Manufacturing method of thin-wall gold cavity with special-shaped slot hole
By employing solid copper column turning, polymer 3D printing, and electroplating gold layers, the processing challenge of thin-walled gold cavities with micro-sized asymmetric slots was solved, enabling efficient manufacturing of irregularly shaped slots to meet the needs of inertial confinement fusion experiments.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
- Filing Date
- 2023-11-14
- Publication Date
- 2026-05-19
AI Technical Summary
Existing technologies struggle to fabricate thin-walled gold cavities with minute, asymmetric free-form surface slots. Limited by equipment and materials in laser subtractive processing, it is impossible to achieve the theoretically designed dimensions and shapes.
A solid copper column was machined into a mandrel. A transition layer was grown using polymer 3D printing additive manufacturing process. After electroplating a gold layer, the mandrel was machined, the polymer transition layer was removed by heating, and finally the copper was removed with dilute nitric acid to obtain a thin-walled gold cavity with irregular grooves.
It has achieved the fabrication of thin-walled gold cavities with extremely small-scale irregular slot structures, breaking through the limitations of traditional subtractive methods, and has a wider range of processing scales and efficient transition layer processing, meeting the needs of the inertial confinement fusion field.
Smart Images
Figure CN117484096B_ABST
Abstract
Description
Technical Field
[0001] This invention belongs to the field of precision micro-parts manufacturing technology. More specifically, this invention relates to a method for manufacturing a thin-walled gold cavity with irregularly shaped slots. Background Technology
[0002] In inertial confinement fusion research, thin-walled gold cavities with irregularly shaped slots are core components for observing radiation flux. Smaller slot sizes, high aspect ratios, and various asymmetric free-form surface slot channels have always been the focus of physics research. Previously, the slot structure of thin-walled gold cavities was fabricated using laser subtractive processing. However, due to limitations in laser processing power, the degrees of freedom of the equipment's motion platform, and the size and dimensions of the processed material, the spacing, thickness, and shape of the slots are significantly restricted, making it impossible to achieve the theoretically desired size and shape.
[0003] Therefore, a new processing and manufacturing method is needed to realize the processing of thin-walled gold cavities with micro-sized irregular slots. Summary of the Invention
[0004] One object of the present invention is to solve at least the above-mentioned problems and / or defects, and to provide at least the advantages described below.
[0005] To achieve these objectives and other advantages according to the present invention, a method for manufacturing a thin-walled gold cavity with irregularly shaped slots is provided, comprising the following steps:
[0006] Step 1: Machin the solid copper column into mandrel I by turning;
[0007] Step 2: A polymer transition layer is grown on the end face of mandrel I using polymer 3D printing additive manufacturing process to obtain mandrel II. The radial dimensions, position and structure of the polymer transition layer are consistent with the requirements of the future irregular slot, and the axial dimension of the polymer transition layer is larger than the requirements of the future irregular slot.
[0008] Step 3: Electroplating or sputtering a gold layer on the surface of mandrel II to obtain mandrel III. The gold layer of mandrel III completely covers mandrel II.
[0009] Step 4: Machining mandrel III into mandrel IV by turning exposes the copper layer at the rear end of mandrel IV and the polymer transition layer at the front end of mandrel IV.
[0010] Step 5: Remove the polymer transition layer of mandrel IV by heating;
[0011] Step 6: Remove the copper from mandrel IV with dilute nitric acid, clean, and dry to obtain the desired thin-walled gold cavity with irregularly shaped slots.
[0012] Preferably, the horizontal spacing of the irregularly shaped slots in the thin-walled gold cavity with irregularly shaped slots is 0.01mm to 10mm, the vertical spacing is 0.01mm to 2mm, the wall thickness of the thin-walled gold cavity with irregularly shaped slots is 0.03mm to 0.2mm, the size and shape of the irregularly shaped slots are irregularly shaped and asymmetrical free structures, the α angle of the inner sidewall of the irregularly shaped slots satisfies 90°<α<180°, and the β angle of the outer sidewall of the irregularly shaped slots satisfies 0<β≤90°.
