A polishing head changing tool and method

Abstract

The application discloses a kind of grinding head replacement tools and methods, tool includes: the first support pad and the second support pad of superposition, and the third support pad of connecting the first support pad and the second support pad, the first support pad, the second support pad and the third support pad are enclosed into sealed space;One of the first support pad and the second support pad is used to place on grinding disc, another of the first support pad and the second support pad is used to place grinding head, by control, the volume of the sealed space is enlarged due to pressure increase, so that the relative motion of mutual far away between the first support pad and the second support pad occurs, the grinding head is lifted to target height from the grinding disc to install.The application has the advantages of convenient material, simple and convenient to make, low cost, convenient replacement method.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor processing, in particular to a grinding head replacement tool and method. BACKGROUND

[0002] The grinding head is an important component in the grinding equipment. When the grinding head is used for a certain period of time, it needs to be maintained. At this time, the old grinding head (the grinding head that needs to be replaced for maintenance) needs to be disassembled from the grinding arm and a new grinding head (the grinding head that needs to be replaced after maintenance) needs to be replaced.

[0003] The existing method for replacing the grinding head is as follows: first, the grinding arm with the old grinding head that needs to be replaced is lifted from the grinding pad of the grinding disc, then the gasket is placed on the grinding pad, and then the grinding arm is lowered, the old grinding head is placed on the gasket, and the old grinding head is disassembled from the grinding arm, the grinding arm is lifted, and the old grinding head is removed from the grinding disc; secondly, the new grinding head 12 is moved onto the grinding disc 10 and placed on the gasket 11, the gasket 11 is moved to the lower part of the connecting part of the main shaft 13 of the grinding arm by manually moving the gasket 11, so that the pin shaft on the connecting flange 15 of the new grinding head 12 is aligned with the pin hole on the main shaft 13, and the pin shaft on the main shaft 13 is aligned with the pin hole on the connecting flange 15 of the new grinding head 12, as shown in Figure 1 , and then the gasket 11 is lifted from the grinding disc 10 by manual operation, so that the connecting flange 15 on the new grinding head 12 is completely attached to the main shaft 13 without any gap, as shown in Figure 2 , at this time, the new grinding head 12 can be tightly installed on the grinding arm 14.

[0004] In the above process of replacing the grinding head, because the internal space of the grinding equipment cavity is limited and the grinding head itself is heavy, when the gasket is lifted by manual operation, the hand cannot exert enough force, and it is difficult to quickly lift the new grinding head to a height where it can be aligned with and attached to the main shaft of the grinding arm, which limits the replacement efficiency, and there is a risk that the grinding head will hit the main shaft of the grinding arm due to excessive force. SUMMARY

[0005] The purpose of the present application is to overcome the above-mentioned defects in the prior art and provide a grinding head replacement tool and method.

[0006] To achieve the above-mentioned purpose, the technical solution of the present application is as follows:

[0007] The present application provides a grinding head replacement tool, comprising:

[0008] The first support pad, the second support pad and the third support pad form a sealed space.

[0009] One of the first support pad and the second support pad is used to place on the grinding disc, the other of the first support pad and the second support pad is used to place the grinding head, by controlling the volume of the sealed space to expand due to the pressure increase, so that the relative movement of the first support pad and the second support pad away from each other occurs, the grinding head is lifted from the grinding disc to the target height for installation.

[0010] Further, the first support pad and the second support pad have corresponding shapes and sizes, the third support pad is sealed around the outer periphery of the first support pad and the second support pad; and / or, the first support pad and the second support pad are wrapped in the third support pad.

[0011] Further, the first support pad and the second support pad remain unchanged in size when the sealed space expands; and / or, the third support pad elastically deforms and stretches between the first support pad and the second support pad when the sealed space expands, the amount of elastic deformation and stretching is adapted to the distance required for the grinding head to be lifted from the grinding disc to the target height; and / or, the width of the third support pad between the first support pad and the second support pad is adapted to the distance required for the grinding head to be lifted from the grinding disc to the target height.

