Photovoltaic substrate guide equipment

Abstract

This invention discloses a photovoltaic substrate guiding device, including a first guiding device, a second guiding device, a transfer device, and a shifting device. The first guiding device includes n sets of first conveyor lines, each containing m first conveying mechanisms. The second guiding device includes x sets of second conveyor lines, each containing y second conveying mechanisms, where x < n, y > m, and n*m = x*y. The tail end of each first conveyor line connects to either a third conveyor line or the head end of a second conveyor line. A first picking and placing mechanism is used to pick up substrates from the third conveyor line and place them in an adjacent second conveyor line. By adjusting the positions of the first and second conveyor lines in the first guiding device, the second and third conveyor lines in the second guiding device, and the transfer of substrates by the transfer device, the m substrates conveyed in the first conveyor line are converted into y substrates conveyed in the second conveyor line, thereby increasing the substrate load capacity in each basket, as well as the substrate rework efficiency and yield.

Description

Technical Field

[0001] This invention relates to the field of photovoltaic cell manufacturing technology, and in particular to a photovoltaic substrate conductive device. Background Technology

[0002] As a fixture for loading photovoltaic substrates, the basket can carry silicon wafers into different processing steps. In the automated processing of photovoltaic cells, the module uses a fixed amount of baskets to place into the reaction tank for the substrates to react. For unqualified substrates that need to be reworked, the related technology uses a wafer guide device to transport the substrates back to the reaction tank for reaction. However, due to the limited internal space of other process equipment, the size of the baskets flowing from these process equipment to the wafer guide device is limited, and only a small number of substrates can be loaded and unloaded. The number of baskets picked up by the module is set in advance, which leads to low efficiency of substrate rework and affects production capacity. Summary of the Invention

[0003] This invention aims to at least solve one of the technical problems existing in the prior art. To this end, this invention proposes a photovoltaic substrate guiding device that can improve rework efficiency and increase production capacity.

[0004] An embodiment of the present invention provides a photovoltaic substrate conductive device, comprising:

[0005] The first guide plate device includes n sets of first conveyor lines arranged in parallel. The first conveyor lines are used to convey the substrate carried in the first flower basket. Each first conveyor line is provided with m first conveyor mechanisms arranged in parallel. Each first conveyor mechanism extends along a first direction and is able to place and convey a single substrate along the first direction, where n≥3 and m≥2.

[0006] The second guide plate device is used to receive the substrate transmitted by the first guide plate device. The second guide plate device includes x sets of second conveyor lines arranged in parallel. The second conveyor lines are used to transmit the substrate to the second flower basket. Each second conveyor line is provided with y second conveying mechanisms arranged in parallel. Each second conveying mechanism extends along the first direction and is able to place and convey a single substrate along the first direction, where x < n, y > m, and n*m = x*y, and x, y, m, and n are all positive integers.

[0007] The transfer device includes a third conveyor line, which includes nx third conveying mechanisms arranged side by side, the third conveying mechanisms being located between adjacent second conveyor lines, and the tail end of the first conveyor line being connected to the head end of the third conveyor line, or the tail end of the first conveyor line being connected to the head end of the second conveyor line.

[0008] The substrate transfer device includes a first substrate picking and placing mechanism, which is used to pick up a substrate located on the third conveyor line between adjacent second conveyor lines and place the substrate in the adjacent second conveyor line.

[0009] The photovoltaic substrate conductive device according to embodiments of the present invention has at least the following beneficial effects:

[0010] In this invention, a first conveyor line receives substrates to be reworked from a first basket, and a second conveyor line loads substrates to be reworked into a second basket. Through the positional arrangement of the first conveyor line in the first guide device, the second conveyor line in the second guide device, and the third conveyor line, as well as the transfer of substrates by the transfer device, the conveying quantity of m substrates in the first conveyor line is converted into the conveying quantity of y substrates in the second conveyor line. This realizes the transfer of substrates from the first basket to the second basket, and improves the load capacity of substrates in each basket, as well as the rework efficiency and output of substrates.

[0011] According to some embodiments of the present invention, the photovoltaic substrate conveying device includes a wafer transfer area, which is disposed in the region where the projection of the third conveying line and the adjacent second conveying line coincides in a second direction, the second direction being perpendicular to the first direction, and the wafer transfer device is used to transfer the substrate within the wafer transfer area.

[0012] According to some embodiments of the present invention, the photovoltaic substrate guiding device further includes a plurality of first flower baskets and a plurality of second flower baskets. The first end of each first conveying mechanism has a suspended first extension section, and the first extension section in each first conveying line can be inserted into the first flower basket and the substrate in the first flower basket can be extracted. The tail end of each second conveying mechanism has a suspended second extension section, and the second extension section in each second conveying line can be inserted into the second flower basket and the substrate is stacked vertically in the second flower basket.

[0013] An operating space is defined between the second conveyor lines located on both sides of and adjacent to the third conveyor line, and the operating space is located at the front end of the third conveyor line.

[0014] According to some embodiments of the present invention, the first flower basket includes a plurality of spaced first support columns, the plurality of first support columns defining m first conveying cavities having first openings, the first conveying cavities being arranged side by side, the first protruding section being inserted into the first conveying cavity through the first opening, and the first support column having protruding first support teeth on the side facing the first conveying cavity and arranged vertically at intervals, the first support teeth being used to support the substrate.

[0015] The second flower basket includes a plurality of spaced second support columns, which define y second conveying cavities with second openings. The second conveying cavities are arranged side by side, and the second protruding section and the second opening are inserted into the second conveying cavities. The second support columns have protruding second support teeth on the side facing the second conveying cavity and arranged vertically at intervals. The second support teeth are used to support the substrate.

[0016] According to some embodiments of the present invention, the photovoltaic substrate guiding device further includes n first flower basket lifting devices, each first flower basket lifting device including a first receiving mechanism, a first clamping mechanism and a first lifting mechanism. The first receiving mechanism is used to receive and accept the first flower basket. The first clamping mechanism includes a first clamping member located on the side of the first receiving mechanism. The first clamping member is used to clamp the first flower basket. The first lifting mechanism is connected to the first receiving mechanism and is used to drive the first receiving mechanism to lift.

[0017] The photovoltaic substrate guiding device also includes x second flower basket lifting devices. Each second flower basket lifting device includes a second receiving mechanism, a second clamping mechanism, and a second lifting mechanism. The second receiving mechanism is used to receive and hold the second flower basket. The second clamping mechanism includes a second clamping member located on the side of the second receiving mechanism. The second clamping member is used to clamp the second flower basket. The second lifting mechanism is connected to the second receiving mechanism and is used to drive the second receiving mechanism to lift.

[0018] According to some embodiments of the present invention, the photovoltaic substrate guiding device further includes n first flower basket conveying devices, each of the first flower basket conveying devices including a first flower basket conveying mechanism and a first flower basket return mechanism located above the first flower basket conveying mechanism, each of the first flower basket conveying mechanisms being used to convey a fully loaded first flower basket to the first flower basket lifting device, and the first flower basket return mechanism being used to receive an empty first flower basket conveyed by the flower basket lifting device.

