A magnetic code disk device based on patterned permanent magnetic film and a preparation method thereof

Abstract

The present invention provides a magnetic code disk device and a preparation method based on a patterned permanent magnetic film, and relates to the technical field of magnetic materials and devices. The magnetic code disk device comprises: a magnetic code disk body and a plurality of preset-shaped films; the plurality of preset-shaped films are arranged on the outer surface of the magnetic code disk body, and are composed of permanent magnetic film materials, wherein the shapes, sizes and spacings of the plurality of preset-shaped films are the same, and the magnetization directions of any two adjacent preset-shaped films are opposite. Compared with the traditional magnetic code disk with intermittent magnetization on continuous permanent magnetic materials (irregular magnetic domain shape, size and domain wall boundaries), the magnetic code disk based on the patterned film of the present invention has great advantages in reducing the size of magnetic poles (thereby increasing the density of magnetic pole signals) and improving the uniformity of magnetic poles and their output waveform signals.

Description

Technical Field

[0001] The invention relates to the technical field of magnetic materials and devices, and in particular to a magnetic code disk device based on a patterned permanent magnetic film and a preparation method thereof. Background Art

[0002] The existing magnetic code disk is made of continuous magnetic alloy or thin film material. After magnetization, the shape, size and boundary (domain wall) between adjacent N poles and S poles are difficult to be uniform, which greatly limits the improvement of the accuracy and reliability of the magnetic encoder. Summary of the invention

[0003] In order to solve the above technical problems existing in the prior art, the embodiment of the present invention provides a magnetic code disk device based on a patterned permanent magnetic film and a preparation method. The technical solution is as follows:

[0004] On the one hand, a magnetic code disk device based on a patterned permanent magnetic film is provided, comprising: a magnetic code disk body and a plurality of films of preset shapes;

[0005] A plurality of the preset-shaped films are arranged on the outer surface of the magnetic code disk body and are composed of permanent magnetic film material, wherein the shapes, sizes and spacings of the plurality of preset-shaped films are the same, and the magnetization directions of any two adjacent preset-shaped films are opposite.

[0006] Optionally, the magnetic code disk body comprises a ring-shaped magnetic code disk, and a plurality of the preset-shape films are arranged on a circumferential plane of the ring-shaped magnetic code disk.

[0007] Optionally, the magnetization directions of the plurality of preset-shaped films include:

[0008] The magnetization directions of the plurality of films of preset shapes are radial in a circumferential plane, and the magnetization directions of adjacent films of preset shapes are opposite;

[0009] Alternatively, the magnetization directions of the plurality of films of preset shapes are along the tangent direction of the circumferential contour, and the magnetization directions of adjacent films of preset shapes are opposite;

[0010] Alternatively, the magnetization directions of the plurality of films with preset shapes are along the normal direction of the circumferential plane, that is, perpendicular to the circumferential plane, and the magnetization directions of adjacent films with preset shapes are opposite.

[0011] Optionally, the magnetic code disk body comprises a circular ring-shaped magnetic code disk, and a plurality of the preset-shaped films are arranged on an outer side wall curved surface of the circular ring-shaped magnetic code disk.

[0012] Optionally, the magnetization directions of the plurality of preset-shaped films include:

[0013] The magnetization directions of the multiple preset-shaped films are along the vertical direction of the outer wall curved surface, that is, perpendicular to the circumferential plane, and the magnetization directions of adjacent preset-shaped films are opposite;

[0014] Alternatively, the magnetization directions of the plurality of films of preset shapes are along the tangent direction of the circumferential contour, and the magnetization directions of adjacent films of preset shapes are opposite;

[0015] Alternatively, the magnetization directions of the plurality of films of preset shapes are perpendicular to the outer side wall curved surface, and the magnetization directions of adjacent films of preset shapes are opposite.

[0016] Optionally, the magnetic code disk body comprises a planar magnetic code scale, and a plurality of the preset-shaped films are arranged on the planar magnetic code scale.

[0017] Optionally, the magnetization directions of the plurality of preset-shaped films include:

[0018] The magnetization directions of the plurality of films of preset shapes are along the width direction of the planar magnetic code scale, and the magnetization directions of adjacent films of preset shapes are opposite;

[0019] Alternatively, the magnetization directions of the plurality of films of preset shapes are along the length direction of the planar magnetic code scale, and the magnetization directions of adjacent films of preset shapes are opposite;

[0020] Alternatively, the magnetization directions of the multiple preset-shaped films are perpendicular to the plane where the planar magnetic code scale is located, and the magnetization directions of adjacent preset-shaped films are opposite.

