Chip structure and light field enhancement method for realizing local evanescent wave light field enhancement
By employing a multi-level multimode interference coupler and waveguide loop array structure in the biosensor, combined with a thermal modulator chip design, the problem of limited single-particle detection and imaging resolution was solved, achieving local light field enhancement and efficient detection.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- PHOTONIC VIEW TECHNOLOGY CO LTD
- Filing Date
- 2024-01-17
- Publication Date
- 2026-07-03
AI Technical Summary
In existing biosensors, single-particle detection and imaging resolution are limited by the small volume of light-analyte interactions and the overlap of signals from multiple analytes, and the nanopore etching process is difficult, resulting in high costs.
A chip structure employing multi-stage series multimode interference couplers, waveguide loop arrays, and phase modulators generates imaging images with different phases by forming closed-loop interference fringes and evanescent wave enhancement, combined with a thermal modulator to change the waveguide temperature.
This achieves local light field enhancement, reduces light loss, improves imaging resolution and detection sensitivity, and lowers manufacturing costs.
Smart Images
Figure CN117872528B_ABST
Abstract
Description
Technical Field
[0001] This application relates to the technical field of photonic integrated circuits, and in particular to a chip structure and a method for enhancing local evanescent wave optical fields. Background Technology
[0002] Integrating photonics into biosensors enables compact, scalable, and reliable products (reproducible), thereby helping to increase yields and save significant time and resources. Such biosensors can be used in fluorescence detection, colorimetry, and spectroscopy.
[0003] As is well known, integrated photonic waveguides can be used to provide a miniaturized and cost-effective detection device for single-particle detection or as an imaging system for microscopes. Due to their high refractive index contrast compared to the surrounding medium, optical waveguides are used to guide light to the sample being examined via a guided mode.
[0004] exist Figure 1 The image shows the cross-sectional geometry of a conventional rectangular waveguide and the mode profiles of the basic TE and TM modes of a single-mode waveguide. Light is primarily confined within the waveguide, with a small portion attenuating in the cladding, limiting the excitation volume and power of the light-analyte interaction, particularly near the upper surface, extending only 80 nm to 200 nm.
[0005] exist Figure 2 In this process, by removing part of the top cladding, the excitation power of the interaction between light and the analyte on the upper surface of the waveguide can be locally increased. However, due to the higher refractive index contrast, the propagation loss will also increase significantly.
[0006] One of the challenges in detecting single particles or molecules is the overlap of signals from multiple analytes or the bulk background. For example... Figure 1 and Figure 2 The rectangular waveguide shown can separate signals from multiple analytes by locating the field near the waveguide; however, multiple analytes can still be filled simultaneously in the direction of light propagation. Therefore, as... Figure 3 The method shown involves point-etching nanoscale holes along the waveguide propagation direction, which keeps the photo-analyte interaction volume sufficiently small to ensure single-analyte detection at a time. However, uniformly etching nanoscale holes remains a fabrication challenge. Therefore, considering manufacturing costs and feasibility, alternative solutions without nanopore etching are more advantageous. Summary of the Invention
[0007] To facilitate single-particle detection and enhance imaging resolution, this application provides a chip structure and a method for enhancing the local evanescent wave optical field.
[0008] On the one hand, the chip structure provided in the application for enhancing the local evanescent wave optical field adopts the following technical solution:
[0009] A chip structure for enhancing local evanescent wave optical fields includes a multi-level series multimode interference coupler, a waveguide loop array, and a phase modulator, wherein the multimode interference coupler includes an input waveguide, a multimode waveguide region, and an output waveguide;
[0010] The first structure: the output waveguide of each final stage multimode interference coupler in the multi-stage multimode interference coupler is connected through a first-stage waveguide loop. A phase modulator is provided on the first-stage waveguide loop, and the first-stage waveguide loops of multiple multimode interference couplers form a waveguide array region.
[0011] Alternatively, in the second structure: the output waveguide of the second-to-last stage multimode interference coupler is connected to the first-stage waveguide loop of the input waveguide of the last stage multimode interference coupler, and the output waveguide of each last stage multimode interference coupler in the multi-stage multimode interference coupler is connected through a second-stage waveguide loop. A phase modulator is provided on the second-stage waveguide loop, and the multiple first-stage waveguide loops form a waveguide array region.
