A manufacturing clamp and method for a sealed miniature FP cavity narrow band filter
By employing hermetic manufacturing fixtures and packaging methods, the problem of unstable performance of miniature FP cavity narrowband filters in harsh environments was solved, achieving highly reliable and stable hermetic packaging.
Patent Information
- Application Number
- CN202311250456.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2023-09-26
- Publication Date
- 2025-12-26
- Estimated Expiration
- 2043-09-26
AI Technical Summary
Existing miniature FP cavity narrowband filters use an open packaging structure, which results in poor performance in harsh environments and susceptibility to external factors, affecting product lifespan and reliability.
A hermetic encapsulation method for miniature FP cavity narrowband filters is achieved by using a fixed platform, fixture bracket, needle clamp, and gas path connection, combined with UV curing and thermosetting technologies. A metal sleeve and transparent epoxy are used for further sealing.
It significantly improves the reliability and stability of miniature FP cavity narrowband filters, ensuring normal operation even in harsh environments.
Smart Images

Figure CN117359521B_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present application relates to the field of filter manufacturing, in particular to a sealed micro FP cavity narrow band filter manufacturing clamp and manufacturing method. BACKGROUND
[0002] Fabry-Perot cavity filter is one of the important devices in the field of modern optical fiber communication and optical fiber sensing. FP cavity is generally composed of a glass plate with high reflection film on the inner surface and antireflection film on the outer surface. The incident light beam can produce multiple beam interference effect in the cavity. The light waves that meet the phase matching condition produce constructive interference and form a filter output. The light waves that do not meet the phase condition produce destructive interference and are reflected by one side of the FP cavity. By optimizing the parameter design of the FP cavity, a high-transmittance, narrow-line-width FP cavity narrow band filter can be realized. Compared with other filters based on atomic filtering, coherent filter, grating filtering, FP cavity filter has the advantages of wide working filter range, tunable center wavelength, narrow filter line width, high optical efficiency, etc., and has a wide range of application scenarios.
[0003] However, the existing micro FP cavity narrow band filter still uses an open packaging structure, which has poor performance in harsh environments and is easily affected by external environmental factors. It can only be used in a ground laboratory with stable temperature and humidity.
[0004] The existing micro FP cavity narrow band filter uses a one-way single-hole 14-pin butterfly-shaped packaging shell 1. The shell is slotted on the left and right sides by machining, so that the assembly composed of a ceramic substrate, an input single fiber collimator 1, an output single fiber collimator 2 and an FP cavity can be directly placed in the 14-pin butterfly-shaped shell 1. Then a refrigerator and a thermistor are installed inside the shell to complete the product manufacturing.
[0005] The current packaging method only plays a role in installing, fixing the internal chips and achieving the electrical and thermal performance, but it does not completely seal the product, so the performance is poor in harsh environments and is easily affected by external environmental factors, which makes the product unusable and has a great impact on the service life and reliability of the product. SUMMARY
[0006] To solve the above problems, the technical scheme provides a sealed micro FP cavity narrow band filter manufacturing clamp and manufacturing method.
[0007] To achieve the above purpose, the technical scheme is as follows:
[0008] The application discloses a manufacturing clamp for a sealed miniature FP cavity narrowband filter, which comprises a fixed platform and clamp supports arranged on both sides of the fixed platform, wherein the clamp supports are provided with needle tube clamps for sucking single-fiber collimators, and inner cavities of the needle tube clamps are connected with air pipes through switching valves.
[0009] The application further provides a manufacturing method for a sealed miniature FP cavity narrowband filter.
[0010] S1, a refrigerator is installed in a 14-pin butterfly-shaped shell, a ceramic substrate is fixed on the refrigerator by dispensing, and the 14-pin butterfly-shaped shell with the packaged ceramic substrate is fixed on the fixed platform.
[0011] S2, one side of the needle tube clamp is used to suck the single-fiber collimator, the collimator is suspended in the middle of the substrate in parallel with the movement of the clamp support, the tail of the collimator glass tube is flush with the side edge of the ceramic substrate, the collimator and the ceramic substrate are adhered by double-curing glue, and ultraviolet curing is performed.