[0012] Further, the third support pad has a folding structure, which unfolds when the pressure in the sealed space increases, to adapt to the size when the sealed space expands.

[0013] Further, the first support pad and / or the second support pad includes a grinding pad; and / or, the tool is provided with an indication mark for alignment with the grinding head and the grinding disc; and / or, the third support pad is provided with an interface for docking with a pressure control pipeline, the pressure control pipeline pressurizes and depressurizes the sealed space through the interface; and / or, the sealed space is pressurized by filling fluid.

[0014] The application also provides a grinding head replacement method, comprising:

[0015] A grinding head replacement tool is provided, the tool includes a first support pad and a second support pad stacked, and a third support pad connecting the first support pad and the second support pad, the first support pad, the second support pad and the third support pad form a sealed space;

[0016] When replacing the grinding head, the tool is placed at a first target position on the grinding disc, a second grinding head to be replaced is placed on the tool at a second target position, and the upper grinding arm is aligned with the second grinding head;

[0017] The sealed space is pressurized to expand the volume of the sealed space, so that the first support pad and the second support pad move away from each other, and the second polishing head is lifted from the polishing disc to the target height of abutting and aligning with the polishing arm;

[0018] The second polishing head is fixedly installed on the polishing arm.

[0019] Further, the sealed space is pressurized by filling gas or liquid into the sealed space to expand the sealed space, and the volume change rate of the sealed space during expansion is controlled by controlling the flow rate and pressure of the filled gas or liquid to control the lifting rate of the second polishing head.

[0020] Further, when the tool is placed on the polishing disc, the second indicator mark provided on the tool is aligned with the first indicator mark provided on the polishing disc, so that the projections of the second indicator mark and the first indicator mark are located on the same diameter passing through the center of the polishing disc and are separated by a first distance, so that the tool is located on the first target position; when the second polishing head is placed on the tool, the third indicator mark provided on the second polishing head is aligned with the second indicator mark, so that the projection of the third indicator mark is located on the same straight line with the projections of the second indicator mark and the first indicator mark and is separated from the second indicator mark by a second distance, so that the second polishing head is located on the second target position; the fourth indicator mark provided on the polishing arm is aligned with the second indicator mark, so that the projection of the fourth indicator mark is located on the same straight line with the projections of the second indicator mark and the first indicator mark and is separated from the second indicator mark by a second distance, so that the polishing arm above is aligned with the second polishing head.

[0021] Further, when the polishing arm is swung to the fourth indicator mark and the projection of the first indicator mark is located on the same diameter passing through the center of the polishing disc, the distance between the fourth indicator mark and the first indicator mark is taken as a third distance, the first distance is determined according to the area size of the tool, and the second distance is determined according to the third distance.

[0022] Further, before placing the tool on the first target position on the polishing disc, it further comprises:

[0023] The first polishing head carried by the polishing arm is lifted from the polishing disc;

[0024] Before placing the second polishing head to be replaced on the tool at the second target position, it further comprises:

[0025] lowering the lifted first polishing head to the tool through the polishing arm, then detaching the first polishing head from the polishing arm and lifting the polishing arm to separate from the first polishing head;

[0026] moving the first polishing head out of the polishing disc from the tool.

[0027] From the above technical solution, it can be seen that the present application designs a polishing head replacement tool with a double-layer support pad structure of a first support pad and a second support pad, and a third support pad is used for closed connection, so as to form a sealed space with a variable volume with the increase or decrease of pressure in the tool. When the polishing head needs to be replaced, the polishing head is placed on the tool, and the sealed space in the tool is expanded due to the increase of pressure, so that the distance between the double-layer support pads is also increased, so that the polishing head can be quickly and labor-savingly lifted to the target height and aligned and installed with the polishing arm, so that the polishing head replacement is more convenient, thereby reducing the replacement time and improving the work efficiency. Moreover, the first support pad and the second support pad can be formed by using the existing polishing pad, and the third support pad can be formed by using common elastic materials (such as elastic rubber or polymer, oxford cloth, etc.) or basically inelastic packaging materials (plastic film, etc.), which has the advantages of convenient material selection, simple manufacturing and low cost. BRIEF DESCRIPTION OF DRAWINGS

[0028] Figures 1-2 is a state diagram when a polishing head is replaced according to a polishing head replacement method of the prior art.

