Corrosion-resistant diaphragm valve and method of assembling same

Abstract

The application relates to a corrosion-resistant diaphragm valve, which comprises a valve cover, a thick diaphragm clamped by the valve cover and a supporting block, and a valve seat combined with the valve cover. The bending part of the thick diaphragm can provide better diaphragm life, and in order to solve the problems of poor flow capacity, large pressure loss and difficult closing caused by the short moving stroke of the switch using the thick diaphragm, the first lower opening of the valve cover is embedded with the supporting block to limit the activity space of the pneumatic piston part, the second lower opening of the supporting block is embedded with a guided diaphragm pressing block connected to one end of the pneumatic piston part. The bottom of the thick diaphragm is provided with a one-seal convex strip extending through the valve head. In the horizontal section along the flow channel axis, the curved flow channel structure is formed with a curved channel C opening and presents a flattened curved upward bending; in the valve closing and assembling process, the one-seal convex strip is aligned and pressed on the arc-shaped dam. The application is particularly suitable for the liquid medicine supply of the production equipment of the semiconductor wet process, and has the characteristics of large flow capacity, low pressure loss and durable diaphragm.

Description

Technical Field

[0001] This invention relates to the technical field of diaphragm valves, and in particular to a corrosion-resistant diaphragm valve and an assembly method for manufacturing the corrosion-resistant diaphragm valve. Background Technology

[0002] Diaphragm valves are primarily used for conveying specialized, isolated fluids, such as those used in semiconductor manufacturing. These fluids are often corrosive, causing traditional metal valves to corrode. Furthermore, the flanged structure and split design of the metal valve body and cover, along with the use of metal locking components, offer limited corrosion resistance and make them susceptible to leakage due to aging of external structural parts. Diaphragm valves with pneumatic actuators have complex internal structures with numerous components, some of which are made of metal and prone to corrosion, resulting in high failure rates, short valve lifespans, and high maintenance costs. However, factors affecting valve lifespan are not limited to metal corrosion; the thickness of the diaphragm is also a significant factor.

[0003] The applicant, in its invention patent authorization number CN107061786B, proposed a corrosion-resistant diaphragm valve applicable to the delivery of chemical agents in semiconductor manufacturing. Whether manual or pneumatic, the diaphragm valve includes a valve body and a valve cover. A diaphragm is fitted within the space enclosed by the valve body and valve cover, and the diaphragm is connected to a piston or valve stem. The upper and lower ends of the piston or valve stem are respectively sealed to the valve cover and valve body. All components in the diaphragm valve are made entirely of plastic. This invention patent primarily addresses the problems of weak corrosion resistance in the external mechanism of diaphragm valves, complex internal structures, the influence of weir-shaped flow channels on fluid flow, and non-compact and unattractive structures, while providing strong corrosion resistance.

[0004] Further research revealed that while a thinner diaphragm resulted in more precise diaphragm valve operation, it also shortened the lifespan of corrosion-resistant diaphragm valves. Conversely, a thicker diaphragm improved the valve's lifespan, but made the operation less precise, potentially leading to gaps that prevented proper closure or insufficient opening to achieve the required flow rate. Summary of the Invention

[0005] The main objective of this invention is to provide a corrosion-resistant diaphragm valve. The key advancement lies in simultaneously addressing the technical problems of thick-film diaphragms (poor sealing and reduced flow) and thin-film diaphragms (short service life). Furthermore, it also achieves the domestic independent research and development of key components for semiconductor manufacturing equipment.

[0006] The second main objective of this invention is to provide a production equipment for semiconductor wet process that meets the requirements of precise switching supply of chemical reagents in the semiconductor wet process and can be used at high frequency for a long time.

[0007] The third main objective of this invention is to provide an assembly method for a corrosion-resistant diaphragm valve, which has the effect of accurately positioning the thick-film diaphragm sheet when assembling the corrosion-resistant diaphragm valve.

[0008] The main objective of this invention is achieved through the following technical solution:

[0009] A corrosion-resistant diaphragm valve is proposed, comprising:

[0010] A valve cover, wherein a pneumatic piston with elastic outward push is provided inside the valve cover, a fixed and non-rotatable support block is embedded in the first lower opening of the valve cover, and a guided diaphragm pressure block is embedded in the second lower opening of the support block, the diaphragm pressure block being connected to one end of the pneumatic piston.

[0011] A thick film diaphragm is attached to the pneumatic piston assembly. The thick film diaphragm has a valve head connected to one end of the pneumatic piston assembly, a curved portion extending outward from the valve head, and a clamping portion extending outward from the curved portion. The clamping portion has a plurality of peripheral through holes or notches. Furthermore, the bottom of the thick film diaphragm has a straight sealing strip extending through the valve head.

[0012] The valve seat is connected to the valve cover via a first connector. The first connector passes through a peripheral through-hole or notch in the thick-film diaphragm and connects to the valve cover to clamp the clamping portion of the thick-film diaphragm. The thickness of the clamping portion of the thick-film diaphragm is sufficient to prevent the valve seat from directly contacting the valve cover. The valve seat contains a first flow channel and a second flow channel separated by an arc-shaped dam. The first flow channel and the second flow channel form opposing curved flow channel structures at their adjacent ends. In a horizontal section along the flow channel axis, the curved flow channel structure forms a curved C-shaped opening and curves upward in a flattened shape. When the valve is closed, the straight sealing strip is aligned and pressed against the arc-shaped dam.

[0013] The implementation principle of this basic structural example is that the support block is pre-embedded in the first lower opening of the valve cover to pre-connect pneumatic components such as the pneumatic piston to the valve cover. The driving movement of the pneumatic piston, except for one end of the pneumatic piston and the diaphragm pressure block, will not affect the closing and opening of the valve. The support block isolates the lower driving chamber and the pressure relief balance chamber of the valve cover, and together with the valve cover, clamps the clamping part of the thick film diaphragm. The pneumatic piston can better drive the diaphragm pressure block, so that the curved part of the thick film diaphragm can be accurately closed and deformed. Furthermore, the bottom of the thick film diaphragm is provided with a straight sealing ridge extending through the valve head to enhance the pressure contact with the valve seat. The valve closing effect of the arc-shaped dam is further enhanced by the thickness of the clamping portion of the thick film diaphragm, which is sufficient to prevent direct contact between the valve seat and the valve cover, ensuring that the clamping portion of the thick film diaphragm is well-clamped during the valve seat-valve connection. Furthermore, the curved flow channel structure on both sides of the arc-shaped dam forms a curved C-shaped opening, which is flattened and bends upwards. The thick film diaphragm can operate with a small opening amplitude without affecting the flow rate and pressure loss of the diaphragm valve during valve opening. When the valve is closed, the single-seal protrusion can accurately align and press against the arc-shaped dam. The switching between opening and closing produces a clear fluid outflow and closure without dripping. This is specifically suitable for semiconductor wet process manufacturing equipment.

[0014] In a preferred embodiment, the present invention may be further configured such that the thickness of the clamping portion of the thick film diaphragm is the same as the thickness of the curved portion; wherein the shape of the curved portion is annular outside the valve head, and the shape of the clamping portion is square outside the curved portion.

