Method of blow drying a planar workpiece

Abstract

The present application relates to a kind of flat workpiece blow-drying method, the blow-drying method includes: the flat workpiece to be blown dry is blown dry operation;The blow-drying operation includes using at least 2 air blow head and blow head are blown dry, process in the air blow head carries out first autorotation and revolution, the flat workpiece carries out second autorotation;The direction of first autorotation and the direction of revolution are opposite;The direction of revolution and the direction of second autorotation are opposite;The rotation speed of first autorotation>the rotation speed of second autorotation>the rotation speed of revolution.The blow-drying method provided by the present application, by designing blow-drying process, using the mode of air blow head rotation and flat workpiece rotation realizes the efficient blow-drying of workpiece, can avoid the residual trace such as water stain oil stain etc. after workpiece is blown dry, to improve the use performance of target material to carry out sputtering coating, improve the effect of film layer obtained by sputtering coating.

Description

Technical Field

[0001] This invention relates to the field of surface treatment, and more specifically to a method for drying a planar workpiece. Background Technology

[0002] Currently, magnetron sputtering is a novel physical vapor deposition method. It uses an electron gun system to emit and focus electrons onto the material to be deposited, causing the sputtered atoms to follow the momentum conversion principle and fly off the material with high kinetic energy to deposit a film on the substrate. The material to be deposited is called the sputtering target, which can be metal, alloy, ceramic compound, etc.

[0003] Typically, the prepared target materials need to undergo ultrasonic testing to detect potential defects. For example, CN115308305A discloses an ultrasonic non-destructive testing method for target materials, including the following steps: Target material pretreatment step: The sample target material is bonded to solder, and then a local area of ​​the solder is selected as the detection site and demetallized to form the actual preset defect detection site. Bonding step: The sample target material is bonded to the back tube to form the product. Testing step: The product is placed flat on a water tank platform. According to the water distance formula: d=F-δ*(V1 / V0); where F is the focal length of the scanning probe; δ is the thickness of the sample target material; V1 is the sound velocity of the sample target material; V0 is the sound velocity of water; the water distance d is adjusted and the focus of the scanning probe of the scanning equipment is placed at the flaw detection position until the area of ​​the defect point displayed by the scanning equipment is the same as or close to the area of ​​the actual preset defect detection site. This allows the inspector to accurately know whether the testing results of the testing equipment are accurate, thus making the batch target material production line testing operation more accurate. Alternatively, liquid phase cleaning can be used for other cleaning processes.

[0004] It is evident that after the testing process or cleaning, a certain amount of liquid phase will remain on the surface of the target material. The residual liquid phase usually has a significant impact on the use of the target material, resulting in a poor sputtering coating effect. Therefore, an efficient treatment method is needed to clean the liquid phase off the target material surface without leaving any residue such as water stains or oil stains. Summary of the Invention

[0005] In view of the problems existing in the prior art, the purpose of the present invention is to provide a method for drying planar workpieces so as to clean the liquid phase on the surface of the target material without producing residual traces such as water stains or oil stains.

[0006] To achieve this objective, the present invention adopts the following technical solution:

[0007] This invention provides a method for drying a planar workpiece, the method comprising:

[0008] Dry the flat workpiece that needs to be dried by blowing it;

[0009] The drying operation includes using a blower head with at least two nozzles for drying, during which the blower head performs a first rotation and a revolution, and the flat workpiece performs a second rotation.

[0010] The direction of the first rotation is opposite to the direction of the revolution.

[0011] The direction of the revolution is opposite to the direction of the second rotation.

[0012] The rotational speed of the first rotation is greater than the rotational speed of the second rotation, which is greater than the rotational speed of the revolution.

[0013] The drying method provided by this invention, through the design of the drying process, achieves efficient drying of the workpiece by rotating the blower head and the flat workpiece, which can avoid residual marks such as water stains and oil stains on the workpiece after drying, thereby improving the performance of the target material for sputtering coating and improving the effect of the film layer obtained by sputtering coating.

[0014] As a preferred embodiment of the present invention, the blower head contains 3-6 blowers.

[0015] As a preferred embodiment of the present invention, the air blowers are evenly distributed around the center line of the air blower.

[0016] As a preferred embodiment of the present invention, the rotational speed of the first self-rotation is 170-200 r / min.

[0017] As a preferred embodiment of the present invention, the rotational speed of the second self-rotation is 100-130 r / min.

