A cooling device used in a pipeline cleaning system

Abstract

The present invention discloses a cooling device applied to a pipeline cleaning system, which relates to the technical field of semiconductor equipment cooling; it comprises: a water inlet supply block for providing cooling water; a water inlet joint, which is arranged on a reaction transmitter of the cleaning system, for sending cooling water into the internal waterway of the reaction transmitter; a water outlet joint, which is arranged on the reaction transmitter of the cleaning system, for outputting cooling water from the internal waterway of the reaction transmitter; a three-way joint for receiving cooling water; a cooling water pipe for cooling a gas transmission pipeline; a cooling block for cooling a gas transmission pipeline; a three-way switching valve for switching the waterway; and a return water supply block for collecting cooling return water. When the pipeline cleaning system is not in operation, the circulating cooling water only flows to the reaction transmitter of the cleaning system. When the pipeline cleaning system is in operation, the three-way valve is switched, and at this time, the circulating cooling water flows through the reaction transmitter of the cleaning system and the gas transmission pipeline to form a circulating cooling effect.

Description

Technical Field

[0001] The invention relates to the technical field of semiconductor equipment cooling, and in particular to a cooling device applied to a pipeline cleaning system. Background Art

[0002] In semiconductor equipment, the process chamber is too far away from the terminal pipeline and valve. Therefore, when cleaning the process chamber, the contaminants on the terminal pipeline and valve cannot be completely removed. Therefore, it is necessary to add a separate cleaning system for the terminal pipeline. Since the terminal pipeline and the valve are connected together and the path is close, the valve can be cleaned at the same time as the pipeline.

[0003] During the operation of the pipeline cleaning system, a large amount of heat energy will be generated due to chemical reactions. If it cannot be dissipated in time, the temperature of the clean gas transmission pipeline will rise and there will even be a risk of damage, affecting the normal operation and stability of semiconductor equipment. Therefore, the pipeline cleaning system needs to design a reasonable heat dissipation structure to remove the generated heat in time and maintain the normal operating temperature of the clean gas transmission pipeline. Summary of the invention

[0004] The purpose of the present invention is to provide a cooling device applied to a pipeline cleaning system to ensure that heat can be dissipated in a timely and effective manner; and to effectively protect equipment and personal safety.

[0005] To achieve the above-mentioned purpose, the technical solution of the present application is: a cooling device applied to a pipeline cleaning system, comprising:

[0006] A water supply block for providing cooling water;

[0007] A water inlet connector, which is arranged on the cleaning system reaction emitter and connected to the water inlet supply block, and is used to deliver cooling water into the internal waterway of the reaction emitter;

[0008] A water outlet connector is provided on the reaction emitter of the cleaning system and is used to output cooling water from the internal water path of the reaction emitter;

[0009] A three-way joint, connected to the water outlet joint, for receiving cooling water;

[0010] A cooling water pipe, which is wound around the integrated gas transmission pipeline and connected to the three-way joint, is used to cool the gas transmission pipeline;

[0011] A cooling block is arranged on the split gas transmission pipeline and connected to the cooling water pipe, and is used to cool the gas transmission pipeline;

[0012] A three-way switching valve, connected to the three-way connector and the cooling block respectively, for switching the water path;

[0013] The return water supply block is connected to the three-way switching valve and is used to collect cooling return water.

[0014] Furthermore, a water digital flow switch is provided between the return water supply block and the three-way switching valve, and the water digital flow switch is connected to the cleaning system controller.

[0015] Furthermore, the cooling block includes a cooling block on the first size pipeline, a cooling block under the first size pipeline, a cooling block wrapped around the left half of the second size pipeline, and a cooling block wrapped around the right half of the second size pipeline. The cooling block on the first size pipeline is connected to the cooling block under the first size pipeline to surround the gas transmission pipeline with a small diameter, and the cooling block wrapped around the left half of the second size pipeline is connected to the cooling block wrapped around the right half of the second size pipeline to surround the gas transmission pipeline with a large diameter.

[0016] Furthermore, the cooling water pipe is connected to the water channel of the cooling block under the first size pipeline, the cooling block under the first size pipeline is connected to the water channel of the cooling block on the first size pipeline, the cooling block on the first size pipeline is connected to the water channel of the cooling block wrapped in the left half of the second size pipeline, the cooling block wrapped in the left half of the second size pipeline is connected to the water channel of the cooling block wrapped in the right half of the second size pipeline, and the cooling block wrapped in the right half of the second size pipeline is connected to the three-way switching valve.

