Processing method and device of process path and semiconductor process equipment

Abstract

The application discloses a process path processing method and device and a semiconductor process equipment. The method comprises the following steps: obtaining the identification of a process path of a process task to be executed; obtaining the information of the corresponding process path according to the identification of the process path, wherein the information of the process path comprises the information of a plurality of process steps arranged in sequence and the information of at least one process chamber corresponding to each process step; adopting a graphical display control to perform graphical display on the process path according to the information of the process path, thereby obtaining a process path control, wherein the process path control comprises a plurality of process step node controls connected in sequence and at least one process chamber node control corresponding to each process step node control, and the attribute information of the process chamber node control comprises the identification of the corresponding process parameter. The application can intuitively show the process path of the material to the user, and can ensure the normal execution of the process flow and realize the confidentiality of the process parameters.

Description

Technical Field

[0001] This application belongs to the field of semiconductor technology, and in particular relates to a process path processing method, apparatus and semiconductor process equipment. Background Technology

[0002] For different product lines, the control software for the same semiconductor process equipment should be able to program different process sequences and different process parameters (recipes). Currently, most semiconductor process equipment software includes a software interface for editing process sequences and parameters. The scheduling algorithm in the software calculates the optimal movement sequence based on the material distribution, process sequence, and process parameters to meet the capacity requirements of controlling the semiconductor process equipment's flow.

[0003] Process parameters are crucial information for setting hardware parameters, and most semiconductor manufacturers require them to be kept confidential. Therefore, semiconductor manufacturers typically have highly authorized personnel define the specific parameters and process paths, which are then saved to a backend database. Each process path is assigned a unique identifier and then distributed to SIMIS-compliant devices for remote operation via an Enterprise Application Platform (EAP) system. This process not only controls the semiconductor manufacturing process but also prevents the leakage of specific process parameters, enhancing their confidentiality.

[0004] However, the above solutions cannot intuitively show users the process path of the materials. Summary of the Invention

[0005] The purpose of this application is to provide a method, apparatus, and semiconductor process equipment for processing process paths, so as to solve the problem in related technologies that the process path of materials cannot be intuitively displayed to users.

[0006] To achieve the above objectives, the embodiments of this application adopt the following technical solutions:

[0007] In a first aspect, embodiments of this application provide a method for processing a process path, comprising: obtaining an identifier of a process path for a process task to be executed; obtaining information of the corresponding process path based on the identifier of the process path, wherein the information of the process path includes information of a plurality of sequentially arranged process steps and information of at least one process chamber corresponding to each process step; and using a graphical display control to graphically display the process path based on the information of the process path to obtain a process path control, wherein the process path control includes a plurality of sequentially connected process step node controls and at least one process chamber node control corresponding to each process step node control, and the attribute information of the process chamber node control includes an identifier of a corresponding process parameter.

[0008] Secondly, embodiments of this application provide a process path processing apparatus, comprising: a processor, a memory, and a program or instructions stored in the memory and executable on the processor. When the program or instructions are executed by the processor, they implement the steps of the process path processing method as described in the first aspect of this application.

[0009] Thirdly, embodiments of this application provide a semiconductor process apparatus, including: at least one process chamber and a processing apparatus for the process path as described in the second aspect of this application.

[0010] The above-described technical solutions adopted in the embodiments of this application can achieve the following beneficial effects:

[0011] In this embodiment, when executing a process task, the identifier of the process path to be executed is obtained. Based on the identifier, the corresponding process path information is retrieved. This information includes information on multiple sequentially arranged process steps and information on at least one process chamber corresponding to each process step. A graphical display control is used to graphically display the process path based on this information, resulting in a process path control. This control includes multiple sequentially connected process step node controls and at least one process chamber node control corresponding to each process step node control. The attribute information of the process chamber node controls includes identifiers of corresponding process parameters. This embodiment uses a graphical display control to graphically display the process path, providing a clear and intuitive presentation of the material's process path to the user. Furthermore, the attribute information of the process chamber node controls in the graphical process path includes identifiers of corresponding process parameters, but not the specific parameters themselves. During subsequent process task execution, the specific process parameters can be obtained through these identifiers, ensuring the normal execution of the process flow while maintaining the confidentiality of the process parameters. Attached Figure Description