[0015] By employing the preferred technical features of the above structure, the thickness of the clamping portion of the thick-film diaphragm is consistent with the thickness of the curved portion, with the thickness of the curved portion being between 80% and 100% of the thickness of the clamping portion. This improves the durability of the thick-film diaphragm and reduces deformation and breakage of the curved portion. Furthermore, the annular shape of the curved portion facilitates deformation during the valve head's lifting and lowering process. The square shape of the clamping portion enhances the positioning effect before clamping and the anti-rotation characteristics after clamping, ensuring that the single-slot sealing strip does not become relatively skewed relative to the arc-shaped barrier under prolonged valve opening and closing.

[0016] In a preferred embodiment, the present invention may be further configured such that the thick film diaphragm also has an anti-rotation reset protrusion outside the clamping portion, so that the clamping portion of the thick film diaphragm has a non-rotational alignment characteristic of slightly resetting under clamping during the process of the valve opening from closed to open.

[0017] In a preferred embodiment, the invention can be further configured such that both ends of the single-line sealing ridge extend to the edge of the curved portion. Therefore, when the valve is closed, the portion of the single-line sealing ridge extending to the curved portion is supported by the diaphragm pressure block, pressing it against the arc-shaped barrier to improve the valve closing effect of the diaphragm valve. The formation of the single-line sealing ridge is used to solve or avoid dripping phenomena caused by a slight mismatch between the concave arc shape of the arc-shaped barrier and the curved portion of the thick-film diaphragm in the YZ direction of the flow channel cross-section, where the X direction is the flow channel movement direction, the Y direction is the horizontal direction perpendicular to the transverse flow channel, and the Z direction is the valve cover installation direction.

[0018] In a preferred embodiment, the present invention may be further configured such that the support block is coupled to the valve cover via a second connector, the second connector being aligned with the clamping portion of the thick film diaphragm and connected to the valve cover through a lug through hole in the support block, and the valve cover having a lug groove formed around the periphery of the first lower opening to accommodate the lug of the support block.

[0019] By employing the preferred technical features of the above-described structure, the support block and the valve cover are pre-fixed using a second connector. The second connector is also aligned with the clamping portion of the thick-film diaphragm. The second connector is entirely concealed inside the diaphragm valve and is not exposed to the chamber space. If the second connector accidentally loosens, it further enhances the clamping effect of the thick-film diaphragm, allowing the diaphragm valve to be used for an extended period. Furthermore, the through-hole of the support block for the second connector, combined with the lug groove of the valve cover, allows the support block to be non-rotatably embedded in the valve cover by fixing the shorter second connector to the valve cover.

[0020] In a preferred embodiment, the present invention may be further configured such that the lug of the support block is adjacent to the engagement hole of the valve cover for engagement with the first connector; in a preferred embodiment, the second lower opening of the support block is provided with a sliding groove adapted to the side rib of the diaphragm block, and the side rib of the diaphragm block is formed as an anti-rotation guide flange so that the diaphragm block can be driven to slide longitudinally up and down in a non-rotatable manner.

[0021] By employing the preferred technical features of the above structure, the lugs of the support block are located close to the engagement hole of the valve cover for the first connector, meaning the second connector and the first connector are adjacent to each other. The second connector is relatively far from the curved portion of the thick film diaphragm, but closer to the edge of the clamping portion. A sliding groove adapted to the side ribs of the diaphragm pressure block is formed around the second lower opening of the support block, thus guiding the sliding of the diaphragm pressure block.

[0022] In a preferred embodiment, the present invention may be further configured such that the support block also has a lateral internal vent and an axial guide sleeve for sliding at one end of the pneumatic piston.

[0023] By adopting the preferred technical features of the above structure, and utilizing the internal vent, when the pneumatic piston moves down to close the valve, the air in the axial guide sleeve is squeezed out to the pressure relief balance chamber to accelerate the valve closing action and maintain the closing force. The air pressure in the upper drive chamber above the piston disc is greater than the air pressure in the lower drive chamber above and below the piston disc. The lower drive chamber is a relatively closed chamber, and the pressure relief balance chamber around the support block is connected to the external air pressure.

[0024] In a preferred embodiment, the present invention may be further configured such that the diaphragm block has a non-circular hole adapted to the shape of one end of the pneumatic piston; the valve head of the thick film diaphragm is connected to the one end of the pneumatic piston for detachable connection to the diaphragm block.

[0025] By employing the preferred technical features of the above structure, and utilizing the adaptive shape of the diaphragm pressure block and one end of the pneumatic piston, when the diaphragm pressure block cannot rotate, the pneumatic piston cannot rotate arbitrarily either. This reduces the diaphragm's susceptibility to torsional stress, resulting in a longer service life. Through the connection between the valve head of the thick-film diaphragm and one end of the pneumatic piston, the diaphragm pressure block is fixed and limited above the valve head of the thick-film diaphragm.

[0026] In a preferred embodiment, the present invention may be further configured such that the diaphragm block has multiple weight-reducing cavities around the non-circular hole to reduce the weight of the diaphragm block, which is beneficial for it to be driven by the pneumatic piston to move up and down.

[0027] In a preferred embodiment, the present invention may be further configured such that the thickness of the bent portion is more than 80% of the thickness of the clamping portion, such that the deformation of the bent portion in the upper arc when the valve is open does not exceed the upper edge of the clamping portion, and the deformation of the bent portion in the lower arc when the valve is closed does not exceed the lower edge of the clamping portion.

[0028] By adopting the preferred technical features of the above structure, and utilizing the location definition of the thick film diaphragm, the upper arc deformation of the curved part when the valve is open does not exceed the upper edge of the clamping part, resulting in a relatively small upper and lower arc deformation. The thick film diaphragm has high durability, and combined with other necessary technical means, the diaphragm valve also has the characteristics of large flow capacity and low pressure loss.

[0029] In a preferred embodiment, the present invention may be further configured such that the pneumatic piston has a piston disc, a guide rod disposed above the piston disc, and a piston rod disposed below the piston disc; the corrosion-resistant diaphragm valve further includes: an elastic element, which is sleeved on the guide rod and elastically contacts the piston disc, so that one end of the pneumatic piston extends out when there is no external force.

[0030] By employing the preferred technical features of the above structure, and utilizing the specific structure of the pneumatic piston component, based on the upper guidance of the guide rod on the valve cover and the lower guidance of the piston rod on the support block, the piston disc will not tilt, dividing the upper and lower drive chambers within the valve cover. This allows one end of the pneumatic piston component to move axially in the Z direction effectively. Furthermore, utilizing the arrangement of the elastic element, which is located in the upper drive chamber, this allows one end of the pneumatic piston component to remain extended without external force, facilitating the installation of the thick-film diaphragm and the diaphragm pressure block on the pneumatic piston component. It also allows for the assembly of the valve cover and valve seat in the valve-closed state, resulting in a better valve-closing effect.

[0031] In a preferred embodiment, the invention may be further configured such that the support block has an upward-opening air chamber recess to increase the space of the lower drive chamber of the valve cover below the piston disc.

[0032] By adopting the preferred technical features of the above structure, the air cavity groove of the support block is used to maintain the minimum volume of the lower drive chamber in the valve closed state. In the valve closed state, the pneumatic piston and its piston disc move downward, and the air pressure in the drive chamber does not increase too quickly, thus affecting the valve closing effect.

[0033] In a preferred embodiment, the present invention may be further configured such that the valve seat has an upwardly protruding clamping ring around the valve port on which the valve head of the thick film diaphragm moves, the support block has a downwardly clamping surface, and the clamping ring is aligned with the clamping surface.

