Guiding device for semiconductor process equipment

Abstract

The application discloses a guiding device for a semiconductor process equipment, which comprises a base, an outer tube positioning protrusion and a first positioning member arranged on the base; the outer tube positioning protrusion is used for cooperating with a pipe opening of an outer tube assembly of the semiconductor process equipment, and the first positioning member is used for positioning cooperation with a first positioning part of the outer tube assembly to limit rotation of the outer tube assembly relative to the outer tube positioning protrusion. The above scheme can solve the problem that the outer tube assembly is rotated in the lifting process, and the position deviation of the outer tube assembly is large.

Description

Technical Field

[0001] This invention relates to the field of semiconductor process equipment technology, and in particular to a guiding device for semiconductor process equipment. Background Technology

[0002] In semiconductor process equipment, some process chambers employ a dual-tube design, including an inner tube assembly and an outer tube assembly, such as vertical furnace process equipment used in low-pressure chemical vapor deposition (LPCVD). When assembling or disassembling semiconductor process equipment with a dual-tube design, a guiding device is typically required.

[0003] In related technologies, when installing the outer tube assembly, a guide device is placed on a lifting device, the outer tube assembly is then placed on the guide device for initial positioning, and finally lifted by the lifting device to install the outer tube assembly into the furnace of the semiconductor process equipment. However, although the outer tube assembly is initially positioned when placed on the guide device, it may still rotate around its central axis during the lifting process, resulting in significant positional deviations during installation. Summary of the Invention

[0004] This invention discloses a guiding device for semiconductor process equipment to solve the problem in related technologies where the outer tube assembly rotates during the lifting process, resulting in a large positional deviation of the outer tube assembly.

[0005] To solve the above-mentioned technical problems, the present invention is implemented as follows:

[0006] This application discloses a guiding device for semiconductor process equipment, the guiding device including a base and an outer tube positioning protrusion and a first positioning element disposed on the base;

[0007] The outer tube positioning protrusion is used to engage with the nozzle of the outer tube assembly of the semiconductor process equipment, and the first positioning member is used to engage with the first positioning part of the outer tube assembly to restrict the rotation of the outer tube assembly relative to the outer tube positioning protrusion.

[0008] The technical solution adopted in this invention can achieve the following technical effects:

[0009] The guiding device disclosed in this application provides a first positioning element, which ensures that when the outer tube assembly is placed on the guiding device, the edge of the outer tube assembly's opening is fitted onto the outer tube positioning protrusion. The first positioning element and the first positioning part are positioned and engaged, thereby restricting the rotation of the outer tube assembly relative to the outer tube positioning protrusion. This prevents the outer tube assembly from rotating relative to the outer tube positioning protrusion after being placed on the base, allowing the outer tube assembly to be installed more accurately inside the furnace. This solves the problem in related technologies where the outer tube assembly rotates during installation, causing a large positional deviation of the outer tube assembly. Attached Figure Description

[0010] Figure 1 This is a schematic diagram of the guiding device disclosed in an embodiment of the present invention from a first perspective;

[0011] Figure 2 This is a schematic diagram of the guiding device disclosed in an embodiment of the present invention from a second perspective;

[0012] Figure 3 This is a schematic diagram of the guiding device disclosed in an embodiment of the present invention from a third-person perspective;

[0013] Figure 4 for Figure 3 Sectional view at point AA;

[0014] Figure 5 A structural diagram of the base, the positioning protrusion of the outer tube, and the first positioning component;

[0015] Figure 6 A schematic diagram showing the outer tube assembly's outer tube seat placed on the base;

[0016] Figure 7 A schematic diagram showing the placement of the inner tube assembly in the guide device;

[0017] Figure 8 A schematic diagram of the guiding device lifting the inner tube assembly into the outer tube assembly;

[0018] Figure 9 This is a schematic diagram showing the outer tube assembly and inner tube assembly installed in sequence.

