Three-way adjustable mount for vacuum environment

Abstract

This invention provides a three-dimensional adjustable support for vacuum environments, comprising a mounting base plate, an adjusting plate, an adjusting screw assembly, an upper wedge, a lower wedge, an adapter leg, a leg fine-tuning assembly, and a leg fixing screw assembly. The upper wedge is mounted below the adjusting plate, and the lower wedge is mounted on the mounting base plate, with the upper end face of the lower wedge abutting against the lower end face of the upper wedge. The adjusting screw assembly connects the mounting base plate and the adjusting plate, and adjusts the X-axis and / or Z-axis position of the adjusting plate. The adapter leg is positioned above the adjusting plate, and the leg fine-tuning assembly adjusts the Y-axis position of the adapter leg. The leg fixing screw assembly securely connects the adapter leg and the adjusting plate. The adjusting plate's X-axis and Z-axis positions are adjusted. The leg fine-tuning assembly adjusts the Y-axis position of the adapter leg. This completes the three-dimensional coordinate position adjustment of the mounting leg, meeting the requirements for precise positioning of equipment within the vacuum chamber and contributing to improved positioning accuracy.

Description

Technical Field

[0001] This invention relates to the field of vacuum equipment technology, and to a three-way adjustable support for vacuum environments, and more particularly to a precision mounting and adjusting support suitable for large optical equipment and loads in vacuum environments. Background Technology

[0002] Currently, in existing vacuum testing systems both domestically and internationally, especially during the installation of optical components and load devices, an adjustable support base needs to be installed inside the vacuum chamber based on the coordinate system position to ensure precise alignment of the optical components with light. Optical experiments require high levels of vacuum and cleanliness in the vacuum environment.

[0003] Because it is difficult to directly machine a high-precision base for a vacuum chamber, welding deformation, such as twisting and denting, can easily occur when the precision-machined base is welded to the surface of the chamber. This makes it impossible to guarantee the positional accuracy and flatness of the base during installation. Therefore, it is necessary to design corresponding adjustment supports to meet the installation requirements of the equipment.

[0004] The existing Chinese patent application document with publication number CN111352312B discloses a multifunctional photolithography device, including an XY macro motion system and a Z-axis macro-micro three-point leveling system. The XY macro motion system provides XY-axis macro displacement for the Z-axis macro-micro three-point leveling system, and adjusts the wafer stage with a large stroke of multiple axes. The Z-axis macro-micro three-point leveling system achieves high-precision three-point leveling of the wafer stage through a combination of macro motion and micro motion.

[0005] The existing leveling system has a complex structure, with many dead spaces formed at the threaded fastening positions and welding positions, which can easily increase the difficulty of vacuuming. Summary of the Invention

[0006] In view of the deficiencies in the prior art, the purpose of this invention is to provide a three-way adjustable support for use in a vacuum environment.

[0007] According to the present invention, a three-way adjustable support for a vacuum environment includes a mounting base plate, an adjusting plate, an adjusting screw assembly, an upper wedge, a lower wedge, an adapter leg, a leg fine-tuning assembly, and a leg fixing screw assembly. The upper wedge is mounted below the adjusting plate, and the lower wedge is mounted on the mounting base plate, with the upper end face of the lower wedge abutting against the lower end face of the upper wedge. The adjusting screw assembly connects the mounting base plate and the adjusting plate, and adjusts the X-axis position and / or Z-axis position of the adjusting plate. The adapter leg is positioned above the adjusting plate, and the leg fine-tuning assembly adjusts the Y-axis position of the adapter leg. The leg fixing screw assembly fixes the adapter leg and the adjusting plate together.

[0008] Preferably, the mounting base plate has a venting groove on the side facing away from the adjustment plate; a fixing plate for fastening the lower inclined iron is provided on the peripheral side wall of the mounting base plate, and the fixing plate is fixedly connected to the mounting base plate and the lower inclined iron by vacuum screws respectively.

[0009] Preferably, a vacuum screw is passed from bottom to top through the upper inclined iron and then screwed into the adjusting plate to securely connect the upper inclined iron to the adjusting plate.

