An LTCC material that can be co-fired with LTCF at low temperatures, its preparation method and applications

Abstract

This application belongs to the technical field of low-temperature co-fired ceramic materials (LTCC) and their preparation technology, and more specifically, relates to an LTCC material that can be co-fired with LTCF at low temperatures, its preparation method, and its application. The LTCC material comprises a ceramic phase and a low-softening-point glass sintering aid, wherein the substrate of the ceramic phase is BaMgSi4O. 10 The ceramic material is a Bi2O3-ZnO-CuO-B2O3-SiO2-based glass sintering aid; the mass ratio of the ceramic phase to the glass sintering aid is (90-110):(3-5). The LTCC material provided in this application can achieve heterogeneous matching sintering with nickel-zinc ferrite-based LTCF. The LTCC-LTCF transition interface exhibits tight adhesion without cracks and no element diffusion, making it promising for applications in common-mode inductors, heterogeneous integrated substrates, and other components.

Description

Technical Field

[0001] This application belongs to the field of low-temperature co-fired ceramic materials (LTCC) and their preparation technology, and more specifically, relates to an LTCC material that can be co-fired with LTCF at low temperatures, its preparation method and application. Background Technology

[0002] Low-temperature co-fired ceramics (LTCC) and other dielectric materials are key materials for manufacturing electronic components such as circuit boards, filters, and capacitors, while magnetic materials, represented by low-temperature co-fired ferrite (LTCF), are mostly used in the production of inductors, circulators, and other devices. If LTCC and LTCF can be integrated together to fabricate chip components or functional modules, it will overturn the fixed pattern of passive electronic components consisting only of a single dielectric or magnet and metal electrodes, significantly improving the design freedom and integration of devices. Therefore, LTCC-LTCF heterogeneous integration technology is a promising new technology. Nickel-zinc ferrite is a widely used high-frequency magnetic material in industry and one of the few viable magnetic materials for heterogeneous integration. To master LTCC-LTCF heterogeneous integration technology, it is necessary to achieve heterogeneous co-firing of LTCC and LTCF, but current research is quite limited, and the breakthrough lies in LTCC materials.

[0003] Research by Academician Zhou Ji and others at Tsinghua University indicates that LTCC materials can be classified into glass-ceramic, ceramic-glass composite, and glass-bonded types based on their glass content, from highest to lowest (Zhou JT Journal of Advanced Ceramics, 2012, 1:89-99). Glass-bonded LTCC materials typically have a glass content of less than 20%, thus exhibiting high process controllability, excellent dielectric properties, and good product consistency. The challenge in achieving heterogeneous co-firing of LTCC and LTCF lies in achieving sintering shrinkage matching and heterogeneous interfacial bonding between materials with dissimilar properties during sintering, with interfacial bonding being the most critical issue. Studies such as CN 114644514 A, Japanese Journal of Applied Physics, 2007, 46(9R): 5792, Journal of the European Ceramic Society, 2016, 36(8): 1931-1937, etc., have all used ceramic-glass composite LTCC to achieve co-firing with LTCF. Due to the high glass content (>10wt%) in this type of LTCC material, the glass softening during high-temperature sintering will directly produce a bonding effect similar to glue, thereby achieving effective co-firing of LTCF and ensuring the strong interfacial bonding. However, due to the high glass content, this type of LTCC material is prone to silver diffusion when co-firing with silver electrodes. When this type of LTCC material is co-fired with nickel-zinc ferrite to make chip common-mode inductors or miniaturized transformers, due to the higher voltage applied compared to devices such as LTCC filters, silver ion migration is more likely to occur, requiring special attention to its insulation characteristics, withstand voltage characteristics, and durability. If an LTCC material with a low glass content (<10wt%) can be prepared to achieve heterogeneous co-firing with LTCF, the above-mentioned drawbacks will be effectively mitigated. This requires that the interface between the LTCC material and LTCF has good chemical affinity when co-firing. Summary of the Invention

[0004] In view of the shortcomings of the prior art, the purpose of this application is to provide an LTCC material that can be co-fired with LTCF at low temperature, its preparation method and application, so as to solve the problem that in the prior art, a large amount of glass must be added to achieve heterogeneous co-firing of LTCC with LTCF, which poses a potential risk to durability and reliability.

