Method for determining optical constants of opaque dielectric films and related products

Abstract

The embodiment of the present application discloses a method for determining the optical constants of an opaque dielectric film and related products, the method comprising: using a measuring light to measure the reflectivity of a material to be measured through a first incident dielectric layer in a first preset angle range to obtain a first reflectivity, and obtaining a first optical refractive index of the first incident dielectric layer, and constructing a first equation according to the first reflectivity, the first optical refractive index, the target optical refractive index of the material to be measured, and a target extinction coefficient; using a measuring light to measure the reflectivity of the material to be measured through a second incident dielectric layer in a second preset angle range to obtain a second reflectivity, and obtaining a second optical refractive index of the second incident dielectric layer, and constructing a second equation according to the second reflectivity, the second optical refractive index, the target optical refractive index, and the target extinction coefficient; combining the first equation and the second equation to determine the target reflectivity and the target extinction coefficient. The embodiment of the present application can improve the calibration efficiency of the optical constants of the film.

Description

Technical Field

[0001] The present application relates to the technical field of optical constant measurement, and in particular to a method for determining the optical constants of an opaque dielectric film and related products. Background Art

[0002] In practical applications, opaque materials (mainly metals and semiconductor materials) are widely used in the field of optics, and can often achieve the purpose of reflection and extinction, for example, beam splitters, Nd mirrors, high-reflection mirrors, etc.

[0003] Optical films prepared under different process conditions often have different optical constants. The optical properties of optical products prepared with this structure will show certain differences. In order to make the optical products achieve the predetermined optical properties, it is often necessary to find optical materials that meet the requirements and calibrate the optical constants of each film, and then perform theoretical calculations to guide the direction of experimental and production optimization. At present, the calibration of the optical constants of each film is relatively complicated and inefficient. Therefore, the problem of how to improve the calibration efficiency of the optical constants of the film needs to be solved urgently. Summary of the invention

[0004] The embodiments of the present application provide a method for determining the optical constants of an opaque dielectric film and related products, which can improve the calibration efficiency of the optical constants of the film.

[0005] In a first aspect, an embodiment of the present application provides a method for determining optical constants of an opaque dielectric film, the method comprising:

[0006] Using measuring light to pass through a first incident medium layer within a first preset angle range to measure the reflectivity of the material to be measured, obtain a first reflectivity, and obtain a first optical refractive index of the first incident medium layer, and construct a first equation according to the first reflectivity, the first optical refractive index, the target optical refractive index of the material to be measured, and the target extinction coefficient; the material to be measured includes an opaque medium film;

[0007] Using the measuring light to pass through a second incident medium layer within a second preset angle range to measure the reflectivity of the material to be measured, obtain a second reflectivity, and obtain a second optical refractive index of the second incident medium layer, and construct a second equation according to the second reflectivity, the second optical refractive index, the target optical refractive index and the target extinction coefficient;

[0008] The first equation and the second equation are combined to determine the target reflectivity and the target extinction coefficient.

[0009] In a second aspect, an embodiment of the present application provides a device for determining optical constants of an opaque dielectric film, the device comprising: a first construction unit, a second construction unit and a determination unit, wherein:

[0010] The first construction unit is used to measure the reflectivity of the material to be measured by using the measuring light through the first incident medium layer in a first preset angle range to obtain a first reflectivity, and obtain the first optical refractive index of the first incident medium layer, and construct a first equation according to the first reflectivity, the first optical refractive index, the target optical refractive index and the target extinction coefficient of the material to be measured; the material to be measured includes an opaque medium film;

[0011] The second construction unit is used to measure the reflectivity of the material to be measured by using the measuring light to pass through a second incident medium layer in a second preset angle range to obtain a second reflectivity, and obtain a second optical refractive index of the second incident medium layer, and construct a second equation according to the second reflectivity, the second optical refractive index, the target optical refractive index and the target extinction coefficient;

[0012] The determination unit is used to determine the target reflectivity and the target extinction coefficient by combining the first equation and the second equation.

[0013] In a third aspect, an embodiment of the present application provides an electronic device, comprising a processor, a memory, a communication interface, and one or more programs, wherein the one or more programs are stored in the memory and configured to be executed by the processor, and the program includes instructions for executing the steps in the first aspect of the embodiment of the present application.

[0014] In a fourth aspect, an embodiment of the present application provides a computer-readable storage medium, wherein the computer-readable storage medium stores a computer program for electronic data exchange, wherein the computer program enables a computer to execute part or all of the steps described in the first aspect of the embodiment of the present application.

[0015] In a fifth aspect, an embodiment of the present application provides a computer program product, wherein the computer program product includes a non-transitory computer-readable storage medium storing a computer program, and the computer program is operable to cause a computer to execute some or all of the steps described in the first aspect of the embodiment of the present application. The computer program product may be a software installation package.

