A method of welding a quartz plate

Abstract

The application relates to the field of semiconductor manufacturing, in particular to a quartz plate welding method, which provides a first quartz plate and a second quartz plate; a chamfering treatment is performed on a welding surface of the first quartz plate; the first quartz plate and the second quartz plate are fixed, and a preset distance is kept between the welding surface of the first quartz plate and the welding surface of the second quartz plate; a welding piece is placed at the chamfering position and is welded by using a welding gun, the quartz plate welding method provided by the application only needs to be chamfered once, compared with twice chamfering in a traditional method, the steps are simplified, meanwhile, welding operation can be completed by one person who holds the welding piece and uses the welding gun to weld at the same time, one-person one-time material pulling operation is realized, compared with three-person welding operation in the traditional method, the quartz plate welding method saves manpower, improves operation efficiency, and one-person welding gun use is safer.

Description

Technical Field

[0001] This invention relates to the field of semiconductor manufacturing, and more particularly to a method for welding quartz plates. Background Technology

[0002] Quartz glass products are important components widely used in semiconductor chip manufacturing processes. In some specific processes, quartz glass products need to be joined together through thermal processing. For example, in the process of cleaning silicon wafers, acid and alkali resistant high-purity quartz cleaning tanks are required, and quartz cleaning tanks are tanks made up of multiple quartz plates welded together.

[0003] In existing technology, the two ends of the quartz plate in the width direction need to be chamfered before welding. Please refer to the attached document. Figure 2 , 3 The left-hand diagram of part 4 shows that the chamfer dimensions here are generally C1-C3, meaning the width of the right-angled side of the chamfer is 1 to 3 millimeters. After chamfering, the two quartz plates are fixed so that the two chamfered ends are aligned with the other quartz plate. The distance between the two quartz plates, i.e. the positioning weld, is generally 1 to 1.5 millimeters. After fixing, the two welding parts, usually welding wire, are placed at the two chamfers respectively. The diameter of the welding parts is generally 3 to 4 millimeters. Then, welding is performed using a flame gun with a #5 single-layer nozzle. Once the welding wire melts, the two quartz plates are bonded together, and the welding is complete.

[0004] The entire welding process requires the cooperation of three people: one person holds two welding wires, and two other people each hold a flame gun to weld one welding wire. This method of operation is very labor-intensive. Summary of the Invention

[0005] This invention mainly provides a welding method for quartz plates to solve the technical problems mentioned in the background art, such as the high manpower consumption of welding methods.

[0006] The technical solution adopted by the present invention to solve the above-mentioned technical problems is as follows:

[0007] A method for welding a quartz plate includes: providing a first quartz plate and a second quartz plate; chamfering the welding surface of the first quartz plate; fixing the first quartz plate and the second quartz plate, maintaining a preset distance between the welding surfaces of the first quartz plate and the second quartz plate; placing the workpiece at the chamfer and welding it with a welding gun.

[0008] Preferably, in the step of fixing the first quartz plate and the second quartz plate, the first quartz plate is horizontally fixed and the second quartz plate is vertically fixed by a fixing device, and the welding surface of the first quartz plate faces the welding surface of the second quartz plate.

[0009] Preferably, in the step of fixing the first quartz plate and the second quartz plate, the chamfer of the first quartz plate is facing upwards during fixing.

[0010] Preferably, in the step of placing the weldment at the chamfer, the weldment is snapped between the chamfer and the second quartz plate.

[0011] Preferably, in the welding step using the welding torch, a single person holds the workpiece in one hand while using the welding torch to perform the welding operation.

[0012] Preferably, in the step of providing the first quartz plate and the second quartz plate, the width of the welding surface of the first quartz plate is 4 to 6 mm; in the step of performing a chamfering treatment on the welding surface of the first quartz plate, the width of the right-angle side of the chamfer is 2 to 4 mm; in the step of fixing the first quartz plate and the second quartz plate, a distance of 1.5 to 2 mm is maintained between the welding surfaces of the first quartz plate and the welding surfaces of the second quartz plate; and in the step of placing the welded part at the chamfer, the diameter of the welded part is 4 to 5 mm.