[0005] To achieve the above objectives, this application provides an LTCC material comprising a ceramic phase and a glass sintering aid, wherein the substrate of the ceramic phase is BaMgSi4O. 10 Ceramic materials; the glass sintering aid is Bi2O3-ZnO-CuO-B2O3-SiO2 based glass;

[0006] The mass ratio of the ceramic phase to the glass sintering aid is (90-110):(3-5).

[0007] Preferably, the Bi2O3-ZnO-CuO-B2O3-SiO2-based glass contains 15-20 wt% Bi2O3, 20-30 wt% ZnO, 20-30 wt% CuO, 20-30 wt% B2O3 and 10-15 wt% SiO2.

[0008] Preferably, the LTCC material is a powder with a D50 of 0.4 to 0.7 μm.

[0009] Preferably, the ceramic phase further includes SiO2 and TiO2, wherein the ceramic phase contains 80-85 wt% BaMgSi4O 10 5-10 wt% SiO2 and 5-15 wt% TiO2.

[0010] According to another aspect of the present invention, a method for preparing the LTCC material is provided, comprising the following steps:

[0011] The ceramic phase and the glass sintering aid powder are weighed according to the mass ratio of the ceramic phase and the glass sintering aid, and the LTCC material is obtained after ball milling, sand milling, drying and sieving.

[0012] Preferably, the BaMgSi4O 10 The preparation method includes the following steps: according to BaMgSi4O 10 BaCO3, MgO, and SiO2 were weighed out in stoichiometric proportions, ball-milled and mixed, and then pre-calcined at 1000–1100℃ for 3–5 hours to obtain BaMgSi4O. 10 Ceramic materials.

[0013] Preferably, the preparation method of the Bi2O3-ZnO-CuO-B2O3-SiO2-based glass includes the following steps: preparing materials according to the chemical composition of Bi2O3-ZnO-CuO-B2O3-SiO2 glass and ball milling with alcohol as the medium; after the slurry is dried, melting at 1100-1300℃ for 1-3 hours; pouring the molten glass into deionized water for water quenching; crushing the glass slag obtained by water quenching, and then ball milling, sieving, and drying to obtain Bi2O3-ZnO-CuO-B2O3-SiO2-based glass powder.

[0014] According to another aspect of the present invention, an LTCC-LTCF substrate is provided, which contains the LTCC material and further includes an LTCF material.

[0015] Preferably, the LTCF is a nickel-zinc ferrite and contains 1-3% Bi2O3 by mass.

[0016] Preferably, the LTCC-LTCF substrate is obtained by co-firing the LTCC material and the LTCF material.

[0017] In summary, compared with the prior art, the technical solutions conceived in this application have the following main technical advantages:

[0018] (1) The LTCC material provided by this invention has BaMgSi4O as the ceramic phase. 10 With ceramic materials as the base material and a low content of glass sintering aid (not exceeding 5 wt%), and a simple preparation process, it can achieve heterogeneous co-firing with LTCF, especially nickel-zinc ferrite-based LTCF, and is expected to be used in devices such as common-mode inductors, circulators, and artificial magnetic conductors.

[0019] (2) The LTCC material in this invention does not contain alkali metal ions and has a low glass content, which has good insulation properties and durability, and can ensure good withstand voltage characteristics after being fabricated into a device.