[0012] Alternatively, a third structure: the output waveguide of the second-to-last stage multimode interference coupler is connected to the input waveguide of the last stage multimode interference coupler through a first-stage waveguide loop; the output waveguides of any two last-stage multimode interference couplers in the multi-stage multimode interference couplers are connected through a second-stage waveguide loop; a phase modulator is provided on the second-stage waveguide loop; and multiple first-stage waveguide loops form a waveguide array region.
[0013] Alternatively, a fourth structure: the output waveguide of the second-to-last stage multimode interference coupler is connected to the output waveguides of the two last-stage multimode interference couplers through a first-stage waveguide loop, and the multiple first-stage waveguide loops form a waveguide array region; the input waveguides of the two last-stage multimode interference couplers in the multi-stage multimode interference coupler are connected through a second-stage waveguide loop, and a phase modulator is provided on the second-stage waveguide loop.
[0014] By adopting the above technical solution, since some light leaks into the cladding in the direction perpendicular to its propagation, and the light intensity around 200nm is relatively strong, a multi-stage multimode interference coupler is set up, combined with a first-stage waveguide loop, or a first-stage waveguide loop and a second-stage waveguide loop, to form a closed loop. By forming interference fringes, the local light field enhancement can be maintained, light loss can be reduced, and the evanescent wave on the upper surface of the waveguide can be effectively utilized. All structures are equipped with a waveguide array region, which is used as the region to excite fluorescence to generate imaging images of different phases. The closed loop setting is conducive to the formation of interference conditions, which is more conducive to the detection of molecular or particle signals. In addition, the more series-connected waves, the larger the total sensing area at the top of the waveguide array region. The process of this structure is simple and the manufacturing cost is low.
[0015] Optionally, the multiple waveguides in the waveguide array region are arranged in parallel.
[0016] By adopting the above technical solution, since some light will leak into the cladding in the direction perpendicular to the propagation of the wave, the formation of interference conditions under the parallel waveguides and loops is conducive to maximizing the utilization of evanescent waves, reducing light loss, and enhancing super-resolution imaging.
[0017] Optionally, if the first structure is adopted, the bend at the end of the first-stage waveguide loop away from the output waveguide is the thermal modulation region.
[0018] By adopting the above technical solution, the thermal modulation region changes the temperature of the waveguide through the thermal modulator, causing a phase change, thereby obtaining images with different phases in the waveguide array region to generate super-resolution images; the information in the image is mixed, and the mixture of multiple information corresponds to multiple equations, and multiple images correspond to multiple formulas, thereby restoring the solution of factors in multiple equations.
[0019] Optionally, if the second, third, or fourth structure is adopted, the secondary waveguide loop is set as a thermal modulation region.
[0020] By adopting the above technical solution, the temperature of the waveguide is changed by the thermal modulator, which causes a phase change. This allows images under different phases to be obtained in the waveguide array area, so as to restore a high-resolution image. The information in the image is mixed, and the mixture of multiple information corresponds to multiple equations. Multiple images correspond to multiple formulas, thereby restoring the solution of factors in multiple equations.
[0021] Optionally, the input waveguide of the multimode interference coupler preceding the waveguide array region further includes a waveguide input / output terminal, which is used to transmit single-wavelength or multi-wavelength light.
[0022] By adopting the above technical solution, the closed-loop structure at the input and output ends of the terminal waveguide can generate back reflection to enhance the loop diagram of the field in the strip waveguide region.
[0023] Optionally, if the first structure is adopted, the waveguides in the first-stage waveguide loop are not arranged in a cross configuration.
[0024] By adopting the above technical solution, the waveguides are not intersected, forming a strip waveguide region, so as to make full use of the evanescent waves on the upper surface of the waveguide and enhance super-resolution imaging.
[0025] Optionally, if the second, third, or fourth structure is adopted, the waveguides in the secondary waveguide loop are not arranged in a cross configuration.
[0026] By adopting the above technical solution, the waveguides are not intersected, forming a strip waveguide region, so as to make full use of the evanescent waves on the waveguide and enhance super-resolution imaging.
[0027] Optionally, if the third structure is adopted, the total phase difference between the two waveguides in the same loop of the secondary waveguide loop is an integer multiple of π.
[0028] By adopting the above technical solution, the regions where standing wave interference is strengthened or weakened in the waveguide array region are changed, thereby altering the regions where the light intensity of the strip waveguide region is strengthened or weakened.
