Compact six-dimensional posture adjustment platform for optical performance testing of large-aperture optical components

Abstract

The present invention discloses a compact six-dimensional attitude adjustment platform suitable for optical performance detection of large-aperture optical elements, including a base, a lifting adjustment component, a Y-axis displacement adjustment component, an X-axis displacement adjustment component, a deflection adjustment component, a tilt adjustment component and a pitch adjustment component arranged in sequence from bottom to top, the lifting adjustment component is used to adjust the height of the instrument or element, the Y-axis displacement adjustment component and the X-axis displacement adjustment component are used to adjust the lateral position and the longitudinal position of the instrument or element respectively, the deflection adjustment component and the pitch adjustment component are used to adjust the deflection angle and the pitch angle respectively, and the tilt adjustment component is used to adjust the tilt angle. Under the cooperation of the six adjustment components, the optical paths of the tested element and the optical instrument are finally adjusted to coincide during the test to meet the test requirements. Each dimensional adjustment component of the attitude adjustment platform of the present invention is stacked and integrated on the base in sequence from bottom to top, the device structure is more compact, the integration is higher, and it is more convenient to use.

Description

Technical Field

[0001] The present invention relates to the technical field of optical detection equipment, and in particular to a compact six-dimensional posture adjustment platform suitable for optical performance detection of large-caliber optical elements. Background Art

[0002] Multi-dimensional optical detection adjustment platform is widely used in scientific research, laser application, automatic measurement and detection equipment, industrial automation and other fields due to its high precision, large load capacity and long travel. The adjustment platform can achieve the effect of accurately and quickly adjusting the spatial position of the test piece on the platform. With the rapid development of optical processing level, the proportion of large-aperture optical components is increasing. How to quickly and accurately carry out high-precision surface interference detection of large-aperture optical components and engineering is becoming one of the key topics in the field of optical detection.

[0003] The invention patent with publication number CN217279072U discloses a six-dimensional posture adjustment mechanism, which includes an optical frame, and the six-dimensional posture adjustment mechanism includes: a base plate, a first support frame, a first screw, a first movable frame, a second support frame, a second screw, a second movable frame, a third support frame, a third screw and a lifting frame; by rotating the first screw, the optical frame can be moved in the positive and negative directions of its X-axis; by rotating the second screw, the optical frame can be moved in the positive and negative directions of its Y-axis; by rotating the third screw, the height of the optical frame can be adjusted, that is, the optical frame can be moved in the positive and negative directions of its Z-axis.

[0004] Although the above structure can realize the six-dimensional posture adjustment of the optical frame to meet the needs of optical experiments, the structure of the entire device is a cantilever support structure. For optical testing of large-diameter optical components, the stability of the entire adjustment platform is poor. Summary of the invention

[0005] In order to solve the problems and shortcomings existing in the above-mentioned prior art, the present invention specifically proposes a compact six-dimensional posture adjustment platform for optical instruments suitable for optical detection of large-aperture optical components. The platform has adjustment functions in six dimensions, and each dimensional adjustment component of the platform is stacked and integrated on the base from bottom to top, which reduces the overall size of the equipment, makes the equipment more integrated, and has a more compact structure. During the measurement process, the overall stability of the device is better and the measurement accuracy is higher.

[0006] In order to achieve the above-mentioned object of the invention, the technical solution of the present invention is as follows:

[0007] A compact six-dimensional posture adjustment platform suitable for optical performance detection of large-aperture optical elements, comprising a base, a lifting adjustment component, an X-axis displacement adjustment component, a Y-axis displacement adjustment component, a deflection adjustment component, a tilt adjustment component and a pitch adjustment component which are arranged in sequence from bottom to top; the lifting adjustment component is fixed on the base, the X-axis displacement adjustment component is fixed on the lifting end of the lifting adjustment component, the Y-axis displacement adjustment component is connected to the X-axis moving end of the X-axis displacement adjustment component, the deflection adjustment component is arranged on the Y-axis moving end of the Y-axis displacement adjustment component, the tilt adjustment component is installed on the rotating end of the deflection adjustment component; the pitch adjustment component is installed on the tilting end of the tilt adjustment component; wherein,

[0008] The lifting adjustment assembly includes a lifting platform, a lifting screw and a first reducer, wherein the lifting screw is fixed on the base, the lifting platform is threadedly sleeved on the lifting screw, the first reducer is arranged on the base, and a reversing gear is arranged at the output end of the reducer, and the reversing gear is meshed with the transmission gear on the lifting screw;

[0009] The X-axis displacement adjustment assembly includes an X-axis displacement plate, an X-axis displacement lead screw nut mechanism and an X-axis linear guide pair, the lead screw of the X-axis displacement lead screw nut mechanism is fixed on the lifting platform through a mounting seat, the nut is sleeved on the lead screw, the guide rail of the X-axis linear guide pair is fixed on the lifting platform, and the X-axis displacement plate is respectively connected to the nut of the X-axis displacement lead screw nut mechanism and the slider of the X-axis linear guide pair;

[0010] The Y-axis displacement adjustment assembly includes a Y-axis displacement plate, a Y-axis displacement lead screw and nut mechanism, and a Y-axis linear guide pair. The lead screw of the Y-axis displacement lead screw and nut mechanism is fixed to the X-axis displacement plate through a mounting seat, and the nut is sleeved on the lead screw. The guide rail of the Y-axis linear guide pair is fixed to the X-axis displacement plate. The Y-axis displacement plate is connected to the nut of the Y-axis displacement lead screw and nut mechanism and the slider of the Y-axis linear guide pair respectively.