[0020] (3) The LTCC material prepared by this invention has excellent microwave dielectric properties, with a dielectric constant of 5.5 to 12.4, a quality factor of 10,000 to 35,000 GHz, and a resonant frequency temperature coefficient of -35 ppm / ℃ to +15 ppm / ℃. It is expected to be used in LTCC filters, packaged antennas and other components. Attached Figure Description

[0021] Figure 1 These are matching diagrams of sintering shrinkage curves of LTCC and LTCF provided in Embodiments 8, 9 and 10 of the present invention.

[0022] Figure 2 This is a verification diagram of heterogeneous co-firing of LTCC and LTCF with 1.8 wt% Bi2O3 provided in Example 9 of the present invention.

[0023] Figure 3 This is a SEM image of heterogeneous co-firing verification of LTCC and LTCF with 1.8 wt% Bi2O3 provided in Example 9 of the present invention (the left side shows LTCC, and the right side shows LTCF).

[0024] Figure 4 The microstructure diagram and partial elemental distribution of the transition zone after heterogeneous co-firing of LTCC and LTCF with 1.8 wt% Bi2O3 provided in Example 9 of the present invention.

[0025] Figure 5Microstructure of the transition zone after heterogeneous co-firing of the LTCC material provided for Comparative Example 1 and the LTCF with added 1.8 wt% Bi2O3 component.

[0026] Figure 6 Microstructure of the transition zone after heterogeneous co-firing of LTCC material and LTCF with 1.8 wt% Bi2O3 component provided for Comparative Example 2.

[0027] Figure 7 Microscopic morphology of the transition zone after heterogeneous co-firing of LTCC material and LTCF with 1.8 wt% Bi2O3 component provided for Comparative Example 3. Detailed Implementation

[0028] To make the objectives, technical solutions, and advantages of this application clearer, the following detailed description is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the scope of this application.

[0029] There are three key issues to be addressed in the heterogeneous co-firing of glass-bonded LTCC and LTCF. The first is matching sintering shrinkage. The sintering shrinkage curve is related to the type (chemical composition) and amount of sintering aids. The BZCBS glass in this application contains various low-melting-point oxides, which give it good wettability and heat-reducing effect on the ceramic matrix. The second is the coefficient of thermal expansion. If the coefficients of thermal expansion of the two materials differ significantly, cracking will occur during cooling even if co-firing is achieved. The coefficient of thermal expansion of nickel-zinc ferrite LTCF is approximately +8 ppm / ℃, while that of BaMgSi4O... 10 The coefficient of thermal expansion is approximately +5 ppm / ℃. To control the coefficient of thermal expansion, the LTCC ceramic composition of this application contains cristobalite (SiO2) with a high coefficient of thermal expansion. Thirdly, regarding interfacial bonding, the sintering aids used in the LTCC material of this application contain the same elements as those in LTCF, greatly enhancing interfacial affinity without requiring the addition of a large amount of glass (>20%) to achieve bonding. Furthermore, since bismuth oxide (Bi2O3) is commonly used as a low-temperature sintering aid in nickel-zinc ferrites, the glass in the LTCC of this application contains a large amount of Bi2O3. Fourthly, the LTCC material of this application uses BaMgSi4O... 10 As a ceramic phase substrate, it is composed of BaO, MgO, and SiO2. Experimental characterization has shown that it has high stability, durability, insulation resistivity, and breakdown field strength. Moreover, it can be sintered to density at temperatures below 1200℃ without the addition of sintering aids. This allows the sintering temperature to be reduced to below 900℃ even with a low amount of low softening point glass sintering aids. Furthermore, it has reserved a range for adjusting the sintering shrinkage curve, making it possible to co-fire this LTCC material with LTCF material.

[0030] Specifically, the present invention provides an LTCC material that can be co-fired with LTCF at low temperatures, particularly a glass-bonded LTCC material that can be co-fired with nickel-zinc ferrite at low temperatures. This material is composed of a ceramic phase and a low-softening-point glass sintering aid, wherein the substrate of the ceramic phase is BaMgSi4O. 10 The ceramic material; the low softening point glass sintering aid comprises Bi2O3-ZnO-CuO-B2O3-SiO2-based (BZCBS) glass. The mass ratio of the ceramic phase to the glass sintering aid is (90-110):(3-5), preferably (92-100):(3-5).