[0017] Furthermore, the three-way switching valve is connected to a valve switch controller of the pipeline cleaning system.

[0018] Furthermore, the water inlet supply block and the water return supply block are provided with manual stop valves.

[0019] Furthermore, when the pipeline cleaning system is running, the three-way switching valve connects the internal water path of the cleaning system reaction emitter to the cooling water pipe; when the pipeline cleaning system is not running, the three-way switching valve connects the internal water path of the cleaning system reaction emitter directly to the return water supply block.

[0020] Furthermore, the cleaning system reaction transmitter is connected to the pipeline to be cleaned through an integrated gas transmission pipeline and a split gas transmission pipeline, and a pipeline swing valve is provided between the integrated gas transmission pipeline and the split gas transmission pipeline, and the pipeline swing valve is connected to the valve switch controller.

[0021] As a further step, the valve switch controller is connected to the cleaning system controller for receiving valve opening and closing signals.

[0022] As a further feature, the valve switch controller is connected to a first pneumatic diaphragm valve, and the first pneumatic diaphragm valve is used to control whether the cleaning gas enters the cleaning system reaction emitter.

[0023] By adopting the above technical scheme, the present invention can achieve the following technical effects: the cooling device of the present invention can effectively protect semiconductor equipment and personal safety, improve equipment reliability; reduce the operating temperature of the gas transmission pipeline and extend its service life.

[0024] The three-way switching valve can effectively save the use of circulating cooling water. When the pipeline cleaning system is not running, the circulating cooling water only flows to the cleaning system reaction transmitter. Because the cleaning system reaction transmitter is always powered on and in standby mode, high temperature will be generated inside, so the cooling water is always open to cool the cleaning system reaction transmitter. The gas transmission pipeline will not generate high temperature when the cleaning action is not performed. When the pipeline cleaning system is running, switch the three-way valve to open the cooling water pipe and cooling block on the gas transmission pipeline. At this time, the circulating cooling water flows through the cleaning system reaction transmitter and the gas transmission pipeline to form a circulating cooling effect. The three-way switching valve is installed in the cooling water return direction to ensure that the water pipes of each component that requires cooling water are always full of water to prevent bubbles from forming and affecting the cooling effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other accompanying drawings can be obtained based on these accompanying drawings without paying any creative work.

[0026] Figure 1 This is a schematic diagram of the explosion of the cooling device;

[0027] Figure 2 This is a schematic diagram of the cooling device installation;

[0028] Figure 3 This is the structural schematic diagram of the pipeline cleaning system;

[0029] Explanation of the serial numbers in the figure: 1. Equipment-side controller, 2. Signal selector, 3. Cleaning system controller, 4. Equipment-side reaction transmitter, 5. Process chamber, 6. Gas pipeline to be cleaned, 7. Valve to be cleaned, 8. Split gas transmission pipeline, 9. Integrated gas transmission pipeline, 10. Cleaning system reaction transmitter, 11. Valve switch controller, 12. First pneumatic diaphragm valve, 13. Nitrogen flow controller, 14. First argon flow controller, 15. Nitrogen inlet pneumatic diaphragm valve, 16. Oxygen flow controller, 17. Nitrogen trifluoride flow controller, 18. The second argon flow controller, 19. The second pneumatic diaphragm valve, 20. The gas cabinet, 21. The nitrogen outlet pneumatic diaphragm valve, 22. The pipeline swing valve; 23. The manual stop valve; 24. The return water supply block; 25. The water inlet supply block; 26. The digital flow switch for water; 27. The three-way connector; 28. The three-way switching valve; 29. ​​The cooling block under the first size pipeline; 30. The cooling block on the first size pipeline; 31. The cooling block wrapped on the left half of the second size pipeline; 32. The cooling block wrapped on the right half of the second size pipeline; 33. The water outlet connector; 34. The water inlet connector. DETAILED DESCRIPTION

[0030] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0031] It should be noted that, in the absence of conflict, the embodiments and features in the embodiments of the present application may be combined with each other.

[0032] It should also be noted that the terms used in this application are generally commonly used by those skilled in the art. If there is any inconsistency with the commonly used terms, the terms in this application shall prevail. For those of ordinary skill in the art, the specific meanings of the terms in this application in the present invention can be understood according to the specific circumstances.