[0012] The accompanying drawings, which are included to provide a further understanding of this application and form part of this application, illustrate exemplary embodiments and are used to explain this application, but do not constitute an undue limitation of this application. In the drawings:

[0013] Figure 1 This is a topology diagram of semiconductor process equipment in related technologies;

[0014] Figure 2 A schematic flowchart illustrating a process path processing method provided in one embodiment of this application;

[0015] Figure 3 A schematic diagram of a process step and site provided for one embodiment of this application;

[0016] Figure 4 A schematic diagram of a process step node control class provided for one embodiment of this application;

[0017] Figure 5 A schematic diagram of a process chamber node control class provided for one embodiment of this application;

[0018] Figure 6 A schematic flowchart illustrating a process path processing method provided for another embodiment of this application;

[0019] Figure 7 A schematic diagram of a process path control provided for one embodiment of this application;

[0020] Figure 8 A schematic diagram of a processing apparatus for a process path provided in one embodiment of this application;

[0021] Figure 9 This is a schematic diagram of the structure of a semiconductor process apparatus provided in one embodiment of this application. Detailed Implementation

[0022] To make the objectives, technical solutions, and advantages of this application clearer, the technical solutions of this application will be clearly and completely described below in conjunction with specific embodiments and corresponding drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0023] The terms "first," "second," etc., used in this application are used to distinguish similar objects and not to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that embodiments of this application can be implemented in orders other than those illustrated or described herein. Furthermore, "and / or" in this application indicates at least one of the connected objects, and the character " / " generally indicates that the preceding and following objects are in an "or" relationship. It should be noted that all data involved in this application was obtained with the user's authorization.

[0024] In the field of semiconductor process equipment, typical semiconductor process equipment generally includes a transport platform and various process chambers. Taking a certain product model that processes 6-inch wafers as an example, the topology diagram is as follows: Figure 1 As shown, it includes one transfer platform and supports up to four different types of process chambers (Ch1, Ch2, Ch3, and Ch4). For different product lines, the control software of the same semiconductor process equipment should be able to program different process sequences and different process parameters (recipes). A process sequence is the path the wafer takes on the equipment, such as LA→Ch1→Ch2→LB. Process parameters are the set of hardware-controlled parameters for the wafer within the process chambers of the equipment. Therefore, process sequences and process parameters are the primary basis for semiconductor process equipment to perform process manufacturing.

[0025] Currently, most semiconductor process equipment software includes software editing interfaces for process paths and process parameters. Generally, the specific parameters required for each process chamber are first edited and saved in the process parameter editing interface. Then, the process steps required for this process are edited in the process path editing interface to form the process path for processing and saved. Here, a process step represents a step to be processed in the process. Then, the scheduling algorithm in the equipment's control software calculates the optimal movement sequence based on the material distribution, process path, and process parameters to meet the capacity requirements of controlling the semiconductor process equipment's process flow.

[0026] Because the specific parameters in the process parameters are crucial information for setting the hardware parameters of the equipment, they have significant commercial value for semiconductor manufacturers. As a collection of various hardware parameters used in chip manufacturing, semiconductor manufacturers often require the confidentiality of these specific process parameters. Most semiconductor manufacturers achieve this confidentiality through software access control modules. Typically, senior-authorized personnel define the specific process parameters and the process path, which is then saved to a backend database on the equipment. The software assigns a unique identifier to each process path, and then distributes it remotely to equipment conforming to the semiconductor SIMI technology standard via the enterprise application platform (EAP) system. This approach effectively manages the semiconductor manufacturing process while preventing the leakage of specific process parameters, thus enhancing the confidentiality of these parameters.

[0027] However, the above solutions cannot intuitively display the material's process path to users. Therefore, this application proposes a process path processing method, apparatus, and semiconductor process equipment to solve the problem of not being able to intuitively display the material's process path to users in related technologies.

[0028] The technical solutions provided by the various embodiments of this application are described in detail below with reference to the accompanying drawings.

[0029] Figure 2 This is a schematic flowchart illustrating a process path processing method provided in one embodiment of this application. Figure 2 As shown, the process path processing method of this application embodiment may specifically include the following steps:

[0030] S201, Obtain the identifier of the process path for the process task to be executed.