[0010] Preferably, the adjusting plate is provided with an X-direction adjusting elongated hole, the mounting base plate is provided with a screw mounting hole, the adjusting screw assembly includes a slotted screw, the lower end of the slotted screw is threadedly fastened to the mounting screw hole on the mounting base plate, the adjusting screw assembly passes through the X-direction adjusting elongated hole of the adjusting plate, and nuts are threadedly connected to both the slotted screw above and below the adjusting plate, and the nuts located above and below the adjusting plate cooperate to clamp the adjusting plate.

[0011] Preferably, a washer assembly is provided between the adjusting plate and the nut.

[0012] Preferably, the upper and lower inclined irons are arranged in a corresponding manner, and one or more sets of the upper and lower inclined irons are provided on both sides of the mounting base plate in the X direction and on both sides of the mounting base plate in the Y direction.

[0013] Preferably, at least one set of the outrigger fine-tuning assembly is provided on both sides of the adapter outrigger in the X direction and both sides in the Y direction; the outrigger fine-tuning assembly includes a fine-tuning fixing block, which is fastened to the peripheral wall of the adjustment plate by a vacuum screw; a vacuum screw is threadedly connected to the fine-tuning fixing block, and the threaded end of the vacuum screw passes through the fine-tuning fixing block and abuts against the adapter outrigger.

[0014] Preferably, the base of the adapter leg is provided with a Y-direction adjustment elongated hole, and the leg fixing screw assembly includes a vacuum screw; the vacuum screw passes through the Y-direction adjustment elongated hole from top to bottom, and one end of the vacuum screw that passes through the Y-direction adjustment elongated hole is threaded into a threaded hole on the mounting base plate.

[0015] Preferably, the lower inclined surface of the upper inclined iron is provided with an air venting groove.

[0016] Preferably, the surface flatness of the mounting base plate is better than 0.1 mm and the roughness is 1.6; the surface flatness of the adjusting plate is better than 0.1 mm and the roughness is 1.6, and the hole position error is less than 0.1 mm.

[0017] Compared with the prior art, the present invention has the following beneficial effects:

[0018] 1. This invention adjusts the X-axis and Z-axis positions of the adjustment plate and locks it in place. A wedge is installed at the bottom of the adjustment plate to achieve long-term stable support. A leg fine-tuning assembly is installed on the adjustment plate. The adapter leg is placed on the adjustment plate and initially aligned with the center hole. The Y-axis position of the adapter leg is adjusted by the leg fine-tuning assembly and fixed by the leg vacuum screw assembly. This completes the three-axis coordinate position adjustment of the installed leg, which meets the requirements for precise positioning of equipment in the vacuum chamber and helps to improve the accuracy of positioning.

[0019] 2. The present invention improves the ease of vacuuming the support by setting venting grooves at the bottom of the mounting base plate, venting grooves on the lower inclined surface of the upper inclined iron, slotted screws, and vacuum screws. Attached Figure Description

[0020] Other features, objects, and advantages of the present invention will become more apparent from the following detailed description of non-limiting embodiments with reference to the accompanying drawings:

[0021] Figure 1 This is a schematic diagram illustrating the overall structure of the three-way adjustable support, which is the main feature of this invention.

[0022] Figure 2 This is a half-sectional structural diagram illustrating the side structure of the three-way adjustable support, which is the main feature of this invention.

[0023] Figure 3 This is a full sectional structural diagram illustrating the side structure of the three-way adjustable support, which is the main feature of this invention.

[0024] Figure 4 This is a schematic diagram illustrating the overall structure of the mounting base plate, which is the main feature of this invention.

[0025] Figure 5 This is a schematic diagram illustrating the overall structure of the adjustment plate, which is the main feature of this invention.

[0026] Figure 6 This is a cross-sectional view that mainly illustrates the overall structure of the adjusting screw assembly in this invention;

[0027] Figure 7 This is a schematic diagram illustrating the overall structure of the slotted screw, which is the main feature of this invention.

