A workpiece clamp for automatic turnover coating of a vacuum coating machine

Abstract

The application discloses a workpiece clamp for automatic turnover coating of a vacuum coating machine, which is composed of a workpiece frame, workpiece discs, a turnover mechanism and a driving cylinder, a plurality of workpiece discs and a plurality of turnover mechanisms are installed on the workpiece frame, one end of the workpiece disc is connected with the workpiece frame, the other end of the workpiece disc is connected with the turnover mechanism, the driving cylinder is abutted with a driving assembly of the turnover mechanism, the workpiece disc is kept horizontal when a turnover fork of the turnover mechanism is abutted with a limiting mechanism, the turnover fork rotates, a turnover shaft fixed with the turnover fork rotates in a turnover seat, the turnover shaft drives the workpiece disc to rotate, and the workpiece disc rotates by 180 DEG. The workpiece clamp for automatic turnover coating of the vacuum coating machine solves the technical problem of complicated operation caused by manual turnover and multiple vacuum extractions in the prior art.

Description

Technical Field

[0001] This invention relates to the field of vacuum coating, and more specifically to a workpiece fixture for automatic flipping coating in a vacuum coating machine. Background Technology

[0002] Electron beam vacuum coating machines are mainly used for depositing various metal and dielectric films on substrates under high vacuum conditions using electron beam evaporation. The electron beam is arranged on the bottom plate of the evaporation chamber, the workpiece drive device is fixed above the top plate of the evaporation chamber, and various types of workpiece fixtures are fixed below the workpiece drive device. The workpiece fixtures are rotated by a drive motor to obtain a uniform coating effect.

[0003] Many coated products require double-sided coating of the substrate. The typical method involves placing the substrate in a workpiece fixture, placing it in a vacuum chamber, evacuating the chamber to the required vacuum level, performing the coating process, allowing the substrate to cool, releasing the vacuum from the chamber, removing the workpiece fixture, flipping the substrate back into the fixture, and repeating the vacuuming and coating process to complete double-sided coating. However, this conventional method requires manual flipping of the substrate after each flip, and re-evacuation is necessary each time, making the coating process cumbersome. Summary of the Invention

[0004] The purpose of this invention is to provide a workpiece fixture for automatic flipping and coating in a vacuum coating machine, so as to solve the technical problems of cumbersome operation caused by manual flipping and multiple vacuuming in the prior art.

[0005] To achieve the above objectives, the present invention provides a workpiece fixture for automatic flipping coating in a vacuum coating machine, comprising a workpiece holder, a workpiece tray, a flipping mechanism, and a drive cylinder. Multiple workpiece trays and multiple flipping mechanisms are mounted on the workpiece holder. One end of the workpiece tray is connected to the workpiece holder, and the other end of the workpiece tray is connected to the flipping mechanism. The drive cylinder abuts against the drive component of the flipping mechanism.

[0006] Furthermore, the flipping mechanism consists of a flipping fork, a flipping shaft, and a rotating seat. The rotating seat is vertically mounted on the mounting ring of the workpiece holder, and the flipping shaft is vertically mounted on the rotating seat through a rotating bearing. The flipping shaft is movably connected to the rotating seat, and the flipping fork is fixedly mounted on the outside of the flipping shaft. The flipping shaft and the flipping fork are fixedly connected, and the flipping fork has a V-shaped toggle structure.

[0007] Furthermore, the drive cylinder is fixedly installed on the housing of the vacuum coating machine, and the drive shaft of the drive cylinder extends into the interior of the vacuum coating machine. The drive shaft is inserted into the interior of the flipping fork of the flipping mechanism, and the drive shaft abuts against the inner side of the flipping fork.

[0008] Furthermore, the workpiece holder consists of a mounting ring, a mounting flange, and multiple partitions. The mounting flange is coaxially positioned in the middle of the mounting ring, and the multiple partitions evenly divide the mounting ring and the mounting flange into multiple cavities.

[0009] Furthermore, a flipping mechanism and a limiting mechanism are installed on the mounting ring. The limiting mechanism is installed on both sides of the flipping mechanism and abuts against the flipping fork of the flipping mechanism.