[0011] The deflection adjustment assembly includes a deflection adjustment plate, a deflection top block, a cross roller bearing and two deflection adjustment screws, wherein the cross roller bearing is fixed to the upper surface of the Y-axis displacement plate, the lower surface of the deflection adjustment plate is connected to the inner ring of the cross roller bearing, the deflection top block is fixed to one side of the deflection adjustment plate, and the two deflection adjustment screws are fixed to the Y-axis displacement plate through a mounting seat and are respectively located on both sides of the deflection top block;

[0012] The tilt adjustment assembly includes a tilt adjustment plate and a tilt adjustment screw, wherein the lower surface of one end of the tilt adjustment plate is rotatably connected to the upper surface of the deflection adjustment plate through a first hinge shaft, a tilt adjustment sleeve is embedded in the deflection adjustment plate, one end of the tilt adjustment screw passes through the tilt adjustment sleeve and contacts the lower surface of the tilt adjustment plate, and the tilt adjustment screw is arranged on a side away from the first hinge shaft;

[0013] The pitch adjustment assembly includes a pitch adjustment plate and a pitch adjustment screw. The lower surface of one end of the pitch adjustment plate is rotatably connected to the upper surface of the tilt adjustment plate through a second hinge shaft. A pitch adjustment sleeve is embedded in the tilt adjustment plate. One end of the pitch adjustment screw passes through the pitch adjustment sleeve and contacts the lower surface of the pitch adjustment plate. The pitch adjustment screw is arranged on a side away from the second hinge shaft.

[0014] In the present invention, the lifting and adjusting assembly further comprises a lifting guide rail pair, the guide rails of the lifting guide rail pair are fixed on the base, and the lifting platform is connected to the slider of the lifting guide rail pair.

[0015] In the present invention, the deflection adjustment assembly further includes a deflection adjustment spring, one end of which is arranged on the deflection adjustment plate, and the other end of which is connected to the Y-axis displacement plate.

[0016] In the present invention, the tilt adjustment assembly further comprises a tilt adjustment spring, one end of which is arranged on the tilt adjustment plate, and the other end of which is connected to the deflection adjustment plate.

[0017] In the present invention, the pitch adjustment assembly further comprises a pitch adjustment spring, one end of which is arranged on the pitch adjustment plate, and the other end of which is connected to the tilt adjustment plate.

[0018] In the present invention, an air floating support component is provided on the base.

[0019] In the present invention, a lifting lug is also provided on the base.

[0020] Beneficial effects of the present invention:

[0021] 1. When in use, the six-dimensional adjustment platform of the present invention can adjust the height, lateral position, longitudinal position, deflection, pitch and tilt of the optical instrument, so that the optical path of the optical element under test coincides with the optical path of the optical instrument during the test, thereby meeting the basic optical test requirements, improving the test accuracy and reducing the test error.

[0022] 2. Each dimensional adjustment component of the six-dimensional adjustment platform of the present invention is integrated on the base in sequence by stacking from bottom to top, which reduces the overall size of the device, makes the device more integrated, and has a more compact structure. Moreover, compared with the cantilever support structure, the center of gravity of the entire platform is basically on the same line as the center of gravity of the components or instruments placed on the platform. During the measurement process, the overall stability of the device is better and the measurement accuracy is higher.

[0023] 3. The base of the six-dimensional adjustment platform of the present invention is provided with an air-floating support assembly. Under the action of the air-floating support assembly, a rigid air film is formed between the base of the entire device and the workbench, which is used to float the entire adjustment platform, so that a certain gap is generated between the base of the platform and the upper surface of the workbench below. The base has extremely small friction resistance during the movement of the bearing element or instrument, which reduces manual labor and wear of the platform. Therefore, the present invention is particularly suitable for optical testing of large-caliber optical components, and is convenient for movement and handling during the testing process. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] The foregoing and following detailed description of the present invention will become more apparent when read in conjunction with the following drawings, in which:

[0025] Figure 1 This is a three-dimensional schematic diagram of the overall structure of the adjustment platform of the present invention;

[0026] Figure 2 This is a three-dimensional schematic diagram of the overall structure of the adjustment platform of the present invention from another angle;

[0027] Figure 3 This is a bottom-up stereoscopic schematic diagram of the overall structure of the adjustment platform of the present invention;

[0028] Figure 4 This is a side view of the overall structure of the adjustment platform of the present invention.

