a curve, then periodically or non-periodically truncating the filling line to form a scanning path consisting of a preset number of breakpoints, and finally irradiating each breakpoint in sequence along the scanning path using an ultrafast laser to form spaced welding modified zones, thereby achieving uniform welding of the glass. The method specifically comprises the following steps:

[0035] S1: Place the first glass 1 on top of the second glass 2;

[0036] S2 divides and fills the glass area to be welded. The shape of the area to be welded can be any shape such as circle, ring, rectangle, etc. Figure 2 As shown, the filling path can be any straight line or curve, and then as Figure 3 The filling line is periodically or non-periodically truncated to form a scanning path formed by a preset number of breakpoints, and the processing time and processing energy of the ultrafast laser at each breakpoint are set;

[0037] S3 focuses the ultrafast laser on the interface between the first glass 1 and the second glass 2, and emits light at the breakpoints in sequence according to the scanning path, that is, triggers the laser at the breakpoint position and maintains it for a certain time, and then jumps to the next breakpoint position, thereby irradiating each breakpoint to form a welding modification zone with a specified interval. The interval between the welding modification zones is completely determined by the breakpoint spacing, so that the spacing between the welding modification zones can be accurately controlled. Multiple scans can also be performed within the planned scanning path. After completing a scan, the axial extension of the welding modification zone is used as a basis to adjust the laser focus position, and the next scanning welding is performed according to the scanning path, thereby achieving uniform welding of the glass.

[0038] The method provided by the present invention utilizes ultrafast laser to excite nonlinear effect inside transparent medium, regards laser as a point heat source, generates laser energy only near laser focus, utilizes accurate timing modulation to ultrafast laser pulse, excites welding modification zone (plasma modification zone) only at breakpoint, produces gentle temperature field and stress field, reaches the welding temperature point of material, thereby welds two samples. Such method can realize accurate and reliable control of the position of any two welding modification zones, makes the distance of welding modification zones as close as possible. Welding modification zones can be independently regulated by breakpoint planning, number of scans, single pulse energy, pulse width, time interval of adjacent pulses, and then realize accurate controllable of welding modification zone starting position, length, and lateral influence zone.

[0039] During operation, at each breakpoint, a welding modification zone is modulated according to the preset number of scans, breakpoint planning, single pulse energy, time interval between pulses, and number of pulses. The weld is then jumped point by point according to the breakpoint vector, with no laser irradiation during the jumps. This results in weld modification zones with longitudinally specified intervals at the weld, ultimately achieving glass welding. Regular melting results in regular welds, which in turn exhibits effective characteristics in terms of stress distribution, improving the fracture strength of the welded specimen. By precisely controlling the breakpoint emitting time and the number of scans, the laser energy injected into each breakpoint can be precisely regulated at the pulse level, enabling a uniform and controllable heat-affected zone to be achieved around the weld, resulting in a mild temperature and stress field distribution at the glass interface. This avoids excessive reliance on the focus position, reduces focusing difficulty, and enables high-quality sealed welding of the glass, making it suitable for high-tolerance micro-connections of single-angle glass.

[0040] The present invention contributes to the engineering application of ultrafast laser welding glass technology. It is simple to operate and can achieve directional control of the welding modified zone in the axial and lateral directions. It changes the parameters affecting the interval of the welding modified zone from the influence of multiple factors intertwined to the influence of independent parameters, greatly shortening the number of iterations of welding process optimization. At the same time, the welding efficiency is no longer limited by the scanning speed. The welding time is determined by the breakpoint laser irradiation time and the jump time. Combined with the optimization path, the welding efficiency is greatly improved. Therefore, the method provided by the present invention can significantly improve the welding efficiency and welding quality, greatly improve the welding focus tolerance, and achieve high-strength, high-efficiency, low-leakage rate, and invisible deformation sealing welding of small gaps. It is highly practical and conducive to promotion.

[0041] Furthermore, the contact method of the glass is optical contact, clamping contact, material filling contact or natural overlap. The method provided by the present invention does not specifically limit the contact method of the glass. The methods provided in the prior art can form a regular weld structure, so that the weld stress distribution is uniform, and has a broader application prospect.

[0042] Furthermore, the focus position is dynamically adjusted during the irradiation of a single breakpoint to achieve real-time adjustment of the nonlinear focus and the welding modification zone, wherein the real-time adjustment of the nonlinear focus causes the laser focus to change slowly when the irradiation time of a single breakpoint changes from 0 to Δt1, and as the laser irradiation ends at this point, the dynamic focusing movement also ends accordingly.

[0043] Furthermore, the wavelength of the ultrafast laser is 200nm to 1200nm, and the pulse width of the ultrafast laser is in the order of picoseconds or femtoseconds, thereby stimulating nonlinear absorption inside the material and producing local welding modification.