[0028] Figure 8 This is a schematic diagram illustrating the overall structure of the inclined iron in this invention;

[0029] Figure 9 This is a schematic diagram illustrating the overall structure of the outrigger fine-tuning component, which is the main feature of this invention.

[0030] Figure 10 This is a schematic diagram illustrating the mounting structure of the fixing plate, which is the main feature of this invention.

[0031] As shown in the figure:

[0032] Detailed Implementation

[0033] The present invention will now be described in detail with reference to specific embodiments. These embodiments will help those skilled in the art to further understand the present invention, but do not limit the invention in any way. It should be noted that those skilled in the art can make several changes and improvements without departing from the concept of the present invention. These all fall within the protection scope of the present invention.

[0034] It should be noted that the X, Z, and Y directions in this application refer to the X, Z, and Y directions in a spatial rectangular coordinate system.

[0035] like Figure 1 , Figure 2 as well as Figure 3 As shown, a three-way adjustable support for a vacuum environment according to the present invention includes a mounting base plate 1, an adjusting plate 2, an adjusting screw assembly 3, an upper wedge 4, a lower wedge 5, an adapter leg 7, a leg fine-tuning assembly 8, and a leg fixing screw assembly 9. The upper wedge 4 is mounted below the adjusting plate 2, and the lower wedge 5 is mounted on the mounting base plate 1, with the upper end face of the lower wedge 5 abutting against the lower end face of the upper wedge 4. The adjusting screw assembly 3 connects the mounting base plate 1 and the adjusting plate 2, and adjusts the X-axis position and / or Z-axis position of the adjusting plate 2. The adapter leg 7 is positioned above the adjusting plate 2, the leg fine-tuning assembly 8 adjusts the Y-axis position of the adapter leg 7, and the leg fixing screw assembly 9 fixes the adapter leg 7 and the adjusting plate 2.

[0036] like Figure 1 , Figure 2 , Figure 3 , Figure 4 as well as Figure 5 As shown, specifically, the mounting base plate 1 is made of stainless steel, and a venting groove 12 is machined on the side of the mounting base plate 1 facing away from the adjusting plate 2. The mounting base plate 1 and the cabin adopt an intermittent fillet weld structure to reduce the vacuum dead space. The mounting screw holes for connecting the adjusting screw assembly 3 are machined, with a depth that meets the screw tightening requirements without penetrating. The flatness of the upper and lower surfaces is better than 0.1mm, the roughness is 1.6, and the dimensional and positional tolerances meet the medium-level precision requirements. A fixing plate 20 for fastening the lower wedge 5 is provided on the peripheral side wall of the mounting base plate 1. The fixing plate 20 is fixedly connected to the mounting base plate 1 and the lower wedge 5 by vacuum screws. The lower wedge 5 is made of 304 stainless steel, the angle of the inclined surface meets the m-level precision, and the flatness is better than 0.05mm. The lower inclined iron 5 fixing plate 20 is fastened to the mounting base plate 1 by m8×30 vacuum screws, Φ8 spring washers, and Φ8 flat washers, which can prevent the lower inclined iron 5 from lateral slippage due to long-term load and ensure structural stability and reliability.

[0037] The adjusting plate 2 is made of stainless steel. It has an X-direction adjustment hole, mounting screw holes for connecting the upper inclined iron 4 assembly, and mounting screw holes for connecting the adapter leg 7 fixing screw assembly 9. The surface finish must be better than 0.1mm, with a roughness of 1.6, and the hole position error must be less than 0.1mm. Other dimensional and positional tolerances must meet medium-level precision requirements. The adjusting plate 2 is adjusted for Z-direction height and X-direction position via the adjusting screw assembly 3. A vacuum screw is threaded from bottom to top through the upper inclined iron 4 and then into the adjusting plate 2, securing the upper inclined iron 4 to the adjusting plate 2. The lower inclined surface of the upper inclined iron 4 has a venting groove 12. The upper inclined iron 4 and lower inclined iron 5 are arranged correspondingly, and both upper inclined iron 4 and lower inclined iron 5 are provided in one or more sets on both sides of the mounting base plate 1 in the X direction and on both sides of the mounting base plate 1 in the Y direction. The inclined surface of the upper inclined iron 4 has a machining angle that meets the m-level accuracy and a flatness better than 0.05mm. The inclined surface has countersunk holes and screw holes for connection and fixation with the adjusting plate 2. The center of the inclined surface has a venting groove 1212 to meet the vacuum pumping requirements.

