Temperature-stable lead zirconate titanate-based high temperature piezoelectric ceramic and method of making same

By controlling the composition and preparation process of lead zirconate titanate-based high-temperature piezoelectric ceramics, the problem of unstable resonant frequency of piezoelectric ceramics at high temperatures was solved, resulting in piezoelectric ceramic materials with high temperature stability and high piezoelectric performance, suitable for device applications in high-temperature environments.

CN117534463BActive Publication Date: 2025-11-04JIANGCI ELECTRONICS (SUZHOU) CO LTD
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Patent Information

Application Number
CN202311553130.3
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2023-11-21
Publication Date
2025-11-04
Estimated Expiration
2043-11-21

AI Technical Summary

Technical Problem

Existing piezoelectric ceramics are sensitive to temperature fluctuations in high-temperature environments, leading to unstable device performance. This is especially true in applications such as aerospace and energy development, where the complexity and cost of the driving circuits increase.

Method used

By controlling the composition of lead zirconate titanate-based high-temperature piezoelectric ceramics, piezoelectric ceramics of (1-xy)Pb(Yb1/2Nb1/2)O3-yPbZrO3-xPbTiO3 were prepared. Combined with specific preparation process steps, including ball milling, drying, calcination, cold isostatic pressing and sintering, piezoelectric ceramic materials with high temperature stability were obtained.

Benefits of technology

It achieves stability of piezoelectric ceramics with a resonant frequency temperature coefficient of less than 0.5% at high temperatures, and has both high Curie temperature and high voltage constant, making it suitable for high-temperature or high-excitation devices.

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Abstract

The application discloses a temperature-stable lead zirconate titanate-based high-temperature piezoelectric ceramic and a preparation method thereof. The molecular formula of the lead zirconate titanate-based high-temperature piezoelectric ceramic is (1-x-y)Pb(Yb 1 / 2 Nb 1 / 2 )O3-yPbZrO3-xPbTiO3, wherein x is in the range of 0.4-0.6, and y is in the range of 0.4-0.6. The application realizes excellent Curie temperature (TC~400 DEG C), piezoelectric constant (d33~450 pC / N) and high coercive field (EC~17.5 kV / cm) at the same time, and realizes excellent temperature stability in a tetragonal phase sample.
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Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of piezoelectric ceramics, and particularly to a temperature-stable lead zirconate titanate-based high-temperature piezoelectric ceramic and a preparation method thereof. BACKGROUND

[0002] Piezoelectric ceramics are often in a high-temperature state during use. The high temperature is derived from two aspects. On the one hand, it comes from the external environment. Piezoelectric ceramic devices used in some special fields are in a high-temperature environment. For example, piezoelectric ceramic devices used in the military field can work at a temperature of 125℃; pressure sensors used in energy development and deep well exploration can work at a temperature of 200℃; vibration sensors and piezoelectric fuel injectors used in the automotive field can work at a maximum temperature of 300℃; and piezoelectric acceleration sensors used in the aerospace field can work at an even higher temperature. On the other hand, it comes from the dielectric loss and mechanical loss of piezoelectric ceramics. The above two reasons cause piezoelectric ceramics to be in a high-temperature state during use. Changes in the working temperature will cause changes in the performance of piezoelectric ceramics, which will seriously affect the use of piezoelectric ceramic devices. In order to ensure the stable operation of piezoelectric devices, it is necessary to minimize the amplitude of the change in the performance parameters of piezoelectric ceramics with temperature. Therefore, it is very important to study the temperature stability of piezoelectric ceramics.

[0003] Piezoelectric ceramic materials can achieve efficient conversion between mechanical energy and electrical energy, and have been widely used in ultrasonic detection, mobile communication, artificial intelligence and other high-tech fields. However, different application fields have different requirements for the performance of piezoelectric ceramics. For example, in the fields of aerospace and energy development, piezoelectric ceramics are required to have high Curie temperature and good resonance frequency temperature stability at the same time, so as to ensure that piezoelectric ceramics will not be degraded in performance due to temperature changes. Typical ternary zirconate titanate-based piezoelectric ceramics, such as lead magnesium niobate-lead zirconate titanate (PMN-PZT) and lead nickel niobate-lead zirconate titanate (PNN-PZT), have a Curie temperature T C lower than 250℃. If the actual use temperature of piezoelectric ceramics is calculated as half of T C , the actual use temperature is lower than 130℃. The T C of PYN-PZT ternary ceramic is as high as 395℃, and the actual use temperature is close to 200℃, so PYN-PZT ceramic has the potential to be applied in high-temperature fields.