[0044] Further, if Figure 4As shown, the interval Δs between adjacent breakpoints is set, and the jump speed v of the laser beam between adjacent breakpoints is set. jump , the light emission time of a single breakpoint is Δt1, the time interval between adjacent pulses is τ, the ultrafast laser light repetition frequency is f, the number of laser reciprocating irradiation times is n≥1, the time Δt2 taken for the laser to jump between adjacent breakpoints, and the welding speed v are calculated using the following formulas:

[0045]

[0046]

[0047] At each breakpoint, the time interval τ between adjacent pulses and the number of light pulses N are calculated using the following formulas:

[0048]

[0049] N=f×Δt1

[0050] Where N is the number of ultrafast laser pulses;

[0051] The above formula can accurately measure the actual absorbed laser energy at each breakpoint, and quickly compare the process and make adjustments based on the morphological characteristics, greatly shortening the process development cycle.

[0052] According to another aspect of the present invention, a device for implementing the above method is provided, which includes a sample stage 5, a laser processing unit and a control unit 7, wherein: the sample stage 5 is used to place the glass to be processed and drive it to move along the X-axis, Y-axis or Z-axis to adjust the irradiation position of the laser focus, thereby realizing the switching of the irradiation breakpoints and the real-time adjustment of the deposition energy of the welding modification zone; the laser processing unit is used to provide ultrafast laser to irradiate each breakpoint and form spaced welding modification zones, thereby realizing uniform welding of the glass; the control unit 7 is used to form a scanning path consisting of a preset number of breakpoints, and control the sample stage 5 and the laser processing unit.

[0053] Furthermore, the laser processing unit includes an ultrafast laser 8, a beam shaping module 9, a reflector group 10 and a beam scanning and focusing module 4 arranged in sequence along the propagation direction of the light. When working, the ultrafast laser 8 emits an ultrafast laser, which is shaped by the beam shaping module 9 and then reflected by the reflector group 10 into the beam scanning and focusing module 4, so that the glass area to be welded is scanned and irradiated under the drive of the beam scanning and focusing module 4, thereby injecting laser energy into each breakpoint; at the same time, the laser processing unit also includes a Z-axis moving module 6 connected to the beam scanning and focusing module 4, which is used to drive the beam scanning and focusing module 4 to move along the Z-axis direction to realize real-time adjustment of the nonlinear focus and the welding modified zone. When working, the Z-axis moving module 6 and the sample stage 5 work alone or in conjunction to realize rapid regulation of the laser focus in a large range, thereby realizing real-time adjustment of the deposited energy in the welding modified zone.

[0054] Furthermore, the laser processing unit also includes a dynamic focusing module 3, which is arranged between the reflector group 10 and the beam scanning focusing module 4, located in the optical path return, and is used to achieve real-time adjustment of the nonlinear focus during the irradiation of a single breakpoint, thereby achieving precise control of the laser focus within a small range, and further achieving real-time adjustment of the deposited energy in the welding modified zone. The dynamic focusing module 3 is not limited to reflection or transmission. During operation, the dynamic focusing module 3 can be controlled to cooperate with or act alone with the Z-axis movement module 6 and the sample stage 5 according to the adjustment requirements of the laser focus, so as to adjust the laser focus position in real time when laser irradiation is performed at a certain breakpoint, and further achieve real-time adjustment of the deposited energy in the welding modified zone, thereby forming a real-time accompanying mechanism for the formation of the laser focus and the modified zone, achieving more precise control of the axial and longitudinal directions of the modified zone, improving the accuracy and welding efficiency of ultrafast laser breakpoint welding, and further providing more welding interface tolerances for actual processing.

[0055] Furthermore, the wavelength of the ultrafast laser 8 is 200 nm to 1200 nm, and the pulse width of the ultrafast laser is in the order of picoseconds or femtoseconds.

[0056] During operation, the second glass 2 is placed on the sample stage 5, and the first glass 1 is placed above the second glass 2 to obtain the glass to be processed. The Z-axis motion module 6 is adjusted, or the sample stage 5 is used to move the glass along the Z-axis, so that the laser focus is focused on the interface between the first glass 1 and the second glass 2. The laser processing unit provides ultrafast laser irradiation to the current breakpoint to inject laser energy. Simultaneously, the dynamic focusing module 3, the Z-axis motion module 6, and the sample stage 5 can coordinate or independently adjust the laser focus, thereby achieving nonlinear focus adjustment and forming the weld modification zone from the lowest point to the highest point. After welding the current breakpoint is completed, the beam focusing module 4 is used to drive the ultrafast laser to jump to the next breakpoint, or the sample stage is used to move the glass so that the ultrafast laser jumps to the next breakpoint for laser irradiation. The laser processing unit does not emit light during the jump. After completing a scan, the axial extension of the weld modification zone is used as a basis to adjust the laser focus through the dynamic focusing module 3, the Z-axis motion module 6, and / or the sample stage 5, and the next scan welding is performed according to the scanning path.

