A graphic soft magnetic film magnetic code disk device and preparation method thereof

Abstract

The present invention provides a patterned soft magnetic film magnetic code disk device and a preparation method, which relate to the technical field of magnetic materials and devices. The patterned soft magnetic film magnetic code disk device comprises: a magnetic code disk body and a plurality of patterned soft magnetic films; the plurality of patterned soft magnetic films are arranged on the outer surface of the magnetic code disk body, and are composed of soft magnetic film materials, wherein the shapes, sizes and spacings of the plurality of patterned soft magnetic films are the same; the magnetization directions of the plurality of patterned soft magnetic films are alternating N poles and S poles, and the antiferromagnetic static magneto coupling force between adjacent N poles and S poles is greater than a preset value. The patterned soft magnetic film magnetic code disk device provided by the present invention uses soft magnetic film materials to lay out a large residual magnetism and an adjustable antiferromagnetic static magneto coupling field, which can meet the development and application of various high-performance magnetic encoders.

Description

Technical Field

[0001] The invention relates to the technical field of magnetic materials and devices, and in particular to a patterned soft magnetic film magnetic code disk device based on antiferromagnetic static magneto-coupling and a preparation method thereof. Background Art

[0002] A code disc is a digital encoder that measures angular displacement. It has the advantages of strong resolution, high measurement accuracy and reliable operation, and is the most commonly used displacement sensor for measuring the angular position of a shaft. Code discs are divided into two types: absolute encoders and incremental encoders. The former can directly give a digital code corresponding to the angular position; the latter uses a computing system to add or subtract the pulse increments generated by the rotating code disc against a certain reference number.

[0003] In the prior art, magnetic code disks, i.e., magnetic encoders, based on magnetic films require the use of suitable semi-hard magnetic or hard magnetic materials. These semi-hard magnetic or hard magnetic materials have large remanence and moderate coercive force. When preparing magnetic code disk devices, the requirements for material preparation and performance are very high. Therefore, most of the semi-hard magnetic or hard magnetic materials currently on the market are difficult to meet the needs of making high-precision magnetic code disks. Summary of the invention

[0004] In order to solve the above technical problems existing in the prior art, the embodiment of the present invention provides a patterned soft magnetic thin film magnetic code disk device based on antiferromagnetic static magneto-coupling and a preparation method thereof. The technical solution is as follows:

[0005] In order to solve the above technical problems, the present invention provides the following technical solutions:

[0006] On the one hand, a patterned soft magnetic film magnetic code disk device is provided, comprising: a magnetic code disk body and a plurality of patterned soft magnetic films;

[0007] A plurality of said patterned soft magnetic films are arranged on the outer surface of said magnetic code disk body and are composed of soft magnetic film materials, wherein the shapes, sizes and spacings of said plurality of said patterned soft magnetic films are the same;

[0008] The magnetization directions of the plurality of patterned soft magnetic films are alternating N poles and S poles, and the antiferromagnetic static magneto coupling force between adjacent N poles and S poles is greater than a preset value.

[0009] Optionally, the magnetic code disk body comprises a ring-shaped magnetic code disk; and a plurality of the patterned soft magnetic films are arranged on a circumferential plane of the ring-shaped magnetic code disk.

[0010] Optionally, the magnetization directions of the plurality of patterned soft magnetic films include:

[0011] The magnetization directions of the plurality of patterned soft magnetic films are radial in a circumferential plane, and the magnetization directions of adjacent patterned soft magnetic films are opposite;

[0012] Alternatively, the magnetization directions of the plurality of patterned soft magnetic films are along the tangent direction of the circumferential contour, and the magnetization directions of adjacent patterned soft magnetic films are opposite;

[0013] Alternatively, the magnetization directions of the plurality of patterned soft magnetic films are along the normal direction of the circumferential plane, that is, perpendicular to the circumferential plane, and the magnetization directions of adjacent patterned soft magnetic films are opposite.

[0014] Optionally, the magnetic code disk body comprises a ring-shaped magnetic code disk, and a plurality of the patterned soft magnetic films are arranged on an outer side wall curved surface of the ring-shaped magnetic code disk.