[0010] Furthermore, the middle position of the mounting flange is connected to the transition cylinder, and the transition cylinder is connected to the workpiece drive device at the upper end of the vacuum coating machine. Multiple flip-mounting slots are evenly distributed on the side of the mounting flange.

[0011] Furthermore, the workpiece disc has a fan-shaped structure, and rotating shaft connectors are provided at both ends of the workpiece disc. The end of the workpiece disc with a smaller arc length is movably connected to the flipping mounting groove of the mounting flange through the rotating shaft connector, and the end of the workpiece disc with a larger arc length is connected to the flipping shaft of the flipping mechanism through the rotating shaft connector.

[0012] Furthermore, the working surface of the workpiece disc has multiple stepped workpiece mounting holes, in which the workpiece to be plated is placed, and the workpiece to be plated is locked in place by a pressure ring.

[0013] Furthermore, when the flipping fork of the flipping mechanism comes into contact with the limiting mechanism, the workpiece disk remains horizontal. When the flipping fork rotates, the flipping shaft fixed to the flipping fork rotates within the rotating seat. The flipping shaft drives the workpiece disk to rotate, and the workpiece disk only rotates 180°.

[0014] Based on the above technical solution, the present invention can produce the following beneficial effects:

[0015] The present invention provides an automatic workpiece flipping fixture for vacuum coating machine, which can realize the flipping of the workpiece to be coated at any time according to the process needs under vacuum, and flip it back as needed, thereby completing the double-sided coating of the substrate, saving the time of manual flipping and re-vacuuming. Attached Figure Description

[0016] Figure 1 This is a structural schematic diagram of an embodiment of the present invention;

[0017] In the diagram: 1. Workpiece holder; 101. Mounting ring; 102. Mounting flange; 103. Partition plate; 2. Workpiece tray; 201. Rotating shaft connector; 202. Workpiece mounting hole; 3. Tilting mechanism; 301. Tilting fork; 302. Tilting shaft; 303. Rotating seat; 4. Drive cylinder; 401. Drive shaft; 5. Transition cylinder; 6. Limiting mechanism. Detailed Implementation

[0018] To better understand the purpose, structure, and function of this invention, the following detailed description, in conjunction with the accompanying drawings, describes an automatic flipping workpiece fixture for vacuum coating machines according to this invention.

[0019] In the description of this invention, it should be noted that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0020] like Figure 1 As shown, the present invention provides an automatic flipping workpiece fixture for vacuum coating machine, characterized in that it comprises a workpiece frame 1, a workpiece disk 2, a flipping mechanism 3 and a driving cylinder 4. Multiple workpiece disks 2 and multiple flipping mechanisms 3 are installed on the workpiece frame 1. One end of the workpiece disk 2 is connected to the workpiece frame 1, and the other end of the workpiece disk 2 is connected to the flipping mechanism 3. The driving cylinder 4 abuts against the driving component of the flipping mechanism 3.

[0021] The flipping mechanism 3 consists of a flipping fork 301, a flipping shaft 302, and a rotating seat 303. The rotating seat 303 is vertically mounted on the mounting ring 101 of the workpiece holder 1. The flipping shaft 302 is vertically mounted on the rotating seat 303 through a rotating bearing. The flipping shaft 302 is movably connected to the rotating seat 303. The flipping fork 301 is fixedly mounted on the outside of the flipping shaft 302. The flipping shaft 302 is fixedly connected to the flipping fork 301. The flipping fork 301 has a V-shaped toggle structure.

[0022] The drive cylinder 4 is fixedly installed on the housing of the vacuum coating machine. The drive shaft 401 of the drive cylinder 4 extends into the interior of the vacuum coating machine. The drive shaft 401 is inserted into the interior of the flipping fork 301 of the flipping mechanism 3. The drive shaft 401 abuts against the inner side of the flipping fork 301.

[0023] The workpiece holder 1 consists of a mounting ring 101, a mounting flange 102, and multiple partitions 103. The mounting flange 102 is coaxially arranged in the middle of the mounting ring 101, and the multiple partitions 103 evenly divide the mounting ring 101 and the mounting flange 102 into multiple cavities.

[0024] Furthermore, the workpiece holder 1 is designed as a three-leaf, four-leaf, or multi-leaf mounting cavity through the partition 103 according to the size of the workpiece and specific process requirements, so as to cooperate with workpiece trays 2 of different numbers and shapes. The form of the workpiece holder 1 can be designed as a horizontal or inclined structure.

