An adjustable workpiece holder for vacuum sputter coating of a profiled curved substrate

Abstract

The application discloses an adjustable workpiece frame for a special-shaped curved surface substrate of vacuum sputtering coating, and belongs to the field of vacuum coating. The inner workpiece frame is fixed in the outer workpiece frame, the frame track is fixed on one side of the inner workpiece frame, the substrate is installed in the frame of the frame track, a plurality of supporting components are installed on the frame track and located around the substrate, the outer workpiece frame comprises an outer frame, an upper baffle is arranged on the top of the outer frame, an upper guide strip is installed on the upper baffle through a plurality of upper insulating shielding components, the bottom of the outer frame is installed on the bottom plate welding piece through a lower insulating shielding component, a lower baffle is arranged on the lower part of the outer frame and located above the lower insulating shielding component. The frame track can adjust the distance of the frame strip, the supporting components can move on the frame track, the position can be adjusted, so that different specifications of the substrate can be fixed, especially the special-shaped curved surface substrate. Moreover, the insulating shielding components are arranged on the upper and lower parts of the outer workpiece frame, the workpiece frame and the substrate will not be discharged, and damage to the substrate can be avoided.

Description

Technical Field

[0001] The invention belongs to the technical field of vacuum coating, in particular to an adjustable workpiece holder for a special-shaped curved substrate used for vacuum sputtering coating. Background Art

[0002] Sputtering is a vacuum coating technology that bombards the surface of a solid target with particles of a certain energy (usually positively charged argon ions), ejecting atoms or molecules from the target and depositing them onto the substrate surface. During the sputtering process, the substrate is mounted in a vacuum chamber on a workpiece holder. As the workpiece holder moves, the substrate undergoes various sputtering coating steps within the coating equipment.

[0003] Current workpiece holders are designed for conventionally shaped substrates. Clamps are placed in opposite directions on the workpiece holder to hold the substrate. This can easily lead to electrical discharge between the clamp and the substrate, potentially damaging the substrate. Furthermore, the clamp can typically only be adjusted in a single dimension to accommodate substrates of varying sizes. Such workpiece holders can only accommodate substrates of conventional shapes and sizes. When machining irregularly shaped, curved substrates, clamping can be unstable or even impossible.

[0004] Instable clamping can cause the substrate to wobble on the workpiece holder during sputtering. This wobble can lead to uneven distribution of sputtered atoms or molecules across the substrate surface, affecting the uniformity and quality of the film. Therefore, during sputtering, it's important to ensure the workpiece holder has sufficient stability and support to securely hold the substrate and prevent it from wobble during the coating process. Summary of the Invention

[0005] The object of the present invention is to provide an adjustable workpiece holder for special-shaped curved substrates used for vacuum sputtering coating, so as to solve the problems raised in the above-mentioned background technology.

[0006] The present invention provides an adjustable workpiece holder for special-shaped curved substrates for vacuum sputtering coating, comprising an outer workpiece holder, an inner workpiece holder, a frame rail, and support components. The inner workpiece holder is fixed inside the outer workpiece holder, the frame rail is fixed to one side of the inner workpiece holder, the substrate is installed in a frame of the frame rail, and a plurality of support components are installed on the frame rail. The support components are located around the substrate.

[0007] The outer workpiece frame includes an outer frame, an upper baffle is provided on the top of the outer frame, the upper guide bar is installed on the upper baffle through a plurality of upper insulating shielding components, the bottom of the outer frame is installed on the bottom plate welding part through a lower insulating shielding component, and a lower baffle is provided at the lower part of the outer frame, and the lower baffle is located above the lower insulating shielding component;

[0008] The upper baffle and the lower baffle face the side where the frame rail is located.

[0009] As a further solution of the present invention: the outer frame includes two side beams, a top beam connected to the top of the two side beams, and a bottom beam connected to the bottom of the two side beams. A lower baffle is installed on the bottom beam, lock buckles are provided on the two side beams, and a cross beam is also provided at the lower part of the outer frame.

