A method and apparatus for making a printing nozzle based on micro-pore filling

Abstract

This application discloses a method and apparatus for preparing a printing nozzle based on micropore filling. The method involves obtaining filler particle parameters corresponding to the filling material of the workpiece, and obtaining a first pore diameter parameter based on the pore diameter parameters of the workpiece and the filler particle parameters. A first length parameter is obtained based on the pore depth parameters of the workpiece and a preset first ratio, and the first pore diameter parameter and the first length parameter are used as the tip size. The nozzle workpiece is processed based on the tip size to obtain a printing nozzle, which is then used to perform micropore filling on the workpiece. By combining the pore diameter parameters of the workpiece and the corresponding filler particle parameters, a printing nozzle resembling the shape of an insect's mouthparts can be generated, facilitating more efficient filling into micropores with high aspect ratios. This not only effectively avoids phenomena such as voids, air bubbles, and incomplete filling during the filling process but also improves the overall filling efficiency.

Description

Technical Field

[0001] This application belongs to the field of microelectronic packaging technology, and specifically relates to a method and apparatus for preparing printing nozzles based on micropore filling. Background Technology

[0002] With the continuous development of microelectronics technology, users have increasingly higher requirements for system miniaturization, multifunctionality, low power consumption, and high reliability. In particular, the demand for portable handheld terminals has exploded in recent years, such as laptops, smartphones, or tablets that require higher integration and interconnectivity. In order to meet the requirements of high-density interconnection and higher integration, so as to achieve high-frequency and high-speed performance of the system and reduce transmission latency, three-dimensional stacked packaging (also known as 3D packaging) technology has emerged.

[0003] 3D packaging technology primarily stacks bare chips or individually packaged chips together through packaging. Currently, a common approach is to use an interposer (also known as an insertion layer or intermediate layer) to interconnect the fine-pitch I / O at the top die level with the larger-size, wide-pitch I / O at the bottom package level. This interposer features numerous through-glass vias (TGVs), which extend through the substrate to achieve vertical integration while shortening the interconnect length, thereby reducing size, weight, and power consumption. The types of microvias can be, but are not limited to, silicon microvias (through-holes, blind vias, etc.), glass microvias, metal microvias, ceramic microvias, plastic (polymer) microvias, through-silicon vias (TSVs), through-glass vias (TGVs), through-metal vias (TMVs), through-ceramic vias (TCVs), or plastic vias. By filling the vias with conductive metal material, a technique is used to electrically connect functional structures located on the upper surface of the substrate and functional structures located on the lower surface of the glass substrate using the metal material within the vias.

[0004] However, conventional microvia filling methods are prone to generating air bubbles during the filling of metal materials, which can affect the transmission of chip signals. Furthermore, for microvias with high aspect ratios, there is a tendency for voids to form in the center and incomplete filling, which not only seriously reduces electrical performance and reliability but also affects the overall filling efficiency. Summary of the Invention

[0005] This application addresses the aforementioned technical problems of conventional through-hole filling methods, which easily generate air bubbles during the metal filling process, thus affecting chip signal transmission. Furthermore, for micro-holes with high aspect ratios, issues such as central voids and incomplete filling can easily arise, severely reducing electrical performance and reliability, and also impacting overall filling efficiency. Therefore, this application proposes a printing nozzle fabrication method and apparatus based on micro-hole filling, the technical solution of which is as follows:

[0006] In a first aspect, embodiments of this application provide a method for preparing a printing nozzle based on micropore filling, comprising:

[0007] Obtain the filler particle parameters corresponding to the filler material of the workpiece, and obtain the first pore diameter parameter based on the pore diameter parameter of the workpiece and the filler particle parameters.

[0008] The first length parameter is obtained based on the hole depth parameter of the workpiece and the preset first ratio, and the first hole diameter parameter and the first length parameter are used as the tip size;

[0009] The nozzle is processed based on the tip size to obtain a printing nozzle, which is then used to fill the micropores in the workpiece.

[0010] In one alternative of the first aspect, the nozzle machining part is processed based on the tip size to obtain a printing nozzle, including:

[0011] The second aperture parameter is obtained based on the first aperture parameter and a preset second ratio; wherein the second aperture parameter is smaller than the first aperture parameter.

[0012] The second length parameter is obtained based on the first length parameter and the preset third ratio, and the processing parameters are determined based on the second length parameter and the second aperture parameter; wherein, the second length parameter is greater than the first length parameter, and the processing parameters include distance parameters and heating parameters;

[0013] The nozzle is pulled at both ends based on the distance parameter and heated at the center based on the heating parameter to obtain the printing nozzle.

[0014] In another alternative to the first aspect, after processing the nozzle part based on the tip size to obtain the printing nozzle, the method further includes:

[0015] The position of the forging needle is determined on one side of the tip of the printing nozzle based on the difference between the first length parameter and the tip length of the printing nozzle.

[0016] The forging needle position of the printing nozzle is forged.

[0017] In another alternative to the first aspect, after forging the forging position of the printing nozzle, the method further includes:

[0018] The grinding distance is obtained based on the difference between the first length parameter and the tip length of the printing nozzle after forging.

[0019] The printing nozzles, after being forged, are ground according to the grinding needle distance.

[0020] In another alternative to the first aspect, after processing the nozzle part based on the tip size to obtain the printing nozzle, the method further includes:

[0021] The filling path is obtained based on the micropore type and micropore filling parameters of the workpiece, and the print head generated by the print nozzle is controlled to perform micropore filling according to the filling path; wherein, the micropore filling parameters are any at least one of the hole depth parameters and hole diameter parameters of the workpiece.

[0022] In another alternative to the first aspect, the filling path is obtained based on the type of micropores in the workpiece and the micropore filling parameters, including:

[0023] When the microhole type of the workpiece is a through hole, the first position is determined based on the distance between the top of the microhole and the adjacent substrate.

[0024] The second position is determined based on the distance between the bottom of the microhole in the workpiece and the adjacent substrate, and the filling path is obtained based on the first position, the second position and the hole depth parameter.

[0025] In another alternative to the first aspect, the filling path is obtained based on the micropore type and micropore filling parameters of the workpiece, further including:

[0026] When the micro-hole type of the workpiece is a blind hole, the first position is determined based on the distance between the top of the micro-hole of the workpiece and the adjacent substrate;

[0027] Based on the first position and the hole depth parameter, a third position is determined at one end of the bottom of the microhole in the workpiece; wherein, the vertical distance between the third position and the first position is consistent with the hole depth parameter;

[0028] Based on the third position and the aperture parameters, a fourth position is determined at the other end of the bottom of the microhole in the workpiece; wherein the straight-line distance between the fourth position and the third position is consistent with the aperture parameters;

[0029] The filling path is obtained based on the first position, third position, fourth position, hole depth parameter, and hole diameter parameter.