[0029] Optionally, a nanopore is provided on the top of the waveguide array region.
[0030] On the other hand, this application provides a method for enhancing a local evanescent wave optical field, employing the following technical solution:
[0031] A method for enhancing a local evanescent wave optical field, based on the chip structure described above for enhancing a local evanescent wave optical field, includes the following method: creating a waveguide illumination image through the diffraction pattern of the waveguide array region; changing the temperature of the phase modulation region; and shifting the optical pattern generated in the waveguide array region when the phase change of the waveguide corresponding to the thermal modulation region matches the constructive interference condition.
[0032] In summary, this application includes at least one of the following beneficial technical effects: by setting up multiple structures that enhance evanescent waves by forming closed loops, local light intensity enhancement is maintained, light loss is reduced, evanescent waves on the waveguide are effectively utilized, and waveguide illumination images are created through diffraction patterns under different phases in the waveguide array region to obtain super-resolution imaging. Attached Figure Description
[0033] Figure 1 It shows the cross-sectional view of a rectangular waveguide and the basic TE and TM modes of a single-mode waveguide.
[0034] Figure 2It shows a cross-sectional view of a rectangular waveguide without its top cladding and a model display of the basic TE and TM modes of a single-mode waveguide.
[0035] Figure 3 This is a cross-sectional view of the nanopores etched directly above the waveguide.
[0036] Figure 4 This is the circuit tree diagram of the generation structure in the first type of structure.
[0037] Figure 5 It is the generating structure in the first type of structure, and it is the circuit tree diagram that produces back reflection.
[0038] Figure 6 It is the generated structure in the second type of structure. The second-level multimode interference coupler includes the circuit tree diagram of two MMI2X2 arrays.
[0039] Figure 7 This is the circuit tree diagram of the generation structure in the third type of structure.
[0040] Figure 8 This is the circuit tree diagram of the generation structure in the fourth type of structure. Detailed Implementation
[0041] The present application will be further described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are merely illustrative of the application and are not intended to limit the scope of the application.
[0042] This application discloses a chip structure for achieving local evanescent wave optical field enhancement. (Refer to...) Figure 1 There are various chip structures that can achieve local evanescent wave optical field enhancement, including multi-level series multimode interference couplers, waveguide loop arrays, and phase modulators. The multimode interference coupler includes an input waveguide, a multimode waveguide region, and an output waveguide.
[0043] First structure: Reference Figure 4 In a multi-stage multimode interferometric coupler, the output waveguide of each final-stage multimode interferometric coupler is connected through a first-stage waveguide loop. The first-stage waveguide loops of multiple multimode interferometric couplers form a waveguide array region. The waveguide array region is referred to as the "Waveguide Array" in the figure.
[0044] The first structure's multimode interference coupler comprises three stages, configured as an MMI1X2 array, i.e., a total of seven MMI1X2 arrays. Light from the grating coupler's output enters through the input waveguide of the first MMI1X2 and exits through its two output waveguides; the grating coupler is referred to as "Grating coupler" in the diagram. Light then enters through the input waveguides of the second and third MMI1X2, respectively, and the two output waveguides of the second and third MMI1X2 also each output two waveguides, each connected to an input waveguide of an MMI1X2; these are designated as the fourth, fifth, sixth, and seventh MMI1X2. At this point, one end of the waveguide is connected to one of the output waveguides of any one of the fourth, fifth, sixth, and seventh MMI1X2, and the other end of the waveguide is connected to the other output waveguide of the corresponding MMI1X2, forming a first-order waveguide loop. The fourth, fifth, sixth, and seventh MMI1X2 have the same structure and each forms a corresponding first-order waveguide loop.
[0045] In this embodiment, multiple waveguides in the waveguide array region are arranged in parallel. Since light produces evanescent waves in the direction perpendicular to its propagation, parallel waveguides are beneficial for maximizing the utilization of evanescent waves, reducing light loss, and enhancing super-resolution imaging.
[0046] A phase modulator is located at the bend of the primary waveguide loop furthest from the output waveguide. This phase modulator is the "Heater" region indicated in the diagram. The phase modulator heats the thermal modulation region, changing the waveguide temperature and causing phase changes. This allows for the acquisition of images with different phases within the waveguide array, generating high-resolution images. The information in these images is mixed; the mixture of various information corresponds to multiple equations, and multiple images correspond to multiple formulas, thus reconstructing the solutions to the factors in multiple equations.