[0031] In some embodiments, the Bi2O3-ZnO-CuO-B2O3-SiO2-based glass contains 15-20 wt% Bi2O3, 20-30 wt% ZnO, 20-30 wt% CuO, 20-30 wt% B2O3 and 10-15 wt% SiO2.

[0032] In some embodiments, the LTCC material is in powder form and has a D50 of 0.4–0.7 μm.

[0033] In a preferred embodiment, the ceramic phase further includes SiO2 and TiO2, wherein the ceramic phase contains 80-85 wt% BaMgSi4O 10 It contains 5-10 wt% SiO2 and 5-15 wt% TiO2. Among them, SiO2 ceramics are preferably of the cristobalite crystal type, which has a higher coefficient of thermal expansion.

[0034] The present invention also provides a method for preparing the glass-bonded LTCC material that can be co-fired with nickel-zinc ferrite at low temperatures, comprising the following steps: weighing the ceramic phase and the low softening point glass sintering aid powder according to the mass ratio, and obtaining the LTCC material after ball milling, sand milling, drying and sieving.

[0035] In some embodiments, the BaMgSi4O 10 The preparation method includes the following steps: according to BaMgSi4O 10 High-purity BaCO3, MgO, and SiO2 raw materials were weighed according to stoichiometric ratio, ball-milled and mixed, and then pre-calcined at 1000–1100℃ for 3–5 hours to obtain BaMgSi4O. 10 Ceramic substrate.

[0036] In some embodiments, high-purity BaCO3, MgO, and SiO2 are used as raw materials, according to BaMgSi4O 10The chemical stoichiometric ratio of the ingredients was used, and 1.2 times the mass of the powder was added as the ball milling medium. The mixture was ball milled at 350 r / min for 5 hours, and then discharged and dried for 24 hours. The slurry drying temperature was set to 90℃. After the powder passed through a 60-mesh sieve, it was pre-fired at 1000℃ for 5 hours to obtain pre-fired synthesized ceramic powder. The SiO2 (cristobalite) and TiO2 ceramic materials directly use industrial raw materials without the need for synthesis or special treatment.

[0037] In some embodiments, the preparation method of the Bi2O3-ZnO-CuO-B2O3-SiO2-based low softening point glass sintering aid includes the following steps: the raw materials are prepared according to the chemical composition of Bi2O3-ZnO-CuO-B2O3-SiO2 glass and ball-milled using alcohol as the medium. After the slurry is dried, it is melted at 1100-1300℃ for 1-3 hours. The molten glass is then poured into deionized water for water quenching. The glass slag obtained from water quenching is crushed, then ball-milled, sieved, and dried to obtain Bi2O3-ZnO-CuO-B2O3-SiO2-based low softening point glass sintering aid powder.

[0038] In some embodiments, high-purity Bi2O3, ZnO, CuO, H3BO3, and quartz powder are used as raw materials. The mixture is prepared according to the chemical composition of Bi2O3-ZnO-CuO-B2O3-SiO2 glass, and ball milling is performed using alcohol at a concentration equal to one times the powder weight as the medium. The ball milling speed is set to 280 r / min, and the mixture is milled for 5 hours before being discharged. After drying the slurry at 70°C for 24 hours, the powder is directly poured into a corundum crucible and melted at 1200°C for 1 hour. The molten glass is then poured into deionized water for water quenching. The glass slag is repeatedly crushed 5 times using a jaw crusher. The crushed glass slag is then poured into a ball mill jar, and deionized water at a concentration equal to 1.2 times the glass weight is added. The slurry is milled for 12 hours. The glass slurry is filtered through a 200-mesh sieve to remove any glass residue that cannot be refined. The slurry is then dried at 90°C for 24 hours to obtain glass powder.