[0004] However, the piezoelectric ceramic is very sensitive to the fluctuation of the resonance frequency to the temperature during use. The change of the resonance frequency constant will directly cause the resonance frequency of the piezoelectric ceramic to drift. For piezoelectric devices such as filters, resonators and ultrasonic motors, their working frequency is the resonance frequency point, and if the resonance frequency drifts, the driving circuit will need to additionally add a frequency automatic tracking loop, thereby making the driving circuit more complex and higher in cost, which is not conducive to the application of the device. Therefore, the temperature stability of the resonance frequency of the piezoelectric ceramic is an urgent problem to be solved. The lead ytterbium zirconate titanate (PYN-PZT) ternary solid solution has excellent comprehensive performance, and compared with the PZT piezoelectric ceramic, it has high piezoelectric constant (d 33 ~ 450 pC / N) and high Curie temperature (T C ~ 400℃), and for the composition of the tetragonal phase, the resonance frequency temperature coefficient (Δf r / f r25℃ ) remains within 0.5% from room temperature to 300℃, becoming an important high-temperature piezoelectric device manufacturing material.

[0005] For the commercial application of the piezoelectric ceramic, the piezoelectric device must be stably operated within the working temperature range. When the performance of the piezoelectric device changes with the temperature, the driving of the piezoelectric device is difficult to control or the working performance is reduced, and therefore the temperature stability of the piezoelectric material is the primary consideration. Among them, the resonance frequency and the piezoelectric constant are very sensitive to the fluctuation of the temperature, and therefore it is very urgent to study the temperature stability of the resonance frequency and the piezoelectric constant of the piezoelectric ceramic. However, at present, there are few studies on the temperature stability of the PYN-PZT system piezoelectric ceramic. SUMMARY

[0006] The purpose of the present application is to provide a temperature-stable lead zirconate titanate-based high-temperature piezoelectric ceramic and a preparation method thereof, so as to solve the problems raised in the above background art.

[0007] In a first aspect, the present application provides a temperature-stable lead zirconate titanate-based high-temperature piezoelectric ceramic, the molecular formula of the lead zirconate titanate-based high-temperature piezoelectric ceramic is (1-x-y)Pb(Yb 1 / 2 Nb 1 / 2 )O3-yPbZrO3-xPbTiO3, wherein x is in the range of 0.4-0.6, and y is in the range of 0.4-0.6.

[0008] In some embodiments, the lead zirconate titanate-based high-temperature piezoelectric ceramic with the molecular formula of (1-x-y)Pb(Yb 1 / 2 Nb 1 / 2 )O3-yPbZrO3-xPbTiO3 has x = 0.28 and y = 0.52, and the resonance frequency temperature coefficient (Δf r / f r25℃) from room temperature to 300℃ is less than 0.5%.

[0009] In some embodiments, the large signal piezoelectric coefficient (d 33 * ) of the lead zirconate titanate-based high temperature piezoelectric ceramic is 400-750 pm / V.

[0010] In some embodiments, the small signal piezoelectric coefficient (d 33 ) of the lead zirconate titanate-based high temperature piezoelectric ceramic is 210-485 pC / N.

[0011] In some embodiments, the Curie temperature of the lead zirconate titanate-based high temperature piezoelectric ceramic is 350-450℃

[0012] In some embodiments, the crystal structure of the lead zirconate titanate-based high temperature piezoelectric ceramic is perovskite structure.

[0013] In a second aspect, the present application provides a preparation method of the temperature-stable lead zirconate titanate-based high temperature piezoelectric ceramic, comprising the following steps:

[0014] Step S1, raw materials are weighed according to the stoichiometric ratio of YbNbO4, the raw materials including Yb2O3 and Nb2O5, the weighed raw materials are mixed uniformly and then loaded into a nylon tank, zirconium balls are used as grinding balls, anhydrous ethanol is used as a ball milling medium, and the mixture is fully mixed and ball milled at 150-300 revolutions per minute for 18-24 hours, the zirconium balls are separated, the raw material mixture is dried at 80-100℃ for 12-24 hours, and then ground with a mortar and sieved through an 80-mesh sieve; the sieved powder is placed in an alumina crucible, covered, and calcined at 1000-1100℃ for 5-10 hours to synthesize YbNbO4 precursor powder;

