A device for installing and adjusting a reflector for laser interferometry

Abstract

The present invention discloses a mounting and adjusting device for a reflector used for laser interferometry, comprising: a mounting seat body, a support, a fine-tuning member, a reference member, an adjusting arm and a pre-tightening assembly; the mounting seat body comprises a lower bottom, a side and an upper top; the support member is arranged at the lower bottom of the mounting seat body; the fine-tuning member is arranged at the side of the mounting seat body; the reference member is arranged at one end of the lower bottom and is higher than the inner surface of the lower bottom; the adjusting arm is installed at the back of the side and is provided with a protrusion and an adjusting member, the adjusting member is used to adjust the position of the adjusting arm so that the protrusion pushes the fine-tuning member to protrude from the groove, thereby pushing the reflector; the pre-tightening assembly is arranged on the mounting seat body, and is used to press the reflector after the angle is adjusted. The mounting and adjusting device of the present invention can control the minimum adjustment accuracy, has high adjustment accuracy, simple structure, easy operation, high repeatability, little influence by temperature, and strong reliability.

Description

Technical Field

[0001] The invention relates to the technical field of optical element adjustment, and in particular to a reflector installation and adjustment device for laser interferometry. Background Art

[0002] Laser measurement devices are frequently used components in high-precision equipment, instruments or systems. They are the key guarantee for accurate micro-nano processing, high-precision motion positioning and other actions of equipment, instruments or systems. Among them, the laser interferometer measurement system is the leader in laser measurement. It can achieve very high-precision measurement based on the principle of interference, with a resolution of less than 1nm, providing a strong guarantee for the accuracy of the operation. However, the high accuracy of laser interferometry also means that it has extremely high requirements in use. The most difficult of these is the installation angle of the reflector used to reflect the measurement beam. The ideal situation between the reflector and the measurement beam is completely vertical. Once an angle is generated, the measurement result will lose a certain degree of accuracy.

[0003] At present, there are two mainstream ways to install the reflector. One is fixed installation, that is, the angle of the reflector is measured, adjusted and fixed by a third-party device on a platform with measurement function. The fixation can be achieved by structural fastening or gluing, and it cannot be easily adjusted later. The second is adjustable installation, in which the angle of the reflector is adjusted by a support or structure with fine-tuning function, and then fastened. The advantages of the former (fixed installation) are accurate installation results, compact structure, simple subsequent operation, and basically long-term maintenance-free after installation. The disadvantages are that a third-party device or platform with high-precision measurement function is required, and the technical difficulty of manual adjustment is also very high, and it is very difficult to adjust it later once deviations or other situations require adjustment. The advantages of the latter (adjustable installation) are that it does not require a third-party platform and additional instruments and tools, the operation is simple and flexible, and it is easy to maintain and readjust. The disadvantages are that the structure is relatively complex, the accuracy is greatly affected by the adjustment means, and the reliability is difficult to guarantee for a long time. Summary of the invention

[0004] The technical problem to be solved by the present invention is to overcome the deficiencies of the prior art and provide a device for installing and adjusting a reflector for laser interferometry measurement, which has simple operation, high adjustment accuracy and small operating space requirement.

[0005] In order to solve the above technical problems, the present invention adopts the following technical solutions:

[0006] A device for installing and adjusting a reflector for laser interferometry, comprising:

[0007] Mounting seat body, support member, fine-tuning member, reference member, adjustment arm and preload assembly;

[0008] The mounting seat body comprises a lower bottom, a side portion and an upper top portion, wherein an accommodation space for accommodating the reflector is formed between the lower bottom, the side portion and the upper top portion;

[0009] The support member is disposed at the lower bottom of the mounting seat body and is higher than the inner surface of the lower bottom, and is used to support the reflector;

[0010] The fine-tuning member is arranged on the side of the mounting seat body, and the side is correspondingly provided with a groove to accommodate the fine-tuning member, and the groove runs through the side;

[0011] The reference member is disposed at one end of the lower bottom portion and is higher than the inner surface of the lower bottom portion, and is used as a side positioning reference for the reflector;

[0012] The adjusting arm is mounted on the back of the side portion, the adjusting arm is provided with a protrusion corresponding to the position of the fine-tuning member, and the adjusting arm is provided with an adjusting member for adjusting the position of the adjusting arm so that the protrusion pushes the fine-tuning member out of the groove, thereby pushing the reflector to achieve angle adjustment;

[0013] The pre-tightening assembly is arranged on the mounting seat body and is used for pressing the reflector after the angle is adjusted.