[0019] The photovoltaic substrate guiding equipment also includes x second flower basket conveying devices, each corresponding to a second flower basket lifting device. Each second flower basket conveying device includes a second flower basket conveying mechanism and a second flower basket return mechanism located below the second flower basket conveying mechanism. Each second flower basket conveying mechanism is used to convey an empty second flower basket to the second flower basket lifting device, and the second flower basket return mechanism is used to receive a fully loaded second flower basket in the flower basket lifting device.

[0020] According to some embodiments of the present invention, the photovoltaic substrate guiding device further includes a transverse movement device located between the first flower basket conveying device and the first flower basket lifting device. The transverse movement device includes a transverse movement mechanism for receiving and conveying the first flower basket along a second direction to move the first flower basket to dock with a different first flower basket lifting device. The first direction is perpendicular to the second direction.

[0021] According to some embodiments of the present invention, the photovoltaic substrate guiding device further includes a third guiding device, the third guiding device including x fourth conveying lines, each of the fourth conveying lines including ym fourth conveying mechanisms, the fourth conveying lines being arranged side by side with the first conveying lines and forming a guiding area;

[0022] The third wafer guide device further includes a second wafer picking and placing mechanism and a plurality of stacking boxes. Each stacking box includes y stacking cavities arranged side by side. The second wafer picking and placing mechanism is used to pick up y substrates in the stacking box and place them into the wafer guide area, or pick up y substrates in the wafer guide area and place them into the stacking box.

[0023] According to some embodiments of the present invention, the third guide plate device further includes a substrate, an air blowing assembly, and a lifting mechanism. The lifting mechanism is located below the substrate, and the stacking box is located above the substrate. The lifting mechanism is connected to the bottom of the stacking box and is used to lift the stacking box upwards by a predetermined distance. The air blowing assembly includes a plurality of air knives disposed on opposite sides of the stacking box. The air knives are used to blow air toward the stacking cavity to separate the two uppermost substrates.

[0024] According to some embodiments of the present invention, the third guide plate device further includes a substrate and a feeding conveying mechanism, the feeding conveying mechanism being connected to the top of the substrate, and the stacking box being mounted on the feeding conveying mechanism so as to be able to move relative to the substrate along a second direction, the first direction being perpendicular to the second direction;

[0025] The stacking box has a material pick-up and drop-off position and a lifting position arranged along the second direction. The stacking box can reciprocate between the material pick-up and drop-off position and the lifting position. The lifting mechanism is arranged at the lifting position. The stacking box can be placed at the material pick-up and drop-off position on the feeding conveyor mechanism or taken out from the feeding conveyor mechanism.

[0026] Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0027] The present invention will be further described below with reference to the accompanying drawings and embodiments, wherein:

[0028] Figure 1 This is a schematic diagram of one embodiment of the photovoltaic substrate conductive device of the present invention;

[0029] Figure 2 for Figure 1 Location distribution diagram of a photovoltaic substrate guiding device according to an embodiment;

[0030] Figure 3 This is a schematic diagram showing the cooperation between the first guide plate device and the second guide plate device;

[0031] Figure 4 This is a schematic diagram of one embodiment of the wafer shifting device;

[0032] Figure 5 A schematic diagram of one embodiment of the first flower basket;

[0033] Figure 6 A schematic diagram of one embodiment of the second flower basket;

[0034] Figure 7 A schematic diagram of one embodiment of the first flower basket lifting device;

[0035] Figure 8 A schematic diagram of one embodiment of the second flower basket lifting device;

[0036] Figure 9 A schematic diagram of one embodiment of the first flower basket conveying device;

[0037] Figure 10 A schematic diagram of one embodiment of the transverse movement device;

[0038] Figure 11 A schematic diagram of one embodiment of the second flower basket conveying device;

[0039] Figure 12 This is a schematic diagram of the structure of the third guide plate device.

[0040] Figure 13 This is a schematic diagram of one embodiment of the second pick-and-place mechanism;

[0041] Figure 14 This is a schematic diagram of one embodiment of the air blowing assembly.

[0042] Figure label:

[0043] First flower basket 10, first support column 11, first backboard 12, first conveying chamber 13, first opening 14, first support tooth 15;

[0044] Second flower basket 20, second support column 21, second backboard 22, second conveying cavity 23, second opening 24, second support tooth 25;

[0045] First guide plate device 100, first conveyor line 110, first conveyor mechanism 111, first extension section 112;

[0046] Second guide plate device 200, second conveyor line 210, second conveyor mechanism 211, second extension section 212;

[0047] Transfer device 300, third conveyor line 310, operating space 320;

[0048] The wafer transfer device 400, the first wafer pick-and-place mechanism 410, and the drive module 420 are included.

[0049] Transfer area 510, guide area 520;

[0050] The first flower basket lifting device 600, the first receiving mechanism 610, the first clamping mechanism 620, the first clamping member 621, the first lifting mechanism 630, the first blocking member 640, the first pressing basket structure 650, and the first lifting frame 660.

[0051] The second flower basket lifting device 700, the second receiving mechanism 710, the second clamping mechanism 720, the second clamping member 721, the second lifting mechanism 730, the second blocking member 740, the second pressing basket structure 750, and the second lifting frame 760.

[0052] First flower basket conveying device 800, first flower basket conveying mechanism 810, first flower basket return mechanism 820, first belt conveyor mechanism 830, first guide rail 840;

[0053] Horizontal movement device 900, horizontal movement structure 910, horizontal movement conveying mechanism 920, horizontal movement clamping mechanism 930;

[0054] Second flower basket conveying device 1000, second flower basket conveying mechanism 1010, second flower basket return mechanism 1020, second belt conveying mechanism 1030, second guide rail 1040;

[0055] The third guide plate device 1100, the fourth conveyor line 1110, the fourth conveyor mechanism 1111, the second pick-and-place plate mechanism 1120, the drive module 1121, the stacking box 1130, the stacking cavity 1131, the substrate 1140, the lifting mechanism 1150, the air blowing assembly 1160, the air knife 1161, the air port 1162, the feeding conveyor mechanism 1170, the slide rail 1171, and the slide table 1172. Detailed Implementation

[0056] Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0057] In the description of this invention, it should be understood that the orientation descriptions, such as up, down, front, back, left, right, etc., are based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting this invention.

[0058] In the description of this invention, "several" means one or more, "multiple" means two or more, "greater than," "less than," and "exceeding" are understood to exclude the stated number, while "above," "below," and "within" are understood to include the stated number. The use of "first" and "second" in the description is merely for distinguishing technical features and should not be construed as indicating or implying relative importance, or implicitly indicating the number of indicated technical features, or implicitly indicating the order of the indicated technical features.

[0059] In the description of this invention, unless otherwise explicitly defined, terms such as "set up," "install," and "connect" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this invention in conjunction with the specific content of the technical solution.