[0015] Optionally, the magnetization directions of the plurality of patterned soft magnetic films include:

[0016] The magnetization directions of the plurality of patterned soft magnetic films are along the vertical direction of the outer side wall curved surface, that is, perpendicular to the circumferential plane, and the magnetization directions of adjacent patterned soft magnetic films are opposite;

[0017] Alternatively, the magnetization directions of the plurality of patterned soft magnetic films are along the tangent direction of the circumferential contour, and the magnetization directions of adjacent patterned soft magnetic films are opposite;

[0018] Alternatively, the magnetization directions of the plurality of patterned soft magnetic films are perpendicular to the outer side wall curved surface, and the magnetization directions of adjacent patterned soft magnetic films are opposite.

[0019] Optionally, the magnetic code disk body comprises a planar magnetic code scale, and a plurality of the patterned soft magnetic films are arranged on the planar magnetic code scale.

[0020] Optionally, the magnetization directions of the plurality of patterned soft magnetic films include:

[0021] The magnetization directions of the plurality of patterned soft magnetic films are along the width direction of the planar magnetic code scale, and the magnetization directions of adjacent patterned soft magnetic films are opposite;

[0022] Alternatively, the magnetization directions of the plurality of patterned soft magnetic films are along the length direction of the planar magnetic code scale, and the magnetization directions of adjacent patterned soft magnetic films are opposite;

[0023] Alternatively, the magnetization directions of the plurality of patterned soft magnetic films are perpendicular to the plane where the planar magnetic code scale is located, and the magnetization directions of adjacent patterned soft magnetic films are opposite.

[0024] Optionally, the soft magnetic film material is one of iron-based soft magnetic material, cobalt-based soft magnetic material, and nickel-based soft magnetic material, or the soft magnetic film material is a multilayer film composed of iron-based soft magnetic material, cobalt-based soft magnetic material, and nickel-based soft magnetic material.

[0025] On the other hand, a method for preparing a patterned soft magnetic film magnetic code disk device is provided, comprising the following steps:

[0026] Based on the micro-nano processing technology, a plurality of patterned soft magnetic films composed of soft magnetic film materials are manufactured on the outer surface of the magnetic code disk body, wherein the shapes, sizes and spacings of the plurality of patterned soft magnetic films are the same;

[0027] By adjusting the shape, size and spacing of the patterned soft magnetic films, the magnetization directions of the plurality of patterned soft magnetic films are alternating between N poles and S poles, and the antiferromagnetic static magneto coupling force between adjacent N poles and S poles is greater than a preset value.

[0028] Optionally, the micro-nano processing technology adopts one or more of the following processes: photolithography process, thin film deposition process, laser engraving process, mechanical cutting process, and hard mask process.

[0029] Optionally, the method of manufacturing a plurality of patterned soft magnetic films composed of soft magnetic film materials on the outer surface of the magnetic code disk body based on the micro-nano processing technology includes:

[0030] A plurality of preset patterns are produced on the outer surface of the magnetic code disk body based on a photolithography process;

[0031] Based on the thin film deposition process and degumming, a plurality of patterned soft magnetic films are formed on a plurality of preset patterns.

[0032] Optionally, the method of manufacturing a plurality of patterned soft magnetic films composed of soft magnetic film materials on the outer surface of the magnetic code disk body based on the micro-nano processing technology includes:

[0033] Depositing a soft magnetic film on the outer surface of the magnetic code disk body based on a thin film deposition process;

[0034] A plurality of patterned soft magnetic films are formed on the soft magnetic film based on a photolithography process.

[0035] Optionally, the method of manufacturing a plurality of patterned soft magnetic films composed of soft magnetic film materials on the outer surface of the magnetic code disk body based on the micro-nano processing technology includes:

[0036] Depositing a soft magnetic film on the outer surface of the magnetic code disk body based on a thin film deposition process;

[0037] Based on a laser engraving process or a mechanical cutting process, the soft magnetic films other than the desired patterned soft magnetic films are removed to obtain a plurality of patterned soft magnetic films.

[0038] Optionally, the method of manufacturing a plurality of patterned soft magnetic films composed of soft magnetic film materials on the outer surface of the magnetic code disk body based on the micro-nano processing technology includes:

[0039] Based on the hard mask process, a plurality of patterned soft magnetic films composed of soft magnetic film materials are manufactured on the outer surface of the magnetic code disk body.