[0010] As a further solution of the present invention: the upper insulating shielding assembly includes a support, an upper shielding cover plate and an upper shielding back plate, the bottom of the support is padded with an upper insulating plate and fixed to the top of the upper baffle, the side of the support is connected to the upper guide bar, and the upper guide bar is upright on the upper baffle;

[0011] The upper shielding cover plate and the upper shielding rear plate cooperate to form a shielding box body with an opening at the bottom, and the shielding box body covers the bottom of the support and the upper insulating plate;

[0012] A plurality of grooves parallel to the upper and lower planes of the upper insulating plate are formed around the upper insulating plate.

[0013] As a further solution of the present invention: the lower insulating shielding assembly includes a positioning plate, a lower shielding back plate and a lower shielding cover plate, the bottom of the positioning plate is padded with the lower insulating plate and fixed to the bottom plate welding piece;

[0014] The lower shielding rear plate and the lower shielding cover plate cooperate to form a shielding box body with an opening at the bottom, and the shielding box body is covered on the positioning plate and the lower insulating plate;

[0015] The lower insulating plate is provided with a plurality of grooves parallel to the upper and lower planes of the lower insulating plate around its periphery.

[0016] As a further solution of the present invention: the frame track is a rectangular frame, including two or more transverse rails and two or more longitudinal rails, and the transverse rails can move up and down along the longitudinal rails.

[0017] As a further solution of the present invention: the supporting component includes an insulating support, and the two side walls of the insulating support in the width direction are higher than the two side walls in the length direction. Corresponding threaded holes are opened on the upper part of the higher two side walls, and an insulating bolt is screwed into each threaded hole. The substrate is placed between the two insulating bolts, and the two insulating bolts jointly clamp and support the substrate.

[0018] As a further solution of the present invention: the support component also includes a bracket, which is in the shape of a "7" and has a first through slot and a second through slot. The support component is installed on the frame rail through the first through slot, and an insulating support is installed in the second through slot.

[0019] As a further solution of the present invention: the supporting component also includes a bracket and a bracket support member, the bracket is in a straight plate shape and has a second through slot, the bracket support member is in a "7" shape and has a bracket assembly hole / slot and a rail assembly hole / slot, the bracket is connected to the bracket support member and the insulating support respectively through the second through slot, and the bracket support member is installed on the frame rail through the rail assembly hole / slot.

[0020] As a further solution of the present invention: the supporting component also includes a bracket and a bracket support member, a first through slot is provided on the bracket, and an insulating support is also provided on the bracket. The bracket support member includes two side plates connected end to end, the first side plate is located on one side of the second side plate, and is perpendicular to the upper and lower surfaces of the second side plate, a bracket assembly hole / groove is provided on the first side plate, and a rail assembly hole / groove is provided on the second side plate, the bracket is connected to the bracket support member through the first through slot, and the bracket support member is installed on the frame rail through the rail assembly hole / groove.

[0021] As a further solution of the present invention: the supporting component also includes a bracket and a bracket support member, the bracket is in the shape of a "7" and has a first through slot and a second through slot, the bracket support member is in the shape of a "7" and has a bracket assembly hole / groove and a rail assembly hole / groove, an insulating support is installed in the second through slot, the bracket is installed on the bracket support member through the first through slot and the bracket assembly hole / groove, and the bracket support member is installed on the frame rail through the rail assembly hole / groove.

[0022] Compared with the prior art, the present invention has the following beneficial effects:

[0023] The outer workpiece rack can be moved in the vacuum coating chamber, and the inner workpiece rack carries the frame rail, which enhances the structural strength and facilitates the replacement of the appropriate inner workpiece rack to adapt to substrates of different specifications.

[0024] Insulation shielding components are installed above and below the external workpiece holder to prevent electrical discharge between the workpiece holder and the substrate, thus avoiding damage to the substrate. Several grooves are cut around the insulating plate, parallel to the upper and lower surfaces of the insulating plate. These grooves effectively disconnect the coating layer, preventing the conductive film from connecting to other metal parts and causing discharge marks on the substrate coating surface.