[0060] In the description of the present invention, reference to terms such as "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the exemplary expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

[0061] Reference Figures 1 to 3This invention provides a photovoltaic substrate guiding device (hereinafter referred to as the guiding device), which includes a first guiding device 100 and a second guiding device 200. The first guiding device 100 includes n sets of first conveyor lines 110 arranged in parallel. The first conveyor lines 110 are used to convey substrates carried by first baskets 10. The first baskets 10 can carry unqualified substrates to be reworked. Each first conveyor line 110 is provided with m first conveying mechanisms 111 arranged in parallel. Each first conveying mechanism 111 moves along a first... The first conveyor line 100 extends in a direction and is capable of placing and conveying single substrates along a first direction. The first conveyor mechanism 111 within each first conveyor line 110 is arranged along a second direction, which is perpendicular to the second direction and parallel to the horizontal plane. Therefore, within each first conveyor line 110, m substrates are arranged in a row along the second direction, and multiple rows of substrates are arranged along the first direction and conveyed by the first conveyor line 110. Since multiple first conveyor lines 110 convey substrates simultaneously, each row of the first guide device 100 can convey m*n substrates. Where n≥3 and m≥2, that is, each row within each first conveyor line 110 has at least two substrates. Since n first conveyor lines 110 are arranged side-by-side, each row of the first guide device 100 can convey at least 6 substrates.

[0062] It should be noted that each first conveyor line 110 is used to export a substrate from a first basket 10, that is, each row of the first basket 10 has m substrates. The first conveyor line 110 can receive m substrates at a time, and the m substrates are respectively received by each first conveyor mechanism 111 in the first conveyor line 110.

[0063] The second guide device 200 is used to receive the substrates transmitted by the first guide device 100. The second guide device 200 includes x sets of second conveyor lines 210 arranged side by side. The second conveyor lines 210 are used to transmit the substrates to the second basket 20. That is, the defective substrates carried in the first basket 10 are first transferred to the first guide device 100, and then transmitted by the first guide device 100 to the second guide device 200, and then transmitted by the second guide device 200 to the second basket 20 for collection. Each second conveyor line 210 is provided with y second conveying mechanisms 211 arranged side by side. Each second conveying mechanism 211 extends along a first direction and is capable of placing and conveying single substrates along the first direction. That is, the conveying directions of the first conveyor line 110 and the second conveyor line 210 are the same. Within each second conveyor line 210, y substrates are arranged in a row along the second direction, and multiple rows of substrates are arranged along the first direction and conveyed to the second basket 20 by the second conveyor line 210. Since multiple second conveyor lines 210 convey substrates simultaneously, each row of the second guide device 200 can convey x*y substrates, where x < n, y > m, and n*m = x*y, and x, y, m, and n are all positive integers; that is, the total amount of substrates conveyed by the first conveyor line 110 and the second conveyor line 210 is the same, but the second... The number of substrates conveyed per row of conveyor line 210 is greater than the number of substrates conveyed per row of first conveyor line 110. Each second conveyor line 210 conveys substrates to a second basket 20, and the number of substrates received per row in the second basket 20 increases. Therefore, the amount of substrates carried in the second basket 20 is greater than the amount of substrates carried in the first basket 10. When the module picks up the second basket 20 carrying substrates for rework, the number of substrates undergoing rework in the same time period increases, improving rework efficiency and increasing the production capacity of photovoltaic substrates.

[0064] The substrate guiding device also includes a transfer device 300 and a substrate transfer device 400. The transfer device 300 is used to receive substrates in the first conveyor line 110 and transport the substrates. The substrate transfer device 400 is used to pick up substrates in the transfer device 300 and transfer the substrates to the second conveyor line 210. Specifically, the first guide plate device 100 and the second guide plate device 200 are arranged along the first direction. The transfer device 300 includes a third conveying line 310. Each third conveying line 310 includes nx third conveying mechanisms arranged side by side. The third conveying mechanisms are arranged along the second direction and are located between adjacent second conveying lines 210. The tail end of the first conveying line 110 is connected to the head end of the third conveying line 310, or the tail end of the first conveying line 110 is connected to the head end of the second conveying line 210. The third conveying line 310 is used to transfer the substrates on the first conveying line 110 that are not connected to the second conveying line 210 to the adjacent third conveying lines 310, so that the transfer device 400 can more conveniently transfer the substrates on the third conveying line 310 to the second conveying line 210, thus completing the transfer of the substrates from the first conveying line 110 to the second conveying line 210. The substrate transfer device 400 includes a first substrate picking and placing mechanism 410, which is used to pick up a substrate located on a third conveyor line 310 between adjacent second conveyor lines 210 and place the substrate on the adjacent second conveyor line 210.

[0065] In this document, the position at the front end of the conveying direction along the first conveyor line 110 and the second conveyor line 210 is defined as the beginning end, and the position at the rear end of the conveying direction is defined as the end end. It is understandable that, in the case where the beginning end of the first conveyor line 110 is connected to the end end of the second conveyor line 210, since the number of first conveying mechanisms 111 in the first conveyor line 110 is less than the number of second conveying mechanisms 211 in the second conveyor line 210, and both the first and second conveying mechanisms 111 and 211 can convey single substrates, the m first conveying mechanisms 111 in the first conveyor line 110 are connected to the m second conveying mechanisms 211 in the second conveyor line 210 respectively. The remaining ym second conveying mechanisms 211 in the second conveyor line 210 are supplied with substrates by the adjacent third conveyor line 310, and the transfer device 300 picks up the substrates from the adjacent third conveyor line 310 and transfers them to the remaining ym second conveying mechanisms 211.

[0066] Reference Figure 3Taking n=3, m=2, x=2, y=3 as an example, the first guide plate device 100 includes three sets of first conveyor lines 110 arranged along the second direction. Each set of first conveyor lines 110 includes two first conveyor mechanisms 111 arranged along the second direction. Each first conveyor mechanism 111 can convey a single substrate. Thus, the first guide plate device 100 arranges six substrates in each row. The second guide plate device 200 includes two sets of second conveyor lines 210 arranged along the second direction. Each set of second conveyor lines 210 includes three second conveyor mechanisms 211 arranged along the second direction. Each second mechanism can convey a single substrate. Thus, the second guide plate device 200 arranges six substrates in each row. Two first conveyor lines 110 located on either side are respectively connected to two second conveyor lines 210. Two first conveying mechanisms 111 in the first conveyor line 110 are connected to two of the second conveying mechanisms 211 in the second conveyor line 210, and the substrate is directly transferred to the second conveying mechanism 211. One second conveying mechanism 211 within the second conveyor line 210 does not receive a substrate directly transferred by the first conveying mechanism 111. A third conveyor line 310 is located between the two second conveyor lines 210. The third conveyor line 310 includes two third conveying mechanisms. A group of first conveyor lines 110 that are not connected to the second conveyor lines 210 are connected to the third conveyor line 310. The number of first conveying mechanisms 111 that are not connected to the second conveying mechanisms 211 is the same as the number of third conveying mechanisms in the third conveyor line 310. Therefore, the first conveying mechanism 111 transfers the substrate to the third conveying mechanism. Since the third conveying mechanism is located between adjacent second conveyor lines 210, the transfer device 300 transfers the substrate to the third conveying mechanism. The substrates on the conveying mechanism are transferred to the second conveying mechanism 211 on both sides (the second conveying mechanism 211 that does not directly receive substrates from the first conveying mechanism 111), completing the switch from three-channel two-piece conveying at the first guide device 100 to two-channel three-piece conveying at the second guide device 200. That is, the amount of substrates originally carried by three first baskets 10 is converted to be carried by two second baskets 20. When the number of baskets loaded in the module remains unchanged, the amount of substrates processed in a single process can be increased by loading the second baskets 20 into the rework process.