[0038] The adjusting plate 2 has an X-direction adjusting elongated hole, and the mounting base plate 1 has a screw mounting hole. The adjusting screw assembly 3 includes a slotted screw 10, the lower end of which is threadedly fastened to the mounting hole on the mounting base plate 1. The adjusting screw assembly 3 passes through the X-direction adjusting elongated hole of the adjusting plate 2. Nuts 11 are threadedly connected to both the slotted screw 10 above and below the adjusting plate 2, and the nuts 11 above and below the adjusting plate 2 cooperate to clamp the adjusting plate 2. A washer assembly is provided between the adjusting plate 2 and the nuts 11. The slotted screw 10 is made of 316 stainless steel with a strength better than grade 8.8. The screw has a fully threaded structure and two slots, which can effectively prevent the formation of a vacuum dead space in the fastening area between the slotted screw 10 and the mounting base plate 1 and the adjusting plate 2, facilitating vacuum degassing.

[0039] like Figure 6 and Figure 7 As shown, further: the adjusting screw assembly 3 includes a slotted screw 10, an M16 nut 11, a Φ16 spring washer, a Φ16 flat washer, a Φ16 spherical washer, and a Φ16 conical washer. The adjusting screw assembly 3 is fastened to the screw hole in the mounting base plate 1, and the M16 nut 11, Φ16 spring washer, and Φ16 flat washer are further tightened. The adjusting screw assembly 3 is fastened to the adjusting plate 2 using a Φ16 spherical washer, a Φ16 conical washer, and an M16 nut 11. During the adjustment of the height of the adjusting plate 2 and the tightening process, the deflection effect caused by the bolt rotation is reduced, ensuring adjustment accuracy.

[0040] like Figure 8 , Figure 9 as well as Figure 10As shown, at least one set of outrigger fine-tuning components 8 is provided on both sides of the adapter outrigger 7 in the X direction and on both sides in the Y direction. The outrigger fine-tuning components 8 include fine-tuning fixing blocks 21, which are fastened to the peripheral sidewall of the adjusting plate 2 by vacuum screws. Vacuum screws are threaded onto the fine-tuning fixing blocks 21, and the threaded end of the vacuum screws passes through the fine-tuning fixing blocks 21 and abuts against the adapter outrigger 7.

[0041] The base of the adapter leg 7 is provided with a Y-axis adjustment elongated hole, and the leg fixing screw assembly 9 includes a vacuum screw. The vacuum screw passes through the Y-axis adjustment elongated hole from top to bottom, and one end of the vacuum screw protruding from the Y-axis adjustment elongated hole is threaded into a threaded hole on the mounting base plate 1. The upper flange structure of the adapter leg 7 is designed according to the installation requirements of the vacuum chamber equipment, and is connected and fastened to the adjustment plate 2 through the leg fixing screw assembly 9. The mounting plate of the adapter leg 7 is required to have a surface flatness better than 0.1mm and a hole position error less than 0.1mm.

[0042] Furthermore, the outrigger fine-tuning assembly 8 includes a fine-tuning fixing block 21, an m4×20 vacuum screw, a Φ4 spring washer, a Φ4 flat washer, and an m8×50 vacuum screw. The fine-tuning fixing block 21 is fixed to the adjusting plate 2 by the m4×20 vacuum screw, the Φ4 spring washer, and the Φ4 flat washer, and the position of the adapter outrigger 7 is adjusted by the m8×50 vacuum screw. The outrigger fixing screw assembly 9 includes an m12×50 vacuum screw, a Φ12 spring washer, and a Φ12 flat washer, and is used to connect and fix the adjusting plate 2 and the adapter outrigger 7.

