Vacuum coating apparatus and coating method for improving coating efficiency

Abstract

The present application relates to a kind of vacuum coating equipment and coating method of improving coating efficiency, including rack body, the inside of rack is equipped with coating chamber, coating chamber bottom is connected with vacuum pumping assembly and exhaust component, coating chamber top is connected with heating assembly, heating assembly is used to improve the temperature in the inside of coating chamber, coating chamber is equipped with rotary disc inside, rotary disc one end is connected to the drive assembly outside, drive assembly is used to make rotary disc rotate, the surface of rotary disc is equipped with several support columns, the surface of each support column is equipped with hook support piece, the surface of hook support piece can be rotatably equipped with several material hooks, the top of hook support piece is equipped with material hook;The present application can be rotated and adjusted adjacent material hook on hook placement block, can be coated workpiece and placed on material hook, form the condition of in turn staggered after placement, improve space utilization.

Description

Technical Field

[0001] This invention relates to the field of coating equipment technology, and specifically to a vacuum coating equipment and coating method for improving coating efficiency. Background Technology

[0002] Surface treatment technology refers to the use of physical, chemical, mechanical, or composite methods to give metal surfaces different microstructures, chemical compositions, and physical states from the substrate, thereby giving the treated surface special properties completely different from the substrate. Vapor deposition technology is a new type of coating technology that deposits gaseous substances containing deposition elements onto the surface of materials to form a thin film through physical or chemical methods. According to the different principles of the film formation process, vapor deposition technology can be divided into physical vapor deposition and chemical vapor deposition. Physical vapor deposition (PVD) refers to the method of vaporizing the coating material into atoms or molecules or ionizing it into ions under vacuum conditions using various physical methods, and directly depositing it onto the surface of the substrate to form a solid thin film. PVD mainly includes evaporation coating, sputtering coating, and ion plating technology. This technology is green, energy-saving, and environmentally friendly.

[0003] The authorization announcement number CN110863178B discloses a coating device for uniform coating. According to the specification and drawings, the support for placing materials includes a fixed rod and a fixing component. The parts to be coated are fixed between the fixing components on the outer wall of the fixed rod. This setting cannot achieve the most efficient space utilization and affects the efficiency of equipment production. Summary of the Invention

[0004] This invention addresses the problems existing in the above-mentioned coating process by proposing a vacuum coating equipment that improves coating efficiency. The entire hook support is placed inside the coating chamber and can also be freely removed from its interior. After each removal, the adjacent material hooks on the hook placement block can be rotated and adjusted, allowing the workpiece to be coated to be placed on the material hooks, forming a staggered arrangement.

[0005] The objective of this invention is achieved through the following technical solution: a vacuum coating equipment for improving coating efficiency, comprising a frame body, a coating chamber inside the frame, a vacuum pumping component and an exhaust component connected to the bottom of the coating chamber, a heating component connected to the top of the coating chamber for increasing the temperature inside the coating chamber, a rotating disk inside the coating chamber, one end of the rotating disk being connected to an external driving component for rotating the rotating disk, a plurality of support columns on the surface of the rotating disk, a hook support on the surface of each support column, a plurality of material hooks rotatably provided on the surface of each hook support, and a material picking hook on the top of each hook support.

[0006] Preferably, the hook support includes a hook upright plate and a hook placement block. The hook upright plate has a hook through hole adapted to the support column. The material picking hook is set on the top of the hook upright plate. The side wall of the hook upright plate is connected to the hook placement block. The surface of the hook placement block has a plurality of first notches. Material hooks are rotatably connected inside the first notches.

[0007] Preferably, the top of the side wall of the coating chamber is provided with a hinge support plate, the hinge support plate is provided with a butterfly hinge, one end of the butterfly hinge is connected to a coating cover, and the opening and closing of the coating cover can open or close the coating chamber.

[0008] Preferably, the side wall of the coating chamber is provided with several observation channels, and each observation channel is provided with an observation mirror at its end. This arrangement facilitates the user's observation of the coating condition inside.

[0009] Preferably, the vacuum assembly includes a vacuum pipe, a sealing valve, and a vacuum pump. The bottom of the coating chamber is provided with a vacuum pipe, and the surface of the vacuum pipe is provided with a plurality of vacuum holes. One end of the vacuum pipe extends outward and is connected to one end of the sealing valve, and the other end of the sealing valve is connected to the vacuum pump.