[0025] The frame track can adjust the distance between the frame bars, the support components can move on the frame track, and the support components can adjust the clamping position from the assembly, thereby realizing three-dimensional position adjustment, which can adapt to the clamping and fixation of substrates of different specifications and shapes, especially special-shaped curved substrates. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] To facilitate understanding by those skilled in the art, the present invention is further described below with reference to the accompanying drawings.

[0027] Figure 1 This is a schematic structural diagram of an embodiment of the present invention (I);

[0028] Figure 2 This is a structural diagram of an embodiment of the present invention (II);

[0029] Figure 3 A schematic structural diagram of an external workpiece holder according to an embodiment of the present invention;

[0030] Figure 4 for Figure 3 The schematic diagram of the scattered structure of the outer workpiece rack shown;

[0031] Figure 5 for Figure 4 Enlarged view of middle part I;

[0032] Figure 6 for Figure 4 Enlarged view of middle part II;

[0033] Figure 7 This is a schematic structural diagram of an inner workpiece holder according to an embodiment of the present invention;

[0034] Figure 8 This is a schematic structural diagram of a frame track according to an embodiment of the present invention;

[0035] Figure 9 This is a structural diagram of a support component according to an embodiment of the present invention (I);

[0036] Figure 10 This is a structural diagram of a supporting component according to an embodiment of the present invention (II);

[0037] Figure 11 This is a structural diagram of a support component according to an embodiment of the present invention (III);

[0038] Figure 12 Schematic diagram of the structure of the support component of an embodiment of the present invention (four);

[0039] Figure 13 Schematic diagram of the structure of the support component of an embodiment of the present invention (V);

[0040] Figure 14 Schematic diagram of the structure of the support component of an embodiment of the present invention (six);

[0041] Figure 15 This is a schematic diagram of the assembly of the insulating support and insulating bolts according to an embodiment of the present invention.

[0042] In the figure: 1-external workpiece frame; 11-external frame; 111-top beam; 112-side beam; 113-cross beam; 114-bottom beam; 115-locking buckle; 12-upper baffle; 121-ear plate; 122-reinforcement rib; 13-upper guide bar; 131-mounting hole; 14-upper insulation shielding assembly; 141-support; 142-upper insulation plate; 143-upper shielding cover; 144-upper shielding back plate; 145-upper insulation sleeve; 146-pillar; 15-lower baffle; 16-lower insulation shielding assembly; 161-positioning plate; 162 -lower insulating plate; 163-lower insulating sleeve; 164-lower shielding back plate; 165-lower shielding cover; 17-bottom plate welding part; 171-lower guide bar; 2-inner workpiece rack; 21-locking bolt; 22-support leg; 3-substrate; 4-frame rail; 41-horizontal rail; 42-longitudinal rail; 5-support component; 51-bracket; 511-first through slot; 512-second through slot; 52-insulating support; 53-insulating bolt; 54-butterfly nut; 55-bracket support; 56-T-screw; 57-screw; 58-fastening nut. DETAILED DESCRIPTION

[0043] In order to make the objectives, technical solutions, and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only intended to explain the present invention and are not intended to limit the present invention. That is, the embodiments described herein are only some embodiments of the present invention, not all embodiments. Generally, the components of the embodiments of the present invention described and illustrated in the drawings herein may be arranged and designed in various different configurations.

[0044] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the invention as claimed, but is merely intended to represent selected embodiments of the present invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative work are within the scope of protection of the present invention.

[0045] See also Figure 1 、 Figure 2 As shown, this embodiment provides an adjustable workpiece holder for special-shaped curved substrates for vacuum sputtering coating, including an outer workpiece holder 1, an inner workpiece holder 2, a frame rail 4 and a support component 5. The inner workpiece holder 2 is fixed inside the outer workpiece holder 1, and the frame rail 4 is fixed to one side of the inner workpiece holder 2. The substrate 3 is installed in the frame of the frame rail 4. Several support components 5 are installed on the frame rail 4. The support components 5 are located around the substrate 3 to provide clamping and support for the substrate 3.

