A battery foil substrate uniform coating equipment and its application method

Abstract

This invention discloses a battery foil substrate uniform coating device and its usage method, including a base plate. One side of the upper surface of the base plate is provided with an unwinding mechanism, and two connecting frames are installed on the other side of the base plate. A transmission roller is provided between the upper ends of the connecting frames. An mounting frame is provided on the upper surface of the base plate near the unwinding mechanism. Both the upper and lower ends of the mounting frame are provided with conveyor rollers. A cleaning component for cleaning the surface of the battery foil is provided between the lower ends of the connecting frames. The invention utilizes a cotton brush to clean the surface of the battery foil substrate during transport. During the cleaning process, a vacuum cleaner is activated, generating negative pressure on the collection hood to suck in the brushed dust, preventing dust from scattering. Simultaneously, a lever inside the collection hood can move the cotton brush as it rotates, dislodging the attached dust and preventing secondary contamination of the substrate by the dust on the cotton brush.

Description

Technical Field

[0001] This invention relates to the field of battery foil production technology, specifically to a battery foil substrate uniform coating equipment and its application method. Background Technology

[0002] Battery aluminum foil is used as a current collector in lithium-ion batteries. Typically, the lithium-ion battery industry uses hot-rolled rolled aluminum foil as the positive electrode of the negative current collector. Existing technology CN 113275189 B discloses a lithium battery foil substrate coating apparatus, which includes: a slurry box with an open slurry tank containing slurry; a roller that drives the foil substrate to move and coat the surface of the foil substrate with slurry; and a doctor blade to control the coating thickness.

[0003] However, this device still has certain shortcomings in its use. The aforementioned scraper method inevitably leads to excess slurry being scraped off during application, thus requiring a special collection structure. At the same time, the thicker the required thickness, the more excess slurry flows out from both sides, resulting in significant limitations in its use. Furthermore, this device cannot clean the battery foil substrate before coating, and dust on the substrate will affect the coating quality. To address these issues, we provide a battery foil substrate uniform coating device and its usage method to solve the problems mentioned above. Summary of the Invention

[0004] The purpose of this invention is to provide a uniform coating device for battery foil substrate and a method for using it, so as to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, the present invention provides the following technical solution:

[0006] A battery foil substrate uniform coating device includes a base plate, an unwinding mechanism on one side of the upper surface of the base plate, two connecting frames on the other side of the base plate, a transmission roller between the upper ends of the connecting frames, an mounting frame near the unwinding mechanism on the upper surface of the base plate, a conveying roller at both the upper and lower ends of the mounting frame, and a cleaning component for cleaning the surface of the battery foil between the lower ends of the connecting frames.

[0007] A gantry is fixedly connected to the upper surface of the base plate near the connecting frame, and a fixing frame is fixedly connected to the upper surface of the fixing frame near the gantry. A coating head is provided between the upper ends of the fixing frames, and a coating assembly for coating is provided on the coating head.

[0008] As a further aspect of the present invention: the cleaning component includes a cotton brush, which is rotatably connected to a position below the transmission roller. The cotton brush and the transmission roller are connected by a transmission belt for transmission. A collection component for collecting dust adhering to the cotton brush is provided below the cotton brush.

[0009] As a further embodiment of the present invention: the collection component includes a vacuum cleaner, which is fixedly connected to the upper end face of the base plate. The suction end of the vacuum cleaner is equipped with a collection cover, and a lever for moving the cotton brush is fixedly connected to the middle of the upper end of the collection cover.

[0010] As a further embodiment of the present invention: the coating assembly includes a coating cavity, which is opened inside the coating head. The upper end of the coating cavity is provided with a plurality of flow dividers. The upper end of the coating head is provided with a feeding assembly for conveying liquid into the coating cavity. The lower end of the coating cavity is slidably connected with an adjustment plate. The coating head is provided with an adjustment assembly for adjusting the amount of material fed.