[0030] In another alternative to the first aspect, before controlling the printhead generated by the print nozzles to perform micropore filling along the filling path, the method further includes:

[0031] The surface of the workpiece is treated with a deionization fan to remove static electricity.

[0032] Air plasma equipment is used to decontaminate parts that have undergone static elimination treatment.

[0033] In another alternative to the first aspect, after controlling the printhead generated by the print nozzles to perform micropore filling along the filling path, the method further includes:

[0034] The workpiece to be processed after micropore filling is sintered; or

[0035] The workpieces that have undergone micropore filling treatment are then subjected to reflow soldering.

[0036] Secondly, embodiments of this application provide a printing nozzle fabrication apparatus based on micropore filling, comprising:

[0037] The parameter acquisition module is used to acquire the filler particle parameters corresponding to the filling material of the workpiece, and to obtain the first pore diameter parameter based on the pore diameter parameter of the workpiece and the filler particle parameters.

[0038] The dimension determination module is used to obtain the first length parameter based on the hole depth parameter of the workpiece and the preset first ratio, and to use the first hole diameter parameter and the first length parameter as the tip size;

[0039] The nozzle preparation module is used to process the nozzle workpiece based on the tip size to obtain a printing nozzle, which is then used to fill the micropores in the workpiece.

[0040] Thirdly, embodiments of this application also provide a printing nozzle preparation apparatus based on micropore filling, including a processor and a memory;

[0041] The processor is connected to the memory;

[0042] Memory, used to store executable program code;

[0043] The processor runs a program corresponding to the executable program code by reading the executable program code stored in the memory, so as to implement the micropore filling-based printing nozzle preparation method provided by the first aspect or any implementation of the first aspect of the present application.

[0044] Fourthly, embodiments of this application provide a computer storage medium storing a computer program, which includes program instructions. When executed by a processor, the program instructions can implement the micropore-filling-based printing nozzle preparation method provided by the first aspect or any implementation of the first aspect of this application.

[0045] As described above, the method and apparatus for preparing a printing nozzle based on micropore filling proposed in this application have the following beneficial effects:

[0046] Before micropore filling, the filler particle parameters corresponding to the filling material of the workpiece can be obtained, and a first pore diameter parameter can be obtained based on the pore diameter parameters of the workpiece and the filler particle parameters. A first length parameter can be obtained based on the pore depth parameters of the workpiece and a preset first ratio, and the first pore diameter parameter and the first length parameter can be used as the tip size. Based on the tip size, the nozzle is processed to obtain a printing nozzle, which is then used to perform micropore filling on the workpiece. By combining the pore diameter parameters of the workpiece and the corresponding filler particle parameters, a printing nozzle resembling the shape of an insect's mouthpart can be generated, which can then extend into micropores with a high aspect ratio for more efficient filling. This not only effectively avoids phenomena such as voids, air bubbles, and incomplete filling during the filling process, but also improves the overall filling efficiency. Attached Figure Description

[0047] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0048] Figure 1 A flowchart illustrating an overall process for preparing a printing nozzle based on micropore filling, as provided in this application embodiment;

[0049] Figure 2 This is a schematic diagram of the structure of a printing nozzle provided in an embodiment of this application;

[0050] Figure 3 A schematic diagram illustrating the heating effect of a printing nozzle provided in an embodiment of this application;

[0051] Figure 4 A schematic diagram illustrating the forging effect of a printing nozzle provided in an embodiment of this application;

[0052] Figure 5 A schematic diagram illustrating the grinding effect of a printing nozzle provided in an embodiment of this application;

[0053] Figure 6 This is a schematic diagram of another printing nozzle provided in an embodiment of this application;

[0054] Figure 7 This is a schematic diagram illustrating the micropore filling effect of a printing nozzle, provided in an embodiment of this application.

[0055] Figure 8 This is a schematic diagram illustrating the effect of a micropore filling path provided in an embodiment of this application;

[0056] Figure 9A schematic diagram of a printing nozzle fabrication apparatus based on micropore filling is provided for an embodiment of this application;

[0057] Figure 10 This is a schematic diagram of another printing nozzle preparation device based on micropore filling provided in this application embodiment. Detailed Implementation

[0058] To make the objectives, features, and advantages of this invention more apparent and understandable, the technical solutions of the embodiments of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the embodiments described below are only some embodiments of this invention, and not all embodiments. Based on the embodiments of this invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this invention.

[0059] In the description of the embodiments of this application, the terms "first" and "second" are for descriptive purposes only and should not be construed as indicating or implying relative importance. The following description provides multiple embodiments of this application, which can be substituted or combined with each other. Therefore, this application can also be considered to include all possible combinations of the same and / or different embodiments described. Thus, if one embodiment includes features A, B, and C, and another embodiment includes features B and D, then this application should also be considered to include embodiments containing one or more of all other possible combinations of A, B, C, and D, even if such embodiments are not explicitly described in the following text.

[0060] The following description provides examples and does not limit the scope, applicability, or examples set forth in the claims. Changes may be made to the function and arrangement of the described elements without departing from the scope of this application. Various processes or components may be appropriately omitted, substituted, or added to the examples. For example, the described methods may be performed in a different order than described, and various steps may be added, omitted, or combined. Furthermore, features described with respect to some examples may be combined into other examples.

[0061] In the technical fields known to this application, common methods for microvia filling include chemical vapor deposition (CVD), physical vapor deposition (PVD), electroless plating, and electroplating. Electroless plating and electroplating, both using copper as the filler material, are currently the two most commonly used methods. Taking electroplating as an example, during microvia filling using electroplating, if the metal deposition rate is too fast, gaps may appear in the microvias due to insufficient metal filling, thus affecting chip signal transmission. Furthermore, for microvias with high aspect ratios, central voids and incomplete filling are also prone to occur, severely reducing electrical performance and reliability, and also affecting overall filling efficiency. Based on this, this application will explain and illustrate the aforementioned technical problems in conjunction with one or more embodiments presented below.

[0062] Please see Figure 1 , Figure 1 This document shows an overall flowchart of a micropore-filling-based printing nozzle preparation method provided in an embodiment of this application.

[0063] like Figure 1 As shown, the method for preparing a printing nozzle based on micropore filling may include at least the following steps:

[0064] Step 102: Obtain the filler particle parameters corresponding to the filler material of the workpiece to be processed, and obtain the first pore diameter parameter based on the pore diameter parameter of the workpiece to be processed and the filler particle parameters.