[0046] See also Figure 3As shown, the outer workpiece holder 1 includes an outer frame 11, an upper baffle 12 fixedly mounted on the top of the outer frame 11, an upper guide bar 13 having a mounting hole 131, and is mounted to the upper baffle 12 via a plurality of upper insulating shielding assemblies 14. The bottom of the outer frame 11 is mounted to the bottom plate weldment 17 via a lower insulating shielding assembly 16. This prevents discharge from occurring between the workpiece holder and the substrate, thereby preventing damage to the substrate. A lower baffle 15 is provided at the bottom of the outer frame 11, and is located above the lower insulating shielding assembly 16. The upper baffle 12 and the lower baffle 15 face the side of the frame rail to prevent splashing onto the upper insulating shielding assembly 14 and the lower insulating shielding assembly 16. An ear plate 121 is provided on one side of the upper baffle 12 for mounting the upper insulating shielding assembly 14, and a reinforcing rib 122 is provided at the top of the upper baffle 12.

[0047] In some embodiments, see Figure 4 As shown, the outer frame 11 is a rectangular frame, including a top beam 111 and a bottom beam 114 arranged horizontally and parallel to each other. A lower baffle 15 is installed on the bottom beam 114. The ends of the top beam 111 and the bottom beam 114 are respectively connected to the side beams 112, and the side beams 112 are provided with lock buckles 115. A cross beam 113 is also provided at the lower part of the outer frame 11. The bottom of the side beams 112 extends out of the bottom beam 114, and a connecting plate is provided at the bottom of the side beams 112.

[0048] See also Figure 4 、 Figure 5 As shown, the upper insulating shielding assembly 14 includes a support 141, an upper shielding cover 143, and an upper shielding back plate 144. The support 141 is configured in a "Z" shape, and an upper insulating plate 142 is installed at the bottom of the support 141. The bottom of the support 141, the upper insulating plate 142, and the upper baffle 12 are mounted to the top beam 111 by bolts. The bolts are fitted with an upper insulating sleeve 145, which is assembled into the bolt mounting hole at the bottom of the support 141. A mounting hole is provided at the top of the upper shielding cover 143, and the upper shielding back plate 144 is configured in an L shape and has a through hole corresponding to the mounting hole at the top of the upper shielding cover 143. The upper shielding back plate 144 and the upper shielding cover 143 cooperate to form a shielding box body with an opening at the bottom, and a slot is formed in the shielding box body for the support 141 to pass through. The shielding box body is covered on the bottom of the support 141 and the upper insulating plate 142. The upper portion of the support 141 passes through the slot in the shielding box body and is located outside the shielding box body. It is connected to the upper guide bar 13 by bolts. The upper guide bar 13 stands on the upper baffle 12. One end of the support 146 is connected to the support 141, and the other end passes through the through-holes at the top of the upper shielding cover plate 143 and the upper shielding back plate 144. The upper shielding cover plate 143 and the upper shielding back plate 144 can be connected to each other to form the shielding box body, or the shielding box body can be positioned and installed on the support 141.

[0049] The upper insulating plate 142 is provided with a plurality of grooves parallel to the upper and lower planes of the upper insulating plate 142. The grooves can effectively disconnect the coating layer, preventing the conductive film from connecting to other metal parts and causing discharge lines on the substrate coating surface.

[0050] In some embodiments, see Figure 4 、 Figure 6 As shown, the lower insulating shielding assembly 16 includes a positioning plate 161, a lower shielding back plate 164, and a lower shielding cover plate 165. The bottom connecting plates of the two side beams 112 are respectively mounted on the two positioning plates 161. The lower shielding back plate 164 and the lower shielding cover plate 165 cooperate to form a shielding box body with an opening at the bottom, which covers the positioning plate 161 and the lower insulating plate 162. The lower insulating plate 162 is padded at the bottom of the positioning plate 161. Bolts pass through the positioning plate 161, the lower insulating plate 162, and the pads on the bottom plate welding part 17 in sequence to fix the lower insulating shielding assembly 16 to the bottom plate welding part 17. The bolts are fitted with a lower insulating sleeve 163, which is assembled into the bolt mounting hole of the positioning plate 161. A lower guide bar 171 is provided at the bottom of the bottom plate welding part 17, which cooperates with the guide groove in the vacuum coating chamber to realize the movement of the entire workpiece rack.