[0021] Optionally, the permanent magnetic film material is any one of the following: a hard magnetic material, a semi-hard magnetic material, and a multilayer film composed of the hard magnetic material and / or the semi-hard magnetic material.

[0022] On the other hand, a method for preparing a magnetic code disk device based on a patterned permanent magnetic film is provided, comprising the following steps:

[0023] Based on the micro-nano processing technology, a plurality of preset-shaped films composed of permanent magnetic film materials are manufactured on the outer surface of the magnetic code disk body, wherein the shapes, sizes and spacings of the plurality of preset-shaped films are the same;

[0024] A magnetization operation is performed on the plurality of films of the preset shape, wherein the magnetization directions of any two adjacent films of the preset shape are opposite.

[0025] Optionally, the micro-nano processing technology adopts one or more of the following processes: photolithography process, thin film deposition process, laser engraving process, mechanical cutting process, and hard mask process.

[0026] Optionally, based on the micro-nano processing technology, a plurality of preset-shaped films composed of permanent magnetic film materials are manufactured on the outer surface of the magnetic code disk body, including:

[0027] A plurality of preset patterns are produced on the outer surface of the magnetic code disk body based on a photolithography process;

[0028] Based on the thin film deposition process and degumming, a plurality of thin films of preset shapes are formed on the plurality of preset patterns.

[0029] Optionally, based on the micro-nano processing technology, a plurality of preset-shaped films composed of permanent magnetic film materials are manufactured on the outer surface of the magnetic code disk body, including:

[0030] Depositing a permanent magnetic film on the outer surface of the magnetic code disk body based on a thin film deposition process;

[0031] A plurality of films with preset shapes are formed on the permanent magnetic film based on a photolithography process.

[0032] Optionally, based on the micro-nano processing technology, a plurality of preset-shaped films composed of permanent magnetic film materials are manufactured on the outer surface of the magnetic code disk body, including:

[0033] Depositing a permanent magnetic film on the outer surface of the magnetic code disk body based on a thin film deposition process;

[0034] Based on a laser engraving process or a mechanical cutting process, the permanent magnetic films other than the films of the desired preset shape are removed to obtain a plurality of films of the preset shape.

[0035] Optionally, based on the micro-nano processing technology, a plurality of preset-shaped films composed of permanent magnetic film materials are manufactured on the outer surface of the magnetic code disk body, including:

[0036] Based on the hard mask process, a plurality of preset-shaped films composed of permanent magnetic film materials are manufactured on the outer surface of the magnetic code disk body.

[0037] The beneficial effects brought about by the technical solution provided by the present invention include at least:

[0038] Compared with the traditional magnetic code disk that is magnetized at intervals on continuous permanent magnetic materials (the magnetic domain shape, size and domain wall boundaries are irregular), the magnetic code disk based on the patterned film of the present invention has great advantages in reducing the magnetic pole size (thereby increasing the magnetic pole signal density) and improving the uniformity of the magnetic pole and its output waveform signal. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0040] Figure 1This is one of the structural schematic diagrams of a magnetic code disk device based on a patterned permanent magnetic film provided by an embodiment of the present invention;

[0041] Figure 2 This is the second structural schematic diagram of a magnetic code disk device based on a patterned permanent magnetic film provided by an embodiment of the present invention;

[0042] Figure 3 This is a third structural schematic diagram of a magnetic code disk device based on a patterned permanent magnetic film provided by an embodiment of the present invention;

[0043] Figure 4 It is a flow chart of a method for preparing a magnetic code disk device based on a patterned permanent magnetic film provided by an embodiment of the present invention. DETAILED DESCRIPTION

[0044] The technical solution of the present invention is described below in conjunction with the accompanying drawings.

[0045] In the embodiments of the present invention, words such as "exemplarily" and "for example" are used to indicate examples, illustrations or explanations. Any embodiment or design described as "example" in the present invention should not be interpreted as being more preferred or more advantageous than other embodiments or designs. Specifically, the use of the word "example" is intended to present the concept in a specific way. In addition, in the embodiments of the present invention, the meaning expressed by "and / or" can be both, or it can be either of the two.

[0046] In order to make the technical problems, technical solutions and advantages to be solved by the present invention more clear, a detailed description will be given below with reference to the accompanying drawings and specific embodiments.