[0031] In this embodiment of the application, the execution subject of the process path processing method of this embodiment of the application is a process path processing device, which can be disposed in a semiconductor process equipment (e.g., a chip manufacturing equipment) having at least one process chamber.

[0032] A process task, also known as a job, is a task that involves processing materials. The specific process includes: a robot arm transferring wafers from the wafer cassette in the loading / unloading chamber to the process chamber; the wafers being processed in the process chamber; and the robot arm transferring the processed wafers from the process chamber back to the wafer cassette in the loading / unloading chamber.

[0033] Each process task corresponds to its own process path. A process path identifier is pre-set for each process task's process path, and the identifier and corresponding process path information are stored. The process path identifier is used to uniquely identify the process path, and can be, for example, the name of the process path.

[0034] The process path identifier can be entered manually via keyboard or obtained by scanning the corresponding identification code (such as a barcode or QR code) using a barcode scanner. Scanning with a barcode scanner is faster and more accurate than manual keyboard input.

[0035] S202, based on the identifier of the process path, obtain the information of the corresponding process path. The information of the process path includes information of multiple process steps arranged in sequence and information of at least one process chamber corresponding to each process step.

[0036] In this embodiment of the application, the information of the process path corresponding to the identifier of the process path is obtained according to the identifier of the process path. The information of the process path is usually represented in the form of a string.

[0037] A process path is derived from the processing steps. Generally, a process path includes multiple sequentially arranged process steps and at least one process chamber corresponding to each process step. Each process chamber can be called a visit. For example, Figure 1 The wafer fabrication process path LA→Ch1→Ch2→LA indicates that after the wafer is loaded from the loading / unloading chamber LA, it undergoes one processing step in the Ch1 process chamber, then another processing step in the Ch2 process chamber, and finally returns to the loading / unloading chamber LA. The processing steps in Ch1 and Ch2 are called process steps in the process path, or "Step" in software design. For multi-process-chamber semiconductor process equipment, the equipment can assemble one or more process chambers of the same type, for example... Figure 1 In the process design, process chambers Ch1 and Ch3 are of the same type. A step performed in process chamber Ch1 can also be completed in process chamber Ch3. Process chambers Ch1 and Ch3 are parallel chambers. For a process step, the process step can be executed in one or more process chambers. In software design, the process chamber to be processed for executing a process step is called a Visit.

[0038] For a station executing a specific process step, the station may have multiple slots for different processing steps. The software needs to be configured to specify which slot within the station the process step will take, as well as the required process parameters for that step. In other words, a process path includes one or more process steps, and a process step may include one or more stations. For each station, the required slot and process parameters for the process step need to be set.

[0039] S203, using a graphical display control, the process path is graphically displayed according to the process path information to obtain a process path control. The process path control includes multiple process step node controls connected in sequence and at least one process chamber node control corresponding to each process step node control. The attribute information of the process chamber node control includes the identifier of the corresponding process parameter.

[0040] In this embodiment, a pre-designed graphical display control is used to graphically display the process path based on the information obtained in step S202. The resulting control is called a process path control. The process path control includes a graphical process path. Each process path corresponds to one process path control, that is, each process task corresponds to one process path control.

[0041] The process path control includes multiple sequentially connected process step node (StepNode) controls and at least one process chamber node (VisitNode) control corresponding to each process step node control. Each process step node control corresponds to one process step in the process path, and each process chamber node control corresponds to one process chamber in the process path.

[0042] The property information of the process chamber node control includes an identifier for the process parameter of the corresponding process chamber, but does not include the specific parameters, thus meeting the confidentiality requirements of the process parameters. This identifier is used to uniquely identify the process parameter; for example, it could be the name of the process parameter.

[0043] A station is the smallest unit for executing a process path. Based on the relationship between process paths, process steps, and stations, a data structure tree is used to design a graphical display control for displaying the process path.

[0044] In the process path, each process step is defined as a parent node, and the corresponding station is defined as a child node. The relationship between process steps and stations is as follows: Figure 3 As shown.