[0029] Figure 3 is a structural diagram of a polishing head replacement tool according to a preferred embodiment of the present application.

[0030] Figure 4 is a state diagram when the polishing head replacement tool of Figure 3 is inflated and expanded.

[0031] Figure 5 is a flowchart of a polishing head replacement method according to a preferred embodiment of the present application.

[0032] Figure 6 is a state diagram of a polishing head placed on a polishing head replacement tool according to a preferred embodiment of the present application.

[0033] Figures 7-8 is a state diagram when a polishing head is replaced according to a polishing head replacement method of the present application. DETAILED DESCRIPTION

[0034] In order to make the purposes, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below. Obviously, the described embodiments are only some of the embodiments of the present application, but not all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative efforts belong to the scope of the present application. Unless otherwise defined, the technical terms or scientific terms used herein should be understood as the common meanings of the technical terms or scientific terms by those skilled in the art. The similar words such as "comprise" used herein mean that the elements or objects before the words cover the elements or objects listed after the words and their equivalents, and do not exclude other elements or objects.

[0035] The specific embodiments of the present application will be further described in detail below with reference to the accompanying drawings.

[0036] Reference Figure 3 The polishing head replacement tool 20 of the present application comprises a first support pad 21, a second support pad 22 and a third support pad 23.

[0037] The first support pad 21 and the second support pad 22 are stacked together to form a double-layer structure, and the third support pad 23 is connected to the first support pad 21 and the second support pad 22. The stacking manner of the first support pad 21 and the second support pad 22 is only to have an up-down positional relationship between the first support pad 21 and the second support pad 22, and the first support pad 21 and the second support pad 22 do not need to be stacked together and adhere to each other. Moreover, the first support pad 21, the second support pad 22 and the third support pad 23 together enclose a sealed space 24. In the initial state, the first support pad 21 and the second support pad 22 are close to each other, so that the volume of the sealed space 24 between the first support pad 21 and the second support pad 22 is very small, and even the volume of the sealed space 24 can be zero or close to zero.

[0038] One of the first support pad 21 and the second support pad 22 is used to be placed on a polishing disc, and the other of the first support pad 21 and the second support pad 22 is used to place a polishing head. That is, the use direction of the first support pad 21 and the second support pad 22 is not required by the polishing head replacement tool 20 of the present application, so that the convenience in use can be improved. By controlling the pressure in the sealed space 24 to be increased, the volume of the sealed space 24 is expanded, so that the relative movement from adhering to each other to moving away from each other between the first support pad 21 and the second support pad 22 occurs, that is, the distance between the first support pad 21 and the second support pad 22 is increased, such as Figure 4The grinding head is lifted to a target height from the grinding disc, and is mounted with the grinding arm preset above the grinding disc to realize the replacement of the grinding head (the grinding head originally mounted on the grinding arm needs to be dismounted first).

[0039] In some embodiments, the first and second support pads 21 and 22 have corresponding shapes and sizes, and the third support pad 23 is sealed around the outer periphery of the first and second support pads 21 and 22. For example, the first and second support pads 21 and 22 have a circular shape corresponding to the grinding disc (see FIG. 1), and the diameters of the first and second support pads 21 and 22 correspond; the third support pad 23 is sealed around the circumference of the first and second support pads 21 and 22. Of course, the first and second support pads 21 and 22 can also have other shapes, and the sizes of the first and second support pads 21 and 22 can also be unequal. The third support pad 23 can be sealed and connected with the first and second support pads 21 and 22 in a conventional manner such as gluing or welding. In order to ensure the sealing performance, the third support pad 23 can further extend from the outside of the first and second support pads 21 and 22 to the surface of the first and second support pads 21 and 22, so as to appropriately expand the sealing connection area between the third support pad 23 and the first and second support pads 21 and 22. Figure 6

[0040] In other embodiments, the third support pad can also have a pocket shape, and the first and second support pads are wrapped in the third support pad. In this way, only the first and second support pads located in the pocket of the third support pad need to be simply connected with the inner wall of the third support pad respectively, and the bag opening of the third support pad is tightened to conveniently realize sealing and establish a sealed space between the third support pad and the first and second support pads.

