A target holder assembly for vacuum coating and a vacuum coating apparatus

Abstract

The application provides a target seat assembly for vacuum coating and a vacuum coating device. The target seat assembly is provided with an upper insulating sleeve and a lower insulating sleeve on a target seat. The upper insulating sleeve and the lower insulating sleeve are provided with a first step and a second step. The second step is longer than the first step. The upper end surface of the upper insulating sleeve is higher than the upper end surface of the target seat. When the target material is fixedly connected to the target seat and is pressed against a carbon film, the second step can be elastically deformed under the pressure of the target material, so that the upper end surface of the upper insulating sleeve is always tightly combined with the lower end surface of the target material. Thus, the size deviation can be effectively compensated, the situation that the target material is pressed to death by the insulating sleeve and the carbon film is loosened can be avoided, and the gap between the insulating sleeve and the target material can be avoided, so that the short circuit phenomenon is avoided. Meanwhile, the universality of the insulating sleeve is ensured, and the service life of the insulating sleeve is prolonged.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of vacuum coating machines, in particular to a target seat assembly for vacuum coating and a vacuum coating equipment. BACKGROUND

[0002] In the vacuum coating process, the target seat is a key component for fixing and supporting the target material, and its design directly affects the quality of the film and the stability of the coating process. At present, in the vacuum coating industry, an insulating sleeve is installed on the outside of the target seat, and the upper end of the insulating sleeve needs to be in close contact with the lower end of the installed target material to ensure normal use.

[0003] However, there are at least ten target materials used on a vacuum coating equipment, and the original size or the original size of the threaded part of each target seat has deviation, or the size deviation is caused by wear after long-term use; and the thickness of the carbon film between the target seat and the target material also has size deviation; when maintaining, after disassembling, re-installing, it is easy to install the wrong insulating sleeve, causing rework.

[0004] At this time, the following situations may occur: 1. The insulating sleeve is dead on the target material, although the insulating sleeve is in close contact with the target material, there is a gap between the target seat and the target material, the carbon film in the middle is loose, which will cause poor conduction, the target material will extinguish arc, and cannot work normally; 2. The gap between the insulating sleeve and the target material will cause a sharp discharge phenomenon in the gap during use, which will form a loop with the nearby anode plate, causing a short circuit phenomenon, and the target material or power supply will be burned out. SUMMARY

[0005] Therefore, the purpose of the present application is to provide a target seat assembly for vacuum coating and a vacuum coating equipment to solve the above problems.

[0006] The present application adopts the following scheme:

[0007] The present application provides a target seat assembly for vacuum coating, comprising a target seat for fixing and supporting the target material, characterized in that it further comprises an upper insulating sleeve and a lower insulating sleeve.

[0008] The outer side of the target base is provided with an outer step; the inner side of the upper end of the lower insulation sleeve is upwardly protruded to form a first step; the outer side of the lower end of the upper insulation sleeve is downwardly protruded to form a second step; the lower insulation sleeve and the upper insulation sleeve are sequentially sleeved on the outer periphery of the target base, the lower end surface of the lower insulation sleeve abuts against the end surface of the outer step; the second step is sleeved on the first step, and the lower end surface of the second step abuts against the upper end surface of the lower insulation sleeve; the second step is longer than the first step, and the upper end surface of the upper insulation sleeve is higher than the upper end surface of the target base, which is configured to: when the target material and the target base are fixedly connected and tightly placed on the carbon film, the upper end surface of the upper insulation sleeve is always tightly combined with the lower end surface of the target material under the elastic deformation of the target material under the pressure.

[0009] Further, the upper insulation sleeve and the lower insulation sleeve are formed by polytetrafluoroethylene material.

[0010] Further, the second step is 0.5-1mm longer than the first step.

[0011] Further, the second step is 0.5mm longer than the first step.

[0012] Further, the upper end surface of the target base is provided with a placing groove for placing the carbon film; the lower end surface of the target material is provided with a protruding part matched with the placing groove.

[0013] Further, the upper insulation sleeve, the lower insulation sleeve and the target base are gap-fitted.

[0014] Further, the first step and the second step are gap-fitted.

[0015] A vacuum coating equipment comprising the target material base assembly for fixing and supporting the target material.

