Compact 3D adjustment device for optical testing of large-aperture optical components

Abstract

The present invention relates to the technical field of optical detection equipment, and a compact three-dimensional adjustment device for optical testing of large-aperture optical elements is developed. The device includes a base, a horizontal displacement adjustment component, a pitch adjustment component, a deflection adjustment component, and a clamping fixture connected in sequence from bottom to top; the horizontal displacement adjustment component is used to adjust the lateral position of the optical element under test, and the pitch adjustment component and the deflection adjustment component are used to adjust the pitch angle and deflection angle of the optical element under test, respectively. Under the cooperation of the three adjustment components, the optical path of the optical element under test is finally adjusted to coincide with the optical path of the optical instrument during the test to meet the test requirements. Each dimensional adjustment component of the adjustment device of the present invention is stacked and integrated on the base in sequence from bottom to top, and the structure of the device is more compact, the integration is higher, and it is easy to use.

Description

Technical Field

[0001] The invention relates to the technical field of optical detection equipment, and in particular to a compact three-dimensional adjustment device for optical testing of large-aperture optical elements. Background Art

[0002] Multi-dimensional optical detection and adjustment equipment is widely used in scientific research, laser applications, fully automatic measurement and detection equipment, industrial automation and other fields due to its high precision, large load capacity and long travel. The adjustment equipment can achieve the effect of accurately and quickly adjusting the spatial position of the test piece on the equipment. With the development of large-aperture optics, the research and engineering of large-aperture high-precision surface interferometry detection has become one of the key topics in the field of optical detection in recent years.

[0003] The invention patent published as CN106124171A discloses a three-dimensional platform for optical performance testing of large-aperture optical components, including a horizontal moving (X-axis) part, a vertical moving (Z-axis) part, and a horizontal rotating (C-axis) part. A platform design scheme is proposed that can flexibly clamp optical components of different sizes and meet the requirements of various optical performance tests. Through the reasonable layout of the machine tool structure, while maximizing the three-dimensional space required for various optical performance tests, it also solves the problem of poor versatility of conventional mechanical platforms in the field of optical testing.

[0004] The above three-dimensional platform is a cantilever structure. For large-aperture optical elements, the stability of the device is poor during measurement, and the platform mainly adjusts the lateral position, longitudinal position and deflection angle of the optical element, and does not involve the adjustment of the pitch angle. Summary of the invention

[0005] In order to solve the problems and shortcomings existing in the above-mentioned prior art, the present invention specifically proposes a compact three-dimensional adjustment device suitable for optical testing of large-aperture optical elements. The adjustment device of the present invention can not only adjust the pitch, deflection and lateral position of the optical element under test, but also the structural layout of the entire device is more reasonable and the stability is also higher.

[0006] In order to achieve the above-mentioned object of the invention, the technical solution of the present invention is as follows:

[0007] A compact three-dimensional adjustment device for optical testing of large-aperture optical elements comprises a base, a horizontal displacement adjustment component, a pitch adjustment component, a deflection adjustment component and a clamping tool which are arranged in sequence from bottom to top; the pitch adjustment component is arranged at the moving end of the horizontal displacement adjustment component, the deflection adjustment component is fixed to the rotating end of the pitch adjustment component, and the clamping tool is installed at the rotating end of the deflection adjustment component; wherein,

[0008] The horizontal displacement adjustment assembly comprises a horizontal displacement plate, a horizontal displacement lead screw nut mechanism and a horizontal displacement linear guide pair, the lead screw of the horizontal displacement lead screw nut mechanism is fixed on the base, the nut is sleeved on the lead screw, the guide rail of the horizontal displacement linear guide pair is fixed on the base, and the horizontal displacement plate is respectively connected to the nut of the horizontal displacement lead screw nut mechanism and the slider of the horizontal displacement linear guide pair;

[0009] The pitch adjustment assembly includes a pitch adjustment plate, a pitch adjustment screw and a first worm gear reducer. One end of the pitch adjustment plate is rotatably connected to the horizontal displacement plate through a hinge shaft. One end of the pitch adjustment screw contacts the lower surface of the pitch adjustment plate, and the other end is connected to the first worm gear reducer. The first worm gear reducer is fixed on the horizontal displacement plate.

