A novel tri-axial silicon micro-gyroscope

Abstract

The application relates to a three-axis gyroscope, in particular to a novel three-axis silicon micro gyroscope. The application solves the problems of low measuring precision and high production cost of the existing three-axis gyroscope. The novel three-axis silicon micro gyroscope comprises a glass substrate, a resonator part and an electrode part; the resonator part comprises a cylindrical center anchor point, four groups of square anchor points A and four square anchor points B; the cylindrical center anchor point, the four groups of square anchor points A and the four square anchor points B are all bonded to the upper surface of the glass substrate; the electrode part comprises four pairs of arc-shaped electrodes A, four arc-shaped electrodes B, four pairs of arc-shaped electrodes C, four arc-shaped electrodes D and four rectangular electrodes; the four pairs of arc-shaped electrodes A, the four arc-shaped electrodes B, the four pairs of arc-shaped electrodes C and the four arc-shaped electrodes D are all bonded to the upper surface of the glass substrate; and the four rectangular electrodes are all sputtered on the upper surface of the glass substrate. The application is suitable for high-precision and high-tech fields such as military navigation and deep space exploration.

Description

Technical Field

[0001] This invention relates to triaxial gyroscopes, specifically a novel triaxial silicon micro gyroscope. Background Technology

[0002] A three-axis gyroscope is a core sensing device in an inertial navigation system, capable of simultaneously measuring angular velocity input along the x, y, and z axes. It is widely used in high-precision fields such as military navigation and deep space exploration, and has extremely broad application prospects. Existing three-axis gyroscopes are mainly divided into two categories: one is the assembled three-axis gyroscope (composed of three single-axis gyroscopes), which suffers from low measurement accuracy due to limitations in assembly technology. The other is the monolithic integrated three-axis gyroscope, which has the following problems: firstly, it cannot achieve complete decoupling of the driving and detection directions, resulting in large coupling errors between modes and thus low measurement accuracy; secondly, its complex structure and manufacturing process make mass production difficult, leading to high production costs. Therefore, it is necessary to invent a novel three-axis silicon micro gyroscope to solve the problems of low measurement accuracy and high production costs of existing three-axis gyroscopes. Summary of the Invention

[0003] To address the problems of low measurement accuracy and high production cost of existing triaxial gyroscopes, this invention provides a novel triaxial silicon micro gyroscope.