[0051] The lower insulating plate 162 is provided with a plurality of grooves parallel to the upper and lower planes of the lower insulating plate 162. The grooves can effectively disconnect the coating layer, preventing the conductive film from connecting to other metal parts and causing discharge lines on the substrate coating surface.

[0052] In some embodiments, the inner workpiece frame 2 is a rectangular frame, and the size of the frame formed by the frame strips can be selected according to the size of the substrate. Figure 7 As shown, the inner workpiece frame 2 includes three horizontal frame bars and three vertical frame bars, so that the inner workpiece frame 2 forms four substrate mounting frames. Bolt holes for mounting the frame rails are provided on the frame bars. The bottom of the inner workpiece frame 2 is provided with support legs 22, and locking bolts 21 are provided on both sides of the inner workpiece frame 2. When the inner workpiece frame 2 is installed on the outer frame 11, the support legs 22 stand on the crossbeam 113, and the side is matched with the lock buckle 115 through the locking bolt 21 to complete the fixing of the inner workpiece frame 2 to the outer workpiece frame 1. The frame rail 4 is a rectangular frame, the same as the inner workpiece frame 2, please refer to Figure 8 As shown, it includes three transverse rails 41 and three longitudinal rails 42 . The transverse rails 41 can move up and down along the longitudinal rails 42 to adjust the height of the supporting component 5 .

[0053] In some embodiments, the support component 5 includes a bracket 51 and an insulating support 52. The bracket 51 is provided with a first through slot 511 and a second through slot 512. One end of a T-screw 56 is mounted on the horizontal rail 41 or the vertical rail 42. The other end passes through the first through slot 511 and is then fitted with a butterfly nut 54 at the end and tightened to mount the support component 5 on the frame rail 4. Loosening the butterfly nut 54 allows the assembly position of the T-screw 56 in the first through slot 511 to be adjusted, as well as the assembly position of the T-screw 56 in the horizontal rail 41 or the vertical rail 42 to be adjusted. This allows the clamping assembly to be adjusted up and down, left and right. Figure 15 As shown, the insulating support 52 has an assembly hole at the bottom. A screw 57 passes through the assembly hole and the second through-slot 512, and a fastening nut 58 is installed at the end to mount the insulating support 52 on the bracket 51. The two side walls in the width direction of the insulating support 52 are higher than the two side walls in the length direction. The upper portion of the higher side walls has corresponding threaded holes, each of which is screwed into an insulating bolt 53. The substrate 3 is placed between the two insulating bolts 53, and the two insulating bolts 53 together clamp and support the substrate 3. The bracket 51 adopts a "7"-shaped structure, with the first through-slot 511 and the second through-slot 512 respectively provided on two different side panels. The assembly position of the screw 57 and the second through-slot 512 can be adjusted to achieve forward and backward adjustment of the clamping assembly. In this way, the position adjustment of the clamping assembly in three dimensions can be achieved. Even if the substrate 3 is a special-shaped curved substrate, the clamping assemblies around the substrate 3 can be adjusted to a position where they can stably support each other and clamp the substrate 3, and to a suitable clamping angle to prevent the substrate 3 from shaking on the workpiece holder and ensure the coating quality. In addition, the size of the clamping gap can be adjusted by adjusting the screw-in length of the insulating bolt 53, thereby adapting to the clamping support of substrates 3 of different thicknesses. The insulating support 52 can be as Figure 9 As shown, it is installed on the outside of the "7" shaped bracket 51, or it can be installed as shown in FIG. Figure 10 As shown, it is installed on the inner side of the "7"-shaped bracket 51.