[0029] In the attached figure:

[0030] 1. Base; 2. Lifting adjustment assembly; 3. X-axis displacement adjustment assembly; 4. Y-axis displacement adjustment assembly; 5. Deflection adjustment assembly; 6. Tilt adjustment assembly; 7. Pitch adjustment assembly; 8. Air floating support assembly; 9. Lifting ear; 201. Lifting platform; 202. Lifting screw; 203. Lifting guide pair; 301. X-axis displacement plate; 302. X-axis displacement lead screw nut mechanism; 303. X-axis linear guide pair; 401. Y-axis displacement plate; 402. Y-axis displacement lead screw nut mechanism; 403. Y-axis linear guide pair; 501. Deflection adjustment plate; 502. Deflection top block; 503. Deflection adjustment screw; 504. Cross roller bearing; 505. Deflection adjustment spring; 601. Tilt adjustment plate; 602. Tilt adjustment screw; 603. Tilt adjustment spring; 701. Pitch adjustment plate; 702. Pitch adjustment screw; 703. Pitch adjustment spring. DETAILED DESCRIPTION

[0031] In order to enable those skilled in the art to better understand the technical solutions in the present invention, the technical solutions for achieving the purpose of the present invention will be further described below through several specific embodiments. It should be noted that the technical solutions claimed for protection in the present invention include but are not limited to the following embodiments. Based on the embodiments in the present invention, all other embodiments obtained by those skilled in the art without creative work shall fall within the scope of protection of the present invention.

[0032] Multi-dimensional optical detection adjustment platform is widely used in scientific research, laser application, automatic measurement and detection equipment, industrial automation and other fields due to its high precision, large load capacity and long travel. The adjustment platform can achieve the effect of accurately and quickly adjusting the spatial position of the test piece on the platform. With the rapid development of optical processing level, the proportion of large-aperture optical components is increasing. How to quickly and accurately carry out high-precision surface interference detection of large-aperture optical components and engineering is becoming one of the key topics in the field of optical detection.

[0033] Based on this, an embodiment of the present invention proposes a compact six-dimensional posture adjustment platform suitable for optical performance testing of large-aperture optical elements. The platform can adjust the height, lateral position, longitudinal position, deflection, pitch and tilt of the optical instrument, so that the optical path of the optical element under test coincides with the optical path of the optical instrument, meeting the basic optical testing requirements, and each dimensional adjustment component in the adjustment platform is finally integrated on the base by stacking it in sequence from bottom to top, which reduces the size of the device as a whole, makes the device more integrated, and has a more compact structure; and, compared with the cantilever support structure, the center of gravity of the entire platform is basically on the same line as the center of gravity of the element or instrument placed on the platform, so the overall stability of the device is better during the measurement process and the measurement accuracy is higher.

[0034] In the present invention, it should be first explained that the optical element is generally a plane mirror, a lens, etc., and a large aperture refers to an optical element with an aperture of 300 mm or more. Generally, a large aperture optical element has the characteristics of large size and heavy weight, and the corresponding optical instrument used is usually large in weight and size. Therefore, when testing its optical performance, higher requirements are placed on the equipment or platform that carries the optical element or optical instrument.

[0035] Furthermore, in the present invention, the optical instrument may be an interferometer, a laser collimator, etc. The adjustment platform of the present invention can be used to clamp and fix optical elements, and can also be used to clamp and fix optical instruments. The ultimate goal is to make the optical path of the optical element coincide with the optical path of the optical instrument during the optical test.

[0036] This embodiment discloses a compact six-dimensional posture adjustment platform suitable for optical performance detection of large-aperture optical components. Figure 1-Figure 4 As shown, the device is mainly composed of a base 1, a lifting adjustment component 2, a Y-axis displacement adjustment component 3, an X-axis displacement adjustment component 4, a deflection adjustment component 5, a tilt adjustment component 6 and a pitch adjustment component 7; wherein the base 1 is the supporting structure of the entire adjustment platform, and during the optical test, the entire posture adjustment platform is placed on the working platform through the base 1; the lifting adjustment component 2 is used to adjust the height of the optical element or instrument in the vertical plane; the Y-axis displacement adjustment component is used to adjust the lateral position of the optical element or instrument; the X-axis displacement adjustment component is used to adjust the longitudinal position of the optical element or instrument; the deflection adjustment component 5 is used to adjust the deflection angle (yaw angle) of the optical element or instrument; the tilt adjustment component 6 is used to adjust the tilt angle of the optical element or instrument; the pitch adjustment component 7 is used to adjust the pitch angle of the optical element or instrument, and since the optical element or instrument to be measured is mounted and fixed on the pitch adjustment component 7, the pitch adjustment component 7 is also used to directly support the optical instrument or the optical element to be measured. Through the adjustment of the above six dimensions, the optical path of the optical element being tested is finally made to coincide with the optical path of the optical instrument, thus meeting the detection requirements.