[0004] This invention is achieved using the following technical solution: A novel triaxial silicon microgyroscope includes a glass substrate, a resonator section, and an electrode section; The resonator section includes a cylindrical central anchor point, four sets of square anchor points A, and four square anchor points B; The cylindrical central anchor point, four sets of square anchor points A, and four square anchor points B are all bonded to the upper surface of the glass substrate. Each set of square anchor points A includes four square anchor points A arranged in a rectangular array; the four sets of square anchor points A are symmetrically distributed around the center line of the cylindrical central anchor point. Each pair of block-shaped anchor points B includes two block-shaped anchor points B symmetrically distributed along the tangential direction; the four pairs of block-shaped anchor points B are symmetrically distributed around the center line of the cylindrical central anchor point. Four U-shaped coupling beams A are connected to the side of the cylindrical central anchor point; the four U-shaped coupling beams A are symmetrically distributed around the center line of the cylindrical central anchor point; The ends of the four U-shaped coupling beams A are connected to a circular frame. The inner side of the circular frame is connected to four Chinese character-shaped coupling beams B; the four Chinese character-shaped coupling beams B are symmetrically distributed around the center line of the cylindrical central anchor point, and the four Chinese character-shaped coupling beams B and the four Chinese character-shaped coupling beams A are arranged at equal intervals around the center line of the cylindrical central anchor point. Each of the Chinese character-shaped coupling beams B is connected to a rectangular outer frame at its end; the four rectangular outer frames are symmetrically distributed around the center line of the cylindrical central anchor point, and the four rectangular outer frames and the four Chinese character-shaped coupling beams A are arranged at equal intervals around the center line of the cylindrical central anchor point. Each rectangular outer frame is connected to two corresponding U-shaped coupling beams A, which are symmetrically distributed along the tangential direction. The two U-shaped coupling beams A form a pair. The four pairs of U-shaped coupling beams A are symmetrically distributed around the center line of the cylindrical central anchor point. Each rectangular outer frame has four U-shaped coupling beams B arranged in a rectangular array on its inner side, and the four U-shaped coupling beams B form a group; the four groups of U-shaped coupling beams B are symmetrically distributed around the center line of the cylindrical central anchor point, and the ends of the four groups of U-shaped coupling beams B are connected to the sides of the four groups of square anchor points A one by one. Each rectangular outer frame has two radially symmetrically distributed H-shaped coupling beams A connected to its inner side, and the two H-shaped coupling beams A form a pair; the four pairs of H-shaped coupling beams A are symmetrically distributed around the center line of the cylindrical central anchor point. Each pair of H-shaped coupling beams A is connected to a rectangular inner frame at its end; the four rectangular inner frames are symmetrically distributed around the center line of the cylindrical central anchor point, and the four rectangular inner frames and the four Chinese character-shaped coupling beams A are arranged at equal intervals around the center line of the cylindrical central anchor point. Each rectangular inner frame is connected to four U-shaped coupling beams C arranged in a rectangular array on its inner side, and the four U-shaped coupling beams C form a group; the four groups of U-shaped coupling beams C are symmetrically distributed around the center line of the cylindrical central anchor point. Each set of Chinese character-shaped coupling beams C has a rectangular mass block connected to its end; the four rectangular mass blocks are symmetrically distributed around the center line of the cylindrical central anchor point, and the four rectangular mass blocks and the four Chinese character-shaped coupling beams A are arranged at equal intervals around the center line of the cylindrical central anchor point. Each rectangular mass block has two H-shaped coupling beams B that are symmetrically distributed along the tangential direction on its side, and the two H-shaped coupling beams B are a pair; the four pairs of H-shaped coupling beams B are symmetrically distributed around the center line of the cylindrical central anchor point, and the ends of the four pairs of H-shaped coupling beams B are connected to the sides of the four square block anchor points B in a one-to-one correspondence. The electrode portion includes four pairs of arc-shaped electrodes A, four arc-shaped electrodes B, four pairs of arc-shaped electrodes C, four arc-shaped electrodes D, and four rectangular electrodes; Four pairs of arc-shaped electrodes A, four arc-shaped electrodes B, four pairs of arc-shaped electrodes C, and four arc-shaped electrodes D are all bonded to the upper surface of the glass substrate; four rectangular electrodes are all sputtered onto the upper surface of the glass substrate. Four pairs of arc-shaped electrodes A are symmetrically distributed on both sides of the four U-shaped coupling beams A, and the outer surfaces of the four pairs of arc-shaped electrodes A and the inner surfaces of the circular frame together form four pairs of microcapacitors A; the four pairs of microcapacitors A are symmetrically distributed around the center line of the cylindrical central anchor point. The midpoints of the four arc-shaped electrodes B are directly opposite the four U-shaped coupling beams A, and the inner surfaces of the four arc-shaped electrodes B and the outer surfaces of the circular frame together form four microcapacitors B; the four microcapacitors B are symmetrically distributed around the center line of the cylindrical central anchor point. Four pairs of arc-shaped electrodes C are symmetrically distributed on both sides of the four U-shaped coupling beams B, and the outer surfaces of the four pairs of arc-shaped electrodes C and the inner surfaces of the circular frame together form four pairs of microcapacitors C; the four pairs of microcapacitors C are symmetrically distributed around the center line of the cylindrical central anchor point. The midpoints of the four arc-shaped electrodes D are directly opposite the four U-shaped coupling beams B, and the inner surfaces of the four arc-shaped electrodes D and the outer surfaces of the circular frame together form four microcapacitors D; the four microcapacitors D are symmetrically distributed around the center line of the cylindrical central anchor point. Four rectangular electrodes are coaxially arranged below four rectangular mass blocks, and the side lengths of the four rectangular electrodes are smaller than the side lengths of the four rectangular mass blocks. The upper surfaces of the four rectangular electrodes and the lower surfaces of the four rectangular mass blocks form four microcapacitors E. The four microcapacitors E are symmetrically distributed around the center line of the cylindrical central anchor point.