[0011] As a further embodiment of the present invention: the feeding assembly includes a slurry tank, which is positioned above the coating head. The coating head is positioned below the slurry tank. The input end of the coating head communicates with the interior of the slurry tank. The output end of the gear pump communicates with the interior of the coating chamber. An L-shaped frame is fixedly connected to the coating head. A spline shaft is rotatably connected to the upper end of the L-shaped frame. The spline shaft is fixedly connected to the drive shaft of the gear pump. A friction wheel is slidably connected to the coating chamber. A rotating shaft is rotatably connected between the L-shaped frame and the gantry. A handle is fixedly connected to one end of the rotating shaft, which extends out of the L-shaped frame. A transmission thread is provided at the end of the rotating shaft near the L-shaped frame. An adjustment component for adjusting the position of the friction wheel is provided on the transmission thread. A transmission component for transmission is installed between the friction wheel and the transmission roller.

[0012] As a further embodiment of the present invention: the adjusting component includes a threaded seat, which is threadedly connected to the transmission thread, and a lever plate for actuating the friction wheel is fixedly connected to the upper end of the threaded seat.

[0013] As a further embodiment of the present invention: the transmission assembly includes a transmission shaft, which is rotatably connected to one side of the gantry. The coating head is also provided with a bearing seat for limiting the end of the transmission shaft. The end of the transmission shaft is provided with a conical friction wheel that cooperates with the friction wheel. A first bevel gear is fixedly connected to the end of the transmission shaft away from the conical friction wheel. Two shaft brackets are fixedly connected to one side of the gantry. A vertical shaft is rotatably connected between the two shaft brackets. A second bevel gear is fixedly connected to both ends of the vertical shaft. The second bevel gear at the upper end of the vertical shaft meshes with the first bevel gear. A third bevel gear is fixedly connected to the end of the transmission roller away from the transmission belt. The third bevel gear meshes with the second bevel gear at the lower end.

[0014] As a further embodiment of the present invention: the adjustment assembly includes a limiting frame, which is fixedly connected to one side of the coating head. Both ends of the adjustment plate are provided with sliding rods that are slidably connected to the limiting frame. A threaded rod is threadedly connected to the middle of the limiting frame. One end of the threaded rod is rotatably connected to the adjustment plate. A first gear is provided at the end of the threaded rod away from the adjustment plate. A linkage assembly for linkage is installed between the threaded rod and the rotating shaft.

[0015] As a further embodiment of the present invention: the linkage component includes a long gear, which is rotatably connected to the gantry, and a second gear is fixedly connected to the rotating shaft, wherein both the first gear and the second gear mesh with the long gear.

[0016] Compared with the prior art, the beneficial effects of the present invention are:

[0017] 1. The present invention uses a cotton brush to clean the surface of the battery foil substrate during the conveying process. During the cleaning process, the vacuum cleaner is activated to generate negative pressure on the collection hood, which sucks in the dust that is brushed off and prevents the dust from scattering. At the same time, the lever inside the collection hood can move the strips on the cotton brush when the cotton brush rotates, and remove the attached dust, so as to avoid the dust on the cotton brush causing secondary pollution to the substrate.

[0018] 2. The present invention uses a gear pump to deliver slurry into the coating head during operation. After being dispersed by the diverter, the slurry enters the gap between the adjusting plate and the coating chamber and is discharged to coat the substrate. At the same time, the gear pump is linked with the drive roller, so that the movement of the gear pump is related to the movement of the substrate, so that the slurry discharged from the coating head can evenly cover the surface of the substrate, thereby improving the uniformity of the substrate coating.

[0019] 3. The present invention allows for adjustment of the gap between the adjustment plate and the coating chamber by adjusting the position of the adjustment plate during use through the set adjustment component. At the same time, the linkage component can drive the friction wheel to move, so that the friction wheel contacts the conical friction wheel at different positions to achieve speed variation. When adjusting the gap between the adjustment plate and the coating chamber, the speed of the friction wheel will also be adjusted accordingly. Thus, the larger the gap between the adjustment plate and the coating chamber, the higher the speed of the friction wheel. This ensures that the amount of material fed is matched with the coating thickness when coating different thicknesses, thus ensuring the uniformity of coating slurry of different thicknesses. At the same time, since the slurry is directly applied to the surface of the substrate, it avoids the situation of slurry leakage to both sides of the substrate that occurs in the traditional doctor blade coating method. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the structure of the present invention.

[0021] Figure 2 This is a schematic diagram of the structure on the other side of the present invention.

[0022] Figure 3 This is a schematic diagram of the cleaning component in this invention.