[0041] Reference Figures 3-4 ​In some embodiments, the first support pad 21 and the second support pad 22 are made of a hard material, such as hard rubber, so that the first support pad 21 and the second support pad 22 remain unchanged or substantially unchanged in size when the sealed space 24 expands. The third support pad 23 is made of a soft elastic material, such as elastic rubber or polymer, oxford cloth material, etc., so that the third support pad 23 elastically deforms and stretches between the first support pad 21 and the second support pad 22 when the sealed space 24 expands. The amount of elastic deformation and stretching of the third support pad 23 needs to be adapted to the distance by which the grinding head needs to be lifted to the target height from the grinding disc. When the sealed space 24 is pressurized, the volume of the sealed space 24 will expand due to the increase in pressure, forcing the first support pad 21 and the second support pad 22 to move away from each other. At this time, the elastic stretching of the third support pad 23 with elasticity can well adapt to the increase in the volume of the sealed space 24 and ensure the sealing. By selecting a material with an appropriate elastic deformation capability to make the third support pad 23, the lifting height requirement of the grinding head can be met, and the problem of damage to the third support pad 23 can be avoided.

[0042] In other embodiments, the third support pad can also be made of a soft material without or substantially without elasticity. For example, the third support pad can be made of ordinary packaging materials such as plastic film. In this case, the width of the third support pad between the first support pad and the second support pad needs to be adapted to the distance by which the grinding head needs to be lifted to the target height from the grinding disc.

[0043] In some embodiments, the third support pad has a folded structure, such as a repeatedly folded structure or an irregularly folded structure. The folded structure of the third support pad can unfold when the pressure in the sealed space increases, so that the surface area of the third support pad increases, thereby adapting to the size of the expanded sealed space without being damaged.

[0044] In some embodiments, the first support pad 21 and the second support pad 22 can be made of the grinding pad configured by the grinding equipment. In this way, the grinding head changing tool 20 of the present application has the advantages of convenient material selection, simple manufacturing, and low cost.

[0045] In some embodiments, the third support pad 23 is provided with an interface for connecting to an external pressure control pipeline, so that the pressure control pipeline can control the pressurization and depressurization of the sealed space 24 through the interface. A valve can be provided on the interface. By filling fluid into the sealed space 24 through the pressure control pipeline, the sealed space 24 can be pressurized, so that the first support pad 21 and the second support pad 22 are lifted by the expanded sealed space 24 and move away from each other, thereby lifting the grinding head placed on the tool 20.

[0046] In some embodiments, the fluid filled into the tool 20 can be a gas or a liquid.

[0047] When a gas is used as the pressurizing medium, a valve structure similar to a tire valve core can be used for the interface to facilitate installation on the third support pad 23. The pressure control pipeline can use a gas supply pipeline configured on site with a pressure gauge and a flow meter. A foot-operated air pump can also be used to pressurize the tool 20.

[0048] Reference Figure 6 In some embodiments, the tool 20 is provided with indication marks for alignment with the polishing head 12 and the polishing plate 10. For example, a first indication mark 31 can be provided on the edge of the polishing plate 10, a second indication mark 32 can be provided on the edge of the tool 20, and a pin shaft 151 provided on the polishing head connecting flange 15 can be used as a third indication mark 33, and a pin hole provided on the polishing arm main shaft can be used as a fourth indication mark, so that when the polishing head 12 is replaced by the tool 20, the mutual alignment between the polishing plate 10, the tool 20, the polishing head, and the polishing arm can be performed by using the first to fourth indication marks.

