Unloading device of air floating mechanism of PCB exposure machine

Abstract

The present application relates to air floating structure manufacturing technical field, specifically to a kind of unloading device of PCB exposure machine air floating mechanism.The air floating mechanism is used to carry horizontal workbench, and unloading device provides support force to unload for horizontal workbench, the unloading device is symmetrically arranged at the two ends of horizontal workbench, and the unloading device includes support beam fixed horizontally on exposure machine support and mounting box slidably connected on support beam, vertical elastic space is formed in mounting box, and horizontal workbench is connected with the upper surface of mounting box.Mounting box provides a support force to horizontal workbench continuously at both sides respectively, so that the load of horizontal workbench acting on air floating plate is reduced, and unloading effect is achieved, so the air film thickness between air floating plate and air floating shaft is increased, and the carrying capacity is improved.

Description

TECHNICAL FIELD

[0001] The application relates to the technical field of air floating structure manufacturing, and particularly relates to an unloading device of an air floating mechanism of a PCB exposure machine. BACKGROUND

[0002] The PCB exposure machine is a device for manufacturing a printed circuit board (PCB), and is mainly used for transferring a designed circuit pattern to a photosensitive film or a photoresist plate, so as to perform subsequent etching or manufacturing processes. The air floating mechanism of the PCB exposure machine is a common device for supporting and adjusting the flatness of a workbench. The mechanism realizes floating and balance of the workbench by utilizing the pressure and flow of gas, can realize flatness adjustment of the workbench, reduce mechanical friction, reduce noise and vibration, and thus improve the precision and stability of exposure to ensure the flatness of the workbench in the exposure process. The application of the air floating mechanism in the PCB exposure machine can effectively improve the flatness of the workbench in the exposure process and improve the exposure quality.

[0003] The ultra-precision air floating positioning work platform based on the air floating structure technology is a new type of precision motion mechanism, and has the advantages of high positioning precision and good repeatability. However, the design of the air floating structure involves structural dynamics and finite element analysis, and has high requirements on theory and manufacturing precision of structural parts. In the actual manufacturing process, the air film height of the finished product of the air floating structure is often small due to unpredictable deviations in the process, and the bearing capacity is insufficient. In normal production of the exposure machine, the bearing capacity of the air floating structure is very important, because the floating part will produce a certain degree of pitch due to the inertial force of the air floating motion part in the start-stop moment of the exposure machine, and when the air film deviation caused by the pitch is greater than the air film thickness, destructive scratching will occur between the air floating plates, and damage will be caused to the air floating structure.

[0004] In invention patent application number 201910232548.1, an automatic exposure machine is provided, which includes a first air-floating alignment device for aligning the substrate to be exposed, a first air-floating exposure device for exposing a first surface of the substrate to be exposed, an air-floating flipping device for flipping the substrate to be exposed, a second air-floating alignment device for re-aligning the flipped substrate to be exposed, a second air-floating exposure device for exposing a second surface of the substrate to be exposed, and an air-floating discharge device for discharging the exposed substrate. This prior art automatic exposure machine can effectively improve production efficiency. Furthermore, the substrate to be exposed is in a state of no surface contact friction throughout the entire process on a cleaned air cushion, enabling frictionless motion positioning and efficient transport, and avoiding product quality problems caused by contact friction. However, this scheme controls the air flotation movement between the fans, but the direction and pressure of gas flow cannot be precisely controlled, the mechanical properties are unstable, and a stable working state cannot be guaranteed. The pitch caused by the start and stop of the exposure machine may lead to work errors; moreover, the mechanical coefficient is uncontrollable and the relationship of the forces cannot be precisely adjusted. Summary of the Invention

[0005] Based on the shortcomings of the above-mentioned background technology, this invention addresses the problem that the air film height of the air flotation structure of traditional exposure machines is small and the load-bearing capacity of the horizontal worktable is insufficient. The purpose is to provide an unloading device for the air flotation mechanism of a PCB exposure machine, which continuously provides support on both sides of the worktable to achieve the effect of unloading.

[0006] To solve the above-mentioned technical problems, the present invention is achieved through the following technical solution:

[0007] An unloading device for an air-float mechanism of a PCB exposure machine is disclosed. The air-float mechanism is used to support a horizontal worktable, and the unloading device provides support force to the horizontal worktable to unload it. The unloading device is symmetrically arranged at both ends of the horizontal worktable. The unloading device includes a support beam horizontally fixed on the exposure machine bracket and a mounting box slidably connected to the support beam. A vertical elastic space is formed inside the mounting box, and the horizontal worktable is connected to the upper surface of the mounting box.

