A coupled bionic pressure sensor and a preparation method thereof

Abstract

The application discloses a coupling bionic pressure sensor and a preparation method thereof, and comprises a first rigid hole array trigger layer, a middle flexible slit array conductive layer and a second rigid hole array trigger layer. A plurality of first convex holes are arranged on the first rigid hole array trigger layer to form a first convex array hole. A metal conductive layer is deposited on the middle flexible slit array conductive layer, and a slit array structure is arranged on the metal conductive layer. A plurality of second holes are arranged on the second rigid hole array trigger layer to form a second array hole. A first electrode and a second electrode are connected to two ends of the middle flexible slit array conductive layer respectively. The slit array structure is a slit array structure simulating a slit receptor of an arachnida. The application adopts a layered and graded conductive layer structure, simulates a slit receptor of an arachnida and a clock-shaped receptor structure of an insect, and realizes sensing of small pressure and large pressure. The application can overcome the problem that an existing pressure sensor is difficult to simultaneously consider high sensitivity and a large range.

Description

Technical Field

[0001] This invention relates to the field of pressure sensor technology, and in particular to a highly sensitive, large-range coupled biomimetic pressure sensor and its fabrication method. Background Technology

[0002] Pressure sensors are widely used in industries such as manufacturing, medicine, and automotive to measure the pressure exerted by a medium. They provide a reliable tool for pressure monitoring and control.

[0003] In pressure sensor design, high sensitivity and large range are two crucial performance indicators. High sensitivity means the sensor can respond quickly and accurately to minute pressure changes, providing highly precise measurement results. A large range indicates that the sensor can reliably measure pressures over a wide range, generally meaning it is suitable for a wider range of applications. However, achieving both high sensitivity and a large range simultaneously is a challenge.

[0004] In existing technologies, achieving high sensitivity requires sensors to employ materials and structural designs suitable for high sensitivity. However, this often limits the sensor's load-bearing capacity, thus failing to meet the requirements for a large range. Conversely, achieving a large range requires sensors to use structures and materials capable of withstanding greater pressure, but this often reduces the sensor's sensitivity, weakening its ability to detect minute pressure changes. Therefore, existing pressure sensors cannot simultaneously address the issues of high sensitivity and a large range.

[0005] Therefore, existing technologies still need further improvement and development. Summary of the Invention

[0006] In view of the shortcomings of the prior art, the purpose of this invention is to provide a coupled biomimetic pressure sensor and its preparation method. This invention proposes a coupled biomimetic pressure sensor with high sensitivity and large range, and its preparation method solves the problem of the difficulty in balancing high sensitivity and large range.

[0007] The technical solution of the present invention is as follows:

[0008] A coupled biomimetic pressure sensor, comprising, in sequence:

[0009] A first rigid hole array trigger layer has a plurality of first protruding holes arranged thereon to form a first protruding array hole;

[0010] A flexible slit array conductive layer is provided in the middle, on which a metal conductive layer is deposited, and a slit array structure is provided on the metal conductive layer;

[0011] The second rigid hole array trigger layer has multiple second holes arranged on it to form a second array hole;

[0012] The first electrode and the second electrode are respectively connected to the two ends of the intermediate flexible slit array conductive layer.

[0013] The slit array structure is a slit array structure that mimics the slit receptors of arachnid organisms.

[0014] The aforementioned coupled biomimetic pressure sensor, wherein,

[0015] The first protruding hole is an elliptical hemispherical protruding hole, the first protruding array hole is an elliptical hemispherical protruding hole array, and the first rigid hole array trigger layer is a rigid elliptical hemispherical protruding hole array trigger layer.

[0016] The second hole is a circular hole, the second array hole is a circular hole array, and the second rigid hole array trigger layer is a rigid circular hole array trigger layer;

[0017] Among them, the elliptical hemispherical protruding hole array and the circular hole array are respectively inspired by the bell-shaped sensory organ structure of insects.

