An ultrasonic centrifugal photoresist stripping device for micro-nano processing

Abstract

The present invention relates to an ultrasonic centrifugal photoresist stripping device for micro-nano processing. The device comprises a body, a vertical shaft mounted on the body, a horizontal frame connected to the vertical shaft, an oscillating barrel connected to the rear end of the horizontal frame, the axis of the oscillating barrel extending obliquely from bottom to top toward the axis of the vertical shaft, the oscillating barrel having an inner hole for accommodating a stripping liquid, the inner hole comprising an oscillating section, a necking section, and a receiving section extending sequentially from top to bottom, the diameters of the receiving section and the oscillating section being larger than the diameter of the necking section, and an ultrasonic vibrating rod fixed to the horizontal frame for insertion into the oscillating barrel from a port of the oscillating barrel; one end of the vertical shaft is transmission-connected to a rotary drive mechanism, the rotary drive mechanism driving the vertical shaft to rotate about its own axis, thereby driving the photoresist detached from the oscillating barrel to undergo centrifugal motion and move it into the necking section. The device can collect small particles stripped during the centrifugation process, achieving a better overall removal effect on samples with fine structures and photoresist denatured by processing.

Description

Technical Field

[0001] The present invention relates to the technical field of micro-nano processing, in particular to an ultrasonic centrifugal photoresist stripping device for micro-nano processing. Background Art

[0002] Micro-nanofabrication technology is fundamental to cutting-edge scientific research in areas such as superconducting quantum computing, semiconductor chip fabrication, and novel surface materials, which are crucial for nationally oriented research. Lift-off is a common pattern transfer process in micro-nanofabrication, typically requiring the application of various photoresists. These photoresists can affect the accuracy of subsequent processing and even the performance of the resulting sample. Furthermore, the lift-off process requires the removal of as much residual photoresist as possible.

[0003] The commonly used stripping method at present is ultrasonic oscillation, which uses ultrasound to shatter the photoresist under a large area of ​​metal film and then mechanically strip it off. For samples with fine structures on the sample surface, if the power of the ultrasonic oscillation is high, it is very likely that the fine structure will be removed together with the photoresist during stripping, causing the stripping process to fail. If the power is too low, the large area of ​​photoresist may not be shattered and removed, which will also cause stripping failure. In particular, in some stripping processes, the photoresist denatures due to the absorption of more heat during the long-term growth of the metal film, making it even less susceptible to shattering by ultrasonic oscillation. In this case, the use of ultrasonic oscillation will increase the possibility of stripping failure. At the same time, the fine photoresist after being separated from the metal film by oscillation will re-attach to the surface of the metal film, resulting in incomplete stripping. Summary of the Invention

[0004] The purpose of the present invention is to provide a micro-nano processing ultrasonic centrifugal photoresist stripping device to solve the problems in the prior art that the photoresist and the metal film cannot be effectively stripped, and the photoresist is easy to re-adhere to the metal film after stripping.

[0005] In order to solve the above problems, the ultrasonic centrifugal photoresist stripping device for micro-nano processing involved in the present invention adopts the following technical solutions:

[0006] The invention discloses an ultrasonic centrifugal photoresist stripping device for micro-nano processing, comprising a body, a vertical shaft mounted on the body, the axis of the vertical shaft extending in the vertical direction, a horizontal frame extending radially along the vertical shaft connected to the vertical shaft, an oscillation barrel connected to the tail end of the horizontal frame, the axis of the oscillation barrel extending obliquely from bottom to top toward the axis of the vertical shaft, the oscillation barrel having an inner hole for accommodating a stripping liquid, the inner hole comprising an oscillation section for accommodating a sample, a necking section, and a containing section for accommodating stripped photoresist, the diameters of the containing section and the oscillation section being larger than the size of the necking section, an ultrasonic vibrating rod for being inserted into the oscillation barrel from a port of the oscillation barrel being fixed on the horizontal frame; one end of the vertical shaft is transmission-connected to a rotary drive mechanism, the rotary drive mechanism driving the vertical shaft to rotate about its own axis, thereby driving the detached photoresist in the oscillation barrel to perform centrifugal motion and move into the necking section.