[0019] Explanation of reference numerals in the attached figures:

[0020] 110 - Outer tube assembly, 111 - Outer tube seat, 111a - First positioning part

[0021] 120 - Inner tube assembly, 121 - Second positioning part, 122 - Third positioning part

[0022] 210-Base, 211-Positioning hole, 220-Outer tube positioning protrusion, 230-First positioning component

[0023] 310-Inner tube support assembly, 311-Rotating component, 311a-Sliding groove, 312-Inner tube support body, 313-Second positioning component, 314-Third positioning component, 314a-Positioning body, 314b-Sliding part, 315-Limiting component, 315a-Avoidance channel,

[0024] 410-Fourth positioning component

[0025] 510 - Turn handle,

[0026] 610-Height limiting component

[0027] 710-Support Column

[0028] 810 - Furnace body. Detailed Implementation

[0029] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly and completely described below in conjunction with specific embodiments and corresponding drawings. Obviously, the described embodiments are only a part of the embodiments of this invention, and not all of them. Based on the embodiments of this invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this invention.

[0030] The technical solutions disclosed in the various embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0031] Please refer to Figures 1 to 9 This invention discloses a guiding device for semiconductor process equipment. The semiconductor process equipment may be a vertical furnace LPCVD process equipment. The semiconductor process equipment may include an outer tube assembly 110, which may include a first positioning part 111a. The outer tube assembly 110 may include an outer tube and an outer tube seat 111. The outer tube seat 111 may be installed at the tube opening of the outer tube, and the first positioning part 111a may be disposed on the outer tube seat 111.

[0032] The guiding device includes a base 210, an outer tube positioning protrusion 220, and a first positioning member 230. The outer tube positioning protrusion 220 is disposed on the base 210, and the first positioning member 230 is disposed on the base 210, with a gap between the first positioning member 230 and the outer tube positioning protrusion 220. The base 210 can be a plate-like component, and the outer tube positioning protrusion 220 and the first positioning member 230 can be disposed on the plate surface of the plate-like component. There can be multiple first positioning members 230 and multiple first positioning parts 111a, and the multiple first positioning members 230 and multiple first positioning parts 111a can be positioned and engaged in a one-to-one correspondence.

[0033] The outer tube positioning protrusion 220 is used to mate with the nozzle of the outer tube assembly 110 of the semiconductor process equipment. The mating between the outer tube positioning protrusion 220 and the nozzle of the outer tube assembly 110 can be such that the edge of the nozzle of the outer tube assembly 110 is fitted onto the outer tube positioning protrusion 220. The first positioning member 230 is used to position and mate with the first positioning part 111a of the outer tube assembly 110 to restrict the rotation of the outer tube assembly 110 relative to the outer tube positioning protrusion 220.

[0034] When the outer tube assembly 110 is used in conjunction with the guide device, the edge of the tube opening of the outer tube assembly 110 can be fitted onto the outer tube positioning protrusion 220. The first positioning member 230 is positioned and engaged with the first positioning part 111a to restrict the rotation of the outer tube assembly 110 relative to the outer tube positioning protrusion 220.

[0035] Specifically, one of the first positioning member 230 and the first positioning part 111a can be a groove-shaped structure, and the other can be a protrusion. The protrusion can be positioned within the groove of the groove-shaped structure to restrict the rotation of the outer tube assembly 110 relative to the outer tube positioning protrusion 220. Alternatively, the first positioning member 230 and the first positioning part 111a can be a bayonet structure, where they can be engaged to restrict the rotation of the outer tube assembly 110 relative to the outer tube positioning protrusion 220. Of course, the positioning engagement of the first positioning member 230 and the first positioning part 111a can also be in other ways, which will not be elaborated here.

[0036] In the specific implementation process, the semiconductor process equipment includes a furnace body 810. The outer tube assembly 110 needs to be lifted into the furnace body 810 so that it can be installed inside. Before the outer tube assembly 110 is installed into the furnace body 810, a guide device needs to be placed on a lifting device, and then the outer tube assembly 110 is placed on the guide device. The lifting device then lifts the outer tube assembly 110 into the furnace body 810 for installation. When the outer tube assembly 110 is placed on the guide device, the edge of the tube opening of the outer tube assembly 110 is fitted onto the outer tube positioning protrusion 220. The first positioning member 230 and the first positioning part 111a are positioned and engaged to restrict the rotation of the outer tube assembly 110 relative to the outer tube positioning protrusion 220. The outer tube positioning protrusion 220 and the first positioning member 230 can position the outer tube assembly 110 so that the lifting process of the lifting device can accurately install it into the furnace body 810.