[0047] An embodiment of the present invention provides a schematic diagram of a magnetic code disk device based on a patterned permanent magnetic film. Figure 1-Figure 3 As shown, the magnetic code disk device comprises: a magnetic code disk body 1 and a plurality of films 2 with preset shapes;

[0048] A plurality of preset-shaped films 2 are arranged on the outer surface of the magnetic code disk body 1 and are composed of permanent magnetic film material, wherein the shapes, sizes and spacings of the plurality of preset-shaped films 2 are the same, and the magnetization directions of any two adjacent preset-shaped films 2 are opposite.

[0049] As an optional embodiment of the present invention, Figure 1 As shown, the magnetic code disk body 1 includes a circular ring-shaped magnetic code disk, and a plurality of films 2 with preset shapes are arranged on the circumferential plane of the circular ring-shaped magnetic code disk.

[0050] Specifically, if a plurality of films 2 of preset shapes are arranged on the circumferential plane of the annular magnetic code disk, the magnetization directions of the plurality of films 2 of preset shapes may be as follows:

[0051] (1.1) The magnetization directions of the plurality of preset-shaped films 2 are radial in the circumferential plane, and the magnetization directions of adjacent preset-shaped films 2 are opposite, referring to Figure 1 Indicated by the large arrow.

[0052] (1.2) The magnetization directions of the plurality of preset-shaped films 2 are along the tangent direction of the circumferential contour, and the magnetization directions of adjacent preset-shaped films 2 are opposite, referring to Figure 1 Indicated by small and medium arrows.

[0053] (1.3) The magnetization directions of the plurality of preset-shaped films 2 are along the normal direction of the circumferential plane (i.e., perpendicular to the circumferential plane), and the magnetization directions of adjacent preset-shaped films 2 are opposite, referring to Figure 1 Shown as dot and cross symbols.

[0054] As another optional embodiment of the present invention, Figure 2 As shown, the magnetic code disk body 1 includes a circular ring-shaped magnetic code disk, and a plurality of films 2 of preset shapes are arranged on the outer side wall curved surface of the circular ring-shaped magnetic code disk.

[0055] Specifically, if a plurality of films 2 of preset shapes are disposed on the outer side wall surface of the annular magnetic code disk, the magnetization directions of the films 2 of preset shapes may be as follows:

[0056] (2.1) The magnetization directions of the plurality of preset-shaped films 2 are along the vertical direction of the outer wall curved surface (i.e., perpendicular to the circumferential plane), and the magnetization directions of adjacent preset-shaped films 2 are opposite, referring to Figure 2 Indicated by the large arrow.

[0057] (2.2) The magnetization directions of the plurality of preset-shaped films 2 are along the tangent direction of the circumferential contour, and the magnetization directions of adjacent preset-shaped films 2 are opposite, referring to Figure 2 Indicated by small and medium arrows.

[0058] (2.3) The magnetization directions of the plurality of preset-shaped films 2 are perpendicular to the outer wall curved surface, and the magnetization directions of adjacent preset-shaped films 2 are opposite, referring to Figure 2 Shown as dot and cross symbols.

[0059] As another optional embodiment of the present invention, Figure 3 As shown, the magnetic code disk body 1 includes a planar magnetic code scale 3 ; a plurality of films 2 with preset shapes are arranged on the planar magnetic code scale 3 .

[0060] Specifically, if a plurality of films 2 of preset shapes are disposed on the planar magnetic code scale 3, the magnetization directions of the plurality of films 2 of preset shapes may be as follows:

[0061] (3.1) The magnetization directions of the plurality of preset-shaped films 2 are along the width direction of the planar magnetic code scale 3, and the magnetization directions of adjacent preset-shaped films 2 are opposite. Figure 3 Indicated by the large arrow.

[0062] (3.2) The magnetization directions of the plurality of preset-shaped films 2 are along the length direction of the planar magnetic code scale 3, and the magnetization directions of adjacent preset-shaped films 2 are opposite. Figure 3 Indicated by small and medium arrows.

[0063] (3.3) The magnetization directions of the plurality of preset-shaped films 2 are perpendicular to the plane where the planar magnetic code scale 3 is located, and the magnetization directions of adjacent preset-shaped films 2 are opposite. Figure 3 Shown as dot and cross symbols.

[0064] The present invention does not limit the specific shape of the preset shape film 2. For example, it can be Figure 1 The sectors shown in the figure are evenly distributed on the circumferential plane of the annular magnetic code disk. Or they can be set in a long strip shape, such as Figure 2 and Figure 3 As shown, they are evenly distributed on the outer wall surface of the annular magnetic code disk or on the planar magnetic code scale.