[0033] Finally, it should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply that there is any such actual relationship or order between these entities or operations. It should be understood that the terms used in this way can be interchanged under appropriate circumstances, which is only the way of distinguishing the objects of the same attributes when describing them in the embodiments of the present application. Moreover, the terms "include" and "comprise" not only include those elements, but also include other elements that are not clearly listed, or also include elements inherent to such processes, methods, articles or equipment. In the absence of more restrictions, the elements limited by the statement "include..." do not exclude the existence of other identical elements in the process, method, article or equipment including the elements.

[0034] Example 1

[0035] like Figure 1-2 As shown, this embodiment provides a cooling device applied to a pipeline cleaning system, comprising:

[0036] A water supply block for providing cooling water;

[0037] A water inlet connector, which is arranged on the reaction launcher of the cleaning system and is connected to the water inlet supply block, and is used to deliver cooling water into the internal water path of the reaction launcher;

[0038] A water outlet connector is provided on the reaction launcher of the cleaning system and is used to output cooling water from the internal water path of the reaction launcher;

[0039] A three-way joint, connected to the water outlet joint, for receiving cooling water;

[0040] A cooling water pipe, which is wound around the integrated gas transmission pipeline and connected to the three-way joint, is used to cool the gas transmission pipeline;

[0041] A cooling block is arranged on the split gas transmission pipeline and connected to the cooling water pipe, and is used to cool the gas transmission pipeline; the cooling block includes a cooling block on the first size pipeline, a cooling block under the first size pipeline, a cooling block wrapped around the left half of the second size pipeline, and a cooling block wrapped around the right half of the second size pipeline. The cooling block on the first size pipeline is docked with the cooling block under the first size pipeline to surround the gas transmission pipeline with a small diameter, and the cooling block wrapped around the left half of the second size pipeline is docked with the cooling block wrapped around the right half of the second size pipeline to surround the gas transmission pipeline with a large diameter. For example, the first size pipeline is a 1.5-inch pipeline, and the second size pipeline is a 4-inch pipeline;

[0042] A three-way switching valve, connected to the three-way connector and the cooling block respectively, for switching the water path;

[0043] The return water supply block is connected to the three-way switching valve through a water digital flow switch. The return water supply block is used to collect cooling return water. The water digital flow switch has a temperature monitoring function. The preferred model is PF3W520-03-1T, which is connected to the cleaning system controller; the water digital flow switch transmits the circulating water circuit temperature to the cleaning system controller. When the temperature exceeds the threshold, the cleaning system controller sends an alarm signal to stop the cleaning action; the water digital flow switch also transmits the circulating water circuit water flow signal to the cleaning system controller. When the water flow is lower than the threshold, the cleaning system controller also sends an alarm signal to stop the cleaning action.

[0044] Specifically, the cooling water pipe is connected to the water channel of the cooling block under the first size pipeline, the cooling block under the first size pipeline is connected to the water channel of the cooling block on the first size pipeline, the cooling block on the first size pipeline is connected to the water channel of the cooling block wrapped in the left half of the second size pipeline, the cooling block wrapped in the left half of the second size pipeline is connected to the water channel of the cooling block wrapped in the right half of the second size pipeline, and the cooling block wrapped in the right half of the second size pipeline is connected to the three-way switching valve; the three-way switching valve is connected to the valve switch controller of the pipeline cleaning system.

[0045] As a preferred embodiment, the water inlet supply block and the water return supply block are provided with manual stop valves, which can effectively control the switching of the cooling water flow.

[0046] The cooling process of the cooling device is as follows: the manual stop valve is opened, the cooling water flows from the water supply block to the internal waterway of the cleaning system reaction transmitter, flows out from the internal waterway and flows through the three-way joint into the three-way switching valve; the three-way switching valve is controlled by the valve switch controller, when the cleaning system is running, the first end and the third end of the three-way switching valve are opened, and the second end is closed, the cooling water in the three-way joint flows into the cooling water pipe, the cooling block under the first size pipeline, the cooling block on the first size pipeline, the cooling block wrapped on the left half of the second size pipeline, and the cooling block wrapped on the right half of the second size pipeline, and finally enters the first end of the three-way switching valve, flows through the third end of the three-way switching valve through the water digital flow switch into the return water supply block, forming a cooling water cycle, and achieving the effect of cooling the gas transmission pipeline and the cleaning system reaction transmitter. When the cleaning system stops, the second end and the third end of the three-way switching valve are opened, and the first end is closed, and the cooling water in the three-way joint flows through the three-way switching valve and the digital flow switch into the return water supply block, forming a cooling water cycle, and achieving the effect of cooling the cleaning system reaction transmitter.