[0065] In this embodiment of the application, the method for preparing printing nozzles based on micropore filling can be applied to, but is not limited to, a control terminal. The control terminal can be connected to both the nozzle preparation device and the micropore filling device to control the nozzle preparation device to generate printing nozzles that meet the micropore filling requirements according to the filling material and pore size parameters of the workpiece. The micropore filling device then controls the printing nozzles to fill the micropores of the workpiece. The nozzle preparation device may include, but is not limited to, a capillary tube with a diameter between 0.8 and 1.2 mm, a guide rail for supporting the capillary tube, a support clamp for pulling the two ends of the capillary tube, and a heat source for heating the capillary tube. The material of the capillary tube may include, but is not limited to, glass (silicate glass, borosilicate glass, quartz glass, etc.) or stainless steel. The heat source may include, but is not limited to, a resistance wire or a laser for heating the center of the capillary tube. In the process of the nozzle preparation device generating a printing nozzle that meets the micropore filling requirements under the control of the control terminal, the two ends of the capillary tube on the guide rail are pulled by the support clamp, and the center of the capillary tube is heated by the heat source, so that the aperture of the center of the capillary tube gradually shrinks until it is broken, and the change in the aperture of the center of the capillary tube after it is broken is very small. Understandably, the end of the broken capillary near the center resembles the shape of an insect's mouthparts (with a long tip and very small variation in aperture at the tip). This shape satisfies the requirements of fluid flow channels and allows for easy insertion into deep and narrow micropores for filling. Therefore, the end of the broken capillary near the center can be used as a printing nozzle, and this part can be made into a printhead for micropore filling.

[0066] The micropore filling device can be, but is not limited to, a high-precision electronic 3D printer stage comprising a stage for supporting the workpiece and a print head for moving and printing, or a printer stage commonly used in this technical field. After the nozzle preparation device generates printing nozzles that meet the micropore filling requirements, the device controls the print head, composed of these nozzles, to perform micropore filling on the workpiece. Here, the workpiece can be, but is not limited to, a substrate containing micropores such as silicon micropores, glass micropores, ceramic micropores, or metal micropores.

[0067] In this embodiment, the control terminal can generate a printing nozzle similar to the shape of an insect mouthpart by combining the aperture parameters of the workpiece and the corresponding filler particle parameters, so as to extend into the micro-hole with a high aspect ratio for more efficient filling. This not only effectively avoids the phenomena of holes, air bubbles and incomplete filling during the filling process, but also improves the overall filling efficiency.

[0068] Specifically, before performing micro-orifice filling, the control terminal can, but is not limited to, determine the orifice parameters of the printing nozzle to be prepared based on the orifice parameters of the workpiece input by the user, or the orifice parameters identified from the workpiece through image recognition technology, combined with the filler particle parameters corresponding to the filling material of the workpiece. This allows the tip of the printing nozzle to extend into the micro-orifice during the micro-orifice filling process. Here, when determining the filler particle parameters corresponding to the filling material of the workpiece, the control terminal can, but is not limited to, querying a preset database for filler particle parameters corresponding to the type of filling material. For example, when the filling material is a conductive ink of metals such as gold, silver, copper, tin, nickel, or aluminum, the control terminal can query the filler particle size (e.g., particle radius) corresponding to that metal. This can be combined with the orifice parameters in the micro-orifice filling parameters to obtain the tip orifice diameter of the printing nozzle, ensuring that the tip can properly expel the filling material and properly extend into the micro-orifice. Understandably, the tip orifice diameter of the printing nozzle must be larger than the filler particle size and smaller than the orifice diameter. In other words, any size within the size range between the filler particle size and the orifice diameter can be selected as the tip orifice diameter of the printing nozzle.

[0069] Step 104: Obtain the first length parameter based on the hole depth parameter of the workpiece and the preset first ratio, and use the first hole diameter parameter and the first length parameter as the tip size.

[0070] Specifically, after determining the first aperture parameter, the control terminal can also, but is not limited to, multiply the aperture depth parameter and a preset first ratio to obtain a tip length greater than the aperture depth parameter, and can use this tip length and the aforementioned aperture parameter as the tip size. Here, the preset first ratio can, but is not limited to, a proportionality coefficient greater than 1, to ensure that the calculated tip length is greater than the aperture depth parameter of the micropore.

[0071] See also: Figure 2 The schematic diagram shown is of a printing nozzle structure provided in an embodiment of this application, as follows: Figure 2 As shown, the shape of the printing nozzle can be close to that of an insect mouthpart. The distance d between the printing nozzle and the end can be used as the tip, which means that the change in aperture can be very small within this range. At this time, the length of the tip and the end aperture are the tip size mentioned above.

[0072] Step 106: Process the nozzle workpiece based on the tip size to obtain a printing nozzle, which is then used to fill the micropores in the workpiece.

[0073] Specifically, after obtaining the tip size of the printing nozzle to be prepared, the control terminal can, but is not limited to, determine the corresponding processing parameters based on the tip size. These processing parameters are then used to control the corresponding nozzle preparation device to process the capillary into a printing nozzle. Here, the type of processing parameters can, but is not limited to, be determined based on the type of nozzle preparation device. For example, when the nozzle preparation device includes the aforementioned guide rail, support clamps for pulling the two ends of the capillary, and a heating source for heating the capillary, the processing parameters may specifically include the pulling force or distance parameters corresponding to the support clamps pulling the two ends of the capillary, the heating power or heating time of the heating source, etc. Furthermore, these processing parameters ensure that the capillary is drawn into two sections containing printing nozzles, and that the tip size of the printing nozzles meets the micropore filling requirements.

[0074] As an optional embodiment of this application, the nozzle processing part is processed based on the tip size to obtain a printing nozzle, including:

[0075] The second aperture parameter is obtained based on the first aperture parameter and a preset second ratio; wherein the second aperture parameter is smaller than the first aperture parameter.

[0076] The second length parameter is obtained based on the first length parameter and the preset third ratio, and the processing parameters are determined based on the second length parameter and the second aperture parameter; wherein, the second length parameter is greater than the first length parameter, and the processing parameters include distance parameters and heating parameters;

[0077] The nozzle is pulled at both ends based on distance parameters and heated at the center based on heating parameters to obtain a printing nozzle.

[0078] Specifically, during the manufacturing of the printing nozzle, considering the dimensional errors introduced by the processing, it is possible, but not limited to, multiplying the determined first aperture parameter and the preset second ratio to obtain a second aperture parameter with an aperture smaller than the first aperture parameter. This second aperture parameter can be understood as an aperture parameter that includes dimensional errors. In other words, a printing nozzle with a tip size consistent with the second aperture parameter is first obtained through processing, and then further processing is used to make the tip size of the printing nozzle consistent with the first aperture parameter. Here, the preset second ratio can be, but is not limited to, a proportionality coefficient less than 1, to ensure that the calculated tip aperture is smaller than the first aperture parameter.

