Size-compatible automated detection vehicle

Abstract

The application provides a size-compatible automatic detection carrier, which comprises a detection platform, the detection platform comprises a base, a first clamping assembly, a second clamping assembly, a distance adjusting assembly and a height adjusting assembly arranged horizontally side by side, the first clamping assembly and the second clamping assembly jointly fix a product to be detected between them, the distance adjusting assembly comprises a push rod motor and a guide rail, the first clamping assembly is connected with the push rod motor and moves along the guide rail under the driving of the push rod motor to change the distance between the first clamping assembly and the second clamping assembly, and the height adjusting assembly comprises a height adjusting motor and a cam mechanism driven by the height adjusting motor, and the cam mechanism drives the second clamping assembly to move in the vertical direction. Through the structure that the detection platform is provided as the double-clamping-assembly structure with adjustable distance and height, various special-shaped carrier boards or frames can be well compatible, and the application scenarios and flexibility of the equipment are increased.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor work platforms, and particularly relates to a size-compatible automatic detection carrier. BACKGROUND

[0002] At present, there are two conventional ways for detecting products of different sizes (different height differences and parallelities) such as power devices, and special-shaped carrier plates, frames, and carrier discs. One is manual detection, which has low efficiency, poor repeatability, low automation, single driving mode, and poor adaptability. The other is automatic detection, which generally uses a fixed assembly line with a positioning platform, and uses fixed or adjustable detection equipment for detection. The repeatability and efficiency are improved, but this method is not suitable for multi-station layout, and the position adjustment of the detection equipment has a large weight and inertia, which not only requires high motor performance, but also negatively affects the detection accuracy and equipment stability, and cannot meet the requirements of high speed and high precision detection. In the above two methods, it is difficult to realize automatic adjustment corresponding to different product specifications, and the detection efficiency is low.

[0003] Therefore, it is necessary to design a size-compatible automatic detection carrier to solve the above problems. SUMMARY

[0004] The purpose of the present application is to provide a size-compatible automatic detection carrier that is compatible with multiple sizes of products and has high detection efficiency.

[0005] To achieve the above purpose, the present application adopts the following technical solution: a size-compatible automatic detection carrier includes a detection platform, the detection platform includes a base, a first clamping assembly, a second clamping assembly, a distance adjustment assembly, and a height adjustment assembly arranged horizontally side by side, the first clamping assembly and the second clamping assembly together fix the product to be detected between them, the distance adjustment assembly includes a push rod motor and a guide rail, the first clamping assembly is connected with the push rod motor and moves along the guide rail under the drive of the push rod motor to change the distance between the first clamping assembly and the second clamping assembly, the height adjustment assembly includes a height adjustment motor and a cam mechanism driven by the height adjustment motor, the cam mechanism drives the second clamping assembly to move in the vertical direction.

[0006] As a further improved technical solution of the present application, the first clamping assembly includes a first clamping arm, a first positioning arm arranged above and below, and a first cylinder connected with the first clamping arm, the first cylinder drives the first clamping arm to approach or move away from the first positioning arm.

[0007] As a further improved technical solution of the present application, the first clamping assembly further comprises a first support frame supporting the first positioning arm, and the push rod motor is connected with the first support frame and drives the first support frame to move along the guide rail.

[0008] As a further improved technical solution of the present application, the cam mechanism comprises a cam bearing frame and a cam, and the cam bearing frame is fixed on the base.

[0009] As a further improved technical solution of the present application, the second clamping assembly comprises a second clamping arm, a second positioning arm, a second cylinder connected with the second clamping arm, and a second support frame supporting the second positioning arm, the second cylinder drives the second clamping arm to move close to or away from the second positioning arm, the second support frame is provided with a cam connecting wheel matched with the cam mechanism, the second support frame moves in the vertical direction under the drive of the cam mechanism, and the second support frame and the base are elastically connected through the spring.

[0010] As a further improved technical solution of the present application, the first clamping arm is provided with a pin and a protruding tooth on the side facing the first positioning arm.

[0011] As a further improved technical solution of the present application, one end of the first clamping assembly and the second clamping assembly is provided with a sensor, and the other end is provided with a limiting mechanism, the sensor is used for sensing the product when the product to be measured enters between the first clamping assembly and the second clamping assembly, and the limiting mechanism is used for limiting the position of the product.

[0012] As a further improved technical solution of the present application, the limiting mechanism comprises a limiting block and a limiting cylinder driving the limiting block to lift, and the limiting cylinder is installed on the base.