[0012] S3, another side of the needle tube clamp is used to suck another single-fiber collimator, which is arranged on the other side of the ceramic substrate, a wavelength light source required by a product is selected as the input of the single-fiber collimator on one side, the optical fiber of the single-fiber collimator on the other side is connected to an optical power meter to monitor insertion loss (IL), the fine adjustment shaft of the single-fiber collimator on the other side is adjusted, when the IL value is the smallest, the double-curing glue is dispensed, and the single-fiber collimator on the other side and the ceramic substrate are fixed.
[0013] S4, the 14-pin butterfly-shaped shell with the preliminarily cured two collimators is placed into an oven for heat curing.
[0014] S5, the 14-pin butterfly-shaped shell with the completely cured collimators is taken out and fixed on the fixed platform again, the wavelength light source required by the product is selected as the input of the single-fiber collimator on one side, the optical fiber of the single-fiber collimator on the other side is connected to the optical power meter to monitor the insertion loss (IL), one FP cavity is used, one needle tube clamp is used to suck the side of the FP cavity, the coating surface of the FP cavity filter is arranged in the middle position of the two single-fiber collimators and suspended on the ceramic substrate, the IL is monitored in real time, the IL is adjusted to the minimum value through multiple adjustments, then a wavelength meter scanning system is used to scan the bandwidth of the product, after the -3dB line width of the product is confirmed to meet the performance requirement, the double-curing glue is used to fix the FP cavity filter on the ceramic substrate, and ultraviolet curing is performed.
[0015] S6, after the product is ultraviolet cured, the product is placed into the oven for heat curing.
[0016] S7, after curing the semi-finished product, first point transparent epoxy glue in the hole of the circular metal tube on both ends of the 14-pin butterfly shell, then put the 0.9mm loose sleeve into the metal tube, continue to seal the transparent epoxy glue, confirm that the glue has sealed the two end tubes, and then naturally stand for 24h;
[0017] S8, the semi-finished product with 0.9mm loose sleeve is installed on the ceramic substrate inside the 14-pin butterfly shell, the thermistor inside the butterfly shell can be connected to the outside through the pin, and the working temperature of the FP cavity inside the 14-pin butterfly shell is adjusted by controlling the refrigerator and the thermistor, so as to change the filter center wavelength of the product, and finally realize the tuning of the miniature FP cavity narrow band filter, which is convenient for integrated control;
[0018] S9, cover the upper cover of the 14-pin butterfly shell, and use the electric welding machine to weld the upper cover and the 14-pin butterfly shell, and complete the air-tightness packaging of the product.
[0019] The application has the following beneficial effects:
[0020] In view of the deficiencies of the prior art, the purpose of the application is to provide a 14-pin butterfly shell with circular metal sleeves at both ends, which can be inserted into 0.9mm loose sleeves, and can realize air-tightness packaging of the product without changing the internal structure of the product, thereby significantly improving the reliability and stability of the product. BRIEF DESCRIPTION OF DRAWINGS
[0021] In order to more clearly illustrate the technical solutions in the embodiments of the application, the following will briefly introduce the drawings needed in the embodiment description.
[0022] Fig. 1 is a structural schematic diagram of the embodiment of the application;
[0023] Fig. 2 is a product structure schematic diagram of the embodiment of the application. DETAILED DESCRIPTION
[0024] In order to make the technical problems, technical solutions and beneficial effects of the application more clearly understood, the following will further describe the application in combination with the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the application, and are not used to limit the application.
[0025] Please refer to Figs. 1-2 The manufacturing fixture of the sealed miniature FP cavity narrow band filter is shown in the figure, which comprises a fixed platform 1, and a clamp support 2 on both sides of the fixed platform 1, the clamp support 2 is provided with a needle tube clamp 3 for sucking a single fiber collimator, and the inner cavity gas path of the needle tube clamp 3 is connected with a gas pipe 5 through an adapter valve 4.
