A combined mold for welding a quartz cavity

Abstract

The application relates to the field of semiconductor manufacturing, and provides a combined mold for welding a quartz cavity, which comprises a first set of molds for welding a first quartz plate and a second quartz plate into a quartz frame body, a second set of molds for welding two flanges on the two sides of the quartz frame body, and a third set of molds for welding the quartz frame body and a quartz round pipe; the first set of molds of the application is provided with a first support arranged in a high-low mode, so that the second quartz plate is arranged to be inclined relative to the first quartz plate; the second set of molds is provided with at least six fixing members for fixing the flanges, so that the two flanges are arranged to be symmetrical and the quartz frame body is welded between the two flanges; the third set of molds is provided with a second support for positioning the quartz round pipe, so that the quartz round pipe is prepared to be welded at a proper height; and a limiting member is arranged to check the parallelism between the quartz round pipe and the flanges, so that the welding accuracy is further improved.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing, and more particularly to a combined mold for welding quartz cavities. Background Technology

[0002] Large quartz cavities are widely used in semiconductor manufacturing epitaxial processes. They include a quartz frame, flanges on both sides of the quartz frame, and a quartz tube perpendicular to the quartz frame. The flanges have flange holes that connect to the cavity inside the quartz frame. The silicon wafer enters the cavity through the flange holes. The quartz tube is used to insert tools to manipulate other quartz components inside the cavity and the silicon wafers on them.

[0003] The positioning welding of large quartz cavities involves three steps. The first step is the assembly welding of the main body, which involves welding the first and second quartz plates into a quartz frame. The second step is to weld two flanges to both sides of the quartz frame. The third step is the combination welding with the quartz tube. Since the positioning graphite plates required are large in size, the existing technology uses positioning molds built by employees by hand for fixing. The product dimensions fixed in this way are not very accurate and require repeated adjustments, making it difficult to achieve the required accuracy of the product. Summary of the Invention

[0004] This invention provides a combined mold for welding quartz cavities, which solves the technical problems mentioned in the background art, such as the low fixing accuracy of manually assembled positioning molds and the need for repeated adjustments.

[0005] The technical solution adopted by the present invention to solve the above-mentioned technical problems is as follows:

[0006] A combined mold for welding a quartz cavity includes: a first mold for welding a first quartz plate and a second quartz plate into a quartz frame; a second mold for welding two flanges to both sides of the quartz frame; and a third mold for welding the quartz frame and a quartz tube. The first mold includes: a first worktable for horizontally placing the first quartz plate; and at least two first supports, the two first supports being disposed on the first quartz plate and used to support the second quartz plate, with one of the two first supports being higher than the other, so that the second quartz plate is inclined relative to the first quartz plate. The second mold includes: a second worktable for vertically placing two flanges side-by-side; and at least two first supports. At least six fasteners are detachably connected to the second workbench 501 via fasteners. At least two of the fasteners 502 are symmetrically arranged on both sides of each flange 200, and at least one of the fasteners 502 is arranged on the side of each flange 200 away from the quartz frame 100. The third set of molds includes: a third workbench for placing two flanges side by side vertically; a second support member, disposed on the third workbench and used to support the quartz tube and connect it to the quartz frame; and a limiting member, including a first limiting part and a second limiting part connected together, wherein the two surfaces of the first limiting part and the second limiting part on the same side are parallel so that the two surfaces can respectively abut against the quartz tube and the flange.

[0007] Preferably, the first set of molds includes six first support members. The six first support members are evenly divided into three groups and respectively disposed at three positions along the straight direction on the first quartz plate. The three groups of first support members are arranged from low to high and are respectively denoted as the first group of first support members, the second group of first support members, and the third group of first support members.

[0008] Preferably, the tops of the first group of first support members and the second group of first support members are set as flat surfaces, and the top of the third group of first support members is set as an inclined surface and is in contact with the second quartz plate.

[0009] Preferably, the fixing member has a vertical through hole; the second workbench includes a frame and a base plate, the base plate is disposed on the frame, and the base plate includes multiple fixing grooves for fixing the fixing member in conjunction with the through hole and the fastener.