[0014] As a further improvement of the above technical solution:

[0015] The adjusting arm comprises an adjusting end and a fixed end, the fixed end of the adjusting arm is fastened to the side, the adjusting end of the adjusting arm is provided with a mounting hole, and the protrusion is located in the middle of the adjusting arm; the adjusting member comprises an adjusting screw and an elastic gasket, the adjusting screw passes through the mounting hole and is threadedly connected to the side, and the elastic gasket is sleeved on the adjusting screw and is located between the screw head of the adjusting screw and the side.

[0016] The groove for accommodating the fine-tuning member is a special-shaped groove, the front end aperture of the special-shaped groove is smaller than the size of the fine-tuning member, and the rear end aperture of the special-shaped groove matches the size of the fine-tuning member.

[0017] The fine-tuning piece is a cylinder made of sapphire material, and there is line contact between the fine-tuning piece and the reflector.

[0018] The number of the fine-tuning parts and the adjusting arms is two groups, and they are symmetrically arranged on the mounting seat body.

[0019] The pre-tightening assembly includes a pre-tightening long arm; the middle part of the pre-tightening long arm is installed on the upper top of the mounting seat body through multiple first fasteners, the two ends of the pre-tightening long arm have protrusions, and the upper top is correspondingly provided with through holes to accommodate the protrusions of the pre-tightening long arm.

[0020] The pre-tightening assembly further comprises a pre-tightening short arm; the pre-tightening short arm is mounted on the front surface of the lower bottom portion via a second fastener, and the pre-tightening short arm has an extension portion extending upwardly toward the top portion.

[0021] The second fastener and the first fastener are screws or bolts.

[0022] The lower bottom of the mounting seat body is also provided with a plurality of countersunk holes for accommodating a plurality of mounting posts, and the mounting posts are used to mount the mounting seat body on an external object to be measured.

[0023] The lower bottom of the mounting seat body is also provided with one or more hollow parts.

[0024] Compared with the prior art, the advantages of the present invention are:

[0025] 1. The reflector mounting and adjusting device of the present invention is mounted and supported by a support member provided at the bottom of the mounting seat body. Compared with the mounting method in which the entire mounting seat directly contacts the reflector, the processing difficulty can be greatly reduced, and the smaller contact area makes the device less affected by temperature changes.

[0026] 2. The reflector installation and adjustment device of the present invention provides a reference for the positioning of the reflector angle through the reference piece, and adjusts the adjustment piece on the adjustment arm so that the protrusion on the adjustment arm pushes the fine adjustment piece to adjust the angle of the reflector, which can more accurately control the minimum adjustment amount, thereby achieving high-precision adjustment;

[0027] 3. The reflector installation and adjustment device of the present invention presses the adjusted reflector through the pre-tightening component to ensure that the reflector with the adjusted angle will not be displaced during use. When the angle of the reflector needs to be adjusted again later, the pre-tightening component can be loosened to facilitate the use of the adjustment arm to adjust the angle of the reflector again. The overall operation is simple and convenient with high repeatability. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a schematic diagram of the three-dimensional structure of a device for installing and adjusting a reflector for laser interferometry in one embodiment of the present invention.

[0029] Figure 2 It is a front view of the installation and adjustment device of the reflector used for laser interferometry in this embodiment.

[0030] Figure 3 It is a top view of the installation and adjustment device of the reflector used for laser interferometry in this embodiment.

[0031] Figure 4 It is a top view of the installation and adjustment device of the reflector used for laser interferometry in this embodiment after removing the upper top and the pre-tightening long arm structure.

[0032] Figure 5 yes Figure 4 Part A is an enlarged view of the groove that accommodates the fine-tuning piece.