[0026] The application also provides a manufacturing method of the sealed micro FP cavity narrowband filter, based on the manufacturing fixture, further comprising the following steps:
[0027] S1, first, install the refrigerator in the 14-pin butterfly-shaped shell, glue and fix the ceramic substrate on the refrigerator, the size of the ceramic substrate is 18*5*1mm, and the outer size of the 14-pin butterfly-shaped shell 2 is 30*13*8mm, fix the 14-pin butterfly-shaped shell 2 with the packaged ceramic substrate on the product fixing platform;
[0028] S2, use the first single-fiber collimator, the collimator is assembled by optical fiber and glass tube, etc., suck the collimator by the needle tube of the suction clamp with the vacuum pump connected, the suction clamp support of the suction clamp is fixed on the five-dimensional fine adjustment platform, so the first single-fiber collimator 1 can be controlled to move by the five-dimensional fine adjustment platform, then adjust the fine adjustment shaft to make the collimator parallel to the center of the substrate and suspended 125-250um, the tail of the collimator glass tube is flush with the side edge of the ceramic substrate, use the double-curing glue (ultraviolet curing and heat curing) to bond the collimator and the ceramic substrate, and perform ultraviolet curing;
[0029] S3, use the second single-fiber collimator, refer to the first single-fiber collimator and place it on the other side of the ceramic substrate, select the wavelength light source corresponding to the product requirement as the input of the first single-fiber collimator, connect the optical fiber of the other single-fiber collimator to the optical power meter to monitor the insertion loss (IL), when the IL value is the smallest, use the double-curing glue (ultraviolet curing and heat curing) to fix the second single-fiber collimator and the ceramic substrate;
[0030] S4, put the 14-pin butterfly-shaped shell with the preliminarily cured two collimators into the oven for heat curing;
[0031] S5, take out the completely cured 14-pin butterfly-shaped shell and fix it on the product fixing platform again, continue to select the wavelength light source corresponding to the product requirement as the input of the first single-fiber collimator, connect the optical fiber of the other single-fiber collimator to the optical power meter to monitor the insertion loss (IL), use an FP cavity with the size of 2.0*2.0*1.0mm, use any suction clamp to suck the side of the FP cavity, so that the coating surface of the FP cavity filter is placed in the middle position of the two single-fiber collimators and suspended on the ceramic substrate. The center wavelength of the FP cavity filter is affected by temperature and angle, and the angle can be changed when debugging in the room temperature constant environment. Use the five-dimensional fine adjustment platform to start adjusting the angle, monitor the IL in real time, adjust the IL to the minimum value through multiple debugging, then use the wavelength meter scanning system to scan the bandwidth of the product, confirm that the-3dB line width of the product meets the performance requirement, use the double-curing glue to fix the FP cavity filter on the ceramic substrate, and perform ultraviolet curing;
[0032] S6, after the product is ultraviolet cured, the product is placed into an oven for heat curing;
[0033] S7, the semi-product after curing is first dotted with transparent epoxy glue on the opening of the circular metal tube at both ends of the 14-pin butterfly shell, then the 0.9mm loose sleeve pipe is inserted into the metal circular tube, the transparent epoxy glue is continuously sealed, and after confirming that the glue has sealed the two end circular tubes, it is naturally placed for 24h;
[0034] S8, the semi-finished product with the added 0.9mm loose sleeve pipe is installed with a thermistor on the ceramic substrate inside the 14-pin butterfly shell, the thermistor and the refrigerator inside the butterfly shell can be connected externally through the pins, the working temperature of the FP cavity inside the 14-pin butterfly shell is adjusted through the control of the refrigerator and the thermistor, so as to change the filtering center wavelength of the product, and finally realize the tuning of the micro FP cavity narrowband filter, which is convenient for integrated control;
[0035] S9, the upper cover of the 14-pin butterfly shell is covered, and the upper cover and the 14-pin butterfly shell are welded using an electric welding machine, and the air-tightness packaging of the product is completed.
[0036] The application has the following advantages:
[0037] The 14-pin butterfly shell with sealing performance is designed, and the metal circular tubes are arranged at both ends, which can ensure that the internal FP cavity structure is not affected and can realize complete sealing effect of the product.