[0016] The implementation of the embodiments of the present application has the following beneficial effects:

[0017] It can be seen that the method for determining the optical constants of the opaque dielectric film and the related products described in the embodiments of the present application use measuring light to measure the reflectivity of the material to be measured through the first incident dielectric layer in a first preset angle range to obtain the first reflectivity, and obtain the first optical refractive index of the first incident dielectric layer, and construct a first equation based on the first reflectivity, the first optical refractive index, the target optical refractive index of the material to be measured, and the target extinction coefficient; the material to be measured includes an opaque dielectric film, and the reflectivity of the material to be measured is measured through the second incident dielectric layer in a second preset angle range to obtain the second reflectivity, and obtain the second optical refractive index of the second incident dielectric layer, and construct a second equation based on the second reflectivity, the second optical refractive index, the target optical refractive index and the target extinction coefficient, and the first equation and the second equation are combined to determine the target reflectivity and the target extinction coefficient. In this way, there is no need to measure multiple angles, and there is no need to perform complex trigonometric functions and complex operations during calculation, which greatly reduces the instrument requirements, has a wider range of application, is simpler to operate and calculate, and improves the calibration efficiency of the optical constants of the film. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0019] Figure 1 It is a flow chart of a method for determining optical constants of an opaque dielectric film provided in an embodiment of the present application;

[0020] Figure 2 This is a schematic diagram of a scene demonstration of a method for determining optical constants of an opaque dielectric film provided in an embodiment of the present application;

[0021] Figure 3 This is a schematic diagram of a scene demonstration of another method for determining the optical constants of an opaque dielectric film provided in an embodiment of the present application;

[0022] Figure 4 This is a schematic diagram of a scene demonstration of another method for determining the optical constants of an opaque dielectric film provided in an embodiment of the present application;

[0023] Figure 5 It is a structural schematic diagram of an electronic device provided in an embodiment of the present application;

[0024] Figure 6 This is a block diagram of the functional units of a device for determining optical constants of an opaque dielectric film provided in an embodiment of the present application. DETAILED DESCRIPTION

[0025] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0026] The terms "first", "second", "third" and "fourth" etc. in the specification and claims of the present application and the drawings are used to distinguish different objects, rather than to describe a specific order. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, system, product or device that includes a series of steps or units is not limited to the listed steps or units, but optionally includes steps or units that are not listed, or optionally includes other steps or units inherent to these processes, methods, products or devices.

[0027] Reference to "embodiments" herein means that a particular feature, structure, or characteristic described in conjunction with the embodiments may be included in at least one embodiment of the present application. The presentation of the phrase at various locations in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0028] In the embodiment of the present application, the electronic device may include: an optical measuring instrument. For example, the optical measuring instrument may include a refractive index measuring instrument.

[0029] In the embodiment of the present application, the opaque dielectric film may be plated on the substrate.

[0030] In the embodiment of the present application, opacity can be understood as: a wavelength or a wavelength range in any electromagnetic wave. If the electromagnetic wave of any wavelength or band propagates a certain distance in the medium to be tested and the loss exceeds 99.99%, it is opaque at that wavelength / band. Among them, any electromagnetic wave may include at least one of the following: microwaves, infrared rays, visible light, ultraviolet rays, etc., which are not limited here, that is, any electromagnetic wave is not limited to visible light.

[0031] In the related technology, when calculating the optical constants of opaque medium films such as metals, the calibration methods usually include ellipsometry, interference fringe method, multi-angle measurement reflectivity calculation, etc. The calculation process is relatively complicated and requires the use of complex numbers, trigonometric functions and other calculation methods. It also has high requirements for measuring instruments and even requires phase measurement, which is cumbersome and inefficient.

[0032] In order to solve the defects in the related art, the embodiment of the present application provides a method for determining the optical constants of an opaque dielectric film, which is as follows:

[0033] Using measuring light to pass through a first incident medium layer within a first preset angle range to measure the reflectivity of the material to be measured, obtain a first reflectivity, and obtain a first optical refractive index of the first incident medium layer, and construct a first equation according to the first reflectivity, the first optical refractive index, the target optical refractive index of the material to be measured, and the target extinction coefficient; the material to be measured includes an opaque medium film;

[0034] Using the measuring light to pass through a second incident medium layer within a second preset angle range to measure the reflectivity of the material to be measured, obtain a second reflectivity, and obtain a second optical refractive index of the second incident medium layer, and construct a second equation according to the second reflectivity, the second optical refractive index, the target optical refractive index and the target extinction coefficient;

[0035] The first equation and the second equation are combined to determine the target reflectivity and the target extinction coefficient.

[0036] It can be seen that the method for determining the optical constants of the opaque dielectric film described in the embodiment of the present application does not require measuring multiple angles, and does not require complex trigonometric functions and complex operations during calculation, which greatly reduces the instrument requirements, has a wider range of applications, is easier to operate and calculate, and improves the calibration efficiency of the optical constants of the film.

[0037] The embodiments of the present application are described in detail below.

[0038] See also Figure 1 , Figure 1 1 is a flow chart of a method for determining optical constants of an opaque dielectric film provided in an embodiment of the present application. As shown in the figure, the method for determining optical constants of an opaque dielectric film includes:

[0039] 101. Measure the reflectivity of a material to be measured by passing a measuring light through a first incident medium layer within a first preset angle range to obtain a first reflectivity, and obtain a first optical refractive index of the first incident medium layer, and construct a first equation according to the first reflectivity, the first optical refractive index, a target optical refractive index of the material to be measured, and a target extinction coefficient; the material to be measured includes an opaque medium film.