[0018] As a preferred embodiment of the present invention, the rotational speed of the revolution is 70-80 r / min.

[0019] As a preferred embodiment of the present invention, the drying medium in the blower includes compressed gas.

[0020] As a preferred embodiment of the present invention, the air pressure of the drying medium in the blower is 0.55-0.7 MPa.

[0021] As a preferred technical solution of the present invention, the projected area of ​​the drying area of ​​the blower head on the horizontal plane is greater than the area of ​​the surface of the flat workpiece to be dried.

[0022] As a preferred technical solution of the present invention, the projected area of ​​the drying area of ​​the blower head on the horizontal plane is 1.2-1.8 times the area of ​​the surface of the workpiece to be dried.

[0023] Compared with existing technical solutions, the present invention has the following beneficial effects:

[0024] The drying method provided by this invention, by configuring a specific drying process, utilizes the rotation and revolution of the blower head in conjunction with the rotation of the workpiece to achieve efficient drying of residual liquid on the workpiece surface, and no residual stains are produced on the surface after drying, which is beneficial for the subsequent sputtering coating of the target material and avoids the problem of poor coating effect caused by incomplete surface cleaning. Detailed Implementation

[0025] To better illustrate the present invention and facilitate understanding of its technical solutions, typical but non-limiting embodiments of the present invention are as follows:

[0026] This embodiment provides a method for drying a planar workpiece, the method comprising:

[0027] Dry the flat workpiece that needs to be dried by blowing it;

[0028] The drying operation includes using a blower head with at least two nozzles for drying, during which the blower head performs a first rotation and a revolution, and the flat workpiece performs a second rotation.

[0029] The direction of the first rotation is opposite to the direction of the revolution.

[0030] The direction of the revolution is opposite to the direction of the second rotation.

[0031] The rotational speed of the first rotation is greater than the rotational speed of the second rotation, which is greater than the rotational speed of the revolution.

[0032] In this invention, the planar workpiece can be the target material described above, or a planar workpiece used in the manufacturing process of sputtering target material assembly, such as a back plate, a cooling plate used in cooling, or a planar workpiece in other fields.

[0033] The drying method provided by this invention is more advantageous for achieving good drying effect on flat surfaces. For flat targets, the drying process provided by this invention can form a specific air field to dry the residual liquid. At the same time, due to the effect of the air field, the residual liquid will not disperse during the drying process, thus avoiding residual stains caused by the dispersion of residual liquid during the drying process. Furthermore, it can also avoid the adsorption of solid particles in the air onto the liquid phase on the workpiece surface, thus avoiding residual stains.

[0034] When the flat workpiece used is a target material, the material can be selected from commonly used target materials in this field, such as pure aluminum, aluminum alloy, pure copper, and copper alloy.

[0035] When the flat workpiece used is a back plate, the material can be selected from commonly used target materials in this field, such as pure aluminum, aluminum alloy, pure copper, and copper alloy.

[0036] In this invention, the liquid phase remaining on the surface of the workpiece to be dried can be the liquid remaining from the surface cleaning process, such as washing. The washing medium can be water, ethanol, or other media, or it can be a washing medium that achieves a specific washing effect, such as using acid or alkali to remove grease from the surface of the workpiece. The acid can be an organic acid solution or an inorganic acid solution, specifically such as acetic acid solution, sulfuric acid solution, hydrochloric acid solution, etc.

[0037] Especially when using salt solutions for washing, the specific drying process of this invention can optimize the vaporization of the liquid phase during the drying process, avoiding the rapid evaporation of the liquid phase during the drying process, which would cause the solid phase to dissolve and clump too quickly. The solution provided by this invention can regulate the dissolution of the solid phase by adjusting the evaporation process with the optimized air field during the salt solution cleaning or treatment process, so that the dissolved solid phase can be quickly peeled off from the workpiece surface under the action of the air field, thereby avoiding the generation of residual stains.

[0038] Furthermore, it can also be other processing methods that come into contact with the liquid phase, such as chemical plating, electroplating, and mechanical chemical polishing. For example, in the welding process of the target and the backing plate in this field, it is usually necessary to plate a nickel layer on the welding surface to ensure the welding effect. Nickel plating is often carried out by chemical nickel plating, that is, the target or backing plate needs to come into contact with the plating solution. At this time, after the nickel plating layer thickness is reached, it can be directly dried to achieve the drying effect of the present invention. After drying, the appearance of residual stains can be avoided, and the next step can be carried out directly.