[0047] In addition, the primary waveguide loops are arranged in parallel at a set interval, so the waveguides in the primary waveguide loops do not cross each other, thus forming a strip waveguide region to make full use of the evanescent waves on the waveguide and enhance super-resolution imaging.
[0048] Reference Figure 5In other embodiments, the three-stage multimode interferometric coupler includes four MMI2X2 arrays, namely the fourth MMI2X2, fifth MMI2X2, sixth MMI2X2, and seventh MMI2X2. Each MMI2X2 array includes two waveguide input / output terminals. The fourth, fifth, sixth, and seventh MMI2X2 arrays have additional Outut1, Outut2, Outut3, and Outut4, respectively, compared to the MMI1X2 array. The waveguide input / output terminals are used to transmit single-wavelength or multi-wavelength light and can generate back reflections to form interference, thereby enhancing the field in the strip waveguide region.
[0049] Second structure: Reference Figure 6 The output waveguide of the second-stage multimode interference coupler is connected to the input waveguide of the final-stage multimode interference coupler through a first-stage waveguide loop. The output waveguide of each final-stage multimode interference coupler in the multi-stage multimode interference coupler is connected through a second-stage waveguide loop. Multiple first-stage waveguide loops form a waveguide array region.
[0050] The second type of multimode interferometric coupler consists of a single MMI1x2 array in its first-stage configuration, two MMI1x2 arrays in its second-stage configuration, and two MMI2x2 arrays in its third-stage configuration. The input waveguide of the first-stage MMI1x2 array is connected to the output of the grating coupler. In the second-stage MMI1x2, one of the two input waveguides of each MMI1x2 is connected to the output waveguide of the first-stage MMI1x2, while the other serves as the waveguide input / output terminal for transmitting single-wavelength or multi-wavelength light. The connection structure between the two waveguides is symmetrically arranged. Multiple first-stage waveguide loops are arranged at equal intervals, with the parallel sections between the waveguides forming a waveguide array region. The waveguides in the second-stage waveguide loops do not intersect. This non-intersecting arrangement forms a strip-shaped waveguide region to fully utilize evanescent waves on the waveguides and enhance high-resolution imaging.
[0051] In a three-stage multimode interferometric coupler, the two output waveguides of each MMI2X2 are connected by a waveguide loop, forming a secondary waveguide loop. The secondary waveguide loop forms a bend section containing a phase modulator, which is designated as the "Heater" region in the diagram. The phase modulator heats the thermal modulation region, changing the waveguide temperature and causing phase changes. This allows for the acquisition of images with different phases within the waveguide array, generating ultra-high-resolution images. The information in the images is mixed; multiple information elements correspond to multiple equations, and multiple images correspond to multiple formulas, thus reconstructing the solutions to the factors in multiple equations.
[0052] The third structure: reference Figure 7The output waveguide of the second-stage multimode interference coupler is connected to the input waveguide of the final-stage multimode interference coupler through a first-stage waveguide loop. The output waveguides of any two final-stage multimode interference couplers in the multi-stage multimode interference coupler are connected through a second-stage waveguide loop. Multiple first-stage waveguide loops form a waveguide array region.
[0053] The third structure is basically the same as the second structure, the difference being the connection method of the secondary waveguide loop:
[0054] The second-order waveguide loop includes bent optical fibers “a”, “b”, “c” and “d” arranged in sequence. The four MMI2X2 arrays in the fourth-order multimode interference coupler are connected in a loop by the output waveguides of the two MMI2X2 arrays located on both sides of the arrangement direction through the bent waveguides “a” and “b”. The output waveguides of the two MMI2X2 arrays located in the middle of the arrangement direction are connected in a loop by the bent waveguides “c” and “d”.
[0055] The secondary waveguide loop is equipped with a phase modulator, which is the "Heater" region marked in the diagram. The phase modulator heats the thermal modulation region, changing the waveguide temperature and causing a phase change. This allows different images to be obtained in the waveguide array region, generating a super-resolution image. The information in the image is mixed; multiple pieces of information correspond to multiple equations, and multiple images correspond to multiple formulas, thus reconstructing the solutions to the factors in multiple equations.