[0034] By employing the preferred technical features of the above structure, the clamping ring of the valve seat is aligned with the clamping surface of the support block, and the clamping surface of the support block forms an uneven clamping force on the clamping portion of the thick film diaphragm. A particularly anular clamping force is formed above the clamping ring to increase the clamping force, thereby reducing the slippage of the clamping portion of the thick film diaphragm.

[0035] In a preferred embodiment, the present invention may be further configured such that a first sealing ring is provided around the periphery of the piston disc and around the periphery of the support block, and a second sealing ring is provided around the rod body of the guide rod and the rod body of the piston rod, so as to divide the internal space of the valve cover into an upper driving chamber, a lower driving chamber and a pressure relief balance chamber from the inside out.

[0036] By adopting the preferred technical features of the above structure, an upper driving chamber, a lower driving chamber, and a pressure relief balance chamber are established inside the valve cover from the inside out and from top to bottom using the first sealing ring and the second sealing ring.

[0037] The second main objective of this invention is achieved through the following technical solution: a production apparatus for semiconductor wet processing is proposed, comprising a corrosion-resistant diaphragm valve with any of the aforementioned feasible combinations of features. With improved diaphragm durability, process solutions can be supplied at high flow rates, transmitted with low pressure loss, and shut off without dripping.

[0038] The third main objective of this invention is achieved through the following technical solution: providing a method for assembling a corrosion-resistant diaphragm valve with any feasible combination of features as described above, comprising:

[0039] S1. Place the pneumatic piston inside the valve cover;

[0040] S2. The interlocking fixed support block is placed inside the valve cover, so that the pneumatic piston cannot be detached from the valve cover, and one end of the pneumatic piston remains extended.

[0041] S3. Connect the thick film diaphragm to one end of the pneumatic piston, wherein the one end is in an extended state, and the diaphragm block cannot be detached from the one end of the pneumatic piston.

[0042] S4. The valve cover is attached to the valve seat, wherein the one-line sealing protrusion of the thick film diaphragm can be aligned with the valve closed state pressed against the arc-shaped barrier of the valve seat. The valve cover is attached through the first connector, and the valve cover and the support block together clamp the clamping part of the thick film diaphragm.

[0043] The implementation principle of this basic method example is to use the support block in step S2 to prevent the pneumatic piston from disengaging in advance. Then, in steps S3 and S4, with the valve closed, the valve cover and valve seat are assembled to ensure better assembly margin and to avoid altering or weakening the valve closing effect.

[0044] In a preferred embodiment, the assembly method may further include: S5, setting an anti-corrosion cap at the exposed end of the first connector; in a preferred embodiment, the assembly method may further include: S6, installing a socket flange on the flow channel of the valve seat using a threaded sleeve to fix the connecting pipeline.

[0045] In summary, the technical solutions of the present invention regarding structures or methods include at least one of the following technical effects that contribute to the prior art:

[0046] 1. By combining the features of the support block embedded in the valve cover, the one-line sealing convex strip of the thick film diaphragm, the thickness definition of the clamping part, and the curved flow channel structure inside the valve seat, the technical problems of poor flow rate, large pressure loss, and easy failure to close tightly caused by using thick film diaphragms in diaphragm valves are solved.

[0047] 2. By aligning and pressing the single-seal protrusion onto the arc-shaped dam of the valve seat during the valve closing and assembly process, it is suitable for the supply of chemical solutions in semiconductor wet process production equipment. It features high flow rate, low pressure loss, and durable diaphragm. The term "semiconductor wet process" here can be broadly defined to include new energy, circuit boards, and photovoltaic fields. It can quantitatively replenish the cleaning solution and / or etching solution used in the process to meet the requirements of high-speed and high-frequency switching, including corrosion resistance, zero leakage when the valve is closed, long lifespan guarantee for high-frequency switching operation, and smooth flow and low pressure drop when the valve is open.

[0048] 3. By pre-assembling the pneumatic piston, support block, thick film diaphragm, and diaphragm pressure block inside the valve cover, the thick film diaphragm can be clamped while maintaining the valve in a closed state when the valve cover and valve seat are connected; the connection stability of the pneumatic components is not affected when the valve cover and valve seat are disassembled. Attached Figure Description

[0049] Figure 1 A three-dimensional assembly view of a corrosion-resistant diaphragm valve in some preferred embodiments of the present invention is shown.

[0050] Figure 2 Exploded view of a corrosion-resistant diaphragm valve in some preferred embodiments of the present invention;

[0051] Figure 3 The illustration shows a cross-sectional view of the corrosion-resistant diaphragm valve in some preferred embodiments of the present invention, cut in the XZ plane;

[0052] Figure 4 A perspective view of the support block of the corrosion-resistant diaphragm valve in some preferred embodiments of the present invention is shown (A is the top perspective view, B is the bottom perspective view).

[0053] Figure 5 A three-dimensional schematic diagram of the diaphragm block of the corrosion-resistant diaphragm valve in some preferred embodiments of the present invention is shown (A is the top view and B is the bottom view).

[0054] Figure 6 A three-dimensional schematic diagram of a thick-film diaphragm sheet for a corrosion-resistant diaphragm valve in some preferred embodiments of the present invention is shown (A is the top view, B is the bottom view).

[0055] Figure 7 A schematic diagram of the valve seat of the corrosion-resistant diaphragm valve in some preferred embodiments of the present invention is shown (A is the top view of the valve seat, and B is a cross-section of the valve seat on the XY plane).

[0056] Figure 8The diagram illustrates valve seats with different cross-sectional angles cut in some preferred embodiments of the present invention (A is a cross-section of the valve seat XZ plane, B is a cross-section of the valve seat YZ plane).

[0057] Figure 9 A perspective assembly view of the corrosion-resistant diaphragm valve in some preferred embodiments of the present invention, cut across the XZ plane;

[0058] Figure 10 The diagram illustrates the flow path of the corrosion-resistant diaphragm valve in some preferred embodiments of the present invention (A is the flow path in three dimensions, and B is the flow path cut across the YZ plane of the arc-shaped dam).

[0059] Figure 11 The diagram illustrates the steps of assembling a corrosion-resistant diaphragm valve according to some preferred embodiments of the present invention.

[0060] Reference numerals: 10. Valve cover; 11. First cylinder bore; 12. Second cylinder bore; 15. External vent; 16. Upper drive chamber; 17. Lower drive chamber; 18. Pressure relief and balance chamber; 19. Gap; 20. Thick film diaphragm; 21. Valve head; 22. Bend; 23. Clamping part; 24. Peripheral through hole; 25. Straight sealing ridge; 26. Anti-rotation and reset ridge; 30. Valve seat; 31. First flow channel; 32. Second flow channel; 33. Curved flow channel structure; 34. Arc-shaped dam; 35. Curved channel C-port; 36. Clamping ring; 37. Connecting hole 38. Through hole; 40. Pneumatic piston component; 41. Piston disc; 42. Guide rod; 43. Piston rod; 50. Support block; 51. Lug through hole; 52. Slide groove; 53. Internal vent hole; 54. Air cavity groove; 55. Clamping surface; 56. Guide sleeve; 60. Diaphragm pressure block; 61. Non-circular hole; 62. Weight reduction cavity; 63. Anti-rotation guide flange; 71. First connecting piece; 72. Second connecting piece; 73. Anti-corrosion cap; 74. First sealing ring; 75. Second sealing ring; 80. Elastic component; 91. Socket flange component; 92. Screw sleeve. Detailed Implementation

[0061] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments for understanding the inventive concept of the present invention, and cannot represent all embodiments, nor are they interpreted as the only embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art under the premise of understanding the inventive concept of the present invention are within the scope of protection of the present invention.