[0043] It should be noted that the vacuum screws in this application are made of 316 stainless steel, with a strength superior to grade 8.8. The vacuum screws have a hollow structure, which avoids the dead space problem caused by screw tightening installation. All vacuum screws described below have a center-hole structure. The spring washers and flat washers are made of stainless steel and meet national standard parts. The lower wedge 5 fixing plate 20 is made of stainless steel and has upper and lower fixing holes for fixing to the lower wedge 5 and the mounting base plate 1, respectively. The fine-tuning fixing block 21 is made of stainless steel and has mounting holes for the adjustment plate 2 and adjustment through holes for the adapter leg 7. The X-axis adjustment elongated hole and the Y-axis adjustment elongated hole are both oblong holes.

[0044] During installation, after the mounting base plate 1 is precision machined, it is initially installed and positioned inside the cabin, and then the bottom is intermittently welded to fix its position. The adjusting plate 2 is then fastened to the eight upper inclined iron 4 assemblies. Four slotted screws 10 are inserted into the screw holes of the mounting base and fastened with nuts 11, spring washers, and flat washers. Flat washers, spherical washers, and conical washers are installed on each slotted screw 10, along with nuts 11. The X-direction adjusting elongated hole of the adjusting plate 2 is inserted into the slotted screw 10, allowing the position to be adjusted by sliding along the X-direction. The Z-direction height of the mounting plate is adjusted by adjusting nuts 11, and the X-direction position of the mounting plate is adjusted simultaneously. After the position adjustment is completed, flat washers, spherical washers, and conical washers are installed on the slotted screw 10, along with two nuts 11, and the adjusting plate 2 is locked in place. Using a rubber hammer or similar method, the lower inclined iron 5 is hammered into the position of the upper inclined iron 4 to achieve the load transfer between the upper and lower inclined iron 5. The lower inclined iron 5 is then fastened to the mounting base plate 1 by the fixing plate 20 assembly 6 to prevent the lower inclined iron 5 from slipping under long-term load and causing positional changes. The outrigger fine-tuning assembly 8 is fastened to the adjusting plate 2. The Y-direction adjusting elongated hole of the adapter leg 7 is aligned with the corresponding screw hole of the adjusting plate 2. The Y-direction position of the adjusting plate 2 is adjusted by rotating the vacuum screw on the outrigger fine-tuning assembly 8 back and forth. At the same time, the elongated hole also allows for fine-tuning of the Y-direction position. After the position of the adapter leg 7 is adjusted, the adapter leg 7 is fastened to the outrigger fixing screw assembly 9 to complete the final position adjustment.

[0045] Those skilled in the art will understand that, besides implementing the system and its various devices, modules, and units provided by this invention in the form of purely computer-readable program code, the same functions can be achieved entirely through logical programming of the method steps, making the system and its various devices, modules, and units of this invention function in the form of logic gates, switches, application-specific integrated circuits, programmable logic controllers, and embedded microcontrollers. Therefore, the system and its various devices, modules, and units provided by this invention can be considered as a hardware component, and the devices, modules, and units included therein for implementing various functions can also be considered as structures within the hardware component; alternatively, the devices, modules, and units for implementing various functions can be considered as both software modules implementing the method and structures within the hardware component.

[0046] In the description of this application, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0047] Specific embodiments of the present invention have been described above. It should be understood that the present invention is not limited to the specific embodiments described above, and those skilled in the art can make various changes or modifications within the scope of the claims, which do not affect the essence of the present invention. Unless otherwise specified, the embodiments and features described in this application can be arbitrarily combined with each other.