[0013] As a further improved technical solution of the present application, the push rod motor and the height adjusting motor are located on the same side of the first clamping assembly and the second clamping assembly.

[0014] As a further improved technical solution of the present application, the detection platform further comprises an alignment mechanism, the alignment mechanism comprises a push plate cylinder, a push plate driven by the push plate cylinder, and a guide block, the push plate cylinder is fixed on the inner side of the first support frame, the push plate is fixed with a push rod and a guide rod, the guide rod and the push rod are arranged towards the inner side of the first support frame, the guide rod slides through the guide block, and the end of the push rod is located above the first positioning arm and is arranged close to the first positioning arm, so as to push the product to be measured to the second clamping assembly.

[0015] As a further improvement of the present invention, it also includes an X-axis linear module and a Y-axis linear module for driving the detection platform in the X-axis and Y-axis directions. The X-axis linear module includes an X-axis linear motor and an X-axis encoder, and the Y-axis linear module includes a Y-axis linear motor and a Y-axis encoder. The detection platform is disposed on the Y-axis linear module, and the first clamping component and the second clamping component extend along the X-axis direction.

[0016] As can be seen from the above technical solutions, by setting the detection platform as a structure with adjustable distance and height dual clamping components, the present invention can be well compatible with various irregularly shaped carrier plates or frames, increasing the application scenarios and flexibility of the equipment and improving detection efficiency. Attached Figure Description

[0017] Figure 1 This is a perspective view of a size-compatible automated inspection vehicle according to an embodiment of the present invention.

[0018] Figure 2 This is a perspective view of the detection platform in one embodiment of the present invention.

[0019] Figure 3 This is a schematic diagram of the structure of the first clamping component and the distance adjustment component in one embodiment of the present invention.

[0020] Figure 4 This is a schematic diagram of the structure of the second clamping component and the height adjustment component in one embodiment of the present invention.

[0021] Figure 5 for Figure 4 A schematic diagram of the structure of the second clamping component.

[0022] Figure 6 This is a schematic diagram of the first clamping arm and the first positioning arm according to an embodiment of the present invention.

[0023] Figure 7 for Figure 3 A schematic diagram of the center alignment mechanism. Detailed Implementation

[0024] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be described in detail below with reference to the accompanying drawings and specific embodiments.

[0025] This invention provides a size-compatible automated inspection vehicle. Please refer to... Figure 1As shown, the size-compatible automatic detection carrier comprises a detection platform 1 and an X-axis linear module 2 and a Y-axis linear module 3 for driving the detection platform 1 in the X-axis direction and the Y-axis direction. The X-axis linear module 2 comprises an X-axis linear motor and an X-axis encoder, the Y-axis linear module 3 comprises a Y-axis linear motor and a Y-axis encoder, the detection platform 1 is arranged on the Y-axis linear module 3, and the Y-axis linear module 3 is arranged on the X-axis linear module 2. The X-axis linear module 2 has a longer stroke, the Y-axis linear module 3 has a shorter stroke, and the detection station of the external detection mechanism can be arranged on one side of the X-axis linear module 2.

[0026] Please refer to Figure 2 As shown, the detection platform 1 comprises a base 10, a first clamping assembly 11 and a second clamping assembly 12 arranged horizontally and side by side on the base 10, a distance adjusting assembly 13, a height adjusting assembly 14, an optical fiber sensor 15 and a limiting mechanism 16. The first clamping assembly 11 and the second clamping assembly 12 together fix the product to be detected between them.

[0027] Please refer to Figure 2 and Figure 3 As shown, the first clamping assembly 11 comprises a first clamping arm 111 arranged vertically, a first positioning arm 112, a first cylinder 113 connected with the first clamping arm 111 and a first support frame 114. The first positioning arm 112 is fixed on the first support frame 114, and the first cylinder 113 is fixed between the first support frame 114 and the first clamping arm 111, for driving the first clamping arm 111 to move up and down relative to the first positioning arm 112.

[0028] Please refer to Figure 4 As shown, the first clamping arm 111 and the first positioning arm 112 are long strips, and the side of the first clamping arm 111 facing the first positioning arm 112 is provided with a pin 1111 and a protruding tooth 1112 to increase the gripping force when the first clamping arm 111 and the first positioning arm 112 clamp the product to be detected, preventing the product to be detected from falling off. The first positioning arm 112 comprises a long strip clamping jaw part 1121 clamping the first clamping arm 111 and a fixing part 1122 fixing the clamping jaw part 1121 on the first support frame 114. The lower surface of one end of the first clamping arm 111 and the second clamping arm 121 is formed into an arc surface facing forward, and the upper surface of one end of the first positioning arm 112 and the second positioning arm 122 is formed into an arc surface facing forward, so that the product to be detected can be smoothly pushed in, increasing the smoothness of the action. Preferably, the side of the first clamping arm 111 and the first positioning arm 112 close to the product to be detected is chamfered.