[0062] It should be noted that if directional indicators (such as up, down, left, right, front, back, etc.) are involved in the embodiments of the present invention, these directional indicators are only used to explain the relative positional relationships and movement of the components in a specific posture. If the specific posture changes, the directional indicators will also change accordingly. To better understand the technical solution of the present invention, the corrosion-resistant diaphragm valve of the present invention will be described and explained in further detail below, but this should not be construed as limiting the scope of protection of the present invention.

[0063] See Figures 1 to 3 Some embodiments of the present invention first provide a corrosion-resistant diaphragm valve. Figure 1 A three-dimensional assembly diagram of a corrosion-resistant diaphragm valve is shown. Figure 2 Draw an exploded view of a corrosion-resistant diaphragm valve. Figure 3 This is a cross-sectional view of a corrosion-resistant diaphragm valve cut along the XZ plane, where the XZ plane is the longitudinal plane along the flow channel. An embodiment of the present invention provides a corrosion-resistant diaphragm valve, comprising: a valve cover 10 for pneumatic actuation, a thick-film diaphragm 20 for valve closure, and a valve seat 30 for delivering semiconductor manufacturing processing reagents. When the valve is open, the thick-film diaphragm 20 moves upward, and the first flow channel 31 and the second flow channel 32 of the valve seat 30 are connected (e.g., ...). Figure 3 , Figure 10 (As shown); when the valve is closed, the thick-film diaphragm 20 moves downward, and the arc-shaped barrier 34 of the valve seat 30 and the thick-film diaphragm 20 block the flow between the first flow channel 31 and the second flow channel 32. The switching stroke between the valve open and valve closed states is generally less than the vertical movement stroke of a thin-film diaphragm.

[0064] See Figures 1 to 3 The valve cover 10 is a cylindrical body with a square base frame, used to house the pneumatic drive assembly. The valve cover 10 contains a resiliently outward-pushing pneumatic piston 40. A fixed, non-rotatable support block 50 is embedded in the first lower opening of the valve cover 10. A guided diaphragm pressure block 60 is embedded in the second lower opening of the support block 50. The support block 50 and the valve cover 10 can be connected by a second connecting member 72, specifically a short screw. The diaphragm pressure block 60 is connected to one end of the pneumatic piston 40. In a specific example, the pneumatic piston 40 has a piston disc 41, a guide rod 42 located above the piston disc 41, and a piston rod 43 located below the piston disc 41 (see also [reference needed]). Figure 9The pneumatic piston 40 is moved axially by utilizing the pressure difference between the upper and lower parts of the piston disc 41. The first function of the support block 50 is to restrict the pneumatic piston 40 from disengaging; the second function of the support block 50 is to provide a sliding guide for the diaphragm pressure block 60, restricting its self-rotation; the third function of the support block 50 is to clamp the clamping portion 23 of the thick film diaphragm 20 together with the valve cover 10; the fourth function of the support block 50 is to guide the axial movement of the pneumatic piston 40. The first function of the diaphragm pressure block 60 is to regulate or modify the deformation shape of the curved portion 22 of the thick film diaphragm 20 when the valve is closed, changing the lower arcs on both sides into upper arcs on both sides to better seal the channel between the first flow channel 31 and the second flow channel 32; the second function of the diaphragm pressure block 60 is to restrict the self-rotation of the piston rod 43 of the pneumatic piston 40 or the valve head 21 of the thick film diaphragm 20 during axial movement.

[0065] See Figure 2 and Figure 3 And compare Figure 6 The thick-film diaphragm 20 is diaphragm-shaped and can be a single-layer membrane structure or a multi-layer membrane composite structure. It is used to isolate the pneumatic drive component from the fluid working area, and its main function is to close the flow channel. The thick-film diaphragm 20 is connected to the pneumatic piston 40, specifically by a threaded connection. The thick-film diaphragm 20 has a valve head 21 connected to one end of the pneumatic piston 40, a curved portion 22 extending outward from the valve head 21, and a clamping portion 23 extending outward from the curved portion 22. The clamping portion 23 has several peripheral through holes 24 or notches. The valve head 21 is driven by the pneumatic piston 40 to move up and down, which determines the opening and closing of the valve. The curved portion 22 also presents a central upper arc bend and a lower arc bend. The clamping portion 23 is held in place by the valve cover 10 and the support block 50 above and the valve seat 30 below. Furthermore, the bottom of the thick film diaphragm 20 is provided with a straight sealing protrusion 25 extending through the valve head 21. In a specific example, the thick film diaphragm 20 is also provided with a leak-proof ring groove at the bottom of the clamping part 23, which can be a multi-ring structure, so that fluid will not leak from the bottom of the thick film diaphragm 20 into the clamping outer gap 19 between the valve cover 10 and the valve seat 30 (e.g., Figure 1 , Figure 3 and Figure 9 As shown in the diagram, even if fluid accidentally leaks out, it will flow out through the gap 19 between the valve seat 30 and the valve cover 10, where they do not directly contact each other, and will not flow onto the upper surface of the thick-film diaphragm 20. Furthermore, the thick-film diaphragm 20 is completely clamped between the valve cover 10 and the valve seat 30 and cannot rotate. The thick-film diaphragm 20 also serves to protect the outer end of the second connector 72 from corrosion.

[0066] See Figures 1 to 3 And in conjunction with a control group Figure 7 , Figure 8 The valve seat 30 has a blocky body to provide a closable flow channel. The valve seat 30 is connected to the valve cover 10 via a first connector 71, which may specifically be a long screw. The first connector 71 passes through the peripheral through-hole 24 or notch of the thick-film diaphragm 20 and connects to the valve cover 10 to clamp the clamping portion 23 of the thick-film diaphragm 20; therefore, the thick-film diaphragm 20 is a limiting clamp. The thickness of the clamping portion 23 of the thick-film diaphragm 20 is sufficient for the first connector 71 to prevent direct contact between the valve seat 30 and the valve cover 10; that is, a clamping outer gap 19 is formed at the periphery between the valve seat 30 and the valve cover 10. The valve seat 30 is provided with a first flow channel 31 and a second flow channel 32 separated by an arc-shaped dam 34. The first flow channel 31 and the second flow channel 32 form an opposing curved flow channel structure 33 at their adjacent ends. In a horizontal cross-section along the flow channel axis, the curved flow channel structure 33 forms a curved channel C-shaped opening 35 (e.g., Figure 7 (As shown in (B)) and exhibits a flattened curve that curves upwards (as shown in...). Figure 10 (As shown in (A)); when the valve is closed, the single-seal protrusion 25 is aligned and pressed against the arc-shaped barrier 34. Regarding the arc-shaped barrier 34, the X direction is predefined as the flow channel movement direction, i.e., the axial direction of the first flow channel 31 and / or the second flow channel 32; the Y direction is the horizontal direction perpendicular to the transverse flow channel, i.e., the length extension direction of the arc-shaped barrier 34, which also corresponds to the extension direction of the single-seal protrusion 25; the Z direction is the valve cover installation direction, corresponding to the axial movement direction of the pneumatic piston rod 40; the center point of the coordinate system of the corrosion-resistant diaphragm valve can be set at the center point of the arc-shaped barrier 34. Based on the center point, the cross-section of the arc-shaped barrier 34 in the YZ plane is concave arc-shaped, the cross-section in the XZ plane is convex arc-shaped, and it appears as a straight strip in the XY plane. The converging curved channel C-port 35 is the XY plane cross-section along the axial direction of the first flow channel 31 and / or the second flow channel 32. Specifically, the diameter of the pipes transitioning from the first flow channel 31 and / or the second flow channel 32 towards the YZ plane of the arc-shaped dam 34 is circular at the beginning, elliptical at the converging neck of the curved channel C 35, and then rapidly narrowing at the bottom of the curved channel structure 33, finally becoming a smiling concave arc shape, meaning the curvature of the channel sides is higher than that of the middle. The entire diameter transition is gradual, without sudden changes in size, to reduce fluid turbulence.