[0007] Furthermore, the connection between the necking section and the oscillating section and the accommodating section is connected through a smooth arc transition.

[0008] Furthermore, the horizontal frame is provided with an adjustment structure for adjusting the angle between the axis of the oscillation barrel and the axis of the vertical shaft.

[0009] Furthermore, the cross frame includes a first support rod fixed on the vertical axis, the adjustment structure includes a first clamp connected to the first support rod, the oscillation barrel is fixed in the first clamp, and a first locking structure is provided between the first clamp and the first support rod for limiting the relative angle between the two.

[0010] Furthermore, the first support rod includes a first sleeve for sleeved on the vertical shaft, and also includes a first cross bar connected to the side wall of the first sleeve, and the first clamp is connected to the tail end of the first cross bar.

[0011] Furthermore, there are more than two first cross bars, which are evenly spaced around the circumference of the first sleeve.

[0012] Furthermore, the cross frame also includes a second support rod fixed on the vertical shaft, the second support rod includes a second shaft sleeve mounted on the vertical shaft, the side wall of the second shaft sleeve is connected to a second cross rod, the tail end of the second cross rod is hinged with a second clamp, and the ultrasonic vibration rod is fixedly inserted in the second clamp.

[0013] Furthermore, the second cross bar comprises two single bars matched with the guiding telescopic sleeves, and the second cross bar is provided with a telescopic locking structure for limiting the telescopic length thereof.

[0014] Furthermore, the body includes an operating box, the vertical shaft is rotatably assembled in the operating box, the rotary drive mechanism is connected to the bottom of the operating box, and a controller is also provided on the operating box, which is control-connected to the rotary drive mechanism and the ultrasonic vibration rod.

[0015] Furthermore, a laser thermometer for monitoring the internal temperature of the operating box is also provided on the vertical shaft, and the laser thermometer is connected to the controller signal.

[0016] The beneficial effects of the present invention are as follows: the ultrasonic centrifugal photoresist stripping device for micro-nano processing involved in the present invention utilizes the oscillation effect of the ultrasonic vibrating rod to oscillate and separate impurities such as photoresist attached to the sample. At the same time, under the driving force of the rotary drive mechanism, the vertical shaft is driven to rotate around its own axis, so that impurities such as photoresist perform centrifugal motion and are moved away from the sample under the action of centrifugal rotation to protect samples with fine structures; an oscillation and centrifugal coupling method is adopted, and a large area of ​​photoresist and its surface metal are removed from the sample surface by utilizing the centrifugal phenomenon while ultrasonic oscillating. Due to the increased centrifugal effect, the present application can reduce the power of ultrasonic oscillation during the stripping process, and can realize automatic and rapid separation of photoresist and sample without the need for precise control of the oscillation power; at the same time, the bottom of the oscillation barrel is designed to have a necked section structure, which can collect small particles stripped off during the centrifugal process, so that the sample is not contaminated again, and has a better overall removal effect on samples with fine structures and photoresist denatured due to processing. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for use in the embodiments:

[0018] Figure 1 It is a schematic structural diagram of a specific embodiment of the ultrasonic centrifugal photoresist stripping device of the present invention;

[0019] Figure 2 for Figure 1 Schematic diagram of the internal structure without the operation box;

[0020] Figure 3 for Figure 2 Front view of

[0021] Figure 4 for Figure 3 Schematic diagram of the structure of the oscillating barrel;

[0022] Figure 5 for Figure 3 Half-section view.

