A rotary device, vacuum coating equipment and method using the same

Abstract

The application discloses a rotating device, a vacuum coating equipment and a method using the same, and belongs to the technical field of vacuum coating. The rotating device is arranged in a cavity, a hanger assembly is arranged in the cavity, the hanger assembly is used for carrying a substrate, the rotating device comprises a rotating assembly, an output end of the rotating assembly is used for being connected with the hanger assembly, and the rotating assembly drives the hanger assembly to rotate, so that the hanger assembly rotates to be in a first state or a second state; when the substrate is mounted on the hanger assembly and is in the second state, the substrate surface can be coated. The rotating device, the vacuum coating equipment and the method using the same improve the flexibility of the substrate in the cavity, so that the production requirement is met.

Description

Technical Field

[0001] This invention relates to the field of vacuum coating technology, and more particularly to a rotating device, vacuum coating equipment, and a method for using the same. Background Technology

[0002] In existing technologies, after the substrate is hung on the bracket of the transfer frame, its position is fixed, resulting in poor flexibility and difficulty in meeting production requirements. For example, when transporting and hanging the substrate on the bracket of the transfer frame, one side of the substrate faces the transfer frame through the transport port, and after being hung on the bracket, the other side of the substrate faces the inner wall of the cavity. This ensures that the orientation of the hung substrate and the film deposition state are aligned, allowing for direct film deposition, which is simple and efficient. When the substrate faces the transfer frame through the transport port, the opening area of ​​the transport port is larger than the cross-sectional area of ​​the substrate. However, the larger the opening area of ​​the transport port, the more susceptible the equipment inside the cavity is to contamination. In addition, the valve mechanism of a larger transport port occupies a lot of space, increasing the heat convection loss inside the cavity. All of these factors ultimately affect the film deposition quality and efficiency.

[0003] Therefore, there is an urgent need for a rotating device, a vacuum coating equipment, and a method for applying them to solve the aforementioned problems. Summary of the Invention

[0004] The purpose of this invention is to provide a rotating device, a vacuum coating equipment, and a method thereof, which improves the flexibility of the substrate within the cavity to meet production requirements.

[0005] To achieve this objective, the present invention adopts the following technical solution:

[0006] In a first aspect, a rotating device is provided, disposed in a cavity, wherein a hanger assembly is provided in the cavity, the hanger assembly is used to support a substrate, the rotating device includes a rotating component, the output end of the rotating component is used to dock with the hanger assembly and drive the hanger assembly to rotate, so that the hanger assembly rotates to be in a first state or a second state, and when the substrate is mounted on the hanger assembly and is in the second state, the substrate surface can be coated.

[0007] In some possible implementations, the cavity is provided with a revolution frame, the hanging bracket assembly is rotatably connected to the revolution frame, the revolution frame can drive the hanging bracket assembly to rotate around a first center line to dock with the rotating assembly, and the rotating assembly can drive the hanging bracket assembly to rotate around a second center line.

[0008] In some possible implementations, the cavity is provided with a transport port.

[0009] The rotating assembly is provided in two sets, with the two sets of rotating assemblies located on both sides of the conveying port along the rotation direction of the revolution frame; and / or

[0010] The transport port includes a transport inlet and a transport outlet.

[0011] In some possible implementations, the rotating assembly includes a rotating drive and a rotating head, the rotating drive being fixed to the cavity, the rotating head being connected to the output end of the rotating drive, and the bracket assembly being connectable to or detachable from the rotating head.

[0012] In some possible implementations, a limiting component and a lifting component are provided between the hanging bracket assembly and the rotating frame. The limiting component can restrict the rotation of the hanging bracket assembly. When the lifting component drives the hanging bracket assembly to move forward, the limiting component is in a non-limited state and the hanging bracket assembly is connected to the rotating component. When the lifting component drives the hanging bracket assembly to move in the reverse direction, the hanging bracket assembly is separated from the rotating component and the limiting component is in a limited state.