[0018] Under the first pressure condition, mimicking the slit array structure of the slit receptors of arachnid organisms, the resistance of the metal conductive layer undergoes a first-scale deformation. The pressure measurement is achieved by utilizing the resistance change caused by the tunneling effect induced by the deformation.

[0019] Under the second pressure condition, the compression of the elliptical hemispherical protruding hole array and the circular hole array, inspired by the bell-shaped receptor structure of insects, causes the conductive layer of the flexible slit array to undergo a second-scale deformation, resulting in a change in resistance and realizing range sensing.

[0020] In the aforementioned coupled biomimetic pressure sensor, the major axis of the elliptical hemisphere of the rigid elliptical hemisphere protruding hole array trigger layer is 1-5 mm, the minor axis is 0.5-1 mm, and the distance between adjacent elliptical hemispheres is greater than the length of the major axis of the elliptical hemisphere.

[0021] The coupled biomimetic pressure sensor, wherein the flexible slit array conductive layer is a conductive layer of a hybrid material of flexible polymer material and conductive material;

[0022] The flexible polymer material is one or more of the following: epoxy resin, polyethylene, polyvinylidene fluoride, polypropylene, polystyrene, polysulfone ether, polyimide, polyamide, thermoplastic polyurethane, polyethylene terephthalate, styrene-butadiene-styrene block copolymer, natural rubber, nitrile rubber, polydimethylsiloxane, styrene-based thermoplastic elastomers, and thermoplastic vulcanized rubber.

[0023] The conductive material is one or more of graphene, graphyne, carbon nanotubes, carbon black, MXene, and carbon fiber.

[0024] The materials of the first electrode and the second electrode are one or more of gold, silver, copper, iron, graphite, copper-tungsten alloy, silver-tungsten alloy, and brass.

[0025] In the aforementioned coupled biomimetic pressure sensor, the width of the slits in the flexible slit array is 10–100 μm, the depth is >100 μm and less than half the thickness of the conductive layer of the flexible slit array, and the spacing between adjacent slits is greater than the width of the slits.

[0026] In the aforementioned coupled biomimetic pressure sensor, the material of the metal conductive layer is one or more of the following: gold nanoparticles, silver nanoparticles, copper nanoparticles, platinum nanoparticles, aluminum-boron alloy, aluminum-chromium alloy, iron-manganese alloy, aluminum-chromium-yttrium alloy, and silver-copper-palladium alloy.

[0027] The coupled biomimetic pressure sensor, wherein the rigid circular hole array trigger layer has a hole diameter of 1.5 to 6 mm, and the spacing between adjacent circular holes is consistent with the spacing between adjacent elliptical hemispheres of the rigid elliptical hemisphere protruding hole array trigger layer.

[0028] The aforementioned coupled biomimetic pressure sensor, wherein,

[0029] The first protruding hole is a circular protruding hole, the first protruding array hole is a circular protruding hole array, and the first rigid hole array trigger layer is a rigid circular protruding hole array trigger layer.

[0030] The second hole is an elliptical hole, the second array hole is an elliptical hole array, and the second rigid hole array trigger layer is a rigid elliptical hole array trigger layer;

[0031] The circular protruding hole array and the elliptical hole array are respectively inspired by the bell-shaped sensory organ structure of insects.

[0032] A method for fabricating a coupled biomimetic pressure sensor as described in any of the preceding claims, comprising the steps of:

[0033] A model of the biomimetic pressure sensor was established using 3D modeling software, and the structural parameters of the sensor’s elliptical hemispherical protruding hole array, circular hole array, and slit array structure were determined by finite element analysis software simulation.

[0034] Rigid elliptical hemispherical protruding hole array trigger layer and rigid circular hole array trigger layer are prepared by one or more of the following methods: CNC milling, CNC turning, laser direct writing and 3D printing.