[0047] In this embodiment, the cleaning system reaction transmitter signal is preferably RPS Central-1008L, but it can also be other models.

[0048] Example 2

[0049] like Figure 3As shown, the pipeline cleaning system described in Example 1 includes a signal selector, which is connected to the device-side controller and is used to transmit the cleaning parameter signal of the process chamber or the cleaning parameter signal of the pipeline; the cleaning parameters include transmission power, transmission frequency, transmission speed and working time, etc.;

[0050] The cleaning system controller is connected to the signal selector, and when receiving the opening signal of the nitrogen inlet pneumatic diaphragm valve and the nitrogen outlet pneumatic diaphragm valve, controls the signal selector to receive the signal of the device end controller;

[0051] A cleaning system reaction transmitter is connected to the signal selector and is used to deliver the cleaning gas into the pipeline to be cleaned in a high-pressure jet mode; when a failure occurs in the cleaning system reaction transmitter, feedback is given to the cleaning system controller;

[0052] The equipment-side reaction transmitter is connected to the signal selector and is used to deliver the cleaning gas into the process chamber to be cleaned in a high-pressure jet manner; when the equipment-side reaction transmitter fails, it is fed back to the equipment-side controller;

[0053] A valve switch controller, connected to the cleaning system controller, is used to perform valve opening and closing actions;

[0054] The first pneumatic diaphragm valve is respectively connected to the valve switch controller and the clean gas pipeline in the gas cabinet, and is used to control whether the clean gas enters the clean system reaction transmitter. When the first pneumatic diaphragm valve is opened, the second pneumatic diaphragm valve is in a closed state;

[0055] The second pneumatic diaphragm valve is respectively connected to the valve switch controller and the clean gas pipeline in the gas cabinet, and is used to control whether the clean gas enters the equipment-end reaction transmitter. When the second pneumatic diaphragm valve is opened, the first pneumatic diaphragm valve is in a closed state.

[0056] As a preferred embodiment, the cleaning system reaction transmitter is connected to the pipeline to be cleaned through an integrated gas transmission pipeline and a split gas transmission pipeline. A pipeline swing valve is provided between the integrated gas transmission pipeline and the split gas transmission pipeline. The pipeline swing valve is connected to a valve switch controller. When the cleaning system reaction transmitter needs maintenance, the pipeline swing valve is closed.

[0057] As a preferred embodiment, nitrogen is used as the start signal of the pipeline cleaning system. A nitrogen flow controller is provided in the gas cabinet. A nitrogen inlet pneumatic diaphragm valve is provided at the inlet end of the nitrogen flow controller, and a nitrogen outlet pneumatic diaphragm valve is provided at the outlet end. The nitrogen inlet pneumatic diaphragm valve and the nitrogen outlet pneumatic diaphragm valve are both connected to the cleaning system controller. The nitrogen inlet pneumatic diaphragm valve is also connected to the valve switch controller. When the pipeline cleaning system is completed, the nitrogen inlet pneumatic diaphragm valve is closed. The nitrogen inlet pneumatic diaphragm valve is located on the nitrogen inlet pipeline, which is connected to the nitrogen supply pipeline at the equipment end; the nitrogen outlet pneumatic diaphragm valve is located on the nitrogen outflow pipeline, which is connected to the end of the pipeline to be cleaned.

[0058] As a preferred embodiment, when the pipeline cleaning system is working, the process chamber needs to maintain pressure in order to prevent the pipeline cleaning gas from flowing back; therefore, a first argon flow controller is provided in the gas cabinet, which is connected to the process chamber.

[0059] As a preferred embodiment, the gas cabinet is provided with an oxygen flow controller, a nitrogen trifluoride flow controller and a second argon flow controller arranged in parallel. The three parallel controllers are connected to the cleaning end gas pipeline and the equipment end gas pipeline, and are used to control the flow rates of oxygen, nitrogen trifluoride and argon flowing into the pipeline to be cleaned or the process chamber to be cleaned, respectively.