[0013] In some possible implementations, the limiting component includes:

[0014] Two sets of first limiting components, each first limiting component including a pin and a socket, one pin and the other socket being located on the hanger assembly and the other on the orbital frame. When the hanger assembly moves, the pin engages or disengages from the socket. When the hanger assembly is in a first state, the first set of first limiting components is in a limiting state, and the second set of first limiting components is in a non-limiting state; when the hanger assembly is in a second state, the first set of first limiting components is in a non-limiting state, and the second set of first limiting components is in a limiting state; and / or

[0015] The second limiting component includes a cross platform and a cross groove. One of the cross platform and the cross groove is disposed on the hanger assembly, and the other is disposed on the revolving frame. When the hanger assembly moves, the cross platform is inserted into or separated from the cross groove.

[0016] In some possible implementations, the lifting assembly is provided corresponding to the rotating assembly. The lifting assembly includes a lifting drive and a lifting head. The lifting drive is fixed to the cavity, and the lifting head is connected to the output end of the lifting drive. The lifting drive drives the hanging bracket assembly to move through the lifting head.

[0017] In some possible implementations, the hanger assembly includes a connecting shaft and a frame connected to the connecting shaft, the base plate is detachably connected to the frame, the revolving frame is provided with a bearing assembly, the connecting shaft passes through the bearing assembly, and the rotating component is driven connected to the connecting shaft.

[0018] In some possible implementations, the bearing assembly includes linear bearings or oilless bushings.

[0019] In some possible implementations, the angle between the hanger assembly in the first state and the second state is 90°.

[0020] Secondly, a vacuum coating apparatus is provided, comprising a cavity, a hanger assembly, and the aforementioned rotating device, wherein the rotating device is capable of driving the hanger assembly to rotate.

[0021] Thirdly, a method for using the aforementioned vacuum coating equipment is provided, comprising:

[0022] The bracket assembly in the second state docks with the rotating assembly, and the rotating assembly drives the bracket assembly to the first state;

[0023] The bracket assembly is separated from the rotating assembly, and the bracket assembly remains in the first state;

[0024] The bracket assembly in the first state is docked with the rotating assembly, and the rotating assembly drives the bracket assembly to the second state;

[0025] The bracket assembly is separated from the rotating assembly, and the bracket assembly remains in the second state.

[0026] The beneficial effects of this invention are:

[0027] The present invention provides a rotating device, a vacuum coating equipment, and a method thereof. The rotating component can drive the hanger assembly to rotate to be in a first state or a second state, so that the hanger assembly is in different angular positions relative to the cavity. When the substrate is hung on the hanger assembly, the angular position changes as the hanger assembly is in different states, thereby improving the flexibility of the substrate in the cavity to meet production needs. Attached Figure Description

[0028] Figure 1 This is a schematic diagram of the structure of the vacuum coating equipment provided in a specific embodiment of the present invention;

[0029] Figure 2 This is a top view of the vacuum coating equipment provided in a specific embodiment of the present invention;

[0030] Figure 3 This is a schematic diagram of the hanging bracket assembly provided in a specific embodiment of the present invention;

[0031] Figure 4 This is a schematic diagram of the hanger assembly and rotating assembly in a separated state according to a specific embodiment of the present invention;

[0032] Figure 5 yes Figure 4 Enlarged view of point I;

[0033] Figure 6 yes Figure 4 Enlarged view of section II;

[0034] Figure 7 yes Figure 4 Enlarged view of section III;

[0035] Figure 8 This is a schematic diagram of the docking state of the hanger assembly and the rotating assembly provided in a specific embodiment of the present invention.

[0036] In the picture:

[0037] 100. Substrate;

[0038] 2. Hanger assembly; 21. Connecting shaft; 22. Frame; 23. Hook; 24. Pin;

[0039] 3. Rotating assembly; 31. Rotating drive component; 32. Rotating head; 321. Through slot;

[0040] 4. Rotary frame; 41. Frame body; 42. Turntable; 43. Bearing assembly;

[0041] 5. Lifting assembly; 51. Lifting drive unit; 52. Lifting head;

[0042] 6. Limiting component; 61. First limiting component; 611. Pin; 612. Socket; 62. Second limiting component; 621. Cross platform; 622. Cross groove;

[0043] A. First rotation position; B. Second rotation position; C. Move-out position; D. Move-in position. Detailed Implementation