[0010] The deflection adjustment assembly comprises a deflection adjustment plate, a second worm gear reduction box, a deflection top block, a cross roller bearing and a deflection adjustment screw, the outer ring of the cross roller bearing is fixed to the upper surface of the pitch adjustment plate, the rotating shaft is installed in the cross roller bearing, the lower surface of the deflection adjustment plate is connected to the inner ring of the cross roller bearing, the second worm gear reduction box is fixed to the pitch adjustment plate, the deflection top block is fixed to the deflection adjustment plate, one end of the deflection adjustment screw is connected to the second worm gear reduction box, and the other end is connected to the deflection top block through a joint bearing; the upper surface of the deflection adjustment plate is provided with a card slot for fixing a clamping tool;

[0011] The clamping tool includes a base plate, which is clamped in a slot on the upper surface of the deflection adjustment plate. Two clamping components for clamping optical elements are arranged on the base plate, and the clamping components include an adjustment base, a fixing rod and a clamping member. The adjustment base is arranged on the base plate, and a plurality of adjustment holes are arranged at intervals on the fixing rod. The clamping member includes a locking screw and a guide rod, and the locking screw and the guide rod both pass through the adjustment hole. A clamping block is arranged at the end of the locking screw passing through the adjustment hole. A support block is also arranged on the base plate, and the support block is located between the two clamping components.

[0012] Preferably, in the present invention, the horizontal displacement linear guide pair is symmetrically arranged on both sides of the horizontal displacement plate.

[0013] Preferably, in the present invention, an air floating support assembly is provided on the lower surface of the base.

[0014] Preferably, in the present invention, a handle is also provided on the base.

[0015] Preferably, in the present invention, when the optical element to be measured is rectangular, the upper surface of the support block is a plane; when the optical element to be measured is circular, the upper surface of the support block is provided with a V-shaped groove.

[0016] Preferably, in the present invention, a plurality of groups of screw holes for mounting the adjustment base are arranged at intervals on the substrate, and the adjustment base is provided with through holes matching with the screw holes.

[0017] Beneficial effects of the present invention:

[0018] 1. When in use, the three-dimensional adjustment device of the present invention can adjust the deflection, pitch and lateral position of the optical element under test, so that the optical path of the optical element under test coincides with the optical path of the optical instrument during the test, and the two are located on a straight line. The deflection and pitch of the optical element under test meet the test requirements, thereby improving the test accuracy and reducing the test error.

[0019] 2. Each dimensional adjustment component of the three-dimensional adjustment device of the present invention is integrated on the base in sequence by stacking from bottom to top, which reduces the overall size of the device, makes the device more integrated, and has a more compact structure. Moreover, compared with the cantilever support structure, the center of gravity of the entire device and the center of gravity of the optical element to be measured are basically on the same line, so the overall stability of the device is better during the measurement process and the measurement accuracy is higher.

[0020] 3. The base of the three-dimensional adjustment device of the present invention is provided with an air-floating support component and a handle structure. Under the action of the air-floating support component, a rigid air film is formed between the base of the entire device and the workbench, which is used to float the device, so that a certain gap is generated between the base of the device and the upper surface of the workbench below. During the movement of the bearing element, the friction resistance of the base is extremely small, which reduces manual labor and platform wear. Therefore, the present invention is particularly suitable for optical testing of large-caliber optical components, and facilitates movement and handling during the testing process. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The foregoing and following detailed description of the present invention will become more apparent when read in conjunction with the following drawings, in which:

[0022] Figure 1 It is a three-dimensional schematic diagram of the overall structure of the adjustment platform of the present invention;

[0023] Figure 2 This is a three-dimensional schematic diagram of the adjustment platform of the present invention from another angle;

[0024] Figure 3 This is a bottom-up stereoscopic schematic diagram of the adjustment platform of the present invention;

[0025] Figure 4 It is a schematic diagram of the overall structure of the regulating device of the present invention;

[0026] Figure 5 It is a schematic diagram of the internal structure of the first worm gear reduction box of the present invention;

[0027] Figure 6Schematic diagram of the internal structure of the second worm gear reducer of the present invention

[0028] Figure 7 This is a schematic diagram of a clamping tool according to an embodiment of the present invention;

[0029] Figure 8 This is a schematic diagram of a clamping tool according to another embodiment of the present invention.