[0005] During operation, four pairs of arc-shaped electrodes A and four pairs of arc-shaped electrodes B serve as z-axis detection electrodes. Four pairs of microcapacitors A and four pairs of microcapacitors B serve as z-axis detection capacitors. The first pair of arc-shaped electrodes C, the third pair of arc-shaped electrodes C, the first arc-shaped electrode D, and the third arc-shaped electrode D all serve as driving mode excitation electrodes. The first pair of microcapacitors C, the third pair of microcapacitors C, the first microcapacitor D, and the third microcapacitor D all serve as driving mode excitation capacitors. The second pair of arc-shaped electrodes C, the fourth pair of arc-shaped electrodes C, the second arc-shaped electrode D, and the fourth arc-shaped electrode D all serve as driving mode feedback electrodes. The second pair of microcapacitors C, the fourth pair of microcapacitors C, the second microcapacitor D, and the fourth microcapacitor D all serve as driving mode feedback capacitors. The first and third rectangular mass blocks serve as x-axis detection mass blocks. The first and third rectangular electrodes serve as x-axis detection electrodes. The first and third microcapacitors E serve as x-axis detection capacitors. The second and fourth rectangular mass blocks serve as y-axis detection mass blocks. The second and fourth rectangular electrodes both serve as y-axis detection electrodes. The second and fourth microcapacitors both serve as y-axis detection capacitors. The twelve z-axis detection electrodes, six driving mode excitation electrodes, six driving mode feedback electrodes, two x-axis detection electrodes, and two y-axis detection electrodes are all connected to the control system via metal wires.

[0006] The specific working process is as follows: The control system generates a driving voltage signal, which is transmitted through metal wires to six driving mode excitation capacitors, causing the annular frame to maintain a four-antinode oscillation with a circumferential wave number of 2 under the action of electrostatic force. During the vibration process, the control system measures the displacement of the annular frame in real time through the six driving mode feedback capacitors, and controls the driving voltage signal in real time according to the measurement results. This ensures that the displacement amplitude of the annular frame remains constant and that the annular frame vibrates at its resonant frequency. When there is no angular velocity input, the annular frame, under the excitation of the six driving mode excitation capacitors, undergoes in-plane four-antinode bending vibration in the driving mode. At this point, the two x-axis detection mass blocks, two x-axis detection electrodes, two y-axis detection mass blocks, and two y-axis detection electrodes are located at the antinodes of the four-antinode bending vibration, and the twelve z-axis detection electrodes are located at the nodes of the four-antinode bending vibration. The plate spacing of the two x-axis detection capacitors, the plate spacing of the two y-axis detection capacitors, and the plate spacing of the twelve z-axis detection capacitors all remain unchanged, as do the capacitances of the two x-axis detection capacitors, the two y-axis detection capacitors, and the twelve z-axis detection capacitors. At this point, the output of the present invention is zero. When there is an angular velocity input in the x-axis direction, the annular frame still performs in-plane four-antinode bending vibration in the driving mode. The two x-axis detection mass blocks, two x-axis detection electrodes, two y-axis detection mass blocks, and two y-axis detection electrodes are still located at the antinodes of the four-antinode bending vibration, and the twelve z-axis detection electrodes are still located at the nodes of the four-antinode bending vibration. However, the two x-axis detection mass blocks will simultaneously move out of plane (in opposite directions), causing the plate spacing of the two x-axis detection capacitors to change, thereby changing the capacitance of the two x-axis detection capacitors. At this point, the control system can calculate the angular velocity input in the x-axis direction by detecting the capacitance of the two x-axis sensing capacitors. When there is an angular velocity input in the y-axis direction, the annular frame still performs in-plane four-antinode bending vibration in the driving mode. The two x-axis sensing masses, two x-axis sensing electrodes, two y-axis sensing masses, and two y-axis sensing electrodes are still located at the antinodes of the four-antinode bending vibration, and the twelve z-axis sensing electrodes are still located at the nodes of the four-antinode bending vibration. However, the two y-axis sensing masses will simultaneously move out of plane (in opposite directions), causing a change in the distance between the plates of the two y-axis sensing capacitors, thereby changing the capacitance of the two y-axis sensing capacitors. At this point, the control system can calculate the angular velocity input in the y-axis direction by detecting the capacitance of the two y-axis sensing capacitors. When there is an angular velocity input in the z-axis direction, the annular frame performs in-plane four-antinode bending vibration in the sensing mode under the coupling of Coriolis forces.At this point, the two x-axis sensing masses, two x-axis sensing electrodes, two y-axis sensing masses, and two y-axis sensing electrodes are located at the nodes of the four-antinode bending vibration, while the twelve z-axis sensing electrodes are located at the antinodes of the four-antinode bending vibration. This causes a change in the plate spacing of the twelve z-axis sensing capacitors, thereby changing the capacitance of the twelve z-axis sensing capacitors. The control system can then calculate the angular velocity input in the z-axis direction by detecting the capacitance of the twelve z-axis sensing capacitors.