[0039] Specifically, the blower head contains 3-6 nozzles, for example, 3, 4, 5 or 6, but is not limited to the listed values. Other unlisted values ​​within this range also meet the requirements.

[0040] In this invention, the blower head is designed such that the blower head is set around the axis of the blower head. The rotation and revolution of the blower head are realized by a rotating component equipped with a motor or the like to provide power. The rotation of the corresponding planar workpiece is the same. For example, the rotation of the planar workpiece can be realized by a motor that provides rotational power through a clamp. The function of the clamp is to hold the planar workpiece to ensure that the workpiece does not move during the rotation.

[0041] Specifically, the air blowers are evenly distributed around the center line of the air blower.

[0042] Specifically, the rotational speed of the first self-rotation is 170-200 r / min, for example, it can be 170 r / min, 175 r / min, 180 r / min, 185 r / min, 190 r / min, 195 r / min or 200 r / min, but is not limited to the listed values. Other unlisted values ​​within this range also meet the requirements.

[0043] Specifically, the second rotation speed is 100-130 r / min, for example, it can be 100 r / min, 105 r / min, 110 r / min, 115 r / min, 120 r / min, 125 r / min or 130 r / min, etc., but is not limited to the listed values. Other unlisted values ​​within this range are also acceptable.

[0044] Specifically, the revolution speed is 70-80 r / min, for example, it can be 70 r / min, 72 r / min, 74 r / min, 76 r / min, 78 r / min or 80 r / min, etc., but is not limited to the listed values. Other unlisted values ​​within this range also meet the requirements.

[0045] Specifically, the drying medium in the blower includes compressed gas.

[0046] In this invention, the drying medium used in the drying process can be either a hot medium or a cold medium. It should be understood that the drying effect of using a hot medium is often higher than that of using a cold medium. However, the improvement in drying effect provided by this invention is based on the same drying medium.

[0047] In this invention, the drying medium can be a compressed gas, such as compressed air, nitrogen, argon, or helium, depending on the desired effect. For example, when using a heat medium and avoiding oxidation of the workpiece, nitrogen, helium, or neon can be used. Alternatively, if it is desired that the drying medium remain and react during the drying process to improve the removal effect, a corresponding gas can be selected for purging.

[0048] Specifically, the air pressure of the drying medium in the blower is 0.55-0.7 MPa, for example, it can be 0.55 MPa, 0.56 MPa, 0.58 MPa, 0.6 MPa, 0.62 MPa, 0.64 MPa, 0.66 MPa, 0.68 MPa or 0.7 MPa, but is not limited to the listed values. Other unlisted values ​​within this range are also acceptable.

[0049] Specifically, the projected area of ​​the drying area of ​​the blower head on the horizontal plane is greater than the area of ​​the surface of the flat workpiece to be dried.

[0050] In this invention, the projected area of ​​the drying area of ​​the blower head on the horizontal plane refers to the projected area of ​​the area formed by the airflow blown out by the nozzle in the blower head on the horizontal plane, so as to reasonably match it with the drying plane and ensure the drying effect.

[0051] Furthermore, it should be understood that the air velocity gradually decreases from the center to the edge of the air field, and the drying effect will decrease. In this invention, the reduction of air velocity is reduced by configuring the rotation mode of the blower head and the rotation of the workpiece. At the same time, in order to ensure the drying effect, the projected area of ​​the air field can be increased to reduce the impact of the edge on the drying effect.

[0052] Specifically, the projected area of ​​the drying area of ​​the blower head on the horizontal plane is 1.2-1.8 times the area of ​​the surface of the workpiece to be dried. For example, it can be 1.2 times, 1.25 times, 1.3 times, 1.35 times, 1.4 times, 1.45 times, 1.5 times, 1.55 times, 1.6 times, 1.65 times, 1.7 times, 1.75 times, or 1.8 times, etc., but is not limited to the listed values. Other unlisted values ​​within this range also meet the requirements.

[0053] To highlight the high efficiency of the drying method provided by this invention, the invention is specifically illustrated using the following embodiments:

[0054] The workpieces corresponding to Examples 1-2 below are flat circular back plates after water washing, and Examples 3-4 are flat circular targets after cleaning with the cleaning agent disclosed in CN114602877A.

[0055] Example 1

[0056] This embodiment provides a method for drying a planar workpiece, the method comprising:

[0057] Dry the flat workpiece that needs to be dried by blowing it;

[0058] The drying operation includes using a blower head consisting of two nozzles for drying. During the process, the blower head performs a first rotation and a revolution, while the flat workpiece performs a second rotation.