[0030] In the attached figure:

[0031] 1. Base; 2. Horizontal displacement adjustment assembly; 3. Pitch adjustment assembly; 4. Deflection adjustment assembly; 5. Clamping fixture; 6. Air floating support assembly; 7. Handle; 8. Joint bearing; 201. Horizontal displacement plate; 202. Horizontal displacement lead screw nut mechanism; 203. Horizontal displacement linear guide pair; 301. Pitch adjustment plate; 302. Pitch adjustment screw; 303. First worm gear reducer; 401. Deflection adjustment plate; 402. Second worm gear reducer; 403. Deflection top block; 404. Slot; 405. Cross roller bearing; 406. Deflection adjustment screw; 501. Base plate; 503. Adjustment base; 504. Fixed rod; 506. Locking screw; 507. Guide rod; 508. Clamping block; 509. Support block. DETAILED DESCRIPTION

[0032] In order to enable those skilled in the art to better understand the technical solutions in the present invention, the technical solutions for achieving the purpose of the present invention will be further described below through several specific embodiments. It should be noted that the technical solutions claimed for protection in the present invention include but are not limited to the following embodiments. Based on the embodiments in the present invention, all other embodiments obtained by those skilled in the art without creative work shall fall within the scope of protection of the present invention.

[0033] Multi-dimensional optical detection and adjustment equipment is widely used in scientific research, laser applications, fully automatic measurement and detection equipment, industrial automation and other fields due to its high precision, large load capacity and long travel. The adjustment equipment can achieve the effect of accurately and quickly adjusting the spatial position of the components to be tested on the equipment. With the development of large-aperture optics, the research and engineering of large-aperture high-precision surface interferometry detection has become one of the key topics in the field of optical detection in recent years.

[0034] Based on this, an embodiment of the present invention proposes a compact three-dimensional adjustment device suitable for large-aperture optical elements. During the optical testing process (for example, testing the surface shape of the test piece), the adjustment device can adjust the pitch, deflection and lateral position of the tested optical element, so that the optical path of the tested optical element coincides with the optical path of the optical instrument, thereby meeting the testing requirements.

[0035] In the present invention, it should be first explained that the optical element is generally a plane mirror, a lens, etc., and a large aperture refers to an optical element with an aperture of 300 mm or more. Generally, a large aperture optical element has the characteristics of large size and heavy overall weight. Therefore, when testing its optical performance, there are higher requirements for the equipment or platform carrying the optical element and the clamping tooling. The optical instrument is generally an interferometer, a laser collimator, etc.

[0036] This embodiment discloses a compact three-dimensional adjustment device for optical testing of large-aperture optical elements. Figure 1-2 as well as Figure 4 As shown, the adjustment device includes an adjustment platform and a clamping fixture 5 arranged on the adjustment platform, and the adjustment platform is mainly composed of a base 1, a horizontal displacement adjustment component 2, a pitch adjustment component 3 and a deflection adjustment component 4; wherein, the base 1 is a supporting structure of the entire device, and when detecting the optical element to be measured, the entire device is placed on the detection platform through the base 1; the horizontal displacement adjustment component 2 is used to adjust the lateral position of the optical element to be measured (i.e., horizontal movement along the Y-axis direction in the figure), and the pitch adjustment component 3 and the deflection adjustment component 4 are used to adjust the pitch angle (i.e., taking the Z-axis in the figure as the rotation axis, rotating around the Z-axis) and the deflection angle (i.e., rotating in the XOZ plane) of the optical element to be measured, respectively. Through the adjustment of the above three dimensions, the optical path of the element to be measured coincides with the optical path of the optical instrument, meeting the detection requirements; the clamping fixture 5 is used to clamp and fix the optical element to be measured. After the equipment is installed, it includes a base 1, a horizontal displacement adjustment component 2, a pitch adjustment component 3, a deflection adjustment component 4 and a clamping fixture 5 from bottom to top, and the horizontal displacement adjustment component 2 is fixed on the base 1, the pitch adjustment component 3 is arranged at the horizontal moving end of the horizontal displacement adjustment component 2, the deflection adjustment component 4 is fixed at the pitch rotation end of the pitch adjustment component 3, and the clamping fixture 5 is installed at the deflection rotation end of the deflection adjustment component 4; the horizontal moving end of the horizontal displacement adjustment component 2 moves, directly driving the pitch adjustment component 3 above to move horizontally, and then driving The deflection adjustment component 4 and the clamping fixture 5 above and the clamped optical element to be measured are moved horizontally together to adjust the horizontal position of the optical element to be measured; the pitch rotating end of the pitch adjustment component 3 rotates, directly driving the deflection adjustment component 4 to rotate, and then driving the clamping fixture 5 above and the clamped optical element to be measured to rotate together to achieve the pitch adjustment of the optical element to be measured; finally, the deflection rotating end of the deflection adjustment component 4 rotates, driving the clamping fixture 5 and the clamped optical element to be measured to rotate together to achieve the deflection adjustment of the optical element to be measured.