[0013] Preferably, in the step of placing the weldment at the chamfer, a quartz weldment is used to place the weldment at the chamfer.

[0014] Preferably, in the step of placing the weldment at the chamfer, the weldment is a welding wire, welding rod, or welding block.

[0015] Preferably, in the welding step using the welding torch, the welding torch with a double-layered nozzle is used for welding.

[0016] Preferably, in the welding step using the welding torch, the inner diameter of the inner ring of the double-layered nozzle is 1.5 to 2 mm, and the inner diameter of the outer ring is 7 to 8 mm.

[0017] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0018] This invention provides a welding method for quartz plates. Compared to the traditional method of two chamfering operations, this invention only requires one chamfering operation, which simplifies the steps. The welding operation can be completed by a single person holding the welding part while using a welding gun, allowing a single person to complete the operation in one go. Compared to the traditional method of three people working together to weld, the welding method of this invention saves manpower, improves work efficiency, and is safer for a single person to use a welding gun.

[0019] The present invention will be explained in detail below with reference to the accompanying drawings and specific embodiments. Attached Figure Description

[0020] Figure 1: A schematic diagram of the overall process of some embodiments of the present invention;

[0021] Figure 2 A schematic diagram of two quartz plates before welding, comparing some embodiments of the present invention with the prior art;

[0022] Figure 3 : Figure 2 Enlarged schematic diagram of the structure at point A;

[0023] Figure 4 A schematic diagram showing the welding of two quartz plates in comparison with some embodiments of the present invention and the prior art;

[0024] Figure 5 : A schematic diagram of the welding torch structure in comparison with some embodiments of the present invention and the prior art;

[0025] Figure 6 : A schematic diagram of the flame-out end structure of the welding torch in comparison with some embodiments of the present invention and the prior art.

[0026] Explanation of reference numerals in the attached figures:

[0027] 100 First Quartz Plate;

[0028] 101 chamfer;

[0029] 200 Second Quartz Plate.

[0030] 300 welded parts;

[0031] 400 welding torch. Detailed Implementation

[0032] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by those skilled in the art. The terms "comprising" and similar expressions used herein mean that the element or object preceding the word covers the element or object listed after the word and its equivalents, but does not exclude other elements or objects.

[0033] For existing technologies, please refer to the appendix. Figure 2 , 3As shown in the left-hand diagram of part 4, the width of the right-angled edge of the quartz plate bevel is 1 to 3 mm, the locating weld is generally 1 to 1.5 mm, the diameter of the welding part 300 is generally 3 to 4 mm, and then welding is carried out through the welding torch 400 with a single-layer nozzle. The entire welding process requires three people to work together. One person pulls two welding parts 300 by hand, and two people each hold a welding torch 400 to weld one welding part 300. This way of working is very labor-intensive. In addition, the risk factor is also high when multiple people use the welding torch 400 at the same time.

[0034] This invention provides a welding method for quartz plates. Please refer to the attached diagram. Figure 1 Welding methods include:

[0035] S1: Provides a first quartz plate 100 and a second quartz plate 200.

[0036] Specifically, in some specific embodiments of the present invention, the welding surface width of the first quartz plate 100 is 4 to 6 millimeters. For example, the welding surface width can be 4 millimeters, 5 millimeters, or 6 millimeters, with 5 millimeters being the most common.

[0037] S2: Perform a chamfering treatment on the welding surface of the first quartz plate 100.

[0038] It is worth noting that the chamfering here refers to the processing method of cutting the edges of the first quartz plate 100 into a certain bevel. The angle of the bevel is generally 45 degrees, but it can also be 30 degrees or 60 degrees.

[0039] Specifically, in some specific embodiments of the present invention, the width of the right-angled side of the chamfer 101 is 2 to 4 millimeters. For example, the width of the right-angled side can be 2 millimeters, 3 millimeters, or 4 millimeters.