[0037] After the entire attitude adjustment platform is installed and formed, the lifting adjustment component 2, the X-axis displacement adjustment component 3, the Y-axis displacement adjustment component 4, the deflection adjustment component 5, the tilt adjustment component 6 and the pitch adjustment component 7 are stacked and integrated on the base 1 from bottom to top; specifically, the lifting adjustment component 2 is directly fixedly installed on the base 1, the X-axis displacement adjustment component 3 is fixed at the lifting end of the lifting adjustment component 2, the Y-axis displacement adjustment component 4 is connected to the X-axis moving end of the X-axis displacement adjustment component 3, the deflection adjustment component 5 is arranged at the Y-axis moving end of the Y-axis displacement adjustment component 4, and the tilt adjustment component 6 is installed at the deflection rotation end of the deflection adjustment component 5; the pitch adjustment component 7 is installed at the tilt end of the tilt adjustment component 6, and the optical instrument is clamped at the pitch rotation end of the pitch adjustment component 7. The lifting end of the lifting adjustment component 2 drives the X-axis displacement adjustment component 3 to rise or fall, and then drives the Y-axis displacement adjustment component 4, the deflection adjustment component 5, the tilt adjustment component 6, the pitch adjustment component 7 and the optical instrument or the optical element to be measured to rise and fall as a whole, so as to adjust the height of the instrument or the element; the X-axis moving end of the X-axis displacement adjustment component 3 moves, drives the Y-axis displacement adjustment component 4 to move together, and then drives the deflection adjustment component 5, the tilt adjustment component 6, the pitch adjustment component 7 and the optical instrument or the optical element to be measured to move along the X-axis direction as a whole, so as to adjust the longitudinal position of the instrument or element (equivalent to the front and rear direction movement in the figure); the Y-axis moving end of the Y-axis displacement adjustment component 4 moves, driving the deflection adjustment component 5 above it to tilt The adjustment component 6, the pitch adjustment component 7 and the optical instrument or the optical element being measured move together along the Y-axis direction to adjust the lateral position of the instrument or element (equivalent to the left-right movement in the figure); the deflection rotation end of the deflection adjustment component 5 rotates, driving the tilt adjustment component 6, the pitch adjustment component 7 and the optical instrument or the optical element being measured above to rotate together to adjust the deflection angle of the optical instrument or element; the tilt rotation end of the tilt adjustment component 6 rotates, driving the pitch adjustment component 7 and the optical instrument or the optical element being measured above to adjust the tilt angle of the instrument or element; the pitch rotation end of the pitch adjustment component 7 rotates, driving the optical instrument or the optical element being measured clamped above to rotate together to adjust the pitch angle of the instrument or element.

[0038] In the present invention, the posture adjustment device has adjustment functions in six dimensions, namely, it can adjust the height, longitudinal position, lateral position, pitch, deflection and tilt of the optical instrument or the optical element to be measured, and the above-mentioned various adjustment components for adjusting the relative position of the optical instrument are finally integrated on the base by stacking them in sequence from bottom to top, forming a vertical stacking structure on the base, which reduces the overall size of the equipment, has a higher degree of integration and a more compact structure; and the center of gravity of the entire adjustment platform is basically on the same line as the center of gravity of the optical instrument or the optical element to be measured placed thereon. Compared with the cantilever support structure, the overall stability of the device is better during the measurement process, and the measurement accuracy is also higher.

[0039] The structures of the various dimensional adjustment components involved in the posture adjustment platform of the present invention will be further described and explained in more detail below, as follows.

[0040] Refer to the instruction manual Figure 1-2 The lifting and adjusting assembly 2 is composed of two sets of lifting and adjusting mechanisms symmetrically arranged on the base 1, and the lifting and adjusting mechanisms include a lifting platform 201 and a lifting screw 202. The lifting platform 201 is provided with a threaded hole. After the lifting screw 202 passes through the threaded hole, both ends are rotatably connected to the lifting screw mounting seats on the base 1. The lifting screw mounting seats are fixed on the side wall of the base 1. A transmission gear is fixedly installed on the lifting screw 202, and the transmission gear is connected to the output end of the reducer arranged on the base 1. Therefore, in the present invention, the lifting end of the lifting and adjusting assembly 2 can be understood as the lifting platform 201.

[0041] In the present invention, the reducer is a double-output shaft worm gear reducer, and the two output shaft ends of the reducer are respectively provided with reversing gears, and the two reversing gears are respectively engaged with the transmission gears on the corresponding lifting screw 202, and the input end of the reduction motor can be driven by a hand wheel or a motor. Therefore, the two sets of lifting adjustment mechanisms of the present invention are driven by the same reducer to move synchronously, ensuring the synchronization of the lifting of the two lifting platforms of the device, thereby ensuring the stability of the device.

[0042] Refer to the instruction manual Figure 1-3The X-axis displacement adjustment component 3 mainly includes an X-axis displacement plate 301, an X-axis displacement lead screw nut mechanism 302 and two X-axis linear guide pairs 304. The lead screw of the X-axis displacement lead screw nut mechanism 302 is fixed on the upper surface of any one of the lifting platforms 201 through a lead screw mounting seat, and the nut of the X-axis displacement lead screw nut mechanism 302 is sleeved on the lead screw. The two X-axis linear guide pairs 303 are respectively arranged on the upper surfaces of the two lifting platforms 201 on the left and right sides, and the X-axis linear guide pairs 303 are symmetrically distributed below the X-axis displacement plate 301. Specifically, the guide rails of the two X-axis linear guide pairs 304 are respectively fixed on the lifting platforms 201 on the corresponding sides, and the lower surface of the X-axis displacement plate 301 is respectively connected to the nut of the X-axis displacement lead screw nut mechanism 302 and the sliders of the X-axis linear guide pairs 303 on both sides. Therefore, in the present invention, the X-axis displacement end of the X-axis displacement adjustment component 3 can be understood as the X-axis displacement plate 301.