[0056] The waveguides in the secondary waveguide loop are not intersected. This non-intersecting arrangement forms a strip waveguide region, fully utilizing the evanescent waves on the waveguides to enhance super-resolution imaging. The phase difference between the bent fibers "a" and "b" is an integer multiple, generating resonance in the waveguide array region. The phase difference between the bent fibers "c" and "d" is consistent, causing the standing waves in the waveguide array region to generate a skipping mode, thereby enhancing the field within the strip waveguide region.
[0057] The fourth structure: reference Figure 8 The output waveguide of the second-stage multimode interferometric coupler is connected to the output waveguides of any two final-stage multimode interferometric couplers through a first-stage waveguide loop, and multiple first-stage waveguide loops form a waveguide array region; the input waveguides of any two final-stage multimode interferometric couplers in the multi-stage multimode interferometric coupler are connected through a second-stage waveguide loop.
[0058] The fourth structure includes a two-stage multimode interferometric coupler. The first-stage multimode interferometric coupler comprises one MMI2x2 array, and the second-stage multimode interferometric coupler comprises two MMI1x2 arrays. The two input waveguides of the MMI2x2 array in the first-stage multimode interferometric coupler are connected to the output of the grating coupler. The two output waveguides of the MMI2x2 array in the first-stage multimode interferometric coupler are each connected to one of the output waveguides of the two MMI1x2 arrays in the second-stage multimode interferometric coupler. The remaining two output waveguides of the two MMI1x2 arrays in the second-stage multimode interferometric coupler are connected via waveguides. The waveguides between the first-stage and second-stage multimode interferometric couplers form a first-stage waveguide loop. The waveguides in the first-stage waveguide loop are arranged in parallel at a predetermined spacing, while the waveguides in the second-stage waveguide loop do not intersect; the parallel portion forms the waveguide array region. The non-intersecting waveguides form a strip-shaped waveguide region to fully utilize evanescent waves on the waveguides and enhance super-resolution imaging.
[0059] In a second-level multimode interferometric coupler, the two input waveguides of two MMI1X2 modules are connected to form a second-level waveguide loop. By connecting the two MMI1X2 modules, a resonant circuit is generated in the waveguide array region to obtain an interferometric standing wave. A phase modulator is installed in the second-level waveguide loop, which is the area marked "Heater" in the diagram. The phase modulator heats the thermal modulation region, changing the waveguide temperature and causing a phase change. This allows for the acquisition of images with different phases in the waveguide array region, generating ultra-high-resolution images. The information in the images is mixed; multiple pieces of information correspond to multiple equations, and multiple images correspond to multiple formulas, thus reconstructing the solutions to the factors in multiple equations.
[0060] The implementation principle of a chip structure for enhancing local evanescent wave optical fields according to an embodiment of this application is as follows: A multi-level multimode interference coupler is provided, combined with a first-stage waveguide loop, or a first-stage waveguide loop and a second-stage waveguide loop, to form a closed loop. This maintains local light intensity enhancement, reduces light loss, and effectively utilizes the evanescent wave on the waveguide. Various structures include a waveguide array region, which is used as the illumination area to generate imaging images of different phases. The closed-loop configuration is beneficial for enhancing super-resolution imaging, thus facilitating the detection of material components. Furthermore, the more waves connected in series, the larger the total sensing area at the top of the waveguide array region. Therefore, several structures for generating evanescent wave enhancement at the top of a strip waveguide through interference are proposed. This enhancement helps to locate a small number of particles in the waveguide propagation direction. In addition, our structure can also create waveguide illumination patterns through diffraction patterns to obtain high imaging resolution.
[0061] This application also discloses a method for enhancing a local evanescent wave optical field. Based on the above-mentioned evanescent wave enhancement generation structure, the method includes the following steps: creating a waveguide illumination image through the diffraction pattern of the waveguide array region, changing the temperature of the thermal modulator, and when the phase change of the thermal modulator corresponding to the thermal modulation region matches the constructive interference condition, the optical pattern generated in the waveguide array region is shifted.
[0062] In an illumination image, changing the temperature of the modulator can transform a point of increased light intensity into a point of decreased intensity; and at the same point, different phases carry different material information. By changing the temperature of the waveguide through a thermal modulator, a phase change is caused, thereby obtaining images with different phases in the waveguide array region to generate a super-resolution image; the information in the image is mixed, with multiple types of information corresponding to multiple equations, and multiple images corresponding to multiple formulas, thus reconstructing the solutions to the factors in multiple equations.