[0060] The pipeline cleaning system is installed below the cleaning path of the semiconductor equipment to directly perform cleaning functions on the gas pipelines and valves that are not cleaned properly at the equipment end, solving the problems of gas pipeline blockage and valve jamming, thereby increasing the service life of the machine and increasing production capacity.

[0061] Since the pipeline cleaning control system is directly integrated into the equipment to achieve automatic cleaning, it can greatly improve the cleaning efficiency of semiconductor pipelines and reduce the time and labor costs required for manual cleaning.

[0062] Example 3

[0063] Based on the pipeline cleaning system described in Example 2, a pipeline cleaning method is provided. Since the pipeline to be cleaned and the valve to be cleaned are too far away from the process chamber, the contaminants on the pipeline to be cleaned and the valve to be cleaned cannot be completely removed when cleaning the process chamber. The pipeline to be cleaned and the valve to be cleaned are connected together and the path is close, so the valve is cleaned together when the pipeline is cleaned, which specifically includes:

[0064] When the process chamber needs to be cleaned, the cleaning system controller opens the second pneumatic diaphragm valve, closes the first pneumatic diaphragm valve, and enables the signal selector to receive the process chamber cleaning parameters of the device-side controller. The process chamber cleaning parameters are transmitted to the device-side reaction transmitter, and the device-side reaction transmitter sends the clean gas in the gas cabinet into the process chamber in a high-pressure jet manner for cleaning. The specific method is: the second argon flow controller sets the flow rate, and the argon flows into the device-side reaction transmitter, and then flows to the process chamber to be cleaned. After the stable flow device-side reaction transmitter is ignited, the argon gas is ionized into argon ions, and the oxygen flow controller sets the flow rate. Then oxygen flows into the equipment-end reaction transmitter; after the nitrogen trifluoride flow controller sets the flow rate, nitrogen trifluoride flows into the equipment-end reaction transmitter; oxygen and nitrogen trifluoride are ionized into oxygen ions and fluoride ions in the equipment-end reaction transmitter, and then argon ions, oxygen ions and fluoride ions flow into the process chamber to be cleaned, and chemical reactions occur to decompose pollutants such as silicon carbide to achieve a cleaning effect. After the process chamber is cleaned, the flow of oxygen and nitrogen trifluoride is stopped, and argon is continuously introduced to purge the equipment-end reaction transmitter and the process chamber. After the purge is completed, the flow of argon is stopped; the cleaning system controller opens the second pneumatic diaphragm valve and closes the first pneumatic diaphragm valve;

[0065] When the equipment-side controller opens the nitrogen inlet pneumatic diaphragm valve and the nitrogen outlet pneumatic diaphragm valve, the nitrogen flow controller sets the nitrogen flow rate, where the nitrogen outflow serves as a signal to start the pipeline cleaning system; the first argon flow controller sets the flow rate, and argon flows into the process chamber to keep the chamber under pressure;

[0066] After the cleaning system controller receives the opening signal of the nitrogen inlet pneumatic diaphragm valve and the nitrogen outlet pneumatic diaphragm valve, the signal selector receives the pipeline cleaning parameters of the device-side controller, and the pipeline cleaning parameters are transmitted to the cleaning system reaction transmitter. The cleaning system reaction transmitter sends the cleaning gas in the gas cabinet into the pipeline in a high-pressure jet manner for cleaning. The specific method is: the second argon flow controller sets the flow rate, and the argon flows into the cleaning system reaction transmitter, and then flows to the pipeline to be cleaned and the valve to be cleaned to stabilize the flow rate; after the cleaning system reaction transmitter is ignited, the argon is ionized into argon ions, and oxygen After the flow controller sets the flow rate, oxygen flows into the cleaning system reaction emitter; after the nitrogen trifluoride flow controller sets the flow rate, nitrogen trifluoride flows into the cleaning system reaction emitter; oxygen and nitrogen trifluoride are ionized into oxygen ions and fluorine ions in the cleaning system reaction emitter, and then argon ions, oxygen ions and fluorine ions flow into the pipeline to be cleaned and the valve to be cleaned, and a chemical reaction occurs to decompose pollutants such as silicon carbide to achieve a cleaning effect. After the pipeline cleaning is completed, the flow of oxygen and nitrogen trifluoride is stopped, and argon gas is continuously introduced to purge the cleaning system reaction emitter, pipelines and valves. After the purge is completed, the flow of argon gas is stopped.