[0023] Description of reference numerals: 1-operation box; 11-switch door; 12-mounting hole; 13-control panel;

[0024] 2-vertical shaft; 3-reduction motor; 4-first support rod; 41-first shaft sleeve; 42-first cross bar; 43-first clamp; 44-first locking structure;

[0025] 5-second support rod; 51-second shaft sleeve; 52-second cross bar; 53-second clamp; 54-telescopic locking structure; 55-second locking structure;

[0026] 6-oscillation barrel; 61-inner hole; 62-oscillation section; 63-neck section; 64-accommodation section;

[0027] 7-ultrasonic vibrating rod; 8-anti-rotation locking structure; 9-laser thermometer. DETAILED DESCRIPTION

[0028] In order to make the technical objectives, technical solutions, and beneficial effects of the present invention more clear, the technical solutions of the present invention are further described below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention. That is, the embodiments described herein are only some embodiments of the present invention, not all embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings herein can be arranged and designed in various different configurations.

[0029] The specific embodiment of the ultrasonic centrifugal photoresist stripping device for micro-nano processing involved in the present invention is as follows: Figures 1 to 5 As shown, the device includes an operating box 1 with a door 11 on the front. A mounting hole 12 is provided in the middle of the bottom wall of the operating box 1. A vertical shaft 2 is rotatably mounted in the mounting hole 12 via a bearing. The axis of the vertical shaft 2 extends in the vertical direction. A rotary drive mechanism, which is in transmission connection with the vertical shaft 2, is fixedly connected to the bottom of the operating box 1. In this embodiment, the rotary drive mechanism is a reduction motor 3. During actual operation, the reduction motor 3 controls the rotation of the vertical shaft 2.

[0030] Attached to the vertical shaft 2 is a horizontal frame extending radially from the shaft 2. The tail end of the horizontal frame is connected to an oscillation barrel 6. Also fixed to the horizontal frame is an ultrasonic vibrating rod 7, which is inserted through the end of the oscillation barrel 6 into the oscillation barrel 6. Rotation of the vertical shaft 2 causes the horizontal frame to oscillate. During this oscillation, the oscillation barrel 6 rotates about the axis of the vertical shaft 2, causing the material inside the oscillation barrel 6 to undergo centrifugal motion. The ultrasonic vibrating rod 7 then oscillates and separates the photoresist on the material's surface.

[0031] The structure of the oscillating barrel 6 is shown in the figure. It is a barrel-shaped structure with a bottom seal. The oscillating barrel 6 has an inner hole 61 for accommodating the stripping solution. The inner hole 61 includes an oscillating section 62 for accommodating the sample, a constricted section 63, and a receiving section 64 for accommodating the stripped photoresist. The diameters of the receiving section 64 and the oscillating section 62 are larger than the diameters of the constricted section 63. Specifically, the connection between the constricted section 63, the oscillating section 62, and the receiving section 64 is connected by a smooth arc transition. The sample is placed in the oscillating barrel 6 above the constricted section 63. The photoresist is cleaned by the oscillation of the ultrasonic vibrating rod 7. Simultaneously, the reduction motor 3 is controlled to rotate the oscillating barrel 6, which can cause the detached photoresist to undergo centrifugal motion, preventing it from adhering to the sample surface. The constricted design of the oscillating barrel 6 has two connected sections, with a smooth transition between the upper and lower transitions of the constricted section. This allows particles and debris removed during the centrifugation process to be collected within the receiving section 64, preventing them from floating up and contaminating the sample during the deceleration phase.

[0032] Of course, preferably, the minimum diameter of the necking section 63 is no more than half of the diameter of the oscillating section 62, which can effectively prevent impurities from floating up and achieve the separation of small particles of photoresist from the material body.

[0033] The structure and working principle of the ultrasonic vibration rod 7 are consistent with the existing technology, and those skilled in the art can make any selection according to actual needs without making any specific limitation.