[0033] Figure 6 It is a schematic diagram of the three-dimensional structure of the installation and adjustment device for the reflector used for laser interferometry measurement in this embodiment when the reflector is installed thereon.

[0034] Figure 7 Schematic diagram of the fine-tuning principle of this embodiment.

[0035] Description of the accompanying drawings:

[0036] 1. Mounting seat body; 11. Lower bottom; 12. Side; 13. Upper top; 14. Countersunk hole; 15. Mounting column; 16. Hollow part; 2. Support member; 3. Fine-tuning member; 31. Special-shaped groove; 4. Reference member; 5. Adjustment arm; 51. Protrusion; 52. Adjustment member; 6. Pre-tightening short arm; 61. Extension; 62. Second fastener; 7. Pre-tightening long arm; 71. Protrusion; 72. First fastener; 8. Reflector. DETAILED DESCRIPTION

[0037] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0038] In the description of the present invention, it should be noted that terms such as "center", "up", "down", "horizontal", "inside", "outside", "top", and "bottom" indicating directions or positional relationships are based on the directions or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, they cannot be understood as limitations on the present invention.

[0039] like Figure 1-Figure 5 As shown, an embodiment of the present invention provides a device for installing and adjusting a reflector for laser interferometry, comprising:

[0040] Mounting seat body 1, support member 2, fine adjustment member 3, reference member 4, adjustment arm 5 and pre-tightening assembly;

[0041] The mounting seat body 1 includes a bottom portion 11, a side portion 12 and an upper portion 13, wherein an accommodation space for accommodating the reflector 8 is formed between the bottom portion 11, the side portion 12 and the upper portion 13;

[0042] The support member 2 is disposed on the lower bottom portion 11 of the mounting seat body 1 and is higher than the inner surface of the lower bottom portion 11, and is used to support the reflector 8;

[0043] The fine-tuning member 3 is arranged on the side portion 12 of the mounting seat body 1, and the side portion 12 is correspondingly provided with a groove to accommodate the fine-tuning member 3, and the groove runs through the side portion 12;

[0044] The reference member 4 is disposed at one end of the lower bottom portion 11 and is higher than the inner surface of the lower bottom portion 11, and is used as a side positioning reference for the reflector 8;

[0045] The adjusting arm 5 is mounted on the back of the side portion 12. The adjusting arm 5 is provided with a protrusion 51 at a position corresponding to the fine-tuning member 3. The adjusting arm 5 is provided with an adjusting member 52 for adjusting the position of the adjusting arm 5 so that the protrusion 51 pushes the fine-tuning member 3 out of the groove, thereby pushing the reflector 8 to achieve angle adjustment.

[0046] The pre-tightening assembly is arranged on the mounting seat body 1 and is used to tighten the reflector 8 after the angle is adjusted.

[0047] It can be understood that the reflector installation and adjustment device of the present embodiment supports the reflector 8 by means of the support member 2 provided on the lower bottom 11 of the mounting seat body 1, that is, the reflector 8 does not actually contact the surface of the lower bottom 11. Compared with the existing installation method in which the reflector 8 directly contacts the entire mounting seat, it is not necessary for the mounting seat and the reflector contact plane to have a high flatness, thereby greatly reducing the difficulty of processing, and the smaller contact area makes the device less affected by temperature changes (if the reflector 8 is directly mounted on the mounting seat body 1, the entire surface of the mounting seat body 1 in contact with the reflector 8 needs to have extremely high tolerance requirements, which greatly increases the difficulty of processing, and the large contact area will make the device more affected by temperature changes).

[0048] The reference member 4 is used as a positioning reference (similar to a rotation axis) for the reflector 8 during adjustment, thereby achieving high-precision adjustment;

[0049] By adjusting the adjusting member 52 on the adjusting arm 5, the protrusion 51 on the adjusting arm 5 pushes the fine-tuning member 3 to adjust the angle of the reflector 8. The feed amount of a single adjustment is small, so that the angle of the reflector 8 can be adjusted more accurately.