[0029] Please refer to Figure 5As shown, the second clamping assembly 12 comprises a second clamping arm 121 arranged above and below, a second positioning arm 122, a second cylinder 123 connected with the second clamping arm 122, and a second support frame 124, the second positioning arm 122 is fixed on the second support frame 124, and the second cylinder 123 is fixed between the second support frame 124 and the second clamping arm 121, for driving the second clamping arm 121 to move up and down relative to the second positioning arm 122.

[0030] The second clamping arm 121 is consistent with the structure of the first clamping arm 111, and the second positioning arm 122 is consistent with the structure of the first positioning arm 112, which will not be repeated here.

[0031] The first positioning arm 112 and the second positioning arm 122 are arranged so that the product to be tested can enter the preset position along the track formed by the first positioning arm 112 and the second positioning arm 122 by external pushing force. In this way, the requirement for the complexity of the external feeding mechanism is lower, and only an automatic adjusting push rod is needed to complete the feeding action.

[0032] In this embodiment, the first clamping assembly 11 and the second clamping assembly 12 extend along the X-axis direction. In this way, the feeding mechanism and the discharging mechanism are convenient to cooperate with the detection platform, the smoothness of the feeding and discharging operation is improved, and the device structure is compact.

[0033] Please refer to Figure 3 As shown, the distance adjusting assembly 13 comprises a push rod motor 131 and a guide rail 132, the first clamping assembly 11 is connected with the motor output shaft of the push rod motor 131 and moves along the guide rail 132 under the driving of the push rod motor 131, so as to change the distance between the first clamping assembly 11 and the second clamping assembly 12. Specifically, the guide rail 132 is provided with two, and the lower side of the first support frame 114 is further provided with a sliding block 115 matched with the guide rail.

[0034] Please refer to Figure 5 and Figure 6As shown, the height adjusting assembly 14 includes a height adjusting motor 141, a cam mechanism, the cam 142 drives the second clamping assembly 12 to move in the vertical direction. Specifically, the cam mechanism includes a cam 142, a bearing seat 143, a connecting shaft, a coupling 144 and a cam bearing bracket 125, the cam bearing bracket 125 is fixed on the base 10, and the cam is fixed on the cam bearing bracket 125. The cam bearing bracket 125 is located below the second support bracket 124, and the second support bracket 124 is provided with a cam connecting wheel (not shown) matched with the cam 142. Specifically, the second support bracket 124 is fixed with a connecting wheel fixed plate 126, the cam connecting wheel is installed on one side of the connecting wheel fixed plate 126, and the two sides of the connecting wheel fixed plate 126 are provided with slide rails 127 between the cam bearing bracket 125. The second support bracket 124 moves in the vertical direction along the slide rail 1237 under the drive of the cam mechanism, and the second support bracket 124 and the cam bearing bracket 125 are elastically connected through the spring 128.

[0035] Please refer to Figure 2 As shown, the push rod motor 131 and the height adjusting motor 141 are located on the same side of the first clamping assembly 11 and the second clamping assembly 12. In this embodiment, the push rod motor 131 and the height adjusting motor 141 are both arranged on the side of the second clamping assembly 12 away from the first clamping assembly 11, so that the overall mechanism of the device is compact.

[0036] Please refer to Figure 1 As shown, the optical fiber sensor 15 is arranged at one end of the first clamping assembly 11 and the second clamping assembly 12 in the length direction, and the optical fiber sensor 15 is used to sense the product entering between the first clamping assembly 11 and the second clamping assembly 12. The limiting mechanism 16 is arranged at the other end of the first clamping assembly 11 and the second clamping assembly 12 in the length direction, and the limiting mechanism 16 includes a limiting block and a limiting cylinder driving the limiting block to rise, and the limiting cylinder is fixed on the base 10. When the product to be measured enters between the first clamping assembly 11 and the second clamping assembly 12, the raised limiting block is used to limit the position of the product to be pushed in.