[0045] The process step node control is a control that inherits from the form control (Button). Specifically, based on the relationship that a process step can be executed at multiple stations, the process step node (StepNode) class is defined using the object-oriented language C#. The StepNode class inherits from the form control class Button. The form control class Button is a control class that C# has already designed for designing form applications. Inheriting the form control class means that the StepNode class has all the operations of the form control class, and has the general operation properties of a button. This class should define a Next property to include the next process step. The purpose of designing the Next property is to determine the next process step to be executed after the current process step is completed. At the same time, a FirstChild property should be defined to include the first station of the process step. This station mainly displays which process chamber the process step can be performed in. The specific structure of the StepNode class is as follows. Figure 4 As shown, the `IsFirst` property indicates whether the process step is the first parent node. If the process step is the first parent node, the value of the `IsFirst` property is `true`; if the process step is not the first parent node, the value of the `IsFirst` property is `false`. The `Next` property indicates the next parent node of this parent node, and the `FirstChild` property indicates the first child node of this parent node. `StepNode()` and `StepNode(Icontainercontainer)` are class constructors, and the `Size` property indicates the width and height of the process step node control.

[0046] The process chamber node control is a control that inherits from a user-defined class (UserControl). Specifically, for a station executing a process step, a station node (VisitNode) class is defined in the software. This class inherits from the user-defined control class, which is a control class pre-designed in C# for designing Windows Forms applications. Inheriting the user-defined control class means that the VisitNode class has all the operations of the user-defined control class. This class needs to define a SlotID property that indicates which slot in the station the process step is being processed in, and a ProcessRecipe property that includes the process parameters required for processing. It also needs to define a Father property that indicates which specific process chamber in the entire process path the station belongs to. For a specific process step, if there may be other stations besides the current station, in the data structure tree, these other stations are called the right siblings of the current station, and a RightBrother property that includes the right sibling of the current station needs to be defined. The specific structure of the VisitNode class is as follows: Figure 5As shown, the ProcessRecipe attribute identifies the process parameters performed at this station, the SlotID attribute indicates which slot at this station is used for the process, the StationName attribute identifies the process chamber corresponding to this station, the Father attribute indicates the parent node of this child node, and the RightBrother attribute indicates the right sibling of this child node.

[0047] The Sequence control, a process path control, inherits from a user-defined class control. User-defined classes are frequently used in C# Windows Forms applications, offering common graphical control functionalities such as control redrawing, click events, and mouse events, satisfying general design applications. The Sequence class constructor has three parameters: the first is the identifier of the process task (job) to be executed on the process path, including the process path identifier and the time it was obtained; the second is the material identifier (e.g., batch number); and the third is the process path information obtained by querying the backend database based on the input process path identifier, parsing the retrieved string, and obtaining information on multiple sequentially connected process step nodes and at least one corresponding process chamber node, forming the process path information, which is then passed as the third parameter of the Sequence class. These three parameters are passed to the Sequence class constructor, where the process path control is constructed, including:

[0048] 1) Record the process path used by the current process path control.

[0049] 2) Record the identifier of the process task (job) on the current process path control.

[0050] 3) Record the identifier of the material being executed on the current process path control.

[0051] 4) Based on the execution process path of the process task (job) on the current process path control, the process path is displayed graphically.

[0052] Among them, such as Figure 6 As shown, the above step "graphical display of process path" specifically includes the following steps:

[0053] S601, create a head parent node to represent the starting point of the process path.

[0054] In this embodiment, a parent node representing the starting point of the process path is first added, denoted as the head parent node, for example... Figure 7 In the process path control shown, the small square represents the parent node, and the small square H represents the head parent node.

[0055] S602, establish at least one parent node corresponding to a process step.

[0056] In this embodiment, after the head parent node, a corresponding number of parent nodes are added according to the number of process steps in the process path, denoted as step parent nodes, for example... Figure 7 In the process path control shown, the small square between small square H and small square E represents the parent node of the step.

[0057] S603, create a tail parent node to represent the end point of the process path.

[0058] In this embodiment, a parent node representing the end point of the process path is added after the parent node of the last step, denoted as the end parent node, for example... Figure 7 In the process path control shown, the small square E represents the tail parent node. When subsequently calling system functions to draw rectangles and lines, all parent nodes can be found starting from this Head node.