[0050] The adjusted reflector 8 is pressed by the pre-tightening component to ensure that the reflector with adjusted angle will not be displaced during use. When the angle of the reflector needs to be adjusted again later, the pre-tightening component can be loosened to facilitate the adjustment of the angle of the reflector using the adjusting arm 5 again. The overall operation is simple and convenient with high repeatability.

[0051] In this embodiment, Figure 3As shown, the adjusting arm 5 includes an adjusting end and a fixed end, the fixed end of the adjusting arm 5 is fastened to the side portion 12, the adjusting end of the adjusting arm 5 is provided with a mounting hole, and the protrusion 51 is located in the middle of the adjusting arm 5; the adjusting member 52 includes an adjusting screw and an elastic gasket, the adjusting screw passes through the mounting hole and is threadedly connected to the side portion 12, the elastic gasket is sleeved on the adjusting screw and is located between the screw head of the adjusting screw and the side portion 12. The elastic gasket only needs to be slightly deformed, and the fixed end does not need to be tightened, which is convenient for subsequent adjustment.

[0052] Figure 7 The figure shows the schematic diagram of the fine-tuning function principle of the device. Among them, d1 is the feed distance of the adjusting screw, d2 is the feed distance of the fine-tuning member 3, L1 is the distance from the fine-tuning member 3 (or the protrusion 51) to the adjusting end of the adjusting arm 5, L2 is the distance from the fine-tuning member 3 (or the protrusion 51) to the fixed end of the adjusting arm 5, θ is the rotation angle of the adjusting screw, and P is the screw lead of the adjusting screw (not shown in the figure). From the principle of lever, the expressions of d1 and d2 can be obtained as follows: Therefore, the placement angle of the reflector 8 can be fine-tuned by rotating the adjustment screw by a certain angle. At the same time, the design of the lever can greatly reduce the minimum adjustment amount during adjustment, making the adjustment more precise.

[0053] Specifically, according to the pitch of the screw, the ratio of the screw-in angle and the feed amount is set to k1, then the single feed amount of the adjusting screw in the adjusting member 52 during the adjustment process is d=k1θ. The feed amount of the adjusting screw is actually pushed by the protrusion 51 on the adjusting arm 5 to push the fine-tuning member 3, so the actual feed amount acting on the reflector 8 needs to be divided by a ratio k2, which is the ratio of the length of the adjusting arm 5 (L1+L2) to the distance (L2) between the protrusion 51 and the fixed end, and this value can be between 5-20 according to the design. Therefore, the single feed amount in the final adjustment process is d=k1k2θ, even if the installer uses tools such as an inner hexagonal wrench or a flat wrench to turn the adjusting screw at an angle of about 3° during manual adjustment, the adjustment accuracy of the device can reach about 0.5μm (adjusting screw M5, pitch 0.8mm, K2=10), and if there is a higher demand, an adjusting arm with a higher ratio (corresponding to k2) can be used to achieve it. Therefore, the present invention adjusts the feed amount by adjusting the screw, so that the feed amount of a single adjustment is smaller, the minimum adjustment amount can be controlled more accurately, and the adjusting screw and the adjusting arm can be adjusted accordingly according to the accuracy required during actual adjustment, thereby making the overall adjustment more accurate.

[0054] In this embodiment, Figure 5As shown, the groove for accommodating the fine-tuning member 3 is a special-shaped groove 31, the front end aperture of the special-shaped groove 31 is smaller than the size of the fine-tuning member 3, and the rear end aperture of the special-shaped groove 31 matches the size of the fine-tuning member 3. It can be understood that the special-shaped groove can ensure that the fine-tuning member 3 moves in the front-to-back direction along the notch but will not be separated from the notch. Of course, the shape of the groove can also be adjusted according to the shape of the fine-tuning member 3, as long as the position of the fine-tuning member 3 can be limited so that it cannot be separated from the notch.