[0015] Step S2, raw materials are configured according to the stoichiometric ratio of (1-x-y)Pb(Yb 1 / 2 Nb 1 / 2 )O3-yPbZrO3-xPbTiO3 (x is in the range of 0.4-0.6, and y is in the range of 0.4-0.6), the weighed raw materials are mixed uniformly and then loaded into a nylon tank, zirconium balls are used as grinding balls, anhydrous ethanol is used as a ball milling medium, and the mixture is fully mixed and ball milled at 150-300 revolutions per minute for 18-24 hours, the zirconium balls are separated, the raw material mixture is dried at 80-100℃ for 12-24 hours, and then ground with a mortar and sieved through an 80-mesh sieve;

[0016] Step S3, the sieved raw material mixture in step S2 is placed in an alumina crucible, compacted with a jade bar, and the compacted density is 1.5 g / cm 3 , covered, pre-fired at 750-800℃ for 4-6 hours, naturally cooled to room temperature, ground with a mortar, and a pre-fired powder is obtained;

[0017] Step S4, the pre-sintered powder is put into a nylon tank, zirconium balls are used as grinding balls, and anhydrous ethanol is used as the ball milling medium, the grinding balls are separated after fully mixing and ball milling for 12-24 hours, the pre-sintered powder is dried at 80-100℃ for 12-24 hours, and is ground by a mortar and is passed through a 180-mesh screen;

[0018] Step S5, the pre-sintered powder passed through the 180-mesh screen is first pressed into a cylindrical blank by a powder tablet press, and then is cold isostatic pressed at a pressure of 200-300MPa for 15-20 minutes;

[0019] Step S6, the cylindrical blank is placed on a zirconia flat plate, the zirconia flat plate is placed in an alumina closed sagger, and is heated to 1100-1200℃ at a heating rate of 2-5℃ / min, and is sintered for 3-5 hours, and is naturally cooled to room temperature in the furnace;

[0020] Step S7, the surface of one sample of the sintered ceramic in step S6 is first polished by using 320-mesh sandpaper, then is polished by using 800-mesh sandpaper, and finally is polished to a thickness of 0.5-0.6mm by using 1500-mesh sandpaper and diamond sand, and is cleaned by using alcohol.

[0021] Step S8, the upper and lower surfaces of the ceramic polished in step S7 are coated with silver paste with a thickness of 0.01-0.03mm, and are placed in an electric resistance furnace and are kept at 600℃ for 30 minutes, and are naturally cooled to room temperature, to prepare a PYN-PZT piezoelectric ceramic material.

[0022] In some embodiments, in step S7, the sintering temperature is 1100-1300℃, and the sintering time is 1-5 hours.

[0023] In some embodiments, the PYN-PZT piezoelectric ceramic material has a thickness of 0.8-1.5mm and a diameter of 8-15mm.

[0024] Preferably, in step S2, the raw materials are weighed according to 0.2Pb(Yb 1 / 2 Nb 1 / 2 )O3-0.4PbZrO3-0.4PbTiO3, and 66.2130g of PbO with a purity of 99.9%, 9.7883g of YbNbO4, 14.6218g of ZrO2 with a purity of 99.9%, and 9.4770g of TiO2 with a purity of 99.9% are weighed as raw materials.

[0025] Compared with the prior art, the present application has the following advantages:

[0026] The present application obtains piezoelectric ceramics with high temperature stability by controlling the composition of the material and solving the process problems existing in the material industrialization. Secondly, by studying the composition and phase structure, the problem of difficult coexistence of high piezoelectric performance and high Curie temperature and high coercive field is overcome, and piezoelectric ceramics with excellent comprehensive performance are obtained. Compared with the PZT ceramic materials and other ternary system PZT-based piezoelectric ceramics currently used, the piezoelectric ceramics prepared by the present application realize the coexistence of excellent Curie temperature (T C ~400℃), piezoelectric constant (d 33 ~450pC / N) and high coercive field (E C ~17.5kV / cm). And in the sample of tetragonal phase, excellent temperature stability is realized, and the resonant frequency temperature coefficient (Δf r / f r 25℃ ) is maintained below 0.5% from room temperature to 300℃. The prepared piezoelectric ceramics can be applied to high temperature or high excitation device applications. BRIEF DESCRIPTION OF DRAWINGS

[0027] In order to more clearly illustrate the specific embodiments of the present application or the technical solutions in the prior art, the drawings needed in the specific embodiments or prior art description will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present application, and other drawings can also be obtained by those skilled in the art without creative labor.