[0035] Assemble a flexible seam array conductive layer;

[0036] A metallic conductive layer is prepared on a conductive layer with a flexible slit array having a regular shape;

[0037] The sensor is obtained by attaching wires to the surface of the metal conductive layer with copper tape and connecting the first electrode and the second electrode.

[0038] The fabrication method of the coupled biomimetic pressure sensor, wherein the process of fabricating trenches on the upper surface of the flexible slit array conductive layer is selected from one of surface cutting, laser direct writing and mold imprinting;

[0039] The method for preparing the metal conductive layer in the flexible slit array conductive layer is selected from one of the following: chemical plating, physical vapor deposition, spraying, and material self-growth.

[0040] Beneficial Effects: This invention provides a novel coupled biomimetic pressure sensor and its fabrication method. By employing a layered, hierarchical conductive layer structure, it mimics the slit receptors of arachnids and the bell-shaped receptors of insects. Under low pressure conditions, mimicking the slit array structure of arachnids, the resistance of the metal conductive layer undergoes small-scale deformation. Utilizing the resistance change caused by the tunneling effect induced by this deformation, high-sensitivity pressure measurement is achieved. Under high pressure conditions, the compression of the elliptical hemispherical protruding hole array and circular hole array, inspired by the bell-shaped receptor structure of insects, induces large deformation of the flexible slit array conductive layer, leading to a dominant resistance change and achieving large-range sensing. This overcomes the problem of existing pressure sensors failing to simultaneously achieve high sensitivity and large range. Attached Figure Description

[0041] Figure 1 This is an exploded view of the highly sensitive, large-range coupled biomimetic pressure sensor of this invention.

[0042] Figure 2 for Figure 1 Enlarged view of region A in the middle;

[0043] Figure 3 This is a partial schematic diagram of the highly sensitive, large-range coupled biomimetic pressure sensor of this invention.

[0044] Figure 4 This is a cross-sectional schematic diagram of the local pressure detected by the highly sensitive, large-range coupled biomimetic pressure sensor of this invention.

[0045] In the figure, 10 is the rigid elliptical hemispherical protruding hole array trigger layer, 11 is the elliptical hemispherical protruding hole array, 20 is the flexible slot array conductive layer, 21 is the metal conductive layer, 22 is the slot array structure, 30 is the rigid circular hole array trigger layer, 31 is the circular hole array, 40 is the first electrode, and 41 is the second electrode. Detailed Implementation

[0046] This invention provides a coupled biomimetic pressure sensor and its fabrication method. To make the objectives, technical solutions, and effects of this invention clearer and more explicit, the invention is further described in detail below. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.

[0047] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein in the description of this invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention.

[0048] In existing technologies, to achieve high sensitivity, sensors need to employ materials and structural designs suitable for high sensitivity. However, this often limits the sensor's load-bearing capacity, thus failing to meet the requirements for a large range. Conversely, to achieve a large range, sensors need to use structures and materials capable of withstanding greater pressure, but this often reduces the sensor's sensitivity, weakening its ability to detect minute pressure changes.

[0049] To address the challenge of balancing high sensitivity and a large range, this invention provides a coupled biomimetic pressure sensor and its fabrication method. This invention studies and imitates biological pressure sensing systems and structures in nature, drawing upon their excellent characteristics and mechanisms to design and improve artificial pressure sensors. Based on typical biological sensing structures (imitating the slit receptors of arachnids and the bell-shaped receptors of insects), a highly sensitive, large-range coupled biomimetic pressure sensor and its fabrication method are proposed.

[0050] Most arachnids live in a vibration-based world, most notably scorpions and spiders. Over tens of millions of years of evolution, the emergence and refinement of suture receptors and other sensory organs have enabled them to survive and thrive in the face of fierce natural competition.

[0051] The slit sensory organ (slit sensory organ) of arachnids is a type of sensory organ in arachnids. It is a slit-like cavity in the cuticle, with a very thin membrane covering the slit. The membrane is in contact with a hair-like projection that extends from a sensory cell.