[0079] Next, but not limited to, multiplying the first length parameter determined above with the preset third ratio can be performed to obtain a second length parameter with a length greater than the first length parameter. This second length parameter can be understood as a length parameter that includes dimensional errors. That is, a printing nozzle with a tip size consistent with the second length parameter can be obtained through processing, and then further processing can be performed to make the tip size of the printing nozzle consistent with the first length parameter. Here, the preset third ratio can be, but is not limited to, a proportionality coefficient greater than 1, to ensure that the calculated tip length is greater than the first length parameter.

[0080] Next, after determining the second aperture parameter and the second length parameter, the processing parameters corresponding to these parameters can be retrieved from a preset parameter database, but are not limited to this step. Here, when the aforementioned nozzle preparation device includes a guide rail, a support clamp for pulling the capillary ends, and a heating source for heating the capillary, the processing parameters can specifically include the distance parameter corresponding to the support clamp pulling the capillary ends and the heating power of the heating source. These processing parameters ensure that the capillary is drawn into two sections containing printing nozzles, the tip aperture of the printing nozzle is within the aperture range containing the second aperture parameter, and the tip length of the printing nozzle is within the length range containing the second length parameter. It is understood that the aforementioned preset parameter database includes multiple aperture ranges, multiple length ranges generated based on historical processing records, and processing parameters corresponding to different aperture ranges and different length ranges.

[0081] Next, after determining the distance and heating parameters, the support clamps held at both ends of the capillary can be controlled to pull the two ends of the capillary according to the distance parameters, and the heating source can be controlled to heat the center position of the capillary according to the heating parameters to obtain the printing nozzle.

[0082] See also: Figure 3 The diagram shown illustrates the heating effect of a printing nozzle according to an embodiment of this application. Figure 3 As shown, in the embodiments of this application, the heating source may be, but is not limited to, a heating resistance wire or a laser located near the center of the capillary, so as to form a tip region at the center of the capillary by controlling the heating power of the heating resistance wire or the laser and combining the pulling force at both ends of the capillary.

[0083] As another optional embodiment of this application, after processing the nozzle part based on the tip size to obtain the printing nozzle, the process further includes:

[0084] The position of the forging needle is determined on one side of the tip of the printing nozzle based on the difference between the first length parameter and the tip length of the printing nozzle.

[0085] Forging treatment is performed on the forging needle position of the printing nozzle;

[0086] Specifically, after obtaining a printing nozzle whose tip size matches the second aperture parameter and the second length parameter, since the tip size is still affected by errors, in order to improve the accuracy of the printing nozzle tip size, it is also possible, but not limited to, identifying the current tip length of the printing nozzle, and determining the forging needle position on one side of the printing nozzle tip based on the difference between the current tip length and the aforementioned first length parameter. The tip length corresponding to the forging needle position is between the first length parameter and the current tip length, and the tip aperture corresponding to the forging needle position is between the second aperture parameter and the first aperture parameter.

[0087] Next, after determining the position of the forging needle, the forging needle position can be heated by the heating source mentioned above, but is not limited to, so that the processed printing nozzle has a higher precision in tip size compared to a printing nozzle whose tip size is consistent with the second aperture parameter and the second length parameter.

[0088] It should be noted that the printing nozzle after forging is generally left with a certain margin to avoid over-forging. That is, the tip size of the printing nozzle after forging is still inconsistent with the first aperture parameter and the first length parameter that meet the requirements. Therefore, the tip size accuracy of the printing nozzle can be further improved through subsequent processing.

[0089] See also: Figure 4 The diagram shown is a schematic representation of the forging effect of a printing nozzle according to an embodiment of this application. Figure 4 As shown, the forging needle position on the printing nozzle, which has the same tip size as the second aperture parameter and the second length parameter, can be heated by heating the resistance wire to perform heating forging needle treatment, so as to make the tip size accuracy of the printed nozzle higher after the treatment.

[0090] As another optional embodiment of this application, after forging the forging needle position of the printing nozzle, the method further includes:

[0091] The grinding distance is obtained based on the difference between the first length parameter and the tip length of the printing nozzle after forging.

[0092] The printing nozzles, after being forged, are ground according to the grinding needle distance.

[0093] Specifically, after obtaining the printing nozzle after forging, since the forging process leaves a certain margin to avoid over-forging, to further ensure the accuracy of the tip size, the current tip length of the forged printing nozzle can be identified, but is not limited to, and the grinding distance (or grinding position, not limited to) is determined on one side of the printing nozzle tip based on the difference between the current tip length and the aforementioned first length parameter. The tip length corresponding to this grinding distance can be consistent with the first length parameter, and the tip aperture corresponding to this grinding distance can be consistent with the first aperture parameter. Here, the grinding distance can be understood as the distance that the tip of the forged printing nozzle needs to move on the grinding disc, for example, see [reference needed]. Figure 5 The schematic diagram shown in this application embodiment illustrates the grinding effect of a printing nozzle. The tip of the printing nozzle, after being forged, is vertically fixed on a grinding disc. As the grinding disc rotates, the tip of the forged printing nozzle is controlled to move vertically toward the grinding disc to perform grinding on the printing nozzle. The moving distance is consistent with the distance of the grinding needle.

[0094] It is understood that, in order to ensure a better grinding effect in the embodiments of this application, the printing nozzle after forging can be fixed on a precision fine-tuning mechanism, so that the tip of the printing nozzle after forging can be controlled to move vertically toward the grinding disc through the precision fine-tuning mechanism. Here, the grinding disc can rotate at a constant speed around the center to further ensure the grinding effect.

[0095] It should be noted that after obtaining the printing nozzle after the needle grinding process, in order to ensure the reliability of generating a printhead containing the printing nozzle, the area of ​​the printing nozzle near both ends of the capillary tube can be removed first, for example, by using the aforementioned heat source to forge the printing nozzle near both ends of the capillary tube (or by grinding, not limited to this), to retain the portion of the printing nozzle mainly containing the tip area, which facilitates rapid micropore filling and effectively reduces the cost of filling material. Next, after obtaining the portion of the printing nozzle mainly containing the tip area, this portion of the printing nozzle can be fixed on a fixture, and the fixture can be connected to the needle connection point of the printhead to generate a printhead containing the printing nozzle.

[0096] See also: Figure 6 The schematic diagram shown is of another printing nozzle structure provided in the embodiment of this application, as follows: Figure 6As shown, the side of the printing nozzle furthest from the tip can be placed into the inner wall of the smaller end of the fixing clamp 2. At this time, the larger end of the fixing clamp 2 is placed on the inner wall of the fixing clamp 1, so that the fixing clamp 1 can support the fixing clamp 2. The area formed by the side of the printing nozzle furthest from the tip and the inner wall of the fixing clamp 2 can be used as the glue filling area. The printing nozzle is fixed on the fixing clamp 2 by filling the glue filling area.