[0028] Figure 1 is the X-ray diffraction (XRD) pattern of the lead ytterbium niobate-lead zirconate titanate high temperature piezoelectric ceramic prepared in Example 1 and Example 5.

[0029] Figure 2 is the cross-sectional morphology of the scanning electron microscope (SEM) image of the lead ytterbium niobate-lead zirconate titanate high temperature piezoelectric ceramic prepared in Example 1.

[0030] Figure 3 is a graph showing the trend of the dielectric constant of the lead ytterbium niobate-lead zirconate titanate high temperature piezoelectric ceramic prepared in Examples 1-5 with temperature.

[0031] Figure 4 is a graph showing the temperature dependence of the large signal piezoelectric constant d33* of the lead ytterbium niobate-lead zirconate titanate high temperature piezoelectric ceramic prepared in Examples 3 and 5.

[0032] Figure 5 is a graph showing the temperature dependence of the impedance of the lead ytterbium niobate-lead zirconate titanate high temperature piezoelectric ceramic prepared in Example 5.

[0033] Figure 6is a graph of the temperature dependence of the phase angle at the resonance of the lead-ytterbium zirconate-lead titanate high temperature piezoelectric ceramic prepared in Example 5.

[0034] Figure 7 is a graph of the temperature dependence of the resonance frequency temperature coefficient of the lead-ytterbium zirconate-lead titanate high temperature piezoelectric ceramic prepared in Examples 1-5.

[0035] Figure 8 is a process flow chart of the entire process of the present application. DETAILED DESCRIPTION

[0036] The present application will be described in detail below, and the technical solutions in the embodiments of the present application will be clearly and completely described. Obviously, the described embodiments are only some of the embodiments of the present application, but not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0037] The present application provides a temperature-stable lead zirconate titanate-based high temperature piezoelectric ceramic and a preparation method thereof by improvement. The technical solutions of the present application are:

[0038] As shown in Figure 8 , in an embodiment, a preparation method of a temperature-stable lead zirconate titanate-based high temperature piezoelectric ceramic is provided, comprising the following steps:

[0039] Step S1, raw materials are weighed according to the stoichiometric ratio of YbNbO4, the raw materials including Yb2O3 and Nb2O5, after the weighed raw materials are mixed uniformly, they are loaded into a nylon tank, zirconium oxide balls are used as grinding balls, anhydrous ethanol is used as a ball milling medium, a ball mill is used to mix and mill at 150-300 revolutions per minute for 18-24 hours, the zirconium balls are separated, the raw material mixture is dried at 80-100°C for 12-24 hours, is ground with a mortar, and is sieved through an 80-mesh sieve; the sieved powder is placed in an alumina crucible, covered, calcined at 1000-1100°C for 5-10 hours to synthesize YbNbO4 precursor powder;

[0040] Step S2, (1-x-y)Pb(Yb 1 / 2 Nb 1 / 2)O3-yPbZrO3-xPbTiO3 stoichiometric ratio (x value range is 0.4-0.6, y value range is 0.4-0.6) configuration raw materials, after the weighing of all the raw materials are mixed evenly into nylon tank, with zirconium ball as the grinding ball, anhydrous ethanol as the ball milling medium, fully mixed ball milling 18-24 hours, separate zirconium ball, the raw material mixture is dried at 80-100 ℃ for 12-24 hours, grinding with a mortar, 80 mesh sieve; specifically, in step S2, according to 0.2Pb(Yb1 / 2Nb1 / 2)O3-0.4PbZrO3-0.4PbTiO3, respectively, purity of 99.9% PbO 66.2130 g, YbNbO4 9.7883 g, purity of 99.9% ZrO2 14.6218 g and purity of 99.9% TiO2 9.4770 g as raw materials.