[0044] To make the technical problems solved by the present invention, the technical solutions adopted, and the technical effects achieved clearer, the technical solutions of the embodiments of the present invention will be further described in detail below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0045] In the description of this invention, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0046] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0047] This embodiment provides a rotating device disposed in a cavity. A hanger assembly 2 is provided within the cavity to support a substrate 100. The rotating device includes a rotating component 3, the output end of which engages with the hanger assembly 2 and drives the hanger assembly 2 to rotate, allowing it to be in a first state or a second state. When the substrate 100 is mounted on the hanger assembly 2 and in the second state, a coating can be applied to the surface of the substrate 100. The rotating component 3 can drive the hanger assembly 2 to rotate to either the first or second state, allowing the hanger assembly 2 to be at different angular positions relative to the cavity. When the substrate 100 is mounted on the hanger assembly 2, its angular position changes with the different states of the hanger assembly 2, improving the flexibility of the substrate 100 within the cavity to meet production requirements.

[0048] In one embodiment, a revolving frame 4 is provided in the cavity, and a hanging assembly 2 is rotatably connected to the revolving frame 4. The revolving frame 4 can drive the hanging assembly 2 to rotate around a first center line to dock with the rotating assembly 3. The rotating assembly 3 can drive the hanging assembly 2 to rotate around a second center line. Specifically, when multiple hanging assemblies 2 are provided in the cavity, the hanging assembly 2 can dock with the rotating assembly 3, thereby reducing the number of rotating assemblies 3.

[0049] This embodiment also provides a vacuum coating apparatus, such as... Figure 1 and Figure 2As shown, it includes a cavity, a hanger assembly 2, and the aforementioned rotating device. The rotating device drives the hanger assembly 2 to rotate, thereby changing the angular position of the substrate 100 located within the cavity, improving the flexibility of the substrate 100 within the cavity. In one embodiment, the hanger assembly 2 is disposed within the cavity, and the side wall of the cavity has a transport port. The hanger assembly 2 is used to support the substrate 100. The rotating device 3 can drive the hanger assembly 2 to rotate to be in a first state or a second state. When the hanger assembly 2 is in the first state or the second state, it is set at an angle. When the substrate 100 is mounted on the hanger assembly 2 and is in the second state, the surface of the substrate 100 faces the coating source area on the inner wall of the cavity for coating. When the substrate 100 is mounted on the hanger assembly 2 and the hanger assembly 2 is in the second state, the substrate 100 is coated. When the hanger assembly 2 faces the transport port and is in the first state, the side of the substrate 100, such as the side edge, faces the transport port or the substrate 100 is tilted towards the transport port. The substrate 100 can be removed from the hanger assembly 2 and passed through the transport port to be removed from the container, or the substrate 100 can pass through the transport port from the outside to be mounted on the hanger assembly 2. This avoids the substrate 100 facing directly through the transport port, effectively reducing the opening area of ​​the transport port, preventing contamination of the equipment inside the cavity, and reducing internal temperature consumption, thereby improving film quality and film formation efficiency. In other embodiments, the substrate 100 can be rotated by a rotating device to perform flip coating, etc., and the specific application scenario is not limited.

[0050] In one implementation, such as Figure 2 As shown, the angle between the hanger assembly 2 in the first state and the second state is 90°. The rotating assembly 3 can drive the hanger assembly 2 to rotate 90° forward or 90° in the reverse direction, so that the side of the substrate 100 faces the passage through the transport port, thereby minimizing the opening area of ​​the transport port.

[0051] In other embodiments, the angle between the hanger assembly 2 in the first state and the second state can be other angles and is not limited, so that the substrate 100 passes through the transport port at an angle, thereby reducing the opening area of ​​the transport port to a certain extent.