[0037] The guiding device disclosed in this application embodiment, by setting a first positioning member 230, ensures that when the outer tube assembly 110 is placed on the guiding device, the edge of the tube opening of the outer tube assembly 110 is fitted onto the outer tube positioning protrusion 220. The first positioning member 230 and the first positioning part 111a are positioned and engaged, avoiding errors in visual alignment. This restricts the rotation of the outer tube assembly 110 relative to the outer tube positioning protrusion 220, thereby preventing the outer tube assembly 110 from rotating relative to the outer tube positioning protrusion 220 after being placed on the base 210. This allows the outer tube assembly 110 to be installed more accurately inside the furnace body 810, thus solving the problem in related technologies where the outer tube assembly rotates during installation, causing a large positional deviation of the outer tube assembly.

[0038] Optionally, the outer tube positioning protrusion 220 can be annular, and the first positioning member 230 is located outside the outer tube positioning protrusion 220 and has an extension surface extending toward the outer tube positioning protrusion 220, the extension surface being used to engage with the first positioning part 111a.

[0039] In this embodiment, the outer tube positioning protrusion 220 is made into an annular shape, which facilitates its engagement with the opening of the outer tube assembly 110. By positioning the first positioning member 230 outside the outer tube positioning protrusion 220 and having an extension surface extending toward the outer tube positioning protrusion 220, the first positioning member 230 can better avoid the engagement between the outer tube positioning protrusion 220 and the outer tube positioning protrusion 220. By using the extension surface to engage with the first positioning part 111a, the engagement between the outer tube positioning protrusion 220 and the outer tube positioning protrusion 220 can be made more stable.

[0040] In an optional embodiment, the semiconductor process equipment may further include an inner tube assembly 120, which is installed inside the outer tube assembly 110 after the outer tube assembly 110 is installed inside the furnace body 810. The wafer boat assembly of the semiconductor process equipment can carry wafers in and out of the inner tube assembly 120 for processing the wafers.

[0041] The furnace body 810 can be used to provide heat to the inner tube assembly 120 and the outer tube assembly 110. The guiding device may also include an inner tube support assembly 310, which may include a rotating member 311 and an inner tube support body 312. The rotating member 311 may be detachably mounted on the base 210 and may rotate about the central axis of the rotating member 311.

[0042] Specifically, one of the rotating component 311 and the base 210 may be provided with a rotating groove, and the other may be provided with a rotating support shaft. The rotating support shaft can be inserted into the rotating groove so that the rotating component 311 can rotate about its central axis. Alternatively, the rotating component 311 and the base 210 may be rotatably connected via bearings to allow the rotating component 311 to rotate about its central axis. Of course, the rotating component 311 and the base 210 may also be rotatably connected in other ways.

[0043] The inner tube support body 312 can be disposed on the rotating part 311. The inner tube support body 312 can be used to support the inner tube assembly 120 of the semiconductor process equipment and can drive the inner tube assembly 120 to rotate around the central axis.

[0044] Specifically, the inner side of the pipe opening edge of the outer tube assembly 110 is provided with an outer tube notch and an outer tube groove, and the outer side of the pipe opening edge of the inner tube assembly 120 may be provided with a protrusion. During the process of the inner tube assembly 120 extending into the outer tube assembly 110, the protrusion on the outer side of the pipe opening edge of the inner tube assembly 120 can pass through the outer tube notch. At this time, the rotation of the rotating component 311 can drive the inner tube assembly 120 to rotate, so that the protrusion on the outer side of the pipe opening edge of the inner tube assembly 120 is opposite to the outer tube groove. Then the guide device is lowered so that the protrusion on the outer side of the pipe opening edge of the inner tube assembly 120 falls into the outer tube groove, thereby completing the installation of the inner tube assembly 120 into the outer tube assembly 110.