[0013] Preferably, the machining process parameters in steps one and four are as follows: the rotational speed n ranges from 2000 r / min to 3000 r / min, the depth of cut ap ranges from 1 μm to 10 μm, and the feed rate f ranges from 0.001 mm / r to 0.01 mm / r.
[0014] Preferably, in step two, the polymer transition layer grown by polymer 3D printing additive manufacturing process is produced using femtosecond laser 3D printing, with the following process parameters: femtosecond laser wavelength 760nm~800nm, pulse width 50fs~300fs, repetition rate 1kHz~100MHz, average power 20mW~100mW, scanning speed 0.1mm / s~100mm / s, scanning spacing 0.5μm~2μm, and layer height 0.5μm~5μm.
[0015] Preferably, the process parameters for electroplating the gold layer in step three are as follows: the gold plating bath temperature is 50°C, the pH value of the gold plating bath is 8-9, and the gold electroplating current density range is 0.7 A / dm³. 2 ~3.0A / dm 2 ;
[0016] The gold plating solution comprises: 25-40 g / L sodium gold sulfite, 200-240 g / L ammonium sulfite, 55-80 g / L potassium citrate, and 40-60 g / L disodium EDTA.
[0017] Preferably, the process parameters for removing the polymer transition layer of mandrel IV by heating in step five are as follows: In an air or oxygen atmosphere, mandrel IV is heated to 150°C to 250°C at a rate of 0.5°C / min to 3°C / min and held for 1h to 3h; then mandrel IV is heated to 450°C to 650°C at a rate of 1°C / min to 3°C / min and held for 1h to 3h.
[0018] Preferably, the dimensional deviations of mandrel I and mandrel IV obtained by turning in steps one and four are both less than 2 μm, and the surface roughness Ra is less than or equal to 50 nm.
[0019] Preferably, in steps two and three, the axial machining allowance at the top of the polymer transition layer and the machining allowance for the thickness of the electroplated gold layer are greater than 10 μm.
[0020] Preferably, the polymer transition layer is made of pentaerythritol triacrylate.
[0021] An application of a manufacturing method for a thin-walled gold cavity with irregularly shaped slots, wherein the thin-walled gold cavity with irregularly shaped slots manufactured by this method is used for the observation and transport of radiation streams, specifically including: X-ray, alpha ray, beta ray, gamma ray, neutron stream, plasma, and electron beam observation and transport.
[0022] The present invention has at least the following beneficial effects: the method for manufacturing thin-walled gold cavities with irregularly shaped slots of the present invention can obtain thin-walled gold cavities with extremely small-scale, irregularly shaped slot structures. Compared with traditional subtractive manufacturing methods for manufacturing slots or transition layers, it has advantages such as a wider range of processing scales and is not limited by the structure of subtractive manufacturing processes, and has high processing efficiency for transition layers. The minimum slot size is <5μm. The thin-walled gold cavity with irregularly shaped slots obtained by the present invention can meet the requirements of physics experiments in the field of inertial confinement fusion for thin-walled gold cavity parts with irregularly shaped slot structures.
[0023] Other advantages, objectives and features of the present invention will become apparent in part from the following description, and in part from those skilled in the art through study and practice of the invention. Attached Figure Description
[0024] Figure 1 This is a schematic diagram of the structure of the mandrel I obtained by the manufacturing method of the thin-walled gold cavity with irregular grooves of the present invention;
[0025] Figure 2 This is a schematic diagram of the structure of mandrel II obtained after a polymer transition layer is 3D printed onto the end face of mandrel I;
[0026] Figure 3 A schematic diagram of the structure for obtaining mandrel III by electroplating or sputtering a gold layer on the surface of mandrel II;
[0027] Figure 4 This is a schematic diagram of the structure of mandrel IV obtained after turning and cutting mandrel III.