[0034] The horizontal frame includes two support rods fixed on the vertical axis 2 at intervals along the up and down directions. The two support rods are defined as the first support rod 4 and the second support rod 5. The first support rod 4 is located below the second support rod 5. The oscillation barrel 6 is connected to the first support rod 4, and the ultrasonic vibration rod 7 is connected to the second support rod 5.

[0035] The first support rod 4 includes a first crossbar 42, the axis of which is perpendicular to the axis of the vertical shaft 2, and the tail end of which extends outward. To securely mount the oscillating barrel 6, a first clamp 43 is connected to the tail end of the first crossbar 42, and the oscillating barrel 6 is fixedly inserted into the first clamp 43. This allows the oscillating barrel 6 to be securely clamped. To adjust the tilt angle of the oscillating barrel 6, in this embodiment, the first clamp 43 is hingedly assembled with the first crossbar 42, and a first locking structure 44 is provided between the first crossbar 42 to limit the relative angle between the two. In this embodiment, the first locking structure 44 can be a fastening screw connected between the first crossbar 42 and the first clamp 43, or the hinge axis between the two can be directly designed as a bolt and nut connection. By tightening the bolt after adjusting the angle, the hinged position of the first crossbar 42 and the first clamp 43 is pressed against each other, and the anti-rotation locking is achieved through friction. This is not specifically limited here.

[0036] The second support rod 5 includes a second cross bar 52, the axis of the second cross bar 52 is perpendicular to the axis of the vertical axis 2, and its tail end extends outward. At the same time, in order to adapt to the position and inclination angle of the oscillation barrel 6 and to facilitate the insertion of the ultrasonic vibration rod 7 wire into the oscillation barrel 6, the second cross bar 52 includes two single rods with guided telescopic sleeves. The tail end of the second cross bar 52 is connected to a second clamp 53, and the ultrasonic vibration rod is fixedly inserted in the second clamp 53. The second cross bar 52 is provided with a telescopic locking structure 54 for limiting the telescopic length of the second cross bar 52. Specifically in this embodiment, the telescopic locking structure 54 is a screw inserted on the outer single rod. In actual use, the telescopic length of the second cross bar 52 is adjusted according to the position of the oscillation barrel 6, and then the screw is manually operated to lock the two single rods of the second cross bar 52 relative to each other along the axial direction.

[0037] In order to further adapt the tilt angle of the oscillation barrel 6, it is also necessary to adjust the axis of the second clamp 53 to be consistent with the axis of the oscillation barrel 6. In this embodiment, the second clamp 53 is hingedly assembled with the second cross bar 52, and a second locking structure 55 is provided between the two for limiting the relative angle between the two. In this embodiment, the second locking structure 55 can be a fastening screw connected between the second cross bar 52 and the second clamp 53. The hinge axis of the two can be directly designed as a bolt and nut connection. By screwing the bolt after adjusting the angle, the hinge position of the second cross bar 52 and the second clamp 53 is pressed against each other, and anti-rotation locking is achieved by friction. No specific limitation is given here.

[0038] During the actual clamping and fixing process, the oscillation barrel 6 is first fixed on the first clamp 43, and then the first clamp 43 is rotated according to the process requirements, and the first clamp 43 is rotated relative to the first cross bar 42. After the angle of the oscillation barrel 6 is determined, the first clamp 43 and the first cross bar 42 are relatively locked by the first locking structure 44 to achieve the installation of the vibration barrel. After that, the ultrasonic vibration rod 7 is partially inserted into the second clamp 53, and the telescopic length of the second cross bar 52 is adjusted. At the same time, the relative angle between the second cross bar 52 and the second clamp 53 is adjusted to make the axis of the second clamp 53 consistent with the axis of the oscillation barrel 6, and then the ultrasonic vibration rod 7 is inserted into the oscillation barrel 6. After it is in place, the second locking structure 55 and the telescopic locking structure 54 are locked front and back to meet the fixed clamping of the ultrasonic vibration rod 7.

