Conductive ceramic boat for sputter reduction

Abstract

This application discloses a conductive ceramic evaporation boat for reducing sputtering, belonging to the field of vacuum coating. It includes a body with an evaporation tank for placing aluminum wires. Several guide channels are formed on the sidewall of the body near the evaporation tank, extending along the width of the body and penetrating it. A baffle is installed inside the evaporation tank, co-sintered with the body and surrounding it. An isolation groove is formed around the baffle on the body, located between the isolation groove and the evaporation tank. Both the working surface of the body and the baffle are coated with insulating material. The working surface of the body includes the evaporation tank, the guide channels, and the isolation groove. The baffle has slots for facilitating the backflow of molten aluminum in the isolation groove. This application effectively solves the problem of aluminum sputtering due to conductive boiling of molten aluminum.

Description

Technical Field

[0001] This application relates to the field of vacuum coating, and more particularly to a conductive ceramic evaporation boat for reducing sputtering. Background Technology

[0002] The current mainstream method for vacuum evaporation metallization film involves heating a conductive ceramic evaporation boat to a certain temperature, then continuously feeding high-purity aluminum wire onto the boat. Upon contact with the high temperature, the aluminum wire melts and vaporizes, evaporating onto the film to achieve continuous metallization. This produces industrial aluminum films with a uniform aluminum layer and high gloss. These films are mainly used in high-capacity film capacitors, various aluminum-plastic packaging materials for food preservation, and current collector lithium batteries.

[0003] In the past, aluminum wires were directly fed onto a traditional evaporation boat for heating. Occasionally, molten aluminum would splash during the heating process, a phenomenon commonly known as aluminum splashing. The main reason for aluminum splashing is that after the molten aluminum fills the evaporation boat, it flows onto the conductive electrodes, making the entire molten aluminum conductive and forming a lightning-shaped current channel, causing the molten aluminum to boil and splash. Summary of the Invention

[0004] To address the problem of aluminum splashing during conductive boiling of molten aluminum, this application provides a conductive ceramic evaporation boat that reduces sputtering.

[0005] The conductive ceramic evaporation boat for reducing sputtering provided in this application adopts the following technical solution:

[0006] A conductive ceramic evaporation boat for reducing sputtering includes a body with an evaporation tank for placing aluminum wires. Several guide channels are formed on the sidewall of the body near the evaporation tank, extending along the width of the body and penetrating the body. A baffle is provided inside the evaporation tank, and the baffle is sintered together with the body, surrounding the evaporation tank. An isolation groove is formed around the baffle on the body, located between the isolation groove and the evaporation tank. Both the working surface of the body and the baffle are coated with insulating material. The working surface of the body includes the evaporation tank, the guide channels, and the isolation groove. A slot is formed on the baffle to facilitate the backflow of molten aluminum in the isolation groove. The bottom surface of the isolation groove near the evaporation tank slopes downwards and is recessed.

[0007] By adopting the above technical solution, the operator energizes the main body to heat the aluminum wires in the evaporation tank. After the aluminum wires melt into molten aluminum on the surface of the evaporation boat, the insulating material isolates the molten aluminum from the evaporation boat. Even if the molten aluminum splashes, it enters the guide tank or isolation tank, preventing it from flowing towards the energized electrodes at both ends of the evaporation boat. This avoids the formation of a conductive circuit and prevents boiling-induced splashing, thus improving the quality of the vacuum aluminum plating film. Even if splashing occurs, the splashed aluminum will detach from the evaporation tank and enter the guide tank or isolation tank. The aluminum entering the guide tank flows out along the guide tank or accumulates within it. The insulating material isolates the molten aluminum from the evaporation boat or prevents it from flowing towards the heating electrodes at both ends of the evaporation boat to form a conductive circuit. The molten aluminum entering the isolation tank is in a molten state. Simultaneously, because the part of the isolation tank near the evaporation tank slopes downwards and is recessed, the molten aluminum flows back into the evaporation tank through the tank opening, reducing cleaning frequency and losses. During the evaporation coating operation, due to the presence of insulating material, the molten aluminum spreads in the evaporation tank, preventing the reaction between the molten aluminum and the boron nitride in contact with it at high temperatures to form aluminum nitride. After the boron nitride around the titanium diboride particles has reacted, the titanium diboride particles accumulate on both sides of the evaporation tank due to the push of the molten aluminum. As the evaporation time progresses, the reaction layer continuously increases, and the thickness of the evaporation boat continuously decreases, causing its resistance to gradually increase. While keeping the voltage across the evaporation boat constant, the increased resistance leads to a decrease in heating power, resulting in a drop in the temperature of the evaporation boat.