[0065] In an embodiment of the present invention, the preset shape film 2 is magnetized in two different magnetization directions in sequence in an interval manner, thereby forming a magnetic pole structure of N pole, S pole, N pole, S pole, N pole... cyclically alternating, so as to realize the function of the magnetic code disk to mark the position of the magnetic signal.

[0066] In the embodiment of the present invention, the permanent magnetic film material is any one of the following: a hard magnetic material, a semi-hard magnetic material, and a multilayer film mainly composed of a hard magnetic material and / or a semi-hard magnetic material.

[0067] Optionally, the semi-hard magnetic material includes but is not limited to: aluminum nickel cobalt AlNiCo, iron chromium cobalt FeCrCo; the hard magnetic material includes but is not limited to: neodymium iron boron NdFeB, samarium cobalt SmCo.

[0068] It should be noted that the permanent magnetic film material used in the present invention may also be other permanent magnetic materials or a combination of multiple permanent magnetic materials, which is not specifically limited here.

[0069] Compared with the traditional magnetic code disk that is magnetized at intervals on a continuous permanent magnetic material (the magnetic domain shape, size and domain wall boundary are irregular), the magnetic code disk based on a preset shape film of the present invention has great advantages in reducing the magnetic pole size (thereby increasing the magnetic pole signal density) and improving the uniformity of the magnetic pole and its output waveform signal.

[0070] Accordingly, an embodiment of the present invention provides a method for preparing a magnetic code disk device based on a patterned permanent magnetic film, such as Figure 4The flowchart of the method for preparing the magnetic code disk device shown in FIG. 1 may include the following steps:

[0071] Step S101, based on the micro-nano processing technology, a plurality of preset-shaped films composed of permanent magnetic film materials are manufactured on the outer surface of the magnetic code disk body, wherein the shapes, sizes and spacings of the plurality of preset-shaped films are the same.

[0072] Step S102 , performing a magnetization operation on a plurality of the preset-shaped films, wherein the magnetization directions of any two adjacent preset-shaped films are opposite.

[0073] In the embodiment of the present invention, the micro-nano processing technology includes but is not limited to: photolithography technology, thin film deposition technology, laser engraving technology, mechanical cutting technology, hard mask technology, etc., or a combination of multiple processing technologies.

[0074] As an optional embodiment of the present invention, based on the micro-nano processing technology, a plurality of preset-shaped films composed of permanent magnetic film materials are manufactured on the outer surface of the magnetic code disk body, including:

[0075] A plurality of preset patterns are produced on the outer surface of the magnetic code disk body based on a photolithography process;

[0076] Based on the thin film deposition process and degumming, a plurality of thin films of preset shapes are formed on the plurality of preset patterns.

[0077] Specifically, a preset pattern is first produced by a graphic process, and then a thin film of a preset shape is formed by thin film deposition and degumming.

[0078] As an optional embodiment of the present invention, based on the micro-nano processing technology, a plurality of preset-shaped films composed of permanent magnetic film materials are manufactured on the outer surface of the magnetic code disk body, including:

[0079] Depositing a permanent magnetic film on the outer surface of the magnetic code disk body based on a thin film deposition process;

[0080] A plurality of films with preset shapes are formed on the permanent magnetic film based on a photolithography process.

[0081] Specifically, a permanent magnetic film is first deposited, and then an exposure and etching process is used to form a film of a preset shape.

[0082] In the embodiment of the present invention, the thin film deposition process includes: magnetron sputtering, electronic book evaporation, physical vapor deposition, and chemical vapor deposition.

[0083] The photolithography process includes exposure process and etching process; among them, the exposure process includes: UV exposure, laser exposure, electron beam exposure, nanoimprinting; the etching process includes: dry etching, wet etching, chemical etching.

[0084] As an optional embodiment of the present invention, based on the micro-nano processing technology, a plurality of preset-shaped films composed of permanent magnetic film materials are manufactured on the outer surface of the magnetic code disk body, including:

[0085] Depositing a permanent magnetic film on the outer surface of the magnetic code disk body based on a thin film deposition process;

[0086] Based on a laser engraving process or a mechanical cutting process, the permanent magnetic films other than the films of the desired preset shape are removed to obtain a plurality of films of the preset shape.

[0087] Since photolithography is not easy to implement on curved surfaces, laser engraving or mechanical cutting is sometimes required to process thin films with preset shapes on curved surfaces.