[0023] Figure 4 This is a partial structural diagram of the present invention.

[0024] Figure 5 This is a schematic diagram of the adjustment component in this invention.

[0025] Figure 6 This is a schematic diagram of the internal structure of the coating head in this invention.

[0026] Figure 7 This is a schematic diagram of the adjustment component in this invention.

[0027] Figure 8 This is a cross-sectional view of the coating head in this invention.

[0028] Figure 9 This is a schematic diagram of the structure of the collection cover in this invention.

[0029] The components include: 1. Base plate; 2. Mounting frame; 3. Conveyor roller; 4. Fixing frame; 5. Connecting frame; 6. Vacuum cleaner; 7. Cotton brush; 8. Vertical shaft; 9. Gantry; 10. First bevel gear; 11. Slurry tank; 12. Lever; 13. Unwinding mechanism; 14. Collection cover; 15. Drive shaft; 16. Drive belt; 17. Drive roller; 18. Second bevel gear; 19. Shaft bracket; 20. Third bevel gear; 21. 22. Gear pump; 23. Coating head; 24. L-shaped frame; 25. Transmission thread; 26. Handle; 27. Splined shaft; 28. Friction wheel; 29. ​​Second gear; 30. Rotating shaft; 31. Long gear; 32. Threaded rod; 33. Sliding rod; 34. Limiting frame; 35. Adjusting plate; 36. Diverter plate; 37. Coating chamber; 38. Threaded seat; 39. Dial plate; 40. Conical friction wheel. Detailed Implementation

[0030] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without making inventive changes to the threaded rod (32) are within the scope of protection of the present invention.

[0031] Please see Figures 1-9In this embodiment of the invention, a battery foil substrate uniform coating device includes a base plate 1. An unwinding mechanism 13 is provided on one side of the upper surface of the base plate 1, and two connecting frames 5 are installed on the other side of the base plate 1. A transmission roller 17 is provided between the upper ends of the connecting frames 5. An mounting frame 2 is provided on the upper surface of the base plate 1 near the unwinding mechanism 13. Conveyor rollers 3 are provided at both the upper and lower ends of the mounting frame 2. A cleaning component for cleaning the surface of the battery foil is provided between the lower ends of the connecting frames 5. The cleaning component can remove dust from the surface of the battery foil substrate before coating, preventing dust from affecting the quality of subsequent coating.

[0032] The cleaning assembly includes a cotton brush 7, which is rotatably connected below the transmission roller 17. The cotton brush 7 and the transmission roller 17 are connected by a transmission belt 16. A collection assembly for collecting dust adhering to the cotton brush 7 is provided below the cotton brush 7. The collection assembly includes a vacuum cleaner 6, which is fixedly connected to the upper surface of the base plate 1. A collection cover 14 is installed on the suction end of the vacuum cleaner 6. A lever 12 for moving the cotton brush 7 is fixedly connected to the middle of the upper end of the collection cover 14.

[0033] The cotton brush 7 can clean the surface of the battery foil substrate during the conveying process. During the cleaning process, the vacuum cleaner 6 is activated to generate negative pressure on the collection cover 14, which sucks in the dust that is brushed off and prevents the dust from scattering. At the same time, the lever 12 set inside the collection cover 14 can move the cotton strip on the cotton brush 7 when the cotton brush 7 is rotated, and remove the attached dust to avoid the dust on the cotton brush 7 causing secondary pollution to the substrate.

[0034] A gantry 9 is fixedly connected to the upper surface of the base plate 1 near the connecting frame 5. A fixing frame 4 is fixedly connected to the upper surface of the fixing frame 4 near the gantry 9. A coating head 23 is provided between the upper ends of the fixing frames 4. The coating head 23 is provided with a coating assembly for coating. The coating assembly includes a coating cavity 37, which is opened inside the coating head 23. The upper end of the coating cavity 37 is provided with several flow dividers 36. The upper end of the coating head 23 is provided with a feeding assembly for conveying liquid into the coating cavity 37. An adjusting plate 35 is slidably connected to the lower end of the coating cavity 37. The coating head 23 is provided with an adjusting assembly for adjusting the amount of material fed.