[0028] Figure 5 A schematic diagram of the thin-walled gold cavity with irregularly shaped slots obtained after removing the copper and polymer transition layer;
[0029] Figure 6 A schematic diagram of the front end structure of a thin-walled gold cavity with irregularly shaped slots;
[0030] Figure 7 for Figure 6 Schematic diagram of the cross-sectional structure at point AA;
[0031] Figure 8 for Figure 6 A magnified view of the irregularly shaped slot. Detailed Implementation
[0032] The present invention will now be described in further detail with reference to the accompanying drawings, so that those skilled in the art can implement it based on the description.
[0033] It should be understood that terms such as “having,” “comprising,” and “including” as used herein do not exclude the presence or addition of one or more other elements or combinations thereof.
[0034] Example 1
[0035] like Figures 1-5 As shown, this embodiment provides a method for manufacturing a thin-walled gold cavity with irregularly shaped slots, including the following steps:
[0036] Step 1: The solid copper column is machined into mandrel I3 by turning. The turning speed n is 2000 r / min, the depth of cut ap is 1 μm, the feed rate f is 0.001 mm / r, the dimensional deviation is less than 2 μm, and the surface roughness Ra is less than or equal to 50 nm.
[0037] Step 2: A polymer transition layer 4 is grown on the end face of mandrel I3 using polymer 3D printing additive manufacturing process to obtain mandrel II5. The radial dimensions, position, and structure of the polymer transition layer 4 are consistent with the requirements of the future irregular slot. The material of the polymer transition layer 4 is pentaerythritol triacrylate. The polymer transition layer 4 is grown using femtosecond laser 3D printing additive manufacturing process, with the following process parameters: femtosecond laser wavelength 760nm, pulse width 50fs, repetition rate 1kHz, average power 20mW, scanning speed 0.1mm / s, scanning spacing 0.5μm, layer height 0.5μm; the machining allowance at the top of the polymer transition layer is greater than 10μm.
[0038] Step 3: Electroplating a gold layer onto the surface of mandrel II5 to obtain mandrel III6. The gold layer 101 of mandrel III6 completely covers mandrel II5, and the machining allowance for the thickness of the electroplated gold layer is greater than 10 μm. The gold plating bath temperature is 50℃, the pH value of the gold plating bath is 8, and the gold plating current density is 0.7 A / dm³. 2 The gold plating solution includes: 25 g / L sodium gold sulfite, 200 g / L ammonium sulfite, 55 g / L potassium citrate, and 40 g / L disodium EDTA, calculated as gold.
[0039] Step 4: The mandrel Ⅲ6 is machined into mandrel Ⅳ7 by turning. The copper layer at the rear end of mandrel Ⅳ7 is exposed, and the polymer transition layer 4 at the front end of mandrel Ⅳ is exposed. The turning speed n is 2000 r / min, the depth of cut ap is 1 μm, the feed rate f is 0.001 mm / r, the machining dimensional deviation is less than 2 μm, and the surface roughness Ra is less than or equal to 50 nm.
[0040] Step 5: In an oxygen atmosphere, heat mandrel IV to 150°C at a rate of 0.5°C / min and hold for 1 hour. Then heat mandrel IV to 450°C at a rate of 1°C / min and hold for 1 hour to remove the polymer transition layer 4 of mandrel IV 7.
[0041] Step Six: Remove the copper from mandrel IV7 using dilute nitric acid, clean, and dry to obtain the desired thin-walled gold cavity with irregularly shaped slots. The horizontal spacing of the irregularly shaped slots in the processed thin-walled gold cavity is 0.01 mm, the vertical spacing is 0.01 mm, the wall thickness of the thin-walled gold cavity with irregularly shaped slots is 0.03 mm, and the size and shape of the irregularly shaped slots 2 are irregular, asymmetrical, free structures, such as... Figure 8 In the enlarged cross-sectional view of the irregular slot 2 shown, the inner wall angle α of the irregular slot 2 is 138°, and the outer wall angle β of the irregular slot 2 is 85°.