[0037] Please refer to Figure 3 and Figure 7As shown, the detection platform 1 further comprises an alignment mechanism 17, which comprises a push plate cylinder 173, a push plate 171, a guide block 175, a push rod 172 fixed on the push plate 171, and a guide rod 174. The push plate cylinder 173 is fixed to the inner side of the first support frame 124 through the guide block 175, and drives the push plate 171 located outside the first support frame 124 to move horizontally. The guide rod 174 and the push rod 172 are both arranged towards the inner side of the support frame 124. The guide block 175 is provided with a guide hole matched with the guide rod 174. When the push plate cylinder 173 drives the push plate 171 to move, the guide rod moves along the guide hole, so that the movement of the push plate 171 is stable. The end of the push rod 172 is arranged above and adjacent to the first positioning arm 112, and the first clamping arm 111 and the first positioning arm 112 are provided with a recess slot (not numbered) for the push rod 172 to pass through, so that the alignment mechanism 17 does not affect the clamping action of the first clamping arm 111 and the first positioning arm 112 when the alignment mechanism 17 acts.

[0038] In the present application, the first clamping assembly 11 and the second clamping assembly 12 are made of stainless steel, preferably high-hardness stainless steel. The entire detection platform 1 is externally treated with a conductive coating and is subjected to grounding conduction treatment. This avoids the generation of static electricity during the conveying of products and prevents harm to semiconductor chips and devices.

[0039] The size-compatible automatic detection carrier workflow in the present embodiment is as follows:

[0040] The worker pre-stores the to-be-tested product information, the feeding station position information, the discharging station position information and the detection station position information in the computer. The to-be-tested product information includes product number, corresponding product shape, size and other information.

[0041] When starting the detection work, the worker inputs the to-be-tested product number in the computer, confirms the correctness, and issues an automatic adjustment instruction. The size-compatible automatic detection carrier moves according to the to-be-tested product information, the feeding station position information and the detection station position information. First, the detection platform 1 adjusts the distance between the first clamping assembly 11 and the second clamping assembly 12 according to the to-be-tested product information. Specifically, the push rod motor 131 is connected to the instruction to push the first support plate 114 to the preset position. At the same time, the detection platform 1 adjusts the height of the second clamping assembly 12 according to the to-be-tested product information. Specifically, the height adjustment motor 141 is connected to the instruction to start rotating, drives the cam mechanism at the end of the motor shaft to rotate, drives the cam bearing frame 125, and adjusts the second clamping assembly 12 to the preset position.

[0042] At the same time, the X-axis linear motor and the Y-axis linear motor are simultaneously connected to the motion instruction, and micron-level positioning is performed by the X-axis encoder and the Y-axis encoder according to the feeding station position information, so that the detection platform 1 is transported to the feeding station, and at the same time, the limiting block rises to a predetermined position. When the first positioning arm 112, the second positioning arm 122 and the limiting block are all in place, the product to be detected is pushed into the detection platform 1 by the external feeding mechanism. Specifically, the optical fiber sensor 15 senses that the product enters above the first positioning arm 112 and the second positioning arm 122, the feeding mechanism continues to push the product in until the product contacts the limiting block, and then the alignment mechanism 17 starts to act, pushes the product to be detected to the second clamping assembly 12 and tightens, and the alignment mechanism 17 resets. Finally, the first clamping arm 111 and the second clamping arm 121 are clamped downward at the same time, and the product is fixed. In this process, the pins embedded in the first clamping arm 111 and the second clamping arm 121 pin the product, so as to ensure that no displacement occurs in the subsequent movement process. The feeding process is completed.

[0043] The detection platform 1 moves to the detection station through the action of the X-axis linear motor and the Y-axis linear motor to perform the detection action. After the detection work is completed, the X-axis linear motor and the Y-axis linear motor are simultaneously connected to the motion instruction, micron-level positioning is performed by the X-axis encoder and the Y-axis encoder according to the unloading station position information, so that the detection platform 1 is transported to the unloading station. The first clamping arm 111 and the second clamping arm 121 are loosened upward at the same time, in this process, the pins embedded in the first clamping arm 111 and the second clamping arm 121 are separated from the product, and the product is pushed out of the detection platform 1 by the unloading mechanism.

[0044] In summary, the detection platform is set as a double-clamping assembly structure with adjustable distance and height, which can well compatible with various special-shaped carrier boards or frames, and increase the application scenarios and flexibility of the equipment. The detection platform and the product to be detected carried thereby are driven by the X-axis linear module and the Y-axis linear module to move to the detection station at a high speed, so that the degree of automation is high, the detection speed is fast, the stability of the equipment is high, and the detection efficiency and precision are improved. In addition, the detection platform with the X-axis linear module and the Y-axis linear module can be arranged in multiple stations along the detection platform track, so as to increase the flexibility and greatly reduce the size of the equipment. The parts in contact with the product are set as stainless steel, and the whole equipment is provided with a conductive coating, so that static electricity is led out of the equipment, and the problem of product damage caused by static electricity is greatly reduced.