[0010] Preferably, the fastener includes a connected vertical portion and a horizontal portion, the horizontal portion abutting against the base plate and the through hole being disposed on the horizontal portion, and the vertical portion being disposed abutting against the flange.

[0011] Preferably, the base plate is provided with a right-angle reference, a rectangular protrusion, and is configured such that the fixing member can abut against the protrusion.

[0012] Preferably, the frame is provided with multiple height-adjustable support legs for adjusting the levelness of the base plate.

[0013] Preferably, the top of the second support member has two upward-opening inclined surfaces for respectively abutting against the two sides of the quartz tube.

[0014] Preferably, the limiting member further includes a third limiting part connected to one side of the second limiting part, and the first limiting part, the second limiting part and the third limiting part are arranged perpendicularly to each other.

[0015] Preferably, one or more of the first support member, the fixing member, the second support member, the limiting member, and the base plate are made of graphite.

[0016] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0017] This invention provides a combined mold for welding quartz cavities, comprising a first mold, a second mold, and a third mold for three steps of welding large quartz cavities. The first mold uses a first support member with one high and one low setting to ensure that the second quartz plate is tilted relative to the first quartz plate. The second mold uses at least six fixing members to fix the flanges, ensuring that the two flanges are symmetrically arranged and the quartz frame is welded between the two flanges. The third mold uses a second support member to position the quartz tube, ensuring that the quartz tube is at a suitable height for welding. At the same time, a limiting member ensures the parallelism between the quartz tube and the flange, thereby further improving the accuracy of welding.

[0018] The present invention will be explained in detail below with reference to the accompanying drawings and specific embodiments. Attached Figure Description

[0019] Figure 1 : A schematic diagram of the relevant structure of the first step of welding in some embodiments of the present invention;

[0020] Figure 2 : A schematic diagram of the first welding step of some embodiments of the present invention after the second quartz plate is hidden;

[0021] Figure 3 : A schematic diagram of the first stage of the welding second step in some embodiments of the present invention;

[0022] Figure 4 : A schematic diagram of the second stage of the welding second step in some embodiments of the present invention;

[0023] Figure 5 : A schematic diagram of the third stage of the welding second step in some embodiments of the present invention;

[0024] Figure 6 : A schematic diagram of the fourth stage of the welding second step in some embodiments of the present invention;

[0025] Figure 7 : Schematic diagrams of the relevant structures in the second welding step of some embodiments of the present invention;

[0026] Figure 8 : Some related structural schematic diagrams of the welding second step in some embodiments of the present invention;

[0027] Figure 9 : A schematic diagram of the relevant structure of the third welding step in some embodiments of the present invention.

[0028] Explanation of reference numerals in the attached figures:

[0029] 100 quartz frame;

[0030] 101 First quartz plate; 102 Second quartz plate; 103 Side plate;

[0031] 200 flange;

[0032] 300 quartz round tube;

[0033] 400 The first set of molds;

[0034] 401 First workbench; 402 First support component; 4021 First group of first support components; 4022 Second group of first support components; 4023 Third group of first support components;

[0035] 500 Second set of molds;

[0036] 501 Second workbench; 5011 Frame; 5012 Base plate; 5013 Fixing groove; 5014 Right angle reference; 5015 Support leg; 502 Fixing component; 5021 Through hole; 5022 Vertical part; 5023 Horizontal part; 503 Pad; 504 Positioning block;

[0037] 600 Third set of molds;

[0038] 601 Third worktable; 602 Second support member; 603 Limiting member; 6031 First limiting part; 6032 Second limiting part; 6033 Third limiting part. Detailed Implementation

[0039] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by those skilled in the art. The terms "comprising" and similar expressions used herein mean that the element or object preceding the word covers the element or object listed after the word and its equivalents, but does not exclude other elements or objects.

[0040] The welding of the large quartz cavity is divided into three steps. The first step is the assembly welding of the main body, that is, welding the first quartz plate 101 and the second quartz plate 102 into a quartz frame 100. The second step is to weld the two flanges 200 to both sides of the quartz frame 100. The third step is to combine and weld it with the quartz round tube 300.

[0041] In the existing technology, the quartz frame 100, flange 200, and quartz tube 300 are fixed by positioning molds built by employees by hand. This fixing method is not very accurate and it is difficult to meet the accuracy requirements of the product.