[0054] In some embodiments, see Figure 11 As shown, the support component 5 includes a bracket 51, a bracket support member 55, and an insulating support 52. The bracket 51 is in the shape of a straight plate and has a second through-slot 512. The bracket support member 55 is in the shape of a "7" and has bracket assembly holes and track assembly slots located on different side panels. A T-shaped screw 56 passes through the bracket assembly hole and the second through-slot 512 and is fitted with a butterfly nut 54 at the end, thereby securely connecting the bracket 51 and the bracket support member 55. The insulating support 52 can be installed in the second through-slot 512 using a screw 57 and a fastening nut 58. The bracket support member 55 can be installed on the horizontal rail 41 or the vertical rail 42 via the track assembly slot. This allows the clamping assembly to have a wider range of adjustable positions, allowing it to accommodate substrates 3 with large size variations and irregular shapes.

[0055] In some embodiments, see Figure 12 As shown, the support component 5 includes a bracket 51, a bracket support member 55, and an insulating support 52. The bracket 51 is in the shape of a straight plate and has a first through-slot 511. The insulating support member 52 is directly fixed to the bracket 51 by welding or other means. The bracket support member 55 is a three-dimensional structure, including two side panels connected end to end. The first side panel is located on one side of the second side panel and is perpendicular to the upper and lower surfaces of the second side panel. The first side panel has a bracket assembly hole, and the second side panel has a track assembly hole. The bracket 51 is connected to the bracket support member 55 through the first through-slot 511 and the bracket assembly hole. The bracket support member 55 is mounted on the horizontal rail 41 or the longitudinal rail 42 through the track assembly hole.

[0056] In some embodiments, see Figure 13 As shown, the bracket 51 and the bracket support member 55 are both L-shaped, and a first through slot 511 and a second through slot 512 are respectively provided on two different side panels of the bracket 51, and a bracket assembly slot and a rail assembly slot are respectively provided on two different side panels of the bracket support member 55.

[0057] In some embodiments, see Figure 14 As shown, the support component 5 includes a bracket 51, a bracket support member 55, and an insulating support 52. The bracket 51 is in the shape of a straight plate and has a first through-slot 511. The bracket support member 55 is a three-dimensional structure, including two side panels connected end to end. The first side panel is located at one end of the second side panel and is perpendicular to the upper and lower surfaces of the second side panel. The first side panel is in the shape of a "7". The first side panel has a bracket assembly hole, and the second side panel has a track assembly hole. The bracket support member 55 can be installed on the horizontal rail 41 or the longitudinal rail 42 through the track assembly hole. The bracket 51 is connected to the bracket support member 55 through the first through-slot 511 and the bracket assembly hole. The insulating support 52 is installed on the bracket 51 through the first through-slot 511.

[0058] It should be noted that when installing and fixing the substrate 3, the substrate 3 can be selected according to its shape and specifications. Figures 9-14 One, two or more supporting components 5 are shown so that the substrate 3 can be stably mounted on the workpiece holder to prevent the substrate from shaking on the workpiece holder during sputtering coating.

[0059] The above content is merely an example and explanation of the structure of the present invention. Those skilled in the art may make various modifications or additions to the described specific embodiments or replace them in a similar manner. As long as they do not deviate from the structure of the invention or exceed the scope defined by the claims, they should all fall within the scope of protection of the present invention.