[0045] In this embodiment, the inner tube support assembly 310 is configured to include a rotating member 311 and an inner tube support body 312. The rotating member 311 is detachably mounted on the base 210 and can rotate around the central axis of the rotating member 311. This allows the inner tube support body 312 to support the inner tube assembly 120 and drive the inner tube assembly 120 to rotate around the central axis, so that the inner tube assembly 120 can be installed inside the outer tube assembly 110.

[0046] In related technologies, the inner tube assembly 120 has a support protrusion on the inner side of its tube opening edge. The tube opening of the inner tube assembly 120 is fitted onto the inner tube support body 312, and the support protrusion is supported on the inner tube support body 312, thereby enabling the inner tube assembly 120 to be placed on the guide device. However, providing a support protrusion on the inner side of the tube opening edge of the inner tube assembly 120 increases the manufacturing complexity of the inner tube assembly 120. To reduce the manufacturing complexity of the inner tube assembly 120, optionally, the inner tube support body 312 may include a bearing portion and an inner tube positioning protrusion, with the inner tube positioning protrusion located on the bearing portion. When the inner tube assembly 120 cooperates with the guide device, the tube opening edge of the inner tube assembly 120 can be fitted onto the inner tube positioning protrusion and supported on the bearing portion.

[0047] In this embodiment, the inner tube support body 312 is configured to include a support portion and an inner tube positioning protrusion. The inner tube positioning protrusion can be located on the support portion. When the inner tube assembly 120 cooperates with the guide device, the edge of the inner tube assembly 120 can be fitted onto the inner tube positioning protrusion and supported on the support portion, thereby supporting the inner tube assembly 120. This avoids setting a support protrusion on the inner surface of the edge of the inner tube assembly 120, thereby reducing the complexity of manufacturing the inner tube assembly 120, simplifying the inner tube assembly 120, and reducing the processing cost of the inner tube assembly 120.

[0048] When the inner tube assembly 120 is supported by the inner tube support body 312, it is necessary to position the inner tube assembly 120 in the direction surrounding the central axis to ensure the accuracy of the inner tube assembly 120 in the direction surrounding the central axis during the process of lifting and installing the inner tube assembly 120 into the outer tube assembly 110. In an optional embodiment, the inner tube assembly 120 may include a second positioning part 121, and the inner tube support assembly 310 may further include a second positioning member 313. The second positioning member 313 is movably disposed on the rotating member 311 and may have a first position and a second position. When the inner tube assembly 120 cooperates with the guide device, and when the second positioning member 313 is in the first position, the second positioning member 313 can be positioned and cooperated with the second positioning part 121 around the central axis. When the second positioning member 313 is in the second position, the second positioning member 313 can be separated from the second positioning part 121. In the above embodiment, a protrusion on the outer side of the tube opening edge of the inner tube assembly 120 can serve as the second positioning part 121.

[0049] Specifically, when the inner tube assembly 120 is placed on the inner tube support body 312, the position of the inner tube assembly 120 is adjusted so that the second positioning part 121 of the inner tube assembly 120 is opposite to the second positioning member 313. At this time, the second positioning member 313 is rotated to the first position so that the second positioning member 313 can be positioned and engaged with the second positioning part 121 around the central axis, thereby determining the position of the inner tube assembly 120 in the direction around the central axis. When the inner tube assembly 120 is lifted to be installed into the outer tube assembly 110, the second positioning member 313 needs to be rotated to the second position so that the second positioning member 313 is separated from the second positioning part 121. This is to avoid the second positioning member 313 being limited and blocked at the edge of the tube opening of the outer tube assembly 110 when the inner tube assembly 120 is inserted into the outer tube assembly 110 and needs to be rotated to install the inner tube assembly 120 into the outer tube assembly 110.

[0050] The second positioning member 313 can be a groove-shaped positioning member, and the second positioning part 121 can be a protrusion on the outer wall of the inner tube assembly 120. The protrusion on the outer wall of the inner tube assembly 120 can be located in the groove of the groove-shaped positioning member, so that the second positioning member 313 and the second positioning part 121 are positioned and engaged around the central axis. Of course, the second positioning member 313 and the second positioning part 121 can also be positioned and engaged by snap-fit ​​or other means, and no specific limitation is made here.