[0016] By adopting the above technical scheme, the present application can achieve the following technical effects:

[0017] The application provides a target seat assembly for vacuum coating, which is provided with an upper insulating sleeve and a lower insulating sleeve on a target seat, the upper insulating sleeve and the lower insulating sleeve are provided with a first step and a second step, the second step is longer than the first step, and the upper end surface of the upper insulating sleeve is higher than the upper end surface of the target seat; when the target material is fixedly connected with the target seat and is pressed against a carbon film, the second step can be elastically deformed under the pressure of the target material, so that the upper end surface of the upper insulating sleeve is always tightly combined with the lower end surface of the target material; thus, the size deviation can be effectively compensated, the situation that the target material is pressed by the insulating sleeve and the carbon film is loosened can be avoided, and the gap between the insulating sleeve and the target material can be avoided, so that the short circuit phenomenon is avoided; meanwhile, the universality of the insulating sleeve is ensured, and the service life of the insulating sleeve is prolonged. BRIEF DESCRIPTION OF DRAWINGS

[0018] In order to more clearly illustrate the technical solutions of the embodiments of the application, the following will briefly introduce the drawings needed to be used in the embodiments. It should be understood that the following drawings only show some of the embodiments of the application, and therefore should not be considered as a limitation to the scope. For those skilled in the art, other related drawings can also be obtained from these drawings without creative labor.

[0019] Figure 1 is a structural schematic diagram of a target seat assembly for vacuum coating according to an embodiment of the application;

[0020] Figure 2 is a front view of a target seat assembly for vacuum coating according to an embodiment of the application;

[0021] Figure 3 is Figure 2 is a sectional structural schematic diagram of A-A in FIG. 1;

[0022] FIG. 1 is a structural schematic diagram of a target seat assembly for vacuum coating according to an embodiment of the application; DETAILED DESCRIPTION

[0023] In order to make the purposes, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application but not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative effort should fall into the scope of protection of the present application. Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative effort should fall into the scope of protection of the present application.

[0024] Embodiment

[0025] In combination Figures 1 to 3 As shown in the drawings, the embodiment provides a target material 4 seat assembly for vacuum coating, comprising a target seat 1 for fixing and supporting a target material 4, characterized in that it further comprises an upper insulating sleeve 3 and a lower insulating sleeve 2.

[0026] The outer side of the target seat 1 is provided with an outer step; the inner side of the upper end of the lower insulating sleeve 2 is upwardly protruded to form a first step 6; the outer side of the lower end of the upper insulating sleeve 3 is downwardly protruded to form a second step 7; the lower insulating sleeve 2 and the upper insulating sleeve 3 are sequentially sleeved on the outer periphery of the target seat 1, the lower end surface of the lower insulating sleeve 2 abuts against the end surface of the outer step; the second step 7 is sleeved on the first step 6, and the lower end surface of the second step 7 abuts against the upper end surface of the lower insulating sleeve 2; the second step 7 is longer than the first step 6, and the upper end surface of the upper insulating sleeve 3 is higher than the upper end surface of the target seat 1, the second step 7 is configured to be elastically deformed under the pressure of the target material 4 when the target material 4 is fixedly connected and pressed against the carbon film 5, so that the upper end surface of the upper insulating sleeve 3 is always tightly fitted with the lower end surface of the target material 4.

[0027] Specifically, in the embodiment, the upper end surface of the target seat 1 is provided with a placing groove for placing the carbon film 5; the lower end surface of the target material 4 is provided with a protruding part matched with the placing. The upper insulating sleeve 3, the lower insulating sleeve 2 and the target seat 1 are in minimum gap fit; the first step 6 and the second step 7 are in minimum gap fit; the minimum gap fit is adopted to more accurately position the installation between the upper insulating sleeve 3, the lower insulating sleeve 2 and the target seat 1, improve the stability and precision of the overall structure, and facilitate assembly and disassembly.

[0028] In the embodiment, the upper and lower insulating sleeves 3 and 2 are made of polytetrafluoroethylene material, which has certain elasticity, and is resistant to chemical corrosion, high temperature, aging and has excellent electrical insulation. The thickness of the carbon film 5 is 1mm; the second step 7 is 0.5mm longer than the first step 6; the lower end of the target material 4 is threadedly connected with the target seat 1; during installation, the lower and upper insulating sleeves 2 and 3 are sequentially sleeved and installed on the target seat 1; then the carbon film 5 is placed on the placing groove of the target seat 1, and the thread of the lower end of the target material 4 is screwed into the corresponding thread of the target seat 1. During the screwing of the target material 4, the upper end surface of the upper insulating sleeve 3 is higher than the upper end surface of the target seat 1, so that the target material 4 presses the upper insulating sleeve 3, and the lower end surface of the second step 7 abuts against the upper end surface of the lower insulating sleeve 2, so that the second step 7 is elastically deformed outward until the target material 4 is locked or the carbon film 5 is compressed; and the upper end surface of the upper insulating sleeve 3 is finally tightly attached to the lower end surface of the target material 4. Thus, the size deviation can be compensated to avoid the situation that the target material 4 is locked by the insulating sleeve and the carbon film 5 is loosened, and the gap between the insulating sleeve and the target material 4 is avoided to cause short circuit. Meanwhile, the universality of the insulating sleeve is ensured, and the service life of the insulating sleeve is prolonged.