[0055] In this embodiment, the support member 2, the fine-tuning member 3, and the reference member 4 are all cylindrical bodies made of sapphire material, and there is line contact between the fine-tuning member 3 and the reflector 8. It can be understood that since the sapphire glass material has the advantages of small thermal expansion coefficient, small environmental impact, high hardness, and wear resistance, the use of sapphire material can reduce the deformation caused by factors such as temperature changes, and while ensuring a good installation reference, it also greatly reduces the processing requirements of parts and components, which is more conducive to achieving high-precision adjustment.

[0056] Compared with the traditional surface contact which may cause local deformation of parts, the fine-tuning part 3 and the reflector 8 adopt the form of line contact, which greatly reduces the friction resistance and wear during the adjustment process, greatly improves the smoothness and long-term stability of the adjustment process, and is very suitable for the adjustment of reflectors in high-precision equipment and instruments. Of course, the support member 2, the fine-tuning part 3, and the reference member 4 can also be made of other materials with low thermal expansion coefficients, and the shape of the fine-tuning part 3 can also be other shapes such as regular or irregular polyhedrons, as long as it can achieve line contact between it and the reflector 8.

[0057] Specifically, Figure 1 As shown, the cylindrical support member 2 is mounted on the lower bottom 11 through a through hole with a larger diameter provided on the lower bottom 11 of the mounting seat body 1, and the cylindrical reference member 4 is mounted on the lower bottom 11 through through holes provided at both ends of the lower bottom 11 of the mounting seat body 1 that do not penetrate. Figure 7 If the movement is performed multiple times during the process, it is easy to cause the X-axis direction (as shown in Figure 7 As shown in the figure, by limiting the reflector 8 through the cylindrical reference member 4, it can be ensured that the change in the X-axis direction during the adjustment process is extremely small, thereby improving the controllability and repeatability of the adjustment operation.

[0058] In addition, the reference part 4 serves as a positioning reference for adjusting the reflector 8, and is mainly used to improve the reference of the height direction (Z-axis) of the reflector 8. During the adjustment process, a pre-tightening force is applied to the reflector 8 by manually pushing one side of the reflector 8, so that the other side of the reflector 8 is close to the cylindrical reference part 4, ensuring that the reflector 8 rotates around the axis (the axis of contact between the reflector 8 and the cylindrical reference part 4) when the angle is adjusted, thereby improving the adjustment accuracy (since the adjustment process is actually to move a certain point of the reflector in the Y-axis direction, if the process is operated multiple times, it is easy to cause changes in the X-axis direction. By limiting the cylindrical reference part 4 on the side end face, it can be ensured that the change in the X-axis direction during the adjustment process is extremely small, thereby improving the controllability of the adjustment operation).

[0059] In this embodiment, Figure 1-Figure 4 As shown, there are two sets of fine adjustment members 3 and adjustment arms 5, which are symmetrically arranged on the mounting seat body 1. It can be understood that the arrangement of two sets of symmetrical support members 2 and adjustment arms 5 can make the device more widely applicable (such as being applicable to reflectors with a longer length direction, etc.), and improve the convenience of operation and the accuracy of adjustment during the installation and adjustment of the reflector 8.

[0060] In this embodiment, Figure 1-Figure 4 As shown, the pre-tightening assembly includes a pre-tightening long arm 7 and a pre-tightening short arm 6. The middle part of the pre-tightening long arm 7 is mounted on the upper top 13 of the mounting seat body 1 through a plurality of first fasteners 72. Both ends of the pre-tightening long arm 7 have protrusions 71. The upper top 13 is correspondingly provided with through holes to accommodate the protrusions 71 of the pre-tightening long arm 7. The pre-tightening short arm 6 is mounted on the front surface of the lower bottom 11 through a second fastener 62. The pre-tightening short arm 6 has an extension 61 extending toward the upper top 13.