[0040] The first incident medium layer can be preset or set by default by the system. The first incident medium layer can include one or more layers. The first incident medium layer can include at least one of the following: vacuum (air), water, glass, other transparent materials, etc., which are not limited here. The material to be tested can include an opaque medium film. Other transparent materials can include at least one of the following: organic glass (PC / PMMA), quartz (silicon dioxide (S i O 2 )), sapphire (aluminum oxide (AL 2 O 3 )) and so on, no limitation is given here.

[0041] In the embodiment of the present application, it can be considered that the extinction coefficient of any transparent incident medium (at the wavelength / band to be measured) is 0, and the thickness of any transparent incident medium satisfies the incoherent superposition condition required by the light source.

[0042] In the embodiment of the present application, the material to be tested can be prepared into a thin film before measurement, but is not limited to the thin film state. In specific implementation, the entire thin film layer may not be required to have uniform composition, but only the local (thickness requirement) of the interface to be tested may have uniform composition, that is, the thickness requirement satisfies the opacity.

[0043] In a specific implementation, the reflectivity of the material to be measured can be measured by using the measuring light through the first incident medium layer in a first preset angle range to obtain the first reflectivity, and the first optical refractive index of the first incident medium layer is obtained, and the first equation is constructed according to the first reflectivity, the first optical refractive index, the target optical refractive index of the material to be measured, and the target extinction coefficient, that is, the first reflectivity, the first optical refractive index, the target optical refractive index of the material to be measured, and the target extinction coefficient satisfy a certain equation relationship. Among them, the first reflectivity and the first optical refractive index are known quantities, and the target optical refractive index and the target extinction coefficient are unknown quantities.

[0044] Optionally, the opaque dielectric film includes at least one of the following: an organic film, an inorganic film;

[0045] The organic film includes at least one of the following: polypropylene film, polyester film, polyphenylene ether film, polycarbonate film, polyphenylene naphthalene film, polyvinylidene fluoride film; the inorganic film includes metal film, semiconductor film, other inorganic films.

[0046] In the embodiment of the present application, the opaque dielectric film includes at least one of the following: an organic film and an inorganic film. Among them, the organic film includes at least one of the following: a polypropylene film, a polyester film, a polyphenylene ether film, a polycarbonate film, a polyphenylene naphthalene film, a polyvinylidene fluoride film, etc., which are not limited here. The organic film may also include other biological films, such as plant films. The inorganic film includes a metal film, a semiconductor film, etc., which are not limited here. The inorganic film may also include other inorganic films, which are not limited here.

[0047] 102. Measure the reflectivity of the material to be measured by using the measuring light to pass through a second incident medium layer within a second preset angle range to obtain a second reflectivity, and obtain a second optical refractive index of the second incident medium layer, and construct a second equation according to the second reflectivity, the second optical refractive index, the target optical refractive index and the target extinction coefficient.

[0048] The second incident medium layer may be preset or set by system default, and the second incident medium layer may include one or more layers. The second incident medium layer may include at least one of the following: air, water, glass, etc., which are not limited here.

[0049] The thickness of the first incident medium layer can satisfy the incoherent superposition of light reflections from the front and rear surfaces (two interfaces), or the thickness of the second incident medium layer can satisfy the incoherent superposition of light reflections from the front and rear surfaces.

[0050] In an embodiment of the present application, the reflectivity of the material to be measured can be measured by using measuring light through a second incident medium layer within a second preset angle range to obtain a second reflectivity, and the second optical refractive index of the second incident medium layer is obtained. A second equation is constructed according to the second reflectivity, the second optical refractive index, the target optical refractive index and the target extinction coefficient, that is, the second reflectivity, the second optical refractive index, the target optical refractive index and the target extinction coefficient satisfy a certain equation relationship, wherein the second reflectivity and the second optical refractive index are known quantities, and the target optical refractive index and the target extinction coefficient are unknown quantities.

[0051] Optionally, the first preset range includes 0 to 10°, and the second preset range includes 0 to 10°.

[0052] The first preset range and the second preset range can be preset or set by the system by default, and the first preset range and the second preset range can be the same or different. For example, the first preset range may include 0-10°, and the second preset range may include 0-10°. The reflectivity of the plane of the opaque material is measured at an angle of 0-10° (near 0°), and R(0°)≈R(10°).

[0053] 103. Determine the target reflectivity and the target extinction coefficient by combining the first equation and the second equation.

[0054] Since both the target optical refractive index and the target extinction coefficient are unknown quantities, two equations and two unknown quantities can be combined to form two equations, that is, the first equation and the second equation can be combined to determine the target reflectivity and the target extinction coefficient.

[0055] In the embodiment of the present application, two optical constants about the material to be tested, namely, the equations of the optical refractive index and the extinction coefficient, are obtained by adding and replacing the incident medium, and the optical refractive index and the extinction coefficient are calculated. Among them, all interfaces between the light source and the film to be tested (opaque medium film) can be smooth planes / diffuse reflection can be ignored.