[0040] The beneficial effects brought about by the technical solution provided by the present invention include at least:

[0041] The patterned soft magnetic film magnetic code disk device provided by the present invention comprises a magnetic code disk body and a plurality of patterned soft magnetic films; the plurality of patterned soft magnetic films are arranged on the outer surface of the magnetic code disk body, the magnetization direction N poles and S poles are alternated, and the antiferromagnetic static magneto coupling force between adjacent N poles and S poles is greater than a preset value so that it is sufficient to resist the interference of an external magnetic field of a certain intensity. The patterned soft magnetic film magnetic code disk device provided in the embodiment of the present application adopts a soft magnetic film material to lay out a large residual magnetism and an adjustable antiferromagnetic static magneto coupling field, which can meet the development and application of various high-performance magnetic encoders. BRIEF DESCRIPTION OF THE DRAWINGS

[0042] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0043] Figure 1 It is one of the schematic diagrams of a patterned soft magnetic film magnetic code disk device provided by an embodiment of the present invention;

[0044] Figure 2 This is the second schematic diagram of a patterned soft magnetic film magnetic code disk device provided by an embodiment of the present invention;

[0045] Figure 3 This is a third schematic diagram of a patterned soft magnetic film magnetic code disk device provided by an embodiment of the present invention;

[0046] Figure 4 is a schematic diagram of a hysteresis loop when two adjacent soft magnetic patterns are taken as a whole, provided by an embodiment of the present invention;

[0047] Figure 5 It is a flow chart of a method for preparing a graphic soft magnetic thin film magnetic code disk device provided by an embodiment of the present invention. DETAILED DESCRIPTION

[0048] The technical solution of the present invention is described below in conjunction with the accompanying drawings.

[0049] In the embodiments of the present invention, words such as "exemplarily" and "for example" are used to indicate examples, illustrations or explanations. Any embodiment or design described as "example" in the present invention should not be interpreted as being more preferred or more advantageous than other embodiments or designs. Specifically, the use of the word "example" is intended to present the concept in a specific way. In addition, in the embodiments of the present invention, the meaning expressed by "and / or" can be both, or it can be either of the two.

[0050] In order to make the technical problems, technical solutions and advantages to be solved by the present invention more clear, a detailed description will be given below with reference to the accompanying drawings and specific embodiments.

[0051] The embodiment of the present invention provides a patterned soft magnetic film magnetic code disk device based on antiferromagnetic static magneto-coupling, referring to Figure 1-Figure 3 The patterned soft magnetic film magnetic code disk device comprises: a magnetic code disk body 101 and a plurality of patterned soft magnetic films 102;

[0052] A plurality of patterned soft magnetic films 102 are arranged on the outer surface of the magnetic code disk body 101 and are composed of soft magnetic film materials, wherein the shapes, sizes and spacings of the plurality of patterned soft magnetic films 102 are the same; the magnetization directions of the plurality of patterned soft magnetic films 102 are alternating between N poles and S poles, and the antiferromagnetic static magneto-coupling force between adjacent N poles and S poles (reference Figure 1-Figure 3 dotted arrow) is greater than the preset value.

[0053] In the embodiment of the present invention, the preset value can be set according to the interference strength of the external magnetic field. The antiferromagnetic static magneto coupling force between adjacent N poles and S poles is greater than the preset value in order to make it sufficient to resist the interference of an external magnetic field of a certain strength.

[0054] As an optional embodiment of the present invention, Figure 1 As shown, the magnetic code disk body 101 includes a ring-shaped magnetic code disk, and a plurality of patterned soft magnetic films 102 are arranged on the circumferential plane of the ring-shaped magnetic code disk.

[0055] Specifically, if a plurality of patterned soft magnetic films 102 are disposed on the circumferential plane of the annular magnetic code disk, the magnetization directions of the plurality of patterned soft magnetic films 102 may be as follows:

[0056] (1.1) The magnetization directions of the plurality of patterned soft magnetic films 102 are radial in the circumferential plane, and the magnetization directions of adjacent patterned soft magnetic films 102 are opposite. Figure 1 Indicated by the large solid arrow.

[0057] (1.2) The magnetization directions of the plurality of patterned soft magnetic films 102 are along the tangent direction of the circumferential contour, and the magnetization directions of adjacent patterned soft magnetic films 102 are opposite, referring to Figure 1 Indicated by the small solid arrow.

[0058] (1.3) The magnetization directions of the plurality of patterned soft magnetic films 102 are along the normal direction of the circumferential plane (i.e., perpendicular to the circumferential plane), and the magnetization directions of adjacent patterned soft magnetic films 102 are opposite, referring to Figure 1 Shown as dot and cross symbols.