[0045] The terms such as "upper", "lower", "front", "back", and the like, used herein for the purpose of convenience of explanation, describe the relationship of one feature relative to another feature as shown in the drawings. It is understood that the terms of spatial relative position can be intended to include different orientations than shown in the figures, depending on the position of the product, and should not be understood as limiting the claims.

[0046] In addition, the above embodiments are only used to illustrate the technical solutions described in the present application and not to limit the present application. The understanding of the present description should be based on the skilled person in the art. Although the present application has been described in detail with reference to the above embodiments, those skilled in the art should understand that the skilled person in the art can still modify or equivalently replace the present application, and all technical solutions and improvements which do not deviate from the spirit and scope of the present application should be covered within the scope of the claims of the present application.

Claims

1. A size-compatible automated inspection vehicle, comprising an inspection platform, characterized in that: The testing platform includes a base, a first clamping assembly, a second clamping assembly, a distance adjustment assembly, and a height adjustment assembly arranged horizontally side by side. The first clamping assembly and the second clamping assembly together fix the product to be tested between them. The distance adjustment assembly includes a push rod motor and a guide rail. The first clamping assembly is connected to the push rod motor and moves along the guide rail under the drive of the push rod motor to change the distance between the first clamping assembly and the second clamping assembly. The height adjustment assembly includes a height adjustment motor and a cam mechanism driven by the height adjustment motor. The cam mechanism drives the second clamping assembly to move vertically. The first clamping assembly includes a first clamping arm, a first positioning arm, and a first cylinder connected to the first clamping arm, arranged vertically. The first cylinder drives the first clamping arm to move closer to or away from the first positioning arm. The first clamping assembly also includes... The first support frame supports the first positioning arm; the second clamping assembly includes a second clamping arm, a second positioning arm, a second cylinder connected to the second clamping arm, and a second support frame supporting the second positioning arm. The second cylinder drives the second clamping arm to move closer to or away from the second positioning arm; the detection platform also includes an alignment mechanism, which includes a push plate cylinder, a push plate driven by the push plate cylinder, and a guide block. The push plate cylinder is fixed to the inner side of the first support frame. A push rod and a guide rod are fixed on the push plate. The guide rod and the push rod are both arranged facing the inner side of the first support frame. The guide rod slides through the guide block. The end of the push rod is located above and near the first positioning arm to push the product to be tested toward the second clamping assembly. The first clamping arm and the first positioning arm are provided with clearance grooves for the push rod to pass through.

2. The size-compatible automated inspection vehicle as described in claim 1, characterized in that: The push rod motor is connected to the first support frame and drives the first support frame to move along the guide rail.

3. The size-compatible automated inspection vehicle as described in claim 1, characterized in that: The cam mechanism includes a cam bearing bracket and a cam, and the cam bearing bracket is fixed to the base.

4. The size-compatible automated inspection vehicle as described in claim 3, characterized in that: The second support frame is provided with a cam connecting wheel that cooperates with the cam mechanism. The second support frame moves vertically under the drive of the cam mechanism. The second support frame and the base are elastically connected by a spring.

5. The size-compatible automated inspection vehicle as described in claim 1, characterized in that: The first clamping arm has a pin and protruding teeth on the side facing the first positioning arm.

6. The size-compatible automated inspection vehicle as described in claim 1, characterized in that: The first clamping component and the second clamping component are equipped with a sensor at one end and a limiting mechanism at the other end. When the product to be tested enters between the first clamping component and the second clamping component, the sensor is used to sense the product, and the limiting mechanism is used to restrict the position of the product.

7. The size-compatible automated inspection vehicle as described in claim 6, characterized in that: The limiting mechanism includes a limiting block and a limiting cylinder that drives the limiting block to rise and fall. The limiting cylinder is mounted on the base.

8. The size-compatible automated inspection vehicle as described in claim 1, characterized in that: The push rod motor and the height adjustment motor are located on the same side of the first clamping assembly and the second clamping assembly.

9. The size-compatible automated inspection vehicle as described in claim 1, characterized in that: It also includes an X-axis linear module and a Y-axis linear module for driving the detection platform in the X-axis and Y-axis directions. The X-axis linear module includes an X-axis linear motor and an X-axis encoder, and the Y-axis linear module includes a Y-axis linear motor and a Y-axis encoder. The detection platform is mounted on the Y-axis linear module, and the first clamping component and the second clamping component extend along the X-axis direction.

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