[0029] The application provides a target material 4 seat assembly for vacuum coating, which is provided with an upper insulating sleeve 3 and a lower insulating sleeve 2 on a target seat 1, the upper and lower insulating sleeves 3 and 2 are provided with a first step 6 and a second step 7, the second step 7 is longer than the first step 6, and the upper end surface of the upper insulating sleeve 3 is higher than the upper end surface of the target seat 1; when the target material 4 is fixedly connected with the target seat 1 and is compressed to the carbon film 5, the second step 7 can be elastically deformed under the pressure of the target material 4, so that the upper end surface of the upper insulating sleeve 3 is always tightly attached to the lower end surface of the target material 4. Thus, the size deviation can be compensated to avoid the situation that the target material 4 is locked by the insulating sleeve and the carbon film 5 is loosened, and the gap between the insulating sleeve and the target material 4 is avoided to cause short circuit. Meanwhile, the universality of the insulating sleeve is ensured, and the service life of the insulating sleeve is prolonged.

[0030] The application also provides a vacuum coating device, which comprises the target material 4 seat assembly for fixing and supporting the target material 4. Through the arrangement of the target material 4 seat assembly, the size deviation can be compensated to avoid the situation that the target material 4 is locked by the insulating sleeve and the carbon film 5 is loosened, and the gap between the insulating sleeve and the target material 4 is avoided to cause short circuit. Meanwhile, during the later maintenance, the wrong installation of the insulating sleeve is avoided after disassembly and reinstallation, the universality of the insulating sleeve makes the maintenance more convenient and fast, and the time and cost of rework are saved.

[0031] The above merely describes the preferred embodiments of the present application, and the protection scope of the present application is not limited to the above-mentioned embodiments. Any technical scheme falling within the concept of the present application falls within the protection scope of the present application.

[0032] In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", and the like indicate the orientation or positional relationship shown in the drawings, and are merely for the purpose of facilitating the description of the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0033] In addition, the terms "first" and "second" are used only for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined with "first" and "second" can explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "a plurality of" is two or more, unless otherwise explicitly specified and limited.

[0034] In the present application, unless otherwise explicitly specified and limited, the terms "mounting", "connection", "connection", "fixing" and the like should be understood broadly, for example, it can be fixed connection, or detachable connection, or integrated; it can be mechanical connection, or electrical connection; it can be directly connected, or indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship between two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0035] In the present application, unless otherwise explicitly specified and limited, the "upper" or "lower" of the first feature to the second feature can include the direct contact of the first and second features, or the contact of the first and second features through another feature between them. Moreover, the "upper", "upper" and "upper" of the first feature to the second feature include the vertical direction of the first feature above and obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The "below", "below" and "below" of the first feature to the second feature include the vertical direction of the first feature below and obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.

Claims

1. A target holder assembly for vacuum coating comprising a target holder for holding and supporting a target material, characterized in that The upper and lower insulating sleeves are further included; The outer side of the target seat is provided with an outer step; the inner side of the upper end of the lower insulating sleeve is upwardly protruded to form a first step; the outer side of the lower end of the upper insulating sleeve is downwardly protruded to form a second step; the lower insulating sleeve and the upper insulating sleeve are sequentially sleeved on the outer periphery of the target seat, the lower end surface of the lower insulating sleeve abuts against the end surface of the outer step; the second step is sleeved on the first step, and the lower end surface of the second step abuts against the upper end surface of the lower insulating sleeve; the second step is longer than the first step, and the upper end surface of the upper insulating sleeve is higher than the upper end surface of the target seat, the second step is configured to be elastically deformed under the pressure of the target material when the target material is fixedly connected and compressed on the carbon film by the target seat, so that the upper end surface of the upper insulating sleeve is always tightly fitted with the lower end surface of the target material.

2. The target material seat assembly for vacuum plating according to claim 1, wherein, The upper and lower insulating sleeves are formed by polytetrafluoroethylene material.

3. The target material seat assembly for vacuum plating according to claim 1, wherein The second step is 0.5-1 mm longer than the first step.

4. The target material seat assembly for vacuum plating according to claim 1, wherein The second step is 0.5 mm longer than the first step.

5. The target assembly for vacuum coating of claim 1, wherein, The upper end surface of the target seat is provided with a placing groove for placing the carbon film; the lower end surface of the target material is provided with a protruding part adapted to the placing groove.

6. The target assembly for vacuum coating of claim 1, wherein, The upper and lower insulating sleeves and the target seat are gap-fitted.

7. The target assembly for vacuum coating of claim 1, wherein, The first step and the second step are gap-fitted.

8. A vacuum coating apparatus, characterized by, The target material seat assembly as claimed in any one of claims 1-7 is used for fixing and supporting the target material.

Images