[0008] Preferably, a baffle is provided in the isolation groove, the height of the baffle is the same as the depth of the isolation groove, and the baffle is sintered together with the body.

[0009] By adopting the above technical solution, when molten aluminum splashes, the splashed molten aluminum will not only fall into the isolation tank or the guide tank, but will also be blocked by the baffle. The baffle is used to improve the blocking effect of splashed molten aluminum. At the same time, the baffle is made of the same material as the body. When the body temperature rises, the temperature at the baffle position also rises. Under normal circumstances, the temperature in the middle of the evaporation tank is the highest. Since the baffle is located on both sides of the evaporation tank, it can increase the temperature of the molten aluminum at the edge and change the temperature distribution at the baffle position, making the flow direction and evaporation of molten aluminum more uniform.

[0010] Preferably, the main body is provided with an auxiliary rod, and a circulation groove is formed inside the auxiliary rod. The circulation groove is connected to the guide groove, and the bottom surface of the circulation groove is higher than the side wall of the main body near the auxiliary rod.

[0011] By adopting the above technical solution, the splashed molten aluminum will simultaneously enter the circulation tank on the auxiliary rod. Since the guide tank is connected to the circulation tank, the molten aluminum entering the circulation tank will flow into the guide tank along the circulation tank under the influence of gravity, so that the molten aluminum will accumulate in the guide tank, making it convenient for cleaning or collection and utilization.

[0012] Preferably, the bottom surface of the guide channel is concave in the middle, and both ends of the guide channel are inclined towards the middle.

[0013] By adopting the above technical solution, the splashed aluminum liquid enters the guide channel through the circulation tank. Since the bottom of the guide channel is inclined, the aluminum liquid in the guide channel is always kept in the middle position of the guide channel, so that the temperature distribution on the body is uniform.

[0014] Preferably, the thickness of the insulating material is 1 to 3 mm, and the insulating material is sintered together with the body after being sprayed onto the body.

[0015] By adopting the above technical solution, after the body and the insulating material are sintered together, even under long-term high temperature conditions, the insulating material can remain on the body for a long time, preventing the insulating material from separating from the body quickly due to high temperature.

[0016] Preferably, the insulating material is composed of boron nitride and titanium boride.

[0017] By adopting the above technical solution, since the aluminum liquid is heated in the evaporation tank, titanium boride reacts with the aluminum liquid, which can improve the sintering performance of the insulating material and obtain a dense material, thereby improving the corrosion resistance. When aluminum interacts with boron nitride, aluminum nitride is generated, which has high stability to steam and liquid metal. It can fill the pores and reduce the porosity of the contact surface between the aluminum liquid and the body, further reducing the amount of aluminum liquid splashing, improving the stability of the aluminum liquid in the evaporation tank, and reducing the corrosive effect of the aluminum liquid on the body.

[0018] Preferably, the insulating material is composed of boron nitride, titanium boride, and aluminum nitride.