[0042] like Figure 6 and Figure 7 As shown in the figure, the thin-walled gold cavity with irregular slots has three fan-shaped irregular slots 2. The three irregular slots 2 are located on the front end face of the thin-walled gold cavity and penetrate the gold layer. The transported material passes through the irregular slots 2 along the axial direction of the thin-walled gold cavity. In the entire processing, the mandrel I, which is machined from a solid copper column, serves to provide a load-bearing attachment and support for the polymer transition layer 101 during 3D printing. The polymer transition layer is used to determine the position, size, and specific shape of the irregular slots. After heating and removing the polymer transition layer, the desired irregular slots can be obtained. The electroplated gold layer 101 acts as the thin wall of the thin-walled gold cavity. The copper of the mandrel IV is removed by dilute nitric acid, and the remaining gold layer 101 constitutes the overall structure of the entire thin-walled gold cavity.
[0043] Example 2
[0044] This embodiment provides a method for manufacturing a thin-walled gold cavity with irregularly shaped slots, including the following steps:
[0045] Step 1: The solid copper column is machined into mandrel I3 by turning. The turning speed n is 2500 r / min, the depth of cut ap is 5 μm, the feed rate f is 0.005 mm / r, the dimensional deviation is less than 2 μm, and the surface roughness Ra is less than or equal to 50 nm.
[0046] Step 2: A polymer transition layer 4 is grown on the end face of mandrel I3 using polymer 3D printing additive manufacturing process to obtain mandrel II5. The radial dimensions, position, and structure of the polymer transition layer 4 are consistent with the requirements of the future irregular slot. The material of the polymer transition layer 4 is pentaerythritol triacrylate. The polymer transition layer 4 is grown using femtosecond laser 3D printing with the following process parameters: femtosecond laser wavelength 800nm, pulse width 100fs, repetition rate 20kHz, average power 50mW, scanning speed 10mm / s, scanning spacing 1μm, layer height 2μm; the machining allowance at the top of the polymer transition layer 4 is greater than 10μm.
[0047] Step 3: Electroplating a gold layer onto the surface of mandrel II5 to obtain mandrel III6. The gold layer 101 of mandrel III6 completely covers mandrel II5; the machining allowance for the thickness of the electroplated gold layer is greater than 10 μm; the gold plating bath temperature is 50℃, the pH value of the gold plating bath is 9, and the gold electroplating current density is 1.0 A / dm³. 2 The gold plating solution comprises: 30 g / L sodium gold sulfite, 220 g / L ammonium sulfite, 65 g / L potassium citrate, and 50 g / L disodium EDTA.
[0048] Step 4: The mandrel Ⅲ6 is machined into mandrel Ⅳ7 by turning. The copper layer at the rear end of mandrel Ⅳ7 is exposed, and the polymer transition layer 4 at the front end of mandrel Ⅳ is exposed. The turning speed n is 2500 r / min, the depth of cut ap is 5 μm, the feed rate f is 0.005 mm / r, the machining dimensional deviation is less than 2 μm, and the surface roughness Ra is less than or equal to 50 nm.
[0049] Step 5: In an oxygen atmosphere, heat mandrel IV to 200°C at a rate of 2°C / min and hold for 2 hours. Then heat mandrel IV to 500°C at a rate of 2°C / min and hold for 2 hours to remove the polymer transition layer 4 of mandrel IV 7.
[0050] Step Six: Remove the copper from mandrel IV7 using dilute nitric acid, clean, and dry to obtain the desired thin-walled gold cavity with irregularly shaped slots. The horizontal spacing of the irregularly shaped slots in the processed thin-walled gold cavity is 2mm, the vertical spacing is 1mm, the wall thickness of the thin-walled gold cavity with irregularly shaped slots is 0.1mm, and the size and shape of the irregularly shaped slots are irregular, asymmetrical, and free structures. The inner wall angle α of irregularly shaped slot 2 is 145°, and the outer wall angle β of irregularly shaped slot 2 is 90°.