[0052] In one implementation, such as Figure 2As shown, a rotating frame 4 is provided inside the cavity, and the hanging assembly 2 is rotatably connected to the rotating frame 4. The rotating frame 4 can drive the hanging assembly 2 to rotate around a first center line. During film formation, the rotating frame 4 drives the hanging assembly 2 to rotate with the substrate 100. Specifically, there are a rotation position and a transport position. In the transport position, the hanging assembly 2 faces the transport port in a first state. When the substrate 100 is in the coating position with the hanging assembly 2, coating is performed. When the rotating frame 4 drives the hanging assembly 2 to the rotation position, the hanging assembly 2 docks with the rotating assembly 3. The rotating assembly 3 drives the hanging assembly 2 to rotate around a second center line. The first center line and the second center line are parallel or approximately parallel, so that the hanging assembly 2 rotates from the second state to the first state. When the rotating frame 4 drives the hanging assembly 2 to the transport position, that is, when it is in the transport position in the first state, the substrate 100 is hung or removed. Afterward, the rotating frame 4 drives the hanging assembly 2 to rotate to the rotation position, and the rotating assembly 3 drives the hanging assembly 2 to rotate in the opposite direction around the second center line, so that the hanging assembly 2 rotates from the first state to the second state. The rotating position and the transport position can be set separately, and multiple hanger assemblies 2 can perform corresponding work independently in the rotating position and the transport position simultaneously, improving work efficiency. Alternatively, the rotating position and the transport position can be in the same location. The specific setting of the rotating position and the transport position is related to the transport path outside the cavity, and the position is set according to requirements.

[0053] Furthermore, when all the hanger assemblies 2 of the rotating frame 4 are equipped with substrates 100 and all the hanger assemblies 2 are in the second state, the transport port is closed and coating is performed. Furthermore, a coating position can be set up independently of the rotation position and the transport position. Coating is performed when the substrate 100 rotates to the coating position; that is, the coating source structure is set at the coating position to prevent structural interference between the coating source structure and the rotating device or door flange, etc.

[0054] In one implementation, such as Figure 2 As shown, there are two sets of rotating components 3, located on both sides of the transport port along the rotation direction of the rotating frame 4. The rotating frame 4 drives the hanging assembly 2 to dock with the rotating components 3, so that the hanging assembly 2 moves from the second state to the first state. When moving from the first state to the second state, the rotating frame 4 only needs to rotate in one direction, which improves the work efficiency. Specifically, there is a first rotating position A and a second rotating position B, and the two rotating positions are respectively equipped with rotating components 3.

[0055] In one implementation, such as Figure 2 As shown, the conveying port includes an independent conveying inlet and a conveying outlet, and the conveying position includes a conveying out position C and a conveying in position D. The conveying out position C and the conveying in position D correspond to the conveying inlet and the conveying outlet, respectively. The conveying inlet and the conveying outlet are located between the two sets of rotating components 3. The substrate 100 is moved in through the conveying inlet and moved out through the conveying outlet. The substrate 100 can be moved in and out synchronously, which improves the work efficiency.

[0056] In one implementation, such as Figure 3 As shown, the hanger assembly 2 includes a connecting shaft 21 and a frame 22 connected to the connecting shaft 21. The base plate 100 is detachably connected to the frame 22. The revolving frame 4 is provided with a bearing assembly 43, through which the connecting shaft 21 passes. The rotating assembly 3 drives the connecting shaft 21 to rotate through the bearing assembly 43, causing the connecting shaft 21 to rotate, thus rotating the frame 22 and the base plate 100 connected to the frame 22. Furthermore, the frame 22 is provided with hooks 23, on which the base plate 100 is hung for easy placement and removal. Furthermore, the number of hooks 23 is not limited; for example, hooks 23 can be provided at both ends, allowing the base plate 100 to be hung at both ends, or hooks 23 can be provided at both ends and the middle, allowing the base plate 100 to be hung at both ends and the middle.

[0057] In one implementation, such as Figure 4 , Figure 5 and Figure 8 As shown, the rotating assembly 3 includes a rotating drive 31 and a rotating head 32. The rotating drive 31 is fixed to the cavity, and the rotating head 32 is connected to the output end of the rotating drive 31. The bracket assembly 2 can be connected to or disconnected from the rotating head 32. By engaging or disengaging the bracket assembly 2 with the rotating head 32, the bracket assembly 2 can rotate with the rotating assembly 3 at the corresponding angle, improving rotation accuracy and reliability. Specifically, when the revolving frame 4 drives the bracket assembly 2 into the rotating position, the bracket assembly 2 engages with the rotating head 32, so that the rotating drive 31 can rotate the bracket assembly 2 simultaneously with the rotating head 32. When the revolving frame 4 drives the bracket assembly 2 out of the rotating position, the bracket assembly 2 disengages from the rotating head 32. Specifically, the rotating head 32 is provided with a through groove 321, and one end of the connecting shaft 21 of the bracket assembly 2 is provided with a pin 24. The pin 24 can pass through or engage with the through groove 321, facilitating the connection or separation of the two.