[0019] By adopting the above technical solution, aluminum nitride exhibits high stability to steam and liquid metals. It can fill pores and reduce the porosity of the contact surface between the molten aluminum and the substrate, further reducing the amount of molten aluminum splashing and improving the stability of the molten aluminum in the evaporation tank. At the same time, aluminum nitride reduces the amount of reaction between molten aluminum and titanium boride. Even after the molten aluminum reacts with titanium boride, aluminum nitride will be regenerated. Because aluminum nitride has good insulation properties, chemical stability, and high temperature resistance, the generated aluminum nitride, together with the aluminum nitride in the original insulating material, isolates the molten aluminum from direct contact with the substrate, improving the durability of the insulating material and reducing the corrosion of the substrate by the molten aluminum.

[0020] Preferably, the insulating material is composed of boron nitride, titanium boride, aluminum nitride, and tungsten carbide, and the insulating material is applied by plasma spraying, with a porosity of 1% to 5%.

[0021] By adopting the above technical solution, tungsten carbide belongs to the ceramic phase and has the advantages of high melting point, high hardness, poor electrical and thermal conductivity, and stable chemical properties. After being sintered together with boron nitride, titanium boride, and aluminum nitride, the stability of the insulating material is further improved and the durability of the insulating material is guaranteed. The plasma spraying method has a high particle spraying speed, dense coating, and high bonding strength. Since an inert gas is used as the working gas, the insulating material is not easily oxidized.

[0022] Preferably, the insulating material is applied by explosive spraying and has a porosity of 0 to 1%.

[0023] By adopting the above technical solution, since the melting points of each component in the insulating material are high, the explosive spraying method can meet the melting point of the insulating material, reduce the thermal damage to the substrate, facilitate operators to control the thickness of the coating, and achieve high bonding strength between the insulating material and the substrate. At the same time, it makes the insulating material dense and ensures low porosity.

[0024] Preferably, the insulating material is applied using a supersonic spraying method.

[0025] By adopting the above technical solution, the supersonic spraying method can heat the insulating material particles to a molten or semi-molten state and accelerate them to ultra-high speed, spraying the insulating material particles onto the substrate, thereby obtaining a high-quality coating with high bonding strength and density.

[0026] In summary, this application includes at least one of the following beneficial technical effects:

[0027] 1. By setting up an isolation tank, the operator energizes the main body to heat the aluminum wire in the evaporation tank. After the aluminum wire melts into molten aluminum on the surface of the evaporation boat, the insulating material isolates the molten aluminum from the evaporation boat. At the same time, even if the molten aluminum splashes, the splashed molten aluminum enters the guide tank or isolation tank, and the molten aluminum does not flow to the energized electrodes at both ends of the evaporation boat, avoiding the formation of a conductive circuit and the molten aluminum splashing caused by boiling, thereby improving the surface quality of the vacuum aluminum plating film. Even if the molten aluminum splashes, the splashed molten aluminum will leave the evaporation tank and enter the guide tank or isolation tank. The molten aluminum in the guide tank flows out along the guide tank or accumulates in the guide tank. The insulating material isolates the molten aluminum from the evaporation boat or prevents the molten aluminum from flowing to the heating electrodes at both ends of the evaporation boat to form a conductive circuit. The molten aluminum in the isolation tank is in a molten state. At the same time, because the part of the isolation tank near the evaporation tank is inclined downward and concave, the molten aluminum flows back into the evaporation tank through the tank opening, reducing the number of cleaning times and losses.

[0028] 2. By setting up baffles, when molten aluminum splashes, the splashed molten aluminum will not only fall into the isolation tank or the guide tank, but will also be blocked by the baffles. The baffles are used to improve the blocking effect of splashed molten aluminum. At the same time, the baffles are made of the same material as the main body. When the temperature of the main body rises, the temperature at the baffle position also rises. Under normal circumstances, the temperature in the middle of the evaporation tank is the highest. Since the baffles are located on both sides of the evaporation tank, they can increase the temperature of the molten aluminum at the edge and change the temperature distribution at the baffle position, so that the flow direction and evaporation of the molten aluminum are more uniform.