[0049] The method for replacing a polishing head according to the present application will be further described in detail below through a specific embodiment and in conjunction with the accompanying drawings.

[0050] Reference Figure 5 The method for replacing a polishing head according to the present application comprises the following steps:

[0051] Step S1: Raise the polishing arm to lift the carried first polishing head from the polishing plate.

[0052] The polishing head is generally installed on the main shaft of the polishing arm through a connecting flange. The connecting flange 15 of the polishing head 12 is provided with a pin shaft 151 (see Figure 6 ); and the main shaft 13 of the polishing arm 14 is provided with a pin hole. When installing, the polishing head 12 is lifted, the pin shaft 151 is aligned and fitted with the pin hole, the connecting flange 15 is attached to the main shaft 13, and then fastened, so that the polishing head 12 can be installed on the polishing arm 14 (see Figures 1-2 ).

[0053] During the use period, the polishing arm carries the polishing head and presses it on the polishing plate to polish the wafer provided on the bottom surface of the polishing head.

[0054] When the polishing head maintenance cycle comes, the old polishing head (hereinafter, a first polishing head represents the old polishing head to be replaced, and a second polishing head represents the new polishing head to be replaced) carried by the polishing arm is lifted from the polishing table by raising the polishing arm, so that the polishing head replacement tool 20 (a single layer pad was used in the past) is placed on the polishing table, the first polishing head is disassembled, and the second polishing head (a maintained polishing head or a brand new polishing head) is replaced.

[0055] Step S2: Place the tool on the polishing table and position it.

[0056] The polishing head replacement tool can use the polishing head replacement tool 20 of the present application in the above-described embodiments (refer to Figures 3-4 ).

[0057] Refer to Figure 6 When the polishing arm is raised and the first polishing head carried by the polishing arm is lifted from the polishing table 10, the polishing head replacement tool 20 of the present application is placed on the polishing table 10 and positioned at the first target position on the polishing table 10.

[0058] The size of the tool 20 needs to be adapted to the size of the polishing table 10 so that it can be placed flat on the polishing table 10.

[0059] In order to facilitate the automatic alignment of the second polishing head 122 with the polishing arm when the second polishing head 122 is installed, an indication mark for mutual alignment is provided on the polishing table 10, the tool 20, the second polishing head 122, and the polishing arm.

[0060] Among them, when the tool 20 is placed on the polishing table 10, the second indication mark 32 provided on the edge of the tool 20 is aligned with the first indication mark 31 provided on the edge of the polishing table 10, so that the projections of the second indication mark 32 and the first indication mark 31 on the surface of the polishing table 10 are located on the same diameter D passing through the center of the polishing table 10, and the second indication mark 32 is separated from the first indication mark 31 by a first distance L1, so that the tool 20 is located at the set first target position.

[0061] Step S3: Lower the polishing arm to place the first polishing head on the tool.

[0062] When the tool 20 is positioned on the polishing table 10, the polishing arm can be started to lower the lifted first polishing head onto the surface of the tool 20. At this time, the positioning position of the tool 20 on the polishing table 10 and the size of the tool 20 ensure that the first polishing head can be completely and stably placed on the area within the surface of the tool 20. In fact, in order to ensure the stability of the tool 20 when it expands, the size of the tool 20 is generally set to be significantly larger than the size of the polishing head.

[0063] Step S4: The first polishing head is detached from the polishing arm and the polishing arm is raised to separate the first polishing head from the polishing arm.

[0064] The tool 20 with the first polishing head to be detached is now in a de-pressurized state. Then, the first polishing head is detached from the polishing arm and the polishing arm is raised to separate the first polishing head from the polishing arm.

[0065] Step S5: The first polishing head is removed from the tool 10 and the second polishing head is positioned on the tool 20 and aligned with the polishing arm.

[0066] The first polishing head, which has been separated from the polishing arm, can now be removed from the tool 20.