[0056] Optionally, the above step 101, constructing a first equation according to the first reflectivity, the first optical refractive index, the target optical refractive index and the target extinction coefficient of the material to be measured, may include the following steps:

[0057] The first equation is constructed as follows:

[0058]

[0059] Among them, R 1 represents the first reflectivity, n 0 represents the first optical refractive index, n x represents the target optical refractive index, k x represents the extinction coefficient;

[0060] Then, the above step 102, constructing the second equation according to the second reflectivity, the second optical refractive index, the target optical refractive index and the target extinction coefficient, may include the following steps:

[0061] The second equation is constructed as follows:

[0062]

[0063] Among them, R 1 ' represents the second reflectivity, n 0 ' represents the second optical refractive index, n x represents the target optical refractive index, k x represents the extinction coefficient.

[0064] Specifically, combining the first equation and the second equation, we get:

[0065]

[0066] Remove the denominator from the first equation and we get:

[0067]

[0068] Remove the denominator from the second equation and we get:

[0069]

[0070] remove Then solve the quadratic equation:

[0071]

[0072] Next, n x Substituting into the first or second equation, we can calculate k x .

[0073] Optionally, when the film surface of the opaque dielectric film is smooth without diffuse reflection loss and is not oxidized, the first incident dielectric layer includes a first incident medium, and the second incident dielectric layer includes a second incident medium.

[0074] In a specific implementation, when the film surface of the opaque dielectric film is smooth without diffuse reflection loss and is not oxidized, the first incident dielectric layer may include a first incident dielectric, and the second incident dielectric layer may include a second incident dielectric.

[0075] For example, refer to Figure 2 As shown, when the surface of the opaque medium film to be measured is smooth, has no diffuse reflection loss and has uniform composition, for example, the incident medium 1 is air (vacuum), and the optical refractive index n 1 =1.0, the incident medium 2 is water, the optical refractive index n 2 =1.33.

[0076] Then the first equation above can be adaptively modified as follows:

[0077]

[0078] Then the second equation above can be adaptively modified as follows:

[0079]

[0080] Among them, r 1x It is expressed as the reflectivity of the interface between the incident medium 1 and the opaque medium film, r 2x It is expressed as the reflectivity of the interface between the incident medium 2 and the opaque medium film. 1 =r 1x , R 1 ′=r 2x .

[0081] At this time, by combining the first equation and the second equation, we get:

[0082]

[0083] The optical refractive index n of the opaque medium film to be measured can be solved x , and the extinction coefficient k x .

[0084] Optionally, the second incident medium layer includes the first incident medium and the second incident medium, and the incident path of the measurement light for the second incident medium layer is light, the first incident medium, the second incident medium and the opaque medium film in sequence; wherein,

[0085] Equivalent to

[0086] Among them, n 1 represents the optical refractive index of the second incident medium.

[0087] Among them, when the surface of the opaque medium film to be measured is smooth, has no diffuse reflection loss and has uniform composition, the second incident medium layer includes the first incident medium and the second incident medium, and the incident path of the measuring light for the second incident medium layer is light, the first incident medium, the second incident medium and the opaque medium film in sequence.

[0088] For example, refer to Figure 3 As shown in the figure, when the surface of the opaque medium film to be measured is smooth, has no diffuse reflection loss and has uniform composition, the incident medium 1 is air, and the measured reflectivity is r 1x , we get the first equation, which is as follows:

[0089]

[0090] The incident medium 2 is the second incident medium glass, and the incident medium 0 is the first incident medium air. The optical path is instrument light source → (incident) medium 0 → (incident) medium 2 → film → (exit) medium 2 → (exit) medium 0 → light receiving end. The measured reflectivity is R 2 , we get the second equation, which is as follows:

[0091]

[0092] Among them, n 0 is the refractive index of the incident medium 0, n 1 is the optical refractive index of the incident medium 1, n 2 is the optical refractive index of the incident medium 2, n 0 =n 1 . r 1xIt is expressed as the reflectivity of the interface between the incident medium 1 and the opaque medium film, r 2x It is expressed as the reflectivity of the interface between the incident medium 2 and the opaque medium film.

[0093] At this time, by combining the first equation and the second equation, we get:

[0094]

[0095] Among them, n 0 =n 1 .

[0096] The optical refractive index n of the opaque medium film to be measured can be solved x , and the extinction coefficient k x .

[0097] Optionally, when the film surface of the opaque medium film is not smooth or is oxidized, the first incident medium layer includes a first incident medium and a second incident medium, and the incident path of the measurement light for the first incident medium layer is light, the first incident medium, the second incident medium and the opaque medium film in sequence, wherein:

[0098] Equivalent to

[0099] in, n 1 represents the optical refractive index of the second incident medium;

[0100] Wherein, the second incident medium layer includes the first incident medium and the third incident medium, and the incident path of the measuring light is light, the first incident medium, the third incident medium and the opaque medium film in sequence;

[0101] Equivalent to

[0102] in, n 1 ' is the optical refractive index of the third incident medium.