[0037] In the present invention, the entire adjustment device has a three-dimensional adjustment function, that is, it can adjust the pitch, deflection and lateral position of the optical element to be measured, and the above-mentioned various adjustment components for adjusting the relative position relationship between the optical element to be measured and the optical instrument are finally integrated on the base by stacking them in sequence from bottom to top, forming a vertical stacking structure on the base, which reduces the overall size of the device, makes the device more integrated, and has a more compact structure; and the center of gravity of the entire device and the center of gravity of the optical element to be measured are basically on the same line. Compared with the cantilever support structure, the overall stability of the device is better during the measurement process, and the measurement accuracy is also higher.

[0038] The following will further provide a more specific description and explanation of the various dimensional adjustment components involved in the adjustment device of the present invention and the structure of the clamping tool 5, as follows.

[0039] Refer to the instruction manual Figure 1-2 The horizontal displacement adjustment component 2 includes a horizontal displacement plate 201, a horizontal displacement lead screw nut mechanism 202 and two horizontal displacement linear guide pairs 203. The lead screw of the horizontal displacement lead screw nut mechanism 202 is fixed on the base 1 through a lead screw mounting seat, and the nut is sleeved on the lead screw. The two horizontal displacement linear guide pairs 203 are symmetrically arranged on both sides of the lead screw. The guide rail of each horizontal displacement linear guide pair 203 is fixed on the base 1. The horizontal displacement plate 201 is respectively connected to the nut of the horizontal displacement lead screw nut mechanism 202 and the sliders of the horizontal displacement linear guide pairs 203 on both sides. The input end of the lead screw can be connected to a power source such as a reducer, an electric motor, and a motor that can drive the lead screw to rotate. The lead screw 202 can also be rotated by manually driving it by setting a handwheel at the input end. Therefore, in the present invention, the moving end of the horizontal displacement adjustment component 2 can be understood as the horizontal displacement plate 201.

[0040] Refer to the instruction manual Figure 1-2 The pitch adjustment assembly 3 includes a pitch adjustment plate 301, a pitch adjustment screw 302 and a first worm gear reducer 303. The lower surface of one end of the pitch adjustment plate 301 is rotatably connected to the upper surface of the horizontal displacement plate 201 through a hinge shaft. One end of the pitch adjustment screw 302 abuts against the lower surface of the pitch adjustment plate 301, and the other end is connected to the worm gear reducer 303. The first worm gear reducer 303 is fixed to the upper surface of the horizontal displacement plate 201. Further, in order to achieve pitch adjustment, the pitch adjustment screw 302 is arranged on a side away from the hinge axis (i.e., arranged on a side opposite to the hinge axis). Therefore, in the present invention, the pitch rotation end of the pitch adjustment assembly 3 can be understood as the pitch adjustment plate 301.

[0041] In the present invention, the internal structure of the first worm gear reducer 303 is as shown in the appendix of the specification. Figure 5 As shown, the center of the turbine of the first worm gear reducer 303 is provided with a threaded hole, and the pitch adjustment screw 302 is threadedly connected to the threaded hole. The input end of the worm of the first worm gear reducer 303 is connected to the power source, and the output end is connected to the turbine to drive the turbine to rotate; the rotation of the worm drives the worm wheel meshing with it to rotate, and the pitch adjustment screw 302 threadedly connected to the worm wheel moves up and down in the vertical plane. The power source can be a structure such as an electric motor or a motor that can drive the worm to rotate, and the worm can also be rotated by manually driving it by setting a handle at the input end.