[0051] Example 3
[0052] This embodiment provides a method for manufacturing a thin-walled gold cavity with irregularly shaped slots, including the following steps:
[0053] Step 1: The solid copper column is machined into mandrel I3 by turning. The turning speed n is 3000 r / min, the depth of cut ap is 10 μm, the feed rate f is 0.01 mm / r, the dimensional deviation is less than 2 μm, and the surface roughness Ra is less than or equal to 50 nm.
[0054] Step 2: A polymer transition layer 4 is grown on the end face of mandrel I3 using polymer 3D printing additive manufacturing process to obtain mandrel II5. The radial dimensions, position, and structure of the polymer transition layer 4 are consistent with the requirements of the future irregular slot. The material of the polymer transition layer 4 is pentaerythritol triacrylate. The polymer transition layer is grown using femtosecond laser 3D printing with the following process parameters: femtosecond laser wavelength 800nm, pulse width 300fs, repetition rate 100MHz, average power 100mW, scanning speed 100mm / s, scanning spacing 2μm, layer height 5μm; the machining allowance at the top of the polymer transition layer is greater than 10μm.
[0055] Step 3: Electroplating a gold layer onto the surface of mandrel II5 to obtain mandrel III6. The gold layer 101 of mandrel III6 completely covers mandrel II5, and the machining allowance for the thickness of the electroplated gold layer is greater than 10 μm. The gold plating bath temperature is 50℃, the pH value of the gold plating bath is 9, and the gold electroplating current density range is 3.0 A / dm³. 2 The gold plating solution comprises: 40 g / L sodium gold sulfite, 240 g / L ammonium sulfite, 80 g / L potassium citrate, and 60 g / L disodium EDTA.
[0056] Step 4: The mandrel Ⅲ6 is machined into mandrel Ⅳ7 by turning. The copper layer at the rear end of mandrel Ⅳ7 is exposed, and the polymer transition layer 4 at the front end of mandrel Ⅳ is exposed. The turning speed is 3000 r / min, the depth of cut ap is 10 μm, the feed rate f is 0.01 mm / r, the machining dimensional deviation is less than 2 μm, and the surface roughness Ra is less than or equal to 50 nm.
[0057] Step 5: In an oxygen atmosphere, heat mandrel IV to 250°C at a rate of 3°C / min and hold for 3 hours. Then heat mandrel IV to 650°C at a rate of 3°C / min and hold for 3 hours to remove the polymer transition layer 4 of mandrel IV 7.
[0058] Step Six: Remove the copper from mandrel IV7 using dilute nitric acid, clean, and dry to obtain the desired thin-walled gold cavity with irregularly shaped slots. The horizontal spacing of the irregularly shaped slots in the processed thin-walled gold cavity is 10mm, the vertical spacing is 2mm, the wall thickness is 0.2mm, and the size and shape of the irregularly shaped slots are irregular, asymmetrical, and free structures. The inner wall angle α of irregularly shaped slot 2 is 148°, and the outer wall angle β of irregularly shaped slot 2 is 80°.
[0059] The number of devices and processing scale described herein are for the purpose of simplifying the description of the invention. Applications, modifications, and variations of the invention will be readily apparent to those skilled in the art.
[0060] Although embodiments of the present invention have been disclosed above, they are not limited to the applications listed in the specification and embodiments. They can be applied to various fields suitable for the present invention. For those skilled in the art, other modifications can be easily made. Therefore, without departing from the general concept defined by the claims and their equivalents, the present invention is not limited to the specific details and illustrations shown and described herein.