[0097] As another optional embodiment of this application, after processing the nozzle part based on the tip size to obtain the printing nozzle, the method further includes:

[0098] The filling path is obtained based on the micropore type and micropore filling parameters of the workpiece, and the print head generated by the print nozzle is controlled to fill the micropores according to the filling path.

[0099] Specifically, after preparing the printing nozzle and corresponding printhead that meet the micro-orifice filling requirements, the control terminal can, but is not limited to, determine the micro-orifice filling path based on the type of micro-orifice and the micro-orifice filling parameters of the workpiece. This allows the control terminal to control the printhead to fill the micro-orifices of the workpiece according to the filling path. During the filling process, the tip of the printhead can be controlled to extend into the micro-orifice to effectively avoid voids, air bubbles, and incomplete filling, thereby improving the overall filling efficiency. Here, the type of micro-orifice in the workpiece can be specifically divided into through holes and blind holes, and different types of micro-orifices can also have different filling cross-sectional shapes, such as rectangular, trapezoidal, or irregular shapes. It is understood that the micro-orifice filling parameters can, but are not limited to, any at least one of the aforementioned hole depth and hole diameter parameters of the workpiece.

[0100] See also: Figure 7 The diagram shown is a schematic representation of the micropore filling effect of a printing nozzle according to an embodiment of this application. Figure 7 As shown, when a printhead containing a printing nozzle is used to fill the micropores in a workpiece, the printing nozzle can be fully inserted into the micropores to avoid phenomena such as holes, air bubbles, and incomplete filling caused by the high aspect ratio of the micropores.

[0101] As another optional embodiment of this application, the filling path is obtained according to the micropore type and micropore filling parameters of the workpiece, including:

[0102] When the microhole type of the workpiece is a through hole, the first position is determined based on the distance between the top of the microhole and the adjacent substrate.

[0103] The second position is determined based on the distance between the bottom of the microhole in the workpiece and the adjacent substrate, and the filling path is obtained based on the first position, the second position and the hole depth parameter.

[0104] Specifically, in determining the filling path of a printhead containing print nozzles, when the microhole type of the workpiece is identified as a through hole, a first position can be determined on the upper surface of the workpiece based on the distance between the top of the microhole and the adjacent substrate, but not limited to this, so that the electrical connection between the workpiece and the adjacent substrate can be realized through the functional structure formed by the metal filling material at the first position.

[0105] Next, a second position can be determined on the lower surface of the workpiece based on the distance between the bottom of the microhole and the adjacent substrate, so that the electrical connection between the workpiece and the adjacent substrate can be realized through the functional structure formed by the metal filling material at the second position.

[0106] Next, after determining the first position and the second position, a filling path including the first and second positions can be determined based on the filling requirements, but is not limited to this step. The starting position of the filling path is the first position, and the ending position is the second position. It is understood that in this embodiment, the filling requirements can be specifically divided into wall-climbing filling or complete filling. Different filling requirements correspond to different filling paths, but the starting position of all filling paths is always the first position, and the ending position is always the second position.

[0107] This example uses through-hole wall filling; please refer to [link / reference]. Figure 8 The diagram shown illustrates the effect of a micropore filling path provided in an embodiment of this application. Figure 8 As shown in Figure a, the first position is located on the upper surface of the workpiece and close to the top of the microhole, and the second position is located on the lower surface of the workpiece and close to the bottom of the microhole. At this time, the filling path can sequentially include the line connecting the first position and the top end of the microhole, the line connecting the top end of the microhole and the bottom end of the microhole, and the line connecting the bottom end of the microhole and the second position. The length of the line connecting the top end of the microhole and the bottom end of the microhole is consistent with the hole depth parameter.

[0108] As another optional embodiment of this application, the method of obtaining the filling path based on the micropore type and micropore filling parameters of the workpiece further includes:

[0109] When the micro-hole type of the workpiece is a blind hole, the first position is determined based on the distance between the top of the micro-hole of the workpiece and the adjacent substrate;

[0110] Based on the first position and the hole depth parameter, a third position is determined at one end of the bottom of the microhole in the workpiece; wherein, the vertical distance between the third position and the first position is consistent with the hole depth parameter;

[0111] Based on the third position and the aperture parameters, a fourth position is determined at the other end of the bottom of the microhole in the workpiece; wherein the straight-line distance between the fourth position and the third position is consistent with the aperture parameters;

[0112] The filling path is obtained based on the first position, third position, fourth position, hole depth parameter, and hole diameter parameter.

[0113] Specifically, in determining the filling path of a printhead containing print nozzles, when the micro-hole type of the workpiece is identified as a blind hole, a first position can be determined on the upper surface of the workpiece based on the distance between the top of the micro-hole and the adjacent substrate, but not limited to this, so that the electrical connection between the workpiece and the adjacent substrate can be realized through the functional structure formed by the metal filling material at the first position.

[0114] Next, since the microhole type is a blind hole, a third position can be determined at the bottom end of the microhole on the workpiece, based on the first position and the hole depth parameter, with a straight line distance from the first position and the hole depth parameter. Then, based on the third position and the hole diameter parameter, a fourth position can be determined at the bottom end of the microhole on the workpiece, with a straight line distance from the third position and the hole diameter parameter.

[0115] Next, after determining the first, third, and fourth positions, a filling path including these positions can be determined based on the filling requirements, but is not limited to this step. The starting position of this filling path is the first position, the transition position is the third position, and the ending position is the fourth position. It is understood that in this embodiment, the filling requirements can be specifically divided into wall-climbing filling or complete filling. Different filling requirements correspond to different filling paths, but the starting position of all filling paths is always the first position, the transition position is always the third position, and the ending position is always the second position.

[0116] This example uses through-hole wall filling; please refer to [link / reference]. Figure 8 The diagram shown illustrates the effect of a micropore filling path provided in an embodiment of this application. Figure 8 As shown in Figure b, the first position is located on the upper surface of the workpiece and close to the top of the microhole, the third position is located at one bottom end of the microhole, and the fourth position is located at the other bottom end of the microhole. The filling path can then sequentially include the line connecting the first position to one top end of the microhole, the line connecting the top end of the microhole to the third position, and the line connecting the third position to the fourth position. It is understood that the bottom filling height of the microhole can also be related to the conductivity requirements of the workpiece. For example, the bottom filling height can be proportional to the conduction current of the workpiece; that is, the greater the conduction current of the workpiece, the higher the corresponding bottom filling height, but this is not limited to this.