[0039] In some embodiments, the ceramic phase and glass powder are weighed according to the above-mentioned LTCC material ratio, and after being processed through ball milling, sand milling, drying, sieving and other steps similar to the above steps, a low-temperature co-fired ceramic material with the same particle size as commercial nickel-zinc ferrite powder (D50≈0.5μm) is obtained.

[0040] In some embodiments, the heterogeneous co-firing verification of LTCC and LTCF of this application was performed as follows: 5wt% PVA aqueous solution was added to LTCC powder and commercial LTCF powder with added Bi2O3 to complete granulation and pass through a 60-mesh sieve. 0.3g of LTCC powder was weighed and placed in a Φ12mm circular mold. The mold was shaken to flatten the powder. A mold push rod was placed in to flatten the powder under its own weight. 0.5g of LTCF powder was weighed and poured into the mold. The same steps were used to flatten the powder. Finally, the powder was pressed into shape using a powder tablet press with a molding pressure of approximately 10MPa. The mass ratio of the two powders and their density ratio were the same during filling to ensure that the thickness of the LTCC layer and the LTCF layer in the sheet sample were similar.

[0041] After the sheet sample was pressed, three cylindrical samples with a diameter of 12 mm and a height of 6 mm were pressed. All samples were heated to 850℃~900℃ at a rate of 5℃ / min and held for 3 hours to complete sintering. After sintering, the cylindrical sample was used to test the microwave dielectric properties. The sheet sample showed no cracking or warping. After polishing the sample from the side, the LTCC / LTCF interface transition zone was observed using a scanning electron microscope. No cracks or element diffusion were observed, confirming that LTCC and LTCF achieved heterogeneous co-firing.

[0042] The LTCC material provided in this application has a dielectric constant of 5.5 to 12.4, a quality factor of 10,000 to 35,000 GHz, and a resonant frequency temperature coefficient of -35 ppm / ℃ to +15 ppm / ℃ after sintering at 850℃ to 900℃ for 3 hours. It can be co-fired with nickel-zinc ferrite containing bismuth oxide sintering aid.

[0043] This application also provides an LTCC-LTCF substrate containing the LTCC material described in this application, and further including LTCF material. It is obtained by co-firing the LTCC material and LTCF material described in this application.

[0044] In some embodiments, the LTCF is a nickel-zinc ferrite, which can be a nickel-zinc ferrite of the HNP series or HQ series, and it is compounded with a Bi2O3 sintering aid with a mass fraction of 1 to 3%.

[0045] In this application, LTCC and LTCF materials are co-fired to obtain an LTCC-LTCF substrate. The co-firing method includes, but is not limited to, dry pressing and casting.

[0046] The LTCC material provided in this application can be co-fired with silver electrodes or heterogeneously matched and sintered with nickel-zinc ferrite-based LTCF. The LTCC-LTCF transition interface is tightly bonded without cracks and without element diffusion, and is expected to be used in components such as common-mode inductors and heterogeneous integrated substrates.

[0047] The following is an example:

[0048] Examples 1-10

[0049] S1. Preparation of ceramic materials

[0050] Using high-purity BaCO3, MgO, and SiO2 as raw materials, according to BaMgSi4O 10 The chemical stoichiometric ratio of the ingredients was used, and 1.2 times the mass of the powder was added as the ball milling medium. The mixture was ball milled at 350 r / min for 5 hours, and then discharged and dried for 24 hours. The slurry drying temperature was set to 90℃. After the powder passed through a 60-mesh sieve, it was pre-fired at 1000℃ for 5 hours to obtain pre-fired synthesized ceramic powder. The SiO2 (cristobalite) and TiO2 ceramic materials directly use industrial raw materials without the need for synthesis or special treatment.