[0042] To address the aforementioned technical problems, the present invention provides a combined mold for welding quartz cavities, comprising a first mold 400, a second mold 500, and a third mold 600. The first mold 400 is used to weld a first quartz plate 101 and a second quartz plate 102 into a quartz frame 100. The second mold 500 is used to weld two flanges 200 to both sides of the quartz frame 100. The third mold 600 is used to weld the quartz frame 100 and the quartz tube 300.

[0043] For details, please refer to the appendix. Figure 1 and 2 The first mold 400 provided by the present invention includes a first workbench 401 and at least two first support members 402. The first workbench 401 is used to horizontally place the first quartz plate 101. The two first support members 402 are disposed on the first quartz plate 101 and are used to support the second quartz plate 102. The two first support members 402 are of different heights, so that the second quartz plate 102 is inclined relative to the first quartz plate 101.

[0044] Considering that the holes of the two flanges 200 are of different sizes in the subsequent process, the quartz frame 100 is placed horizontally with one side higher than the other. Specifically, during welding, the first quartz plate 101 and the side plates 103 on both sides are welded first. Then, at least two first support members 402 are placed on the first quartz plate 101, and then the second quartz plate 102 is placed on the first support members 402 for welding. Finally, the quartz frame 100 is welded together. Since the two first support members 402 are set at different heights, the second quartz plate 102 is tilted relative to the first quartz plate 101, which ensures the requirements of the subsequent process.

[0045] Furthermore, in some specific embodiments of the present invention, please refer to the appendix. Figure 2 The first mold 400 includes six first support members 402. The six first support members 402 are evenly divided into three groups and respectively set at three positions along the straight direction on the first quartz plate 101. The three groups of first support members 402 are set from low to high and are respectively called the first group of first support members 4021, the second group of first support members 4022 and the third group of first support members 4023.

[0046] The six first support members 402 are arranged in three groups on the first quartz plate 101, which can fully ensure the stability when supporting the second quartz plate 102 and avoid shaking when welding the second quartz plate 102, thus affecting the final welding effect.

[0047] Furthermore, in some specific embodiments of the present invention, please refer to the appendix. Figure 2 The tops of the first support member 4021 and the second support member 4022 are set as flat surfaces, and the top of the third support member 4023 is set as a slope and is attached to the second quartz plate 102.

[0048] The first set of first support members 4021 and the second set of first support members 4022, with their tops set as flat surfaces, are in line contact with the second quartz plate 102. This not only provides support but also minimizes contact with the second quartz plate 102 to prevent damage to its surface. The third set of first support members 4023, with its top set as a slope, serves as the core support, ensuring the stability of the support.

[0049] Please refer to the attached document. Figure 3 and 5The second mold 500 provided by the present invention includes a second workbench 501 and at least six fixing members 502. The second workbench 501 is used to place two flanges 200 side by side vertically. The fixing members 502 are detachably connected to the second workbench 501 by fasteners. At least two fixing members 502 are symmetrically arranged on both sides of each flange 200 to facilitate fixing. At least one fixing member 502 is arranged on the side of each flange 200 away from the quartz frame 100, so that there is one fixing member 502 on each side of the two flanges 200 away from the quartz frame 100, and the two fixing members 502 fix the whole.

[0050] In the first stage of welding, please refer to the appendix. Figure 3 First, place the quartz frame 100 horizontally on the second workbench 501. Place a flange 200 on one side of the quartz frame 100 and fix the flange 200 with fasteners 502. At least two fasteners 502 are symmetrically arranged on both sides of the flange 200 to facilitate fixing. At least one fastener 502 (two are shown in the attached figure for better fixing effect) is placed on the side of the flange 200 away from the quartz frame 100 to fix the flange 200. In addition, there are two more fasteners 502 on one side of the quartz frame 100 for fixing. On the other side, a pad 503 is placed at the bottom of the quartz frame 100 to keep it parallel. After fixing, perform preliminary spot welding on the quartz frame 100 and the flange 200 to ensure the connection accuracy between the quartz frame 100 and the flange 200.