[0052] Bell-shaped receptors (or bell receptors) are sensory organs found on the body surface of insects such as Lepidoptera (wings) and Diptera (halardial organs). These receptors are located on the body surface of insects. Sensory rods extending from the outer ends of primitive sensory cells pass through a thin, bell-shaped section of the epidermis and extend to form a dome-shaped body surface, often forming numerous clusters distributed in specific parts of the body. They can be found at the base of the appendages of lobed dragon heads, on the wings of Lepidoptera, on the halteres of Diptera, on the gills of brown lacewing larvae, on the maxillary palps and legs of cockroaches, and on the cerci of crickets. For aquatic insects, they are exophoric receptors that sense water pressure, while for flying insects they are exophoric receptors that sense air pressure.

[0053] This application provides a coupled biomimetic pressure sensor, comprising, in sequence:

[0054] A first rigid hole array trigger layer has a plurality of first protruding holes arranged thereon to form a first protruding array hole;

[0055] A flexible slit array conductive layer is provided in the middle, on which a metal conductive layer is deposited, and a slit array structure is provided on the metal conductive layer;

[0056] The second rigid hole array trigger layer has multiple second holes arranged on it to form a second array hole;

[0057] The first electrode and the second electrode are respectively connected to the two ends of the intermediate flexible slit array conductive layer.

[0058] In this embodiment, preferably, as follows: Figure 1 and Figure 3 As shown, the slit array structure is a slit array structure that mimics the slit receptors of arachnid organisms. The first protruding hole is an elliptical hemispherical protruding hole 111, the first protruding array hole is an elliptical hemispherical protruding hole array 11, and the first rigid hole array trigger layer is a rigid elliptical hemispherical protruding hole array trigger layer 10;

[0059] The second hole is a circular hole 311, the second array hole is a circular hole array 31, and the second rigid hole array trigger layer is a rigid circular hole array trigger layer 30;

[0060] Among them, the elliptical hemispherical protruding hole array 11 and the circular hole array 31 are respectively inspired by the bell-shaped sensory organ structure of insects.

[0061] In this embodiment, under a first pressure (e.g., a small pressure of 0.5 Pa), mimicking the slit array structure of the slit receptor of arachnid organisms, the resistance of the metal conductive layer undergoes a first-scale (e.g., small-scale) deformation. The pressure measurement is achieved by utilizing the resistance change caused by the tunneling effect induced by the deformation.

[0062] Under a second pressure (e.g., a high pressure of 2000 kPa), the compression of the elliptical hemispherical protruding hole array and the circular hole array, inspired by the bell-shaped receptor structure of insects, induces a second-scale (e.g., large-scale) deformation of the conductive layer of the flexible slit array, resulting in a change in resistance and realizing range sensing.

[0063] The coupled biomimetic pressure sensor disclosed in this invention employs a layered, hierarchical conductive layer structure, mimicking the slit receptors of arachnids and the bell-shaped receptors of insects, to achieve sensing of both low and high pressure ranges. Under low pressure conditions, mimicking the slit array structure of arachnids, the resistance of the metallic conductive layer undergoes small-scale deformation. The resistance change caused by the tunneling effect induced by this deformation achieves highly sensitive pressure measurement. Under high pressure conditions, the compression of the flexible slit array conductive layer, inspired by the bell-shaped receptor structure of insects, induces large deformation, leading to a dominant resistance change and achieving a large-range sensing capability. The purpose of this invention is to overcome the problem of existing pressure sensors failing to simultaneously achieve high sensitivity and a large range.

[0064] The present invention will be further described in detail below through specific application examples:

[0065] Please also refer to Figures 1-4 This invention provides some embodiments of a highly sensitive, large-range coupled biomimetic pressure sensor.