[0040] Obviously, in the embodiments of the present invention, please refer to the appendix. Figure 2 , 3 As shown in the right-hand diagram of Figure 4, this invention only requires one chamfering operation, and the width of the right-angled side of chamfer 101 is 2 to 4 millimeters, which is different from the two chamfering operations in the traditional method, and the width of the right-angled side of chamfer 101 is 1 to 3 millimeters. This invention is more conducive to the subsequent large-diameter welded parts 300 being completed in one pull operation.

[0041] S3: Fix the first quartz plate 100 and the second quartz plate 200, and maintain a preset distance between the welding surfaces of the first quartz plate 100 and the second quartz plate 200.

[0042] Specifically, in some specific embodiments of the present invention, a distance of 1.5 to 2 mm is maintained between the welding surfaces of the first quartz plate 100 and the second quartz plate 200. Obviously, in the embodiments of the present invention, the distance of 1.5 to 2 mm between the welding surfaces of the first quartz plate 100 and the second quartz plate 200 is greater than the 1 to 1.5 mm of the positioning weld under the conventional method. This is also to adapt to the subsequent large-diameter welded parts 300, so as to facilitate the completion of the operation in one pull.

[0043] In addition, please refer to the appendix for some specific embodiments of the present invention. Figure 2 and 3 As shown in the schematic diagram on the right, in this step, the first quartz plate 100 is horizontally fixed and the second quartz plate 200 is vertically fixed by a fixing device, with the welding surface of the first quartz plate 100 facing the welding surface of the second quartz plate 200. Furthermore, in some specific embodiments of the present invention, the chamfer 101 of the first quartz plate 100 is fixed with the chamfer 101 facing upward, which makes it easier for the operator to hold and place the welding part 300. After the welding part 300 melts, it can fill the gap between the first quartz plate 100 and the second quartz plate 200 by its own weight, thereby achieving the purpose of bonding the two quartz plates.

[0044] S4: Place the welding part 300 at the chamfer 101 and weld it with the welding gun 400.

[0045] Specifically, in some specific embodiments of the present invention, the diameter of the welded part 300 is 4 to 5 mm. For example, the diameter of the welded part 300 can be 4 mm, 4.5 mm, or 5 mm. Compared with the welded part 300 in the traditional method, which is generally 3 to 4 mm, the welded part 300 of the present invention has a larger diameter and can fill the positioning weld after melting, thus serving the function of the original two welded parts 300.

[0046] In some specific embodiments of the present invention, please refer to the appendix. Figure 2 and 3 As shown in the diagram on the right, in this step, the weldment 300 is snapped between the chamfer 101 and the second quartz plate 200. At this time, the operator can hold the weldment 300 and place it at the chamfer 101, and press it down to snap the weldment 300 between the chamfer 101 and the second quartz plate 200. This operation is convenient for positioning the weldment 300 and avoids the weldment shaking during the welding process, which affects the welding quality. Secondly, when the weldment 300 melts, it can simultaneously contact the first quartz plate 100 and the second quartz plate 200, ultimately achieving the purpose of bonding the two.

[0047] Furthermore, in some specific embodiments of the present invention, in the welding step using the welding torch 400, a single person holds the workpiece 300 while using the welding torch 400 to perform the welding operation. Compared with the traditional method, which requires three people to work simultaneously, the present invention allows a single person to complete the welding operation, greatly saving labor costs and improving work efficiency.

[0048] In addition, in some specific embodiments of the present invention, the material of the weldment 300 is quartz. The weldment 300 is made of the same material as the two quartz plates. The same material has similar physical and chemical properties, which can reduce inclusions, defects and flaws generated during welding, improve welding quality, increase welding speed, and reduce processing steps such as grinding.

[0049] Furthermore, in some specific embodiments of the present invention, the welding component 300 is a welding wire, welding rod, or welding block. The welding wire, welding rod, or welding block are all used to bond the first quartz plate 100 and the second quartz plate 200 after melting. The difference is that the welding rod and welding wire are both strip-shaped materials, with the former generally having a larger diameter, while the welding block is a block-shaped material that can also be filled in the area to be welded. Among these, the welding wire is the most commonly used.