[0010] Preferably, the exhaust assembly includes a vent pipe, a first exhaust connector, a second exhaust connector, a regulating valve, and a small heater. One end of the first exhaust connector is connected to the interior of the coating chamber, and the end of the first exhaust connector near the outside is connected to the vent pipe. The end of the vent pipe is connected to the regulating valve, the middle surface of the vent pipe is connected to one end of the second exhaust connector, the other end of the second exhaust connector is connected to the small heater, and the outlet end of the small heater is connected to an external gas recovery pipe.

[0011] Preferably, the heating assembly includes a flow divider, a heat pipe, a heating element, a heat-conducting support plate, an insulation cover, and a substrate. The frame body has a heat-conducting support plate inside, and a heating element is mounted on the heat-conducting support plate. One end of the heating element is connected to one end of the heat pipe, and the other end of the heating element is connected to an external power source. The flow divider is located inside the coating chamber, and the other end of the heat pipe passes through the surface of the coating chamber and is connected to the flow divider. A substrate is mounted inside the flow divider, and an insulation cover is mounted on the outer wall surrounding the heat pipe.

[0012] Preferably, the drive assembly includes a drive motor, a coupling, a turntable support, and a transmission transition component. One end of the drive motor is connected to the frame body, and the shaft of the drive motor is connected to the coupling. The bottom of the coating chamber is provided with a transmission transition component, and the outer wall of the transmission transition component is sealed to the notch at the bottom of the coating chamber. The coupling is connected to the inside of the transmission transition component. One end of the turntable support is connected to the rotating disk, and the other end of the turntable support is connected to the coupling inside the transmission transition component.

[0013] To solve the above-mentioned technical problems, another technical solution provided by the present invention is: a method for improving coating efficiency, the method comprising: placing the workpiece to be coated on a material hook, rotating and adjusting the angle of the adjacent material hooks until space utilization is maximized; placing the hook support and the material hook on a support column inside the coating chamber; evacuating the interior of the coating chamber to a vacuum using a vacuum pump; heating and evaporating the substrate using a heating component until it diffuses and deposits onto the workpiece to be coated; and further uniformly extracting the residual gas through a vent pipe, a first exhaust connector, and a second exhaust connector.

[0014] Compared with the prior art, the present invention has the following beneficial effects: 1. The entire hook support is placed inside the coating chamber, and the hook support can also be freely removed from its interior. After each removal, the adjacent material hooks on the hook placement block can be rotated and adjusted, and the workpieces to be coated can be placed on the material hooks. After placement, a staggered arrangement is formed, which maximizes the utilization of space and improves production efficiency; 2. The entire hook support is inserted into the support column inside the coating chamber. Each time it is picked up or placed, it is only necessary to pull the top picking hook with an external device. During the picking and placing process, the hook support can also be rotated to adjust the angle, making the entire picking and placing process more flexible and effectively reducing the collision between the workpieces to be coated on the material hooks. Attached Figure Description

[0015] Figure 1 This is a perspective view of the present invention;

[0016] Figure 2 This is a perspective view of the coating chamber of the present invention after partial cross-section;

[0017] Figure 3 This is a partial perspective view of the present invention;

[0018] Figure 4 This is a partially enlarged view of the present invention;

[0019] Figure 5 This is a partial perspective view of the present invention;

[0020] Figure 6 This is a perspective view of the present invention;

[0021] Figure 7 This is a partial perspective view of the present invention;

[0022] Figure 8 This is a flowchart of the present invention.

[0023] Markings in the diagram: 1. Main frame; 2. Coating chamber; 21. Rotary disk; 211. Support column; 22. Hinge support plate; 23. Butterfly hinge; 24. Coating cover; 25. Observation channel; 26. Observation mirror; 3. Heating assembly; 31. Heat-conducting support plate; 32. Heating element; 33. Heat-conducting pipe; 34. Diverter plate; 35. Substrate; 36. Insulation cover plate; 4. Drive assembly; 41. Drive motor; 42. Coupling; 43. Rotary... 44. Disc support base; 5. Transmission transition component; 6. Hook support component; 7. Material hook; 8. Material picking hook; 9. Hook upright plate; 10. Hook placement block; 11. First notch; 12. Vacuum assembly; 13. Vacuum pipe; 14. Vacuum port; 15. Sealing valve; 16. Vacuum pump; 27. Exhaust assembly; 18. Vent pipe; 19. First exhaust connector; 20. Second exhaust connector; 21. Regulating valve; 22. Small heater. Detailed Implementation

[0024] The present invention will be further described below with reference to the embodiments illustrated in the accompanying drawings:

[0025] like Figures 1 to 7 As shown, a vacuum coating equipment for improving coating efficiency includes a frame body 1 composed of several aluminum profiles welded together. A coating chamber 2 is fixedly installed on the left side inside the frame. The overall shape of the coating chamber 2 is barrel-shaped, and the top of the coating chamber 2 is open. This design facilitates the equipment to grab items from top to bottom. A hinge support plate 22 is provided on the top of the side wall of the coating chamber 2. A butterfly hinge 23 is fixedly installed on the hinge support plate 22. The upper end of the butterfly hinge 23 is connected to a coating cover 24. The contact surface between the coating cover 24 and the coating chamber 2 is sealed. The coating chamber 2 can be opened or closed whenever the coating cover 24 is opened or closed. In order to facilitate the user to observe the coating condition inside the coating chamber 2, several observation channels 25 are provided on the side wall of the coating chamber 2. An observation mirror 26 is provided at the end of each observation channel 25.

[0026] In this embodiment, a vacuum assembly 6 and an exhaust assembly 7 are connected to the bottom of the coating chamber 2, and a heating assembly 3 is connected to the top of the coating chamber 2. The heating assembly 3 is used to increase the temperature inside the coating chamber 2. A rotating disk 21 is provided inside the coating chamber 2. Specifically, the vacuum assembly 6 includes an exhaust pipe 61, a sealing valve 62, and an exhaust pump 63. The exhaust pipe 61 is installed through the bottom surface of the coating chamber 2. The contact area between the exhaust pipe 61 and the coating chamber 2 is sealed. The surface of the exhaust pipe 61 is provided with several exhaust holes 611. One end of the exhaust pipe 61 extends outward and is connected to one end of the sealing valve 62. The other end of the sealing valve 62 is connected to... Connected to the vacuum pump 63, this configuration allows the vacuum pump 63 to continuously extract air from the coating chamber 2 through the vacuum port 611, bringing it close to a vacuum state. The heating assembly 3 includes a distribution plate 34, a heat-conducting pipe 33, a heating element 32, a heat-conducting support plate 31, a heat-insulating cover plate 36, and a substrate 35. The heat-conducting support plate 31 is fixedly installed inside the right side of the frame body 1, and the heating element 32 is fixedly installed on the heat-conducting support plate 31. The heating element 32 is connected to an external power source and can continuously deliver heat. One end of the heating element 32 is connected to one end of the heat-conducting pipe 33. The distribution plate 34 is fixedly installed inside the coating chamber 2, and the other end of the heat-conducting pipe 33 passes through the coating chamber. 2. The surface is connected to the flow divider plate 34. A substrate 35 is installed inside the flow divider plate 34. To reduce heat loss during heat transfer, an insulation cover plate 36 is installed on the outer wall surrounding the heat-conducting pipe 33. With this configuration, the substrate 35 is heated and evaporated through the flow divider plate 34. The evaporated particles escape from the evaporation source surface and are rarely hindered by collisions with other particles (mainly residual gas molecules) during their flight towards the surface of the workpiece to be coated. They can directly reach the surface of the workpiece to be coated and condense to form a film. If venting is required, it needs to be done through the venting assembly 7. The venting assembly 7 includes a vent pipe 71, a first venting connector 72, a second venting connector 73, a regulating valve 74, and a small heater 75. One end of the first exhaust connector 72 is connected to the inside of the coating chamber 2. The first exhaust connector 72 should be made of a high-temperature resistant material. The contact area between the first exhaust connector 72 and the coating chamber 2 is sealed. The end of the first exhaust connector 72 near the outside is connected to the vent pipe 71. The end of the vent pipe 71 is connected to a regulating valve 74. The middle surface of the vent pipe 71 is connected to one end of the second exhaust connector 73. The other end of the second exhaust connector 73 is connected to a small heater 75. The outlet end of the small heater 75 is connected to an external gas recovery pipe. When exhaust is required, the regulating valve 74 can be rotated. The second exhaust connector 73 can be controlled by the regulating valve 74 to achieve the required exhaust rate.