[0029] 3. By setting up a circulation tank, the splashed molten aluminum will simultaneously enter the circulation tank on the auxiliary rod. Since the guide tank is connected to the circulation tank, the molten aluminum entering the circulation tank will flow into the guide tank along the circulation tank under the influence of gravity, so that the molten aluminum will accumulate in the guide tank, making it convenient for cleaning or collection and utilization. Attached Figure Description

[0030] Figure 1 This is a schematic diagram of the structure of a conductive ceramic evaporation boat for reducing sputtering according to an embodiment of this application.

[0031] Figure 2 This is a schematic diagram of the flow channel in an embodiment of this application.

[0032] Figure 3 This is a schematic diagram of the structure of the circulation tank according to an embodiment of this application.

[0033] Figure 4 This is a schematic diagram of the structure of the auxiliary rod according to an embodiment of this application.

[0034] Figure 5 This is a schematic diagram of the structure of the baffle according to an embodiment of this application.

[0035] Explanation of reference numerals in the attached figures:

[0036] 1. Body; 11. Evaporation tank; 12. Flow guide tank; 13. Enclosure; 14. Isolation tank; 15. Baffle; 16. Auxiliary rod; 161. Circulation tank; 2. Insulation material. Detailed Implementation

[0037] The following is in conjunction with the appendix Figure 1-5 This application will be described in further detail.

[0038] This application discloses a conductive ceramic evaporation boat that reduces sputtering.

[0039] Reference Figure 1A conductive ceramic evaporation boat for reducing sputtering includes a body 1, which is horizontally positioned. An evaporation groove 11 is formed on the top surface of the body 1, extending along the length of the body 1. The corners of the evaporation groove 11 are rounded. An insulating material 2, 1-3 mm thick, is sprayed onto the top surface of the body 1 and the inner wall of the evaporation groove 11. The insulating material 2 is sintered together with the body 1. After co-sintering, even under prolonged high temperatures, the insulating material 2 can remain on the body 1 for a longer period, preventing rapid separation of the insulating material 2 from the body 1 due to high temperatures.

[0040] Reference Figure 1 During the evaporation coating process, due to the presence of insulating material 2, the liquid aluminum spreads in the evaporation tank 11, preventing the reaction between the liquid aluminum and the boron nitride in contact with the phase at high temperatures to form aluminum nitride. After the boron nitride around the titanium diboride particles has reacted, the titanium diboride particles accumulate on both sides of the evaporation tank 11 due to the push of the aluminum liquid. As the evaporation time progresses, the reaction layer continuously increases, and the thickness of the evaporation boat continuously decreases, causing its resistance to gradually increase. While keeping the voltage across the evaporation boat constant, the increased resistance leads to a decrease in heating power, resulting in a drop in the temperature of the evaporation boat.

[0041] Example 1

[0042] Reference Figure 2 The main body 1 is also equipped with guide channels 12. Two guide channels 12 are provided on the top surface of the main body 1, and the two guide channels 12 are symmetrically arranged along the axis of the main body 1 and along the width direction of the main body 1. When the operator powers on the main body 1, the aluminum wire in the evaporation tank 11 is heated. After the aluminum wire melts into molten aluminum on the surface of the evaporation boat, the insulating material 2 isolates the molten aluminum from the evaporation boat. At the same time, even if the molten aluminum splashes, the splashed molten aluminum enters the guide channel 12 and does not flow to the energized electrodes at both ends of the evaporation boat, thus avoiding the formation of a conductive circuit and the boiling that would cause the molten aluminum to splash, thereby improving the surface quality of the vacuum aluminum plating film. Even if the molten aluminum splashes, the splashed molten aluminum will leave the evaporation tank 11 and enter the guide channel 12. The molten aluminum in the guide channel 12 flows out along the guide channel 12 or accumulates in the guide channel 12. The insulating material 2 isolates the molten aluminum from the evaporation boat or prevents the molten aluminum from flowing to the heating electrodes at both ends of the evaporation boat to form a conductive circuit.