[0067] For examples of the structure of this invention in terms of implementation, please refer to [link / reference]. Figure 2 and Figure 9The support block 50 is pre-embedded in the first lower opening of the valve cover 10 to pre-connect pneumatic components such as the pneumatic piston 40 within the valve cover 10, thus pre-forming a pneumatic drive mechanism. The driving movement of the pneumatic piston 40, except for its extended end and the diaphragm pressure block 60, will not affect the valve's opening or closing; conversely, with the support block 50 providing isolation, fluid flow will not contaminate the pneumatic drive mechanism within the valve cover 10. The piston disc 41 of the pneumatic piston 40 isolates the upper drive chamber 16 and the lower drive chamber 17 of the valve cover 10. The upper drive chamber 16 receives upper air pressure from the first cylinder bore 11 of the valve cover 10, and the lower drive chamber 17 receives lower air pressure from the second cylinder bore 12 of the valve cover 10. The pressure relief and balancing chamber 18, isolated by the support block 50, is balanced with the external atmospheric pressure through the external vent 15 of the valve cover 10. The support block 50 not only isolates the lower drive chamber 17 and the pressure relief balance chamber 18 of the valve cover 10, but also, together with the valve cover 10, clamps the clamping portion 23 of the thick film diaphragm 20. Under the guidance of the upper guide tube above the valve cover 10 and the upper and lower axial directions of the support block 50, the pneumatic piston 40 can better drive the diaphragm pressing block 60. The diaphragm pressing block 60 is restricted by the support block 50 and cannot rotate, so that the thick film diaphragm 20 cannot rotate, allowing the bending portion 22 of the thick film diaphragm 20 to accurately deform the membrane for valve closure. Furthermore, the bottom of the thick-film diaphragm 20 is provided with a straight sealing protrusion 25 extending through the valve head 21 to enhance the valve closing effect when pressed against the arc-shaped barrier 34 inside the valve seat 30; furthermore, the thickness of the clamping portion 23 of the thick-film diaphragm 20 is sufficient to prevent the valve seat 30 from directly contacting the valve cover 10, so that the engagement of the valve seat 30 and the valve cover 10 simultaneously achieves good clamping of the clamping portion 23 of the thick-film diaphragm 20; furthermore, the curved flow channel structure 33 on both sides of the arc-shaped barrier 34 of the valve seat 30 forms a curved channel C-shaped opening 35, which is flattened and curved upwards. In the valve open state, combined with the change of the curved portion 22 of the thick-film diaphragm 20, The curved dam 34 forms an oval or eye-shaped passage. The cross-sectional area of ​​this passage is not less than 60% of the cross-sectional area of ​​the passage of the first flow channel 31 or / and the second flow channel 32, preferably not less than 80%. In the valve opening mode where the width of the curved dam 34 is increased to compensate for the reduction in height, the thick film diaphragm 20 can open with a small amplitude without affecting the flow rate and pressure loss of the diaphragm valve when the valve is open. When the valve is closed, the straight sealing strip 25 can be accurately aligned and pressed against the curved dam 34. The switching between opening and closing can produce obvious fluid outflow and closure without dripping. This is specifically suitable for semiconductor wet process production equipment.

[0068] See Figure 4Regarding the specific structure of the support block 50, in a preferred example, the support block 50 is cylindrical and has several peripheral lugs. The support block 50 is connected to the valve cover 10 via a second connector 72, wherein the position of the second connector 72 is aligned with the clamping portion 23 of the thick film diaphragm 20. The second connector 72 passes through the lug through-hole 51 of the support block 50 and connects to the valve cover 10. The valve cover 10 forms lug grooves around the first lower opening to accommodate the lugs of the support block 50. The support block 50 and the valve cover 10 are pre-fixed using the second connector 72, which is also aligned with the clamping portion 23 of the thick film diaphragm 20. The second connector 72 is entirely hidden inside the diaphragm valve and is not exposed to the chamber space. If the second connector 72 accidentally loosens, it can further enhance the clamping effect of the clamping portion 23 of the thick film diaphragm 20, allowing the corrosion-resistant diaphragm valve to be used for a long time. In this embodiment of the invention, the lug through-hole 51 of the support block 50 through which the second connector 72 passes, in conjunction with the lug groove of the valve cover 10, allows the support block 50 to be non-rotatably embedded in the valve cover 10 by fixing the shorter second connector 72 to the valve cover 10. The support block 50 and the valve cover 10 can jointly clamp the clamping portion 23 of the thick film diaphragm 20.

[0069] In a preferred embodiment, the lug of the support block 50 is adjacent to the engagement hole of the valve cover 10 for engagement with the first connector 71; in a more preferred embodiment, the periphery of the second lower opening of the support block 50 is provided with a sliding groove 52 that matches the side rib of the diaphragm pressure block 60 (see reference). Figure 4 (B) The side ribs of the diaphragm pressure block 60 are formed as anti-rotation guide flanges 63 (see comparison). Figure 5 Its protruding side edge can slide longitudinally along the groove 52, allowing the diaphragm pressure block 60 to slide vertically up and down in a non-rotatable manner. Preferably, the protruding bottom edge of the anti-rotation guide flange 63 (see reference) Figure 5 (B) The curved portion 22 of the thick film diaphragm 20 can be compressed to enhance the pressure of the inline sealing ridge 25 on the arc-shaped barrier 34. Furthermore, the second connector 72 is positioned adjacent to the first connector 71, with the second connector 72 relatively far from the curved portion 22 of the thick film diaphragm 20 and closer to the edge of the clamping portion 23. A groove 52 adapted to the side ribs of the diaphragm pressing block 60 is provided around the second lower opening of the support block 50, and the support block 50 guides the sliding of the diaphragm pressing block 60.

[0070] See also Figure 4In a preferred embodiment, the support block 50 also has a lateral internal vent 53 and an axial guide sleeve 56 for sliding at one end of the pneumatic piston 40. Using the internal vent 53, when the pneumatic piston 40 moves downward to close the valve, air in the axial guide sleeve 56 is compressed and discharged through the internal vent 53 to the pressure relief and balance chamber 18 located in the groove on the outer surface of the support block 50. Through the external vent 15, the pressure is balanced with the external atmospheric pressure to accelerate the valve closing action and maintain the closing force. The air pressure in the upper drive chamber 16 above the piston disc 41 can be greater than the air pressure in the lower drive chamber 17 above and below the piston disc 41. The lower drive chamber 17 is a relatively closed chamber, and the pressure relief and balance chamber 18 around the support block 50 is connected to the external air pressure.