[0027] In this embodiment, the bottom end of the rotating disk 21 is connected to an external drive assembly 4. The drive assembly 4 is used to rotate the rotating disk 21. Specifically, the drive assembly 4 includes a drive motor 41, a coupling 42, a turntable support 43, and a transmission transition member 44. One end of the drive motor 41 is fixedly connected to the frame body 1, and the shaft of the drive motor 41 is connected to the coupling 42. The bottom of the coating chamber 2 is provided with a transmission transition member 44, and the outer wall of the transmission transition member 44 and the coating chamber 2 are connected to the external drive assembly 44. The notch at the bottom of the membrane chamber 2 is sealed. The coupling 42 is connected to the inside of the transmission transition member 44. One end of the turntable support 43 is connected to the rotating disk 21, and the other end of the turntable support 43 is connected to the coupling 42 inside the transmission transition member 44. With this arrangement, the shaft of the drive motor 41 can drive the coupling 42. When the coupling 42 rotates, it can drive the transmission transition member 44. When the transmission transition member 44 rotates, it can drive the turntable support 43 and the rotating disk 21 to rotate. It should be noted that... The coupling 42 and the turntable support 43 are driven inside the transmission transition piece 44. The surface of the turntable 21 is provided with four support columns 211. Each support column 211 is provided with a hook support 5. The hook support 5 includes a hook plate 53 and a hook placement block 54. The hook plate 53 is provided with a hook through hole adapted to the support column 211. The material hook 52 is set on the top of the hook plate 53. The side wall of the hook plate 53 is connected to the hook placement block 54. The surface of the hook placement block 54 is provided with several first notches 541. The material hook 51 is rotatably connected inside the first notches 541. After this setting, the coating cover 24 is opened and the material hook 52 is pulled up by external equipment to raise the entire hook support 5 until it is completely removed. After removal, the adjacent material hooks 51 on the hook placement block 54 can be rotated and adjusted so that the coated workpiece can be placed on the material hook 51. After placement, a staggered arrangement is formed, which effectively utilizes the internal space of the coating chamber 2.

[0028] Furthermore, such as Figure 8 As shown, based on the vacuum coating equipment for improving coating efficiency provided above, this embodiment of the invention also provides a vacuum coating method. The method of this embodiment includes: S1: placing the workpiece to be coated on the material hook 51, and rotating and adjusting the angle of the adjacent material hooks 51 until the space utilization is maximized; S2: placing the hook support 5 and the material hook 51 on the support column 211 in the coating chamber 2; S3: evacuating the interior of the coating chamber 2 to a vacuum using the vacuum pump 63; heating and evaporating the substrate 35 using the heating component 3 until it diffuses and deposits on the workpiece to be coated; S4: further uniformly extracting the residual gas through the vent pipe 71, the first exhaust connector 72 and the second exhaust connector 73.

[0029] Working principle and usage of this invention:

[0030] The coating chamber 2 is opened by the coating cover 24. The material hook 52 is pulled up by the external equipment to raise the entire hook support 5 until it is completely removed. After removal, the adjacent material hooks 51 on the hook placement block 54 can be rotated and adjusted so that the workpiece to be coated can be placed on the material hooks 51. After placement, a staggered arrangement is formed, which effectively utilizes the internal space of the coating chamber 2. Similarly, the entire hook support 5 is placed back on the support column in the coating chamber 2. Then, the air pump 63 continuously extracts the air inside the coating chamber 2 through the air extraction hole 611, making it close to a vacuum state. The substrate 35 is heated and evaporated by the flow divider 34. The evaporated particles escape from the surface of the evaporation source. During the process of flying to the surface of the workpiece to be coated, they are rarely hindered by collisions with other particles (mainly residual gas molecules) and can directly reach the surface of the workpiece to be coated and condense to form a film.

[0031] The specific embodiments described herein are merely illustrative of the spirit of the invention. Those skilled in the art to which this invention pertains may make various modifications or additions to the described specific embodiments or use similar methods to replace them, without departing from the spirit of the invention or exceeding the scope defined by the appended claims.

Claims

1. A vacuum coating equipment for improving coating efficiency, comprising a frame body (1), characterized in that, The frame has a coating chamber (2) inside. The bottom of the coating chamber (2) is connected to a vacuum assembly (6) and an exhaust assembly (7). The top of the coating chamber (2) is connected to a heating assembly (3). The heating assembly (3) is used to raise the temperature inside the coating chamber (2). The coating chamber (2) has a rotating disk (21) inside. One end of the rotating disk (21) is connected to an external drive assembly (4). The drive assembly (4) is used to rotate the rotating disk (21). The surface of the rotating disk (21) is provided with several support columns (211). The surface of each support column (211) is provided with a hook support (5). The surface of the component (5) is rotatably provided with a plurality of material hooks (51), and the top of the hook support component (5) is provided with a material retrieval hook (52); the hook support component (5) includes a hook upright plate (53) and a hook placement block (54). The interior of the hook upright plate (53) is provided with a hook through hole adapted to the support column (211). The material retrieval hook (52) is set on the top of the hook upright plate (53). The side wall of the hook upright plate (53) is connected to the hook placement block (54). The surface of the hook placement block (54) is provided with a plurality of first notches (541). The material hooks (51) are rotatably connected inside the first notches (541).