[0008] The air flotation mechanism includes an air flotation plate and an air flotation shaft. After the air holes of the air flotation plate are vented, an air film is generated between the air flotation plate and the air flotation shaft, which makes the air flotation plate suspend above the air flotation shaft. At the same time, the air flotation plate is engaged with the air flotation shaft and can move along the axial direction of the air flotation shaft.

[0009] The PCB exposure machine comprises an exposure machine base and exposure machine supports arranged around the base, a support beam is arranged between the exposure machine supports on both sides of a horizontal workbench, a mounting box is slidably connected to the support beam, a vertical elastic space is formed in the mounting box, the mounting box continuously provides a support force to the horizontal workbench on both sides, the load of the horizontal workbench acting on the air floating plate is reduced, the unloading effect is achieved, the air film thickness between the air floating plate and the air floating shaft is increased, and the bearing capacity is improved; meanwhile, the horizontal workbench is slidably connected to the support beam through the mounting box, so that the horizontal workbench and the air floating plate are kept synchronous movement.

[0010] As a further improvement of the application, the mounting box comprises an upper elastic seat and a lower elastic seat, and the vertical elastic space is arranged between the upper elastic seat and the lower elastic seat.

[0011] As a further improvement of the application, the vertical elastic space comprises evenly distributed counterbores, and a rectangular spring is arranged in each counterbore.

[0012] Different unloading loads can be matched by replacing rectangular springs with different elastic coefficients and lengths, thereby expanding the application range of the unloading device.

[0013] As a further improvement of the application, a pre-pressing screw is further connected between the upper elastic seat and the lower elastic seat.

[0014] As a further improvement of the application, a bearing roller is arranged at the bottom of the lower elastic seat, an upper surface of the support beam is provided with a support rail, and the mounting box is slidably connected to the support rail through the bearing roller.

[0015] As a further improvement of the application, a bending plate is connected between the mounting box and the horizontal workbench, one end of the bending plate is fixed to the upper surface of the upper elastic seat, and the other end of the bending plate is connected to the horizontal workbench.

[0016] As a further improvement of the application, the end of the bending plate connected to the upper elastic seat is parallel to the support rail.

[0017] As a further improvement of the application, a support column is arranged on the exposure machine support, and both ends of the support beam are arranged on the upper surface of the support column.

[0018] As a further improvement of the application, an adjusting gasket is further arranged between the support beam and the support column, and the support beam is adjusted through the adjusting gasket to keep the upper surface of the support beam parallel to the upper surface of the air floating mechanism.

[0019] The parallelism between the high-precision adjusting connecting surface and the support rail surface is adjusted to ensure that the air floating mechanism uniformly bears pressure after unloading and runs smoothly.

[0020] As a further improvement of the present application, the support column is further connected with a protection pin for preventing the unloading device from sinking.

[0021] Therefore, the main beneficial effects of the present application are:

[0022] (1) The unloading device of the air floating mechanism of the PCB exposure machine provided by the present application is characterized in that: the mounting box and the support beam are arranged to form an elastic space, the mounting box provides a support force to the horizontal workbench on both sides, the load of the horizontal workbench acting on the air floating plate is reduced, the unloading effect is achieved, the thickness of the air film between the air floating plate and the air floating shaft is increased, and the bearing capacity is improved; and the horizontal workbench is slidably connected to the support beam through the mounting box, so that the horizontal workbench and the air floating plate move synchronously.

[0023] (2) Further, the upper elastic seat and the lower elastic seat are arranged in a split mode, the counterbores for accommodating the rectangular springs are formed between the upper elastic seat and the lower elastic seat, different unloading loads can be matched by replacing the rectangular springs with different elastic coefficients and different lengths, and the adaptability of the unloading device is enhanced.

[0024] (3) Further, the parallelism between the support raceway surface and the connecting surface is measured by the electronic level combined with the adjusting gasket, the pressure bearing is uniform after the air floating mechanism is unloaded, and the operation is smooth. BRIEF DESCRIPTION OF DRAWINGS

[0025] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed in the embodiment description will be briefly introduced. Obviously, the drawings in the following description are only a part of the present application, and other drawings can be obtained by those skilled in the art without creative labor.