[0063] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.
Claims
1. A chip structure enabling local evanescent wave light field enhancement, characterized by The system includes a multi-stage cascaded multimode interference coupler, a waveguide loop array, and a phase modulator, wherein the multimode interference coupler includes an input waveguide, a multimode waveguide, and an output waveguide; The first structure: the output waveguide of each final stage multimode interference coupler in the multi-stage multimode interference coupler is connected through a first-stage waveguide loop. A phase modulator is provided on the first-stage waveguide loop, and the first-stage waveguide loops of multiple multimode interference couplers form a waveguide array region. Alternatively, in the second structure: the output waveguide of the second-to-last stage multimode interference coupler is connected to the first-stage waveguide loop of the input waveguide of the last stage multimode interference coupler, and the output waveguide of each last stage multimode interference coupler in the multi-stage multimode interference coupler is connected through a second-stage waveguide loop. A phase modulator is provided on the second-stage waveguide loop, and the multiple first-stage waveguide loops form a waveguide array region. Alternatively, a third structure: the output waveguide of the second-to-last stage multimode interference coupler is connected to the input waveguide of the last stage multimode interference coupler through a first-stage waveguide loop; the output waveguides of any two last-stage multimode interference couplers in the multi-stage multimode interference couplers are connected through a second-stage waveguide loop; a phase modulator is provided on the second-stage waveguide loop; and multiple first-stage waveguide loops form a waveguide array region. Alternatively, a fourth structure: the output waveguide of the second-to-last stage multimode interference coupler is connected to the output waveguides of the two last-stage multimode interference couplers through a first-stage waveguide loop, and the multiple first-stage waveguide loops form a waveguide array region; the input waveguides of the two last-stage multimode interference couplers in the multi-stage multimode interference coupler are connected through a second-stage waveguide loop, and a phase modulator is provided on the second-stage waveguide loop; By combining a primary waveguide loop, or a primary waveguide loop and a secondary waveguide loop, a closed loop is formed. By forming interference fringes, the local optical field can be enhanced, the light loss can be reduced, and the evanescent waves on the upper surface of the waveguide can be effectively utilized.
2. The chip structure enabling local evanescent wave optical field enhancement according to claim 1, wherein, The waveguide array region has multiple waveguides arranged in parallel.
3. The chip structure enabling local evanescent wave optical field enhancement according to claim 1, wherein, If the first structure is adopted, the bend in the primary waveguide loop away from the output waveguide is the thermal modulation region.
4. The chip structure enabling local evanescent wave optical field enhancement according to claim 1, wherein, If the second, third, or fourth structure is adopted, the secondary waveguide loop is set as a thermal modulation region.
5. The chip structure enabling local evanescent wave optical field enhancement according to claim 3 or 4, characterized in that, The input waveguide of the multimode interference coupler preceding the waveguide array region also includes a waveguide input / output terminal, which is used to transmit single-wavelength or multi-wavelength light.
6. The chip structure enabling local evanescent wave optical field enhancement according to claim 5, wherein, If the first structure is adopted, the waveguide arrays in the first-stage waveguide loop are not arranged in a cross configuration.
7. The chip structure enabling local evanescent wave optical field enhancement according to claim 5, wherein, If the second, third, or fourth structure is adopted, the waveguide arrays in the secondary waveguide loop are not cross-arranged.
8. The chip structure enabling local evanescent wave optical field enhancement according to claim 7, wherein, If the third structure is adopted, in the secondary waveguide loop, the total phase difference between the two waveguides in the same loop is an integer multiple of π.
9. The chip structure enabling local evanescent wave optical field enhancement according to claim 1, wherein, The top of the waveguide array region is provided with nanopores.
10. A method for local evanescent wave light field enhancement, based on a chip structure for local evanescent wave light field enhancement according to any one of claims 1 to 9, characterized in that The method includes the following: creating a waveguide illumination image through the diffraction pattern of the waveguide array region; changing the temperature of the phase modulator; and shifting the light pattern generated in the waveguide array region when the phase change of the waveguide corresponding to the thermal modulation region matches the constructive interference condition.