[0059] As another optional embodiment of the present invention, Figure 2 As shown, the magnetic code disk body 101 includes a circular ring-shaped magnetic code disk, and a plurality of patterned soft magnetic films 102 are arranged on the outer side wall curved surface of the circular ring-shaped magnetic code disk.

[0060] Specifically, if a plurality of patterned soft magnetic films 102 are disposed on the outer wall curved surface of the annular magnetic code disk, the magnetization directions of the plurality of patterned soft magnetic films 102 may be as follows:

[0061] (2.1) The magnetization directions of the plurality of patterned soft magnetic films 102 are along the vertical direction of the outer wall surface (i.e., perpendicular to the circumferential plane), and the magnetization directions of adjacent patterned soft magnetic films 102 are opposite. Figure 2 Indicated by the large solid arrow.

[0062] (2.2) The magnetization directions of the plurality of patterned soft magnetic films 102 are along the tangent direction of the circumferential contour, and the magnetization directions of adjacent patterned soft magnetic films 102 are opposite, referring to Figure 2 Indicated by the small solid arrow.

[0063] (2.3) The magnetization directions of the plurality of patterned soft magnetic films 102 are perpendicular to the outer wall surface, and the magnetization directions of adjacent patterned soft magnetic films 102 are opposite. Figure 2 Shown as dot and cross symbols.

[0064] As another optional embodiment of the present invention, Figure 3 As shown, the magnetic code disk body 101 includes a planar magnetic code scale 103 ; a plurality of patterned soft magnetic films 102 are disposed on the planar magnetic code scale 103 .

[0065] Specifically, if a plurality of patterned soft magnetic films 102 are disposed on the planar magnetic code scale 103, the magnetization directions of the plurality of patterned soft magnetic films 102 may be as follows:

[0066] (3.1) The magnetization directions of the plurality of patterned soft magnetic films 102 are along the width direction of the planar magnetic code scale 103, and the magnetization directions of adjacent patterned soft magnetic films 102 are opposite. Figure 3 Indicated by the large solid arrow.

[0067] (3.2) The magnetization directions of the plurality of patterned soft magnetic films 102 are along the length direction of the planar magnetic code scale 103, and the magnetization directions of adjacent patterned soft magnetic films 102 are opposite. Figure 3 Indicated by the small solid arrow.

[0068] (3.3) The magnetization directions of the plurality of patterned soft magnetic films 102 are perpendicular to the plane where the planar magnetic code scale 103 is located, and the magnetization directions of adjacent patterned soft magnetic films 102 are opposite. Figure 3 Shown as dot and cross symbols.

[0069] The present invention does not limit the specific shape of the patterned soft magnetic film 102, and can be flexibly set by those skilled in the art according to actual needs. Figure 1 The sectors shown in the figure are evenly distributed on the circumferential plane of the annular magnetic code disk. Or they can be set in a long strip shape, such as Figure 2 and Figure 3 As shown, they are evenly distributed on the outer wall surface of the annular magnetic code disk or on the planar magnetic code scale.

[0070] Figure 4 This is a schematic diagram of the hysteresis loop of two adjacent patterned soft magnetic films as a whole. Through reasonable shape, size and spacing design, a strong antiferromagnetic static magneto coupling effect will be formed between the two adjacent patterned soft magnetic films. On the one hand, they can have a greater resistance to external magnetic field interference as a whole, and on the other hand, they can each show strong magnetism (surface magnetism) to the outside, thereby achieving or even better functions than hard magnetic or semi-hard magnetic materials.

[0071] In the actual implementation process, the soft magnetic film pattern can be any appropriate soft magnetic film material with low coercivity and high remanence. Those skilled in the art can flexibly set it according to actual needs, and no specific limitation is made here.

[0072] Preferably, the soft magnetic film material is one of iron-based soft magnetic material, cobalt-based soft magnetic material and nickel-based soft magnetic material, or the soft magnetic film material is a multilayer film composed of iron-based soft magnetic material, cobalt-based soft magnetic material and nickel-based soft magnetic material.

[0073] More preferably, the soft magnetic thin film material includes but is not limited to NiFe, CoFe, and NiCo.