[0051] Optionally, the inner tube assembly 120 may further include a third positioning part 122, and the inner tube support assembly 310 may further include a third positioning member 314. The third positioning member 314 may be movably disposed on the rotating member 311, and the height of the third positioning member 314 may be lower than that of the inner tube support body 312. The third positioning member 314 may have a third position and a fourth position. During the process of the inner tube assembly 120 moving into the outer tube assembly 110, the third positioning member 314 may be located in the third position, and the third positioning member 314 may be opposite to the third positioning part 122. During the process of the inner tube assembly 120 moving into the outer tube assembly 110 and rotating relative to the outer tube assembly 110, the third positioning member 314 may make limiting contact with the outer tube assembly 110 in the direction of rotation around the central axis, so that the third positioning member 314 can move to the fourth position, and the third positioning member 314 may be misaligned with the third positioning part 122.

[0052] This embodiment of the application provides a third positioning member, such that during the movement of the inner tube assembly 120 into the outer tube assembly 110, the third positioning member 314 is located in a third position and opposite to the third positioning part 122. This allows for real-time confirmation of the actual position of the inner tube assembly 120 around the central axis during the lifting process, ensuring the accuracy of the position of the inner tube assembly 120 in the direction around the central axis. Since the third positioning member 314 is movably disposed on the rotating member 311, during the movement of the inner tube assembly 120 into the outer tube assembly 110 and its rotation relative to the outer tube assembly 110, the third positioning member 314 can make limiting contact with the outer tube assembly 110 in the direction of rotation around the central axis. This allows the third positioning member 314 to move to a fourth position, where it can be misaligned with the third positioning part 122, thereby preventing the third positioning member 314 from contacting the outer tube assembly 110 and restricting the rotation of the rotating member 311.

[0053] In one optional embodiment, the rotating member 311 may have a sliding groove 311a, the third positioning member 314 may include a positioning body 314a and a sliding part 314b, and the inner tube support assembly 310 may further include a limiting member 315. The limiting member 315 may have a clearance channel 315a, the limiting member 315 may cover the sliding groove 311a, and the clearance channel 315a may communicate with the sliding groove 311a. The sliding part 314b may be slidably disposed in the sliding groove 311a, so that the third positioning member 314 can move between a third position and a fourth position. The positioning body 314a may extend through the clearance channel 315a to the outside of the sliding groove 311a, and the limiting member 315 may engage with the sliding part 314b in a limiting fit at the opening of the sliding groove 311a. During the process of the inner tube assembly 120 moving into the outer tube assembly 110, the third positioning member 314 may be located in the third position, and the positioning body 314a is opposite to the third positioning part 122. During the process of the inner tube assembly 120 moving into the inner tube assembly 110 and rotating relative to the outer tube assembly 110, the positioning body 314a and the outer tube assembly 110 can be limited to contact in the direction of rotation around the central axis. The positioning body 314a can be moved to the fourth position along the sliding groove 311a via the sliding part 314b, and the positioning body 314a is misaligned with the third positioning part 122.

[0054] In this embodiment, the third positioning member 314 is configured to include a positioning body 314a and a sliding part 314b. The inner tube support assembly 310 includes a limiting member 315, which has an avoidance channel 315a. The limiting member 315 covers the sliding groove 311a and communicates with the sliding groove 311a. The sliding part 314b is slidably disposed in the sliding groove 311a, so that the third positioning member 314 can move between the third position and the fourth position. The positioning body 314a can extend through the avoidance channel 315a to the outside of the sliding groove 311a. The limiting member 315 can cooperate with the sliding part 314b in a limiting fit at the opening of the sliding groove 311a. This makes the movable cooperation between the third positioning member 314 and the rotating member 311 relatively simple.