[0050] In addition, please refer to the appendix for some specific embodiments of the present invention. Figure 5 and 6 , attached Figure 5 and 6 The upper diagram shows a traditional welding torch 400, while the lower diagram shows the welding torch 400 used in this invention. Compared with the traditional single-layer welding torch 400, the double-layer flame of the welding torch 400 of this invention is larger, which can increase the melting speed of the welded part 300, that is, increase the welding speed.

[0051] Specifically, in some specific embodiments of the present invention, the inner diameter of the inner ring of the welding torch 400 with double-layer nozzles is 1.5 to 2 mm, the inner diameter of the outer ring nozzles is 7 to 8 mm, and the nozzle width is generally about 2 mm. With the additional flame provided by the outer ring nozzles, the flame of the present invention is larger than that of the traditional welding torch 400, resulting in higher welding efficiency.

[0052] This invention provides a welding method for quartz plates. Compared to the traditional method of chamfering twice, this invention only requires one chamfering, which simplifies the steps. The welding operation can be completed by a single person holding the welding part 300 on one hand and using a welding gun 400 on the other, realizing the completion of the operation by a single person pulling the material once. Compared to the traditional method of welding by three people, the welding method of this invention saves manpower, improves work efficiency, and is also safer for a single person to use the welding gun 400.

[0053] Using the quartz plate welding method provided by this invention, welding a first quartz plate 100 with a width of 600 mm and a thickness (welding surface width) of 5 mm requires about 3 people working together for about 30 minutes under the traditional method, but now only one person needs to work for about 10 minutes, which significantly saves manpower and greatly improves work efficiency.

[0054] While embodiments of the present invention have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of the invention as set forth in the claims. Furthermore, the invention described herein may have other embodiments and can be implemented or carried out in various ways.

Claims

1. A method for welding quartz plates, characterized in that, include: Provide a first quartz plate and a second quartz plate; The first quartz plate is chamfered on only one welding surface; The first quartz plate and the second quartz plate are fixed, and a preset distance is maintained between the welding surfaces of the first quartz plate and the welding surfaces of the second quartz plate. The quartz welding component is placed at the chamfer and welded with a welding gun. The quartz welding component is a welding wire, welding rod, or welding block.

2. The welding method according to claim 1, characterized in that, In the step of fixing the first quartz plate and the second quartz plate, the first quartz plate is fixed horizontally and the second quartz plate is fixed vertically by a fixing device, with the welding surface of the first quartz plate facing the welding surface of the second quartz plate.

3. The welding method according to claim 2, characterized in that, In the step of fixing the first quartz plate and the second quartz plate, the chamfer of the first quartz plate is facing upwards during fixing.

4. The welding method according to claim 3, characterized in that, In the step of placing the weldment at the chamfer, the weldment is snapped between the chamfer and the second quartz plate.

5. The welding method according to claim 4, characterized in that, In the welding process using the welding torch, a single person holds the workpiece in one hand while using the welding torch to perform the welding operation.

6. The welding method according to claim 1, characterized in that, In the step of providing the first quartz plate and the second quartz plate, the width of the welding surface of the first quartz plate is 4 to 6 millimeters; In the step of chamfering only one welding surface of the first quartz plate, the width of the right-angle side of the chamfer is 2 to 4 millimeters; During the step of fixing the first quartz plate and the second quartz plate, a distance of 1.5 to 2 mm is maintained between the welding surfaces of the first quartz plate and the welding surfaces of the second quartz plate. In the step of placing the weldment at the chamfer, the diameter of the weldment is 4 to 5 millimeters.

7. The welding method according to claim 1, characterized in that, In the welding step using the welding torch, welding is performed using the welding torch with a double-layered nozzle.

8. The welding method according to claim 7, characterized in that, In the welding process using the welding torch, the inner diameter of the inner ring of the double-layered nozzle is 1.5 to 2 mm, and the inner diameter of the outer ring nozzle is 7 to 8 mm.

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