[0025] The mounting ring 101 is equipped with a flipping mechanism 3 and a limiting mechanism 6. The limiting mechanism 6 is installed on both sides of the flipping mechanism 3 and abuts against the flipping fork 301 of the flipping mechanism 3.

[0026] The middle position of the mounting flange 102 is connected to the transition cylinder 5, and the transition cylinder 5 is connected to the workpiece drive device at the upper end of the vacuum coating machine. Multiple flip-mounting slots are evenly distributed on the side of the mounting flange 102.

[0027] Furthermore, the transition cylinder 5 is used to install the workpiece holder 1 and adjust the installation height of the workpiece holder 1. The workpiece driving device drives the connected workpiece holder 1 to rotate at a set speed through the transition cylinder 5.

[0028] The workpiece disk 2 has a fan-shaped structure. Rotating shaft connectors 201 are provided at both ends of the workpiece disk 2. The end of the workpiece disk 2 with a smaller arc length is movably connected to the flip mounting groove of the mounting flange 102 through the rotating shaft connector 201. The end of the workpiece disk 2 with a larger arc length is connected to the flip shaft 302 of the flipping mechanism 3 through the rotating shaft connector 201.

[0029] The workpiece plate 2 has multiple stepped workpiece mounting holes 202 on its working surface. The workpiece to be plated is placed in the workpiece mounting holes 202 and the workpiece to be plated is locked in the workpiece mounting holes 202 by a pressure ring.

[0030] When the flipping fork 301 of the flipping mechanism 3 comes into contact with the limiting mechanism 6, the workpiece disk 2 remains horizontal. When the flipping fork 301 rotates, the flipping shaft 302 fixed to the flipping fork 301 rotates in the rotating seat 303. The flipping shaft drives the workpiece disk 2 to rotate, and the workpiece disk 2 only rotates 180°.

[0031] As the most important design element in the flipping mechanism 3, the flipping fork 301 needs to consider its shape and its influence on the flipping of the workpiece disk 2. This includes the contact position between the drive cylinder 4 and the flipping fork 301 at each stage of the flipping process, as well as the overall flipping speed. The flipping fork 301 is designed in a V-shape. When the flipping fork 301 first contacts the drive shaft 401, the preferred contact position is near the end of the inner wall of the flipping fork 301. When the flipping fork 301 is vertical, the preferred contact position of the drive shaft 401 is near the V-shaped angle of the flipping fork. At this time, the inner surface of the angle between the drive shaft 401 and the flipping fork 301 forms two tangential surfaces. When the flipping fork 301 disengages from the drive shaft 401, the preferred contact position is near the symmetrical inner surface of the flipping fork 301 upon first contact, ensuring the smoothness of the flipping and guaranteeing the coating quality.

[0032] The specific operation method of this invention is as follows:

[0033] The workpiece drive device of the vacuum coating machine drives the workpiece fixture to rotate through the transition cylinder 5. When it is necessary to flip the workpiece to be coated, the pneumatic system of the automatic or manual operation equipment controls the electromagnetic reversing valve of the drive cylinder 4 to switch, so that the drive cylinder 4 installed on the housing of the vacuum coating machine extends the drive shaft 401 and inserts into the inner side wall of the flipping fork 301 of the flipping mechanism 3 to abut. The workpiece holder 1 rotates, so that the drive shaft 401 moves the flipping fork 301 to flip. The flipping fork 301 drives the flipping shaft 302 to rotate together around the axis of the flipping shaft 302. The rotation drive of the flipping shaft 302 and the workpiece disk 2 of the flipping shaft 302 are flipped through the rotating shaft connector 201. The workpiece holder 1 continues to rotate, so that the drive shaft 401 changes the state in which the flipping fork 301 abuts against the limiting mechanism 6 on one side of the flipping mechanism 3 to the state in which the flipping fork 301 abuts against the limiting mechanism 6 on the other side of the flipping mechanism, so that the workpiece disk 2 completes a 180° flip.

[0034] If the process requires it, the workpiece drive device rotates in the opposite direction, repeating the above process, flipping the workpiece fixture to flip the workpiece disk 2 and return it to its original state.