[0067] The cleaning system controller closes the nitrogen inlet pneumatic diaphragm valve through the valve switch controller to stop the flow of nitrogen, which is used to close the pipeline cleaning system. At this time, the cleaning system controller opens the second pneumatic diaphragm valve, closes the first pneumatic diaphragm valve, and closes the pipeline swing valve through the valve switch controller.

[0068] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit it. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present application.

Claims

1. A cooling device used in a pipeline cleaning system, characterized in that: include: A water supply block for providing cooling water; A water inlet connector, which is arranged on the cleaning system reaction emitter and connected to the water inlet supply block, and is used to deliver cooling water into the internal waterway of the reaction emitter; A water outlet connector is provided on the reaction emitter of the cleaning system and is used to output cooling water from the internal water path of the reaction emitter; A three-way joint, connected to the water outlet joint, for receiving cooling water; A cooling water pipe, which is wound around the integrated gas transmission pipeline and connected to the three-way joint, is used to cool the gas transmission pipeline; A cooling block is arranged on the split gas transmission pipeline and connected to the cooling water pipe, and is used to cool the gas transmission pipeline; A three-way switching valve, connected to the three-way connector and the cooling block respectively, for switching the water path; A return water supply block, connected to the three-way switching valve, is used to collect cooling return water; The three-way switching valve is connected to a valve switch controller of a pipeline cleaning system; When the pipeline cleaning system is running, the three-way switching valve connects the internal water circuit of the cleaning system reaction transmitter with the cooling water pipe, and opens the cooling water pipe and cooling block on the gas transmission pipeline. At this time, the circulating cooling water flows through the cleaning system reaction transmitter and the gas transmission pipeline to form a circulating cooling effect; when the pipeline cleaning system is not running, the three-way switching valve connects the internal water circuit of the cleaning system reaction transmitter directly to the return water supply block, and only cools the cleaning system reaction transmitter.

2. According to claim 1, a cooling device used in a pipeline cleaning system is characterized in that: A water digital flow switch is provided between the return water supply block and the three-way switching valve, and the water digital flow switch is connected to the cleaning system controller.

3. According to claim 1, a cooling device used in a pipeline cleaning system is characterized in that: The cooling block includes a cooling block on the first size pipeline, a cooling block under the first size pipeline, a cooling block wrapped around the left half of the second size pipeline, and a cooling block wrapped around the right half of the second size pipeline. The cooling block on the first size pipeline is connected to the cooling block under the first size pipeline to surround the gas transmission pipeline with a small diameter, and the cooling block wrapped around the left half of the second size pipeline is connected to the cooling block wrapped around the right half of the second size pipeline to surround the gas transmission pipeline with a large diameter.

4. A cooling device used in a pipeline cleaning system according to claim 3, characterized in that: The cooling water pipe is connected to the water channel of the cooling block under the first size pipeline, the cooling block under the first size pipeline is connected to the water channel of the cooling block on the first size pipeline, the cooling block on the first size pipeline is connected to the water channel of the cooling block wrapped in the left half of the second size pipeline, the cooling block wrapped in the left half of the second size pipeline is connected to the water channel of the cooling block wrapped in the right half of the second size pipeline, and the cooling block wrapped in the right half of the second size pipeline is connected to the three-way switching valve.

5. A cooling device used in a pipeline cleaning system according to claim 1, characterized in that: The water inlet supply block and the water return supply block are provided with manual stop valves.

6. A cooling device used in a pipeline cleaning system according to claim 1, characterized in that: The cleaning system reaction transmitter is connected to the pipeline to be cleaned through an integrated gas transmission pipeline and a split gas transmission pipeline. A pipeline swing valve is provided between the integrated gas transmission pipeline and the split gas transmission pipeline, and the pipeline swing valve is connected to a valve switch controller.

7. A cooling device used in a pipeline cleaning system according to claim 1, characterized in that: The valve switch controller is connected to the cleaning system controller and is used to receive valve opening and closing signals.

8. The cooling device used in a pipeline cleaning system according to claim 1, characterized in that: The valve switch controller is connected to a first pneumatic diaphragm valve, and the first pneumatic diaphragm valve is used to control whether the cleaning gas enters the cleaning system reaction emitter.

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