[0074] like Figure 5 As shown, an embodiment of the present invention further provides a method for preparing a patterned soft magnetic film magnetic code disk device, the method comprising:

[0075] S101, based on micro-nano processing technology, a plurality of patterned soft magnetic films composed of soft magnetic film materials are manufactured on the outer surface of the magnetic code disk body, wherein the shapes, sizes and spacings of the plurality of patterned soft magnetic films are the same;

[0076] S102, by adjusting the shape, size and spacing of the patterned soft magnetic films, the magnetization directions of the plurality of patterned soft magnetic films are alternating between N poles and S poles, and the antiferromagnetic magnetostatic coupling force between adjacent N poles and S poles is greater than a preset value.

[0077] In the embodiment of the present invention, the micro-nano processing technology includes but is not limited to: photolithography technology, thin film deposition technology, laser engraving technology, mechanical cutting technology, hard mask technology, etc., or a combination of multiple processing technologies.

[0078] As an optional embodiment of the present invention, the method of manufacturing a plurality of patterned soft magnetic films composed of soft magnetic film materials on the outer surface of the magnetic code disk body based on the micro-nano processing technology includes:

[0079] A plurality of preset patterns are produced on the outer surface of the magnetic code disk body based on a photolithography process;

[0080] Based on the thin film deposition process and degumming, a plurality of patterned soft magnetic films are formed on a plurality of preset patterns.

[0081] Specifically, a pattern is first produced by a graphic process, and then a graphic soft magnetic film is formed by thin film deposition and degumming.

[0082] As an optional embodiment of the present invention, the method of manufacturing a plurality of patterned soft magnetic films composed of soft magnetic film materials on the outer surface of the magnetic code disk body based on the micro-nano processing technology includes:

[0083] Depositing a soft magnetic film on the outer surface of the magnetic code disk body based on a thin film deposition process;

[0084] A plurality of patterned soft magnetic films are formed on the soft magnetic film based on a photolithography process.

[0085] Specifically, a thin film is deposited first, and then an exposure and etching process is used to form a patterned soft magnetic film.

[0086] Among them, the thin film deposition processes include: magnetron sputtering, electronic book evaporation, physical vapor deposition, and chemical vapor deposition.

[0087] The photolithography process includes exposure process and etching process; among them, the exposure process includes: UV exposure, laser exposure, electron beam exposure, nanoimprinting; the etching process includes: dry etching, wet etching, chemical etching.

[0088] In addition, since the photolithography process is not easy to implement on a curved surface, a laser engraving process or a mechanical cutting process is sometimes required for processing the patterned soft magnetic film produced on the curved surface.

[0089] Therefore, as another optional embodiment of the present invention, the method of manufacturing a plurality of patterned soft magnetic films composed of soft magnetic film materials on the outer surface of the magnetic code disk body based on the micro-nano processing technology includes:

[0090] Depositing a soft magnetic film on the outer surface of the magnetic code disk body based on a thin film deposition process;

[0091] Based on a laser engraving process or a mechanical cutting process, the soft magnetic films other than the desired patterned soft magnetic films are removed to obtain a plurality of patterned soft magnetic films.

[0092] Furthermore, in the embodiment of the present invention, a patterned soft magnetic film can also be prepared by a hard mask process or the like.

[0093] As another optional embodiment of the present invention, the method of manufacturing a plurality of patterned soft magnetic films composed of soft magnetic film materials on the outer surface of the magnetic code disk body based on the micro-nano processing technology includes:

[0094] Based on the hard mask process, a plurality of patterned soft magnetic films composed of soft magnetic film materials are manufactured on the outer surface of the magnetic code disk body.

[0095] Then, by adjusting the shape, size and spacing of the patterned soft magnetic films, the magnetization directions of the plurality of patterned soft magnetic films are alternating between N poles and S poles, and the antiferromagnetic magnetostatic coupling force between adjacent N poles and S poles is greater than a preset value.

[0096] The preset value can be set according to the interference intensity of the external magnetic field. The antiferromagnetic static magneto coupling force between adjacent N poles and S poles is greater than the preset value, which can be sufficient to resist the interference of an external magnetic field of a certain intensity.

[0097] Compared with the previous magnetic code disks based on magnetic films, which need to use suitable semi-hard magnetic or hard magnetic materials (larger remanence, moderate coercive force) and have very high requirements for material preparation and performance, the graphic soft magnetic thin film magnetic code disk device based on antiferromagnetic static magneto coupling of the present invention only needs to use the well-developed soft magnetic thin film materials, and naturally has a larger remanence and an adjustable antiferromagnetic static magneto coupling field (equivalent to the coercive force of hard magnetic materials, used to resist the interference of external magnetic fields), which can easily meet the research and development and application of various high-performance magnetic encoders.