[0026] Figure 1 FIG. 1 is a structural schematic view of the unloading device of the present application installed on the PCB exposure machine;

[0027] Figure 2 FIG. 2 is a connection schematic view of the components of the unloading device of the present application;

[0028] Figure 3 FIG. 3 is a structural schematic view of the mounting box of the present application;

[0029] The following table shows the meanings of the reference signs in the drawings:

[0030] Air floating mechanism 0-1, air floating shaft 0-11, air floating plate 0-12, horizontal workbench 0-2, exposure machine base 0-3, exposure machine support 0-4, support beam 1, support rail 1-1, mounting box 2, upper elastic seat 2-1, lower elastic seat 2-2, rectangular spring 2-3, pre-press screw 2-4, bearing roller 2-5, vertical elastic space 3, counterbore 3-1, bending plate 4, support column 5, adjusting gasket 5-1, protection pin 6. DETAILED DESCRIPTION

[0031] Embodiments of the present application are described in detail below with reference to examples illustrated in the accompanying drawings. The embodiments described below by reference to the drawings are exemplary and are intended to explain the present application, and cannot be understood as a limitation of the present application.

[0032] In the description of the present application, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation of the present application.

[0033] In the present application, unless otherwise explicitly specified and limited, the terms "mounting", "connection", "connection", "fixing" and the like should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected or in communication with each other; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship between two elements, unless otherwise explicitly limited. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0034] The present application will be further described in detail below in conjunction with the drawings:

[0035] Before the technical solutions of the present application are described in detail, the background of the exposure machine product to which the present application is applied is introduced:

[0036] As Figure 1, the PCB exposure machine comprises an exposure machine base 0-3 and exposure machine supports 0-4 arranged around the base, a gas floating mechanism 0-1 is fixed between the exposure machine supports 0-4, and the gas floating mechanism 0-1 is used for bearing a horizontal workbench 0-2. The gas floating mechanism 0-1 comprises a gas floating plate 0-12 and a gas floating shaft 0-11. After the air holes of the gas floating plate 0-12 are ventilated, an air film is generated between the gas floating plate 0-12 and the gas floating shaft 0-11, so that the gas floating plate 0-12 is suspended above the gas floating shaft 0-11. The horizontal workbench 0-2 is fixed on the surface of the gas floating plate 0-12, and the gas floating plate 0-12 is clamped on the gas floating shaft 0-11 and can move along the axial direction of the gas floating shaft 0-11. In normal production of the exposure machine, the bearing capacity of the gas floating mechanism 0-1 is very important. Because of the inertial force of the gas floating moving part, a certain degree of pitching is generated in the floating part when the exposure machine starts and stops. When the air film deviation generated by the pitching is greater than the thickness of the air film, destructive scraping is generated between the gas floating plate 0-12 and the gas floating shaft 0-11, and damage is caused to the gas floating mechanism 0-1.

[0037] With reference to Figures 1-3 The embodiment provides an unloading device of a gas floating mechanism of a PCB exposure machine, and aims to solve the problems of small gas film height and insufficient bearing capacity of the gas floating mechanism 0-1. The unloading device provides support force for the horizontal workbench 0-2 to unload, and the unloading device is symmetrically arranged at two ends of the horizontal workbench 0-2. The unloading device comprises a support beam 1 horizontally fixed on the exposure machine support 0-4 and a mounting box 2 slidably connected to the support beam 1, a vertical elastic space 3 is formed in the mounting box 2, and the horizontal workbench 0-2 is connected to the upper surface of the mounting box 2.

[0038] The mounting box 2 continuously provides a support force for the horizontal workbench 0-2 at two sides respectively, so that the load of the horizontal workbench 0-2 acting on the gas floating plate 0-12 is reduced, the unloading effect is achieved, the thickness of the air film between the gas floating plate 0-12 and the gas floating shaft 0-11 is increased, and the bearing capacity is improved; meanwhile, the horizontal workbench 0-2 is slidably connected to the support beam 1 through the mounting box 2, so that the horizontal workbench 0-2 and the gas floating plate 0-12 are kept synchronous movement.

[0039] With reference to Figure 1 and in combination with Figure 2 A support column 5 is fixed on the exposure machine support 0-4, two ends of the support beam 1 are arranged on the upper surface of the support column 5, a support rail 1-1 is further arranged on the upper surface of the support beam 1, and the mounting box 2 is slidably connected to the support rail 1-1; an adjusting gasket 5-1 is arranged at the connection position of the bottom of the support beam 1 and the support column 5, the support beam 1 is adjusted on the support column 5 through the adjusting gasket 5-1 by using an electronic level, the upper surface of the support rail 1-1 is kept parallel to the upper surface of the gas floating shaft 0-11, the pressure bearing of the gas floating mechanism 0-1 is uniform after unloading, and the operation is smooth.