[0058] In one implementation, such as Figure 4 , Figures 6-7As shown, a limiting component 6 and a lifting component 5 are provided between the hanger assembly 2 and the rotating frame 4. The limiting component 6 restricts the rotation of the hanger assembly 2. When the lifting component 5 drives the hanger assembly 2 to move forward to a specific position, the limiting component 6 is in a non-limited state and the hanger assembly 2 is docked with the rotating component 3. When the lifting component 5 drives the hanger assembly 2 to move backward to a specific position, the hanger assembly 2 is separated from the rotating component 3 and the limiting component 6 is in a limited state. By setting the limiting component 6, when the limiting component 6 is in the limited state, the hanger assembly 2 and the rotating frame 4 are limited, ensuring that the hanger assembly 2 and the substrate 100 on the hanger assembly 2 rotate simultaneously with the rotating frame 4, improving the coating effect and enabling accurate rotation to the coating position, rotation position, removal position C, and removal position D. The lifting component 5 can realize the transition between the limiting component 6 in the limited state and the non-limited state, as well as the transition between docking and separation of the hanger assembly 2 and the rotating component 3.

[0059] In one implementation, such as Figure 3 and Figure 7 As shown, the limiting component 6 includes two sets of first limiting components 61. Each first limiting component 61 includes a pin 611 and a socket 612. One pin 611 and the other socket 612 are located on the hanger assembly 2 and the other on the orbital frame 4. When the hanger assembly 2 moves, the pin 611 is inserted into or separated from the socket 612. When the hanger assembly 2 is in the first state, the first set of first limiting components 61 are in the limiting state, and the second set of first limiting components 61 are in the non-limiting state. When the hanger assembly 2 is in the second state, the first set of first limiting components 61 are in the limiting state. One set of first limiting components 61 is in a non-limited state, and the second set of first limiting components 61 is in a limited state; the precise positioning between the orbital frame 4 and the hanging frame assembly 2 is achieved through the cooperation of the pin 611 and the socket 612. By setting two sets of limiting components 6, the precise positioning between the hanging frame assembly 2 and the orbital frame 4 in the second state and the precise positioning between the hanging frame assembly 2 and the orbital frame 4 in the first state are respectively achieved, that is, the precise positioning of the hanging frame assembly 2 before and after the rotation is driven by the rotating component 3 is achieved.

[0060] In one implementation, such as Figure 7 As shown, the limiting component 6 includes a second limiting component 62, which includes a cross table 621 and a cross groove 622. One of the cross table 621 and the cross groove 622 is located on the hanger component 2, and the other is located on the orbital frame 4. When the hanger component 2 moves, the cross table 621 is inserted into or separated from the cross groove 622. The cross table 621 and the cross groove 622 cooperate at different angles to achieve coarse positioning of the hanger component 2 with the tooling frame in the second state or the first state, respectively.

[0061] In one implementation, such as Figure 4 and Figure 6As shown, the lifting assembly 5 and the rotating assembly 3 are correspondingly arranged. Further, each rotating position is provided with a lifting assembly 5 and a rotating assembly 3, which are respectively located at both ends of the hanging bracket assembly 2. Specifically, the lifting assembly 5 includes a lifting drive 51 and a lifting head 52. The lifting drive 51 is fixed to the cavity, and the lifting head 52 is connected to the output end of the lifting drive 51. The lifting drive 51 drives the hanging bracket assembly 2 to move through the lifting head 52, so as to engage or disengage with the rotating assembly 3.

[0062] In one implementation, such as Figure 2 As shown, the orbital frame 4 includes a frame 41, two upper and lower turntables 42 arranged around the frame 41, and a connecting shaft 21 bearing assembly 43 on the turntable 42. The connecting shaft 21 passes through the bearing assembly 43, and one end can be connected to the rotating head 32, and the other end can be connected to the lifting head 52.