[0043] Refer to the instruction manual Figure 1-3 The Y-axis displacement adjustment component 4 includes a Y-axis displacement plate 401, a Y-axis displacement lead screw nut mechanism 402, and two Y-axis linear guide pairs 403. The lead screw of the Y-axis displacement lead screw nut mechanism 402 is fixed to the upper surface of the X-axis displacement plate 301 through a lead screw mounting seat, and the nut of the Y-axis displacement lead screw nut mechanism 402 is sleeved on the lead screw. The two Y-axis linear guide pairs 403 are symmetrically distributed on both sides of the Y-axis displacement lead screw 402. The guide rails of the two Y-axis linear guide pairs 403 are fixed to the upper surface of the X-axis displacement plate 301, and the lower surface of the Y-axis displacement plate 401 is respectively connected to the nut of the Y-axis displacement lead screw nut mechanism 402 and the sliders of the two Y-axis linear guide pairs 403. Therefore, in the present invention, the Y-axis displacement end of the Y-axis displacement adjustment component 4 can be understood as the Y-axis displacement plate 401.

[0044] In the present invention, in order to facilitate the adjustment of the Y-axis displacement screw nut mechanism 402, a Y-axis displacement drive reversing assembly is specially provided. The drive reversing assembly includes a Y-axis reversing screw and a Y-axis reversing gear meshing with the Y-axis reversing screw. The Y-axis reversing gear is fixed on the screw of the Y-axis displacement screw nut mechanism 402 to drive the screw to rotate.

[0045] Refer to the instruction manual Figure 1-3The deflection adjustment assembly 5 includes a deflection adjustment plate 501, a deflection top block 502, a cross roller bearing 504 and two deflection adjustment screws 503. The cross roller bearing 504 includes an outer ring and an inner ring. The outer ring is fixed on the upper surface of the Y-axis displacement plate 401. The inner ring is rotatably arranged in the outer ring and a roller is arranged between the two. The lower surface of the deflection adjustment plate 501 is connected to the inner ring of the cross roller bearing 504 to achieve the effect of rotating relative to the Y-axis displacement plate 401. The deflection top block 502 is fixed on one side of the deflection adjustment plate 501. The two deflection adjustment screws 503 are fixed on the Y-axis displacement plate 401 through a deflection adjustment screw mounting seat, and are respectively located on both sides of the deflection top block 502. The mounting seat is provided with a threaded hole that cooperates with the screw. Therefore, in the present invention, the deflection rotation end of the deflection adjustment assembly 5 can be understood as the deflection adjustment plate 501.

[0046] In the present invention, an adjustment hand wheel is provided on the deflection adjustment screw 503. Furthermore, the deflection adjustment screw 503 can also be connected with a worm gear reduction structure to achieve the effect of moving forward or backward while rotating. Specifically, the input end of the worm of the worm gear reduction structure is connected with the motor, and the worm is meshed with the turbine. The center of the turbine is provided with a threaded hole, and the deflection adjustment screw 503 passes through the threaded hole provided on the turbine and contacts the deflection top block 502. When the screw is driven to rotate by the worm gear reduction structure, the deflection adjustment screw mounting seat may not be provided. The worm gear reduction structure is fixed on the upper surface of the Y-axis displacement plate 401, and one end of the deflection adjustment screw 503 is connected with the worm gear reduction structure, and the other end contacts the deflection top block 502.

[0047] Refer to the instruction manual Figure 1-4 The tilt adjustment assembly 6 includes a tilt adjustment plate 601 and a tilt adjustment screw 602. The lower surface of one end of the tilt adjustment plate 601 is rotatably connected to the upper surface of the deflection adjustment plate 501 through the first hinge axis. A tilt adjustment sleeve is embedded inside the deflection adjustment plate 501. The tilt adjustment sleeve is provided with an internal threaded hole. One end of the tilt adjustment screw 602 passes through the internal threaded hole of the tilt adjustment sleeve and abuts against the lower surface of the tilt adjustment plate 601. In order to adjust the tilt angle, the tilt adjustment screw 602 is arranged on the side away from the first hinge axis (i.e., on the side opposite to the first hinge axis). Therefore, in the present invention, the tilt rotation end of the tilt adjustment assembly 6 can be understood as the tilt adjustment plate 601.

[0048] In the present invention, an adjustment hand wheel is provided on the tilt adjustment screw 602. Furthermore, the tilt adjustment screw 602 can also be connected with a worm gear reduction structure to achieve automatic adjustment of the tilt angle. The specific structural composition of the worm gear reduction structure can refer to the worm gear reduction structure of the deflection adjustment. When the worm gear reduction structure is used to drive the tilt adjustment screw 602, there is no need to embed a tilt adjustment sleeve on the deflection adjustment plate 501. The worm gear reduction structure is directly fixed on the upper surface of the deflection adjustment plate 501. One end of the tilt adjustment screw is connected to the worm gear reduction structure, and the other end directly abuts against the lower surface of the tilt adjustment plate 601.