[0103] For example, refer to Figure 4 As shown, when the surface of the opaque medium film to be measured is not smooth or oxidized, and the film after removing the oxidized layer is opaque and has uniform composition, the incident medium 1 is the second incident medium glass, and the incident medium 0 is the first incident medium air. The optical path is instrument light source (measurement light) → (incident) incident medium 0 → (incident) incident medium 1 → opaque medium film → (exit) incident medium 1 → (exit) incident medium 0 → light receiving end, and the measured reflectivity is R 1 , we obtain the first equation:

[0104]

[0105] Among them, n 0 is the optical refractive index of the incident medium 0, n 1 is the optical refractive index of the incident medium 1.

[0106] The incident medium 2 is sapphire, and the incident medium 0 is the first incident medium air. The optical path is instrument light source (measurement light) → (incident) incident medium 0 → (incident) incident medium 2 → opaque medium film → (exit) incident medium 2 → (exit) incident medium 0 → light receiving end. The measured reflectivity is R 2 , and obtain the second equation:

[0107]

[0108] Among them, n 0 is the optical refractive index of the incident medium 0, n 2 is the optical refractive index of the incident medium 2; r 1x It is expressed as the reflectivity of the interface between the incident medium 1 and the opaque medium film, r 2x It is expressed as the reflectivity of the interface between the incident medium 2 and the opaque medium film.

[0109] At this time, through the simultaneous equations:

[0110]

[0111] The optical refractive index n of the opaque medium film to be measured can be solved x , and the extinction coefficient k x .

[0112] Optionally, the opaque dielectric film has a thickness that completely blocks light.

[0113] In the embodiment of the present application, the thickness of the opaque dielectric film is completely light-shielding, that is,

[0114] Optionally, the thickness of the opaque medium film is such that complete light shielding is achieved by:

[0115]

[0116] Where, I represents the outgoing light intensity, I 0 represents the incident light intensity, k x represents the extinction coefficient of the opaque dielectric film, d is the film thickness of the opaque dielectric film, and λ represents the wavelength of the measurement light; when When the light intensity is less than a preset threshold, the opaque dielectric film completely blocks light.

[0117] In the embodiment of the present application, the preset threshold value may be preset or the system defaults, for example, the preset threshold value may include 0.000001. When it is less than 0.000001, the opaque dielectric film can be considered to be completely light-blocking.

[0118] In the embodiments of the present application, the reflectivity can be measured by using a reflectivity tester, and the incident angle of the reflectivity tester can be 0-10°.

[0119] It can be seen that the method for determining the optical constants of the opaque dielectric film described in the embodiment of the present application uses measuring light to measure the reflectivity of the material to be measured through the first incident dielectric layer within a first preset angle range to obtain the first reflectivity, and obtain the first optical refractive index of the first incident dielectric layer, and construct a first equation based on the first reflectivity, the first optical refractive index, the target optical refractive index of the material to be measured, and the target extinction coefficient; the material to be measured includes an opaque dielectric film, and the reflectivity of the material to be measured is measured through the second incident dielectric layer within a second preset angle range to obtain the second reflectivity, and obtain the second optical refractive index of the second incident dielectric layer, and construct a second equation based on the second reflectivity, the second optical refractive index, the target optical refractive index and the target extinction coefficient, and the first equation and the second equation are combined to determine the target reflectivity and the target extinction coefficient. In this way, there is no need to measure multiple angles, and there is no need to perform complex trigonometric functions and complex operations during calculation, which greatly reduces the instrument requirements, has a wider range of application, is simpler to operate and calculate, and improves the calibration efficiency of the optical constants of the film.

[0120] In accordance with the above embodiment, please refer to Figure 5 , Figure 5 : is a structural diagram of an electronic device provided in an embodiment of the present application. As shown in the figure, the electronic device includes a processor, a memory, a communication interface, and one or more programs. The one or more programs are stored in the memory and configured to be executed by the processor. In the embodiment of the present application, the program includes instructions for executing the following steps:

[0121] Using measuring light to pass through a first incident medium layer within a first preset angle range to measure the reflectivity of the material to be measured, obtain a first reflectivity, and obtain a first optical refractive index of the first incident medium layer, and construct a first equation according to the first reflectivity, the first optical refractive index, the target optical refractive index of the material to be measured, and the target extinction coefficient; the material to be measured includes an opaque medium film;

[0122] Using the measuring light to pass through a second incident medium layer within a second preset angle range to measure the reflectivity of the material to be measured, obtain a second reflectivity, and obtain a second optical refractive index of the second incident medium layer, and construct a second equation according to the second reflectivity, the second optical refractive index, the target optical refractive index and the target extinction coefficient;

[0123] The first equation and the second equation are combined to determine the target reflectivity and the target extinction coefficient.

[0124] Optionally, in the aspect of constructing the first equation according to the first reflectivity, the first optical refractive index, the target optical refractive index and the target extinction coefficient of the material to be measured, the program includes instructions for executing the following steps:

[0125] The first equation is constructed as follows:

[0126]

[0127] Among them, R 1 represents the first reflectivity, n 0 represents the first optical refractive index, n x represents the target optical refractive index, k x represents the extinction coefficient;

[0128] The constructing a second equation according to the second reflectivity, the second optical refractive index, the target optical refractive index and the target extinction coefficient comprises:

[0129] The second equation is constructed as follows:

[0130]

[0131] Among them, R 1 ' represents the second reflectivity, n 0 ' represents the second optical refractive index, n x represents the target optical refractive index, k x represents the extinction coefficient.