[0057] The technical solution provided by the present invention is further described below with reference to specific embodiments.

[0058] The wall thickness of the optical glue quartz cylindrical structure cavity (Φ25mm×25mm) is 2mm. By planning the welding path as concentric circles or spiral lines, and interrupting the scanning path into breakpoints at intervals of 20μm, the laser irradiation time is set to 1000μs at the breakpoints, the laser pulse repetition rate is set to 1MHz, the single pulse energy is set to 3μj, and the jump speed is 1m / s to achieve effective welding of the cylindrical end face. According to the air pressure time impact test, the end face pressure resistance is 0.4MPa. According to the helium mass leak rate detector test, the leak rate is <1×10-12Pa·m3 / s, and the welding rate is >100mm / s. The window surface accuracy before and after welding is detected by ZYGO interferometer and remains unchanged.

[0059] It will be easily understood by those skilled in the art that the above are merely preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A method for ultrafast laser breakpoint welding of glass, characterized in that: The method specifically involves filling the glass area to be welded with a straight line or curve, then truncating the filling line to form a scanning path consisting of a preset number of breakpoints. Finally, an ultrafast laser is used to irradiate each breakpoint in sequence along the scanning path. The laser is triggered at a breakpoint and held for a period of time before jumping to the next breakpoint. This forms spaced weld modification zones, thereby achieving uniform welding of the glass and directional control of the weld modification zones in the axial and lateral directions. This changes the parameters affecting the intervals of the weld modification zones from being influenced by multiple factors to being influenced by independent parameters. Time taken to jump between adjacent breakpoints , welding speed Use the following formulas to calculate: Where, is the interval between adjacent breakpoints, is the jump speed between adjacent breakpoints, is the light emission time of a single breakpoint, The time it takes for the laser to jump between adjacent breakpoints; At each breakpoint, the time interval between adjacent pulses , the number of light pulses N is calculated using the following formula: Where, is the ultrafast laser repetition frequency, is the number of ultrafast laser pulses, It is the light emission time of a single breakpoint.

2. The method for ultrafast laser breakpoint welding of glass according to claim 1, wherein: The contact modes of glass are optical contact, fixture clamping contact, material filling contact or natural overlap.

3. The method for ultrafast laser breakpoint welding of glass according to claim 1, wherein: The laser focus position is dynamically adjusted during the irradiation of a single breakpoint to achieve real-time adjustment of the nonlinear focus and the weld modification zone.

4. The method for ultrafast laser breakpoint welding of glass according to claim 1, wherein: The wavelength of the ultrafast laser is 200nm to 1200nm, and the pulse width of the ultrafast laser is in the order of picoseconds or femtoseconds.

5. A device for implementing the method according to any one of claims 1 to 4, characterized in that: The device comprises a sample stage (5), a laser processing unit and a control unit (7), wherein: the sample stage (5) is used to place the glass to be processed and drive it to move along the X-axis, Y-axis or Z-axis direction to adjust the irradiation position of the laser focus, thereby realizing the switching of the irradiation breakpoints and the real-time adjustment of the deposition energy of the welding modification zone; the laser processing unit is used to provide ultrafast laser to irradiate each breakpoint and form spaced welding modification zones, thereby realizing uniform welding of the glass; the control unit (7) is used to form a scanning path consisting of a preset number of breakpoints and control the sample stage (5) and the laser processing unit.

6. The device for ultrafast laser breakpoint welding of glass according to claim 5, characterized in that: The laser processing unit comprises an ultrafast laser (8), a beam shaping module (9), a reflector group (10) and a beam scanning and focusing module (4) arranged in sequence along the light propagation direction, and is used to focus the ultrafast laser scanning on the glass to be welded area. At the same time, the laser processing unit also comprises a Z-axis moving module (6) connected to the beam scanning and focusing module (4), and is used to drive the beam scanning and focusing module (4) to move along the Z-axis direction to adjust the position of the laser focus in real time, thereby realizing real-time adjustment of the deposited energy in the welding modified area.

7. The device for ultrafast laser breakpoint welding of glass according to claim 6, characterized in that: The laser processing unit further comprises a dynamic focusing module (3), which is arranged between the reflector group (10) and the beam scanning focusing module (4) and is used for adjusting the position of the laser focus in real time, thereby achieving real-time adjustment of the deposited energy in the welding modification zone.

8. The device for ultrafast laser breakpoint welding of glass according to claim 6, characterized in that: The wavelength of the ultrafast laser (8) is 200 nm to 1200 nm, and the pulse width of the ultrafast laser is in the order of picoseconds or femtoseconds.

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