[0117] As another optional embodiment of this application, before controlling the print head generated by the print nozzle to perform micropore filling processing according to the filling path, the method further includes:

[0118] The surface of the workpiece is treated with a deionization fan to remove static electricity.

[0119] Air plasma equipment is used to decontaminate parts that have undergone static elimination treatment.

[0120] To avoid the filling effect being affected by unremoved charges and dirt such as oil stains on the surface of the workpiece, it is possible, but not limited to, controlling the deion fan to remove static electricity from the surface of the workpiece before controlling the print head generated by the printing nozzle to perform micropore filling according to the filling path. After the deion fan completes the static removal treatment, the air plasma equipment can be controlled to clean the surface of the workpiece to effectively ensure the filling effect.

[0121] As another optional embodiment of this application, after controlling the print head generated by the print nozzle to perform micropore filling processing according to the filling path, the method further includes:

[0122] The workpiece to be processed after micropore filling is sintered; or

[0123] The workpieces that have undergone micropore filling treatment are then subjected to reflow soldering.

[0124] Specifically, in order to ensure the normal progress of subsequent processes of the workpiece after micropore filling treatment, the workpiece after micropore filling treatment can be sintered using a sintering device, or it can be reflowed using a reflow soldering device, and this is not limited to these methods.

[0125] Please see Figure 9 , Figure 9 A schematic diagram of a micropore-filling-based printing nozzle fabrication apparatus provided in an embodiment of this application is shown.

[0126] like Figure 9 As shown, the micropore-filling-based printing nozzle fabrication device may include at least a parameter acquisition module 901, a size determination module 902, and a nozzle fabrication module 903, wherein:

[0127] The parameter acquisition module 901 is used to acquire the filler particle parameters corresponding to the filling material of the workpiece to be processed, and to obtain the first pore diameter parameter based on the pore diameter parameter of the workpiece to be processed and the filler particle parameters.

[0128] The dimension determination module 902 is used to obtain the first length parameter based on the hole depth parameter of the workpiece and the preset first ratio, and to use the first hole diameter parameter and the first length parameter as the tip size;

[0129] The nozzle preparation module 903 is used to process the nozzle workpiece based on the tip size to obtain a printing nozzle, which is then used to fill the micropores in the workpiece.

[0130] In some possible embodiments, the nozzle machining part is processed based on the tip size to obtain a printing nozzle, including:

[0131] The second aperture parameter is obtained based on the first aperture parameter and a preset second ratio; wherein the second aperture parameter is smaller than the first aperture parameter.

[0132] The second length parameter is obtained based on the first length parameter and the preset third ratio, and the processing parameters are determined based on the second length parameter and the second aperture parameter; wherein, the second length parameter is greater than the first length parameter, and the processing parameters include distance parameters and heating parameters;

[0133] The nozzle is pulled at both ends based on the distance parameter and heated at the center based on the heating parameter to obtain the printing nozzle.

[0134] In some possible embodiments, after processing the nozzle part based on the tip size to obtain the printing nozzle, the process further includes:

[0135] The position of the forging needle is determined on one side of the tip of the printing nozzle based on the difference between the first length parameter and the tip length of the printing nozzle.

[0136] The forging needle position of the printing nozzle is forged.

[0137] In some possible embodiments, after forging the forging position of the printing nozzle, the method further includes:

[0138] The grinding distance is obtained based on the difference between the first length parameter and the tip length of the printing nozzle after forging.

[0139] The printing nozzles, after being forged, are ground according to the grinding needle distance.

[0140] In some possible embodiments, after processing the nozzle part based on the tip size to obtain the printing nozzle, the process further includes:

[0141] The filling path is obtained based on the micropore type and micropore filling parameters of the workpiece, and the print head generated by the print nozzle is controlled to perform micropore filling according to the filling path; wherein, the micropore filling parameters are any at least one of the hole depth parameters and hole diameter parameters of the workpiece.

[0142] In some possible embodiments, the filling path is obtained based on the type of micropores in the workpiece and the micropore filling parameters, including:

[0143] When the microhole type of the workpiece is a through hole, the first position is determined based on the distance between the top of the microhole and the adjacent substrate.

[0144] The second position is determined based on the distance between the bottom of the microhole in the workpiece and the adjacent substrate, and the filling path is obtained based on the first position, the second position and the hole depth parameter.

[0145] In some possible embodiments, the filling path is obtained based on the micropore type and micropore filling parameters of the workpiece, and further includes:

[0146] When the micro-hole type of the workpiece is a blind hole, the first position is determined based on the distance between the top of the micro-hole of the workpiece and the adjacent substrate;

[0147] Based on the first position and the hole depth parameter, a third position is determined at one end of the bottom of the microhole in the workpiece; wherein, the vertical distance between the third position and the first position is consistent with the hole depth parameter;

[0148] Based on the third position and the aperture parameters, a fourth position is determined at the other end of the bottom of the microhole in the workpiece; wherein the straight-line distance between the fourth position and the third position is consistent with the aperture parameters;

[0149] The filling path is obtained based on the first position, third position, fourth position, hole depth parameter, and hole diameter parameter.

[0150] In some possible embodiments, the process further includes, prior to controlling the printhead generated by the print nozzles to perform micropore filling along the filling path:

[0151] The surface of the workpiece is treated with a deionization fan to remove static electricity.

[0152] Air plasma equipment is used to decontaminate parts that have undergone static elimination treatment.

[0153] In some possible embodiments, after controlling the printhead generated by the print nozzles to perform micropore filling along the filling path, the method further includes:

[0154] The workpiece to be processed after micropore filling is sintered; or

[0155] The workpieces that have undergone micropore filling treatment are then subjected to reflow soldering.

[0156] Those skilled in the art will clearly understand that the technical solutions of the embodiments of this application can be implemented by means of software and / or hardware. In this specification, "unit" and "module" refer to software and / or hardware capable of independently completing or cooperating with other components to complete a specific function, wherein the hardware may be, for example, a Field-Programmable Gate Array (FPGA), an Integrated Circuit (IC), etc.

[0157] Please see Figure 10 , Figure 10 This illustration shows a schematic diagram of another micropore-filling-based printing nozzle fabrication apparatus provided in an embodiment of this application.

[0158] like Figure 10 As shown, the micropore-filling-based printing nozzle preparation apparatus 1000 may include at least one processor 1001, at least one network interface 1004, a user interface 1003, a memory 1005, and at least one communication bus 1002.

[0159] The communication bus 1002 can be used to realize the connection and communication of the above components.

[0160] The user interface 1003 may include buttons, and the optional user interface may also include a standard wired interface or a wireless interface.

[0161] The network interface 1004 may include, but is not limited to, Bluetooth modules, NFC modules, Wi-Fi modules, etc.