[0035] It is understood that the present invention has been described through some embodiments, and those skilled in the art will recognize that various changes or equivalent substitutions can be made to these features and embodiments without departing from the spirit and scope of the invention. Furthermore, under the teachings of the present invention, these features and embodiments can be modified to adapt to specific situations and materials without departing from the spirit and scope of the invention. Therefore, the present invention is not limited to the specific embodiments disclosed herein, and all embodiments falling within the scope of the claims of this application are within the protection scope of the present invention.

Claims

1. A workpiece fixture for automatic flipping during vacuum coating, characterized in that, It consists of a workpiece rack (1), a workpiece disc (2), a flipping mechanism (3) and a drive cylinder (4). Multiple workpiece discs (2) and multiple flipping mechanisms (3) are installed on the workpiece rack (1). One end of the workpiece disc (2) is connected to the workpiece rack (1), and the other end of the workpiece disc (2) is connected to the flipping mechanism (3). The drive cylinder (4) abuts against the drive component of the flipping mechanism (3). The flipping mechanism (3) consists of a flipping fork (301), a flipping shaft (302), and a rotating seat (303). The rotating seat (303) is vertically mounted on the mounting ring (101) of the workpiece holder (1). The flipping shaft (302) is vertically mounted on the rotating seat (303) through a rotating bearing. The flipping shaft (302) is movably connected to the rotating seat (303). The flipping fork (301) is fixedly mounted on the outside of the flipping shaft (302). The flipping shaft (302) is fixedly connected to the flipping fork (301). The flipping fork (301) is a V-shaped toggle structure. The workpiece holder (1) consists of a mounting ring (101), a mounting flange (102), and multiple partitions (103). The mounting flange (102) is coaxially arranged in the middle of the mounting ring (101), and the multiple partitions (103) evenly divide the mounting ring (101) and the mounting flange (102) into multiple cavities. The mounting ring (101) is equipped with a flipping mechanism (3) and a limiting mechanism (6). The limiting mechanism (6) is installed on both sides of the flipping mechanism (3), and the limiting mechanism (6) abuts against the flipping fork (301) of the flipping mechanism (3). The workpiece disk (2) has a fan-shaped structure. Rotating shaft connectors (201) are provided at both ends of the workpiece disk (2). The end of the workpiece disk (2) with a smaller arc length is movably connected to the flip mounting groove of the mounting flange (102) through the rotating shaft connector (201). The end of the workpiece disk (2) with a larger arc length is connected to the flip shaft (302) of the flipping mechanism (3) through the rotating shaft connector (201).

2. The workpiece fixture for automatic flipping coating in a vacuum coating machine according to claim 1, characterized in that, The drive cylinder (4) is fixedly installed on the housing of the vacuum coating machine. The drive shaft (401) of the drive cylinder (4) extends into the interior of the vacuum coating machine. The drive shaft (401) is inserted into the interior of the flipping fork (301) of the flipping mechanism (3). The drive shaft (401) abuts against the inner side of the flipping fork (301).

3. The workpiece fixture for automatic flipping coating in a vacuum coating machine according to claim 1, characterized in that, The middle position of the mounting flange (102) is connected to the transition cylinder (5), and the transition cylinder (5) is connected to the workpiece driving device at the upper end of the vacuum coating machine. Multiple flip-mounting slots are evenly distributed on the side of the mounting flange (102).

4. The workpiece fixture for automatic flipping coating in a vacuum coating machine according to claim 1, characterized in that, The workpiece disk (2) has multiple stepped workpiece mounting holes (202) on its working surface. The workpiece to be plated is placed in the workpiece mounting hole (202), and the workpiece to be plated is locked in the workpiece mounting hole (202) by a pressure ring.

5. The workpiece fixture for automatic flipping coating in a vacuum coating machine according to claim 1, characterized in that, When the flipping fork (301) of the flipping mechanism (3) comes into contact with the limiting mechanism (6), the workpiece disk (2) remains horizontal. When the flipping fork (301) rotates, the flipping shaft (302) fixed with the flipping fork (301) rotates in the rotating seat (303). The flipping shaft drives the workpiece disk (2) to rotate, and the workpiece disk (2) only rotates 180°.

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