Claims

1. An adjustable workpiece holder for special-shaped curved substrates used for vacuum sputtering coating, characterized in that: It includes an outer workpiece frame, an inner workpiece frame, a frame rail and a supporting component. The inner workpiece frame is fixed inside the outer workpiece frame, the frame rail is fixed to one side of the inner workpiece frame, the substrate is installed in the frame of the frame rail, and a plurality of supporting components are installed on the frame rail. The supporting components are located around the substrate. The outer workpiece frame includes an outer frame, an upper baffle is provided on the top of the outer frame, the upper guide bar is installed on the upper baffle through a plurality of upper insulating shielding components, the bottom of the outer frame is installed on the bottom plate welding part through a lower insulating shielding component, and a lower baffle is provided at the lower part of the outer frame, and the lower baffle is located above the lower insulating shielding component; The upper baffle and the lower baffle face the side where the frame rail is located; The outer frame includes two side beams, a top beam connected to the top of the two side beams, a bottom beam connected to the bottom of the two side beams, a lower baffle installed on the bottom beam, lock buckles are provided on the two side beams, and a cross beam is also provided at the lower part of the outer frame; The upper insulating shielding assembly includes a support, an upper shielding cover plate and an upper shielding back plate. The bottom of the support is padded with an upper insulating plate and fixed to the top of the upper baffle. The side of the support is connected to the upper guide bar, and the upper guide bar stands on the upper baffle. The upper shielding cover plate and the upper shielding rear plate cooperate to form a shielding box body with an opening at the bottom, and the shielding box body covers the bottom of the support and the upper insulating plate; The upper insulating plate is provided with a plurality of grooves parallel to the upper and lower planes of the upper insulating plate. The lower insulating shielding assembly includes a positioning plate, a lower shielding back plate and a lower shielding cover plate. The lower insulating plate is padded on the bottom of the positioning plate and fixed to the bottom plate welding piece. The lower shielding rear plate and the lower shielding cover plate cooperate to form a shielding box body with an opening at the bottom, and the shielding box body is covered on the positioning plate and the lower insulating plate; The lower insulating plate is provided with a plurality of grooves parallel to the upper and lower planes of the lower insulating plate. The frame track is a rectangular frame, including two or more transverse rails and two or more longitudinal rails, and the transverse rails can move up and down along the longitudinal rails; The supporting component includes an insulating support, and the two side walls of the insulating support in the width direction are higher than the two side walls in the length direction. Corresponding threaded holes are opened on the upper part of the higher two side walls, and an insulating bolt is screwed into each threaded hole. The substrate is placed between the two insulating bolts, and the two insulating bolts jointly clamp and support the substrate.

2. The adjustable workpiece holder for special-shaped curved substrates for vacuum sputtering coating according to claim 1, characterized in that: The support component also includes a bracket, which is in a "7" shape and has a first through slot and a second through slot. The support component is installed on the frame rail through the first through slot, and an insulating support is installed in the second through slot.

3. The adjustable workpiece holder for special-shaped curved substrates for vacuum sputtering coating according to claim 1, characterized in that: The support component also includes a bracket and a bracket support member. The bracket is in a straight plate shape and has a second through slot. The bracket support member is in a "7" shape and has a bracket assembly hole / slot and a rail assembly hole / slot. The bracket is connected to the bracket support member and the insulating support respectively through the second through slot. The bracket support member is installed on the frame rail through the rail assembly hole / slot.

4. The adjustable workpiece holder for special-shaped curved substrates for vacuum sputtering coating according to claim 1, characterized in that: The support component also includes a bracket and a bracket support member. A first through slot is provided on the bracket. An insulating support is also provided on the bracket. The bracket support member includes two side plates connected end to end. The first side plate is located on one side of the second side plate and is perpendicular to the upper and lower surfaces of the second side plate. A bracket assembly hole / slot is provided on the first side plate, and a rail assembly hole / slot is provided on the second side plate. The bracket is connected to the bracket support member through the first through slot, and the bracket support member is installed on the frame rail through the rail assembly hole / slot.

5. The adjustable workpiece holder for special-shaped curved substrates for vacuum sputtering coating according to claim 1, characterized in that: The support component also includes a bracket and a bracket support member. The bracket is in the shape of a "7" and has a first through slot and a second through slot. The bracket support member is in the shape of a "7" and has a bracket assembly hole / slot and a rail assembly hole / slot. An insulating support is installed in the second through slot. The bracket is installed on the bracket support member through the first through slot and the bracket assembly hole / slot. The bracket support member is installed on the frame rail through the rail assembly hole / slot.

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