Preparation method of high-purity nano-α-alumina with monodisperse sharp particle size distribution

Abstract

This invention relates to a method for preparing monodisperse, high-purity nano-α-alumina with a sharp particle size distribution, belonging to the field of integrated circuit polishing. The invention uses high-purity micron-sized α-alumina as raw material, and through steps such as preparing high-purity micron-sized α-alumina slurry, wet grinding, centrifugation to remove large particles, hydrochloric acid acidification, and centrifugation separation, prepares monodisperse, sharp-sized, high-purity α-alumina powder with a particle size of 75–85 nm. The method provided by this invention is simple, efficient, and environmentally friendly. The resulting nano-α-alumina exhibits excellent purity and dispersibility, making it particularly suitable for applications in integrated circuit polishing and other fields. This monodisperse, sharp-sized, high-purity nano-α-alumina powder with a particle size of approximately 80 nm has broad application prospects and provides strong support for domestic industrial needs.

Images