[0042] Refer to the instruction manual Figure 1-2 The deflection adjustment assembly 4 includes a deflection adjustment plate 401, a second worm gear reducer 402, a deflection top block 403, a cross roller bearing 405 and a deflection adjustment screw 406, the outer ring of the cross roller bearing 405 is fixed on the upper surface of the pitch adjustment plate 301, the inner ring of the roller bearing is installed in the outer ring, and a roller is arranged between the two, the inner ring of the roller bearing is connected to the lower surface of the deflection adjustment plate 401, the second worm gear reducer 402 is fixed on the upper surface of the pitch adjustment plate 301, the deflection top block 403 is fixed on the lower surface of the deflection adjustment plate 401, one end of the deflection adjustment screw is connected to the second worm gear reducer 402, and the other end is connected to the deflection top block 403 through a joint bearing 8; the upper surface of the deflection adjustment plate 401 is provided with a slot 404 for fixing the clamping tooling 5. Therefore, in the present invention, the deflection rotation end of the deflection adjustment component 4 is the deflection adjustment plate 401 .

[0043] In the present invention, the structure of the second worm gear reducer 402 can refer to the first worm gear reducer 303, and refer to the appendix of the specification. Figure 6 The difference is that the output end of the deflection adjustment screw 406 is connected to the deflection top block 403 through the joint bearing 8, which can not only realize the reciprocating adjustment of the deflection direction of the deflection adjustment plate 401, but also will not cause damage to the screw.

[0044] In the present invention, the slot 404 is formed by an L-shaped plate fixed inverted on the upper surface of the deflection adjustment plate 401. When installing the clamping tool 5, after the clamping tool is docked with the slot 404 on one side of the deflection adjustment plate 401, it is pushed into the slot 404 along the direction of the slot 404 to quickly fix and position the clamping tool on the equipment. There is no need to use fixing parts such as threads, and the operation is convenient and quick.

[0045] Refer to the instruction manual Figure 5The clamping fixture 5 includes a base plate 501, which is clamped in the slot 404 on the upper surface of the deflection adjustment plate 401. Two clamping components for clamping optical elements are symmetrically arranged on the base plate 501. The clamping components include an adjustment base 503, a fixing rod 504 and a clamping member. The adjustment base 503 is arranged on the base plate 501. A plurality of adjustment holes are arranged at intervals on the fixing rod 504. The clamping member includes a locking screw 506, a guide rod 507 and a clamping block 508. The locking screw 506 and the guide rod 507 both pass through the adjustment hole and are in contact with the fixing rod 504. The clamping block 508 is connected, and the side of the clamping block 508 that contacts the locking screw 506 and the guide rod 507 is provided with a through hole that cooperates with the locking screw 506 and the guide rod 507. One end of the locking screw 506 and the guide rod 507 is inserted into the through hole to achieve connection with the clamping block 508. The locking screw 506 can rotate in the through hole. The locking screw 506 and the adjustment hole are threadedly connected, and the guide rod 507 is usually a smooth rod. A support block 509 is also provided on the substrate 501. The support block 509 is located between the two clamping components and is used to support the optical element to be measured.

[0046] In the present invention, when the thickness of the clamped optical element is very small, i.e., an ultra-thin part, a groove is provided on the clamping surface of the clamping block 508, and the outer edge of the ultra-thin part is clamped in the groove, so that the clamping is more stable. In addition, in order to reduce the damage of the clamping block 508 to the part, the clamping block 508 is usually made of nylon material.

[0047] Furthermore, in order to better clamp optical elements of different shapes and types, the clamping block 509 includes a clamping block body and a base. After one end of the locking screw 506 and the guide rod 507 passes through the adjustment hole, they are connected to the through hole set on the base. The back of the clamping block body is provided with a plug-in slot, and the base is inserted into the plug-in slot to connect with the clamping block body. The clamping block body is made of nylon material, and the base can be made of commonly used metal materials.

[0048] Further, in the present invention, in order to better move the device to complete the test of the optical element to be tested, refer to the attached manual. Figure 3, air-floating support components 6 are respectively arranged at the four corners of the lower surface of the base 1, and handle structures are arranged at the four corners of the upper surface of the base 1. The air source ventilates each air-floating support component 6. Under the action of air pressure, a rigid air film is formed between each air-floating support component 6 and the workbench below, so that the device floats, and a certain gap is generated between the device base 1 and the upper surface of the workbench below. During the movement of the bearing element of the base 1, the friction resistance is extremely small, which reduces manual labor and platform wear. The structure of the air-floating support component 6 of the present invention can adopt an existing structure, for example, it can refer to the invention patent with publication number CN103969845A, which will not be elaborated in detail here.