[0061] Specifically, the structure of the pre-tightening long arm 7 is thin in the middle and thick on both sides. The thinness in the middle is to ensure that it has a certain elasticity, and the thickness on both sides is to set the protrusion 71 for placing the first fastener 72 to press the reflector 8 downward after the angle adjustment is completed. Since the pre-tightening long arm 7 has a certain elasticity, the protrusion 71 can elastically press the reflector 8, thereby avoiding damage to the reflector 8 due to hard contact. In addition, the position of the protrusion 71 corresponds to the position of the support member 2, and the protrusion 71 is located directly above the support member 2 to ensure the reliability of the pre-tightening. The pre-tightening short arm 6 is used through the extension part 61, and then cooperates with the fine-tuning member 3 to achieve the front and rear position limitation of the reflector 8 that has completed the angle adjustment, thereby ensuring reliability. It can be understood that by setting the pre-tightening short arm 6 and the pre-tightening long arm 7, it can be ensured that the reflector 8 after the angle adjustment is completed will not be displaced during use, further increasing the reliability of the device.

[0062] In this embodiment, Figure 1As shown, the bottom 11 of the mounting seat body 1 is also provided with a plurality of countersunk holes 14 for accommodating a plurality of mounting posts 15, and the mounting posts 15 are used to mount the mounting seat body 1 on an external object to be measured. It can be understood that the countersunk holes 14 can facilitate the installation of the mounting posts 15 without occupying the installation space of the reflector 8; after the reflector 8 is installed, the mounting posts 15 can facilitate the installation of the entire device on the object to be measured more stably.

[0063] In this embodiment, Figure 1 As shown, the lower bottom 11 of the mounting seat body 1 is also provided with one or more hollow portions 16, such as rectangular hollow portions. It can be understood that the hollow portions 16 can reduce the weight of the entire device and reduce costs. Of course, the above-mentioned hollow portions 16 can also be omitted according to actual conditions.

[0064] In this embodiment, the flatness and height deviation of the upper and lower end surfaces of the support member 2 are both less than 0.05 mm. It can be understood that since the device mounts and supports the reflector 8 through the support member 2, in order to ensure the adjustment accuracy, the device only has a high tolerance requirement for the processing of the support member 2, while the existing solution mounts and supports the reflector 8 through the entire bottom of the mounting seat, in order to ensure the adjustment accuracy, it has a high tolerance requirement for the entire mounting plane. The use of this device can reduce the difficulty of processing and thus improve the adjustment accuracy.

[0065] The following is a brief introduction to the adjustment method of this device:

[0066] The device is installed on equipment, instruments or systems. First, the first fastener 72 on the pre-tightening long arm 7 and the second fastener 62 on the pre-tightening short arm 6 located at the upper top 13 are loosened, and the reflector 8 is installed on the support 2. Then, according to the angle direction to be adjusted, the adjustment member 52 on the corresponding adjustment arm 5 is tightened or loosened. During the adjustment process, a certain force is applied to the side of the reflector 8 (such as gently pushing it by hand) so that the end face on the other side is always close to the reference member 4 until the angle adjustment of the reflector 8 meets the requirements (that is, the measuring light beam and the reflecting surface are as close to absolute vertical as possible). Finally, the first fastener 72 on the pre-tightening long arm 7 and the second fastener 62 on the pre-tightening short arm 6 are tightened to press the reflector 8 tightly, completing the adjustment process of the device. The reflector installation and adjustment device of the present invention can be realized by adjusting a few screws, and its adjustment process is simple and fast.

[0067] Although the present invention has been disclosed as above with preferred embodiments, it is not intended to limit the present invention. Any technician familiar with the art can make many possible changes and modifications to the technical solution of the present invention by using the technical content disclosed above without departing from the scope of the technical solution of the present invention, or modify it into an equivalent embodiment of equivalent changes. Therefore, any simple modification, equivalent change and modification made to the above embodiments according to the technical essence of the present invention without departing from the content of the technical solution of the present invention should fall within the scope of protection of the technical solution of the present invention.