[0035] During operation, the slurry can be delivered into the coating head 23 by the feeding component, and then evenly coated onto the substrate surface by the coating head 23. The adjustment component can adjust the amount of slurry fed, so that the coating thickness can be adjusted as needed during use.

[0036] The adjustment assembly includes a limiting frame 34, which is fixedly connected to one side of the coating head 23. Both ends of the adjustment plate 35 are provided with sliding rods 33 that are slidably connected to the limiting frame 34. A threaded rod 32 is threadedly connected to the middle of the limiting frame 34. One end of the threaded rod 32 is rotatably connected to the adjustment plate 35. A first gear 21 is provided at the end of the threaded rod 32 away from the adjustment plate 35. A linkage assembly for linkage is installed between the threaded rod 32 and the rotating shaft 30. The linkage assembly includes a long gear 31, which is rotatably connected to the gantry 9. A second gear 29 is fixedly connected to the rotating shaft 30. Both the first gear 21 and the second gear 29 mesh with the long gear 31.

[0037] During operation and adjustment, the rotating shaft 30 is rotated via the handle 26. The rotation of the rotating shaft 30 drives the dial plate 39 to move, which in turn drives the friction wheel 28 to move, causing the friction wheel 28 to contact the conical friction wheel 40 at different positions to achieve speed change. At the same time, the rotation of the rotating shaft 30 also drives the second gear 29 to rotate, which in turn drives the long gear 31 to rotate, which in turn drives the first gear 21 to rotate, which in turn drives the threaded rod 32, which in turn drives the adjusting plate 35 to move, thereby adjusting the material feeding gap.

[0038] The feeding assembly includes a slurry tank 11, which is positioned above the coating head 23. The coating head 23 is located below the slurry tank 11. The input end of the coating head 23 communicates with the interior of the slurry tank 11. The output end of the gear pump 22 communicates with the interior of the coating chamber 37. An L-shaped frame 24 is fixedly connected to the coating head 23. A splined shaft 27 is rotatably connected to the upper end of the L-shaped frame 24. The splined shaft 27 is fixedly connected to the drive shaft of the gear pump 22. A friction wheel 28 is slidably connected to the coating chamber 37. A rotating shaft 30 is rotatably connected between the L-shaped frame 24 and the gantry 9. One end of the rotating shaft 30 passes through the L-shaped frame 24 and is fixedly connected to a handle 26. The end of the rotating shaft 30 near the L-shaped frame 24 is provided with a transmission thread 25. An adjustment component for adjusting the position of the friction wheel 28 is provided on the transmission thread 25. The adjustment component includes a threaded seat 38, which is threadedly connected to the transmission thread 25. A lever 39 for turning the friction wheel 28 is fixedly connected to the upper end of the threaded seat 38.

[0039] During operation, the transmission assembly drives the friction wheel 28 to rotate, the rotation of the friction wheel 28 drives the spline shaft 27 to rotate, the spline shaft 27 drives the gear pump 22 to work, the gear pump 22 works to pump the slurry inside the slurry tank 11 to the coating head 23, and the coating head 23 coats the substrate surface.

[0040] A transmission assembly for transmission is installed between the friction wheel 28 and the transmission roller 17; the transmission assembly includes a transmission shaft 15, which is rotatably connected to one side of the gantry 9. The coating head 23 is also provided with a bearing seat for limiting the end of the transmission shaft 15. The end of the transmission shaft 15 is provided with a conical friction wheel 40 that cooperates with the friction wheel 28. A first bevel gear 10 is fixedly connected to the end of the transmission shaft 15 away from the conical friction wheel 40. Two shaft brackets 19 are fixedly connected to one side of the gantry 9. A vertical shaft 8 is rotatably connected between the two shaft brackets 19. A second bevel gear 18 is fixedly connected to both ends of the vertical shaft 8. The second bevel gear 18 at the upper end of the vertical shaft 8 meshes with the first bevel gear 10. A third bevel gear 20 is fixedly connected to the end of the transmission roller 17 away from the transmission belt 16. The third bevel gear 20 meshes with the second bevel gear 18 at the lower end.