[0041] Step S3, the raw material mixture after 80 mesh sieve in step S2 is placed in an alumina crucible, compaction with agate rod, so that the compaction density is 1.5 g / cm 3 , cover, 750-800 ℃ pre-sintering 4-6 hours, natural cooling to room temperature, grinding with a mortar, to get pre-sintered powder;

[0042] Step S4, the pre-sintered powder is loaded into a nylon tank, with zirconium ball as the grinding ball, anhydrous ethanol as the ball milling medium, fully mixed ball milling 12-24 hours, separate zirconium ball, the pre-sintered powder is dried at 80-100 ℃ for 12-24 hours, grinding with a mortar, 180 mesh sieve;

[0043] Step S5, first, the pre-sintered powder after 180 mesh sieve is pressed into a cylindrical blank with a powder tablet press, then cold isostatic pressing at a pressure of 200-300 MPa for 15-20 minutes;

[0044] Step S6, the cylindrical blank is placed on a zirconia flat plate, the zirconia flat plate is placed in an alumina closed box, with a heating rate of 2-5 ℃ / min to 1100-1200 ℃, sintering for 3-5 hours, and natural cooling to room temperature with the furnace;

[0045] Step S7, first, the surface of one of the samples after sintering in step S6 is polished with 320 mesh sandpaper, then polished with 800 mesh sandpaper, and finally polished with 1500 mesh sandpaper and diamond sandpaper to 0.5-0.6 mm thick, and cleaned with alcohol; in an embodiment, in step S7, the sintering temperature is 1100-1300 ℃, and the sintering time is 1-5 hours.

[0046] Step S8, after polishing the ceramic upper and lower surfaces in step S7, silver paste with a thickness of 0.01-0.03 mm is coated on the ceramic upper and lower surfaces, and the ceramic is placed in an electric resistance furnace at 600°C for 30 minutes, and then naturally cooled to room temperature to prepare a PYN-PZT piezoelectric ceramic material. In an embodiment, the PYN-PZT piezoelectric ceramic material has a thickness of 0.8-1.5 mm and a diameter of 8-15 mm.

[0047] Example 2

[0048] The difference from Example 1 is that 67.4225 g of Pb3O4 with a purity of 99.9%, 9.7345 g of YbNbO4, 11.6227 g of ZrO2 with a purity of 99.9%, and 11.3099 g of TiO2 with a purity of 99.9% are weighed as raw materials and uniformly mixed to prepare 0.2Pb(Yb 1 / 2 Nb 1 / 2 )O3-0.32PbZrO3-0.48PbTiO3 piezoelectric ceramic material.

[0049] Example 3

[0050] The difference from Example 1 is that 67.5088 g of Pb3O4 with a purity of 99.9%, 9.7470 g of YbNbO4, 11.2739 g of ZrO2 with a purity of 99.9%, and 11.5603 g of TiO2 with a purity of 99.9% are weighed as raw materials and uniformly mixed to prepare 0.2Pb(Yb 1 / 2 Nb 1 / 2 )O3-0.31PbZrO3-0.49PbTiO3 piezoelectric ceramic material.

[0051] Example 4

[0052] The difference from Example 1 is that 67.5952 g of Pb3O4 with a purity of 99.9%, 9.7595 g of YbNbO4, 10.9242 g of ZrO2 with a purity of 99.9%, and 11.8113 g of TiO2 with a purity of 99.9% are weighed as raw materials and uniformly mixed to prepare 0.2Pb(Yb 1 / 2 Nb 1 / 2 )O3-0.30PbZrO3-0.50PbTiO3 piezoelectric ceramic material.

[0053] Example 5

[0054] The difference from Example 1 is that 67.7698 g of Pb3O4 with a purity of 99.9%, 9.7846 g of YbNbO4, 10.2221 g of ZrO2 with a purity of 99.9%, and 12.3153 g of TiO2 with a purity of 99.9% are weighed as raw materials and uniformly mixed to prepare 0.2Pb(Yb 1 / 2 Nb 1 / 2)O3-0.52PbZrO3-0.28PbTiO3 piezoelectric ceramic material.

[0055] Example 6

[0056] A temperature-stable lead zirconate titanate-based high-temperature piezoelectric ceramic is provided, which can be prepared by the method for preparing a temperature-stable lead zirconate titanate-based high-temperature piezoelectric ceramic provided in the above embodiments. The molecular formula of the lead zirconate titanate-based high-temperature piezoelectric ceramic is (1-xy)Pb(Yb). 1 / 2 Nb 1 / 2 The formula is O3-yPbZrO3-xPbTiO3, where x ranges from 0.4 to 0.6 and y ranges from 0.4 to 0.6.