[0098] It should be noted that, in this article, the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or terminal device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or terminal device. In the absence of further restrictions, the elements defined by the sentence "comprises a ..." do not exclude the existence of other identical elements in the process, method, article or terminal device including the elements.

[0099] References in the specification to "one embodiment", "an embodiment", "an exemplary embodiment", "some embodiments", etc. indicate that the described embodiments may include a particular feature, structure, or characteristic, but not every embodiment may include the particular feature, structure, or characteristic. In addition, when a particular feature, structure, or characteristic is described in conjunction with an embodiment, it should be within the knowledge of a person skilled in the relevant art to implement such feature, structure, or characteristic in conjunction with other embodiments (whether or not explicitly described).

[0100] It should be understood that the term "and / or" in this article is only a description of the association relationship of associated objects, indicating that there can be three relationships. For example, A and / or B can represent: A exists alone, A and B exist at the same time, and B exists alone. A and B can be singular or plural. In addition, the character " / " in this article generally indicates that the associated objects before and after are in an "or" relationship, but it may also indicate an "and / or" relationship. Please refer to the context for specific understanding.

[0101] In the present invention, "at least one" means one or more, and "more than one" means two or more. "At least one of the following" or similar expressions refers to any combination of these items, including any combination of single or plural items. For example, at least one of a, b, or c can be represented by: a, b, c, ab, ac, bc, or abc, where a, b, c can be single or multiple.

[0102] It should be understood that in various embodiments of the present invention, the size of the serial numbers of the above-mentioned processes does not mean the order of execution. The execution order of each process should be determined by its function and internal logic, and should not constitute any limitation on the implementation process of the embodiments of the present invention.

[0103] In the several embodiments provided by the present invention, it should be understood that the disclosed devices, apparatuses and methods can be implemented in other ways. For example, the device embodiments described above are only schematic. For example, the division of the units is only a logical function division. There may be other division methods in actual implementation, such as multiple units or components can be combined or integrated into another device, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be through some interfaces, indirect coupling or communication connection of devices or units, which can be electrical, mechanical or other forms.

[0104] The units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed on multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0105] In addition, each functional unit in each embodiment of the present invention may be integrated into one processing unit, or each unit may exist physically separately, or two or more units may be integrated into one unit.

[0106] If the functions are implemented in the form of software functional units and sold or used as independent products, they can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of the present invention can be essentially or partly embodied in the form of a software product that contributes to the prior art. The computer software product is stored in a storage medium and includes several instructions for enabling a computer device (which can be a personal computer, a server, or a network device, etc.) to perform all or part of the steps of the methods described in various embodiments of the present invention. The aforementioned storage medium includes: various media that can store program codes, such as a USB flash drive, a mobile hard disk, a read-only memory (ROM), a random access memory (RAM), a magnetic disk or an optical disk.

[0107] The present invention covers any substitution, modification, equivalent method and scheme made on the essence and scope of the present invention. In order to make the public have a thorough understanding of the present invention, specific details are described in detail in the following preferred embodiments of the present invention, but those skilled in the art can fully understand the present invention without the description of these details. In addition, in order to avoid unnecessary confusion about the essence of the present invention, well-known methods, processes, procedures, components and circuits are not described in detail.