[0051] For the second stage, please refer to the appendix. Figure 4 The quartz frame 100 and flange 200 are erected and moved to another workbench for complete welding. The erected quartz frame 100 is prevented from tipping over by the auxiliary positioning block 504.

[0052] Then, in the third stage, we return to the second workbench 501 to prepare for welding another flange 200. Please refer to the attached document. Figure 5 As mentioned above, each flange 200 is fixed by at least two fasteners 502 symmetrically arranged on both sides. At least one fastener 502 (two are shown in the attached figure for better fixing effect) is located on the side of the flange 200 away from the quartz frame 100 to fix the flange 200. After fixing, the quartz frame 100 and the other flange 200 (i.e., the flange 200 on the left) are initially spot welded to ensure the connection accuracy between the quartz frame 100 and the flange 200.

[0053] Finally, for the fourth stage, please refer to the appendix. Figure 6The quartz frame 100 and flange 200 are then erected and moved to another workbench for complete welding. The erected quartz frame 100 is also prevented from tipping over by auxiliary positioning blocks 504. In addition, there are pads 503 placed at the bottom of the quartz frame 100 to prevent the quartz frame 100 from directly contacting the workbench. At this point, the welding between the quartz frame 100 and the two flanges 200 is completed.

[0054] Furthermore, in some specific embodiments of the present invention, please refer to the appendix. Figure 3 The fastener 502 has a vertical through hole 5021. The second workbench 501 includes a frame 5011 and a base plate 5012. The base plate 5012 is set on the frame 5011 and includes multiple fixing grooves 5013 for fixing the fastener 502 with the through hole 5021 and fasteners. Obviously, the more fixing grooves 5013 provided on the base plate 5012, the more fasteners 502 can be fixed, and the higher the fixing accuracy of the flange 200. For example, the base plate 5012 in the figure is provided with twelve fixing grooves 5013 along the width direction of the second workbench 501 and fourteen fixing grooves 5013 along the length direction of the second workbench 501.

[0055] When fixing the fastener 502, align the through hole 5021 on the fastener 502 with the fixing groove 5013 on the base plate 5012, and use fasteners to fix the fastener 502 to ensure that the fastener 502 will not move during the welding process, thereby improving the welding effect. Specifically, the fasteners here can be screws, bolts or nuts or other parts that can play a fastening role.

[0056] In addition, please refer to the appendix for some specific embodiments of the present invention. Figure 3 The fastener 502 includes a vertical part 5022 and a horizontal part 5023 connected together. The horizontal part 5023 abuts against the base plate 5012 and a through hole 5021 is provided on the horizontal part 5023. The vertical part 5022 is disposed on the abutting flange 200.

[0057] Here, the vertical part 5022 and the horizontal part 5023 of the fastener 502 form an L-shaped structure. The vertical part 5022 has a larger vertical surface area, which makes it more effective in fixing the flange 200. The horizontal part 5023 has a larger bottom area, which makes it easier to place the fastener 502 on the base plate 5012 for stability. In addition, the horizontal part 5023 is thinner, which makes it easier to fix the fastener 502 with fasteners.

[0058] It is worth noting that the vertical part 5022 and the horizontal part 5023 can be set separately or integrally formed.

[0059] Furthermore, in some specific embodiments of the present invention, please refer to the appendix. Figure 7 A right-angle reference 5014 is provided on the base plate 5012. The right-angle reference 5014 is a rectangular protrusion and is configured so that the fastener 502 can abut against the protrusion. This allows the fastener 502 to be directly aligned with the vertical direction when fixing the flange 200, which simplifies the alignment operation of the fastener 502 and improves the positioning accuracy.

[0060] Furthermore, in some specific embodiments of the present invention, please refer to the appendix. Figure 8 The frame 5011 is equipped with multiple height-adjustable support legs 5015 for adjusting the level of the base plate 5012. Obviously, the more support legs 5015 there are, the better the level adjustability. As shown in the attached figure, the frame 5011 is equipped with multiple rows, and each row is equipped with multiple support legs 5015, so that the level of the base plate 5012 can be better adjusted.