[0066] Compared to other existing pressure sensors, the coupled biomimetic pressure sensor in this embodiment employs a biomimetic slit array structure, a biomimetic elliptical hemispherical protruding hole array, and a biomimetic circular hole array. This significantly increases the sensor's ability to adapt to external mechanical inputs (such as pressure and vibration), thereby improving its sensitivity. This is evidenced by the excellent strain sensing capabilities of the slit receptors on the surface of arachnids and the bell-shaped receptors on the surface of insects.

[0067] like Figure 1 , Figure 2 and Figure 3 As shown in Embodiment 1 of this application, a coupled biomimetic pressure sensor includes: a rigid elliptical hemispherical protruding hole array trigger layer 10, an elliptical hemispherical protruding hole array 11, a flexible slit array conductive layer 20, a metal conductive layer 21, a slit array structure 22, a rigid circular hole array trigger layer 30, a circular hole array 31, a first electrode 40, and a second electrode 41.

[0068] In this embodiment, a plurality of elliptical hemispherical protrusions 111 are arranged on the rigid elliptical hemispherical protrusion array trigger layer 10 to form an elliptical hemispherical protrusion array 11.

[0069] The metal conductive layer 21 is deposited on the flexible slot array conductive layer 20, and a slot array structure 22 is provided on the metal conductive layer 21.

[0070] The rigid circular hole array trigger layer 30 has multiple circular holes 311 arranged on it to form a circular hole array 31.

[0071] A first electrode 40 and a second electrode 41 are respectively connected to both ends of the flexible slit array conductive layer 20. In this embodiment, a metal conductive layer is disposed on the surface of both the first electrode and the second electrode.

[0072] It is worth noting that, such as Figure 4 As shown, when pressure F is applied to the rigid circular hole array trigger layer 30 coupled to the biomimetic pressure sensor, the rigid elliptical hemispherical protruding hole array trigger layer 10 at the bottom and the rigid circular hole array trigger layer 30 at the top work together to deform the flexible slit array conductive layer 20 in the middle. Under low pressure conditions (e.g., 0.5 Pa), mimicking the slit array structure of arachnoid slit receptors, the resistance of the metal conductive layer 21 undergoes small-scale deformation. The resistance change caused by the tunneling effect induced by this deformation is utilized to achieve highly sensitive pressure measurement.

[0073] Under high pressure conditions (e.g., 2000 kPa), the elliptical hemispherical protruding hole array 11 and circular hole array 31, inspired by the bell-shaped receptor structure of insects, are compressed, causing large deformation of the flexible slit array conductive layer 20. This results in a dominant change in resistance, enabling large-range sensing. This overcomes the problem that existing pressure sensors cannot simultaneously achieve high sensitivity and large range.

[0074] In this embodiment, preferably, a first electrode 40 and a second electrode 41 are respectively disposed at both ends of the metal conductive layer 21. The parallel resistance value of the flexible slit array conductive layer 20 and the metal conductive layer 21 is output through the first electrode 40 and the second electrode 41 at any time, thereby obtaining the pressure magnitude. Using a slit array structure 22 that mimics the slit receptors of arachnids can detect smaller pressures, thus improving the sensitivity of pressure measurement. Using an elliptical hemispherical protruding hole array 11 and a circular hole array 31 structure that mimics the bell-shaped receptors of insects can detect larger pressures, thus increasing the pressure measurement range.

[0075] In this embodiment of the invention, preferably, the major axis length of the elliptical hemispheres in the rigid elliptical hemispherical protrusion array trigger layer is 1–5 mm, the minor axis length is 0.5–1 mm, and the spacing between adjacent elliptical hemispheres is greater than the length of the major axis of the elliptical hemispheres. This embodiment uses millimeter-level dimensions, which facilitates processing and manufacturing, reduces costs, and allows for mass production. Furthermore, the moderate size provides a good balance between sensitivity and measurement range.