[0071] See also Figure 4 In a preferred embodiment, the support block 50 has an upward-opening air chamber recess 54 to increase the space of the lower drive chamber 17 of the valve cover 10 below the piston disc 41; in this example, the air chamber recess 54 is an upward-opening annular recess. The air chamber recess 54 of the support block 50 maintains a minimum volume of the lower drive chamber 17 in the valve-closed state. In the valve-closed state, the pneumatic piston 40 and its piston disc 41 move downwards, preventing the air pressure in the lower drive chamber 17 from increasing too rapidly, thus avoiding affecting the valve-closing effect.

[0072] See also Figure 2 and Figure 3 Regarding the elastic outward pushing mechanism of the pneumatic piston 40, in a preferred example, the corrosion-resistant diaphragm valve further includes an elastic element 80, which is sleeved on the guide rod 42 and elastically contacts the piston disc 41, so that one end of the pneumatic piston 40 extends out when there is no external force. Utilizing the specific structure of the pneumatic piston 40, based on the upper guidance of the guide rod 42 on the valve cover 10 and the lower guidance of the piston rod 43 on the support block 50, the piston disc 41 will not tilt, dividing the upper drive chamber 16 and the lower drive chamber 17 within the valve cover 10, allowing one end of the pneumatic piston 40 to move axially in the Z direction effectively. Furthermore, by utilizing the arrangement of the elastic element 80, which is located in the upper drive cavity 16, one end of the pneumatic piston 40 remains extended when there is no external force, facilitating the installation of the thick film diaphragm 20 and the diaphragm pressure block 60 on the pneumatic piston 40. It also allows for the assembly of the valve cover 10 and the valve seat 30 in the valve closed state to obtain a better valve closing effect.

[0073] See also Figure 2 and Figure 3Regarding the chamber sealing of the valve cover 10, in a preferred embodiment, the upper periphery of the piston disc 41 and the upper periphery of the support block 50 are each provided with a first sealing ring 74, and the rod body of the guide rod 42 and the rod body of the piston rod 43 are each provided with a second sealing ring 75, so as to divide the internal space of the valve cover 10 into an upper driving chamber 16, a lower driving chamber 17 and a pressure relief and balance chamber 18 (e.g., Figure 3 (As shown). Using the first sealing ring 74 and the second sealing ring 75, an upper driving chamber 16, a lower driving chamber 17, and a pressure relief balance chamber 18 are established inside the valve cover 10 from the inside out and from top to bottom. The pneumatic piston 40 and the support block 50 have sealing ring grooves formed at corresponding positions.

[0074] See Figure 5 and Figure 6 Regarding the specific structure of the diaphragm pressure block 60, in a preferred example, the diaphragm pressure block 60 has a non-circular hole 61, which is adapted to the shape of one end of the pneumatic piston 40; the valve head 21 of the thick film diaphragm 20 is connected to one end of the pneumatic piston 40 to detachably connect the diaphragm pressure block 60. Utilizing the adapted shape of the diaphragm pressure block 60 and one end of the pneumatic piston 40, when the diaphragm pressure block 60 cannot rotate, the pneumatic piston 40 also cannot rotate arbitrarily, and the thick film diaphragm 20 is less susceptible to torsional stress, resulting in a better service life. Through the connection between the valve head 21 of the thick film diaphragm 20 and one end of the pneumatic piston 40, the diaphragm pressure block 60 is limited and fixed above the valve head 21 of the thick film diaphragm 20. In a preferred embodiment, the diaphragm block 60 has multiple weight-reducing cavities 62 around the non-circular hole 61 to reduce the weight of the diaphragm block 60, which facilitates its lifting and sliding by the pneumatic piston 40. When the diaphragm block 60 is restricted from rotation, the straight sealing ridge 25 of the thick film diaphragm sheet 20 can also not be rotated to align with the arc-shaped barrier 34.

[0075] See Figure 7 and Figure 8Regarding the specific structure of the valve seat 30, in a preferred example, the valve seat 30 has an upwardly protruding clamping ring 36 around the valve port where the valve head 21 of the thick film diaphragm 20 moves, surrounding the circular valve port of the valve seat 30. The arc-shaped barrier 34 is exposed within the circular valve port. The support block 50 has a downwardly facing clamping surface 55, and the clamping ring 36 is aligned with the clamping surface 55. By aligning the clamping ring 36 of the valve seat 30 with the clamping surface 55 of the support block 50, the clamping surface 55 of the support block 50 forms an uneven clamping force on the clamping portion 23 of the thick film diaphragm 20. A particularly anular clamping force is formed above the clamping ring 36 to increase the clamping force, thereby reducing the sliding of the clamping portion 23 of the thick film diaphragm 20. For the specific shape of the arc-shaped barrier 34, see [reference needed]. Figure 7 (A) The arc-shaped dam 34 is exposed in the circular valve opening in an elevated manner but does not extend beyond the circular valve opening; see also Figure 7 (B) The arc-shaped dam 34 forms curved passages C-shaped openings 35 on both sides of the XY section; see reference Figure 8 (A) The arc-shaped dam 34 is convex arc-shaped in the XZ section; see reference Figure 8 (B) The arc-shaped dam 34 is concave in the YZ section. (See figure) Figure 7 (B) and Figure 8 As shown in (B), the arc-shaped dam 34 has two or more connecting holes 37 facing the bottom of the valve seat 30 for the installation and connection of the corrosion-resistant diaphragm valve. The corner of the valve seat 30 is provided with a through hole 38 for the first connecting member 71 to pass through.

[0076] See Figure 6 and Figure 3 Regarding the specific structure of the thick-film diaphragm 20, in a preferred example, the thickness of the bent portion 22 is more than 80% of the thickness of the clamping portion 23, ensuring that the upper arc deformation of the bent portion 22 when the valve is open does not exceed the upper edge of the clamping portion 23, and the lower arc deformation of the bent portion 22 when the valve is closed does not exceed the lower edge of the clamping portion 23. The thickness of the clamping portion 23 of the thick-film diaphragm 20 can be between 4 and 8 mm, suitable for DN15 to DN65 diameters. The larger the diameter of the flow channel, the thicker the clamping portion 23 should be. By defining the location of the thick-film diaphragm 20, the upper arc deformation of the bent portion 22 when the valve is open does not exceed the upper edge of the clamping portion 23, resulting in relatively small upper and lower arc deformations. Therefore, the thick-film diaphragm 20 has high durability. Combined with other necessary technical means, the diaphragm valve also possesses the characteristics of large flow capacity and low pressure loss. In addition, the material of the thick film diaphragm 20 can be selected from any one of EPDM (ethylene propylene diene monomer rubber), FPM (fluororubber), PTFE (polytetrafluoroethylene) or a combination of their composite layers, and has good chemical corrosion resistance.