[0067] Understandably, the number of substrates carried in each layer of the first basket 10 is the same as the number of first conveying mechanisms 111 in the first conveyor line 110, and the number of substrates carried in each layer of the second basket 20 is the same as the number of second conveying mechanisms 211 in the second conveyor line 210. One first conveyor line 110 receives a substrate to be reworked from one basket 10, and one second conveyor line 210 loads a substrate to be reworked into one basket 20. Through the positional arrangement of the first conveyor line 110 in the first guide device 100, the second conveyor line 210 in the second guide device 200, and the third conveyor line 310, as well as the transfer of substrates by the transfer device 300, the m substrates conveyed in the first conveyor line 110 are converted into y substrates conveyed in the second conveyor line 210. This realizes the transfer of substrates from the first basket 10 to the second basket 20, and improves the substrate carrying capacity in each basket, as well as the substrate rework efficiency and output.

[0068] In some instances, at least two third conveying mechanisms are provided between adjacent second conveyor lines 210. The substrate transfer device 400 can pick up the substrate from at least one third conveyor and place it on one side of the second conveyor 211. The substrate transfer device 400 only needs to move back and forth between the third conveyor and one side of the second conveyor 211 without crossing multiple second conveyor 211, which can shorten the production cycle and improve the transfer efficiency of the substrate transfer device 400. In addition, the substrate guiding device may include multiple substrate transfer devices 400, each of which is responsible for transferring the substrate into one of the second conveyor 211. Multiple substrate transfer devices 400 work simultaneously, so that the same row of all second conveyor 211 in the second substrate guiding device 200 can be filled with substrates at the same time, resulting in high substrate guiding efficiency.

[0069] The wafer guiding device includes a wafer transfer area 510, which is located in the region where the projections of the third conveyor line 310 and the adjacent second conveyor line 210 overlap in the second direction. The wafer transfer device 400 transfers the substrate from the second conveyor mechanism 211 that enters the wafer transfer area 510 and places the substrate onto the second conveyor mechanism 211. Therefore, the first wafer pick-and-place mechanism 410 only needs to reciprocate along the second direction to transfer the substrate from the third conveyor mechanism to the second conveyor mechanism 211. The movement path of the first wafer pick-and-place mechanism 410 is relatively short, which can improve the substrate transfer efficiency of the wafer transfer device 400.

[0070] The wafer transfer device 400 can be positioned above the wafer transfer area 510 to fully utilize vertical space and reduce the space occupied by the wafer guiding equipment. (Refer to...) Figure 4The wafer transfer device 400 includes a drive module 420 for driving the first wafer pick-and-place mechanism 410 to move. The drive module 420 is not limited to a belt drive structure with a servo motor, a screw drive structure, etc. The drive module 420 can drive the first wafer pick-and-place mechanism 410 to move along a second direction to pick up the substrate on the third conveying mechanism and place it on the second conveying mechanism 211. It is understood that in order to enable the first wafer pick-and-place mechanism 410 to pick up substrates at different positions on the third conveying mechanism, or to require the substrates to be placed at different positions on the second conveying mechanism 211, the drive module 420 can be configured to drive the first wafer pick-and-place mechanism 410 to move along a first direction; or, the first wafer pick-and-place mechanism 410 can move vertically to move closer to or further away from the second conveying mechanism 211 and the third conveying mechanism.

[0071] The first substrate pick-and-place mechanism 410 is configured to include a suction cup. The negative pressure generated by the suction cup can pick up the substrate, enabling the first substrate pick-and-place mechanism 410 to carry the substrate and reduce damage to the substrate.

[0072] In this invention, reference is made to Figure 3 , Figure 5 and Figure 6 The guide plate device also includes a first basket 10 and a second basket 20 as a flow fixture. Multiple first baskets 10 and second baskets 20 are provided. The first end of each first conveying mechanism 111 has a suspended first extension section 112. The first extension section 112 in each first conveying line 110 can be inserted into the first basket 10 and the substrate of each layer in the first basket 10 can be extracted. Similarly, the tail end of each second conveying mechanism 211 has a suspended second extension section 212. The second extension section 212 in each second conveying line 210 can be inserted into the second basket 20 and the substrate is stacked vertically in the second basket 20, with each layer of substrate spaced apart from each other. An operating space 320 is defined between two second conveyor lines 210 located on both sides of the third conveyor line 310 and adjacent to the third conveyor line 310. This operating space 320 is located at the front end of the third conveyor line 310. On the one hand, it facilitates the insertion of the second extension section 212 in the second conveyor line 210 into the second basket 20 to load the substrate into the second basket 20. On the other hand, it increases the distance between the transfer area 510 and the second extension section 212, providing ample operating space 320 for the transfer device 400.

[0073] Furthermore, the first flower basket 10 includes a plurality of spaced first support columns 11, which are parallel to each other and extend vertically. The first flower basket 10 also includes two vertically spaced first backboards 12, with the two ends of the first support columns 11 connected to the two first backboards 12 respectively. The plurality of first support columns 11 define m first conveying cavities 13 with first openings 14. The first conveying cavities 13 are arranged side by side, and the first extension section 112 of the first conveying mechanism 111 can be inserted into the first conveying cavity 13 at the first opening 14. The substrate is accommodated in the first conveying cavity 13. The side of the first support column 11 facing the first conveying cavity 13 has protruding first support teeth 15 arranged vertically at intervals. The first support teeth 15 protruding towards the same conveying cavity and located in the same horizontal plane can support the substrate at different positions on the substrate, so that the substrate remains horizontal in the first conveying cavity 13. The first extension section 112 of each of the m first conveying mechanisms 111 in each first conveying line 110 can be inserted into the m first conveying cavities 13 respectively. When the first conveying line 110 is running, the surface of the first conveying mechanism 111 contacts the lower surface of the substrate, causing the m substrates of the same layer to move with the first extension section 112 and simultaneously pull the m substrates out of the first conveying cavity 13. The m substrates are then further conveyed forward along the first direction with the first conveying line 110.

[0074] Similarly, the second flower basket 20 includes a plurality of spaced second support columns 21, which are parallel to each other and extend vertically. The second flower basket 20 also includes two vertically spaced second backboards 22, with the two ends of the second support columns 21 connected to the two backboards 22 respectively. The plurality of second support columns 21 define a plurality of second conveying cavities 23 with second openings 24. The second conveying cavities 23 are arranged side by side. The second extension section 212 of the second conveying mechanism 211 can be inserted into the second conveying cavity 23 at the second opening 24, and the substrate is accommodated in the second conveying cavity 23. The two sides of the second support columns 21 facing the second conveying cavity 23 have protruding second support teeth 25 arranged vertically at intervals. The second support teeth 25 protruding towards the same two conveying cavities and located in the same two horizontal planes can support the substrate at different positions on the substrate, so that the substrate remains horizontal in the second conveying cavity 23. The second extension sections 212 of m second conveying mechanisms 211 in each second conveying line 210 can be inserted into m second conveying cavities 23 respectively. When the second conveying line 210 is running, the substrates in the same row move synchronously and follow the second extension sections 212 into the second conveying cavities 23. The second extension sections 212 of y second conveying mechanisms 211 are inserted into y second conveying cavities 23 respectively. Each substrate is supported by the second support teeth 25 of the same layer in a second conveying cavity 23, thus completing the loading of y substrates into each layer of the second basket 20 by the second conveying line 210.