[0057] In one embodiment, the molecular formula is (1-xy)Pb(Yb) 1 / 2 Nb 1 / 2 In the lead zirconate titanate-based high-temperature piezoelectric ceramic of O3-yPbZrO3-xPbTiO3, x = 0.28, y = 0.52, and the temperature coefficient of resonant frequency (Δf) r / f r (25℃) From room temperature to 300℃, the percentage is less than 0.5%.

[0058] In one embodiment, the large-signal piezoelectric coefficient (d) of the lead zirconate titanate-based high-temperature piezoelectric ceramic 33 * The value is 400–750 pm / V.

[0059] In one embodiment, the small-signal piezoelectric coefficient (d) of the lead zirconate titanate-based high-temperature piezoelectric ceramic 33 The value is 210–485 pC / N.

[0060] In one embodiment, the Curie temperature of the lead zirconate titanate-based high-temperature piezoelectric ceramic is 350°C to 450°C.

[0061] In one embodiment, the crystal structure of the lead zirconate titanate-based high-temperature piezoelectric ceramic is a perovskite structure.

[0062] Figure 1 These are X-ray diffraction (XRD) patterns of the lead ytterbate-lead zirconate titanate high-temperature piezoelectric ceramics prepared in Examples 1 and 5. All prepared piezoelectric ceramics have a pure perovskite structure and no second phase.

[0063] Figure 2 This is a scanning electron microscope (SEM) image of the cross-sectional morphology of the lead ytterbate-lead zirconate titanate high-temperature piezoelectric ceramic prepared in Example 1. The prepared piezoelectric ceramic has uniform grain size and a dense structure. Figure 3is a graph showing the temperature dependence of the dielectric constant of the lead- ytterium niobate-lead zirconate titanate high temperature piezoelectric ceramics prepared in Examples 1 to 5. The prepared piezoelectric ceramics all have high Curie temperature.

[0064] Figure 4 is Figure 1 is a graph showing the temperature dependence of the large signal piezoelectric constant d 33 * of the lead-ytterium niobate-lead zirconate titanate high temperature piezoelectric ceramics prepared in Examples 3 and 5. The piezoelectric constant of the piezoelectric ceramics of Examples 3 and 5 remains substantially unchanged with the increase of temperature. Figure 5 is a graph showing the temperature dependence of the impedance of the lead-ytterium niobate-lead zirconate titanate high temperature piezoelectric ceramics prepared in Example 5. The prepared piezoelectric ceramics maintain stable resonance peak from room temperature to 350℃.

[0065] Figure 6 is a graph showing the temperature dependence of the phase angle at resonance of the lead-ytterium niobate-lead zirconate titanate high temperature piezoelectric ceramics prepared in Example 5.

[0066] Figure 7 is a graph showing the temperature dependence of the resonance frequency temperature coefficient of the lead-ytterium niobate-lead zirconate titanate high temperature piezoelectric ceramics prepared in Examples 1 to 5. The piezoelectric ceramics of Example 5 maintain stable resonance frequency up to 300℃.

[0067] The present application obtains piezoelectric ceramics with high temperature stability by controlling the composition of the material and solving the process problems existing in the material industrialization. Secondly, by studying the composition and phase structure, the problem of difficult coexistence of high piezoelectric performance and high Curie temperature and coercive field is overcome, and piezoelectric ceramics with excellent comprehensive performance are obtained. Compared with the PZT ceramic materials and other ternary system PZT-based piezoelectric ceramics currently used, the piezoelectric ceramics prepared in the present application realize the coexistence of excellent Curie temperature (T C ~400℃), piezoelectric constant (d 33 ~450pC / N) and high coercive field (E C ~17.5kV / cm). And in the sample of tetragonal phase, excellent temperature stability is realized, and the resonance frequency temperature coefficient (Δf r / f r 25℃ ) remains below 0.5% from room temperature to 300℃. The prepared piezoelectric ceramics can be applied to high temperature or high excitation device applications.