[0059] S604, after each step parent node, establish at least one child node corresponding to the step parent node, and the child node corresponds to the process chamber corresponding to the step parent node.

[0060] In this embodiment, after each current step's parent node and before the next step's parent node, a corresponding number of child nodes are added based on the number of process chambers corresponding to the current step's parent node. For example... Figure 7 In the process path control shown, small rectangles represent child nodes.

[0061] S605 sets the attribute information for each parent node, which includes the identifier of the next parent node and the identifier of the corresponding first child node.

[0062] In this embodiment, for each parent node, a Next attribute is set to include the identifier of the next parent node. Specifically, for the head parent node, its Next attribute is set to the first step parent node; for the first to second-to-last step parent nodes, its Next attribute is set to the next step parent node; and for the last step parent node, its Next attribute is set to the tail parent node. Additionally, for each step parent node, its FirstChild attribute is also set to the identifier of the first child node of that step parent node.

[0063] S606, set the attribute information of each child node. The attribute information of the child node includes the identifier of the process parameter, the identifier of the slot of the process to be executed, the identifier of the corresponding parent node, and the identifiers of other child nodes corresponding to the same parent node.

[0064] In this embodiment of the application, for each child node, its ProcessRecipe attribute is set to the identifier of the process parameter, its SlotID attribute is set to the identifier of the slot of the process to be executed, its Father attribute is set to the identifier of the parent node of the child node, and its RightBrother attribute is set to the identifier of the right sibling of the child node, that is, the identifier of other child nodes that have the same parent node as the child node.

[0065] S607, based on the data structure tree formed by each parent node and each child node, calls system functions to draw the corresponding control graphics and routes.

[0066] In this embodiment, the order of parent nodes is determined based on their Next attribute; the first child node of each step parent node is determined based on its FirstChild attribute; and the other child nodes of each step parent node are determined based on the RightBrother attribute of the first child node. A system function (e.g., the ShowRoute function) is called to draw the corresponding control graphics (e.g., [missing information]) for each node (including parent and child nodes). Figure 7 (small squares, small rectangles) and the routes between nodes (e.g.) Figure 7 (Connecting lines between small squares and small rectangles) to obtain the process path control.

[0067] Clicking the process chamber node control in the process path control will display the identifiers of the process parameters in that site, such as... Figure 7 As shown, clicking the process chamber node control will display the name of the process parameter to be executed under this site (i.e., the process formula) "test" and the identifier "1" of the slot for the process to be executed on the right.

[0068] Furthermore, the process path processing method in this application embodiment may also include the following steps: obtaining the execution status of the process task and displaying the execution status of the process task in the process path control.

[0069] Specifically, the status of process tasks on the current process path can be subscribed to from the scheduling module of the host computer. When a process task on this process path is being executed, its execution status is displayed in real time on the process path control. The initial state of a process task on the process path is Unknown, for example, Figure 7 The execution status of the process task is displayed as "Unknown", which means that the process task on the current process path has not yet started execution.

[0070] Furthermore, the process path processing method in this application embodiment may further include the following step: obtaining the identifier of the material to be processed. Correspondingly, the above step "graphically displaying the process path according to the process path information to obtain a process path control" specifically includes the following steps: graphically displaying the process path according to the process path information and the material identifier to obtain a process path control, wherein the process path control also includes the material identifier.

[0071] Specifically, a material identifier can be pre-assigned to each material, and the identifier and corresponding material can be stored. This identifier uniquely identifies the material; for example, it could be a batch number. The material identifier can be manually entered via keyboard or obtained by scanning the identification code (e.g., barcode, QR code) of the material to be processed using a barcode scanner. Scanning with a barcode scanner is faster and more accurate than manual keyboard input. Here, "material" refers to the wafer to be processed.

[0072] After the process path control is constructed, the process task can be executed through the following steps: in response to the selection operation of the process path control, obtain the corresponding process parameters according to the process parameter identifier; generate the material movement sequence according to the material identifier, process path and process parameters; and execute the process task operation according to the movement sequence.

[0073] Specifically, when a process path control is selected, the process task execution flow is triggered: the corresponding process parameters are obtained according to the identifiers of the process parameters included in the process path control.