[0075] Understandably, multiple first support pillars 11 surround the outer periphery of the first conveying cavity 13 so that different positions of the substrate can be supported by the first support teeth 15, and multiple second support pillars 21 surround the outer periphery of the second conveying cavity 23 so that different positions of the substrate can be supported by the second support teeth 25. In addition, each second conveying cavity 23 has at least one second support pillar 21 at its front end in the first direction. The second support pillars 21 serve to limit the substrate and prevent it from leaking out of the second conveying cavity 23 during loading into the second basket 20.

[0076] In addition, besides the difference in the number of substrates that can be loaded in each layer, the first basket 10 and the second basket 20 can also be designed in other ways according to the process requirements of the first basket 10 and the second basket 20. For example, if the rework process requires the second basket 20 to be carried by the module into the reaction tank containing the reaction solution, in order to ensure that each layer of substrate can react fully, the second support column 21, the second backboard 22, and other structures in the second basket 20 can be provided with flow channels and through holes to promote liquid flow.

[0077] Reference Figure 7The guiding device also includes n first flower basket lifting devices 600. Each first flower basket lifting device 600 is used to lift the first flower basket 10, so that the first flower basket 10 can transport the substrate to the first conveyor line 110 during the lifting process, or complete the positional docking with other mechanisms. Specifically, each first flower basket lifting device 600 includes a first receiving mechanism 610, a first clamping mechanism 620, and a first lifting mechanism 630. The first receiving mechanism 610 is used to receive and hold the first flower basket 10. The first clamping mechanism 620 includes a first clamping member 621 located on the side of the first receiving mechanism 610, which is used to clamp the first flower basket 10. The first lifting mechanism 630 is connected to the first receiving mechanism 610 and is used to drive the first receiving mechanism 610 to lift. After the first flower basket 10 is received by the first receiving mechanism 610, it is supported by the first receiving mechanism 610. The first clamping member 621 can move closer to or further away from the first flower basket 10 to clamp or release the first flower basket 10. When the first clamping member 621 is clamped, the first flower basket 10 is driven by the first lifting mechanism 630 to lift and lower, so that the first flower basket 10 remains stable during the lifting and lowering process. Specifically, the process of the first flower basket 10 outputting substrates to the first conveyor line 110 is as follows: the first flower basket 10 is lifted to the highest position by the first lifting mechanism 630. The substrate at the bottom layer in the first conveying cavity 13 first contacts the first conveying mechanism 111. The substrate at the bottom layer is driven by the first conveying mechanism 111 to leave the first conveying cavity 13 from the first opening 14 and is further conveyed forward. At this time, the first lifting mechanism 630 drives the first flower basket 10 to move down one grid position. One grid position is the distance between the substrates of the adjacent layer or the first support teeth 15. The substrate of the upper layer moves down and is connected to the first conveying mechanism 111, and is then extracted by the first conveying mechanism 111. By repeating the descent action of the first flower basket 10, the first conveying mechanism 111 can extract the substrates in the first conveying cavity 13 layer by layer, completing the transfer of the substrates in the first flower basket 10 to the first conveyor line 110. Moreover, the m first conveying mechanisms 111 in each first conveyor line 110 simultaneously contact the m substrates of the same layer in the first conveying cavity 13, and can extract m substrates each time.

[0078] Furthermore, the first receiving mechanism 610 includes a belt conveyor structure for receiving the first flower basket 10 conveyed from the previous process, and conveying the first flower basket 10 out of the first flower basket lifting device 600 after the first flower basket 10 is unloaded; the first flower basket lifting device 600 also includes a first blocking member 640, which is located at the end of the first receiving mechanism 610 in the conveying direction. When the first flower basket 10 moves along the first receiving mechanism 610, the first blocking member 640 stops the first flower basket 10, thereby limiting the conveying of the first flower basket 10; the first clamping member 621 is located on the side of the first receiving mechanism 610 in the conveying direction and is configured to move relative to the first flower basket 10 to clamp or release the first flower basket 10. The movement of the first clamping member 621 is not limited to being driven by a screw mechanism, a cylinder, or an electric cylinder. The first flower basket lifting device 600 also includes a first basket pressing structure 650. The first basket pressing structure 650 is used to press the first flower basket 10 from the top after it is stopped and clamped by the first clamping member 621, thus limiting the upper and lower ends of the first flower basket 10 and reducing tilting and swaying during lifting. This ensures stable cooperation between the first flower basket 10 and the first conveyor line 110. The first basket pressing structure 650 can reciprocate vertically, and its movement is not limited to being driven by a screw mechanism, cylinder, or electric cylinder. The first flower basket lifting device 600 also includes a first lifting frame 660. The first basket pressing structure 650, the first receiving mechanism 610, and the first clamping mechanism 620 are all mounted on the first lifting frame 660. The first lifting mechanism 630 is connected to the first lifting frame 660 and drives the first lifting frame 660 to lift. The lifting of the first basket pressing structure 650 is not limited to being driven by a screw mechanism, cylinder, or electric cylinder.

[0079] Reference Figure 8The guide plate device also includes x second flower basket lifting devices 700. The second flower basket lifting devices 700 are used to lift the second flower basket 20, so that the second flower basket 20 receives the substrate conveyed by the second conveyor line 210 during the lifting process, or completes positional docking with other mechanisms. Specifically, the second flower basket lifting device 700 includes a second receiving mechanism 710, a second clamping mechanism 720, and a second lifting mechanism 730. The second receiving mechanism 710 is used to receive and hold the second flower basket 20. The second clamping mechanism 720 includes a second clamping member 721 located on the side of the second receiving mechanism 710, which is used to clamp the second flower basket 20. The second lifting mechanism 730 is connected to the second receiving mechanism 710 and is used to drive the second receiving mechanism 710 to lift. After the second flower basket 20 is received by the second receiving mechanism 710, it is supported by the second receiving mechanism 710. The second clamping member 721 can approach or move away from the second flower basket 20 to clamp or release the second flower basket 20. When the second flower basket 20 is clamped by the second clamping member 721, it is driven by the second lifting mechanism 730 to lift and lower, so that the second flower basket 20 remains stable during the lifting and lowering process. Specifically, the process of the second conveyor line 210 loading the substrate into the second flower basket 20 is as follows: When the second flower basket 20 is at its lowest position, the second conveyor line 210 first conveys the substrate to the uppermost second support tooth 25 of the second flower basket 20. After the substrate follows the second protrusion and enters the second conveying cavity through the second opening 24, the substrate is supported by the uppermost second support tooth 25. At this time, the second lifting mechanism 730 drives the second flower basket 20 to rise, and the substrate disengages from the second conveyor mechanism 211, completing the loading of this layer of substrate into the second flower basket 20; the second flower basket 20 is loaded in a single operation. The lifting distance is the distance between the substrates of adjacent layers or the second support teeth 25. As subsequent substrates continuously enter the second conveying cavity 23 and repeat the upward movement of the second basket 20, the second conveying line 210 can load the substrates onto the second support teeth 25 of different layers layer by layer, completing the transfer of the substrates from the second conveying line 210 to the second basket 20. Furthermore, each of the y second conveying mechanisms 211 in the second conveying line 210 simultaneously contacts the y substrates of the same layer in the second conveying cavity 23, and can convey y substrates into the second conveying cavity 23 each time.