[0041] During operation, the rotation of the transmission roller 17 drives the third bevel gear 20 to rotate, which in turn drives the vertical shaft 8 to rotate. The rotation of the vertical shaft 8 drives the second bevel gear 18 to rotate, which in turn drives the first bevel gear 10 to rotate. The rotation of the first bevel gear 10 drives the transmission shaft 15 to rotate, which in turn drives the conical friction wheel 40. The rotation of the conical friction wheel 40 drives the friction wheel 28 to rotate.

[0042] The working principle of this invention is as follows: During operation, the substrate is conveyed by passing it sequentially through the conveyor roller 3 and the drive roller 17. During the conveying process, the substrate drives the drive roller 17 to rotate, which in turn drives the cotton brush 7 to rotate. The cotton brush 7 can clean the surface of the substrate. During the cleaning process, the vacuum cleaner 6 is activated, generating negative pressure on the collection cover 14 to suck in the cleaned dust and prevent it from scattering. At the same time, the lever 12 inside the collection cover 14 can move the cotton strips on the cotton brush 7 as it rotates, removing the attached dust and preventing the dust on the cotton brush 7 from causing secondary contamination to the substrate. Simultaneously, the drive roller 17 rotates... The third bevel gear 20 will rotate, which will drive the vertical shaft 8 to rotate. The vertical shaft 8 will drive the second bevel gear 18 to rotate, which will drive the first bevel gear 10 to rotate. The first bevel gear 10 will drive the transmission shaft 15 to rotate, which will drive the conical friction wheel 40 to rotate. The conical friction wheel 40 will drive the friction wheel 28 to rotate, which will drive the spline shaft 27 to rotate. The spline shaft 27 will drive the gear pump 22 to work. The gear pump 22 will pump the slurry inside the slurry tank 11 to the coating head 23, and the coating head 23 will coat the substrate surface.

[0043] It will be apparent to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the invention can be implemented in other specific forms without departing from its spirit or essential characteristics. Although this specification describes embodiments, not every embodiment contains only one technical solution. This method of description is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A battery foil substrate uniform coating apparatus comprising a base plate (1), characterized in that: The base plate (1) has an unwinding mechanism (13) on one side of its upper surface, and two connecting frames (5) are installed on the other side of the base plate (1). A transmission roller (17) is provided between the upper ends of the connecting frames (5). An mounting frame (2) is provided on the upper surface of the base plate (1) near the unwinding mechanism (13). A conveyor roller (3) is provided at both the upper and lower ends of the mounting frame (2). A cleaning component for cleaning the surface of the battery foil is provided between the lower ends of the connecting frames (5). A gantry (9) is fixedly connected to the upper surface of the base plate (1) near the connecting frame (5), and a fixing frame (4) is fixedly connected to the upper surface of the base plate (1) near the gantry (9). A coating head (23) is provided between the upper ends of the fixing frame (4), and a coating component for coating is provided on the coating head (23). The coating assembly includes a coating chamber (37), which is located inside the coating head (23). The upper end of the coating chamber (37) is provided with several flow dividers (36). The upper end of the coating head (23) is provided with a feeding assembly for conveying liquid into the coating chamber (37). The lower end of the coating chamber (37) is slidably connected with an adjustment plate (35). The coating head (23) is provided with an adjustment assembly for adjusting the amount of material fed. The feeding assembly includes a slurry tank (11) positioned above the coating head (23). A gear pump (22) is located below the slurry tank (11). The input end of the gear pump (22) is connected to the inside of the slurry tank (11), and the output end of the gear pump (22) is connected to the inside of the coating chamber (37). An L-shaped frame (24) is fixedly connected to the coating head (23). A splined shaft (27) is rotatably connected to the upper end of the L-shaped frame (24). The splined shaft (27) is fixedly connected to the drive shaft of the gear pump (22). A friction wheel (28) is slidably connected on the key shaft (27). A rotating shaft (30) is rotatably connected between the L-shaped frame (24) and the gantry (9). A handle (26) is fixedly connected to one end of the rotating shaft (30) through the L-shaped frame (24). A transmission thread (25) is provided at one end of the rotating shaft (30) near the L-shaped frame (24). An adjustment component for adjusting the position of the friction wheel (28) is provided on the transmission thread (25). A transmission component for transmission is installed between the friction wheel (28) and the transmission roller (17). The adjustment assembly includes a threaded seat (38), which is threadedly connected to the transmission thread (25), and a lever (39) for turning the friction wheel (28) is fixedly connected to the upper end of the threaded seat (38). The transmission assembly includes a transmission shaft (15), which is rotatably connected to one side of the gantry (9). The coating head (23) is also provided with a bearing seat for limiting the end of the transmission shaft (15). The end of the transmission shaft (15) is provided with a conical friction wheel (40) that cooperates with the friction wheel (28). A first bevel gear (10) is fixedly connected to one end of the transmission shaft (15) away from the conical friction wheel (40). Two shaft brackets (19) are fixedly connected to one side of the gantry (9). A vertical shaft (8) is rotatably connected between the two shaft brackets (19). A second bevel gear (18) is fixedly connected to both ends of the vertical shaft (8). The second bevel gear (18) at the upper end of the vertical shaft (8) meshes with the first bevel gear (10). A third bevel gear (20) is fixedly connected to one end of the transmission roller (17) away from the transmission belt (16). The third bevel gear (20) meshes with the second bevel gear (18) at the lower end. The adjustment assembly includes a limiting frame (34), which is fixedly connected to one side of the coating head (23). Both ends of the adjustment plate (35) are provided with sliding rods (33) that are slidably connected to the limiting frame (34). A threaded rod (32) is threadedly connected to the middle of the limiting frame (34). One end of the threaded rod (32) is rotatably connected to the adjustment plate (35). A first gear (21) is provided at the end of the threaded rod (32) away from the adjustment plate (35). A linkage assembly for linkage is installed between the threaded rod (32) and the rotating shaft (30). The linkage component includes a long gear (31), which is rotatably connected to the gantry (9). A second gear (29) is fixedly connected to the rotating shaft (30). Both the first gear (21) and the second gear (29) mesh with the long gear (31).