[0076] In this embodiment of the invention, preferably, the flexible slit array conductive layer is a conductive layer of a mixture of flexible polymer material and conductive material; for example, the flexible polymer material is one or more of epoxy resin, polyethylene, polyvinylidene fluoride, polypropylene, polystyrene, polysulfone ether, polyimide, polyamide, thermoplastic polyurethane, polyethylene terephthalate, styrene-butadiene-styrene block copolymer, natural rubber, nitrile rubber, polydimethylsiloxane, styrene-based thermoplastic elastomers, and thermoplastic vulcanized rubber. Such materials are readily available, low in cost, and flexible, and have a wider range of applications than traditional rigid sensors.

[0077] The conductive material is one or more of graphene, graphyne, carbon nanotubes, carbon black, MXene, and carbon fiber. In this way, the conductive material is easy to obtain and has strong conductivity when the present invention is implemented.

[0078] In this embodiment of the invention, preferably, the materials of the first electrode and the second electrode are one or more of gold, silver, copper, iron, graphite, copper-tungsten alloy, silver-tungsten alloy, and brass, which have good conductivity and high stability; at the same time, the materials are easy to obtain and conducive to mass production.

[0079] In this embodiment of the invention, preferably, the width of the slits in the flexible slit array is 10-100 μm, the depth is >100 μm and less than half the thickness of the flexible slit array conductive layer, and the spacing between adjacent slits is greater than the width of the slits. This makes it easy to process, and at the same time, this size can satisfy the tunneling effect.

[0080] In this embodiment of the invention, preferably, the material of the metal conductive layer is one or more of gold nanoparticles, silver nanoparticles, copper nanoparticles, platinum nanoparticles, aluminum-boron alloy, aluminum-chromium alloy, iron-manganese alloy, aluminum-chromium-yttrium alloy, and silver-copper-palladium alloy. Thus, the material of this embodiment is easy to obtain and has strong conductivity and high stability.

[0081] In this embodiment of the invention, preferably, the rigid circular hole array trigger layer has a circular hole diameter of 1.5 to 6 mm, and the spacing between adjacent circular holes is consistent with the spacing between adjacent elliptical hemispheres of the rigid elliptical hemisphere protruding hole array trigger layer. In this embodiment, the size is on the millimeter level, which is conducive to processing and manufacturing, can reduce costs, facilitate mass production, can be separated from the tunneling effect scale, and is beneficial to the resistance change of the second scale.

[0082] Of course, in another embodiment of the coupled biomimetic pressure sensor of the present invention, the lower and upper arrays are elliptical protrusions and circular holes, and their positions can be interchanged. That is, the first protruding hole of the first rigid hole array trigger layer in the lower layer can be a circular protruding hole, the first protruding array hole can be a circular protruding hole array, and the first rigid hole array trigger layer can be a rigid circular protruding hole array trigger layer.

[0083] Correspondingly, the second hole in the second rigid hole array trigger layer set on the top layer is an elliptical hole, the second array hole is an elliptical hole array, and the second rigid hole array trigger layer is a rigid elliptical hole array trigger layer; furthermore, the circular protruding hole array and the elliptical hole array are respectively inspired by the bell-shaped receptor structure of insects. Similarly, the pressure sensor in this embodiment also adopts a layered, graded conductive layer structure, imitating the suture receptor of arachnids and the bell-shaped receptor structure of insects; thus realizing a highly sensitive, large-range coupled biomimetic pressure sensor that can simultaneously achieve high sensitivity and a large range.

[0084] Based on the above embodiment of a coupled biomimetic pressure sensor, this embodiment of the invention also provides a method for fabricating a coupled biomimetic pressure sensor, comprising the following steps:

[0085] like Figure 1 , Figure 2 and Figure 3 As shown, a model of the biomimetic pressure sensor is established using 3D modeling software, and the structural parameters of the sensor's elliptical hemispherical protruding hole array 11, circular hole array 31, and slit array structure 22 are determined by finite element analysis software simulation.