[0039] Preferably, in this embodiment, in order to facilitate the fixed connection between the support frame and the vertical shaft 2, the above-mentioned first support rod 4 includes a first shaft sleeve 41 sleeved on the vertical shaft 2, and the above-mentioned first cross bar 42 is fixed on the side wall of the first shaft sleeve 41. In order to prevent the vertical shaft 2 and the shaft sleeve from rotating, a rotation-stop locking structure 8 is connected between the two. Correspondingly, the second support rod 5 includes a second shaft sleeve 51 sleeved on the vertical shaft 2, and the second cross bar 52 is fixed on the side wall of the second shaft sleeve 51. At the same time, a rotation-stop locking structure 8 is also provided between the second cross bar 52 and the second shaft sleeve 51. In this embodiment, the rotation-stop locking structure 8 is implemented in the form of a locking pin. Of course, in other embodiments, a keyway can be provided between the two and a key can be inserted to implement it, or the two can be implemented by threaded assembly or the like, or the shaft sleeve and the vertical shaft 2 can be welded and fixed therebetween, etc., without specific limitation.

[0040] In order to achieve synchronous centrifugation of multiple samples and ensure the balance of the entire device, there are two oscillation barrels 6, which are evenly spaced around the circumference of the vertical shaft 2. Taking the first support rod 4 as an example, the opposite sides of the first sleeve 41 are connected to the first cross bar 42, and the tail ends of the first cross bar 42 are connected to the first clamp 43. An oscillation barrel 6 is fixed on each first clamp 43, and the two oscillation barrels 6 are relatively symmetrically arranged with the axis of the vertical shaft 2 as the axis.

[0041] Of course, in other embodiments, the number of oscillation barrels 6 and first cross bars 42 may be greater, and this is not specifically limited.

[0042] A laser thermometer 9 is also installed on the vertical shaft 2 to monitor the internal temperature of the operating box 1. A control panel 13 is also located on one side of the operating box 1. This control panel 13 integrates a controller, specifically a main control module, a speed module, a speed regulation module, and a position initialization module, which are used to transmit signals to various electrical components. The controller is connected to the reduction motor 3 to control its start and stop, speed, and other functions. The laser thermometer 9 is connected to the controller for real-time monitoring of the internal temperature of the box, ensuring that the ambient temperature meets process requirements. Of course, the laser thermometer 9 can also use other temperature measurement methods and can be fixed to the wall of the operating box 1, without specific limitation. The main control module is used to connect signals with the various modules, receiving and processing data. The speed module displays the operating status of the reduction motor 3. The speed regulation module adjusts the operating status of the reduction motor 3. The position initialization module adjusts the position of the oscillating barrel 6 when the door is opened, ensuring that the oscillating barrel 6 is facing the door each time it is opened, making it easier to remove. Furthermore, the main control module is also signal-connected to an ultrasonic display module and an ultrasonic control module, which are respectively signal-connected to the ultrasonic vibration rod 7. The ultrasonic display module displays the working status of the ultrasonic vibration rod 7, and the ultrasonic control module is used to control the working status of the ultrasonic vibration rod 7.

[0043] During the actual working process, an oscillating liquid (such as glycerin, water, etc.) is flushed into the oscillation barrel 6 and ultrasonic oscillation is used to separate impurities such as photoresist attached to the sample, and under the action of centrifugal rotation, the impurities are separated from the sample to protect the sample with fine structure. At the same time, the above-mentioned ultrasonic oscillation function, centrifugal rotation function, and temperature control function are controlled by independent components respectively, and can be adjusted independently to meet a variety of different process requirements. By combining the oscillation barrel 6 with centrifugal force, the centrifugal phenomenon is used to remove a large area of ​​photoresist and its surface metal from the sample surface during ultrasonic oscillation. Due to the increased centrifugal effect, the present application can reduce the power of ultrasonic oscillation during the stripping process, and has a better overall removal effect on samples with fine structures and photoresist denatured due to processing.