[0088] As an optional embodiment of the present invention, based on the micro-nano processing technology, a plurality of preset-shaped films composed of permanent magnetic film materials are manufactured on the outer surface of the magnetic code disk body, including:

[0089] Based on the hard mask process, a plurality of preset-shaped films composed of permanent magnetic film materials are manufactured on the outer surface of the magnetic code disk body.

[0090] Specifically, in the embodiment of the present invention, a thin film with a preset shape can also be prepared by micro-nano processing techniques such as hard mask.

[0091] In some optional embodiments of the present invention, executing step S102 to magnetize multiple preset-shaped films can be achieved by the following method: magnetizing the multiple preset-shaped films in two different magnetization directions in an interval manner to form a magnetic pole structure in which N poles and S poles alternate cyclically.

[0092] From the above description, it can be seen that the present invention provides a magnetic code disk device based on a patterned permanent magnetic film and a preparation method. Compared with the prior art, the magnetic code disk based on a patterned film of the present invention has great advantages in reducing the size of the magnetic pole (thereby increasing the density of the magnetic pole signal) and improving the uniformity of the magnetic pole and its output waveform signal.

[0093] It should be noted that, in this article, the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or terminal device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or terminal device. In the absence of further restrictions, the elements defined by the sentence "comprises a ..." do not exclude the existence of other identical elements in the process, method, article or terminal device including the elements.

[0094] References in the specification to "one embodiment", "an embodiment", "an exemplary embodiment", "some embodiments", etc. indicate that the described embodiments may include a particular feature, structure, or characteristic, but not every embodiment may include the particular feature, structure, or characteristic. In addition, when a particular feature, structure, or characteristic is described in conjunction with an embodiment, it should be within the knowledge of a person skilled in the relevant art to implement such feature, structure, or characteristic in conjunction with other embodiments (whether or not explicitly described).

[0095] It should be understood that the term "and / or" in this article is only a description of the association relationship of associated objects, indicating that there can be three relationships. For example, A and / or B can represent: A exists alone, A and B exist at the same time, and B exists alone. A and B can be singular or plural. In addition, the character " / " in this article generally indicates that the associated objects before and after are in an "or" relationship, but it may also indicate an "and / or" relationship. Please refer to the context for specific understanding.

[0096] In the present invention, "at least one" means one or more, and "more than one" means two or more. "At least one of the following" or similar expressions refers to any combination of these items, including any combination of single or plural items. For example, at least one of a, b, or c can be represented by: a, b, c, ab, ac, bc, or abc, where a, b, c can be single or multiple.

[0097] It should be understood that in various embodiments of the present invention, the size of the serial numbers of the above-mentioned processes does not mean the order of execution. The execution order of each process should be determined by its function and internal logic, and should not constitute any limitation on the implementation process of the embodiments of the present invention.

[0098] In the several embodiments provided by the present invention, it should be understood that the disclosed devices, apparatuses and methods can be implemented in other ways. For example, the device embodiments described above are only schematic. For example, the division of the units is only a logical function division. There may be other division methods in actual implementation, such as multiple units or components can be combined or integrated into another device, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be through some interfaces, indirect coupling or communication connection of devices or units, which can be electrical, mechanical or other forms.

[0099] The units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed on multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0100] In addition, each functional unit in each embodiment of the present invention may be integrated into one processing unit, or each unit may exist physically separately, or two or more units may be integrated into one unit.

[0101] If the functions are implemented in the form of software functional units and sold or used as independent products, they can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of the present invention can be essentially or partly embodied in the form of a software product that contributes to the prior art. The computer software product is stored in a storage medium and includes several instructions for enabling a computer device (which can be a personal computer, a server, or a network device, etc.) to perform all or part of the steps of the methods described in various embodiments of the present invention. The aforementioned storage medium includes: various media that can store program codes, such as a USB flash drive, a mobile hard disk, a read-only memory (ROM), a random access memory (RAM), a magnetic disk or an optical disk.

[0102] The present invention covers any substitution, modification, equivalent method and scheme made on the essence and scope of the present invention. In order to make the public have a thorough understanding of the present invention, specific details are described in detail in the following preferred embodiments of the present invention, but those skilled in the art can fully understand the present invention without the description of these details. In addition, in order to avoid unnecessary confusion about the essence of the present invention, well-known methods, processes, procedures, components and circuits are not described in detail.