[0086] The rigid elliptical hemispherical protruding hole array trigger layer 10 and the rigid circular hole array trigger layer 30 are prepared by one or more of the following methods: CNC milling, CNC turning, laser direct writing, and 3D printing. That is, the rigid elliptical hemispherical protruding hole array trigger layer 10 and the rigid circular hole array trigger layer 30 are processed by one or more of the following methods: CNC milling, CNC turning, laser direct writing, and 3D printing.

[0087] Assemble the flexible seam array conductive layer 20;

[0088] A metallic conductive layer 21 is prepared on a conductive layer with a flexible slit array having a regular shape;

[0089] A wire is attached to the surface of the metal conductive layer 21 with copper tape to connect the first electrode 40 and the second electrode 41, thus obtaining the coupled biomimetic pressure sensor.

[0090] According to the embodiments of the present invention, the modeling and simulation software described in the above steps optimizes the design of sensors of corresponding sizes according to different refinement requirements, and the processing method is simple, low-cost, and can be mass-produced.

[0091] The process for preparing the trenches on the upper surface of the flexible slit array conductive layer is selected from one of surface cutting, surface laser engraving, and mold imprinting. The method for preparing the metallic conductive layer in the flexible slit array conductive layer is selected from one of chemical plating, physical vapor deposition, spraying, and material self-growth. Thus, the method of the present invention is simple, low-cost, scalable, and stable.

[0092] Beneficial Effects: This invention provides a novel coupled biomimetic pressure sensor and its fabrication method. By employing a layered, hierarchical conductive layer structure, it mimics the slit receptors of arachnids and the bell-shaped receptors of insects. Under low pressure conditions, mimicking the slit array structure of arachnids, the resistance of the metal conductive layer undergoes small-scale deformation. The resistance change caused by the tunneling effect induced by this deformation achieves high-sensitivity pressure measurement. Under high pressure conditions, the compression of the elliptical hemispherical protruding hole array 11 and the circular hole array, inspired by the bell-shaped receptor structure of insects, induces large deformation of the flexible slit array conductive layer, resulting in a dominant resistance change and achieving large-range sensing. This overcomes the problem of existing pressure sensors failing to simultaneously achieve high sensitivity and large range.

[0093] It should be understood that the application of the present invention is not limited to the examples above. Those skilled in the art can make improvements or modifications based on the above description, and all such improvements and modifications should fall within the protection scope of the appended claims.

Claims

1. A coupled biomimetic pressure sensor, characterized in that, Including the following settings in sequence: A first rigid hole array trigger layer has a plurality of first protruding holes arranged thereon to form a first protruding array hole; A flexible slit array conductive layer is provided in the middle, on which a metal conductive layer is deposited, and a slit array structure is provided on the metal conductive layer; The second rigid hole array trigger layer has multiple second holes arranged on it to form a second array hole; The first electrode and the second electrode are respectively connected to the two ends of the intermediate flexible slit array conductive layer. The slit array structure is a slit array structure that mimics the slit receptors of arachnid organisms; The first protruding hole is an elliptical hemispherical protruding hole, the first protruding array hole is an elliptical hemispherical protruding hole array, and the first rigid hole array trigger layer is a rigid elliptical hemispherical protruding hole array trigger layer. The second hole is a circular hole, the second array hole is a circular hole array, and the second rigid hole array trigger layer is a rigid circular hole array trigger layer; Among them, the elliptical hemispherical protruding hole array and the circular hole array are respectively inspired by the bell-shaped sensory organ structure of insects. Under the first pressure condition, mimicking the slit array structure of the slit receptors of arachnid organisms, the resistance of the metal conductive layer undergoes a first-scale deformation. The pressure measurement is achieved by utilizing the resistance change caused by the tunneling effect induced by the deformation. Under the second pressure condition, the compression of the elliptical hemispherical protruding hole array and the circular hole array, inspired by the bell-shaped receptor structure of insects, causes the conductive layer of the flexible slit array to undergo a second-scale deformation, resulting in a change in resistance and realizing range sensing. The width of the slots in the flexible slot array conductive layer is 10~100μm, the depth is >100μm and less than half the thickness of the flexible slot array conductive layer, and the spacing between adjacent slots is greater than the width of the slots in the flexible slot array conductive layer. The rigid circular hole array trigger layer has a hole diameter of 1.5~6 mm, and the spacing between adjacent circular holes is consistent with the spacing between adjacent elliptical hemispheres of the rigid elliptical hemisphere protruding hole array trigger layer.