[0051] S2. Glass Material Preparation

[0052] Using high-purity Bi₂O₃, ZnO, CuO, H₃BO₃, and quartz powder as raw materials, the mixture was prepared according to the chemical composition of glass: 20wt% Bi₂O₃-20wt% ZnO-20wt% CuO-30wt% B₂O₃-10wt% SiO₂. Ball milling was performed using alcohol at a concentration equal to one liter of powder as the medium, with a milling speed of 280 r / min. After 5 hours of ball milling, the slurry was discharged and dried at 70℃ for 24 hours. The powder was then directly poured into a corundum crucible and melted at 1200℃ for 1 hour. The molten glass was then quenched in deionized water. The glass slag was repeatedly crushed 5 times using a jaw crusher. The crushed glass slag was then poured into a ball mill jar, and deionized water at a concentration 1.2 times the glass mass was added. The slurry was ball-milled for 12 hours. Upon discharge, the glass slurry was filtered through a 200-mesh sieve to remove any glass residue that could not be refined. The slurry was dried at 90℃ for 24 hours to obtain glass powder.

[0053] S3.LTCC Material Preparation

[0054] According to BaMgSi4O 10Ceramic powder was weighed in a mass ratio of SiO2, TiO2, and 85:10:5. Then, 20wt% Bi2O3-20wt% ZnO-20wt% CuO-30wt% B2O3-10wt% SiO2 glass powder was weighed according to the overall ceramic powder to glass powder mass ratio of 97:3, 96:4, and 95:5. After adding 1.2 times the total mass of pure water, the mixture was subjected to ball milling, sand milling, drying, and sieving to obtain a low-temperature co-fired ceramic material with D50≈0.5μm. Using the same experimental steps, 1.5wt%, 1.8wt%, and 2.1wt% Bi2O3 sintering aid were added to commercial HNP30 nickel-zinc ferrite to obtain matched LTCF powder (mass fraction represents the mass percentage of Bi2O3 sintering aid to the total mass of sintering aid and nickel-zinc ferrite).

[0055] S4.LTCC and LTCF Heterogeneous Co-firing Verification

[0056] 5 wt% PVA aqueous solution was added to each of the above-mentioned LTCC and LTCF materials to complete granulation and pass through a 60-mesh sieve. Then, elongated samples with dimensions of 4 mm * 5 mm * 40 mm were pressed under a pressure of 150 MPa. The sintering shrinkage curves of the samples were tested. The heating rate during testing was 5 °C / min, and the test temperature range was from room temperature to 1000 °C. (See attached figure for details.) Figure 1 As shown ( Figure 1 Examples 8, 9, and 10 show the shrinkage curves of LTCC materials prepared by adding 3 wt%, 4 wt%, and 5 wt% glass sintering aid to the ceramic phase material, respectively, and LTCF powders with added mass fractions of 1.5 wt%, 1.8 wt%, and 2.1 wt% Bi2O3 sintering aid, respectively, after co-firing. The sintering shrinkage initiation temperature of each component sample is approximately 700°C, and the sintering shrinkage termination temperature is approximately 1000°C. The sintering shrinkage curves of the LTCC component with 4 wt% glass addition are basically matched with those of each LTCF sample, especially the sintering shrinkage curve of the LTCF component with 1.8 wt% Bi2O3 addition, which basically overlaps with the curve of the LTCF component with 1.8 wt% Bi2O3 addition. This means that there is basically no warping or sintering shrinkage mismatch during the co-firing process.