[0132] Optionally, when the film surface of the opaque dielectric film is smooth without diffuse reflection loss and is not oxidized, the first incident dielectric layer includes a first incident medium, and the second incident dielectric layer includes a second incident medium.

[0133] Optionally, the second incident medium layer includes the first incident medium and the second incident medium, and the incident path of the measurement light for the second incident medium layer is light, the first incident medium, the second incident medium and the opaque medium film in sequence; wherein,

[0134] Equivalent to

[0135] Among them, n 1 represents the optical refractive index of the second incident medium.

[0136] Optionally, when the film surface of the opaque medium film is not smooth or is oxidized, the first incident medium layer includes a first incident medium and a second incident medium, and the incident path of the measurement light for the first incident medium layer is light, the first incident medium, the second incident medium and the opaque medium film in sequence, wherein:

[0137] Equivalent to

[0138] in, n 1 represents the optical refractive index of the second incident medium;

[0139] Wherein, the second incident medium layer includes the first incident medium and the third incident medium, and the incident path of the measuring light is light, the first incident medium, the third incident medium and the opaque medium film in sequence;

[0140] Equivalent to

[0141] in, n 1 ' is the optical refractive index of the third incident medium.

[0142] Optionally, the opaque dielectric film has a thickness that completely blocks light.

[0143] Optionally, the thickness of the opaque medium film is such that complete light shielding is achieved by:

[0144]

[0145] Where, I represents the outgoing light intensity, I 0 represents the incident light intensity, k x represents the extinction coefficient of the opaque dielectric film, d is the film thickness of the opaque dielectric film, and λ represents the wavelength of the measurement light; when When the light intensity is less than a preset threshold, the opaque dielectric film completely blocks light.

[0146] Optionally, the first preset range includes 0 to 10°, and the second preset range includes 0 to 10°.

[0147] Optionally, the opaque dielectric film includes at least one of the following: an organic film, an inorganic film;

[0148] Wherein, the organic film includes at least one of the following: polypropylene film, polyester film, polyphenylene ether film, polycarbonate film, polyphenylene naphthalene film, polyvinylidene fluoride film; the inorganic film includes metal film and semiconductor film.

[0149] It can be seen that the electronic device described in the embodiment of the present application measures the reflectivity of the material to be measured by using the measuring light through the first incident medium layer in a first preset angle range to obtain the first reflectivity, and obtains the first optical refractive index of the first incident medium layer, and constructs a first equation according to the first reflectivity, the first optical refractive index, the target optical refractive index of the material to be measured, and the target extinction coefficient; the material to be measured includes an opaque medium film, and measures the reflectivity of the material to be measured by using the measuring light through the second incident medium layer in a second preset angle range to obtain the second reflectivity, and obtains the second optical refractive index of the second incident medium layer, and constructs a second equation according to the second reflectivity, the second optical refractive index, the target optical refractive index and the target extinction coefficient, and combines the first equation and the second equation to determine the target reflectivity and the target extinction coefficient. In this way, there is no need to measure multiple angles, and there is no need to perform complex trigonometric functions and complex operations during calculation, which greatly reduces the instrument requirements, has a wider range of application, is easier to operate and calculate, and improves the calibration efficiency of the optical constants of the film.

[0150] Figure 6 6 is a functional unit block diagram of an optical constant determination device 600 for an opaque dielectric film involved in an embodiment of the present application. The optical constant determination device 600 for an opaque dielectric film comprises: a first construction unit 601, a second construction unit 602 and a determination unit 603, wherein:

[0151] The first construction unit 601 is used to measure the reflectivity of the material to be measured by using the measuring light through the first incident medium layer in a first preset angle range to obtain a first reflectivity, and obtain the first optical refractive index of the first incident medium layer, and construct a first equation according to the first reflectivity, the first optical refractive index, the target optical refractive index and the target extinction coefficient of the material to be measured; the material to be measured includes an opaque medium film;

[0152] The second construction unit 602 is used to measure the reflectivity of the material to be measured by using the measuring light to pass through a second incident medium layer in a second preset angle range to obtain a second reflectivity, and obtain a second optical refractive index of the second incident medium layer, and construct a second equation according to the second reflectivity, the second optical refractive index, the target optical refractive index and the target extinction coefficient;

[0153] The determination unit 603 is used to determine the target reflectivity and the target extinction coefficient by combining the first equation and the second equation.

[0154] Optionally, in the aspect of constructing the first equation according to the first reflectivity, the first optical refractive index, the target optical refractive index and the target extinction coefficient of the material to be measured, the program includes instructions for executing the following steps:

[0155] The first equation is constructed as follows:

[0156]

[0157] Among them, R 1 represents the first reflectivity, n 0 represents the first optical refractive index, n x represents the target optical refractive index, k x represents the extinction coefficient;

[0158] The constructing a second equation according to the second reflectivity, the second optical refractive index, the target optical refractive index and the target extinction coefficient comprises:

[0159] The second equation is constructed as follows:

[0160]

[0161] Among them, R 1 ' represents the second reflectivity, n 0 ' represents the second optical refractive index, n x represents the target optical refractive index, k x represents the extinction coefficient.