[0074] Based on the material identifier, process path, and acquired process parameters included in the process path control, a material movement sequence is generated. The robot arm is controlled to perform corresponding operations according to the movement sequence, and the corresponding process chamber is controlled to process the material according to the process parameters, thereby realizing the execution of the process task.

[0075] Furthermore, the above step "to graphically display the process path based on the process path information and material identifiers to obtain a process path control" specifically includes the following steps: to graphically display the process path based on the process path information, material identifiers, and process path identifiers to obtain a process path control, which also includes the process path identifiers.

[0076] It should be noted here that the process path processing method in this application embodiment may further include the following steps: in response to the user's selection operation of the target process path control among multiple process path controls in the container, the target process path control is highlighted; in response to the user's execution task operation of the target process path control, the target process task corresponding to the target process path control is executed; after the target process task is executed, the target process path control is deleted from the container.

[0077] Specifically, for the control software in semiconductor process equipment, multiple process path controls can be added to a container to indicate the number of process tasks to be performed on the equipment. When a process path control in the container is selected (for example, by clicking on the blank area of ​​the process path control), the selected process path control will be highlighted. After selection, clicking "Execute Task" (for example, by clicking the "Execute Task" button in the process path control, or by right-clicking on the blank area of ​​the process path control and selecting the "Execute Task" command from the pop-up menu) will automatically start the process task. When the process task is completed, it will be automatically deleted from the container.

[0078] In summary, the process path processing method of this application embodiment obtains the identifier of the process path of the process task to be executed when executing the process task. Based on this identifier, the corresponding process path information is obtained. The process path information includes information on multiple sequentially arranged process steps and information on at least one process chamber corresponding to each process step. A graphical display control is used to graphically display the process path based on the process path information to obtain a process path control. The process path control includes multiple sequentially connected process step node controls and at least one process chamber node control corresponding to each process step node control. The attribute information of the process chamber node control includes the identifier of the corresponding process parameter. This application embodiment uses a graphical display control to graphically display the process path, realizing an intuitive presentation of the material's process path to the user. Furthermore, the attribute information of the process chamber node controls in the graphical process path includes the identifier of the corresponding process parameter, but not the specific parameters of the process parameter. During subsequent process task execution, the specific parameters of the process parameter can be obtained through the identifier, ensuring the normal execution of the process flow while maintaining the confidentiality of the process parameters. Based on the established data structure tree formed by each parent node and each child node, the generation of the process path control is realized. When the process path control is selected, the corresponding process task can be executed automatically.

[0079] This application also provides a process path processing apparatus. For example... Figure 8As shown, the process path processing apparatus 800 includes: a processor 801, a memory 802, and a program or instructions stored in the memory 802 and executable on the processor 801. When the program or instructions are executed by the processor 801, they implement the steps of the process path processing method as described in any of the above embodiments.

[0080] The process path processing apparatus of this application embodiment uses a graphical display control to graphically display the process path, enabling an intuitive presentation of the material's process path to the user. The attribute information of the process chamber node controls in the graphical process path includes the identifier of the corresponding process parameter, but not the specific parameters. During subsequent process task execution, the specific process parameter can be obtained through the identifier, ensuring the normal execution of the process flow while maintaining the confidentiality of the process parameters. Based on the established data structure tree formed by each parent node and child node, the process path control is generated. When a process path control is selected, the corresponding process task can be automatically executed.

[0081] This application also provides a semiconductor process apparatus. For example... Figure 9 As shown, the semiconductor process equipment 900 includes at least one process chamber 901 and a process path processing device 800 as described in any of the above embodiments.

[0082] The semiconductor process equipment in this application uses a graphical display control to graphically display the process path, enabling an intuitive presentation of the material's process path to the user. The attribute information of the process chamber node controls in the graphical process path includes the identifier of the corresponding process parameter, but not the specific parameters. During subsequent process task execution, the specific process parameter can be obtained through the identifier, ensuring the normal execution of the process flow while maintaining the confidentiality of the process parameters. Based on the established data structure tree formed by each parent node and child node, the process path control is generated. When a process path control is selected, the corresponding process task can be automatically executed.