[0038] The fixed mode of the suction fixture for sucking the material enables the material to be displaced in five directions in the effective space, and the upper rack fixing operation of the material is simple and fast.
[0039] The reliability and stability of the micro FP cavity narrowband filter product are greatly improved;
[0040] The high-precision control of the material assembly processing can be realized in the small space (20x10x5mm) in the box.
[0041] The above only describes the preferred embodiments of the application, and is not intended to limit the scope of the application, and other principles and basic structures similar to the application are within the protection scope of the application.
Claims
1. A method for manufacturing a sealed micro FP cavity narrow band filter, comprising a manufacturing fixture for a sealed micro FP cavity narrow band filter, the manufacturing fixture comprising a fixed platform (1), further comprising fixture supports (2) on both sides of the fixed platform (1), the fixture supports (2) being provided with needle tube fixtures (3) for clamping single fiber collimators, the inner cavity air paths of the needle tube fixtures (3) being connected with air tubes (5) through adapter valves (4), characterized in that, Based on the above manufacturing fixture, further comprising the following steps: S1, install the refrigerator inside the 14-pin butterfly shell, glue the ceramic substrate on the refrigerator, and fix the 14-pin butterfly shell with the packaged ceramic substrate on the fixed platform (1); S2, use one side of the needle tube clamp (3) to suck the single fiber collimator, and with the movement of the clamp support (2), make the collimator parallel to the center of the substrate and suspended 125~250um, the tail of the collimator glass tube is flush with the side of the ceramic substrate, use double curing glue to bond the collimator and the ceramic substrate, and perform ultraviolet curing; S3, use the other side of the needle tube clamp (3) to suck another single fiber collimator, place it on the other side of the ceramic substrate, select the wavelength light source required by the product on one side of the single fiber collimator, and connect the optical fiber of the single fiber collimator on the other side to the optical power meter to monitor the insertion loss IL, adjust the fine adjustment shaft of the single fiber collimator on the other side, when the IL value is the smallest, point the double curing glue, and fix the single fiber collimator on the other side and the ceramic substrate; S4, put the 14-pin butterfly shell with the preliminarily cured two collimators into the oven for heat curing; S5, take out the completely cured 14-pin butterfly shell and fix it on the fixed platform (1) again, continue to select the wavelength light source required by the product on one side of the single fiber collimator, connect the optical fiber of the single fiber collimator on the other side to the optical power meter to monitor the insertion loss IL, use an FP cavity, use any one of the needle tube clamps (3) to suck the side of the FP cavity, make the coating surface of the FP cavity filter plate be in the middle position of the two single fiber collimators and suspended on the ceramic substrate, monitor the IL in real time, adjust the IL to the minimum value through multiple adjustments, then use the wavelength meter scanning system to scan the bandwidth of the product, confirm that the -3dB linewidth of the product meets the performance requirements, use double curing glue to fix the FP cavity filter plate on the ceramic substrate, and perform ultraviolet curing; S6, after the product is ultraviolet cured, put it into the oven for heat curing; S7, after the curing is completed, first point the transparent epoxy glue on the opening of the circular metal tube at both ends of the 14-pin butterfly shell, then put the 0.9mm loose sleeve into the metal circular tube, continue to seal the transparent epoxy glue, confirm that the glue has sealed the two end tubes, and naturally stand for 24h; S8, add the thermistor on the ceramic substrate inside the 14-pin butterfly shell, the thermistor and the refrigerator inside the butterfly shell can be connected externally through the pins, the working temperature of the FP cavity inside the 14-pin butterfly shell is adjusted through the control of the refrigerator and the thermistor, the center wavelength of the product is changed, and finally the tuning of the miniature FP cavity narrow band filter is realized, which is convenient for integrated control; S9, cover the upper cover of the 14-pin butterfly shell, use the electric welding machine to weld the upper cover and the 14-pin butterfly shell, and complete the hermetic packaging of the product.
Citation Information
Patent Citations
Micro-assembly system based on double macro-micro combined robot
CN113182797A