[0007] Based on the above process, compared with existing triaxial gyroscopes, the novel triaxial silicon micro gyroscope of this invention, through the adoption of a completely new structure, achieves simultaneous measurement of angular velocity input in the x, y, and z axes, thus possessing the following advantages: First, compared with existing assembled triaxial gyroscopes, this invention adopts a monolithic integrated structure, therefore it is no longer limited by assembly processes, thereby effectively improving measurement accuracy. Second, compared with existing monolithic integrated triaxial gyroscopes, this invention has the following advantages: Firstly, this invention achieves complete decoupling of each driving and detection direction, thereby effectively reducing coupling errors between modes and thus effectively improving measurement accuracy. Secondly, the structure and manufacturing process of this invention are simpler, therefore it can achieve mass production, thereby effectively reducing production costs.

[0008] This invention has a reasonable structure and ingenious design, which effectively solves the problems of low measurement accuracy and high production cost of existing three-axis gyroscopes, and is suitable for high-precision fields such as military navigation and deep space exploration. Attached Figure Description

[0009] Figure 1 This is a three-dimensional structural diagram of the present invention.

[0010] Figure 2 This is a three-dimensional structural diagram of the glass substrate and four rectangular electrodes in this invention.

[0011] Figure 3 This is a schematic diagram of the planar structure of the resonator part and the electrode part in this invention.

[0012] Figure 4 yes Figure 3 A partial structural diagram.

[0013] In the figure: 1-glass substrate, 201-cylindrical center anchor point, 202-square anchor point A, 203-square anchor point B, 204-Chinese character-shaped coupling beam A, 205-circular frame, 206-Chinese character-shaped coupling beam B, 207-rectangular outer frame, 208-U-shaped coupling beam A, 209-U-shaped coupling beam B, 210-H-shaped coupling beam A, 211-rectangular inner frame, 212-Chinese character-shaped coupling beam C, 213-rectangular mass block, 214-H-shaped coupling beam B, 301-arc electrode A, 302-arc electrode B, 303-arc electrode C, 304-arc electrode D, 305-rectangular electrode. Detailed Implementation