[0063] In one implementation, such as Figure 3 and Figure 4 As shown, the bearing assembly 43 includes a linear bearing, which is fixed to the turntable 42. The lifting assembly 5 drives the connecting shaft 21 to move along the linear bearing, and the rotating assembly 3 drives the connecting shaft 21 to rotate within the linear bearing. Similarly, in one embodiment, the bearing assembly 43 includes an oil-free bushing, and the connecting shaft 21 can move or rotate within the oil-free bushing.

[0064] The process using the above-mentioned vacuum coating equipment includes:

[0065] Step 1: The hanger assembly 2 in the second state docks with the rotating assembly 3, and the rotating assembly 3 drives the hanger assembly 2 to the first state;

[0066] Step 2: The bracket assembly 2 separates from the rotating assembly 3, and the bracket assembly 2 remains in the first state;

[0067] Step 3: The hanger assembly 2 in the first state docks with the rotating assembly 3, and the rotating assembly 3 drives the hanger assembly 2 to the second state;

[0068] Step 4: The bracket assembly 2 separates from the rotating assembly 3, and the bracket assembly 2 remains in the second state.

[0069] After the substrate 100 has completed the coating process within the cavity, steps one and two are performed to rotate it so that the substrate 100 can be removed. Then, a new substrate 100 is installed, and steps three and four are performed to adjust the position of the substrate 100 for the next coating step.

[0070] Specifically, it also includes the following steps:

[0071] Step 1: After the substrate 100 completes the coating in the film deposition chamber of the cavity, the rotating frame 4 carries the hanging assembly 2 and the coated substrate 100 to the first rotation position A, and the rotating assembly 3 drives the hanging assembly 2 to rotate to the first state.

[0072] Specifically, the docking process between the hanger assembly 2 and the rotating assembly 3 includes:

[0073] Step A: The lifting drive 51 drives the lifting head 52 to rise. After rising a certain distance, the lifting head 52 begins to contact the connecting shaft 21. Then, the lifting head 52 simultaneously lifts the connecting shaft 21, the frame 22, and the base plate 100. Due to the action of the limiting component 6 and the linear bearing, the bracket assembly 2 and the base plate 100 can only rise. As it continues to rise, the second limiting component 62 and the first limiting component 61 release their limits in sequence until the pin 24 on the connecting shaft 21 engages with the through groove 321 of the rotating head 32.

[0074] Step B: The rotation drive 31 drives the rotating head 32 and the connecting shaft 21 to rotate, thereby driving the frame 22 and the base plate 100 to rotate until the hanger assembly 2 is in the first state.

[0075] Specifically, the separation process of the hanger assembly 2 and the rotating assembly 3 includes:

[0076] Step C: The lifting drive component 51 drives the lifting head 52 to descend. The second limit component 62 and the first limit component 61 perform limit functions in sequence. The bracket component 2 descends to the initial position. The lifting drive component 51 drives the lifting head 52 to continue descending until the lifting head 52 separates from the connecting shaft 21.

[0077] Step 2: The rotating frame 4, carrying the hanging frame assembly 2 and the plated substrate 100, rotates to the removal position C. The plated substrate 100 is then removed from the hanging frame assembly 2 and transported out by a handling robot.

[0078] Step 3: The rotating frame 4, carrying the hanging bracket assembly 2, rotates to the loading position D, and the substrate 100 is passed through the handling port and hung on the hanging bracket assembly 2 by the handling robot.

[0079] Step 4: The orbiter 4 rotates the hanger assembly 2 to the second rotation position B, and the rotating assembly 3 drives the hanger assembly 2 and the substrate 100 on the hanger assembly 2 to rotate to the second state;

[0080] Step 5: The rotating frame 4, carrying the hanging frame assembly 2 and the substrate 100, rotates to the coating position to achieve coating;

[0081] Repeat the above steps in sequence to achieve the loading, coating and unloading of substrate 100.

[0082] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the implementation of the present invention. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included within the scope of protection of the claims of the present invention.