[0077] Regarding a more specific structure of the thick-film diaphragm 20, in a preferred example, the thickness of the clamping portion 23 of the thick-film diaphragm 20 is the same as the thickness of the curved portion 22; wherein the curved portion 22 is annular in shape outside the valve head 21, and the clamping portion 23 is rectangular in shape outside the curved portion 22. By utilizing the fact that the thickness of the clamping portion 23 of the thick-film diaphragm 20 is the same as the thickness of the curved portion 22, and the thickness of the curved portion 22 is between 80% and 100% of the thickness of the clamping portion 23, the durability of the thick-film diaphragm 20 is improved, and deformation and breakage of the curved portion 22 are reduced. The annular shape of the curved portion 22 also facilitates the reduction of deformation of the curved portion 22 during the raising and lowering of the valve head 21. The rectangular shape of the clamping portion 23 increases the positioning effect before clamping and the anti-rotation characteristics after clamping, ensuring that the single-slot sealing convex strip 25 does not become relatively skewed relative to the arc-shaped barrier 34 under prolonged valve opening and closing. Furthermore, see [reference needed]. Figure 6 (A) The peripheral through-hole 24 of the thick film diaphragm 20 is located at the corner of the clamping portion 23 for the first connector 71 to pass through; the valve head 21 of the thick film diaphragm 20 is provided with a connecting screw to be connected to the pneumatic piston 40 at the screwed end of the piston rod 43 (specifically as shown in the figure). Figure 2 , Figure 3 (As shown).

[0078] See also Figure 6 In a preferred example, the thick-film diaphragm 20 further has an anti-rotation reset protrusion 26 outside the clamping portion 23, so that during the process of the valve opening from closed, the clamping portion 23 of the thick-film diaphragm 20 has a non-rotational alignment characteristic of slightly resetting under clamping. The anti-rotation reset protrusion 26 is specifically a convex arc shape that extends beyond the boundary.

[0079] In a preferred example, both ends of the single-line sealing ridge 25 extend to the edge of the curved portion 22. Therefore, when the valve is closed, the portion of the single-line sealing ridge 25 extending to the curved portion 22 is supported by the diaphragm block 60, pressing against the arc-shaped barrier 34 to improve the valve closing effect of the diaphragm valve. The single-line sealing ridge 25 is formed to solve or avoid dripping phenomena caused by a slight mismatch between the concave arc shape of the arc-shaped barrier 34 and the curved portion 22 of the thick-film diaphragm 20 in the YZ direction of the flow channel cross-section, resulting in a deformed concave arc shape when the valve is closed. Here, the X direction is the flow channel movement direction, the Y direction is the horizontal direction perpendicular to the transverse flow channel, and the Z direction is the valve cover 10 installation direction. The thickness of the single-line sealing ridge 25 is between 1 and 3 mm, suitable for DN15 to DN65 diameters. The larger the diameter of the flow channel opening, the thicker the single-line sealing ridge 25 should be. The shape of the sealing convex strip 25 can be straight, I-shaped, II-shaped, or “〕〔”-shaped.

[0080] This invention also proposes a production apparatus for semiconductor wet processing, including a corrosion-resistant diaphragm valve as described above (such as...). Figure 9 (As shown). With improved diaphragm durability, process solutions can be supplied at high flow rates, transmitted with low pressure loss, and shut off without dripping.

[0081] See Figure 11 , Figure 2 , Figure 9 With reference to the accompanying drawings of related components, embodiments of the present invention also provide an assembly method for a corrosion-resistant diaphragm valve, comprising the following steps:

[0082] S1. Place the pneumatic piston 40 inside the valve cover 10; at the same time, the elastic element 80 can be placed inside the valve cover 10 first.

[0083] S2. Using the second connector 72, the support block 50 is fitted and fixed inside the valve cover 10, so that the pneumatic piston 40 cannot be detached from the valve cover 10, and one end of the pneumatic piston 40 remains extended.

[0084] S3. Connect the thick film diaphragm 20 to one end of the pneumatic piston 40, wherein the one end is in an extended state, and the diaphragm block 60 cannot be detached from the one end of the pneumatic piston 40.

[0085] S4. Using the first connector 71, the valve cover 10 is attached to the valve seat 30, wherein the inline sealing protrusion 25 of the thick film diaphragm 20 can be aligned with the valve closed position pressed against the arc-shaped barrier 34 of the valve seat 30. The valve cover 10 is attached via the first connector 71, and the valve cover 10 and the support block 50 together clamp the clamping portion 23 of the thick film diaphragm 20. In step S4, the clamping portion 23 of the thick film diaphragm 20 is clamped by the valve cover 10, the support block 50, and the valve seat 30. Tight; the first connecting member 71 also passes through the peripheral through hole 24 of the thick film diaphragm 20 to form a positioning clamping of the diaphragm; after step S4, the valve cover 10 and the valve seat 30 are not in direct contact, and a clamping gap 19 is formed on the periphery between the valve cover 10 and the valve seat 30, so that the clamping part 23 of the thick film diaphragm 20 can obtain sufficient clamping force, and the fluid in the valve seat 30 will at most overflow into the gap 19, without contaminating the upper drive cavity 16 and the lower drive cavity 17 inside the valve cover 10.

[0086] The implementation principle of the method example is that the support block 50 in step S2 is used to prevent the pneumatic piston 40 from disengaging in subsequent steps. In steps S3 and S4, with the valve closed, the valve cover 10 and the valve seat 30 are assembled. The straight sealing ridge 25 of the thick film diaphragm 20 keeps pressing against the arc-shaped barrier 34 of the valve seat 30 to ensure better assembly margin and to avoid altering or weakening the valve closing effect.

[0087] In the better example, refer to the following: Figure 2 The assembly method further includes: S5, setting an anti-corrosion cap 73 at the exposed end of the first connector 71; the exposed end of the second connector 72 can be covered by the clamping part 23 of the thick film diaphragm 20; and the elastic element 80 is hidden in the upper driving cavity 16 of the valve cover 10, which also has an anti-corrosion effect. In a preferred example, the assembly method further includes: S6, installing the socket flange 91 at the flow channel opening of the valve seat 30 through the threaded sleeve 92 to fix the connecting pipeline. The external pipeline is first fitted into the socket flange 91 to enlarge the pipe diameter, and the threaded sleeve 92 is gradually locked into the flow channel opening of the valve seat 30 at the first flow channel 31 and the second flow channel 32 (e.g. Figure 9 The valve seat 30 shown in the figure has external threads at both ends, and forms a clamping effect on the pipe that is spread open on the outer surface of the socket flange 91.

[0088] The embodiments described herein are preferred embodiments for facilitating understanding or implementation of the technical solutions of the present invention, and are not intended to limit the scope of protection of the present invention. All equivalent changes made in accordance with the structure, shape, and principle of the present invention should be covered within the scope of protection claimed by the present invention.