[0049] Refer to the instruction manual Figure 1-4 The pitch adjustment assembly 7 includes a pitch adjustment plate 701 and a pitch adjustment screw 702. The lower surface of one end of the pitch adjustment plate 701 is rotatably connected to the upper surface of the tilt adjustment plate 601 through a second hinge axis. A pitch adjustment sleeve is embedded inside the tilt adjustment plate 601. The pitch adjustment sleeve is provided with an internal threaded hole. One end of the pitch adjustment screw 702 passes through the internal threaded hole of the pitch adjustment sleeve and abuts against the lower surface of the pitch adjustment plate 701. In order to adjust the pitch angle, the pitch adjustment screw 702 is arranged on a side away from the second hinge axis (i.e., arranged on a side opposite to the second hinge axis); the pitch adjustment plate 701 is provided with a threaded hole, and the optical instrument is fixedly mounted on the upper surface of the pitch adjustment plate 701 through a fixing structure such as a bolt. Therefore, in the present invention, the pitch rotation end of the pitch adjustment assembly 7 can be understood as the pitch adjustment plate 701.

[0050] Similarly, in the present invention, an adjustment hand wheel is provided on the pitch adjustment screw 702. Furthermore, the pitch adjustment screw 702 can also be connected with a worm gear reduction structure to achieve automatic adjustment of the pitch angle. The specific structural composition of the worm gear reduction structure can refer to the worm gear reduction structure of the deflection adjustment. When the worm gear reduction structure is used to drive the pitch adjustment screw 702, there is no need to embed the pitch adjustment sleeve on the tilt adjustment plate 601. The worm gear reduction structure is directly fixed on the upper surface of the tilt adjustment plate 601. One end of the pitch adjustment screw 702 is connected to the worm gear reduction structure, and the other end directly abuts against the lower surface of the pitch adjustment plate 701.

[0051] Further, in the present invention, referring to the attached specification Figure 2-3 The lifting and adjusting assembly 2 also includes two lifting guide rail pairs 203, which are symmetrically arranged on both sides of the lifting platform 201. The guide rails of the lifting guide rail pairs 203 are fixed on the side walls of the base 1, and the lifting platform 201 on the corresponding side is connected to the slider of the lifting guide rail pairs 203 on the corresponding side.

[0052] Further, in the present invention, referring to the attached specification Figure 4 A deflection adjustment spring 505 is also provided between the deflection adjustment plate 501 and the Y-axis displacement plate 401. Specifically, one end of the deflection adjustment spring 505 is connected to the lower surface of the deflection adjustment plate 501, and the other end is connected to the upper surface of the Y-axis displacement plate 401. The deflection adjustment spring 505 has a spring tension in a clockwise or counterclockwise direction, which makes the deflection adjustment plate 501 have a tendency to rotate in a clockwise or counterclockwise direction, and finally makes the deflection top block 502 abut against the deflection adjustment screw 503 on one side. During the adjustment process, the reciprocating rotation of the deflection adjustment plate 501 can be realized, and after the adjustment is in place, the deflection adjustment screw 503 on the other side also moves to contact with the other side of the top block, thereby fixing the deflection adjustment plate 501.

[0053] Further, in the present invention, referring to the attached specification Figure 2 A tilt adjustment spring 603 is also provided between the tilt adjustment plate 601 and the deflection adjustment plate 501. Specifically, one end of the tilt adjustment spring 603 is connected to the lower surface of the tilt adjustment plate 601, and the other end is connected to the upper surface of the deflection adjustment plate 501. The tilt adjustment spring 603 is usually arranged on the same side of the tilt adjustment screw 602, or is arranged beside the tilt adjustment screw 602, but not on the same side as the first hinge axis. The tilt adjustment spring 603 has an initial spring tension, which makes the tilt adjustment plate 601 tend to move downward. During the adjustment process, the lower surface of the tilt adjustment plate 601 is always in contact with the end of the tilt adjustment screw 602 to eliminate the gap between the two.

[0054] Further, in the present invention, referring to the attached specification Figure 2 A pitch adjustment spring 703 is also provided between the pitch adjustment plate 701 and the tilt adjustment plate 601. Specifically, one end of the pitch adjustment spring 703 is connected to the upper surface of the tilt adjustment plate 601, and the other end is connected to the lower surface of the pitch adjustment plate 701. The pitch adjustment spring 703 is usually arranged on the same side of the pitch adjustment screw 702, or arranged beside it, but not on the same side as the second hinge axis. Similarly, the pitch adjustment spring 703 has an initial spring tension, which makes the pitch adjustment plate 701 tend to move downward. During the adjustment process, the lower surface of the pitch adjustment plate 701 is always in contact with the end of the pitch adjustment screw 702 to eliminate the gap between the two.

[0055] Further, in the present invention, referring to the attached specification Figure 3, air-floating support components 8 are arranged at the four corners of the lower surface of the base 1, and the air source ventilates each air-floating support component 8. Under the action of air pressure, a rigid air film is formed between each air-floating support component 8 and the workbench below, so that the entire platform floats, and a certain gap is generated between the base 1 of the device and the upper surface of the workbench below. In the process of carrying instruments or components to move, the friction resistance of the base 1 is extremely small, which reduces manual labor and platform wear. The structure of the air-floating support component 8 of the present invention can adopt an existing structure, for example, it can refer to the invention patent with publication number CN103969845A, which will not be elaborated in detail here.

[0056] Furthermore, in the present invention, in order to facilitate the transportation and hoisting adjustment of the platform, a lifting lug 9 is also provided on the base 2 .