[0080] Furthermore, the second receiving mechanism 710 includes a belt conveyor structure for receiving the second flower basket 20 conveyed from the previous process, and conveying the second flower basket 20 out of the second flower basket lifting device 700 after the second flower basket 20 is unloaded; the second flower basket lifting device 700 also includes a second blocking member 740, which is located at the end of the second receiving mechanism 710 in the conveying direction. When the second flower basket 20 moves along the second receiving mechanism 710, the second blocking member 740 stops the second flower basket 20, thereby limiting the conveying of the second flower basket 20; the second clamping member 721 is located on the side of the second receiving mechanism 710 in the conveying direction and is configured to move relative to the second flower basket 20 to clamp or release the second flower basket 20. The movement of the second clamping member 721 is not limited to being driven by a screw mechanism, a cylinder, or an electric cylinder. The second flower basket lifting device 700 also includes a second pressing structure 750. The second pressing structure 750 is used to press the second flower basket 20 from the top after it is stopped and clamped by the second clamping member 721, thus limiting the upper and lower ends of the second flower basket 20 and reducing tilting and swaying during lifting. This ensures stable cooperation between the second flower basket 20 and the second conveyor line 210. The second pressing structure 750 can reciprocate vertically, and its movement is not limited to being driven by a screw mechanism, cylinder, or electric cylinder. The second flower basket lifting device 700 also includes a second lifting frame 760. The second pressing structure 750, the second receiving mechanism 710, and the second clamping mechanism 720 are all mounted on the second lifting frame 760. The second lifting mechanism 730 is connected to the second lifting frame 760 and drives the second lifting frame 760 to lift. The lifting of the second pressing structure 750 is not limited to being driven by a screw mechanism, cylinder, or electric cylinder.

[0081] Reference Figure 1 and Figure 9The guiding device also includes n first flower basket conveying devices 800. Each first flower basket conveying device 800 includes a first flower basket conveying mechanism 810 and a first flower basket return mechanism 820 located above the first flower basket conveying mechanism 810. Each first flower basket conveying mechanism 810 is used to convey a fully loaded first flower basket 10 to a first flower basket lifting device 600. The first receiving mechanism 610 in the first flower basket lifting device 600 receives the fully loaded first flower basket 10. During the lifting of the first flower basket 10, the first conveyor line 110 extracts the substrate from the first flower basket 10. After all the substrates in the first flower basket 10 are extracted, the first flower basket 10 is empty. The first flower basket return mechanism 820 is used to receive the empty first flower basket 10 conveyed by the first receiving mechanism 610 in the first flower basket lifting device 600, so as to realize the flow of the fully loaded first flower basket 10 and the empty first flower basket 10. In addition, since the first flower basket 10 is fully loaded and has a certain weight, placing the first flower basket conveying mechanism 810 below the first flower basket return mechanism 820 can reduce the height required to lift the first flower basket 10 to the first flower basket conveying mechanism 810 when loading it, thereby reducing the load on manual labor or the feeding device to place the fully loaded first flower basket 10 to the first flower basket conveying mechanism 810 and improving the convenience of feeding.

[0082] Understandably, the first flower basket conveying device 800 and the first flower basket lifting device 600 are arranged along the first direction. The first flower basket conveying device 800 includes a first belt conveyor mechanism 830, which can be connected to the first receiving mechanism 610 for outputting a fully loaded first flower basket 10 to the first receiving mechanism 610 or receiving an empty first flower basket 10 output by the first receiving mechanism 610. The first flower basket conveying device 800 also includes first guide rails 840 located on both sides of the first belt conveyor mechanism 830. The first guide rails 840 are used to limit and guide the two sides of the first flower basket 10, thereby improving the stability of the first flower basket 10 conveyed within the first flower basket conveying device 800.

[0083] The first flower basket conveying device 800 can be configured to correspond one-to-one with the first flower basket lifting device 600, or the position of the first flower basket 10 in the second direction can be changed by the lateral moving device 900 to facilitate the transfer of the first flower basket 10 between the first flower basket conveying device 800 and the first flower basket lifting device 600. Specifically, refer to... Figure 10The guide plate device also includes a transverse movement device 900, located between the first flower basket conveying device 800 and the first flower basket lifting device 600. The transverse movement device 900 includes a transverse movement structure 910, which receives and conveys the first flower basket 10 along a second direction to move the first flower basket 10 to dock with a different first flower basket lifting device 600. Further, the transverse movement device 900 includes a transverse movement conveying mechanism 920 and a transverse movement clamping mechanism 930. The transverse movement conveying mechanism 920 can be a belt conveyor, installed on the transverse movement structure 910, and used to convey the first flower basket 10 along a first direction. The transverse movement conveying mechanism 920 docks with the first receiving mechanism 610 and, driven by the transverse movement structure 910, moves the first flower basket 10 along the second direction. The transverse movement clamping mechanism 930 limits the movement of the first flower basket 10, ensuring its stability during transverse movement.

[0084] The guide plate device also includes x second flower basket conveying devices 1000, each corresponding to a second flower basket lifting device 700. Each second flower basket conveying device 1000 includes a second flower basket conveying mechanism 1010 and a second flower basket return mechanism 1020 located below the second flower basket conveying mechanism 1010. Each second flower basket conveying mechanism 1010 is used to convey an empty second flower basket 20 to the second flower basket lifting device 700. The second receiving device 700 contains a second receiving device. Mechanism 710 receives the empty second basket 20, and during the lifting and lowering of the second basket 20, the second conveyor line 210 loads substrates into the second basket 20. After substrates are loaded onto each or multiple layers of the second support teeth 25 within the second basket 20, the second basket 20 becomes fully loaded. The second basket return mechanism 1020 receives the fully loaded second basket 20 conveyed by the second receiving mechanism 710 in the second basket lifting device 700, realizing the flow between the fully loaded and empty second baskets 20. In addition, since the fully loaded second basket 20 has a certain weight, placing the second basket conveying mechanism 1010 above the second basket return mechanism 1020 can reduce the height that the second basket 20 needs to descend when unloading from the second basket return mechanism 1020, thereby reducing the load on the manual or loading device unloading the fully loaded second basket 20 onto the second basket conveying mechanism 1010 and improving the ease of unloading.

[0085] Understandably, the second flower basket conveying device 1000 and the second flower basket lifting device 700 are arranged along the second direction and correspond one-to-one. (Refer to...) Figure 11The second flower basket conveying device 1000 includes a second belt conveyor mechanism 1030, which can be connected to the second receiving mechanism 710 for outputting an empty second flower basket 20 to the second receiving mechanism 710 or receiving a fully loaded second flower basket 20 output by the second receiving mechanism 710. The second flower basket conveying device 1000 also includes second guide rails 1040 located on both sides of the second belt conveyor mechanism 1030. The second guide rails 1040 are used to limit and guide both sides of the second flower basket 20 to improve the stability of the second flower basket 20 conveyed in the second flower basket conveying device 1000.