[0103] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A magnetic code disk device based on a patterned permanent magnetic film, characterized in that: include: A magnetic code disk body and a plurality of films of preset shapes; A plurality of the preset-shaped films are arranged on the outer surface of the magnetic code disk body and are composed of a permanent magnetic film material, wherein the shapes, sizes and spacings of the plurality of the preset-shaped films are the same, and the magnetization directions of any two adjacent preset-shaped films are opposite; The structure of the magnetic code disk device adopts any one of the following: (1) The magnetic code disk body includes a circular magnetic code disk, and a plurality of the preset-shaped films are arranged on a circumferential plane of the circular magnetic code disk; The magnetization directions of multiple preset film shapes include: The magnetization directions of the plurality of films of preset shapes are radial in a circumferential plane, and the magnetization directions of adjacent films of preset shapes are opposite; Alternatively, the magnetization directions of the plurality of films of preset shapes are along the tangent direction of the circumferential contour, and the magnetization directions of adjacent films of preset shapes are opposite; Alternatively, the magnetization directions of the plurality of films of preset shapes are along the normal direction of the circumferential plane, that is, perpendicular to the circumferential plane, and the magnetization directions of adjacent films of preset shapes are opposite; (2) The magnetic code disk body includes a circular magnetic code disk, and a plurality of the preset-shaped films are arranged on the outer wall curved surface of the circular magnetic code disk; The magnetization directions of multiple preset film shapes include: The magnetization directions of the plurality of films of preset shapes are along the vertical direction of the outer side wall curved surface, that is, perpendicular to the circumferential plane, and the magnetization directions of adjacent films of preset shapes are opposite; Alternatively, the magnetization directions of the plurality of films of preset shapes are along the tangent direction of the circumferential contour, and the magnetization directions of adjacent films of preset shapes are opposite; Alternatively, the magnetization directions of the plurality of films of preset shapes are perpendicular to the outer side wall curved surface, and the magnetization directions of adjacent films of preset shapes are opposite; (3) The magnetic code disk body includes a planar magnetic code scale, and a plurality of the preset-shaped films are arranged on the planar magnetic code scale; The magnetization directions of multiple preset film shapes include: The magnetization directions of the plurality of preset-shaped films are along the width direction of the planar magnetic code scale, and the magnetization directions of adjacent preset-shaped films are opposite; Alternatively, the magnetization directions of the plurality of films of preset shapes are along the length direction of the planar magnetic code scale, and the magnetization directions of adjacent films of preset shapes are opposite; Alternatively, the magnetization directions of the plurality of films of preset shapes are perpendicular to the plane where the planar magnetic code scale is located, and the magnetization directions of adjacent films of preset shapes are opposite; The permanent magnetic film material is any one of the following: a hard magnetic material, a semi-hard magnetic material, or a multilayer film composed of the hard magnetic material and / or the semi-hard magnetic material; The method for preparing the magnetic code disk device based on the patterned permanent magnetic film comprises the following steps: Based on the micro-nano processing technology, a plurality of preset-shaped films composed of permanent magnetic film materials are manufactured on the outer surface of the magnetic code disk body, wherein the shapes, sizes and spacings of the plurality of preset-shaped films are the same; Performing a magnetization operation on a plurality of the preset-shaped films, wherein the magnetization directions of any two adjacent preset-shaped films are opposite; The micro-nano processing technology adopts one or more of the following processes: photolithography process, thin film deposition process, laser engraving process, mechanical cutting process, hard mask process; Based on the micro-nano processing technology, a plurality of preset-shaped films composed of permanent magnetic film materials are manufactured on the outer surface of the magnetic code disk body, including: A plurality of preset patterns are produced on the outer surface of the magnetic code disk body based on a photolithography process; a plurality of thin films of preset shapes are formed on the plurality of preset patterns based on a thin film deposition process and a debonding process; Alternatively, a permanent magnetic film is deposited on the outer surface of the magnetic code disk body based on a thin film deposition process; and a plurality of films of preset shapes are formed on the permanent magnetic film based on a photolithography process; Alternatively, a permanent magnetic film is deposited on the outer surface of the magnetic code disk body based on a thin film deposition process; based on a laser engraving process or a mechanical cutting process, the permanent magnetic films other than the films of the desired preset shape are removed to obtain a plurality of films of the preset shape; Alternatively, based on a hard mask process, a plurality of films of preset shapes composed of permanent magnetic film materials are manufactured on the outer surface of the magnetic code disk body; The magnetizing operation of the plurality of films of the preset shapes specifically includes: magnetizing the plurality of films of the preset shapes in sequence into two different magnetization directions in an interval manner to form a magnetic pole structure in which N poles and S poles alternate cyclically.

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