[0057] To further verify the matching sintering shrinkage curves of LTCC and LTCF co-firing characteristics, 0.3g of LTCC powder from Example 9 was weighed and placed in a Φ12mm circular mold. The mold was shaken to flatten the powder, and a mold push rod was placed in to flatten the powder under its own weight. 0.5g of LTCF powder (LTCF with 1.8wt% Bi2O3 added) was weighed and poured into the mold, and the powder was flattened using the same steps. Finally, the powder was pressed into shape using a powder tablet press at a pressure of approximately 10MPa. The mass ratio of the two powders and their density ratio were the same during filling to ensure that the thickness of the LTCC and LTCF layers in the sheet sample was similar. After the sheet sample was pressed, three cylindrical samples with a diameter of 12mm and a height of 6mm were pressed. All samples were heated to 875℃ at a rate of 5℃ / min and held for 3 hours to complete sintering. No cracking was observed in the circular stacked sintered samples.

[0058] To further observe the internal interface phenomena, the sides of the sample were polished, such as... Figure 2 As shown, there are no visible cracks inside the sample. The diameter of the circular sample after sintering is about 10 mm, and the size after edge grinding is about 7 mm. This size fully meets the requirements for manufacturing electronic components. Figure 3 This is a magnified view of the stacked sample, with a viewing area of ​​approximately 1mm*1mm. Within this viewing area, LTCC and LTCF are tightly bonded. Figure 4 The microstructure and elemental distribution of the transition interface micro-region between LTCC and LTCF were analyzed. It can be seen that both LTCC and LTCF have been sintered and dense, and the samples have no obvious pores. There is no serious element diffusion problem at the transition interface, which can ensure the performance of the device after the material is fabricated. The enrichment of trace amounts of Bi and Zn elements ensures the reliability of the interface bonding.

[0059] Table 1 shows the preparation formulas and the performance of the LTCCs obtained in each embodiment of the present invention.

[0060] Table 1

[0061]

[0062] As can be seen, the LTCC material prepared by this invention has a low glass content and a simple preparation process, making it easy to achieve heterogeneous co-firing with nickel-zinc ferrite-based LTCF. Because the LTCC material does not contain alkali metal ions and has a low glass content, it possesses good insulation properties and durability, ensuring good withstand voltage characteristics after device fabrication. It is expected to be used in common-mode inductors, circulators, artificial magnetic conductors, and other devices. The LTCC material prepared by this invention exhibits excellent microwave dielectric properties, with a dielectric constant of 5.5–12.4, a quality factor of 10000–35000 GHz, and a resonant frequency temperature coefficient of -35 ppm / ℃ to +15 ppm / ℃, making it promising for applications in LTCC filters, packaged antennas, and other components.

[0063] Example 11

[0064] The rest is the same as in Examples 1-10, except that the LTCC material contains 80wt% BaMgSi4O in its ceramic phase. 10 The ceramic phase consisted of 5 wt% SiO2 and 15 wt% TiO2, with sintering aids of 15 wt% Bi2O3-25 wt% ZnO-25 wt% CuO-20 wt% B2O3-15 wt% SiO2 glass, and the mass ratio of ceramic phase to glass sintering aid was 90:3. Following the same procedure, it was co-fired with nickel-zinc ferrite-based LTCF containing 1.8 wt% Bi2O3. Experiments showed that both LTCC and LTCF were sintered densely, with no obvious pores and no serious elemental diffusion problems at the transition interface.

[0065] Example 12

[0066] The rest is the same as in Examples 1-10, except that the LTCC material contains 80wt% BaMgSi4O in its ceramic phase. 10 The ceramic phase consisted of 5 wt% SiO2 and 15 wt% TiO2, with sintering aids of 20 wt% Bi2O3-30 wt% ZnO-20 wt% CuO-20 wt% B2O3-10 wt% SiO2 glass, and the mass ratio of ceramic phase to glass sintering aid was 100:5. Following the same procedure, it was co-fired with nickel-zinc ferrite-based LTCF containing 1.8 wt% Bi2O3. Experiments showed that both LTCC and LTCF were sintered densely, with no obvious pores and no serious elemental diffusion problems at the transition interface.