[0059] The direction of the first rotation is opposite to the direction of the revolution.

[0060] The direction of the revolution is opposite to the direction of the second rotation.

[0061] The rotational speed of the first rotation is greater than the rotational speed of the second rotation, which is greater than the rotational speed of the revolution.

[0062] The air blowers are evenly distributed around the center line of the blower head, and the angle between the two air blowers is 180°.

[0063] The first rotational speed is 180 r / min; the second rotational speed is 125 r / min; and the revolution speed is 77 r / min.

[0064] The drying medium in the blower is compressed air; the air pressure of the drying medium in the blower is 0.6 MPa; the projected area of ​​the drying area of ​​the blower on the horizontal plane is greater than the area of ​​the surface to be dried of the flat workpiece; the projected area of ​​the drying area of ​​the blower on the horizontal plane is 1.6 times the area of ​​the surface to be dried of the flat workpiece.

[0065] The surface condition of the flat workpiece after drying is detailed in Table 1.

[0066] Example 2

[0067] This embodiment provides a method for drying a planar workpiece, the method comprising:

[0068] Dry the flat workpiece that needs to be dried by blowing it;

[0069] The drying operation includes using a blower with three nozzles for drying, during which the blower performs a first rotation and a revolution, and the flat workpiece performs a second rotation.

[0070] The direction of the first rotation is opposite to the direction of the revolution.

[0071] The direction of the revolution is opposite to the direction of the second rotation.

[0072] The rotational speed of the first rotation is greater than the rotational speed of the second rotation, which is greater than the rotational speed of the revolution.

[0073] The air blowers are evenly distributed around the center line of the blower head;

[0074] The first rotational speed is 190 r / min; the second rotational speed is 120 r / min; and the revolution speed is 74 r / min.

[0075] The drying medium in the blower is compressed air; the air pressure of the drying medium in the blower is 0.65 MPa; the projected area of ​​the drying area of ​​the blower on the horizontal plane is greater than the area of ​​the surface to be dried of the flat workpiece; the projected area of ​​the drying area of ​​the blower on the horizontal plane is 1.4 times the area of ​​the surface to be dried of the flat workpiece.

[0076] The surface condition of the flat workpiece after drying is detailed in Table 1.

[0077] Example 3

[0078] This embodiment provides a method for drying a planar workpiece, the method comprising:

[0079] Dry the flat workpiece that needs to be dried by blowing it;

[0080] The drying operation includes using a blower head consisting of four nozzles for drying. During the process, the blower head performs a first rotation and a revolution, while the flat workpiece performs a second rotation.

[0081] The direction of the first rotation is opposite to the direction of the revolution.

[0082] The direction of the revolution is opposite to the direction of the second rotation.

[0083] The rotational speed of the first rotation is greater than the rotational speed of the second rotation, which is greater than the rotational speed of the revolution.

[0084] The air blowers are evenly distributed around the center line of the blower head;

[0085] The first rotational speed is 200 r / min; the second rotational speed is 100 r / min; and the revolution speed is 70 r / min.

[0086] The drying medium in the blower is compressed air; the air pressure of the drying medium in the blower is 0.7 MPa; the projected area of ​​the drying area of ​​the blower on the horizontal plane is greater than the area of ​​the surface of the flat workpiece to be dried; the projected area of ​​the drying area of ​​the blower on the horizontal plane is 1.2 times the area of ​​the surface of the flat workpiece to be dried.

[0087] The surface condition of the flat workpiece after drying is detailed in Table 1.

[0088] Example 4

[0089] This embodiment provides a method for drying a planar workpiece, the method comprising:

[0090] Dry the flat workpiece that needs to be dried by blowing it;

[0091] The drying operation includes using a blower head consisting of three nozzles for drying. During the process, the blower head performs a first rotation and a revolution, while the flat workpiece performs a second rotation.

[0092] The direction of the first rotation is opposite to the direction of the revolution.

[0093] The direction of the revolution is opposite to the direction of the second rotation.

[0094] The rotational speed of the first rotation is greater than the rotational speed of the second rotation, which is greater than the rotational speed of the revolution.

[0095] The air blowers are evenly distributed around the center line of the blower head;

[0096] The first rotational speed is 170 r / min; the second rotational speed is 130 r / min; and the revolution speed is 80 r / min.