[0043] Example 2

[0044] Reference Figure 3The main body 1 has two guide channels 12 on its top surface, symmetrically arranged along the axis of the main body 1 and along its width. Two auxiliary rods 16 are also provided on the main body 1, symmetrically arranged along its axis. A circulation channel 161 is formed within each auxiliary rod 16, with one end connected to one guide channel 12 and the other end connected to the other. The bottom surface of the circulation channel 161 is higher than the bottom surface of the guide channels 12. Splashed molten aluminum simultaneously enters the circulation channel 161 on the auxiliary rod 16. Because the guide channels 12 and circulation channels 161 are connected, the molten aluminum entering the circulation channel 161 flows along the circulation channel 161 into the guide channels 12 under the influence of gravity, causing the molten aluminum to accumulate in the guide channels 12 for easy cleaning or collection.

[0045] Reference Figure 4 The bottom surface of the guide channel 12 is concave in the middle, and both ends of the guide channel 12 are inclined towards the middle. The splashed aluminum liquid enters the guide channel 12 through the circulation tank 161. Because the bottom surface of the guide channel 12 is inclined, the aluminum liquid in the guide channel 12 is always kept in the middle position of the guide channel 12, so that the temperature distribution on the body 1 is uniform.

[0046] Example 3

[0047] Reference Figure 5 The main body 1 is provided with a flow guide groove 12, and two flow guide grooves 12 are provided on the top surface of the main body 1. The two flow guide grooves 12 are symmetrically arranged along the axis of the main body 1 and are arranged along the width direction of the main body 1. An isolation groove 14 is also provided inside the main body 1. A baffle 13 is provided on the inner side wall of the evaporation tank 11, which isolates the isolation groove 14 from the evaporation tank 11. The baffle 13 and the main body 1 are sintered together. The bottom surface of the isolation groove 14 is inclined downward and recessed. The bottom surface of the isolation groove 14 away from the evaporation tank 11 is higher than the bottom surface of the isolation groove 14 close to the evaporation tank 11.

[0048] Reference Figure 5The operator powers on the main body 1 to heat the aluminum wire in the evaporation tank 11. After the aluminum wire melts into molten aluminum on the surface of the evaporation boat, the insulating material 2 isolates the molten aluminum from the evaporation boat. Even if the molten aluminum splashes, it enters the guide tank 12 or the isolation tank 14 and does not flow to the energized electrodes at both ends of the evaporation boat, thus avoiding the formation of a conductive circuit and the splashing caused by boiling. This improves the quality of the vacuum aluminum coating film. Even if the molten aluminum splashes, it will leave the evaporation tank 11 and enter the guide tank 12 or the isolation tank 14. The molten aluminum in the guide tank 12 flows out along the guide tank 12 or accumulates in the guide tank 12. The insulating material 2 isolates the molten aluminum from the evaporation boat or prevents it from flowing to the heating electrodes at both ends of the evaporation boat to form a conductive circuit. The molten aluminum in the isolation tank 14 is in a molten state. At the same time, because the part of the isolation tank 14 near the evaporation tank 11 is inclined downward and recessed, the molten aluminum flows back into the evaporation tank 11 through the opening, reducing the number of cleanings and losses.

[0049] Reference Figure 5 The main body 1 is equipped with two baffles 15, which are symmetrically arranged along the axis of the main body 1. The baffles 15 are arranged along the width direction of the main body 1 and are fixedly connected to the bottom surface of the isolation tank 14. The baffles 15 and the main body 1 are sintered together. When molten aluminum splashes, the splashed molten aluminum will fall into the isolation tank 14 or the guide tank 12, and the molten aluminum will also be blocked by the baffles 15. The baffles 15 are used to improve the blocking effect of splashed molten aluminum. At the same time, the baffles 15 are made of the same material as the main body 1. When the temperature of the main body 1 rises, the temperature at the position of the baffles 15 also rises. Under normal circumstances, the temperature in the middle of the evaporation tank 11 is the highest. Since the baffles 15 are located on both sides of the evaporation tank 11, they can increase the temperature of the molten aluminum at the edge and change the temperature distribution at the position of the baffles 15, so that the flow direction and evaporation of the molten aluminum are more uniform.