Claims
1. A method for manufacturing a thin-walled gold cavity with irregularly shaped slots, characterized in that: Includes the following steps: Step 1: Machin the solid copper column into mandrel I by turning; Step 2: A polymer transition layer is grown on the end face of mandrel I using polymer 3D printing additive manufacturing process to obtain mandrel II. The radial dimensions, position and structure of the polymer transition layer are consistent with the requirements of the future irregular slot, and the axial dimension of the polymer transition layer is larger than the requirements of the future irregular slot. Step 3: Electroplating or sputtering a gold layer on the surface of mandrel II to obtain mandrel III. The gold layer of mandrel III completely covers mandrel II. Step 4: Machining mandrel III into mandrel IV by turning exposes the copper layer at the rear end of mandrel IV and the polymer transition layer at the front end of mandrel IV. Step 5: Remove the polymer transition layer of mandrel IV by heating. The polymer transition layer is made of pentaerythritol triacrylate. Step 6: Remove the copper from mandrel IV with dilute nitric acid, clean, and dry to obtain the desired thin-walled gold cavity with irregularly shaped slots; The horizontal spacing of the irregularly shaped slots in the thin-walled gold cavity with irregularly shaped slots is 0.01mm~10mm, the vertical spacing is 0.01mm~2mm, the wall thickness is 0.03mm~0.2mm, the size and shape of the irregularly shaped slots are irregular and asymmetrical free structures, the α angle of the inner sidewall of the irregularly shaped slots satisfies 90°<α<180°, and the β angle of the outer sidewall of the irregularly shaped slots satisfies 0<β≤90°; The process parameters for electroplating the gold layer in step three are as follows: the gold plating bath temperature is 50℃, the pH value of the gold plating bath is 8~9, and the gold electroplating current density range is 0.7 A / dm³. 2 ~3.0A / dm 2 ; The gold plating solution comprises: 25-40 g / L sodium gold sulfite, 200-240 g / L ammonium sulfite, 55-80 g / L potassium citrate, and 40-60 g / L disodium EDTA, calculated as gold. The process parameters for removing the polymer transition layer of mandrel IV by heating in step five are as follows: In an air or oxygen atmosphere, mandrel IV is heated to 150℃~250℃ at a rate of 0.5℃ / min~3℃ / min and held for 1h~3h. Then, mandrel IV is heated to 450℃~650℃ at a rate of 1℃ / min~3℃ / min and held for 1h~3h.
2. The method for manufacturing a thin-walled gold cavity with irregularly shaped slots according to claim 1, characterized in that: The machining process parameters for steps one and four are as follows: rotational speed n The range is 2000 r / min to 3000 r / min, and the cutting depth is... ap The range is 1μm~10μm, feed rate f The range is 0.001 mm / r to 0.01 mm / r.
3. The method for manufacturing a thin-walled gold cavity with irregularly shaped slots according to claim 1, characterized in that: In step two, the polymer transition layer is grown using femtosecond laser 3D printing. The process parameters are as follows: femtosecond laser wavelength 760nm~800nm, pulse width 50fs~300fs, repetition rate 1kHz~100MHz, average power 20mW~100mW, scanning speed 0.1mm / s~100mm / s, scanning spacing 0.5μm~2μm, and layer height 0.5μm~5μm.
4. The method for manufacturing a thin-walled gold cavity with irregularly shaped slots according to claim 1, characterized in that: The dimensional deviations of mandrel I and mandrel IV obtained by turning in steps one and four are both less than 2 μm, and the surface roughness Ra is less than or equal to 50 nm.
5. The method for manufacturing a thin-walled gold cavity with irregularly shaped slots according to claim 1, characterized in that: In steps two and three, the axial machining allowance at the top of the polymer transition layer and the machining allowance for the thickness of the electroplated gold layer are greater than 10 μm.
6. An application of a manufacturing method for a thin-walled gold cavity with irregularly shaped slots as described in any one of claims 1-5, characterized in that: The irregularly shaped slotted thin-walled gold cavity manufactured by this method can be used for the observation and transport of radiation flows, specifically including: X-rays, alpha rays, beta rays, gamma rays, neutron flows, plasma, and electron beams.