[0067] Reference is made to Figure 6 and Figure 7 in conjunction with the description Figures 3-4 . Then, the second polishing head 122 to be exchanged is positioned on the tool 20 and is in a second target position on the tool 20. At the same time, the upper polishing arm 14 (spindle 13) is also aligned with the second polishing head 122.

[0068] In which, when the second polishing head 122 is positioned on the tool 20, the pin 151 on the connecting flange 15 of the second polishing head 122 is set to the third indicator 33, and the pin 151 on the second polishing head 122 is aligned with the second indicator 32 on the tool 20 along the diameter D, so that the projections of the pin 151, the second indicator 32 and the first indicator 31 on the polishing disc 10 are located on the same straight line, i.e. they are located on the same diameter D passing through the center of the polishing disc 10, and the pin 151 is at a second distance L2 from the second indicator 32, so that the second polishing head 122 is located in the second target position. And, by setting the pin hole on the spindle 13 of the polishing arm 14 as the fourth indicator, and by swinging the polishing arm 14 to align the pin hole on the spindle 13 of the polishing arm 14 with the second indicator 32 on the tool 20, the projections of the pin hole, the second indicator 32 and the first indicator 31 and the pin 151 on the polishing disc 10 are located on the same straight line, and are also at the second distance L2 from the second indicator 32, so that the upper polishing arm 14 (pin hole) is aligned with the second polishing head 122 (pin 151). Figure 6 An arcuate dashed line shows a swinging trajectory 16 of the polishing arm 14 on the polishing disc 10.

[0069] If the fourth indicator mark of the polishing arm 14 is set to the same diameter D as the projection of the first indicator mark 31 through the center of the polishing plate 10, the distance between the fourth indicator mark and the first indicator mark 31 is the third distance L3, then the appropriate size of the first distance L1 can be determined according to the area size of the tool 20, and the second distance L2 can be further determined according to the third distance L3. Thus, the self-alignment between the polishing plate 10, the tool 20, the second polishing head 122 and the polishing arm 14 is achieved when the polishing head is replaced.

[0070] Step S6: The tool is pressurized to cause the tool to expand in height, and the second polishing head is lifted to be attached to and aligned with the polishing arm.

[0071] After confirming the alignment between the second polishing head 122 and the polishing arm 14, the tool 20 is pressurized by, for example, high-pressure gas through the interface provided on the tool 20 to pressurize the sealed space 24 of the tool 20, so that the sealed space 24 expands in volume under the action of the gas pressure. Since the third support pad 23 is elastic (for the elastic third support pad 23) or has a safe margin width (for the non-elastic third support pad 23), and the first support pad 21 and the second support pad 22 are hard or have no ductility, the first support pad 21 and the second support pad 22 move away from each other, causing the tool 20 to expand in volume and increase in height, so that the second polishing head 122 is lifted from the polishing plate 10 to the target height of being attached to and aligned with the polishing arm 14, as shown in Figure 8 .

[0072] Referring to Figures 7-8 , the original height of the tool 20 before inflation is a1, the distance between the top surface of the connecting flange 15 of the second polishing head 122 and the surface of the polishing plate 10 is b1, and the distance between the top surface of the connecting flange 15 of the second polishing head 122 and the bottom surface of the main shaft 13 of the polishing arm 14 is c1; after the tool 20 is inflated and expanded, the height increases to a2, the distance between the top surface of the connecting flange 15 of the second polishing head 122 and the surface of the polishing plate 10 increases to b2, and the distance between the top surface of the connecting flange 15 of the second polishing head 122 and the bottom surface of the main shaft 13 of the polishing arm 14 becomes 0 (attached). It can be seen that the increase in height of the tool 20 after inflation has a corresponding relationship with the lifting height of the second polishing head 122 (the increase in distance between the second polishing head 122 and the polishing plate 10) and the decrease in distance between the second polishing head 122 and the polishing arm 14, i.e. c1 = a2 - a1 = b2 - b1.