[0162] The processor 1001 may include one or more processing cores. The processor 1001 connects to various parts within the micro-orifice filling-based printing nozzle preparation apparatus 1000 using various interfaces and lines. It executes or runs instructions, programs, code sets, or instruction sets stored in the memory 1005, and calls data stored in the memory 1005 to perform various functions and process data of the micro-orifice filling-based printing nozzle preparation apparatus 1000. Optionally, the processor 1001 may be implemented using at least one hardware form of DSP, FPGA, or PLA. The processor 1001 may integrate one or more of the following: CPU, GPU, and modem. The CPU primarily handles the operating system, user interface, and applications; the GPU is responsible for rendering and drawing the content to be displayed on the screen; and the modem handles wireless communication. It is understood that the modem may also not be integrated into the processor 1001 and may be implemented as a separate chip.

[0163] The memory 1005 may include RAM or ROM. Optionally, the memory 1005 may include a non-transitory computer-readable medium. The memory 1005 may be used to store instructions, programs, code, code sets, or instruction sets. The memory 1005 may include a program storage area and a data storage area, wherein the program storage area may store instructions for implementing an operating system, instructions for at least one function (such as touch function, sound playback function, image playback function, etc.), instructions for implementing the above-described method embodiments, etc.; the data storage area may store data involved in the above-described method embodiments, etc. Optionally, the memory 1005 may also be at least one storage device located remotely from the aforementioned processor 1001. Figure 10 As shown, the memory 1005, which serves as a computer storage medium, may include an operating system, a network communication module, a user interface module, and a micropore-filling-based printing nozzle preparation application.

[0164] Specifically, the processor 1001 can be used to call the micropore-filling-based printing nozzle preparation application stored in the memory 1005, and specifically perform the following operations:

[0165] Obtain the filler particle parameters corresponding to the filler material of the workpiece, and obtain the first pore diameter parameter based on the pore diameter parameter of the workpiece and the filler particle parameters.

[0166] The first length parameter is obtained based on the hole depth parameter of the workpiece and the preset first ratio, and the first hole diameter parameter and the first length parameter are used as the tip size;

[0167] The nozzle is processed based on the tip size to obtain a printing nozzle, which is then used to fill the micropores in the workpiece.

[0168] In some possible embodiments, the nozzle machining part is processed based on the tip size to obtain a printing nozzle, including:

[0169] The second aperture parameter is obtained based on the first aperture parameter and a preset second ratio; wherein the second aperture parameter is smaller than the first aperture parameter.

[0170] The second length parameter is obtained based on the first length parameter and the preset third ratio, and the processing parameters are determined based on the second length parameter and the second aperture parameter; wherein, the second length parameter is greater than the first length parameter, and the processing parameters include distance parameters and heating parameters;

[0171] The nozzle is pulled at both ends based on the distance parameter and heated at the center based on the heating parameter to obtain the printing nozzle.

[0172] In some possible embodiments, after processing the nozzle part based on the tip size to obtain the printing nozzle, the process further includes:

[0173] The position of the forging needle is determined on one side of the tip of the printing nozzle based on the difference between the first length parameter and the tip length of the printing nozzle.

[0174] The forging needle position of the printing nozzle is forged.

[0175] In some possible embodiments, after forging the forging position of the printing nozzle, the method further includes:

[0176] The grinding distance is obtained based on the difference between the first length parameter and the tip length of the printing nozzle after forging.

[0177] The printing nozzles, after being forged, are ground according to the grinding needle distance.

[0178] In some possible embodiments, after processing the nozzle part based on the tip size to obtain the printing nozzle, the process further includes:

[0179] The filling path is obtained based on the micropore type and micropore filling parameters of the workpiece, and the print head generated by the print nozzle is controlled to perform micropore filling according to the filling path; wherein, the micropore filling parameters are any at least one of the hole depth parameters and hole diameter parameters of the workpiece.

[0180] In some possible embodiments, the filling path is obtained based on the type of micropores in the workpiece and the micropore filling parameters, including:

[0181] When the microhole type of the workpiece is a through hole, the first position is determined based on the distance between the top of the microhole and the adjacent substrate.

[0182] The second position is determined based on the distance between the bottom of the microhole in the workpiece and the adjacent substrate, and the filling path is obtained based on the first position, the second position and the hole depth parameter.

[0183] In some possible embodiments, the filling path is obtained based on the micropore type and micropore filling parameters of the workpiece, and further includes:

[0184] When the micro-hole type of the workpiece is a blind hole, the first position is determined based on the distance between the top of the micro-hole of the workpiece and the adjacent substrate;

[0185] Based on the first position and the hole depth parameter, a third position is determined at one end of the bottom of the microhole in the workpiece; wherein, the vertical distance between the third position and the first position is consistent with the hole depth parameter;

[0186] Based on the third position and the aperture parameters, a fourth position is determined at the other end of the bottom of the microhole in the workpiece; wherein the straight-line distance between the fourth position and the third position is consistent with the aperture parameters;

[0187] The filling path is obtained based on the first position, third position, fourth position, hole depth parameter, and hole diameter parameter.

[0188] In some possible embodiments, the process further includes, prior to controlling the printhead generated by the print nozzles to perform micropore filling along the filling path:

[0189] The surface of the workpiece is treated with a deionization fan to remove static electricity.

[0190] Air plasma equipment is used to decontaminate parts that have undergone static elimination treatment.

[0191] In some possible embodiments, after controlling the printhead generated by the print nozzles to perform micropore filling along the filling path, the method further includes:

[0192] The workpiece to be processed after micropore filling is sintered; or

[0193] The workpieces that have undergone micropore filling treatment are then subjected to reflow soldering.

[0194] This application also provides a computer-readable storage medium having a computer program stored thereon, which, when executed by a processor, implements the steps of the above-described method. The computer-readable storage medium may include, but is not limited to, any type of disk, including floppy disks, optical disks, DVDs, CD-ROMs, microdrives, as well as magneto-optical disks, ROMs, RAMs, EPROMs, EEPROMs, DRAMs, VRAMs, flash memory devices, magnetic cards or optical cards, nanosystems (including molecular memory ICs), or any type of medium or device suitable for storing instructions and / or data.

[0195] It should be noted that, for the sake of simplicity, the foregoing method embodiments are all described as a series of actions. However, those skilled in the art should understand that this application is not limited to the described order of actions, as some steps may be performed in other orders or simultaneously according to this application. Furthermore, those skilled in the art should also understand that the embodiments described in the specification are preferred embodiments, and the actions and modules involved are not necessarily essential to this application.

[0196] In the above embodiments, the descriptions of each embodiment have different focuses. For parts not described in detail in a certain embodiment, please refer to the relevant descriptions in other embodiments.