[0086] Reference Figure 1 and Figure 3 The substrate guiding device in this invention also includes a third substrate guiding device 1100, which is used to receive substrates conveyed from or to the second substrate guiding device 200. The substrates conveyed by the third substrate guiding device 1100 to the second substrate guiding device 200 and the substrates conveyed by the first substrate guiding device 100 to the second substrate guiding device 200 can be defective substrates selected from different processes, and can be further reworked by loading the substrates into the second basket 20.

[0087] The third guide plate device 1100 includes x fourth conveyor lines 1110, each fourth conveyor line 1110 including ym fourth conveyor mechanisms 1111. The fourth conveyor lines 1110 are arranged side by side with the first conveyor line 110, forming a guide plate area 520. The fourth conveyor mechanisms 1111 within the fourth conveyor line 1110 and the first conveyor mechanisms 111 can jointly receive the substrate conveyed by the second guide plate device 200 and convey the substrate to the second guide plate device 200. (Refer to...) Figure 12 The third wafer guide device 1100 also includes a second wafer picking and placing mechanism 1120 and a plurality of stacking boxes 1130. Each stacking box 1130 includes y stacking cavities 1131 arranged side by side. The second wafer picking and placing mechanism 1120 is used to pick up y substrates in the stacking box 1130 to the wafer guide area 520, or pick up y substrates in the wafer guide area 520 to the stacking box 1130, thereby realizing the transfer of substrates between the stacking box 1130 in the third wafer guide device 1100 and the second basket 20 in the second wafer guide device 200.

[0088] Specifically, since the number of second conveying mechanisms 211 in the second conveying line 210 is greater than the number of first conveying mechanisms 111 in the first conveying line 110, by setting the fourth conveying line 1110 on the side of the first conveying mechanism 111, and the sum of the number of first conveying mechanisms 111 in each first conveying line 110 and the number of fourth conveying mechanisms 1111 in the fourth conveying line 1110 located on its side is equal to the number of second conveying mechanisms 211 in the second conveying line 210, the first conveying line 110 and the fourth conveying line 1110 are combined and then dock with the second conveying line 210. That is, each row of the combined first conveying line 110 and the fourth conveying line 1110 holds y substrates, and the second substrate picking and placing mechanism 1120 can pick up y substrates in one row at a time and place them into the stacking box 1130 and into the y stacking cavities 1131 in the stacking box 1130 respectively; or pick up y substrates in the stacking box 1130 at a time and place the y substrates in a single row in the guide area 520.

[0089] The stacking box 1130 can be placed on the side of the first wafer guide device 100. The second wafer pick-and-place mechanism 1120 moves along the second direction to transfer the substrate between the stacking box 1130 and the wafer guide area 520. The movement of the second wafer pick-and-place mechanism 1120 can be driven by a lead screw, cylinder, or electric cylinder. Understandably, to shorten the moving path of the second wafer pick-and-place mechanism 1120 and improve wafer transfer efficiency, stacking boxes 1130 can be provided on both sides of the first wafer guide device 100, or the stacking boxes 1130 can be placed between different wafer guide areas 520. (Refer to...) Figure 13 The second substrate pick-up and drop mechanism 1120 is driven by the drive module 1121 to move. The second substrate pick-up and drop mechanism 1120 is configured to include multiple suction cups. The negative pressure generated by the suction cups can pick up the substrate, enabling the first substrate pick-up and drop mechanism 410 to carry the substrate and reduce damage to the substrate.

[0090] It should be noted that the substrates are stacked vertically in the stacking box 1130 and the substrates of adjacent layers are in contact with each other. Therefore, the stacking box 1130 has a large substrate carrying capacity. Transferring the substrates in the second basket 20 to the stacking box 1130 can increase the substrate storage capacity and provide an empty second basket 20, reducing space occupation.

[0091] like Figure 12 The third substrate guiding device 1100 also includes a substrate 1140 and a lifting mechanism 1150. The lifting mechanism 1150 is located below the substrate 1140, and the stacking box 1130 is located above the substrate 1140. The lifting mechanism 1150 is connected to the bottom of the stacking box 1130 and is used to lift the stacking box 1130 upwards by a preset distance so that the second substrate picking and placing mechanism 1120 can adapt to the height of the substrate within the stacking box 1130, picking and placing one layer of substrate at a time. (See reference...) Figure 14The third guide plate device 1100 also includes an air blowing assembly 1160, which includes multiple air knives 1161 disposed on opposite sides of the stacking box 1130. The air knives 1161 blow air toward the stacking cavity 1131, which is connected to the outside. The airflow blown out by the air knives 1161 acts on the two uppermost substrates. When the second pick-and-place mechanism 1120 picks up the uppermost substrate, the airflow from the air knives 1161 can reduce the probability that the second pick-and-place mechanism 1120 will simultaneously remove multiple substrates. In addition, since the lifting mechanism 1150 continuously lifts the stacking box 1130 upward by a preset distance, the air knives 1161 can continuously blow airflow toward the two uppermost substrates.

[0092] Understandably, the substrate 1140 is provided with a through hole for the lifting mechanism 1150 to extend out. The upper end of the lifting mechanism 1150 extends to the top of the substrate 1140, and the lifting mechanism 1150 contacts the bottom of the stacking box 1130, lifting the stacking box 1130 upwards. The lifting mechanism 1150's lifting of the stacking box 1130 is not limited to being driven by a lead screw, cylinder, electric cylinder, or other structures. The stacking box 1130 is circumferentially provided with multiple air knives 1161, the air outlets 1162 of the air knives 1161 facing the stacking box 1130, and capable of blowing airflow onto the substrate from multiple circumferential positions.

[0093] The third guide plate device 1100 also includes a feeding conveyor mechanism 1170, which is connected to the top of the substrate 1140. The stacking box 1130 is installed on the feeding conveyor mechanism 1170 and can move relative to the substrate 1140 in a second direction. The stacking box 1130 has a pick-up and put-out position and a lifting position arranged in the second direction. The stacking box 1130 can reciprocate between the pick-up and put-out position and the lifting position when moving in the second direction. The lifting mechanism 1150 is arranged in the lifting position. The stacking box 1130 can be placed on the feeding conveyor mechanism 1170 at the pick-up and put-out position or taken out from the feeding conveyor mechanism 1170.

[0094] The feeding conveyor mechanism 1170 can be configured as a slide rail 1171 slider structure. For example, the feeding conveyor mechanism 1170 includes a slide rail 1171 and a slide table 1172. The slide table 1172 is slidably connected to the top of the slide rail 1171. The slide rail 1171 is mounted on the top of the base. The stacking box 1130 is placed on the surface of the slide table 1172. When the slide table 1172 moves relative to the slide rail 1171, it can move the stacking box 1130 between the material handling position and the lifting position. Furthermore, a handle can be provided on the slide table 1172 for manual loading and unloading, allowing the operator to hold and push / pull the slide table 1172 to move the stacking box 1130. Understandably, the slide table 1172 is provided with a through hole for the lifting structure to extend out, allowing the lifting structure to contact the bottom surface of the stacking box 1130.