[0049] Furthermore, in the present invention, since the outer shape of the optical element to be tested is usually rectangular or circular, in order to better realize the optical detection of the element and prevent the surface shape of the element from being deformed during the test, resulting in a large test error, refer to the attached manual. Figure 7 When the shape of the optical element to be measured is a rectangular shape, the upper surface of the support block 509 is a plane; Figure 8 When the shape of the optical element to be measured is circular, a V-shaped groove is provided on the upper surface of the support block 509, and the outer edge of the optical element is supported on the groove wall of the V-shaped groove to avoid surface deformation.

[0050] Furthermore, in the present invention, a plurality of groups of screw holes for mounting the adjustment base 503 are arranged at intervals on the substrate 501, and the adjustment base 503 is provided with through holes that match the screw holes.

[0051] First, the optical element to be tested is clamped and installed on the clamping fixture 5, and then the entire clamping fixture 5 is hoisted so that its bottom surface is basically flush with the upper surface of the deflection adjustment plate 401 of the adjustment platform, and then the clamping fixture 5 is pushed into the card slot 404 of the deflection adjustment plate 401, and the substrate 501 is clamped in the card slot 404. After the optical element to be tested is installed on the equipment, the relative position relationship between it and the optical instrument is adjusted through the horizontal displacement adjustment component 2, the pitch adjustment component 3 and the deflection adjustment component 4, so that the optical path of the optical element to be tested coincides with the optical path of the optical instrument to complete the optical test. The specific adjustment process is as follows:

[0052] When adjusting the lateral position, the lead screw of the horizontal displacement lead screw nut mechanism 202 is rotated, and the nut sleeved on the lead screw moves horizontally along the Y-axis direction on the lead screw, thereby driving the horizontal displacement plate 201 connected thereto to move together, and finally driving the topmost optical element to be measured to move horizontally in the Y-axis direction, thereby achieving the effect of adjusting the Y-axis position of the optical element to be measured.

[0053] When adjusting the pitch: the rotation of the worm in the first worm gear reducer 303 drives the turbine to rotate, and the pitch adjustment screw 302 connected to the turbine thread moves up or down in the vertical plane, and the end of the pitch adjustment screw 302 contacts and abuts against the lower surface of the pitch adjustment plate 301, and the side of the pitch adjustment plate 301 opposite to the pitch adjustment screw 302 is hingedly connected to the upper surface of the horizontal displacement plate 201 through the hinge axis. Therefore, in the process of moving up or down, the adjustment screw drives the pitch adjustment plate 301 to rotate around the hinge axis, and then drives the optical element under test to rotate above, and finally achieves the pitch adjustment of the optical element under test. Rotating the pitch adjustment screw 302 in the opposite direction can achieve the reset of the pitch adjustment plate 301.

[0054] When adjusting the deflection: the rotation of the worm of the second worm gearbox 402 drives the turbine to rotate, and the deflection adjustment screw 406 connected to the turbine thread moves forward or backward in the plane, thereby driving the deflection top block 403 connected thereto to move backward. The deflection top block 403 is arranged on the lower surface of the deflection adjustment plate 401, and the deflection adjustment plate 401 is rotationally connected to the pitch adjustment plate 301 below through a cross roller bearing. Therefore, in the process of pushing forward or retreating the deflection adjustment screw 406, the deflection adjustment plate 401 rotates in the horizontal plane relative to the pitch adjustment plate 301 (that is, the deflection adjustment plate 401 rotates around the Z axis), thereby driving the optical element under test to rotate in the horizontal plane above, and finally achieving the deflection adjustment of the optical element under test. The deflection adjustment screw 406 is rotated in the reverse direction to achieve the reset of the deflection adjustment plate 401. Furthermore, because the deflection adjustment screw 406 is connected to the deflection top block via a joint ball bearing, the deflection adjustment screw will not be deformed or broken due to lateral force during the process of reciprocatingly pushing and pulling the deflection top block.

[0055] In the description of the present invention, it is necessary to understand that the terms "center", "longitudinal", "lateral", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as an obstacle to the scope of protection of the present invention.

[0056] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "setting", "installation" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0057] The above description is only a preferred embodiment of the present invention and does not constitute any form of hindrance to the present invention. Any simple modification or equivalent changes made to the above embodiments based on the technical essence of the present invention shall fall within the protection scope of the present invention.