[0197] In the several embodiments provided in this application, it should be understood that the disclosed apparatus can be implemented in other ways. For example, the apparatus embodiments described above are merely illustrative; for instance, the division of units is only a logical functional division, and in actual implementation, there may be other division methods. For example, multiple units or components may be combined or integrated into another system, or some features may be ignored or not executed. Furthermore, the coupling or direct coupling or communication connection shown or discussed may be through some service interface; the indirect coupling or communication connection between apparatuses or units may be electrical or other forms.

[0198] The units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the units can be selected to achieve the purpose of this embodiment according to actual needs.

[0199] Furthermore, the functional units in the various embodiments of this application can be integrated into one processing unit, or each unit can exist physically separately, or two or more units can be integrated into one unit. The integrated unit can be implemented in hardware or as a software functional unit.

[0200] If the integrated unit is implemented as a software functional unit and sold or used as an independent product, it can be stored in a computer-readable storage device (CMD). Based on this understanding, the technical solution of this application, in essence, or the part that contributes to the prior art, or all or part of the technical solution, can be embodied in the form of a software product. This computer software product is stored in a memory and includes several instructions to cause a computer device (which may be a personal computer, server, or network device, etc.) to execute all or part of the steps of the methods of the various embodiments of this application. The aforementioned memory includes various media capable of storing program code, such as USB flash drives, read-only memory (ROM), random access memory (RAM), portable hard drives, magnetic disks, or optical disks.

Claims

1. A method of making a print nozzle based on microcellular filling, characterized by, include: Obtain the filler particle parameters corresponding to the filling material of the workpiece to be processed, and obtain the first pore diameter parameter based on the pore diameter parameter of the workpiece to be processed and the filler particle parameters; The first length parameter is obtained based on the hole depth parameter of the workpiece to be processed and the preset first ratio, and the first hole diameter parameter and the first length parameter are used as the tip size; The nozzle is processed based on the tip size to obtain a printing nozzle, which is then used to fill the micropores in the workpiece. The process of machining the nozzle part based on the tip size to obtain the printing nozzle includes: The second aperture parameter is obtained based on the first aperture parameter and a preset second ratio; wherein the second aperture parameter is smaller than the first aperture parameter; A second length parameter is obtained based on the first length parameter and a preset third ratio, and processing parameters are determined based on the second length parameter and the second aperture parameter; wherein the second length parameter is greater than the first length parameter, and the processing parameters include distance parameters and heating parameters; Based on the distance parameter, both ends of the nozzle processing part are pulled, and based on the heating parameter, the center position of the nozzle processing part is heated to obtain a printing nozzle.

2. The method according to claim 1, characterized in that, After processing the nozzle part based on the tip size to obtain the printing nozzle, the process further includes: The forging needle position is determined on one side of the tip of the printing nozzle based on the difference between the first length parameter and the tip length of the printing nozzle. The forging needle position of the printing nozzle is subjected to forging needle treatment.

3. The method according to claim 2, characterized in that, After performing forging treatment on the forging needle position of the printing nozzle, the method further includes: The grinding distance is obtained based on the difference between the first length parameter and the tip length of the printing nozzle after forging. The printing nozzle, after being forged, is ground according to the grinding needle distance.

4. The method according to claim 1, characterized in that, After processing the nozzle part based on the tip size to obtain the printing nozzle, the process further includes: A filling path is obtained based on the micropore type and micropore filling parameters of the workpiece to be processed, and the print head generated by the print nozzle is controlled to perform micropore filling processing according to the filling path; wherein, the micropore filling parameters are any at least one of the hole depth parameters and hole diameter parameters of the workpiece to be processed.

5. The method according to claim 4, characterized in that, The step of obtaining the filling path based on the micropore type and micropore filling parameters of the workpiece includes: When the microhole type of the workpiece to be processed is a through hole, the first position is determined according to the distance between the top of the microhole of the workpiece to be processed and the adjacent substrate; The second position is determined based on the distance between the bottom of the microhole of the workpiece and the adjacent substrate, and the filling path is obtained based on the first position, the second position and the hole depth parameter.

6. The method according to claim 5, characterized in that, The step of obtaining the filling path based on the micropore type and micropore filling parameters of the workpiece further includes: When the micro-hole type of the workpiece to be processed is a blind hole, the first position is determined according to the distance between the top of the micro-hole of the workpiece to be processed and the adjacent substrate; Based on the first position and the hole depth parameter, a third position is determined at one end of the bottom of the microhole in the workpiece; wherein the vertical distance between the third position and the first position is consistent with the hole depth parameter; Based on the third position and the aperture parameter, a fourth position is determined at the other end of the bottom of the microhole in the workpiece; wherein the straight-line distance between the fourth position and the third position is consistent with the aperture parameter; The filling path is obtained based on the first position, the third position, the fourth position, the hole depth parameter, and the hole diameter parameter.

7. The method according to claim 4, characterized in that, Before controlling the printhead generated by the print nozzle to perform micropore filling according to the filling path, the method further includes: The surface of the workpiece to be processed is destaticated using a deionization fan. The workpiece to be processed is decontaminated using an air plasma device after static elimination treatment.

8. The method according to claim 4, characterized in that, After controlling the printhead generated by the print nozzle to perform micropore filling according to the filling path, the method further includes: The workpiece to be processed after micropore filling is subjected to sintering treatment; or The workpiece to be processed after micropore filling is subjected to reflow soldering.

9. A printing nozzle preparation apparatus based on micropore filling, characterized in that, include: The parameter acquisition module is used to acquire the filler particle parameters corresponding to the filling material of the workpiece to be processed, and to obtain the first pore diameter parameter based on the pore diameter parameter of the workpiece to be processed and the filler particle parameters. The size determination module is used to obtain a first length parameter based on the hole depth parameter of the workpiece to be processed and a preset first ratio, and to use the first hole diameter parameter and the first length parameter as the tip size; The nozzle preparation module is used to process the nozzle workpiece based on the tip size to obtain a printing nozzle, which is then used to fill the micropores of the workpiece. The process of machining the nozzle part based on the tip size to obtain the printing nozzle includes: The second aperture parameter is obtained based on the first aperture parameter and a preset second ratio; wherein the second aperture parameter is smaller than the first aperture parameter; A second length parameter is obtained based on the first length parameter and a preset third ratio, and processing parameters are determined based on the second length parameter and the second aperture parameter; wherein the second length parameter is greater than the first length parameter, and the processing parameters include distance parameters and heating parameters; Based on the distance parameter, both ends of the nozzle processing part are pulled, and based on the heating parameter, the center position of the nozzle processing part is heated to obtain a printing nozzle.

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