[0073] When the high-pressure gas is introduced into the sealed space 24 to pressurize the sealed space 24, the flow rate and pressure of the introduced gas are controlled through the pressure control pipeline to control the volume change rate of the sealed space 24 when the sealed space 24 expands, thereby controlling the lifting rate of the second grinding head 122, so that the second grinding head 122 is slowly and smoothly lifted, avoiding collision with the main shaft 13 of the grinding arm 14, thus ensuring the stability of the second grinding head 122 during lifting and the safety during replacement operation.

[0074] When the second grinding head 122 is lifted, the tool 20 or the second grinding head 122 can be finely adjusted to ensure the centering of the second grinding head 122 with the main shaft 13 of the grinding arm 14, so that the pin shaft 151 on the connecting flange 15 of the second grinding head 122 accurately enters the pin hole of the main shaft 13 of the grinding arm 14 to realize mutual cooperation.

[0075] Step S7: mounting the second grinding head on the grinding arm.

[0076] When the pin shaft 151 on the connecting flange 15 of the second grinding head 122 accurately enters the pin hole of the main shaft 13 of the grinding arm 14 and realizes mutual cooperation, the second grinding head 122 and the grinding arm 14 are also in the state of mutual alignment. At this time, the second grinding head 122 can be mounted and fixed on the main shaft 13 of the grinding arm 14 by using a conventional fastening method.

[0077] Step S8: depressurizing the tool to separate and remove the tool from the second grinding head.

[0078] After the second grinding head 122 to be replaced is mounted on the grinding arm 14, the sealed space 24 can be depressurized through the valve on the interface of the tool 20 to discharge the gas in the sealed space 24 from the tool 20, so that the pressure in the sealed space 24 is reduced, the first support pad 21 and the second support pad 22 are caused to approach each other under the action of negative pressure and gravity, and the third support pad 23 is elastically recovered or collapses, thereby reducing the overall height of the tool 20 and naturally separating the tool 20 from the second grinding head 122. After that, the tool 20 is moved away from the grinding disc 10, and the entire grinding head replacement process is completed.

[0079] In summary, the present application designs a grinding head replacement tool 20 with a double-layer support pad structure of a first support pad 21 and a second support pad 22, and a third support pad 23 is used for closed connection, forming a sealed space 24 with variable volume according to pressure change in the tool 20. When the grinding head needs to be replaced, the second grinding head 122 to be replaced is placed on the tool 20, and the sealed space 24 is inflated, so that the sealed space 24 in the tool 20 expands due to the increase in pressure, and the distance between the double-layer support pads also increases, so that the second grinding head 122 can be quickly and labor-savingly lifted to the target height and aligned with the grinding arm 14 for installation, making the grinding head replacement more convenient, thereby reducing the replacement time and improving the work efficiency. Moreover, the first support pad 21 and the second support pad 22 can be formed by using the existing grinding pad, and the third support pad 23 can be formed by using common elastic materials (such as elastic rubber or polymer, oxford cloth, etc.) or substantially inelastic packaging materials (plastic film, etc.), which has the advantages of convenient material selection, simple manufacturing, low cost, and convenient replacement method.

[0080] Although the embodiments of the present application have been described in detail above, it is obvious to those skilled in the art that various modifications and changes can be made to the embodiments. However, it should be understood that such modifications and changes all belong to the scope and spirit of the present application described in the claims. Moreover, the present application described herein can have other embodiments, and can be implemented or realized in various ways.

Claims

1. A grinding head replacement tool, characterized in that, include: The first support pad and the second support pad are stacked together, and the third support pad connects the first support pad and the second support pad. The first support pad, the second support pad and the third support pad form a sealed space. One of the first support pad and the second support pad is used to place on the grinding disc, and the other of the first support pad and the second support pad is used to place the grinding head. By controlling the volume of the sealed space to expand due to the increase of pressure, a relative movement occurs between the first support pad and the second support pad, moving them away from each other, thereby lifting the grinding head from the grinding disc to the target height for installation.