Claims

1. A compact three-dimensional adjustment device for optical testing of large-aperture optical elements, characterized in that: The invention comprises a base (1), a horizontal displacement adjustment component (2), a pitch adjustment component (3), a deflection adjustment component (4) and a clamping tool (5) which are arranged in sequence from bottom to top; the pitch adjustment component (3) is arranged at the movable end of the horizontal displacement adjustment component (2), the deflection adjustment component (4) is fixed to the rotating end of the pitch adjustment component (3), and the clamping tool (5) is installed at the rotating end of the deflection adjustment component (4); wherein: The horizontal displacement adjustment component (2) comprises a horizontal displacement plate (201), a horizontal displacement lead screw nut mechanism (202) and a horizontal displacement linear guide pair (203); the lead screw of the horizontal displacement lead screw nut mechanism (202) is fixed on the base (1), the nut is sleeved on the lead screw, the guide rail of the horizontal displacement linear guide pair (203) is fixed on the base (1), and the horizontal displacement plate (201) is respectively connected to the nut of the horizontal displacement lead screw nut mechanism (202) and the slider of the horizontal displacement linear guide pair (203); The pitch adjustment assembly (3) comprises a pitch adjustment plate (301), a pitch adjustment screw (302) and a first worm gear reduction box (303); one end of the pitch adjustment plate (301) is rotatably connected to the horizontal displacement plate (201) via a hinge shaft; one end of the pitch adjustment screw (302) is in contact with the lower surface of the pitch adjustment plate (301); the other end is connected to the first worm gear reduction box (303); and the first worm gear reduction box (303) is fixed on the horizontal displacement plate (201); The deflection adjustment assembly (4) comprises a deflection adjustment plate (401), a second worm gear reduction box (402), a deflection top block (403), a cross roller bearing (405) and a deflection adjustment screw, wherein the outer ring of the cross roller bearing (405) is fixed to the upper surface of the pitch adjustment plate (301), the rotation axis is installed in the cross roller bearing, the lower surface of the deflection adjustment plate (401) is connected to the inner ring of the cross roller bearing (405), the second worm gear reduction box (402) is fixed to the pitch adjustment plate (301), the deflection top block (403) is fixed to the deflection adjustment plate (401), one end of the deflection adjustment screw is connected to the second worm gear reduction box, and the other end is connected to the deflection top block (403) via a joint bearing (8); the upper surface of the deflection adjustment plate (401) is provided with a slot (404) for fixing a clamping fixture (5); The clamping fixture (5) comprises a base plate (501), the base plate (501) being clamped in a clamping groove (404) on the upper surface of the deflection adjustment plate (401), the base plate (501) being provided with two clamping components for clamping optical elements, the clamping components comprising an adjustment base (503), a fixing rod (504) and a clamping member, the adjustment base (503) being provided on the base plate (501), a plurality of adjustment holes being provided at intervals on the fixing rod (504), the clamping member comprising a locking screw (506) and a guide rod (507), the locking screw (506) and the guide rod (507) both passing through the adjustment holes, a clamping block (508) being provided at the end of the locking screw (506) passing through the adjustment hole, and a supporting block (509) being provided on the base plate (501), the supporting block (509) being located between the two clamping components.

2. The compact three-dimensional adjustment device for optical testing of large-aperture optical elements according to claim 1, characterized in that: The horizontal displacement linear guide rail pairs (203) are symmetrically arranged on both sides of the horizontal displacement plate (201).

3. The compact three-dimensional adjustment device for optical testing of large-aperture optical elements according to claim 1, characterized in that: An air floating support assembly (6) is provided on the lower surface of the base (1).

4. The compact three-dimensional adjustment device for optical testing of large-aperture optical elements according to claim 1, characterized in that: A handle (7) is also provided on the base (1).

5. The compact three-dimensional adjustment device for optical testing of large-aperture optical elements according to claim 1, characterized in that: When the optical element to be measured is rectangular, the upper surface of the support block (509) is a plane; when the optical element to be measured is circular, the upper surface of the support block (509) is provided with a V-shaped groove.

6. The compact three-dimensional adjustment device for optical testing of large-aperture optical elements according to claim 1, characterized in that: A plurality of groups of screw holes for mounting the adjustment base (503) are arranged at intervals on the base plate (501), and a through hole matching the screw holes is arranged on the adjustment base (503).

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