[0095] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments, and various changes can be made within the scope of knowledge possessed by those skilled in the art without departing from the spirit of the present invention. Furthermore, the embodiments of the present invention and the features thereof can be combined with each other unless otherwise specified.

Claims

1. A photovoltaic substrate conductive device, characterized in that, include: The first guide plate device includes n sets of first conveyor lines arranged in parallel. The first conveyor lines are used to convey the substrate carried in the first flower basket. Each first conveyor line is provided with m first conveyor mechanisms arranged in parallel. Each first conveyor mechanism extends along a first direction and is able to place and convey a single substrate along the first direction, where n≥3 and m≥2. The second guide plate device is used to receive the substrate transmitted by the first guide plate device. The second guide plate device includes x sets of second conveyor lines arranged in parallel. The second conveyor lines are used to transmit the substrate to the second flower basket. Each second conveyor line is provided with y second conveyor mechanisms arranged in parallel. Each second conveyor mechanism extends along the first direction and is able to place and convey a single substrate along the first direction, where x < n, y > m, and n*m = x*y, and x, y, m, and n are all positive integers. The transfer device includes a third conveyor line, which includes nx third conveying mechanisms arranged side by side, the third conveying mechanisms being located between adjacent second conveyor lines, and the tail end of the first conveyor line being connected to the head end of the third conveyor line, or the tail end of the first conveyor line being connected to the head end of the second conveyor line. The substrate transfer device includes a first substrate picking and placing mechanism, which is used to pick up a substrate located on the third conveyor line between adjacent second conveyor lines and place the substrate within the adjacent second conveyor line; The photovoltaic substrate guiding device includes a wafer transfer area, which is located in the region where the projection of the third conveyor line and the adjacent second conveyor line overlaps in a second direction, the second direction being perpendicular to the first direction. The wafer transfer device is used to transfer the substrate within the wafer transfer area. The photovoltaic substrate guiding device further includes multiple first flower baskets and multiple second flower baskets. Each first conveying mechanism has a suspended first extension at its head end. The first extension in each first conveying line can be inserted into the first flower basket and the substrate in the first flower basket can be extracted. Each second conveying mechanism has a suspended second extension at its tail end. The second extension in each second conveying line can be inserted into the second flower basket and the substrate is stacked vertically in the second flower basket. An operating space is defined between the second conveying lines located on both sides of the third conveying line and adjacent to the third conveying line. The operating space is located at the front end of the third conveying line.

2. The photovoltaic substrate conductive device according to claim 1, characterized in that, The first flower basket includes a plurality of spaced first support columns, which define m first conveying cavities with first openings. The first conveying cavities are arranged side by side, and the first protruding section is inserted into the first conveying cavity through the first opening. The first support column has protruding first support teeth on the side facing the first conveying cavity and arranged vertically at intervals. The first support teeth are used to support the substrate. The second flower basket includes a plurality of spaced second support columns, which define y second conveying cavities with second openings. The second conveying cavities are arranged side by side, and the second protruding section and the second opening are inserted into the second conveying cavities. The second support columns have protruding second support teeth on the side facing the second conveying cavity and arranged vertically at intervals. The second support teeth are used to support the substrate.

3. The photovoltaic substrate conductive device according to claim 2, characterized in that, The photovoltaic substrate guiding device also includes n first flower basket lifting devices. Each first flower basket lifting device includes a first receiving mechanism, a first clamping mechanism, and a first lifting mechanism. The first receiving mechanism is used to receive and accept the first flower basket. The first clamping mechanism includes a first clamping member located on the side of the first receiving mechanism. The first clamping member is used to clamp the first flower basket. The first lifting mechanism is connected to the first receiving mechanism and is used to drive the first receiving mechanism to lift. The photovoltaic substrate guiding device also includes x second flower basket lifting devices. Each second flower basket lifting device includes a second receiving mechanism, a second clamping mechanism, and a second lifting mechanism. The second receiving mechanism is used to receive and hold the second flower basket. The second clamping mechanism includes a second clamping member located on the side of the second receiving mechanism. The second clamping member is used to clamp the second flower basket. The second lifting mechanism is connected to the second receiving mechanism and is used to drive the second receiving mechanism to lift.

4. The photovoltaic substrate conductive device according to claim 3, characterized in that, The photovoltaic substrate guiding device also includes n first flower basket conveying devices. Each first flower basket conveying device includes a first flower basket conveying mechanism and a first flower basket return mechanism located above the first flower basket conveying mechanism. Each first flower basket conveying mechanism is used to convey a fully loaded first flower basket to the first flower basket lifting device. The first flower basket return mechanism is used to receive an empty first flower basket conveyed by the first flower basket lifting device. The photovoltaic substrate guiding device also includes x second flower basket conveying devices, each corresponding to a second flower basket lifting device. Each second flower basket conveying device includes a second flower basket conveying mechanism and a second flower basket return mechanism located below the second flower basket conveying mechanism. Each second flower basket conveying mechanism is used to convey an empty second flower basket to the second flower basket lifting device, and the second flower basket return mechanism is used to receive a fully loaded second flower basket in the second flower basket lifting device.

5. The photovoltaic substrate conductive device according to claim 4, characterized in that, The photovoltaic substrate guiding device also includes a transverse movement device located between the first flower basket conveying device and the first flower basket lifting device. The transverse movement device includes a transverse movement mechanism for receiving and conveying the first flower basket along a second direction to move the first flower basket to dock with a different first flower basket lifting device. The first direction is perpendicular to the second direction.

6. The photovoltaic substrate guiding device according to any one of claims 1 to 5, characterized in that, The photovoltaic substrate guiding equipment also includes a third guiding device, which includes x fourth conveying lines, each of which includes ym fourth conveying mechanisms. The fourth conveying lines are arranged side by side with the first conveying lines to form a guiding area. The third wafer guide device further includes a second wafer picking and placing mechanism and a plurality of stacking boxes. Each stacking box includes y stacking cavities arranged side by side. The second wafer picking and placing mechanism is used to pick up y substrates in the stacking box and place them into the wafer guide area, or pick up y substrates in the wafer guide area and place them into the stacking box.

7. The photovoltaic substrate conductive device according to claim 6, characterized in that, The third guide plate device further includes a substrate, an air blowing assembly, and a lifting mechanism. The lifting mechanism is located below the substrate, and the stacking box is located above the substrate. The lifting mechanism is connected to the bottom of the stacking box and is used to lift the stacking box upwards by a preset distance. The air blowing assembly includes multiple air knives disposed on opposite sides of the stacking box. The air knives are used to blow air toward the stacking cavity to separate the two uppermost substrates.

8. The photovoltaic substrate conductive device according to claim 7, characterized in that, The third guide plate device further includes a substrate and a feeding conveying mechanism. The feeding conveying mechanism is connected to the top of the substrate, and the stacking box is mounted on the feeding conveying mechanism so that it can move relative to the substrate in a second direction, wherein the first direction is perpendicular to the second direction. The stacking box has a material pick-up and drop-off position and a lifting position arranged along the second direction. The stacking box can reciprocate between the material pick-up and drop-off position and the lifting position. The lifting mechanism is arranged at the lifting position. The stacking box can be placed at the material pick-up and drop-off position on the feeding conveyor mechanism or taken out from the feeding conveyor mechanism.

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