[0044] Finally, it should be noted that the above embodiments are only used to illustrate and not to limit the technical solutions of the present invention. Any equivalent substitutions of the present invention and any modifications or partial substitutions that do not depart from the spirit and scope of the present invention should be included in the scope of protection of the claims of the present invention.

Claims

1. An ultrasonic centrifugal photoresist stripping device for micro-nano processing, characterized in that: The invention comprises a body, on which a vertical shaft is assembled, the axis of the vertical shaft extending in the up-down direction, a horizontal frame extending radially along the vertical shaft connected to the vertical shaft, an oscillation barrel connected to the tail end of the horizontal frame, the axis of the oscillation barrel extending obliquely from bottom to top toward the axis of the vertical shaft, the oscillation barrel having an inner hole for accommodating a stripping liquid, the inner hole comprising an oscillation section, a necking section and a containing section for accommodating a stripped photoresist extending in sequence from top to bottom, the diameters of the containing section and the oscillation section being larger than the size of the necking section, an ultrasonic vibrating rod for inserting into the oscillation barrel from a port of the oscillation barrel is also fixed on the horizontal frame; one end of the vertical shaft is transmission-connected to a rotary drive mechanism, the rotary drive mechanism drives the vertical shaft to rotate around its own axis to drive the detached photoresist in the oscillation barrel to perform centrifugal motion and move into the necking section, the connection between the necking section and the oscillation section and the containing section is connected by a smooth arc transition.

2. The ultrasonic centrifugal photoresist stripping device for micro-nano processing according to claim 1, characterized in that: The horizontal frame is provided with an adjusting structure for adjusting the angle between the axis of the oscillating barrel and the axis of the vertical shaft.

3. The ultrasonic centrifugal photoresist stripping device for micro-nano processing according to claim 2, characterized in that: The cross frame includes a first support rod fixed on the vertical axis, the adjustment structure includes a first clamp connected to the first support rod, the oscillation barrel is fixed in the first clamp, and a first locking structure for limiting the relative angle between the first clamp and the first support rod is also provided.

4. The ultrasonic centrifugal photoresist stripping device for micro-nano processing according to claim 3, characterized in that: The first support rod includes a first sleeve for sleeved on the vertical shaft, and also includes a first cross bar connected to the side wall of the first sleeve, and the first clamp is connected to the tail end of the first cross bar.

5. The ultrasonic centrifugal photoresist stripping device for micro-nano processing according to claim 4, characterized in that: There are more than two first cross bars, which are evenly spaced around the circumference of the first sleeve.

6. The ultrasonic centrifugal photoresist stripping device for micro-nano processing according to claim 3, characterized in that: The cross frame also includes a second support rod fixed on the vertical shaft, the second support rod includes a second shaft sleeve mounted on the vertical shaft, the side wall of the second shaft sleeve is connected to a second cross rod, the tail end of the second cross rod is hinged with a second clamp, and the ultrasonic vibration rod is fixedly inserted in the second clamp.

7. The ultrasonic centrifugal photoresist stripping device for micro-nano processing according to claim 6, characterized in that: The second crossbar comprises two single rods matched with the guiding telescopic sleeves, and a telescopic locking structure for limiting the telescopic length of the second crossbar is provided on the second crossbar.

8. The ultrasonic centrifugal photoresist stripping device for micro-nano processing according to claim 1, characterized in that: The machine body includes an operating box, the vertical shaft is rotatably assembled in the operating box, the rotary drive mechanism is connected to the bottom of the operating box, and a controller is also provided on the operating box. The controller is control-connected to the rotary drive mechanism and the ultrasonic vibration rod.

9. The ultrasonic centrifugal photoresist stripping device for micro-nano processing according to claim 8, characterized in that: The vertical shaft is also provided with a laser thermometer for monitoring the temperature inside the operating box, and the laser thermometer is connected to the controller signal.

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