2. The vacuum coating equipment for improving coating efficiency according to claim 1, characterized in that, The top of the side wall of the coating chamber (2) is provided with a hinge support plate (22), and a butterfly hinge (23) is provided on the hinge support plate (22). One end of the butterfly hinge (23) is connected to a coating cover (24). The opening and closing of the coating cover (24) can open or close the coating chamber (2).

3. The vacuum coating equipment for improving coating efficiency according to claim 1, characterized in that, The side wall of the coating chamber (2) is provided with several observation channels (25), and each observation channel (25) is provided with an observation mirror (26) at its end.

4. The vacuum coating equipment for improving coating efficiency according to claim 3, characterized in that, The vacuum assembly (6) includes a vacuum pipe (61), a sealing valve (62), and a vacuum pump (63). The bottom surface of the coating chamber (2) is provided with a vacuum pipe (61). The surface of the vacuum pipe (61) is provided with a plurality of vacuum holes (611). One end of the vacuum pipe (61) extends outward and is connected to one end of the sealing valve (62). The other end of the sealing valve (62) is connected to the vacuum pump (63).

5. The vacuum coating equipment for improving coating efficiency according to claim 4, characterized in that, The exhaust assembly (7) includes a vent pipe (71), a first exhaust connector (72), a second exhaust connector (73), a regulating valve (74), and a small heater (75). One end of the first exhaust connector (72) is connected to the inside of the coating chamber (2), and the end of the first exhaust connector (72) near the outside is connected to the vent pipe (71). The end of the vent pipe (71) is connected to the regulating valve (74). The middle surface of the vent pipe (71) is connected to one end of the second exhaust connector (73), and the other end of the second exhaust connector (73) is connected to the small heater (75). The outlet end of the small heater (75) is connected to an external gas recovery pipe.

6. The vacuum coating equipment for improving coating efficiency according to claim 5, characterized in that, The heating assembly (3) includes a flow divider (34), a heat pipe (33), a heating element (32), a heat-conducting support plate (31), a heat-insulating cover plate (36), and a substrate (35). The frame body (1) is provided with a heat-conducting support plate (31). A heating element (32) is installed on the heat-conducting support plate (31). One end of the heating element (32) is connected to one end of the heat pipe (33), and the other end of the heating element (32) is connected to an external power source. The flow divider (34) is located inside the coating chamber (2). The other end of the heat pipe (33) passes through the surface of the coating chamber (2) and is connected to the flow divider (34). A substrate (35) is installed inside the flow divider (34), and a heat-insulating cover plate (36) is installed on the outer wall surrounding the heat pipe (33).

7. The vacuum coating equipment for improving coating efficiency according to claim 6, characterized in that, The drive assembly (4) includes a drive motor (41), a coupling (42), a turntable support (43), and a transmission transition piece (44). One end of the drive motor (41) is connected to the frame body (1), and the shaft of the drive motor (41) is connected to the coupling (42). The bottom of the coating chamber (2) is provided with a transmission transition piece (44). The outer wall of the transmission transition piece (44) is sealed to the notch at the bottom of the coating chamber (2). The coupling (42) is connected to the inside of the transmission transition piece (44). One end of the turntable support (43) is connected to the rotating disk (21), and the other end of the turntable support (43) is connected to the coupling (42) inside the transmission transition piece (44).

8. A method for improving coating efficiency, characterized in that, Vacuum coating is performed on the workpiece to be coated using the vacuum coating equipment for improving coating efficiency as described in any one of claims 1 to 7. The method includes: placing the workpiece to be coated on the material hook (51), rotating and adjusting the angle of the adjacent material hooks (51) until the space utilization is maximized; placing the hook support (5) and the material hook (51) on the support column (211) in the coating chamber (2); evacuating the interior of the coating chamber (2) to a vacuum using the vacuum pump (63); heating and evaporating the substrate (35) using the heating component (3) until it diffuses and deposits on the workpiece to be coated; and further uniformly extracting the residual gas through the vent pipe (71), the first exhaust connector (72), and the second exhaust connector (73).

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