[0055] In related technologies, during the process of the inner tube assembly 120 extending into the outer tube assembly 110, the edge of the inner tube assembly 120 must extend into the interior of the outer tube assembly 110. Then, the inner tube assembly 120 is rotated to mate with the outer tube assembly 110. If the inner tube assembly 120 is not fully inserted, it will interfere with the outer tube assembly 110, preventing rotation. To confirm whether the inner tube assembly 120 is properly inserted into the outer tube assembly 110, it is rotated. If the inner tube assembly 120 interferes with the outer tube assembly 110 and cannot rotate, it indicates that it is not fully inserted. If the inner tube assembly 120 can rotate within the outer tube assembly 110, it indicates that it is properly inserted. However, this method of confirming the insertion position of the inner tube assembly 120 by rotating it can easily damage both the inner and outer tube assemblies. To confirm whether the inner tube assembly 120 is properly installed and to avoid damage to both the inner tube assembly 120 and the outer tube assembly 110, optionally, the positioning body 314a may be provided with scale lines. These scale lines can be used to mate with the edge of the outer tube assembly 110's opening to confirm the position of the inner tube assembly 120 extending into the outer tube assembly 110. By providing scale lines on the positioning body 314a, the position of the inner tube assembly 120 can be confirmed by the scale lines and the edge of the outer tube assembly's opening during its insertion into the outer tube assembly 110. This solves the problem in related technologies where the position of the inner tube assembly 120 is confirmed by rotating the inner tube assembly 120 to check whether it obstructs the outer tube assembly 110.

[0056] To further confirm the position of the inner tube assembly 120 in the direction around the central axis as it extends into the outer tube assembly 110, the guiding device may optionally include a fourth positioning member 410. The fourth positioning member 410 may be installed on the first positioning member 230 and may be used to position and cooperate with the first positioning part 111a to confirm the position of the inner tube assembly 120 relative to the outer tube assembly 110.

[0057] Specifically, the fourth positioning element 410 can be detachably installed on the first positioning element 230. During the upward lifting of the inner tube assembly 120, the fourth positioning element 410 needs to be positioned and engaged with the first positioning part 111a to ensure the position of the inner tube assembly 120 in the direction around the central axis, thereby ensuring the accuracy of the position of the inner tube assembly 120 when it is installed into the outer tube assembly 110. If misalignment between the fourth positioning element 410 and the first positioning part 111a is found during the upward lifting of the inner tube assembly 120, the position of the base 210 needs to be adjusted in time to adjust the position of the inner tube assembly 120 in the direction around the central axis.

[0058] By providing the fourth positioning element 410, during the upward lifting of the inner tube assembly 120, the fourth positioning element 410 engages with the first positioning part 111a, ensuring the position of the inner tube assembly 120 in the direction around the central axis, thereby ensuring the accuracy of the position of the inner tube assembly 120 when it is installed into the outer tube assembly 110.

[0059] Optionally, the guiding device may also include a rotating handle 510, which can be connected to the rotating component 311. A limiting groove can be formed on the outer periphery of the outer tube positioning protrusion 220. The rotating handle 510 can be located in the limiting groove and can drive the rotating component 311 to rotate between the two ends of the limiting groove.

[0060] By setting a rotating handle 510, the rotation of the rotating component 311 can be facilitated. By opening a limiting groove on the outer periphery of the outer tube positioning protrusion 220, the rotating handle 510 can be located in the limiting groove, thereby limiting the range of rotation of the rotating component 311 and preventing the rotating component 311 from rotating without restriction.

[0061] To prevent the inner tube assembly 120 from excessively penetrating the outer tube assembly 110 and causing damage to either the inner or outer tube assembly 110, the guiding device may optionally include a height limiting member 610, which may be located on the rotating member 311. When the inner tube assembly 120 moves into the interior of the outer tube assembly 110, the height limiting member 610 can abut against the edge of the outer tube assembly 110's opening, thereby preventing the inner tube assembly 120 from excessively penetrating the outer tube assembly 110 and causing damage to either the inner or outer tube assembly 120.