[0068] The foregoing description enables one of ordinary skill in the art to make or use the application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein can be applied to other embodiments without departing from the spirit or scope of the application. Thus, the present application is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A temperature-stable lead zirconate titanate-based high-temperature piezoelectric ceramic, characterized in that: The molecular formula of the lead zirconate titanate-based high-temperature piezoelectric ceramic is (1-xy)Pb(Yb 1 / 2 Nb 1 / 2 )O3-yPbZrO3- x PbTiO3; where x =0.28, y =0.52, temperature coefficient of resonant frequency (Δ f r / f r (25ºC) Less than 0.5% from room temperature to 300ºC; The Curie temperature of the lead zirconate titanate-based high-temperature piezoelectric ceramic is 405ºC.

2. The temperature-stable lead zirconate titanate-based high-temperature piezoelectric ceramic according to claim 1, characterized in that: The crystal structure of the lead zirconate titanate-based high-temperature piezoelectric ceramic is a perovskite structure.

3. A method for preparing a temperature-stable lead zirconate titanate-based high-temperature piezoelectric ceramic as described in claim 1, characterized in that, Includes the following steps: Step S1: Weigh the raw materials according to the stoichiometric ratio of YbNbO4. The raw materials include Yb2O3 and Nb2O5. Mix all the weighed raw materials evenly and put them into a nylon can. Use zirconia balls as grinding balls and anhydrous ethanol as the ball milling medium. Use a ball mill at 150-300 rpm to mix and mill for 18-24 hours. Separate the zirconia balls. Dry the raw material mixture at 80℃-100℃ for 12-24 hours. Grind it with a mortar and pestle and pass it through an 80-mesh sieve. Place the sieved powder in an alumina crucible, cover it, and calcine it at 1000℃-1100℃ for 5-10 hours to synthesize YbNbO4 precursor powder. Step S2, according to (1-xy)Pb(Yb) 1 / 2 Nb 1 / 2 )O3-yPbZrO3- x The raw materials are prepared according to the stoichiometric ratio of PbTiO3, including synthesized YbNbO4 precursor powder; After weighing and mixing all the raw materials evenly, put them into a nylon can, use zirconium balls as grinding balls and anhydrous ethanol as the grinding medium, mix and grind for 18 to 24 hours, separate the zirconium balls, dry the raw material mixture at 80 to 100°C for 12 to 24 hours, grind with a mortar and pestle, and pass through an 80-mesh sieve. Step S3: Place the raw material mixture that has passed through an 80-mesh sieve in step S2 into an alumina crucible and compact it with an agate rod to achieve a compaction density of 1.5 g / cm³. 3 Cover and pre-fire at 750-800℃ for 4-6 hours. Let it cool naturally to room temperature and grind it in a mortar and pestle to obtain pre-fired powder. Step S4: Load the pre-calcined powder into a nylon can, use zirconium balls as grinding balls and anhydrous ethanol as the grinding medium, mix and grind thoroughly for 12-24 hours, separate the zirconium balls, dry the pre-calcined powder at 80-100℃ for 12-24 hours, grind with a mortar and pestle, and pass through a 180-mesh sieve. Step S5: First, press the pre-calcined powder that has passed through an 180-mesh sieve into a cylindrical blank using a powder tablet press, and then perform cold isostatic pressing for 15 to 20 minutes under a pressure of 200 to 300 MPa. Step S6: Place the cylindrical blank on a zirconia plate, place the zirconia plate in an alumina sealed sagger, heat it to 1100-1200°C at a heating rate of 2-5°C / min, sinter for 3-5 hours, and then let it cool naturally to room temperature in the furnace. Step S7: First, select one sample of the sintered ceramic from step S6 and polish it with 320-grit sandpaper, then polish it with 800-grit sandpaper, and finally polish it with 1500-grit sandpaper and diamond to a thickness of 0.5-0.6 mm, and wipe it clean with alcohol. In step S8, the upper and lower surfaces of the polished ceramic in step S7 are coated with silver paste with a thickness of 0.01 to 0.03 mm, placed in a resistance furnace and kept at 600°C for 30 minutes, and then naturally cooled to room temperature to prepare PYN-PZT piezoelectric ceramic material.

4. The method for preparing a temperature-stable lead zirconate titanate-based high-temperature piezoelectric ceramic according to claim 3, characterized in that: The thickness of the PYN-PZT piezoelectric ceramic material is 0.8-1.5 mm, and the diameter is 8-15 mm.