Claims

1. A three-way adjustable support for use in a vacuum environment, characterized in that, It includes a mounting base plate (1), an adjustment plate (2), an adjustment screw assembly (3), an upper wedge (4), a lower wedge (5), a connecting leg (7), a leg fine-tuning assembly (8), and a leg fixing screw assembly (9). The upper inclined iron (4) is installed below the adjusting plate (2), the lower inclined iron (5) is installed on the mounting base plate (1), the upper end face of the lower inclined iron (5) is in contact with the lower end face of the upper inclined iron (4), the adjusting screw assembly (3) connects the mounting base plate (1) and the adjusting plate (2), and the adjusting screw assembly (3) adjusts the X-direction position and / or Z-direction position of the adjusting plate (2); The adapter leg (7) is positioned above the adjustment plate (2), the leg fine-tuning assembly (8) adjusts the Y-direction position of the adapter leg (7), and the leg fixing screw assembly (9) fixes the adapter leg (7) and the adjustment plate (2) in place. The mounting base plate (1) has an air vent (12) on the side away from the adjustment plate (2); The mounting base plate (1) is provided with a fixing plate (20) for fastening the lower inclined iron (5) on its peripheral side wall. The fixing plate (20) is fixedly connected to the mounting base plate (1) and the lower inclined iron (5) by vacuum screws (17). The adjusting plate (2) is provided with an X-direction adjusting elongated hole, and the mounting base plate (1) is provided with a screw mounting hole. The adjusting screw assembly (3) includes a slotted screw (10). The lower end of the slotted screw (10) is threadedly fastened to the mounting hole on the mounting base plate (1). The adjusting screw assembly (3) passes through the X-direction adjusting elongated hole of the adjusting plate (2). Nuts (11) are threadedly connected to both the slotted screw (10) above the adjusting plate (2) and the slotted screw (10) below the adjusting plate (2). The nuts (11) located above and below the adjusting plate (2) cooperate to clamp the adjusting plate (2).

2. The three-way adjustable support for a vacuum environment as described in claim 1, characterized in that, By passing a vacuum screw (17) from bottom to top through the upper inclined iron (4) and then screwing it into the adjusting plate (2), the upper inclined iron (4) and the adjusting plate (2) are securely connected.

3. The three-way adjustable support for a vacuum environment as described in claim 1, characterized in that, A washer assembly is provided between the adjusting plate (2) and the nut (11).

4. The three-way adjustable support for a vacuum environment as described in claim 1, characterized in that, The upper inclined iron (4) and the lower inclined iron (5) are arranged in a corresponding manner, and the upper inclined iron (4) and the lower inclined iron (5) are provided with one set or multiple sets at intervals on both sides of the mounting base plate (1) in the X direction and on both sides of the mounting base plate (1) in the Y direction.

5. The three-way adjustable support for a vacuum environment as described in claim 1, characterized in that, The outrigger fine-tuning assembly (8) is provided with at least one set on both sides of the adapter outrigger (7) in the X direction and on both sides in the Y direction; The outrigger fine-tuning assembly (8) includes a fine-tuning fixing block (21), which is fastened to the peripheral wall of the adjusting plate (2) by a vacuum screw (17). A vacuum screw (17) is threaded onto the fine-tuning fixing block (21), and the threaded end of the vacuum screw (17) passes through the fine-tuning fixing block (21) and abuts against the adapter leg (7).

6. The three-way adjustable support for a vacuum environment as described in claim 1, characterized in that, The base of the adapter leg (7) is provided with a Y-direction adjustment elongated hole, and the leg fixing screw assembly (9) includes a vacuum screw (17). The vacuum screw (17) passes through the Y-direction adjustment long hole from top to bottom, and the end of the vacuum screw (17) that passes through the Y-direction adjustment long hole is screwed into the threaded hole on the mounting base plate (1).

7. The three-way adjustable support for a vacuum environment as described in claim 1, characterized in that, The lower inclined surface of the upper inclined iron (4) is provided with an air vent (12).

8. The three-way adjustable support for a vacuum environment as described in claim 1, characterized in that, The surface flatness of the mounting base plate (1) is better than 0.1 mm, and the roughness is 1.

6. The surface flatness of the adjustment plate (2) is better than 0.1 mm, the roughness is 1.6, and the hole position error is less than 0.1 mm.

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