Claims

1. A rotating device disposed in a cavity, wherein a hanging bracket assembly (2) is provided within the cavity, the hanging bracket assembly (2) being used to support a substrate (100), characterized in that, The rotating device includes a rotating component (3), the output end of which is used to dock with the hanging component (2) and drive the hanging component (2) to rotate, so that the hanging component (2) rotates to be in a first state or a second state. When the substrate (100) is mounted on the hanging component (2) and is in the second state, the surface of the substrate (100) can be coated. The cavity is provided with a revolution frame (4), and the hanging bracket assembly (2) is rotatably connected to the revolution frame (4). The revolution frame (4) can drive the hanging bracket assembly (2) to rotate around the first center line to dock with the rotating assembly (3). The rotating assembly (3) can drive the hanging bracket assembly (2) to rotate around the second center line. The cavity is equipped with a transport port. The rotating assembly (3) is provided in two sets, with the two sets of rotating assemblies (3) located on both sides of the conveying port along the rotation direction of the revolution frame (4); and / or The transport port includes a transport inlet and a transport outlet; The first centerline and the second centerline are parallel; A limiting component (6) and a lifting component (5) are provided between the hanging bracket assembly (2) and the revolving frame (4). The limiting component (6) can restrict the rotation of the hanging bracket assembly (2). When the lifting component (5) drives the hanging bracket assembly (2) to move forward, the limiting component (6) is in a non-limited state and the hanging bracket assembly (2) is connected to the rotating component (3). When the lifting component (5) drives the hanging bracket assembly (2) to move in the reverse direction, the hanging bracket assembly (2) is separated from the rotating component (3) and the limiting component (6) is in a limited state. Two sets of first limiting components (61), each first limiting component (61) includes a pin (611) and a socket (612). One pin (611) and the other socket (612) are located on the hanger assembly (2) and the other on the orbital frame (4). When the hanger assembly (2) moves, the pin (611) is inserted into or separated from the socket (612). When the hanger assembly (2) is in the first transport state, the first set of first limiting components (61) is in a limiting state, and the second set of first limiting components (61) is in a non-limiting state. When the hanger assembly (2) is in the second film-forming state, the first set of first limiting components (61) is in a non-limiting state, and the second set of first limiting components (61) is in a limiting state; and / or The second limiting component (62) includes a cross platform (621) and a cross groove (622). One of the cross platform (621) and the cross groove (622) is located on the bracket assembly (2), and the other is located on the revolving frame (4). When the bracket assembly (2) moves, the cross platform (621) is inserted into or separated from the cross groove (622). The lifting assembly (5) is provided in correspondence with the rotating assembly (3). The lifting assembly (5) includes a lifting drive (51) and a lifting head (52). The lifting drive (51) is fixed to the cavity. The lifting head (52) is connected to the output end of the lifting drive (51). The lifting drive (51) drives the hanging bracket assembly (2) to move through the lifting head (52).

2. The rotating device according to claim 1, characterized in that, The rotating assembly (3) includes a rotating drive (31) and a rotating head (32). The rotating drive (31) is fixed to the cavity, and the rotating head (32) is connected to the output end of the rotating drive (31). The bracket assembly (2) can be connected to or separated from the rotating head (32).

3. The rotating device according to claim 1, characterized in that, The hanger assembly (2) includes a connecting shaft (21) and a frame (22) connected to the connecting shaft (21). The base plate (100) is detachably connected to the frame (22). The revolving frame (4) is provided with a bearing assembly (43). The connecting shaft (21) passes through the bearing assembly (43). The rotating assembly (3) is driven to be connected to the connecting shaft (21).

4. The rotating device according to claim 3, characterized in that, The bearing assembly (43) includes linear bearings or oilless bushings.

5. The rotating device according to any one of claims 1-4, characterized in that, The included angle between the hanger assembly (2) in the first state and the second state is 90°.

6. A vacuum coating apparatus, characterized in that, It includes a cavity, a hanger assembly (2), and a rotating device as described in any one of claims 1-5, the rotating device being capable of driving the hanger assembly (2) to rotate.

7. A method using the vacuum coating equipment of claim 6, characterized in that, include: The hanger assembly (2) in the second state docks with the rotating assembly (3), and the rotating assembly (3) drives the hanger assembly (2) to the first state; The bracket assembly (2) is separated from the rotating assembly (3), and the bracket assembly (2) remains in the first state; The hanger assembly (2) in the first state docks with the rotating assembly (3), and the rotating assembly (3) drives the hanger assembly (2) to the second state; The hanger assembly (2) is separated from the rotating assembly (3), and the hanger assembly (2) remains in the second state.

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