[0014] A novel triaxial silicon microgyroscope includes a glass substrate 1, a resonator section, and an electrode section; The resonator part includes a cylindrical central anchor point 201, four sets of square anchor points A202, and four square anchor points B203; The cylindrical central anchor point 201, the four sets of square anchor points A202, and the four square anchor points B203 are all bonded to the upper surface of the glass substrate 1. Each set of square anchor points A202 includes four square anchor points A202 arranged in a rectangular array; the four sets of square anchor points A202 are symmetrically distributed around the center line of the cylindrical central anchor point 201; Each square anchor point B203 includes two square anchor points B203 symmetrically distributed along the tangential direction; the four square anchor points B203 are symmetrically distributed around the center line of the cylindrical central anchor point 201. Four U-shaped coupling beams A204 are connected to the side of the cylindrical central anchor point 201; the four U-shaped coupling beams A204 are symmetrically distributed around the center line of the cylindrical central anchor point 201. The ends of the four U-shaped coupling beams A204 are connected to a circular frame 205. The inner side of the circular frame 205 is connected to four Chinese-shaped coupling beams B206; the four Chinese-shaped coupling beams B206 are symmetrically distributed around the center line of the cylindrical central anchor point 201, and the four Chinese-shaped coupling beams B206 and the four Chinese-shaped coupling beams A204 are arranged equidistantly and alternately around the center line of the cylindrical central anchor point 201. Each of the Chinese-shaped coupling beams B206 is connected to a rectangular outer frame 207 at its end; the four rectangular outer frames 207 are symmetrically distributed around the center line of the cylindrical central anchor point 201, and the four rectangular outer frames 207 and the four Chinese-shaped coupling beams A204 are arranged equidistantly and alternately around the center line of the cylindrical central anchor point 201. Each rectangular outer frame 207 is connected to two corresponding U-shaped coupling beams A204 by two U-shaped coupling beams A208 that are symmetrically distributed along the tangential direction, and the two U-shaped coupling beams A208 are a pair; the four pairs of U-shaped coupling beams A208 are symmetrically distributed around the center line of the cylindrical central anchor point 201. Each rectangular outer frame 207 has four U-shaped coupling beams B209 arranged in a rectangular array on its inner side, and the four U-shaped coupling beams B209 form a group; the four groups of U-shaped coupling beams B209 are symmetrically distributed around the center line of the cylindrical central anchor point 201, and the ends of the four groups of U-shaped coupling beams B209 are connected to the sides of the four groups of square anchor points A202 in a corresponding manner. Each rectangular outer frame 207 has two radially symmetrically distributed H-shaped coupling beams A210 connected to its inner side, and the two H-shaped coupling beams A210 are a pair; the four pairs of H-shaped coupling beams A210 are symmetrically distributed around the center line of the cylindrical central anchor point 201. Each pair of H-shaped coupling beams A210 is connected to a rectangular inner frame 211 at its end; the four rectangular inner frames 211 are symmetrically distributed around the center line of the cylindrical central anchor point 201, and the four rectangular inner frames 211 and the four U-shaped coupling beams A204 are arranged equidistantly and alternately around the center line of the cylindrical central anchor point 201. Each rectangular inner frame 211 has four rectangular U-shaped coupling beams C212 arranged in a rectangular array on its inner side, and the four U-shaped coupling beams C212 form a group; the four groups of U-shaped coupling beams C212 are symmetrically distributed around the center line of the cylindrical central anchor point 201. Each set of Chinese-shaped coupling beams C212 is connected to a rectangular mass block 213 at its end; the four rectangular mass blocks 213 are symmetrically distributed around the center line of the cylindrical central anchor point 201, and the four rectangular mass blocks 213 and the four Chinese-shaped coupling beams A204 are arranged equidistantly and alternately around the center line of the cylindrical central anchor point 201. Each rectangular mass block 213 has two H-shaped coupling beams B214 that are symmetrically distributed along the tangential direction on its side, and the two H-shaped coupling beams B214 are a pair; the four pairs of H-shaped coupling beams B214 are symmetrically distributed around the center line of the cylindrical central anchor point 201, and the ends of the four pairs of H-shaped coupling beams B214 are connected to the sides of the four square block anchor points B203 in a one-to-one correspondence. The electrode portion includes four pairs of arc-shaped electrodes A301, four arc-shaped electrodes B302, four pairs of arc-shaped electrodes C303, four arc-shaped electrodes D304, and four rectangular electrodes 305. Four pairs of arc-shaped electrodes A301, four arc-shaped electrodes B302, four pairs of arc-shaped electrodes C303, and four arc-shaped electrodes D304 are all bonded to the upper surface of the glass substrate 1; four rectangular electrodes 305 are all sputtered onto the upper surface of the glass substrate 1. Four pairs of arc-shaped electrodes A301 are symmetrically distributed on both sides of the four U-shaped coupling beams A204, and the outer surfaces of the four pairs of arc-shaped electrodes A301 and the inner surfaces of the annular frame 205 together form four pairs of microcapacitors A; the four pairs of microcapacitors A are symmetrically distributed around the center line of the cylindrical central anchor point 201. The midpoints of the four arc-shaped electrodes B302 are directly opposite to the four U-shaped coupling beams A204, and the inner surfaces of the four arc-shaped electrodes B302 and the outer surfaces of the annular frame 205 together form four microcapacitors B; the four microcapacitors B are symmetrically distributed around the center line of the cylindrical central anchor point 201. Four pairs of arc-shaped electrodes C303 are symmetrically distributed on both sides of the four U-shaped coupling beams B206, and the outer surfaces of the four pairs of arc-shaped electrodes C303 and the inner surfaces of the annular frame 205 together form four pairs of microcapacitors C; the four pairs of microcapacitors C are symmetrically distributed around the center line of the cylindrical central anchor point 201. The midpoints of the four arc-shaped electrodes D304 are directly opposite the four U-shaped coupling beams B206, and the inner surfaces of the four arc-shaped electrodes D304 and the outer surfaces of the annular frame 205 together form four microcapacitors D; the four microcapacitors D are symmetrically distributed around the center line of the cylindrical central anchor point 201. Four rectangular electrodes 305 are coaxially arranged below four rectangular mass blocks 213, and the side lengths of the four rectangular electrodes 305 are smaller than the side lengths of the four rectangular mass blocks 213. The upper surfaces of the four rectangular electrodes 305 and the lower surfaces of the four rectangular mass blocks 213 form four microcapacitors E. The four microcapacitors E are symmetrically distributed around the center line of the cylindrical central anchor point 201.