2. The grinding head replacement tool according to claim 1, characterized in that, The first support pad and the second support pad have corresponding shapes and sizes, and the third support pad is sealed around the outer periphery of the first support pad and the second support pad; and / or, the first support pad and the second support pad are wrapped in the third support pad.

3. The grinding head replacement tool according to claim 1, characterized in that, The first and second support pads maintain their dimensions as the sealed space expands; and / or, the third support pad undergoes elastic deformation and stretching between the first and second support pads as the sealed space expands, the amount of elastic deformation and stretching being adapted to the distance required for the grinding head to be raised from the grinding disk to a target height; and / or, the width of the third support pad between the first and second support pads is adapted to the distance required for the grinding head to be raised from the grinding disk to a target height.

4. The grinding head replacement tool according to claim 1, characterized in that, The third support pad has a folding structure that unfolds when the pressure in the sealed space increases to accommodate the size of the expanded sealed space.

5. The grinding head replacement tool according to claim 1, characterized in that, The first support pad and / or the second support pad include a grinding liner; and / or, the tool is provided with an indicator mark for alignment with the grinding head and the grinding disc; And / or, the third support pad is provided with an interface for connecting to a pressure control line, through which the pressure control line pressurizes and depressurizes the sealed space; and / or, pressurization is achieved by filling the sealed space with fluid.

6. A method for replacing a grinding head, characterized in that, include: A grinding head replacement tool is provided, the tool comprising a first support pad and a second support pad stacked together, and a third support pad connecting the first support pad and the second support pad, the first support pad, the second support pad and the third support pad forming a sealed space; When changing the grinding head, place the tool on the first target position on the grinding disc, move the second grinding head to be replaced onto the tool at the second target position, and align the grinding arm above with the second grinding head; The sealed space is pressurized to expand its volume, causing a relative movement between the first support pad and the second support pad that moves them away from each other, thereby raising the second grinding head from the grinding disc to a target height where it is in contact with and aligned with the grinding arm. The second grinding head is mounted and fixed on the grinding arm.

7. The grinding head replacement method according to claim 6, characterized in that, By filling the sealed space with gas or liquid, the sealed space is pressurized and expanded. By controlling the flow rate and pressure of the gas or liquid during filling, the rate of volume change during the expansion of the sealed space is controlled, thereby controlling the lifting rate of the second grinding head.

8. The grinding head replacement method according to claim 6, characterized in that, When the tool is placed on the grinding disc, by aligning the second indicator mark on the tool with the first indicator mark on the grinding disc, the projections of the second indicator mark and the first indicator mark are located on the same diameter passing through the center of the grinding disc and are separated by a first distance, so that the tool is positioned at the first target position. When the second grinding head is placed onto the tool, the third indicator mark on the second grinding head is aligned with the second indicator mark, so that the projection of the third indicator mark is on the same straight line as the projections of the second indicator mark and the first indicator mark and is at a second distance from the second indicator mark, so that the second grinding head is positioned at the second target position; the fourth indicator mark on the grinding arm is aligned with the second indicator mark, so that the projection of the fourth indicator mark is on the same straight line as the projections of the second indicator mark and the first indicator mark and is at a second distance from the second indicator mark, so that the grinding arm above is aligned with the second grinding head.

9. The grinding head replacement method according to claim 8, characterized in that, When the grinding arm is swung so that the projections of the fourth indicator mark and the first indicator mark are on the same diameter passing through the center of the grinding disc, the distance between the fourth indicator mark and the first indicator mark is taken as the third distance. The first distance is determined according to the area size of the tool, and the second distance is determined according to the third distance.

10. The grinding head replacement method according to claim 6, characterized in that, Before placing the tool at the first target position on the grinding disc, the process further includes: The first grinding head that needs to be replaced is lifted from the grinding disc by the grinding arm; Before placing the second grinding head to be replaced onto the tool at the second target position, the process also includes: The first grinding head is lowered onto the tool by means of the grinding arm, and then the first grinding head is removed from the grinding arm and the grinding arm is raised to separate it from the first grinding head. Remove the first grinding head from the grinding disc on the tool.

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