[0040] Preferably, the combination Figure 3 Preferably, the combination

[0041] The upper elastic seat 2-1 is fixedly connected with the horizontal workbench 0-2 through the bent plate 4, specifically, the bent plate 4 is in L-shaped structure, one end of the horizontal bending is fixed on the upper surface of the upper elastic seat 2-1, and the other end of the vertical bending is fixed on the horizontal workbench 0-2. Before the bent plate 4 is fastened on the horizontal workbench 0-2, an electronic level is needed to measure to ensure that the upper surface of the horizontal bending of the bent plate 4 is parallel to the upper surface of the supporting raceway 1-1.

[0042] Preferably, the bottom surface of the lower elastic seat 2-2 is fixed with a plurality of bearing rollers 2-5 through a pin, and the mounting box 2 is slidably connected on the supporting raceway 1-1 through the bearing rollers 2-5.

[0043] It should be noted that the upper elastic seat 2-1 and the lower elastic seat 2-2 are also connected with a pre-pressing screw 2-4, after the upper elastic seat 2-1 and the lower elastic seat 2-2 are pressed tightly through the pre-pressing screw 2-4, the mounting box 2 is fixedly connected below the bent plate 4 through a screw, then the pre-pressing screw 2-4 is loosened counterclockwise until it is not stressed, and then a 0.1mm thick plug gauge is used to check that the bearing rollers 2-5 are in full contact with the upper surface of the supporting raceway 1-1, and the unloading device is assembled.

[0044] The supporting column 5 is also fixedly connected with a protection pin 6, the bottom surface of the protection pin 6 is supported on the air floating shaft 0-11, so as to prevent the whole device from sinking.

[0045] The above only describes specific embodiments of the present application, but the technical features of the present application are not limited to this, any person skilled in the art can make changes or modifications in the field of the present application, which are all covered in the patent scope of the present application.

Claims

1. An unloading device of an air floating mechanism of a PCB exposure machine, the air floating mechanism being used to support a horizontal stage, the unloading device providing a support force to the horizontal stage to unload, characterized in that, The unloading device is symmetrically arranged at both ends of the horizontal workbench, and comprises a support beam (1) fixed horizontally on an exposure machine support and a mounting box (2) slidably connected to the support beam, a vertical elastic space (3) being formed in the mounting box, and the horizontal workbench being connected to the upper surface of the mounting box (2).

2. The unloading device of the air floating mechanism of the PCB exposure machine according to claim 1, characterized in that, The mounting box (2) comprises an upper elastic seat (2-1) and a lower elastic seat (2-2), and the vertical elastic space (3) is arranged between the upper elastic seat (2-1) and the lower elastic seat (2-2).

3. The unloading device of the air floating mechanism of the PCB exposure machine according to claim 2, characterized in that, The vertical elastic space (3) comprises evenly distributed counterbores (3-1), and each counterbore is provided with a rectangular spring (2-3).

4. The unloading device of the air floating mechanism of the PCB exposure machine according to claim 2, characterized in that, The upper elastic seat (2-1) and the lower elastic seat (2-2) are further connected with a pre-pressing screw (2-4).

5. The unloading device of the air floating mechanism of the PCB exposure machine according to claim 2, characterized in that, The bottom of the lower elastic seat (2-2) is provided with a bearing roller (2-5), the upper surface of the support beam (1) is provided with a support rail (1-1), and the mounting box (2) is slidably connected to the support rail (1-1) through the bearing roller (2-5).

6. The unloading device of the air floating mechanism of the PCB exposure machine according to claim 5, wherein, The mounting box (2) is connected with the horizontal workbench through a bending plate (4), one end of the bending plate is fixed to the upper surface of the upper elastic seat (2-1), and the other end is connected with the horizontal workbench.

7. The unloading device of the air floating mechanism of the PCB exposure machine according to claim 6, characterized in that, The end of the bending plate (4) connected with the upper elastic seat (2-1) is parallel to the support rail (1-1).

8. The unloading device of the air floating mechanism of the PCB exposure machine according to claim 1, characterized in that, The exposure machine support is provided with a support column (5), and the two ends of the support beam (1) are arranged on the upper surface of the support column (5).

9. The unloading device of the air floating mechanism of the PCB exposure machine according to claim 8, wherein, Adjusting shims (5-1) are further arranged between the support beam (1) and the support column (5), and the support beam (1) is adjusted through the adjusting shims so that the upper surface of the support beam is parallel to the upper surface of the air floating mechanism.

10. The unloading device of the air floating mechanism of the PCB exposure machine according to claim 8, wherein, The support column (5) is further transversely connected with a protection pin (6) for preventing the unloading device from sinking.

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