[0057] After the optical instrument or the optical element to be measured is installed on the adjustment platform, the relative position relationship between the instrument and the optical element to be measured is adjusted through the lifting adjustment component 2, the X-axis displacement adjustment component 3, the Y-axis displacement adjustment component 4, the deflection adjustment component 5, the tilt adjustment component 6 and the pitch adjustment component 7, so that the optical path of the instrument coincides with the optical path of the optical element to be measured, so as to complete the optical test. The specific adjustment process is as follows:

[0058] When adjusting the vertical height, the two output shafts of the first reducer synchronously drive the two lifting screws 202 to rotate, thereby driving the lifting platform 201 to rise or fall in the vertical plane, and finally driving the optical instrument or the optical element to be measured on the top of the platform to rise or fall, thereby achieving the effect of adjusting the height.

[0059] When adjusting the X-axis displacement: rotate the X-axis displacement lead screw 302, and the X-axis displacement nut 303 sleeved on the lead screw moves horizontally along the X-axis direction on the lead screw, thereby driving the X-axis displacement plate 301 connected thereto to move together, and finally driving the uppermost optical instrument or the optical element being measured to move horizontally in the X-axis direction (equivalent to moving forward and backward), thereby achieving the effect of adjusting the longitudinal position.

[0060] When adjusting the Y-axis displacement: rotate the Y-axis displacement screw 402, and the Y-axis displacement nut 403 sleeved on the screw moves horizontally along the Y-axis direction on the screw, thereby driving the Y-axis displacement plate 401 connected thereto to move together, and finally driving the uppermost optical instrument or the optical element being measured to move horizontally in the Y-axis direction (equivalent to left and right movement), thereby achieving the effect of adjusting the lateral position.

[0061] When adjusting the deflection angle: rotate the adjusting hand wheel on the deflection adjusting screw 503 to drive the deflection adjusting screw 503 forward, and the end of the deflection adjusting screw 503 abuts against the deflection top block 502, and the deflection top block 502 is connected to the deflection adjustment plate 501, and the deflection adjustment plate 501 is rotatably connected to the Y-axis adjustment plate 401 below through the cooperation of the cross roller bearing and the rotating shaft. Therefore, in the process of the deflection adjusting screw 503 moving forward, the deflection adjustment plate 501 rotates in the horizontal plane relative to the Y-axis adjustment plate 401 (that is, the deflection adjustment plate 501 rotates around the Z-axis with the Z-axis in the figure as the rotation axis), and finally drives the uppermost optical instrument or the optical element being measured to rotate in the horizontal plane, so as to achieve the effect of adjusting its deflection angle.

[0062] When adjusting the tilt angle: rotate the adjustment hand wheel on the tilt adjustment screw 602 to drive the tilt adjustment screw 602 to extend upward, and the end of the tilt adjustment screw 602 contacts and abuts against the lower surface of the tilt adjustment plate 601, and the side of the tilt adjustment plate 601 opposite to the tilt adjustment screw 602 is hingedly connected to the upper surface of the deflection adjustment plate 501 through the first hinge axis, so that when the adjustment screw moves up or down, it will drive the tilt adjustment plate 601 to rotate around the first hinge axis, and then drive the uppermost optical instrument or optical element to be measured to rotate, and finally achieve the tilt angle adjustment. Reverse rotation of the tilt adjustment screw 602 can achieve the reset of the tilt adjustment plate 601.

[0063] When adjusting the pitch angle: rotate the adjustment hand wheel on the pitch adjustment screw 702 to drive the pitch adjustment screw 702 to extend upward, the end of the pitch adjustment screw 702 contacts the lower surface of the pitch adjustment plate 701 and abuts against the lower surface thereof, and the side of the pitch adjustment plate 701 opposite to the pitch adjustment screw 702 is hingedly connected to the upper surface of the tilt adjustment plate 601 through the second hinge axis, so that when the adjustment screw moves up or down, it will drive the pitch adjustment plate 701 to rotate around the second hinge axis, thereby driving the uppermost optical instrument or the optical element being measured to rotate, and finally achieving pitch angle adjustment. Rotating the pitch adjustment screw 702 in the opposite direction can achieve the reset of the pitch adjustment plate 701.

[0064] In the description of the present invention, it is necessary to understand that the terms "center", "longitudinal", "lateral", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as an obstacle to the scope of protection of the present invention.

[0065] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "setting", "installation" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0066] The above description is only a preferred embodiment of the present invention and does not constitute any form of hindrance to the present invention. Any simple modification or equivalent changes made to the above embodiments based on the technical essence of the present invention shall fall within the protection scope of the present invention.