2. The coupled biomimetic pressure sensor according to claim 1, characterized in that, The major axis of the elliptical hemispheres in the rigid elliptical hemisphere protrusion array trigger layer is 1~5 mm, the minor axis is 0.5~1 mm, and the distance between adjacent elliptical hemispheres is greater than the length of the major axis of the elliptical hemispheres.

3. The coupled biomimetic pressure sensor according to claim 1, characterized in that, The flexible slot array conductive layer is a conductive layer made of a hybrid material of flexible polymer material and conductive material. The flexible polymer material mentioned above is epoxy resin, polyethylene, polyvinylidene fluoride, polypropylene, etc. One or more of the following: polystyrene, polyethersulfone, polyimide, polyamide, thermoplastic polyurethane, polyethylene terephthalate, styrene-butadiene-styrene block copolymer, natural rubber, nitrile rubber, polydimethylsiloxane, styrene-based thermoplastic elastomers, and thermoplastic vulcanized rubber; The conductive material is one or more of graphene, graphyne, carbon nanotubes, carbon black, MXene, and carbon fiber. The materials of the first electrode and the second electrode are one or more of gold, silver, copper, iron, graphite, copper-tungsten alloy, silver-tungsten alloy, and brass.

4. The coupled biomimetic pressure sensor according to claim 1, characterized in that, The material of the metal conductive layer is one or more of the following: gold nanoparticles, silver nanoparticles, copper nanoparticles, platinum nanoparticles, aluminum-boron alloy, aluminum-chromium alloy, iron-manganese alloy, aluminum-chromium-yttrium alloy, and silver-copper-palladium alloy.

5. The coupled biomimetic pressure sensor according to claim 1, characterized in that, The first protruding hole is a circular protruding hole, the first protruding array hole is a circular protruding hole array, and the first rigid hole array trigger layer is a rigid circular protruding hole array trigger layer. The second hole is an elliptical hole, the second array hole is an elliptical hole array, and the second rigid hole array trigger layer is a rigid elliptical hole array trigger layer; The circular protruding hole array and the elliptical hole array are respectively inspired by the bell-shaped sensory organ structure of insects.

6. A method for fabricating a coupled biomimetic pressure sensor as described in any one of claims 1-5, characterized in that, Including the following steps: A model of the biomimetic pressure sensor was created using 3D modeling software, and the structural parameters of the sensor's elliptical hemispherical protruding hole array, circular hole array, and slit array were determined by simulation using finite element analysis software. Rigid elliptical hemispherical protruding hole array trigger layer and rigid circular hole array trigger layer are prepared by one or more of the following methods: CNC milling, CNC turning, laser direct writing and 3D printing. Assemble a flexible seam array conductive layer; A metallic conductive layer is prepared on a conductive layer with a flexible slit array having a regular shape; The sensor is obtained by attaching wires to the surface of the metal conductive layer with copper tape and connecting the first electrode and the second electrode.

7. The preparation method according to claim 6, characterized in that, The process for preparing the trenches on the upper surface of the flexible slot array conductive layer is selected from one of surface cutting, laser direct writing, and die imprinting; The method for preparing the metal conductive layer in the flexible slit array conductive layer is selected from one of the following: chemical plating, physical vapor deposition, spraying, and material self-growth.

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