[0097] The drying medium in the blower is compressed air; the air pressure of the drying medium in the blower is 0.55 MPa; the projected area of ​​the drying area of ​​the blower on the horizontal plane is greater than the area of ​​the surface to be dried of the flat workpiece; the projected area of ​​the drying area of ​​the blower on the horizontal plane is 1.8 times the area of ​​the surface to be dried of the flat workpiece.

[0098] The surface condition of the flat workpiece after drying is detailed in Table 1.

[0099] Comparative Example 1

[0100] The only difference from Example 1 is that the wind head does not perform a first rotation.

[0101] Comparative Example 2

[0102] The only difference from Example 1 is that the wind head does not revolve.

[0103] Comparative Example 3

[0104] The only difference from Example 1 is that the planar workpiece does not undergo a second rotation.

[0105] Comparative Example 4

[0106] The only difference from Embodiment 1 is that the direction of the first rotation and the direction of the revolution are the same.

[0107] Comparative Example 5

[0108] The only difference from Embodiment 1 is that the rotational speed of the first rotation is the same as that of the second rotation.

[0109] Comparative Example 6

[0110] The only difference from Embodiment 1 is that the rotational speed of the second rotation is the same as the rotational speed of the revolution.

[0111] Comparative Example 7

[0112] The only difference from Embodiment 1 is that the rotational speed of the first self-rotation is the same as the rotational speed of the revolution.

[0113] Table 1

[0114]

[0115]

[0116] As can be seen from the results of the above embodiments and comparative examples, the drying method provided by the present invention, by designing the drying process and using the rotation of the blower head and the rotation of the flat workpiece, achieves efficient drying of the workpiece, which can avoid residual traces such as water stains and oil stains on the workpiece after drying, thereby improving the performance of the target material for sputtering coating and improving the effect of the film layer obtained by sputtering coating.

[0117] The present invention is described in detail through the above embodiments, but the present invention is not limited to the above detailed structural features, that is, it does not mean that the present invention must rely on the above detailed structural features to be implemented. Those skilled in the art should understand that any improvements to the present invention, equivalent substitutions for the components used in the present invention, additions of auxiliary components, and selection of specific methods, etc., all fall within the protection scope and disclosure scope of the present invention.

[0118] The preferred embodiments of the present invention have been described in detail above. However, the present invention is not limited to the specific details in the above embodiments. Within the scope of the technical concept of the present invention, various simple modifications can be made to the technical solution of the present invention, and these simple modifications all fall within the protection scope of the present invention.

[0119] It should also be noted that the various specific technical features described in the above specific embodiments can be combined in any suitable manner without contradiction. In order to avoid unnecessary repetition, the present invention will not describe the various possible combinations separately.

[0120] Furthermore, various different embodiments of the present invention can be combined in any way, as long as they do not violate the spirit of the present invention, they should also be regarded as the content disclosed by the present invention.

Claims

1. A method for drying a planar workpiece, characterized in that, The drying method includes: Dry the flat workpiece that needs to be dried by blowing it; The drying operation includes using a blower head with at least two nozzles for drying, during which the blower head performs a first rotation and a revolution, and the flat workpiece performs a second rotation. The direction of the first rotation is opposite to the direction of the revolution. The direction of the revolution is opposite to the direction of the second rotation. The rotational speed of the first rotation is greater than the rotational speed of the second rotation, which is greater than the rotational speed of the revolution; the rotational speed of the first rotation is 170-200 r / min; the rotational speed of the second rotation is 100-130 r / min; and the rotational speed of the revolution is 70-80 r / min.

2. The drying method for a planar workpiece as described in claim 1, characterized in that, The blower head contains 3-6 nozzles.

3. The drying method for a planar workpiece as described in claim 1 or 2, characterized in that, The air blowers are evenly distributed around the center line of the blower head.

4. The drying method for a planar workpiece as described in claim 1, characterized in that, The drying medium in the blower includes compressed gas.

5. The drying method for a planar workpiece as described in claim 1, characterized in that, The air pressure of the drying medium in the blower is 0.55-0.7 MPa.

6. The drying method for a planar workpiece as described in claim 1, characterized in that, The projected area of ​​the drying area of ​​the blower head on the horizontal plane is greater than the area of ​​the surface of the flat workpiece to be dried.

7. The drying method for a planar workpiece as described in claim 6, characterized in that, The projected area of ​​the drying area of ​​the blower head on the horizontal plane is 1.2-1.8 times the area of ​​the surface of the workpiece to be dried.

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