[0162] Optionally, when the film surface of the opaque dielectric film is smooth without diffuse reflection loss and is not oxidized, the first incident dielectric layer includes a first incident medium, and the second incident dielectric layer includes a second incident medium.

[0163] Optionally, the second incident medium layer includes the first incident medium and the second incident medium, and the incident path of the measurement light for the second incident medium layer is light, the first incident medium, the second incident medium and the opaque medium film in sequence; wherein,

[0164] Equivalent to

[0165] Among them, n 1 represents the optical refractive index of the second incident medium.

[0166] Optionally, when the film surface of the opaque medium film is not smooth or is oxidized, the first incident medium layer includes a first incident medium and a second incident medium, and the incident path of the measurement light for the first incident medium layer is light, the first incident medium, the second incident medium and the opaque medium film in sequence, wherein:

[0167] Equivalent to

[0168] in, n 1 represents the optical refractive index of the second incident medium;

[0169] Wherein, the second incident medium layer includes the first incident medium and the third incident medium, and the incident path of the measuring light is light, the first incident medium, the third incident medium and the opaque medium film in sequence;

[0170] Equivalent to

[0171] in, n 1 ' is the optical refractive index of the third incident medium.

[0172] Optionally, the opaque dielectric film has a thickness that completely blocks light.

[0173] Optionally, the thickness of the opaque medium film is such that complete light shielding is achieved by:

[0174]

[0175] Where, I represents the outgoing light intensity, I 0 represents the incident light intensity, k x represents the extinction coefficient of the opaque dielectric film, d is the film thickness of the opaque dielectric film, and λ represents the wavelength of the measurement light; when When the light intensity is less than a preset threshold, the opaque dielectric film completely blocks light.

[0176] Optionally, the first preset range includes 0 to 10°, and the second preset range includes 0 to 10°.

[0177] Optionally, the opaque dielectric film includes at least one of the following: an organic film, an inorganic film;

[0178] Wherein, the organic film includes at least one of the following: polypropylene film, polyester film, polyphenylene ether film, polycarbonate film, polyphenylene naphthalene film, polyvinylidene fluoride film; the inorganic film includes metal film and semiconductor film.

[0179] It can be seen that the optical constant determination device of the opaque dielectric film described in the embodiment of the present application measures the reflectivity of the material to be measured by passing the measuring light through the first incident dielectric layer within a first preset angle range to obtain the first reflectivity, and obtains the first optical refractive index of the first incident dielectric layer, and constructs a first equation according to the first reflectivity, the first optical refractive index, the target optical refractive index of the material to be measured, and the target extinction coefficient; the material to be measured includes an opaque dielectric film, and measures the reflectivity of the material to be measured by passing the measuring light through the second incident dielectric layer within a second preset angle range to obtain the second reflectivity, and obtains the second optical refractive index of the second incident dielectric layer, and constructs a second equation according to the second reflectivity, the second optical refractive index, the target optical refractive index and the target extinction coefficient, and combines the first equation and the second equation to determine the target reflectivity and the target extinction coefficient. In this way, there is no need to measure multiple angles, and there is no need to perform complex trigonometric functions and complex operations during calculation, which greatly reduces the instrument requirements, has a wider range of application, is simpler to operate and calculate, and improves the calibration efficiency of the optical constants of the film.

[0180] It can be understood that the functions of each program module of the device for determining the optical constants of an opaque dielectric film of this embodiment can be specifically implemented according to the method in the above method embodiment. The specific implementation process can refer to the relevant description of the above method embodiment, which will not be repeated here.

[0181] An embodiment of the present application also provides a computer storage medium, wherein the computer storage medium stores a computer program for electronic data exchange, wherein the computer program enables a computer to execute part or all of the steps of any method described in the above method embodiments, and the above computer includes an electronic device.

[0182] The embodiment of the present application also provides a computer program product, the computer program product includes a non-transitory computer-readable storage medium storing a computer program, the computer program is operable to cause a computer to execute some or all of the steps of any method described in the method embodiment. The computer program product may be a software installation package, and the computer includes an electronic device.

[0183] It should be noted that, for the aforementioned method embodiments, for the sake of simplicity, they are all expressed as a series of action combinations, but those skilled in the art should be aware that the present application is not limited by the described order of actions, because according to the present application, certain steps can be performed in other orders or simultaneously. Secondly, those skilled in the art should also be aware that the embodiments described in the specification are all preferred embodiments, and the actions and modules involved are not necessarily required by the present application.

[0184] In the above embodiments, the description of each embodiment has its own emphasis. For parts that are not described in detail in a certain embodiment, reference can be made to the relevant descriptions of other embodiments.

[0185] In the several embodiments provided in the present application, it should be understood that the disclosed device can be implemented in other ways. For example, the device embodiments described above are only schematic, such as the division of the above-mentioned units, which is only a logical function division. There may be other division methods in actual implementation, such as multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be through some interfaces, and the indirect coupling or communication connection of devices or units can be electrical or other forms.