[0062] Since the inner tube assembly 120 needs to extend into the interior of the outer tube assembly 110, optionally, the inner tube support assembly 310 may also include a support column 710. The support column 710 can be connected between the rotating member 311 and the inner tube support body 312 to support the inner tube support body 312. By setting the support column 710, a height difference can be created between the inner tube support body 312 and the base 210, thereby facilitating the extension of the inner tube assembly 120 into the outer tube assembly 110.

[0063] In related technologies, before lifting the inner tube assembly 120 or the outer tube assembly 110 by a lifting device, manual labor is required to move the outer tube assembly 110 or the inner tube assembly 120 onto the guide device on the lifting device, which is time-consuming and labor-intensive. Optionally, this application can use a transfer device to move the inner tube assembly 120 or the outer tube assembly 110. Specifically, the base 210 can be provided with a positioning hole 211, and the carrier platform of the transfer device can be provided with a positioning pin. The positioning hole 211 is used to engage with the positioning pin of the carrier platform of the transfer device, so that the base 210 is positioned on the carrier platform. The guide device is positioned on the transfer device by engaging the positioning hole 211 of the base 210 with the positioning pin. At this time, the inner tube assembly 120 or the outer tube assembly 110 is placed on the guide device and moved to the vicinity of the lifting device by the transfer device. The carrier platform of the transfer device can have a hollowed-out area with an open end. The base 210 covers the hollowed-out area. When the transfer device moves to the vicinity of the lifting device, a robotic arm can be inserted under the hollowed-out area to lift the base 210 and the inner tube assembly 120 or the outer tube assembly 110 together and place them on the lifting device. This solves the problem in related technologies where it is time-consuming and labor-intensive to manually move the outer tube assembly 110 or the inner tube assembly 120 onto the guide device on the lifting device.

[0064] The positioning of the guide device on the lifting device can be achieved by having a protrusion on one side of the base 210 and a groove on the other side, and the position of the guide device on the lifting device can be confirmed by the cooperation of the protrusion and the groove.

[0065] The above embodiments of the present invention focus on describing the differences between the various embodiments. As long as the different optimization features between the various embodiments are not contradictory, they can be combined to form a better embodiment. For the sake of brevity, they will not be described in detail here.

[0066] The embodiments of the present invention have been described above with reference to the accompanying drawings. However, the present invention is not limited to the specific embodiments described above. The specific embodiments described above are merely illustrative and not restrictive. Those skilled in the art can make many other forms under the guidance of the present invention without departing from the spirit and scope of the claims, and all of these forms are within the protection scope of the present invention.

Claims

1. A guiding device for semiconductor process equipment, characterized in that, The guiding device includes a base (210) and an outer tube positioning protrusion (220) and a first positioning member (230) disposed on the base (210). The outer tube positioning protrusion (220) is used to engage with the tube opening of the outer tube assembly (110) of the semiconductor process equipment, and the first positioning member (230) is used to position and engage with the first positioning part (111a) of the outer tube assembly (110) to restrict the rotation of the outer tube assembly (110) relative to the outer tube positioning protrusion (220). The guiding device further includes an inner tube support assembly (310), which includes a rotating member (311) and an inner tube support body (312). The rotating member (311) is detachably disposed on the base (210) and can rotate around the central axis of the rotating member (311). The inner tube support body (312) is disposed on the rotating member (311) and is used to support the inner tube assembly (120) of the semiconductor process equipment and can drive the inner tube assembly (120) to rotate around the central axis.

2. The guiding device according to claim 1, characterized in that, The outer tube positioning protrusion (220) is annular, and the first positioning member (230) is located outside the outer tube positioning protrusion (220) and has an extension surface extending toward the outer tube positioning protrusion (220), the extension surface being used to engage with the first positioning part (111a).

3. The guiding device according to claim 1, characterized in that, The inner tube support body (312) includes a bearing part and an inner tube positioning protrusion, wherein the inner tube positioning protrusion is disposed on the bearing part; When the inner tube assembly (120) cooperates with the guide device, the edge of the inner tube assembly (120) is fitted onto the inner tube positioning protrusion and supported by the bearing portion.