[0015] The glass substrate 1 is square, and its center line coincides with the center line of the cylindrical center anchor point 201.

[0016] Distances are maintained between the four T-shaped coupling beams A204 and the glass substrate 1, between the circular frame 205 and the glass substrate 1, between the four T-shaped coupling beams B206 and the glass substrate 1, between the four rectangular outer frames 207 and the glass substrate 1, between the four pairs of U-shaped coupling beams A208 and the glass substrate 1, between the four sets of U-shaped coupling beams B209 and the glass substrate 1, between the four pairs of H-shaped coupling beams A210 and the glass substrate 1, between the four rectangular inner frames 211 and the glass substrate 1, between the four sets of T-shaped coupling beams C212 and the glass substrate 1, between the four rectangular mass blocks 213 and the glass substrate 1, and between the four pairs of H-shaped coupling beams B214 and the glass substrate 1.

[0017] The glass substrate, the resonator, and the electrode are manufactured as a single unit using SOG technology.

[0018] While specific embodiments of the present invention have been described above, those skilled in the art should understand that these are merely illustrative examples, and the scope of protection of the present invention is defined by the appended claims. Those skilled in the art can make various changes or modifications to these embodiments without departing from the principles and essence of the present invention, but all such changes and modifications fall within the scope of protection of the present invention.