[0061] Please refer to the attached document. Figure 9 The third mold 600 provided by the present invention includes a third workbench 601, a second support member 602, and a limiting member 603. The third workbench 601 is used to place two flanges 200 side by side vertically. The second support member 602 is disposed on the third workbench 601 and is used to support the quartz tube 300 so that it is connected to the quartz frame 100. The limiting member 603 includes a first limiting part 6031 and a second limiting part 6032 connected together. The two surfaces of the first limiting part 6031 and the second limiting part 6032 on the same side are parallel so that the two surfaces can respectively abut against the quartz tube 300 and the flange 200.

[0062] Specifically, the quartz frame 100 and the two flanges 200 on both sides are first erected. The second support 602 is placed on the third workbench 601. Then, the quartz tube 300 is placed on the second support 602 and aligned with a suitable position on the quartz frame 100 for welding. In order to ensure that the quartz tube 300 is parallel to the side of the flange 200, the operator places the first limiting part 6031 and the second limiting part 6032 of the limiting part 603 against the quartz tube 300 and the flange 200 respectively to ensure that the quartz tube 300 is parallel to the side of the flange 200. The entire welding process relies on the second support 602 and the limiting part 603 to ensure the positioning accuracy before welding. The structure is simple and suitable for practical use.

[0063] In particular, in some specific embodiments of the present invention, please refer to the appendix. Figure 9The top of the second support member 602 is provided with two upward-opening inclined surfaces, which are used to abut against the two sides of the quartz tube 300 respectively. It can be understood that each inclined surface and the circumference of the quartz tube 300 are in line contact. This is to minimize the contact area between the two surfaces and the quartz tube 300. In particular, compared with the surface contact of the traditional arc-shaped surface, the two V-shaped inclined surfaces of the present invention reduce the contact area and better protect the quartz tube 300 from being scratched. At the same time, they can also hold the quartz tube 300 in place to prevent it from shaking.

[0064] Furthermore, considering the specific implementation of the limiting member 603, please refer to the appendix in some specific embodiments of the present invention. Figure 9 The limiting member 603 includes a first limiting part 6031 and a second limiting part 6032 connected together. The two surfaces of the first limiting part 6031 and the second limiting part 6032 on the same side are parallel so that the two surfaces can respectively abut against the quartz tube 300 and the flange 200. Specifically, after the quartz tube 300 is placed, the limiting member 603 is used to check whether the sides of the quartz tube 300 and the flange 200 are parallel to ensure the accuracy of the welding position of the quartz tube 300.

[0065] Furthermore, in some specific embodiments of the present invention, please refer to the appendix. Figure 9 The limiting member 603 also includes a third limiting member 6033 connected to one side of the second limiting member 6032. The first limiting member 6031, the second limiting member 6032 and the third limiting member 6033 are arranged perpendicularly to each other. The limiting member 603 of the present invention forms a Z-shaped structure. The first limiting member 6031 and the second limiting member 6032 are used to ensure the welding accuracy of the quartz tube 300, while the third limiting member 6033 is convenient for the operator to hold. The perpendicular arrangement of the two members simplifies the overall structure and also provides high positioning accuracy.

[0066] It is worth noting that the first limiting part 6031, the second limiting part 6032 and the third limiting part 6033 in this invention can be provided separately or integrally formed.

[0067] This invention provides a combined mold for welding quartz cavities, comprising a first mold 400, a second mold 500, and a third mold 600 for three steps of welding large quartz cavities. The first mold 400 uses a first support member 402 with one high and one low setting to ensure that the second quartz plate 102 is inclined relative to the first quartz plate 101. The second mold 500 uses at least six fixing members 502 to fix the flange 200, ensuring that the two flanges 200 are symmetrically arranged and the quartz frame 100 is welded between the two flanges 200. The third mold 600 uses a second support member 602 to position the quartz tube 300, ensuring that the quartz tube 300 is at a suitable height for welding. Simultaneously, a limiting member 603 checks the parallelism between the quartz tube 300 and the flange 200 to further improve the accuracy of welding.

[0068] In some specific embodiments of the present invention, one or more of the following materials are graphite: the first support 402, the fixing member 502, the second support 602, the limiting member 603, and the base plate 5012. Considering that the quartz frame 100 or quartz tube 300 are relatively brittle and are prone to scratches or even breakage when in direct contact with hard materials, the first support 402, the fixing member 502, the second support 602, the limiting member 603, and the base plate 5012 in the present invention can all be made of graphite. The surface of graphite products is relatively soft, which can minimize contact damage to quartz products. It is worth noting that the statement that one or more of the following materials are graphite means that only the first support 402, only the limiting member 603, or all five of them are made of graphite.