[0083] This application also proposes a readable storage medium storing one or more computer programs, the one or more computer programs including instructions. When the program or instructions are executed by a processor in a semiconductor process apparatus including multiple applications, the processor in the semiconductor process apparatus is able to execute various processes of the above-described process path processing method embodiments, and is specifically used to execute the steps of any of the above-described process path processing method embodiments.

[0084] The readable storage medium of this application embodiment uses a graphical display control to graphically display the process path, enabling an intuitive presentation of the material's process path to the user. The attribute information of the process chamber node controls in the graphical process path includes the identifier of the corresponding process parameter, but not the specific parameters. During subsequent process task execution, the specific process parameter can be obtained through the identifier, ensuring the normal execution of the process flow while maintaining the confidentiality of the process parameters. Based on the established data structure tree formed by each parent node and child node, the process path control is generated. When a process path control is selected, the corresponding process task can be automatically executed.

[0085] The systems, devices, modules, or units described in the above embodiments can be implemented by computer chips or entities, or by products with certain functions. A typical implementation device is a computer. Specifically, a computer can be, for example, a personal computer, laptop computer, cellular phone, camera phone, smartphone, personal digital assistant, media player, navigation device, email device, game console, tablet computer, wearable device, or any combination of these devices.

[0086] For ease of description, the above devices are described separately by function as various units. Of course, in implementing this application, the functions of each unit can be implemented in one or more software and / or hardware.

[0087] Those skilled in the art will understand that embodiments of this application can be provided as methods, systems, or computer program products. Therefore, this application can take the form of a completely hardware embodiment, a completely software embodiment, or an embodiment combining software and hardware aspects. Furthermore, this application can take the form of a computer program product embodied on one or more computer-usable storage media (including but not limited to disk storage, CD-ROM, optical storage, etc.) containing computer-usable program code.

[0088] This application is described with reference to flowchart illustrations and / or block diagrams of methods, apparatus (systems), and computer program products according to embodiments of this application. It will be understood that each block of the flowchart illustrations and / or block diagrams, and combinations of blocks in the flowchart illustrations and / or block diagrams, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, special-purpose computer, embedded processor, or other programmable data processing apparatus to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing apparatus, generate instructions for implementing the flowchart... Figure 1 One or more processes and / or boxes Figure 1 A device that provides the functions specified in one or more boxes.

[0089] These computer program instructions may also be stored in a computer-readable storage medium that can direct a computer or other programmable data processing device to function in a particular manner, such that the instructions stored in the computer-readable storage medium produce an article of manufacture including instruction means, which are implemented in a process Figure 1 One or more processes and / or boxes Figure 1 The function specified in one or more boxes.

[0090] These computer program instructions may also be loaded onto a computer or other programmable data processing equipment to cause a series of operational steps to be performed on the computer or other programmable equipment to produce a computer-implemented process, thereby providing instructions that execute on the computer or other programmable equipment for implementing the process. Figure 1 One or more processes and / or boxes Figure 1 The steps of the function specified in one or more boxes.

[0091] In a typical configuration, a computing device includes one or more processors (CPU), input / output interfaces, network interfaces, and memory.

[0092] Memory may include non-persistent storage in computer-readable media, such as random access memory (RAM) and / or non-volatile memory, such as read-only memory (ROM) or flash RAM. Memory is an example of computer-readable media.

[0093] Computer-readable media includes both permanent and non-permanent, removable and non-removable media that can store information using any method or technology. Information can be computer-readable instructions, data structures, modules of programs, or other data. Examples of computer storage media include, but are not limited to, phase-change memory (PRAM), static random access memory (SRAM), dynamic random access memory (DRAM), other types of random access memory (RAM), read-only memory (ROM), electrically erasable programmable read-only memory (EEPROM), flash memory or other memory technologies, CD-ROM, digital versatile optical disc (DVD) or other optical storage, magnetic tape, magnetic magnetic disk storage or other magnetic storage devices, or any other non-transferable medium that can be used to store information accessible by a computing device. As defined herein, computer-readable media does not include transient computer-readable media, such as modulated data signals and carrier waves.

[0094] It should also be noted that the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such process, method, article, or apparatus. Unless otherwise specified, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes that element.