[0108] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A patterned soft magnetic film magnetic code disk device, characterized in that: include: A magnetic code disk body and a plurality of patterned soft magnetic films; A plurality of said patterned soft magnetic films are arranged on the outer surface of said magnetic code disk body and are composed of soft magnetic film materials, wherein the shapes, sizes and spacings of said plurality of said patterned soft magnetic films are the same; The magnetization directions of the plurality of patterned soft magnetic films are alternating between N poles and S poles, and the antiferromagnetic magnetostatic coupling force between adjacent N poles and S poles is greater than a preset value; The structure of the magnetic code disk device adopts any one of the following: (1) The magnetic code disk body comprises a circular ring-shaped magnetic code disk, and a plurality of the patterned soft magnetic films are arranged on a circumferential plane of the circular ring-shaped magnetic code disk; The magnetization directions of multiple patterned soft magnetic films include: The magnetization directions of the plurality of patterned soft magnetic films are radial in a circumferential plane, and the magnetization directions of adjacent patterned soft magnetic films are opposite; Alternatively, the magnetization directions of the plurality of patterned soft magnetic films are along the tangent direction of the circumferential contour, and the magnetization directions of adjacent patterned soft magnetic films are opposite; Alternatively, the magnetization directions of the plurality of patterned soft magnetic films are along the normal direction of the circumferential plane, that is, perpendicular to the circumferential plane, and the magnetization directions of adjacent patterned soft magnetic films are opposite; (2) The magnetic code disk body comprises a circular magnetic code disk, and a plurality of the patterned soft magnetic films are arranged on the outer wall curved surface of the circular magnetic code disk; The magnetization directions of multiple patterned soft magnetic films include: The magnetization directions of the plurality of patterned soft magnetic films are along the vertical direction of the outer side wall curved surface, that is, perpendicular to the circumferential plane, and the magnetization directions of adjacent patterned soft magnetic films are opposite; Alternatively, the magnetization directions of the plurality of patterned soft magnetic films are along the tangent direction of the circumferential contour, and the magnetization directions of adjacent patterned soft magnetic films are opposite; Alternatively, the magnetization directions of the plurality of patterned soft magnetic films are perpendicular to the outer side wall curved surface, and the magnetization directions of adjacent patterned soft magnetic films are opposite; (3) The magnetic code disk body includes a planar magnetic code scale, and a plurality of the patterned soft magnetic films are arranged on the planar magnetic code scale; The magnetization directions of multiple patterned soft magnetic films include: The magnetization directions of the plurality of patterned soft magnetic films are along the width direction of the planar magnetic code scale, and the magnetization directions of adjacent patterned soft magnetic films are opposite; Alternatively, the magnetization directions of the plurality of patterned soft magnetic films are along the length direction of the planar magnetic code scale, and the magnetization directions of adjacent patterned soft magnetic films are opposite; Alternatively, the magnetization directions of the plurality of patterned soft magnetic films are perpendicular to the plane where the planar magnetic code scale is located, and the magnetization directions of adjacent patterned soft magnetic films are opposite; The soft magnetic film material is one of an iron-based soft magnetic material, a cobalt-based soft magnetic material, and a nickel-based soft magnetic material, or the soft magnetic film material is a multilayer film composed of an iron-based soft magnetic material, a cobalt-based soft magnetic material, and a nickel-based soft magnetic material; The method for preparing the patterned soft magnetic film magnetic code disk device comprises the following steps: Based on the micro-nano processing technology, a plurality of patterned soft magnetic films composed of soft magnetic film materials are manufactured on the outer surface of the magnetic code disk body, wherein the shapes, sizes and spacings of the plurality of patterned soft magnetic films are the same; By adjusting the shape, size and spacing of the patterned soft magnetic films, the magnetization directions of the plurality of patterned soft magnetic films are alternating between N poles and S poles, and the antiferromagnetic magnetostatic coupling force between adjacent N poles and S poles is greater than a preset value; The micro-nano processing technology adopts one or more of the following processes: photolithography process, thin film deposition process, laser engraving process, mechanical cutting process, hard mask process; Based on the micro-nano processing technology, a plurality of patterned soft magnetic films composed of soft magnetic film materials are manufactured on the outer surface of the magnetic code disk body, including: A plurality of preset patterns are produced on the outer surface of the magnetic code disk body based on a photolithography process; a plurality of patterned soft magnetic films are formed on the plurality of preset patterns based on a thin film deposition process and a debonding process; Alternatively, a soft magnetic film is deposited on the outer surface of the magnetic code disk body based on a thin film deposition process; and a plurality of patterned soft magnetic films are formed on the soft magnetic film based on a photolithography process; Alternatively, a soft magnetic film is deposited on the outer surface of the magnetic code disk body based on a thin film deposition process; based on a laser engraving process or a mechanical cutting process, soft magnetic films other than the desired patterned soft magnetic film are removed to obtain a plurality of patterned soft magnetic films; Alternatively, based on a hard mask process, a plurality of patterned soft magnetic films composed of soft magnetic film materials are manufactured on the outer surface of the magnetic code disk body; Afterwards, by adjusting the shape, size and spacing of the patterned soft magnetic films, the magnetization directions of the multiple patterned soft magnetic films are alternating between N poles and S poles, and the antiferromagnetic static magneto coupling force between adjacent N poles and S poles is greater than a preset value; the preset value is set according to the interference intensity of the external magnetic field.

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