Claims

1. A novel triaxial silicon microgyroscope, characterized in that: Includes a glass substrate (1), a resonator portion, and an electrode portion; The resonator part includes a cylindrical central anchor point (201), four sets of square anchor points A (202), and four square anchor points B (203); The cylindrical central anchor point (201), four sets of square anchor points A (202), and four square anchor points B (203) are all bonded to the upper surface of the glass substrate (1); Each set of square anchor points A (202) includes four square anchor points A (202) arranged in a rectangular array; the four sets of square anchor points A (202) are symmetrically distributed around the center line of the cylindrical central anchor point (201); Each square anchor point B (203) includes two square anchor points B (203) symmetrically distributed along the tangential direction; the four square anchor points B (203) are symmetrically distributed around the center line of the cylindrical central anchor point (201); The cylindrical central anchor point (201) is connected to four U-shaped coupling beams A (204) on its side; the four U-shaped coupling beams A (204) are symmetrically distributed around the center line of the cylindrical central anchor point (201); The ends of the four Chinese-shaped coupling beams A (204) are connected to a circular frame (205). The inner side of the circular frame (205) is connected to four Chinese character-shaped coupling beams B (206); the four Chinese character-shaped coupling beams B (206) are symmetrically distributed around the center line of the cylindrical central anchor point (201), and the four Chinese character-shaped coupling beams B (206) and the four Chinese character-shaped coupling beams A (204) are arranged equidistantly around the center line of the cylindrical central anchor point (201); Each of the Chinese-shaped coupling beams B (206) is connected to a rectangular outer frame (207) at its end; the four rectangular outer frames (207) are symmetrically distributed around the center line of the cylindrical central anchor point (201), and the four rectangular outer frames (207) and the four Chinese-shaped coupling beams A (204) are arranged equidistantly and alternately around the center line of the cylindrical central anchor point (201); Each rectangular outer frame (207) is connected to two corresponding U-shaped coupling beams A (204) with two U-shaped coupling beams A (208) symmetrically distributed along the tangential direction, and the two U-shaped coupling beams A (208) are a pair; the four pairs of U-shaped coupling beams A (208) are symmetrically distributed around the center line of the cylindrical central anchor point (201); Each rectangular outer frame (207) has four U-shaped coupling beams B (209) arranged in a rectangular array on its inner side, and the four U-shaped coupling beams B (209) form a group; the four groups of U-shaped coupling beams B (209) are symmetrically distributed around the center line of the cylindrical central anchor point (201), and the ends of the four groups of U-shaped coupling beams B (209) are connected to the sides of the four groups of square anchor points A (202) in a corresponding manner; Each rectangular outer frame (207) has two radially symmetrically distributed H-shaped coupling beams A (210) connected to its inner side, and the two H-shaped coupling beams A (210) are a pair; the four pairs of H-shaped coupling beams A (210) are symmetrically distributed around the center line of the cylindrical central anchor point (201); Each pair of H-shaped coupling beams A (210) is connected to a rectangular inner frame (211) at its end; the four rectangular inner frames (211) are symmetrically distributed around the center line of the cylindrical central anchor point (201), and the four rectangular inner frames (211) and the four Chinese character-shaped coupling beams A (204) are arranged equidistantly and alternately around the center line of the cylindrical central anchor point (201); Each rectangular inner frame (211) has four rectangularly arranged U-shaped coupling beams C (212) connected to its inner side, and the four U-shaped coupling beams C (212) form a group; the four groups of U-shaped coupling beams C (212) are symmetrically distributed around the center line of the cylindrical central anchor point (201); Each set of Chinese-shaped coupling beams C (212) is connected to a rectangular mass block (213) at its end; the four rectangular mass blocks (213) are symmetrically distributed around the center line of the cylindrical center anchor point (201), and the four rectangular mass blocks (213) and the four Chinese-shaped coupling beams A (204) are arranged equidistantly around the center line of the cylindrical center anchor point (201); Each rectangular mass block (213) has two H-shaped coupling beams B (214) symmetrically distributed along the tangential direction on its side, and the two H-shaped coupling beams B (214) are a pair; the four pairs of H-shaped coupling beams B (214) are symmetrically distributed around the center line of the cylindrical central anchor point (201), and the ends of the four pairs of H-shaped coupling beams B (214) are connected to the sides of the four square block anchor points B (203) in a one-to-one correspondence; The electrode portion includes four pairs of arc-shaped electrodes A (301), four arc-shaped electrodes B (302), four pairs of arc-shaped electrodes C (303), four arc-shaped electrodes D (304), and four rectangular electrodes (305). Four pairs of arc-shaped electrodes A (301), four arc-shaped electrodes B (302), four pairs of arc-shaped electrodes C (303), and four arc-shaped electrodes D (304) are all bonded to the upper surface of the glass substrate (1); four rectangular electrodes (305) are all sputtered onto the upper surface of the glass substrate (1). Four pairs of arc-shaped electrodes A (301) are symmetrically distributed on both sides of four U-shaped coupling beams A (204), and the outer surfaces of the four pairs of arc-shaped electrodes A (301) and the inner surfaces of the circular frame (205) together constitute four pairs of microcapacitors A; the four pairs of microcapacitors A are symmetrically distributed around the center line of the cylindrical central anchor point (201). The midpoints of the four arc-shaped electrodes B (302) are directly opposite to the four Chinese character-shaped coupling beams A (204), and the inner surfaces of the four arc-shaped electrodes B (302) and the outer surfaces of the circular frame (205) together form four microcapacitors B; the four microcapacitors B are symmetrically distributed around the center line of the cylindrical central anchor point (201). Four pairs of arc-shaped electrodes C (303) are symmetrically distributed on both sides of the four T-shaped coupling beams B (206), and the outer surfaces of the four pairs of arc-shaped electrodes C (303) and the inner surfaces of the circular frame (205) together constitute four pairs of microcapacitors C; the four pairs of microcapacitors C are symmetrically distributed around the center line of the cylindrical central anchor point (201). The midpoints of the four arc-shaped electrodes D (304) are directly opposite to the four Chinese character-shaped coupling beams B (206), and the inner surfaces of the four arc-shaped electrodes D (304) and the outer surfaces of the circular frame (205) together form four microcapacitors D; the four microcapacitors D are symmetrically distributed around the center line of the cylindrical central anchor point (201). Four rectangular electrodes (305) are coaxially arranged below four rectangular mass blocks (213) in a one-to-one correspondence, and the side length of the four rectangular electrodes (305) is smaller than the side length of the four rectangular mass blocks (213) in a one-to-one correspondence; the upper surface of the four rectangular electrodes (305) and the lower surface of the four rectangular mass blocks (213) form four microcapacitors E in a one-to-one correspondence; the four microcapacitors E are symmetrically distributed around the center line of the cylindrical central anchor point (201).

2. The novel triaxial silicon micro gyroscope according to claim 1, characterized in that: The glass substrate (1) is square, and its center line coincides with the center line of the cylindrical center anchor point (201).

3. The novel triaxial silicon micro gyroscope according to claim 1, characterized in that: There are distances between the four Chinese-shaped coupling beams A (204) and the glass substrate (1), between the circular frame (205) and the glass substrate (1), between the four Chinese-shaped coupling beams B (206) and the glass substrate (1), between the four rectangular outer frames (207) and the glass substrate (1), between the four pairs of U-shaped coupling beams A (208) and the glass substrate (1), between the four sets of U-shaped coupling beams B (209) and the glass substrate (1), between the four pairs of H-shaped coupling beams A (210) and the glass substrate (1), between the four rectangular inner frames (211) and the glass substrate (1), between the four sets of Chinese-shaped coupling beams C (212) and the glass substrate (1), between the four rectangular mass blocks (213) and the glass substrate (1), and between the four pairs of H-shaped coupling beams B (214) and the glass substrate (1).

4. A novel triaxial silicon micro gyroscope according to claim 1, characterized in that: The glass substrate (1), the resonator part, and the electrode part are manufactured as a single unit using SOG process.

Images