4. The guiding device according to claim 1, characterized in that, The inner tube assembly (120) includes a second positioning part (121), and the inner tube support assembly (310) further includes a second positioning member (313). The second positioning member (313) is movably disposed on the rotating member (311), and the second positioning member (313) has a first position and a second position. When the inner tube assembly (120) cooperates with the guide device, and when the second positioning member (313) is in the first position, the second positioning member (313) and the second positioning part (121) are positioned and cooperated about the central axis; When the second positioning member (313) is in the second position, the second positioning member (313) separates from the second positioning part (121).

5. The guiding device according to claim 4, characterized in that, The inner tube assembly (120) further includes a third positioning part (122), and the inner tube support assembly (310) further includes a third positioning member (314). The third positioning member (314) is movably disposed on the rotating member (311). The height of the third positioning member (314) is lower than that of the inner tube support body (312). The third positioning member (314) has a third position and a fourth position. During the process of the inner tube assembly (120) moving into the inner tube assembly (110), the third positioning member (314) is located in the third position and is opposite to the third positioning part (122); During the process of the inner tube assembly (120) moving into the interior of the outer tube assembly (110) and rotating relative to the outer tube assembly (110), the third positioning member (314) makes a limiting contact with the outer tube assembly (110) in the direction of rotation around the central axis, so that the third positioning member (314) moves to the fourth position and the third positioning part (122) is misaligned.

6. The guiding device according to claim 5, characterized in that, The rotating component (311) has a sliding groove (311a), the third positioning component (314) includes a positioning body (314a) and a sliding part (314b), the inner tube support assembly (310) also includes a limiting component (315), the limiting component (315) has a clearance channel (315a), the limiting component (315) covers the sliding groove (311a), and the clearance channel (315a) communicates with the sliding groove (311a), the sliding part (314b) is slidably disposed in the sliding groove (311a), the positioning body (314a) extends through the clearance channel (315a) to the outside of the sliding groove (311a), and the limiting component (315) and the sliding part (314b) are mutually limitingly engaged at the opening of the sliding groove (311a); During the process of the inner tube assembly (120) moving into the inner tube assembly (110), the third positioning member (314) is located in the third position, and the positioning body (314a) is opposite to the third positioning part (122); During the process of the inner tube assembly (120) moving into the interior of the outer tube assembly (110) and rotating relative to the outer tube assembly (110), the positioning body (314a) makes limited contact with the outer tube assembly (110) in the direction of rotation around the central axis. The positioning body (314a) moves to the fourth position along the sliding groove (311a) through the sliding part (314b). The positioning body (314a) is misaligned with the third positioning part (122).

7. The guiding device according to claim 6, characterized in that, The positioning body (314a) is provided with scale lines, which are used to cooperate with the edge of the tube opening of the outer tube assembly (110) to confirm the position of the inner tube assembly (120) extending into the outer tube assembly (110).

8. The guiding device according to claim 1, characterized in that, The guiding device further includes a fourth positioning element (410), which is installed on the first positioning element (230) and is used to position and cooperate with the first positioning part (111a) to confirm the position of the inner tube assembly (120) relative to the outer tube assembly (110).

9. The guiding device according to claim 1, characterized in that, The guiding device also includes a rotating handle (510), which is connected to the rotating component (311). A limiting groove is provided on the outer periphery of the outer tube positioning protrusion (220). The rotating handle (510) is located in the limiting groove and can drive the rotating component (311) to rotate between the two ends of the limiting groove.

10. The guiding device according to claim 1, characterized in that, The guiding device further includes a height limiting member (610), which is disposed on the rotating member (311). When the inner tube assembly (120) moves into the interior of the outer tube assembly (110), the height limiting member (610) is used to abut against the edge of the tube opening of the outer tube assembly (110).

11. The guiding device according to claim 1, characterized in that, The inner tube support assembly (310) further includes a support column (710), which is connected between the rotating member (311) and the inner tube support body (312) to support the inner tube support body (312).

12. The guiding device according to claim 1 or 2, characterized in that, The base (210) has a positioning hole (211), which is used to engage with the positioning pin of the carrier platform of the transfer device so that the base (210) is positioned on the carrier platform.

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