Claims

1. A method for assembling a corrosion-resistant diaphragm valve, characterized in that, include: S1. Place the pneumatic piston (40) inside the valve cover (10); the internal space of the valve cover (10) is divided into an upper drive chamber (16), a lower drive chamber (17) and a pressure relief balance chamber (18) from the inside to the outside. The pneumatic piston (40) includes a piston disc (41), a guide rod (42) located above the piston disc (41) and a piston rod (43) located below the piston disc (41); the elastic element (80) located in the upper drive chamber (16) is sleeved on the guide rod (42) and elastically contacts the piston disc (41) so that one end of the pneumatic piston (40) extends out when there is no external force. S2. An interlocking fixed support block (50) is placed inside the valve cover (10) so that the pneumatic piston (40) cannot be detached from the valve cover (10), and one end of the pneumatic piston (40) with a piston rod (43) remains extended; wherein the support block (50) is connected to the valve cover (10) through a second connector (72) and is positioned on the clamping part (23) of the thick film diaphragm (20); S3. Connect the thick film diaphragm (20) to one end of the piston rod (43) of the pneumatic piston (40), wherein one end of the piston rod (43) is in an extended state, and the diaphragm block (60) cannot be detached from one end of the pneumatic piston (40); wherein the thick film diaphragm (20) has a valve head (21) connected to one end of the pneumatic piston (40), a curved portion (22) extending outward from the valve head (21), and a clamping portion (23) extending outward from the curved portion (22); the bottom of the thick film diaphragm (20) is provided with a straight sealing ridge (25) extending through the valve head (21), and both ends of the straight sealing ridge (25) extend to the edge of the curved portion (22); S4. The valve cover (10) is attached to the valve seat (30), wherein the one-line sealing protrusion (25) of the thick film diaphragm (20) can be aligned with the valve closing state pressed against the arc-shaped barrier (34) of the valve seat (30), and the valve cover (10) is attached through the first connector (71), and the valve cover (10) and the support block (50) together clamp the clamping part (23) of the thick film diaphragm (20). When the valve is closed, the part of the straight sealing strip (25) extending to the bend (22) is supported by the diaphragm block (60) to press against the arc-shaped barrier (34); and the protruding bottom edge of the anti-rotation guide flange (63) of the diaphragm block (60) presses against the bend (22) of the thick film diaphragm (20) to enhance the pressure contact of the straight sealing strip (25) against the arc-shaped barrier (34); the support block (50) has a lateral internal vent (53) to balance the pressure relief balance chamber (18) isolated by the support block (50) and the external atmospheric pressure through the external vent (15) of the valve cover (10); when the pneumatic piston (40) moves down to close the valve, the air in the axial guide sleeve (56) is squeezed out to the pressure relief balance chamber (18) through the internal vent (53) and balanced with the external atmospheric pressure through the external vent (15); In the absence of external force, the pneumatic piston (40) has one end of the piston rod (43) extended, which facilitates the installation of the thick film diaphragm (20) and the diaphragm pressure block (60) on the pneumatic piston (40) in step S3, so that the valve cover (10) and the valve seat (30) can be assembled in the valve closed state in step S4. Wherein, the outer periphery between the valve seat (30) and the valve cover (10) forms a clamping outer gap (19), and the valve seat (30) and the valve cover (10) do not directly contact each other; the thick film diaphragm (20) is also provided with a leak-proof ring groove at the bottom of the clamping part (23) so that the fluid will not leak from the bottom of the thick film diaphragm (20) into the clamping outer gap (19) between the valve cover (10) and the valve seat (30). Furthermore, the valve seat (30) is provided with a first flow channel (31) and a second flow channel (32) blocked by an arc-shaped dam (34). The first flow channel (31) and the second flow channel (32) form opposing curved flow channel structures (33) at their adjacent ends. In the horizontal cross-section along the flow channel axis, the curved flow channel structure (33) forms a curved channel C-shaped opening (35) and is flattened and curved upward, so that the curvature of the flow channel side is higher than the curvature of the flow channel middle, so as to reduce fluid turbulence and pressure loss.

2. The assembly method of the corrosion-resistant diaphragm valve according to claim 1, characterized in that, The assembly method also includes: S5. Install a corrosion-resistant cap (73) on the exposed end of the first connector (71); S6. Install the socket flange (91) at the flow port of the valve seat (30) by means of the threaded sleeve (92) to fix the connection pipeline.

3. The assembly method of the corrosion-resistant diaphragm valve according to claim 1, characterized in that, The clamping part (23) is provided with several peripheral through holes (24) or notches; the formation of the one-line sealing convex strip (25) is used to solve or avoid the dripping phenomenon caused by the slight mismatch between the concave arc shape of the arc-shaped barrier (34) and the curved part (22) of the thick film diaphragm (20) in the YZ direction of the flow channel section; The valve seat (30) is connected to the valve cover (10) via a first connector (71), the first connector (71) passing through the peripheral through hole (24) or notch of the thick film diaphragm (20) to connect to the valve cover (10) to clamp the clamping portion (23) of the thick film diaphragm (20); the thickness of the clamping portion (23) of the thick film diaphragm (20) is sufficient to prevent the valve seat (30) from directly contacting the valve cover (10); The second lower opening of the support block (50) is provided with a groove (52) that matches the side rib of the diaphragm block (60). The side rib of the diaphragm block (60) is formed as an anti-rotation guide flange (63) so that the diaphragm block (60) can slide longitudinally in a non-rotatable manner. The support block (50) also has an axial guide sleeve (56) for sliding at one end of the pneumatic piston (40). The piston disc (41) and the support block (50) are each provided with a first sealing ring (74), and the guide rod (42) and the piston rod (43) are each provided with a second sealing ring (75).

4. The assembly method of the corrosion-resistant diaphragm valve according to claim 1, characterized in that, The thickness of the clamping portion (23) of the thick film diaphragm (20) is the same as the thickness of the bending portion (22); wherein the shape of the bending portion (22) is an annular shape other than the valve head (21), and the shape of the clamping portion (23) is a square shape other than the bending portion (22); the thick film diaphragm (20) also has an anti-rotation reset protrusion (26) other than the clamping portion (23).

5. The assembly method of the corrosion-resistant diaphragm valve according to claim 1, characterized in that, The second connector (72) passes through the lug through hole (51) of the support block (50) and is connected to the valve cover (10). The valve cover (10) has a lug groove formed around the first lower opening to accommodate the lug of the support block (50). The lug of the support block (50) is adjacent to the engagement hole of the valve cover (10) for the first connector (71) to engage.

6. The assembly method of the corrosion-resistant diaphragm valve according to claim 1, characterized in that, The diaphragm block (60) has a non-circular hole (61) that is adapted to the shape of one end of the pneumatic piston (40); the valve head (21) of the thick film diaphragm (20) is connected to one end of the pneumatic piston (40) to detachably connect the diaphragm block (60).

7. The assembly method of the corrosion-resistant diaphragm valve according to claim 6, characterized in that, The diaphragm block (60) has multiple weight-reducing cavities (62) around the non-circular hole (61).

8. The assembly method of the corrosion-resistant diaphragm valve according to any one of claims 1-7, characterized in that, The thickness of the bent portion (22) is more than 80% of the thickness of the clamping portion (23), such that the upper arc deformation of the bent portion (22) when the valve is open does not exceed the upper edge of the clamping portion (23), and the lower arc deformation of the bent portion (22) when the valve is closed does not exceed the lower edge of the clamping portion (23).

9. The assembly method of the corrosion-resistant diaphragm valve according to claim 8, characterized in that, The support block (50) has an upward-opening air chamber groove (54) to increase the space of the valve cover (10) in the lower drive chamber (17) below the piston disc (41); the valve seat (30) has an upward-protruding clamping ring (36) around the valve port on which the valve head (21) of the thick film diaphragm (20) moves, and the support block (50) has a downward-facing clamping surface (55), with the clamping ring (36) aligned in the clamping surface (55).

10. A production apparatus for semiconductor wet process manufacturing, characterized in that, Including corrosion-resistant diaphragm valves prepared by the assembly method as described in any one of claims 1-9.

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