Claims

1. A device for mounting and adjusting a reflector for laser interferometry, characterized in that: include: A mounting seat body (1), a support member (2), a fine-tuning member (3), a reference member (4), an adjusting arm (5) and a pre-tightening assembly; The mounting seat body (1) comprises a lower bottom portion (11), a side portion (12) and an upper top portion (13), wherein an accommodation space for accommodating a reflector (8) is formed between the lower bottom portion (11), the side portion (12) and the upper top portion (13); The support member (2) is arranged on the lower bottom portion (11) of the mounting seat body (1) and is higher than the inner surface of the lower bottom portion (11), and is used to support the reflector (8); The fine-tuning member (3) is arranged on a side portion (12) of the mounting seat body (1), and the side portion (12) is correspondingly provided with a groove to accommodate the fine-tuning member (3), and the groove passes through the side portion (12); The reference member (4) is arranged at one end of the lower bottom portion (11) and is higher than the inner surface of the lower bottom portion (11), and is used as a side positioning reference for the reflector (8); The adjusting arm (5) is mounted on the back side of the side portion (12); the adjusting arm (5) is provided with a protrusion (51) at a position corresponding to the fine-tuning member (3); the adjusting arm (5) is provided with an adjusting member (52) for adjusting the position of the adjusting arm (5) so that the protrusion (51) pushes the fine-tuning member (3) out of the groove, thereby pushing the reflector (8) to achieve angle adjustment; The pre-tightening assembly is arranged on the mounting seat body (1) and is used to press the reflector (8) after the angle is adjusted.

2. The installation and adjustment device for a reflector for laser interferometry according to claim 1, characterized in that: The adjusting arm (5) comprises an adjusting end and a fixed end, the fixed end of the adjusting arm (5) is fastened to the side portion (12), the adjusting end of the adjusting arm (5) is provided with a mounting hole, and the protrusion (51) is located in the middle of the adjusting arm (5); the adjusting member (52) comprises an adjusting screw and an elastic gasket, the adjusting screw passes through the mounting hole and is threadedly connected to the side portion (12), and the elastic gasket is sleeved on the adjusting screw and is located between the screw head of the adjusting screw and the side portion (12).

3. The installation and adjustment device for a reflector for laser interferometry according to claim 1, characterized in that: The groove for accommodating the fine-tuning member (3) is a special-shaped groove (31), the front end aperture of the special-shaped groove (31) is smaller than the size of the fine-tuning member (3), and the rear end aperture of the special-shaped groove (31) matches the size of the fine-tuning member (3).

4. The device for installing and adjusting a reflector for laser interferometry according to claim 3, characterized in that: The fine-tuning member (3) is a cylinder made of sapphire material, and there is line contact between the fine-tuning member (3) and the reflector (8).

5. The installation and adjustment device for a reflector for laser interferometry according to claim 2 or 3, characterized in that: The fine-tuning parts (3) and the adjusting arms (5) are provided in two groups and are symmetrically arranged on the mounting seat body (1).

6. The device for mounting and adjusting a reflector for laser interferometry according to any one of claims 1 to 4, characterized in that: The pre-tightening assembly comprises a pre-tightening long arm (7); the middle portion of the pre-tightening long arm (7) is mounted on the upper top portion (13) of the mounting seat body (1) via a plurality of first fasteners (72); both ends of the pre-tightening long arm (7) have protrusions (71); and the upper top portion (13) is correspondingly provided with through holes for accommodating the protrusions (71) of the pre-tightening long arm (7).

7. The device for installing and adjusting a reflector for laser interferometry according to claim 6, characterized in that: The pre-tightening assembly further comprises a pre-tightening short arm (6); the pre-tightening short arm (6) is mounted on the front surface of the lower bottom portion (11) via a second fastener (62); the pre-tightening short arm (6) has an extension portion (61) extending toward the upper top portion (13).

8. The device for installing and adjusting a reflector for laser interferometry according to claim 7, characterized in that: The second fastener (62) and the first fastener (72) are screws or bolts.

9. The installation and adjustment device for a reflector for laser interferometry according to any one of claims 1 to 4, characterized in that: The lower bottom portion (11) of the mounting seat body (1) is also provided with a plurality of countersunk holes (14) for accommodating a plurality of mounting posts (15), wherein the mounting posts (15) are used to mount the mounting seat body (1) on an external object to be measured.

10. The installation and adjustment device for a reflector for laser interferometry according to any one of claims 1 to 4, characterized in that: The lower bottom portion (11) of the mounting seat body (1) is also provided with one or more hollow portions (16).

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