[0069] While embodiments of the present invention have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of the invention as defined in the claims. Furthermore, the invention described herein may have other embodiments and can be implemented or carried out in various ways.

Claims

1. A combined mold for welding quartz cavities, characterized in that, include: The first set of molds (400) is used to weld the first quartz plate (101) and the second quartz plate (102) into a quartz frame (100); A second set of molds (500) for welding two flanges (200) to both sides of the quartz frame (100); and A third set of molds (600) for welding the quartz frame (100) and the quartz tube (300); The first set of molds (400) includes: A first workbench (401) is used to horizontally place the first quartz plate (101); and At least two first support members (402) are disposed on the first quartz plate (101) and used to support the second quartz plate (102), and the two first support members (402) are one high and one low, so that the second quartz plate (102) is inclined relative to the first quartz plate (101). The second set of molds (500) includes: A second workbench (501) is used to place two flanges (200) side by side vertically; and At least six fasteners (502) are detachably connected to the second workbench (501) by fasteners, wherein at least two of the fasteners (502) are symmetrically arranged on both sides of each flange (200), and at least one of the fasteners (502) is arranged on the side of each flange (200) away from the quartz frame (100). The third set of molds (600) includes: The third workbench (601) is used to place two flanges (200) side by side vertically; A second support member (602) is disposed on the third workbench (601) and is used to support the quartz tube (300) so that it is connected to the quartz frame (100); and The limiting member (603) includes a first limiting part (6031) and a second limiting part (6032) connected together. The two surfaces of the first limiting part (6031) and the second limiting part (6032) on the same side are parallel so that the two surfaces can respectively abut against the quartz tube (300) and the flange (200).

2. The combined mold according to claim 1, characterized in that, The first set of molds (400) includes six first support members (402). The six first support members (402) are evenly divided into three groups and respectively set at three positions along the straight direction on the first quartz plate (101). The three groups of first support members (402) are set from low to high and are respectively called the first group of first support members (4021), the second group of first support members (4022) and the third group of first support members (4023).

3. The combined mold according to claim 2, characterized in that, The tops of the first support member (4021) and the second support member (4022) are set as flat surfaces, and the top of the third support member (4023) is set as a slope and is attached to the second quartz plate (102).

4. The combined mold according to claim 1, characterized in that, The fastener (502) is provided with a vertical through hole (5021); The second workbench (501) includes a frame (5011) and a base plate (5012). The base plate (5012) is disposed on the frame (5011). The base plate (5012) includes multiple fixing grooves (5013) for cooperating with the through hole (5021) and the fastener to fix the fixing member (502).

5. The combined mold according to claim 4, characterized in that, The fastener (502) includes a vertical part (5022) and a horizontal part (5023) connected together. The horizontal part (5023) abuts against the base plate (5012) and the through hole (5021) is provided on the horizontal part (5023). The vertical part (5022) is configured to abut against the flange (200).

6. The combined mold according to claim 4, characterized in that, The base plate (5012) is provided with a right-angle reference (5014), which is a rectangular protrusion and is configured such that the fastener (502) can abut against the protrusion.

7. The combined mold according to claim 4, characterized in that, The frame (5011) is provided with multiple height-adjustable support legs (5015) for adjusting the levelness of the base plate (5012).

8. The combined mold according to claim 1, characterized in that, The top of the second support member (602) is provided with two inclined surfaces with openings facing upwards, which are used to abut against the two sides of the quartz tube (300) respectively.

9. The combined mold according to claim 1, characterized in that, The limiting member (603) further includes a third limiting member (6033) connected to one side of the second limiting member (6032), and the first limiting member (6031), the second limiting member (6032) and the third limiting member (6033) are arranged perpendicularly to each other.

10. The combined mold according to claim 4, characterized in that, One or more of the first support member (402), the fixing member (502), the second support member (602), the limiting member (603), and the base plate (5012) are made of graphite.

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