[0067] Comparative Example 1

[0068] The ceramic phase BaMgSi4O of Example 9 10 Replacing it with CaMgSi2O6 while keeping everything else unchanged, and co-firing it with nickel-zinc ferrite-based LTCF containing 1.8 wt% Bi2O3, obvious cracks were found at the interface, such as... Figure 5 As shown.

[0069] Comparative Example 2

[0070] The ceramic phase BaMgSi4O of Example 9 10 Replacing it with Mg2SiO4, while keeping everything else unchanged, and co-firing it with nickel-zinc ferrite-based LTCF containing 1.8 wt% Bi2O3, obvious cracks were found at the interface, such as... Figure 6 As shown.

[0071] Comparative Example 3

[0072] The ceramic phase BaMgSi4O of Example 9 10 Replacing it with BaAl2Si2O8, while keeping everything else unchanged, and co-firing it with nickel-zinc ferrite-based LTCF containing 1.8 wt% Bi2O3, obvious cracks were found at the interface, such as... Figure 7 As shown.

[0073] Those skilled in the art will readily understand that the above description is merely a preferred embodiment of this application and is not intended to limit this application. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. An LTCC material, characterized in that comprising a ceramic phase and a glass sintering aid, the ceramic phase having a base of BaMgSi4O 10 ceramic material; the glass sintering aid being a Bi2O3-ZnO-CuO-B2O3-SiO2-based glass; The mass ratio of the ceramic phase to the glass sintering aid is (90-110):(3-5).

2. The LTCC material of claim 1, wherein, The Bi2O3-ZnO-CuO-B2O3-SiO2-based glass contains 15-20 wt% Bi2O3, 20-30 wt% ZnO, 20-30 wt% CuO, 20-30 wt% B2O3 and 10-15 wt% SiO2.

3. The LTCC material of claim 1, wherein, It is a powder, and its D50 is 0.4-0.7 μm.

4. The LTCC material of claim 1, wherein, The ceramic phase further comprises SiO2and TiO2, wherein the ceramic phase contains 80-85 wt% of BaMgSi4O 10 , 5-10 wt% of SiO2and 5-15 wt% of TiO2.

5. The method of producing a LTCC material according to any one of claims 1 to 4, characterized in that The method comprises the following steps: The ceramic phase and the glass sintering aid powder are weighed according to the mass ratio of the ceramic phase to the glass sintering aid, ball-milled, sand-milled, dried and sieved to obtain the LTCC material.

6. The production method according to claim 5, wherein The BaMgSi4O 10 The preparation method comprises the following steps: taking BaCO3, MgO and SiO2 according to the stoichiometric ratio of BaMgSi4O 10 , ball-milling and mixing, and then pre-sintering at 1000-1100 DEG C for 3-5 hours to obtain BaMgSi4O 10 ceramic material.

7. The production method according to claim 5, wherein The preparation method of the Bi2O3-ZnO-CuO-B2O3-SiO2-based glass comprises the following steps: ingredients are prepared according to the chemical composition of the Bi2O3-ZnO-CuO-B2O3-SiO2 glass, and ball-milling is completed with alcohol as the medium; after the slurry is dried, melting is performed at 1100-1300 °C for 1-3 hours; the molten glass liquid is poured into deionized water to complete water quenching; the glass slag obtained by water quenching is crushed, and then ball-milled, sieved and dried to obtain the Bi2O3-ZnO-CuO-B2O3-SiO2-based glass powder.

8. An LTCC-LT CF substrate, characterized by It contains the LTCC material as claimed in any one of claims 1 to 4, and further comprises an LTCF material.

9. The LTCC-LT CF substrate of claim 8, wherein, The LTCF is a nickel-zinc ferrite, and contains 1-3 wt% Bi2O3.

10. The LTCC-LT CF substrate of claim 8, wherein, It is co-fired from the LTCC material and the LTCF material as claimed in any one of claims 1 to 4. It is co-fired from the LTCC material and the LTCF material as claimed in any one of claims 1 to 4.

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