Claims

1. A compact six-dimensional posture adjustment platform suitable for optical performance testing of large-aperture optical components, characterized in that: The invention comprises a base (1), a lifting adjustment component (2), an X-axis displacement adjustment component (3), a Y-axis displacement adjustment component (4), a deflection adjustment component (5), a tilt adjustment component (6) and a pitch adjustment component (7) which are arranged in sequence from bottom to top; the lifting adjustment component (2) is fixed on the base (1); the X-axis displacement adjustment component (3) is fixed on the lifting end of the lifting adjustment component (2); the Y-axis displacement adjustment component (4) is connected to the X-axis moving end of the X-axis displacement adjustment component (3); the deflection adjustment component (5) is arranged on the Y-axis moving end of the Y-axis displacement adjustment component (4); the tilt adjustment component (6) is installed on the rotating end of the deflection adjustment component (5); and the pitch adjustment component (7) is installed on the tilting end of the tilt adjustment component (6); wherein: The lifting and adjusting assembly (2) comprises a lifting platform (201), a lifting screw (202) and a first reducer, wherein the lifting screw (202) is fixed on the base (1), the lifting platform (201) is threadedly sleeved on the lifting screw (202), the first reducer is arranged on the base (1), and a reversing gear is arranged at the output end of the reducer, and the reversing gear is meshed with a transmission gear on the lifting screw (202); The X-axis displacement adjustment component (3) comprises an X-axis displacement plate (301), an X-axis displacement lead screw nut mechanism (302), and an X-axis linear guide pair (303); the lead screw of the X-axis displacement lead screw nut mechanism (302) is fixed to the lifting platform (201) via a mounting seat, the nut is sleeved on the lead screw, the guide rail of the X-axis linear guide pair (303) is fixed to the lifting platform (201), and the X-axis displacement plate (301) is respectively connected to the nut of the X-axis displacement lead screw nut mechanism (302) and the slider of the X-axis linear guide pair; The Y-axis displacement adjustment component (4) comprises a Y-axis displacement plate (401), a Y-axis displacement lead screw nut mechanism (402) and a Y-axis linear guide pair (403); the lead screw of the Y-axis displacement lead screw nut mechanism (402) is fixed to the X-axis displacement plate (301) via a mounting seat, the nut is sleeved on the lead screw, the guide rail of the Y-axis linear guide pair (403) is fixed to the X-axis displacement plate (301), and the Y-axis displacement plate (401) is respectively connected to the nut of the Y-axis displacement lead screw nut mechanism (402) and the slider of the Y-axis linear guide pair (403); The deflection adjustment assembly (5) comprises a deflection adjustment plate (501), a deflection top block (502), a cross roller bearing (504) and two deflection adjustment screws (503); the cross roller bearing (504) is fixed to the upper surface of the Y-axis displacement plate (401); the lower surface of the deflection adjustment plate (501) is connected to the inner ring of the cross roller bearing (504); the deflection top block (502) is fixed to one side of the deflection adjustment plate (501); the two deflection adjustment screws (503) are fixed to the Y-axis displacement plate (401) via a mounting seat and are respectively located on both sides of the deflection top block (502); The tilt adjustment assembly (6) comprises a tilt adjustment plate (601) and a tilt adjustment screw (602); the lower surface of one end of the tilt adjustment plate (601) is rotatably connected to the upper surface of the deflection adjustment plate (501) via a first hinge axis; a tilt adjustment sleeve is embedded in the deflection adjustment plate (501); one end of the tilt adjustment screw (602) passes through the tilt adjustment sleeve and contacts the lower surface of the tilt adjustment plate (601); the tilt adjustment screw (602) is arranged on a side away from the first hinge axis; The pitch adjustment assembly (7) comprises a pitch adjustment plate (701) and a pitch adjustment screw (702); the lower surface of one end of the pitch adjustment plate (701) is rotatably connected to the upper surface of the tilt adjustment plate (601) via a second hinge axis; a pitch adjustment sleeve is embedded in the tilt adjustment plate (601); one end of the pitch adjustment screw (702) passes through the pitch adjustment sleeve and contacts the lower surface of the pitch adjustment plate (701); the pitch adjustment screw (702) is arranged on a side away from the second hinge axis.

2. The compact six-dimensional posture adjustment platform suitable for optical performance detection of large-aperture optical elements according to claim 1 is characterized in that: The lifting and adjusting assembly (2) further comprises a lifting guide rail pair (203), wherein the guide rail of the lifting guide rail pair (203) is fixed on the base (1), and the lifting platform (201) is connected to a slider of the lifting guide rail pair (203).

3. The compact six-dimensional posture adjustment platform suitable for optical performance detection of large-aperture optical elements according to claim 1 is characterized in that: The deflection adjustment component (5) further comprises a deflection adjustment spring (505), one end of the deflection adjustment spring (505) being arranged on the deflection adjustment plate (501) and the other end being connected to the Y-axis displacement plate (401).

4. The compact six-dimensional posture adjustment platform suitable for optical performance detection of large-aperture optical elements according to claim 1, characterized in that: The tilt adjustment assembly (6) further comprises a tilt adjustment spring (603), one end of the tilt adjustment spring (603) being arranged on the tilt adjustment plate (601) and the other end being connected to the deflection adjustment plate (501).

5. The compact six-dimensional posture adjustment platform suitable for optical performance detection of large-aperture optical elements according to claim 1, characterized in that: The pitch adjustment assembly (7) further comprises a pitch adjustment spring (703), one end of the pitch adjustment spring (703) being arranged on the pitch adjustment plate (701) and the other end being connected to the tilt adjustment plate (601).

6. The compact six-dimensional posture adjustment platform suitable for optical performance detection of large-aperture optical elements according to claim 1, characterized in that: An air floating support assembly (8) is provided on the base (1).

7. The compact six-dimensional posture adjustment platform suitable for optical performance detection of large-aperture optical elements according to claim 1, characterized in that: The base (1) is also provided with a lifting lug (9).

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