2. The battery foil substrate uniform coating apparatus of claim 1, wherein, The cleaning assembly includes a cotton brush (7), which is rotatably connected to a position below the transmission roller (17). The cotton brush (7) and the transmission roller (17) are connected by a transmission belt (16). A collection assembly is provided below the cotton brush (7) for collecting the dust adhering to the cotton brush (7).

3. The battery foil substrate uniform coating apparatus of claim 2, wherein, The collection assembly includes a vacuum cleaner (6), which is fixedly connected to the upper surface of the base plate (1). The vacuum cleaner (6) has a collection cover (14) installed at the suction end of the vacuum cleaner (6), and a lever (12) for moving the cotton brush (7) is fixedly connected to the middle of the upper end of the collection cover (14).

4. A method of using a battery foil substrate uniform coating device as described in any one of claims 1-3, the method comprising: Step 1: During operation, the substrate is conveyed by passing through the conveyor roller (3) and the transmission roller (17) in sequence. During the conveying process, the substrate will drive the transmission roller (17) to rotate. The rotation of the transmission roller (17) can drive the cotton brush (7) to rotate. The cotton brush (7) can clean the surface of the substrate. During the cleaning process, the vacuum cleaner (6) is activated to generate negative pressure on the collection cover (14) to suck up the dust that has been cleaned and prevent the dust from scattering. At the same time, the lever (12) set inside the collection cover (14) can move the cotton strip on the cotton brush (7) when the cotton brush (7) rotates to remove the attached dust and prevent the dust on the cotton brush (7) from causing secondary pollution to the substrate. Step 2: The rotation of the transmission roller (17) will drive the third bevel gear (20) to rotate. The rotation of the third bevel gear (20) will drive the vertical shaft (8) to rotate. The rotation of the vertical shaft (8) will drive the second bevel gear (18) to rotate. The rotation of the second bevel gear (18) will drive the first bevel gear (10) to rotate. The rotation of the first bevel gear (10) will drive the transmission shaft (15) to rotate. The rotation of the transmission shaft (15) will drive the conical friction wheel (40). The rotation of the conical friction wheel (40) will drive the friction wheel (28) to rotate. The rotation of the friction wheel (28) will drive the spline shaft (27) to rotate. The spline shaft (27) will drive the gear pump (22) to work. The working gear pump (22) will pump the slurry inside the slurry tank (11) to the coating head (23), and the coating head (23) will coat it onto the surface of the substrate.

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