[0186] The units described above as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed on multiple network units. Some or all of the units may be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0187] In addition, each functional unit in each embodiment of the present application may be integrated into one processing unit, or each unit may exist physically separately, or two or more units may be integrated into one unit. The above-mentioned integrated unit may be implemented in the form of hardware or in the form of software functional units.

[0188] If the above-mentioned integrated unit is implemented in the form of a software functional unit and sold or used as an independent product, it can be stored in a computer-readable memory. Based on this understanding, the technical solution of the present application is essentially or the part that contributes to the prior art or all or part of the technical solution can be embodied in the form of a software product, and the computer software product is stored in a memory, including a number of instructions to enable a computer device (which can be a personal computer, server or network device, etc.) to perform all or part of the steps of the above-mentioned methods of each embodiment of the present application. The aforementioned memory includes: U disk, read-only memory (ROM, Read-Only Memory), random access memory (RAM, Random Access Memory), mobile hard disk, disk or CD-ROM and other media that can store program codes.

[0189] A person skilled in the art can understand that all or part of the steps in the various methods of the above embodiments can be completed by instructing related hardware through a program, and the program can be stored in a computer-readable memory, and the memory can include: a flash drive, a read-only memory (English: Read-Only Memory, abbreviated as: ROM), a random access memory (English: Random Access Memory, abbreviated as: RAM), a magnetic disk or an optical disk, etc.

[0190] The embodiments of the present application are introduced in detail above. Specific examples are used in this article to illustrate the principles and implementation methods of the present application. The description of the above embodiments is only used to help understand the method and core idea of ​​the present application. At the same time, for general technical personnel in this field, according to the idea of ​​the present application, there will be changes in the specific implementation method and application scope. In summary, the content of this specification should not be understood as a limitation on the present application.

Claims

1. A method for determining the optical constants of an opaque medium, characterized in that: The method comprises: Using measuring light to pass through a first incident medium layer within a first preset angle range to measure the reflectivity of the material to be measured, obtain a first reflectivity, and obtain a first optical refractive index of the first incident medium layer, and construct a first equation according to the first reflectivity, the first optical refractive index, the target optical refractive index of the material to be measured, and the target extinction coefficient; the material to be measured includes an opaque medium film; Using the measuring light to pass through a second incident medium layer within a second preset angle range to measure the reflectivity of the material to be measured, obtain a second reflectivity, and obtain a second optical refractive index of the second incident medium layer, and construct a second equation according to the second reflectivity, the second optical refractive index, the target optical refractive index and the target extinction coefficient; Determine the target reflectivity and the target extinction coefficient by combining the first equation and the second equation; Wherein, constructing a first equation according to the first reflectivity, the first optical refractive index, the target optical refractive index and the target extinction coefficient of the material to be measured comprises: The first equation is constructed as follows: Wherein, R1 represents the first reflectivity, n0 represents the first optical refractive index, and n x represents the target optical refractive index, k x represents the extinction coefficient; The constructing a second equation according to the second reflectivity, the second optical refractive index, the target optical refractive index and the target extinction coefficient comprises: The second equation is constructed as follows: Wherein, R1′ represents the second reflectivity, n0′ represents the second optical refractive index, and n x represents the target optical refractive index, k x represents the extinction coefficient.

2. The method according to claim 1, characterized in that When the film surface of the opaque medium film is smooth without diffuse reflection loss and is not oxidized, the first incident medium layer includes a first incident medium, and the second incident medium layer includes a second incident medium.

3. The method according to claim 2, characterized in that The second incident medium layer includes the first incident medium and the second incident medium, and the incident path of the measuring light for the second incident medium layer is light, the first incident medium, the second incident medium and the opaque medium film in sequence; wherein, Equivalent to Wherein, n1 represents the optical refractive index of the second incident medium.

4. The method according to any one of claims 1 to 3, characterized in that: The thickness of the opaque dielectric film is such that it completely blocks light.

5. The method according to claim 4, characterized in that The thickness of the opaque medium film is such that complete light shielding is achieved by: Among them, I represents the outgoing light intensity, I0 represents the incident light intensity, and k x represents the extinction coefficient of the opaque dielectric film, d is the film thickness of the opaque dielectric film, and λ represents the wavelength of the measurement light; when When the light intensity is less than a preset threshold, the opaque dielectric film completely blocks light.

6. The method according to any one of claims 1 to 3, characterized in that: The first preset range includes 0 to 10 degrees, and the second preset range includes 0 to 10 degrees.

7. The method according to any one of claims 1 to 3, characterized in that: The opaque dielectric film includes at least one of the following: an organic film, an inorganic film; Wherein, the organic film includes at least one of the following: polypropylene film, polyester film, polyphenylene ether film, polycarbonate film, polyphenylene naphthalene film, polyvinylidene fluoride film; the inorganic film includes metal film and semiconductor film.

8. An electronic device, characterized in that: The method comprises a processor and a memory, wherein the memory is used to store one or more programs and is configured to be executed by the processor, wherein the programs include instructions for executing the steps in the method according to any one of claims 1 to 7.

Images