[0050] Example 4

[0051] The insulating material 2 uses boron nitride and titanium boride. Since the aluminum liquid is heated in the evaporation tank 11, the titanium boride reacts with the aluminum liquid, which can improve the sintering performance of the insulating material 2 and obtain a dense material, thereby improving the corrosion resistance. When aluminum interacts with boron nitride, aluminum nitride is generated, which has high stability to vapor and liquid metal. It can fill the pores and reduce the porosity of the contact surface between the aluminum liquid and the body 1, further reducing the amount of aluminum liquid splashing, improving the stability of the aluminum liquid in the evaporation tank 11, and reducing the corrosive effect of the aluminum liquid on the body 1.

[0052] Example 5

[0053] The insulating material 2 is composed of boron nitride, titanium boride, and aluminum nitride. Aluminum nitride has high stability to vapor and liquid metal. It can fill pores and reduce the porosity of the contact surface between the molten aluminum and the main body 1, further reducing the amount of molten aluminum splashing and improving the stability of the molten aluminum in the evaporation tank 11. At the same time, aluminum nitride reduces the amount of reaction between the molten aluminum and titanium boride. Even after the molten aluminum reacts with titanium boride, aluminum nitride will be regenerated. Because aluminum nitride has good insulation properties, chemical stability, and high temperature resistance, the generated aluminum nitride and the original aluminum nitride in the insulating material 2 together isolate the molten aluminum from direct contact with the main body 1, improve the durability of the insulating material 2, and also reduce the corrosion of the main body 1 by the molten aluminum.

[0054] Example 6

[0055] Insulating material 2 is composed of boron nitride, titanium boride, aluminum nitride, and tungsten carbide. Insulating material 2 is applied using plasma spraying, controlling its porosity to be between 1% and 5%. Tungsten carbide, belonging to the ceramic phase, possesses advantages such as high melting point, high hardness, poor electrical and thermal conductivity, and stable chemical properties. When co-sintered with boron nitride, titanium boride, and aluminum nitride, it further enhances the stability and durability of insulating material 2. The plasma spraying method results in high particle speed, a dense coating, and high bonding strength. Furthermore, the use of an inert gas as the working gas prevents oxidation of insulating material 2.

[0056] The insulating material 2 is applied by explosive spraying and has a porosity of 0 to 1%. Since the melting points of each component in the insulating material 2 are high, the explosive spraying method can meet the melting point of the insulating material 2, reduce the thermal damage to the body 1, facilitate the operator to control the thickness of the coating, and the insulating material 2 has a high bonding strength with the substrate. At the same time, it makes the insulating material 2 dense and ensures a low porosity.

[0057] Example 7

[0058] The insulating material 2 is applied using a supersonic spraying method. This method heats the insulating material 2 particles to a molten or semi-molten state and accelerates them to ultra-high speeds, spraying the insulating material particles onto the body 1 to obtain a high-quality coating with high bonding strength and density.