[0095] This application can be described in the general context of computer-executable instructions, such as program modules, that are executed by a computer. Generally, program modules include routines, programs, objects, components, data structures, etc., that perform a specific task or implement a specific abstract data type. This application can also be practiced in distributed computing environments where tasks are performed by remote processing devices connected via a communication network. In distributed computing environments, program modules can reside in local and remote computer storage media, including storage devices.

[0096] The various embodiments in this specification are described in a progressive manner. Similar or identical parts between embodiments can be referred to interchangeably. Each embodiment focuses on describing the differences from other embodiments. In particular, the system embodiments are basically similar to the method embodiments, so the description is relatively simple; relevant parts can be referred to the descriptions in the method embodiments.

[0097] The above are merely embodiments of this application and are not intended to limit the scope of this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the scope of the claims of this application.

Claims

1. A method for processing a process path, characterized in that, include: Obtain the identifier of the process path for the process task to be executed; Based on the identifier of the process path, the information of the corresponding process path is automatically obtained. The information of the process path includes information of multiple process steps arranged in sequence and information of at least one process chamber corresponding to each process step. The system automatically uses a graphical display control to graphically display the process path based on the process path information, resulting in a process path control. The process path control includes multiple sequentially connected process step node controls and at least one process chamber node control corresponding to each process step node control. The attribute information of the process chamber node control includes the identifier of the corresponding process parameter.

2. The method according to claim 1, characterized in that, The process path control is obtained by using a graphical display control to graphically display the process path information, resulting in a process path control including: Create a parent node to represent the starting point of the process path; Establish at least one parent node corresponding to the process step; Create a tail parent node to represent the end point of the process path; After each parent node of the step, at least one child node corresponding to the parent node of the step is created, and the child node corresponds to the process chamber corresponding to the parent node of the step; Set the attribute information for each parent node, which includes the identifier of the next parent node and the identifier of the corresponding first child node; The attribute information of each child node is set, and the attribute information of the child node includes the identifier of the process parameter, the identifier of the slot of the process to be executed, the identifier of the corresponding parent node, and the identifiers of other child nodes corresponding to the same parent node. Based on the data structure tree formed by each parent node and each child node, the system function is called to draw the corresponding control graphics and routes.

3. The method according to claim 1, characterized in that, Also includes: Obtain the execution status of the process task; The execution status of the process task is displayed in the process path control.

4. The method according to claim 1, characterized in that, Also includes: Obtain the identifier of the material to be processed; The step of graphically displaying the process path based on the process path information to obtain a process path control includes: Based on the information of the process path and the identifier of the material, the process path is graphically displayed to obtain the process path control, which also includes the identifier of the material.

5. The method according to claim 4, characterized in that, Also includes: In response to the selection operation of the process path control, the corresponding process parameters are obtained according to the identifier of the process parameters; Based on the material's identifier, the process path, and the process parameters, a movement sequence for the material is generated; The process task is performed according to the movement sequence.

6. The method according to claim 4, characterized in that, The step of graphically displaying the process path based on the process path information and the material identifier to obtain the process path control includes: Based on the information of the process path, the identifier of the material, and the identifier of the process path, the process path is graphically displayed to obtain the process path control, which also includes the identifier of the process path.

7. The method according to claim 4, characterized in that, The step of obtaining the identifier of the process path for the process task to be executed includes: The process path identifier is obtained by scanning the identification code corresponding to the process path with a barcode scanner. The step of obtaining the identifier of the material to be processed includes: The material's identifier is obtained by scanning the identification code with a barcode scanner.

8. The method according to claim 1, characterized in that, Also includes: In response to a user's selection of a target process path control among multiple process path controls in the container, the target process path control is highlighted. In response to the user's operation on the target process path control, the target process task corresponding to the target process path control is executed; After the target process task is completed, the target process path control is removed from the container.

9. A processing apparatus for a process path, characterized in that, include: A processor, a memory, and a program or instructions stored in the memory and executable on the processor, wherein the program or instructions, when executed by the processor, implement the steps of the method as described in any one of claims 1-8.

10. A semiconductor process apparatus, characterized in that, include: At least one process chamber and a processing apparatus for the process path as described in claim 9.

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