[0059] The implementation principle of the conductive ceramic evaporation boat for reducing sputtering in this application embodiment is as follows: The operator energizes the main body 1 to heat the aluminum wire in the evaporation tank 11. After the aluminum wire melts into molten aluminum on the surface of the evaporation boat, the insulating material 2 isolates the molten aluminum from the evaporation boat. Even if the molten aluminum splashes, the splashed aluminum enters the guide channel 12 or the isolation channel 14, preventing the molten aluminum from flowing towards the energized electrodes at both ends of the evaporation boat. This avoids the formation of a conductive circuit and prevents aluminum splashing caused by boiling, thereby improving the surface quality of the vacuum aluminum plating film. Even if splashing occurs, the splashed aluminum will detach from the evaporation tank 11 and enter the guide channel 12 or the isolation channel 14. The aluminum entering the guide channel 12 flows out along the guide channel 12 or accumulates within the guide channel 12. The insulating material 2 isolates the molten aluminum from the evaporation boat or prevents the molten aluminum from flowing towards the electrodes at both ends of the evaporation boat. The heating electrode forms a conductive circuit, and the molten aluminum entering the isolation tank 14 is in a molten state. At the same time, because the part of the isolation tank 14 near the evaporation tank 11 is inclined downward and recessed, the molten aluminum flows back into the evaporation tank 11 through the tank opening, reducing the number of cleaning times and losses. During the evaporation coating operation, due to the presence of the insulating material 2, the molten aluminum spreads in the evaporation tank 11, and there is no reaction between the molten aluminum and the boron nitride in contact with it at high temperature to form aluminum nitride. After the boron nitride around the titanium diboride particles has reacted, the titanium diboride particles are pushed by the molten aluminum to accumulate on both sides of the evaporation tank 11. As the evaporation time goes by, the reaction layer continuously increases, the thickness of the evaporation boat continuously decreases, and its resistance gradually increases. With the voltage across the evaporation boat remaining constant, the increase in resistance leads to a decrease in heating power, resulting in a decrease in the temperature of the evaporation boat.

[0060] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A sputtering-reducing conductive ceramic evaporation boat comprising a body (1) having an evaporation slot (11) for placing an aluminum wire, characterized in that: A plurality of guide grooves (12) are provided on the side wall of the main body (1) near the evaporation tank (11). A baffle (13) is provided inside the evaporation tank (11). The baffle (13) and the main body (1) are sintered together. An isolation groove (14) is provided around the baffle (13) on the main body (1). The working surface of the main body (1) and the baffle (13) are coated with insulating material (2). A baffle (15) is provided inside the isolation groove (14). The height of the baffle (15) is the same as the depth of the isolation groove (14). The baffle (15) and the body (1) are sintered together. An auxiliary rod (16) is provided on the main body (1). A circulation groove (161) is provided inside the auxiliary rod (16). The circulation groove (161) is connected to the guide groove (12). The bottom surface of the circulation groove (161) is higher than the side wall of the main body (1) near the auxiliary rod (16).

2. The sputter-reducing conductive ceramic evaporation boat of claim 1, wherein: The bottom of the guide groove (12) is recessed downwards in the middle, and the two ends of the guide groove (12) are inclined towards the middle.

3. The sputter-reducing conductive ceramic evaporation boat of claim 1, wherein: The insulating material (2) has a thickness of 1 to 3 mm, and the insulating material (2) is sintered together with the body (1) after being sprayed onto the body (1).

4. The conductive ceramic evaporation boat for reducing sputtering according to claim 3, characterized in that: The insulating material (2) is composed of boron nitride and titanium boride.

5. The conductive ceramic evaporation boat for reducing sputtering according to claim 3, characterized in that: The insulating material (2) is composed of boron nitride, titanium boride and aluminum nitride.

6. The conductive ceramic evaporation boat for reducing sputtering according to claim 3, characterized in that: The insulating material (2) is composed of boron nitride, titanium boride, aluminum nitride and tungsten carbide. The insulating material (2) is applied by plasma spraying and has a porosity of 1% to 5%.

7. The conductive ceramic evaporation boat for reducing sputtering according to claim 3, characterized in that: The insulating material (2) is applied by explosive spraying and has a porosity of 0 to 1%.

8. The conductive ceramic evaporation boat for reducing sputtering according to claim 3, characterized in that: The insulating material (2) is applied by supersonic spraying.

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